KR20030095405A - 자외선 및 진공 자외선 용도에서 유용한 중합체-액체 조성물 - Google Patents

자외선 및 진공 자외선 용도에서 유용한 중합체-액체 조성물 Download PDF

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Publication number
KR20030095405A
KR20030095405A KR10-2003-7014719A KR20037014719A KR20030095405A KR 20030095405 A KR20030095405 A KR 20030095405A KR 20037014719 A KR20037014719 A KR 20037014719A KR 20030095405 A KR20030095405 A KR 20030095405A
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South Korea
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poly
monomer units
independently
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molar concentration
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KR10-2003-7014719A
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English (en)
Korean (ko)
Inventor
로저 하르콰일 프렌치
로버트 클래이턴 휄란드
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이 아이 듀폰 디 네모아 앤드 캄파니
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Publication of KR20030095405A publication Critical patent/KR20030095405A/ko
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J3/00—Processes of treating or compounding macromolecular substances
    • C08J3/02—Making solutions, dispersions, lattices or gels by other methods than by solution, emulsion or suspension polymerisation techniques
    • C08J3/09—Making solutions, dispersions, lattices or gels by other methods than by solution, emulsion or suspension polymerisation techniques in organic liquids
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J3/00—Processes of treating or compounding macromolecular substances
    • C08J3/02—Making solutions, dispersions, lattices or gels by other methods than by solution, emulsion or suspension polymerisation techniques
    • C08J3/09—Making solutions, dispersions, lattices or gels by other methods than by solution, emulsion or suspension polymerisation techniques in organic liquids
    • C08J3/091—Making solutions, dispersions, lattices or gels by other methods than by solution, emulsion or suspension polymerisation techniques in organic liquids characterised by the chemical constitution of the organic liquid
    • C08J3/093—Halogenated hydrocarbons
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J3/00—Processes of treating or compounding macromolecular substances
    • C08J3/02—Making solutions, dispersions, lattices or gels by other methods than by solution, emulsion or suspension polymerisation techniques
    • C08J3/09—Making solutions, dispersions, lattices or gels by other methods than by solution, emulsion or suspension polymerisation techniques in organic liquids
    • C08J3/091—Making solutions, dispersions, lattices or gels by other methods than by solution, emulsion or suspension polymerisation techniques in organic liquids characterised by the chemical constitution of the organic liquid
    • C08J3/095—Oxygen containing compounds
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L27/00—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers
    • C08L27/02—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment
    • C08L27/12—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Compositions of derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L29/00—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an alcohol, ether, aldehydo, ketonic, acetal or ketal radical; Compositions of hydrolysed polymers of esters of unsaturated alcohols with saturated carboxylic acids; Compositions of derivatives of such polymers
    • C08L29/10—Homopolymers or copolymers of unsaturated ethers
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D127/00—Coating compositions based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Coating compositions based on derivatives of such polymers
    • C09D127/02—Coating compositions based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Coating compositions based on derivatives of such polymers not modified by chemical after-treatment
    • C09D127/12—Coating compositions based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Coating compositions based on derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J129/00—Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an alcohol, ether, aldehydo, ketonic, acetal, or ketal radical; Adhesives based on hydrolysed polymers of esters of unsaturated alcohols with saturated carboxylic acids; Adhesives based on derivatives of such polymers
    • C09J129/10—Homopolymers or copolymers of unsaturated ethers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2327/00—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers
    • C08J2327/02—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers not modified by chemical after-treatment
    • C08J2327/12—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen; Derivatives of such polymers not modified by chemical after-treatment containing fluorine atoms
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00—Use of organic ingredients
    • C08K5/02—Halogenated hydrocarbons
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00—Use of organic ingredients
    • C08K5/04—Oxygen-containing compounds
    • C08K5/06—Ethers; Acetals; Ketals; Ortho-esters
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L2666/00—Composition of polymers characterized by a further compound in the blend, being organic macromolecular compounds, natural resins, waxes or and bituminous materials, non-macromolecular organic substances, inorganic substances or characterized by their function in the composition
    • C08L2666/28—Non-macromolecular organic substances
    • C08L2666/32—Halogen-containing compounds

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Dispersion Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Wood Science & Technology (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Processes Of Treating Macromolecular Substances (AREA)
KR10-2003-7014719A 2001-05-14 2002-05-14 자외선 및 진공 자외선 용도에서 유용한 중합체-액체 조성물 Withdrawn KR20030095405A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US29071101P 2001-05-14 2001-05-14
US60/290,711 2001-05-14
PCT/US2002/018397 WO2002092670A2 (en) 2001-05-14 2002-05-14 Fluoropolymer compositions comprising a fluor-containing liquid

Publications (1)

Publication Number Publication Date
KR20030095405A true KR20030095405A (ko) 2003-12-18

Family

ID=23117214

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-2003-7014719A Withdrawn KR20030095405A (ko) 2001-05-14 2002-05-14 자외선 및 진공 자외선 용도에서 유용한 중합체-액체 조성물

Country Status (5)

Country Link
EP (1) EP1401923A2 (https=)
JP (1) JP2004535486A (https=)
KR (1) KR20030095405A (https=)
AU (1) AU2002342745A1 (https=)
WO (1) WO2002092670A2 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050145821A1 (en) * 2002-03-06 2005-07-07 French Roger H. Radiation durable organic compounds with high transparency in the vaccum ultraviolet, and method for preparing
AU2003257654A1 (en) * 2002-08-21 2004-03-11 Asahi Glass Company, Limited Ultraviolet-permeable fluoropolymers and pellicles made by using the same

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JPS4928026B1 (https=) * 1965-01-12 1974-07-23
IT1222804B (it) * 1987-10-02 1990-09-12 Ausimont Spa Additivi coadiuvanti al distacco degli stampi di gomme vulcanizzabili mediante perossidi
JP2752393B2 (ja) * 1988-11-10 1998-05-18 旭硝子株式会社 コーティング用含フッ素重合体組成物
JP2718140B2 (ja) * 1989-02-03 1998-02-25 旭硝子株式会社 フッ素系希釈剤
JPH05505634A (ja) * 1990-03-23 1993-08-19 イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニー ガスバリアー樹脂を含むポリマーフォーム
GB9026687D0 (en) * 1990-12-07 1991-01-23 Vascutek Ltd Process for providing a low-energy surface on a polymer
JP2603384B2 (ja) * 1991-10-15 1997-04-23 信越化学工業株式会社 リソグラフィー用ペリクル
JP3229895B2 (ja) * 1992-02-18 2001-11-19 グンゼ株式会社 離型性が優れたチューブ状フィルム
JPH05320615A (ja) * 1992-05-18 1993-12-03 Sumitomo 3M Ltd 物品の水切り乾燥兼表面保護用材料、および、その材料を使用した物品の水切り乾燥兼表面保護方法
EP0584703A1 (en) * 1992-08-28 1994-03-02 E.I. Du Pont De Nemours And Company Protective coatings of perfluorinated polymer solutions
US5356986A (en) * 1992-08-28 1994-10-18 E. I. Du Pont De Nemours And Company Plasticized fluoropolymers
JP2855048B2 (ja) * 1993-05-07 1999-02-10 信越化学工業株式会社 ペリクルの製造方法
JPH07118596A (ja) * 1993-10-25 1995-05-09 Daikin Ind Ltd 撥水撥油剤組成物およびその製法
US5760139A (en) * 1994-04-18 1998-06-02 Yasuhiro Koike Graded-refractive-index optical plastic material and method for its production
US5478905A (en) * 1995-02-06 1995-12-26 E. I. Du Pont De Nemours And Company Amorphous tetrafluoroethylene/hexafluoropropylene copolymers
CN1290879C (zh) * 1995-02-06 2006-12-20 纳幕尔杜邦公司 非晶态四氟乙烯－六氟丙烯共聚物、其制备方法和用途
US5532310A (en) * 1995-04-28 1996-07-02 Minnesota Mining And Manufacturing Company Surfactants to create fluoropolymer dispersions in fluorinated liquids
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US5853894A (en) * 1997-02-03 1998-12-29 Cytonix Corporation Laboratory vessel having hydrophobic coating and process for manufacturing same
US6156389A (en) * 1997-02-03 2000-12-05 Cytonix Corporation Hydrophobic coating compositions, articles coated with said compositions, and processes for manufacturing same
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JP4132282B2 (ja) * 1997-10-02 2008-08-13 旭硝子株式会社 屈折率分布型光学樹脂材料
JP4106723B2 (ja) * 1998-01-27 2008-06-25 旭硝子株式会社 反射防止フィルタ用コーティング組成物
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Also Published As

Publication number Publication date
WO2002092670A2 (en) 2002-11-21
JP2004535486A (ja) 2004-11-25
AU2002342745A1 (en) 2002-11-25
EP1401923A2 (en) 2004-03-31
WO2002092670A3 (en) 2003-11-13

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PA0105 International application

Patent event date: 20031113

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
PC1203 Withdrawal of no request for examination
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid