KR20030073693A - Surface Modification Process for Enhancing Wear Resistance of Tools Using Ion Mixing Technology - Google Patents

Surface Modification Process for Enhancing Wear Resistance of Tools Using Ion Mixing Technology Download PDF

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Publication number
KR20030073693A
KR20030073693A KR1020020013369A KR20020013369A KR20030073693A KR 20030073693 A KR20030073693 A KR 20030073693A KR 1020020013369 A KR1020020013369 A KR 1020020013369A KR 20020013369 A KR20020013369 A KR 20020013369A KR 20030073693 A KR20030073693 A KR 20030073693A
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South Korea
Prior art keywords
ions
target
plasma
matrix
tools
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KR1020020013369A
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Korean (ko)
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강석환
전중환
김홍수
김용진
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(주) 유니플라텍
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Publication of KR20030073693A publication Critical patent/KR20030073693A/en

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/48—Ion implantation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon
    • C23C14/0611—Diamond
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2228/00—Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
    • B23B2228/10—Coatings

Abstract

PURPOSE: A method for improving wear resistance of tools using mixed ion injection is provided to improve wear resistance and workability of precision tools using mixed ion injection capable of injecting gas or metal ions to be added to matrix to a desired depth. CONSTITUTION: The method for improving wear resistance of tools using mixed ion injection comprises the processes of charging a target into vacuum chamber; and forming an electric field using high voltage pulser, wherein the surface of the target is hardened by forming dynamic plasma sheath around the target while pulse is being applied to the target, directly pulling positive ions inside plasma using the minus high voltage pulse applied target so that the positive ions are naturally applied perpendicularly to all surfaces of the target, thereby colliding ions having energy corresponding to the voltage with the target at a fast rate so that the ions are penetrated into the surface of the target in a depth of thousands angstrom, wherein plasma having gas ions is formed as a plasma source such as RF and hot-filament, plasma having metal ions is formed as metal ion source, the two types ion are mixed in the chamber so that a mixed layer of metal and gas ions is formed on the surface of workpiece, and wherein the ions are penetrated into the matrix in a depth of thousands angstrom by forming an electric field using high voltage pulser after charging a matrix into the vacuum chamber, thereby forming plasma sheath around the matrix so that desired ions are collided with the surface of the matrix at a high speed.

Description

혼합이온주입을 이용한 공구의 내마모성 향상기술 {Surface Modification Process for Enhancing Wear Resistance of Tools Using Ion Mixing Technology}Surface Modification Process for Enhancing Wear Resistance of Tools Using Ion Mixing Technology}

본 발명은 복잡한 형상을 가지는 공구류에 DLC(diamond-like carbon), diamond, c-BN, TiC, TiN, TiAlN 등의 초경피막을 이온주과 박막형성을 통하여 표면경도를 향상시키고 내마모성 및 작업성을 개선시키기 위한 것이다.The present invention improves the surface hardness and wear resistance and workability by forming ion-carrying films and thin films such as DLC (diamond-like carbon), diamond, c-BN, TiC, TiN, TiAlN, etc. It is to let.

초경피막 제조기술은 크게 PVD와 CVD 기술로 양분되며, 피막의 종류와 용도에 따라 적합한 기술을 채택하게 된다. 예를 들어 TiN, TiC, TiCN, TiAlN 등의 코팅에는 magnetron sputtering이나 cathodic arc ion plating과 같은 PVD 기술이 유리하며, DLC, Al2O3등의 코팅에는 CVD 기술이 적합하다고 생각된다. 초경피막 코팅에 국한하여 생각해볼 때 국내에서는 PVD 기술이 보다 널리 보급되어 있으며, CVD의 경우에는 일부 열처리 업체에서 TiCN, Al2O3등의 코팅에 활용하고 있기는 하지만 그 저변이 매우 좁다. PVD 기술의 경우에도 코팅층의 밀착성이나 기계적 성질 등 품질 수준이 아직 미흡하여 고속절삭 공구류와 같은 가혹한 조건에서 사용되는 부품을 처리하기에는 충분치 못하며, 주로 장식용 그리고 그다지 가혹하지 않은 환경에서 사용되는 기계 부품 등에 주로 적용하고 있는 실정이다.Carbide coating manufacturing technology is largely divided into PVD and CVD technology, and adopts a suitable technology according to the type and use of the coating. For example, PVD techniques such as magnetron sputtering or cathodic arc ion plating are advantageous for coatings such as TiN, TiC, TiCN, TiAlN, and CVD techniques are suitable for coating such as DLC and Al 2 O 3 . Considering only the cemented carbide coating, PVD technology is more widely used in Korea. In the case of CVD, some heat treatment companies use TiCN, Al 2 O 3, etc., but the base is very narrow. In the case of PVD technology, the level of adhesion and mechanical properties of the coating layer is still insufficient, so it is not sufficient to process parts used in harsh conditions such as high-speed cutting tools, and is mainly used for decorative parts and mechanical parts used in less severe environments. It is being applied.

본 발명의 목적은 혼합이온주입기술을 이용하여 공구류에 DLC(diamond-like carbon), diamond, c-BN, TiC, TiN, TiAlN 등의 초경피막을 이온주입 및 증착시켜 수명을 2배이상 이상 증가시키는 것이다.The purpose of the present invention is to increase the lifespan by more than two times by ion implanting and depositing cemented carbide films such as DLC (diamond-like carbon), diamond, c-BN, TiC, TiN, TiAlN, etc. It is to let.

종래의 이온주입 기술이 단순히 금속 또는 가스의 단일 이온주입만 가능하였다면 본 발명은 가스이온 및 금속이온을 혼합하여 원하는 소재 표면에 혼합층을 형성시킬 수 있다. 즉, 종래기술이 Ti, Cr, Al, Zr 등의 금속이온이나, N2, O2, Ar, CH4등의 가스이온의 단순이온주입 또는 증착에 그쳤지만 본 발명은 이러한 이온을 혼합하여 TiN, TiCN, TiAlN, CrN, Me-DLC 등의 혼합층을 형성시켜 초경, 내마모, 윤활성 등의 소재 요구 특성에 맞는 기능을 가진 박막 형성과 표면개질이 가능하다. 뿐만 아니라 개질하고자 하는 표면에 가스이온주입으로 밀착력을 증대시킬 수 있을 뿐만 아니라, 다기능성의 박막과 표면개질층이 요구되는 경우 각 기능에 맞는 혼합층을 다층으로 형성시킬 수 있다.If the conventional ion implantation technique was only capable of single ion implantation of metal or gas, the present invention can mix gas ions and metal ions to form a mixed layer on the desired material surface. In other words, the prior art is only a simple ion implantation or deposition of metal ions, such as Ti, Cr, Al, Zr, and gas ions, such as N2, O2, Ar, CH4, etc. The present invention is mixed with these ions, TiN, TiCN, By forming a mixed layer of TiAlN, CrN, Me-DLC, etc., it is possible to form a thin film and modify the surface to meet the material characteristics such as cemented carbide, abrasion resistance, and lubricity. In addition, the adhesion to the surface to be modified can be increased by gas ion injection, and when a multifunctional thin film and a surface modification layer are required, a mixed layer for each function can be formed in a multilayer.

도 1은 본 발명의 기본 개념도1 is a basic conceptual view of the present invention

도 2는 혼합이온주입을 이용한 금속과 가스 이온의 복합층에 대한 개념도2 is a conceptual diagram of a composite layer of metal and gas ions using mixed ion implantation

본 발명은 진공챔버에 Taget를 장입한 후 High voltage pulser를 이용하여 전기장을 형성하면, 펄스가 가해지는 동안 Target주위에 역동적인 plasma sheath가 형성되고 마이너스 고압펄스가 가해진 Target이 직접 플라즈마 안에 있는 양이온을 끌어당겨 자연스럽게 Target의 모든 면에 대하여 가장 이상적인 입사각인 수직으로 작용되어 그 전압에 상응하는 에너지를 가진 이온이 빠른속도로 Target에 충돌함으로써 표면 내로 수천 옹스트롱 깊으로 들어가 표면경화를 일으키는 방법이다.According to the present invention, when a taget is charged into a vacuum chamber and an electric field is formed using a high voltage pulser, a dynamic plasma sheath is formed around a target while a pulse is applied, and a target to which a negative high pressure pulse is applied is directly exposed to a cation in the plasma. It is a method of pulling and naturally acting vertically, which is the ideal angle of incidence for all sides of the target, causing ions with energies corresponding to their voltage to strike the target at high speed, causing surface hardening to reach thousands of angstroms deep into the surface.

여기서 가스이온을 가진 플라즈마는 RF, Hot-Filament 등의 플라즈마 소스로 형성이 가능하며, 금속이온을 가진 플라즈마는 금속이온소스로 형성이 가능하다. 이 두 종류의 이온은 챔버 내에서 혼합되어 소재 표면에는 금속과 가스이온의 혼합층이 형성된다.Here, the plasma with gas ions may be formed by a plasma source such as RF or hot-filament, and the plasma with metal ions may be formed by a metal ion source. These two types of ions are mixed in the chamber to form a mixed layer of metal and gas ions on the surface of the material.

도 1은 본 발명의 기본 개념도이다. 혼합이온주입방식은 진공 챔버에 모재를 장입한 후 High voltage pulser를 이용하여 전기장을 형성하면 모재 주위에 plasma sheath가 형성이 되어 원하는 이온이 고속으로 모재의 표면에 충돌함으로써 수천 옹스트롱 깊이로 들어간다. 복잡한 소재의의 복잡한 형상에 균일하게 코팅처리도 가능하며 고경도 고강도의 표면 처리가 가능하다.1 is a basic conceptual diagram of the present invention. In the mixed ion injection method, after charging the base material into the vacuum chamber and forming an electric field using a high voltage pulser, a plasma sheath is formed around the base material, and the desired ions collide with the surface of the base material at high speed to go into thousands of angstroms. It is possible to apply uniform coating to complex shape of complex material and to make surface treatment of high hardness and high strength.

도2는 공구 표면의 복합층에 대한 개념도이다. 혼합이온주입을 이용한 복합층 박막은 표면층에 단위기술로는 구현하기 힘든 복합적인 기능을 부여한다.2 is a conceptual diagram of a composite layer of a tool surface. Composite layer thin film using mixed ion implantation gives complex function to surface layer which is difficult to realize by unit technology.

여기서 DLC(diamond-like carbon), diamond, c-BN, TiC, TiN, TiAlN 등의 표면경화층은 혼합이온주입 기술로 복잡한 형상에 균일하게 코팅되어질 수 있으며, 다층막을 형성하여 공구에 복합적 기능을 부여해 줄 수 있는 것이다.Here, surface hardening layers such as DLC (diamond-like carbon), diamond, c-BN, TiC, TiN, TiAlN, etc. can be uniformly coated on complex shapes by mixed ion implantation technology. It can be given.

기존의 이온주입은 2차원적인 형태로 이루어지며, 3차원적인 이온주입이 필요서틸팅 및 로테이팅의 구계구동에 의해 이온주입이 시행되었으나, 본 발명은 복잡하고 까다로운 삼차원형태를 지니는 공구에 틸팅 및 로테이팅의 기계구동을 거치지 않고 균일한 이온주입 및 코팅처리가 가능하여 그 수명을 2배 이상 향상시킬 수 있으며, 상온공정이므로 고온에 의한 모재의 특성저하가 전혀 없다. 또한 이온빔에 의한 이온주입에 비해 장치가 매우 쉽고 경제적이며 환경오염 부산물이 전혀없는 친환경적 건식기술이다.Conventional ion implantation is made in a two-dimensional form, requires a three-dimensional ion implantation ion implantation was carried out by the old system of the tilting and rotation, but the present invention is tilted to a tool having a complex and difficult three-dimensional form Uniform ion implantation and coating treatment is possible without going through mechanical operation of rotation, and its lifespan can be improved by more than 2 times. Since it is a normal temperature process, there is no deterioration of characteristics of the base metal due to high temperature. In addition, compared to ion implantation by ion beam, the device is very easy and economical and it is an eco-friendly dry technology with no environmental pollution by-products.

또한 본 기술을 이용한 다층막 형성은 CVD, PVD, 비금속 이온주입법과 같은 단위기술로 적용이 불가능한 혼합층을 다층으로 형성시켜 줄수 있을 뿐만 아니라, 복잡한 형상을 지는 공구에도 복합적 기능을 부여해 줄 수 있다.In addition, multi-layer film formation using the present technology can not only form a multi-layered mixed layer that cannot be applied by unit techniques such as CVD, PVD, or non-metal ion implantation, but also can give a complex function to a tool having a complicated shape.

Claims (4)

PCB, 금속 가공등에 사용되는 공구류의 표면처리에 있어서, 복잡 다단하고 형상이 큰 물체에 동시에 균일하게 이온주입 및 코팅하는 방법,In the surface treatment of tools used for PCB, metal processing, etc., a method of ion implantation and coating uniformly on complex and large objects at the same time, 상기 이온주입 처리에 있어서, 복합특성을 요구하는 경우에 표면 다층 구성(Multi-Layer)을 통해 대응시키는 기술,In the ion implantation process, when a complex characteristic is required, a technique for responding through a surface multi-layer configuration, 상기 복잡한 형상을 갖는 공구의 플라즈마 이온주입 처리시 발생할 수 있는 아킹(Arcing) 억제방안,Arking suppression method that may occur during the plasma ion implantation process of the tool having a complex shape, 상기 금속 및 가스 플라즈마의 혼합층을 형성시켜 이온주입 시키기 위한 Ion Mixing 기술.Ion mixing technology for ion implantation by forming a mixed layer of the metal and gas plasma.
KR1020020013369A 2002-03-12 2002-03-12 Surface Modification Process for Enhancing Wear Resistance of Tools Using Ion Mixing Technology KR20030073693A (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58181864A (en) * 1982-04-16 1983-10-24 Sumitomo Electric Ind Ltd Surface treatment method
JPH01168856A (en) * 1987-12-23 1989-07-04 Agency Of Ind Science & Technol Method for case-hardening steel
JPH02125861A (en) * 1988-11-01 1990-05-14 Shinko Seiki Co Ltd Formation of coating film on surface of material to be treated
KR920009270A (en) * 1990-10-12 1992-05-28 김지동 Electronic fluorescent ballast
JPH0978238A (en) * 1995-09-08 1997-03-25 Kobe Steel Ltd Surface hardening method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58181864A (en) * 1982-04-16 1983-10-24 Sumitomo Electric Ind Ltd Surface treatment method
JPH01168856A (en) * 1987-12-23 1989-07-04 Agency Of Ind Science & Technol Method for case-hardening steel
JPH02125861A (en) * 1988-11-01 1990-05-14 Shinko Seiki Co Ltd Formation of coating film on surface of material to be treated
KR920009270A (en) * 1990-10-12 1992-05-28 김지동 Electronic fluorescent ballast
JPH0978238A (en) * 1995-09-08 1997-03-25 Kobe Steel Ltd Surface hardening method

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