KR20030044282A - Semiconductor package manufacturing equipment having tray auto sending apparatus and the tray auto sending method - Google Patents

Semiconductor package manufacturing equipment having tray auto sending apparatus and the tray auto sending method Download PDF

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Publication number
KR20030044282A
KR20030044282A KR1020010074991A KR20010074991A KR20030044282A KR 20030044282 A KR20030044282 A KR 20030044282A KR 1020010074991 A KR1020010074991 A KR 1020010074991A KR 20010074991 A KR20010074991 A KR 20010074991A KR 20030044282 A KR20030044282 A KR 20030044282A
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South Korea
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tray
semiconductor package
stacked
unit
trays
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KR1020010074991A
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Korean (ko)
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조희록
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삼성전자주식회사
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Publication of KR20030044282A publication Critical patent/KR20030044282A/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67121Apparatus for making assemblies not otherwise provided for, e.g. package constructions
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67092Apparatus for mechanical treatment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67242Apparatus for monitoring, sorting or marking
    • H01L21/67259Position monitoring, e.g. misposition detection or presence detection
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706Mechanical details, e.g. roller, belt
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773Conveying cassettes, containers or carriers

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • De-Stacking Of Articles (AREA)

Abstract

PURPOSE: Semiconductor package fabricating equipment having an apparatus for automatically transferring a tray is provided to prevent the whole equipment from being stopped by automatically supplying and ejecting the tray. CONSTITUTION: A trimming/forming unit separates a lead frame material into pieces. A plurality of vacant trays having each separated semiconductor package are stacked in a supply unit(5). A plurality of trays, which include each separate semiconductor package transferred from the supply, are stacked in an ejection unit(7). A tray transfer unit(20) automatically supplies the plurality of vacant trays to the supply unit and automatically ejects the plurality of trays stacked in the ejection unit.

Description

트레이 자동반송장치를 갖는 반도체 패키지 제조장비 및 그 트레이 자동반송방법{SEMICONDUCTOR PACKAGE MANUFACTURING EQUIPMENT HAVING TRAY AUTO SENDING APPARATUS AND THE TRAY AUTO SENDING METHOD}Semi-conductor package manufacturing equipment with tray automatic transfer device and tray automatic transfer method {SEMICONDUCTOR PACKAGE MANUFACTURING EQUIPMENT HAVING TRAY AUTO SENDING APPARATUS AND THE TRAY AUTO SENDING METHOD}

본 발명은 트레이 자동반송장치를 갖는 반도체 패키지의 제조장비 및 그 트레이의 자동반송방법에 관한 것으로서, 더욱 상세하게는 복수의 빈 트레이를 자동으로 공급시킴과 아울러 리드프레임자제로부터 낱개로 분리된 반도체 패키지를 삽입시킨 복수의 트레이를 자동으로 인출시키는 트레이 자동반송장치를 갖는 반도체 패키지의 제조장비 및 그 트레이의 자동반송방법에 관한 것이다.The present invention relates to a manufacturing apparatus for a semiconductor package having a tray automatic transfer device and an automatic transfer method of the tray, and more particularly, to a semiconductor package which is automatically supplied with a plurality of empty trays and separately separated from a lead frame material. The present invention relates to a manufacturing apparatus for a semiconductor package having a tray automatic transfer device for automatically withdrawing a plurality of trays into which a plurality of trays are inserted, and to an automatic transfer method of the tray.

일반적으로 반도체 패키지 제조공정은 소잉공정, 와이어본딩공정, 몰딩 공정 및 트림/포밍공정을 거치게 되는데, 이와 같이 트림/포밍 공정까지 거친 반도체 패키지는 리드프레임자재로부터 분리됨으로서 다음 공정을 위해서는 튜브나 트레이 등에 낱개로 분리된 반도체 패키지를 삽입시키거나 안착시켜 다음 공정으로 이송된다.In general, semiconductor package manufacturing process goes through sawing process, wire bonding process, molding process, and trim / forming process.Semi-conductor package, which has gone through trim / forming process, is separated from lead frame material. The separated semiconductor packages are inserted or seated and transferred to the next process.

상술한 바와 같은 반도체 패키지를 안착시키기 위한 트레이의 로딩장치는 반도체 패키지가 안착되지 않은 빈 트레이가 다수 적층된 공급부에서 하부에 위치한 하나의 트레이가 이송수단에 의해 이송되고, 이송된 하나의 트레이에는 트림/포밍 공정을 마친 반도체패키지가 흡착수단에 의해 이송되어 상기 트레이에 순차적으로 안착된다.In the tray loading device for seating the semiconductor package as described above, one tray located at the lower part of the supply unit in which a plurality of empty trays on which the semiconductor package is not seated is stacked is transferred by a conveying means, and the one tray conveyed is trimmed. After completion of the forming process, the semiconductor package is transported by the adsorption means and sequentially placed in the tray.

이와 같이 빈 트레이에 반도체 패키지가 모두 안착되면 다시 이송수단에 의해 이송되어 배출부에 적층시킨다.As such, when all the semiconductor packages are seated in the empty trays, the semiconductor packages are again transferred by the transfer means and stacked on the discharge unit.

그와 같은 구성으로 국내 공개특허공보(공개번호 : 특1998-026359호, 공개일자: 1998년 07월 15일, 발명의 명칭 : 반도체 패키지 제조장비의 트레이 로딩장치)에 개시된 바 있다.Such a configuration has been disclosed in Korean Patent Publication (Publication No .: 1998-026359, Publication Date: July 15, 1998, the title of the invention: the tray loading device of the semiconductor package manufacturing equipment).

그러나, 상술한 바와 같이 구성되는 종래의 반도체 패키지 제조장비에서는 상기 공급부에 다수개가 적층된 빈 트레이 들을 사람이 직접 얹어 놓고 상기 공급부를 통해 공급되어 그 트레이 내부에 트림/포밍 공정을 마친 반도체 패키지를 안착시킨 트레이 들이 상기 배출부에 적층되면 다시 사람이 그 트레이들을 들어내는 작업에 의함에 따라 트레이를 공급하고 배출시키는 작업을 행할 경우에는 설비 전체를 중단시켜야만 하는 문제점이 있다.However, in the conventional semiconductor package manufacturing equipment configured as described above, a person directly places a plurality of empty trays stacked on the supply unit and is supplied through the supply unit to mount a semiconductor package after the trimming / forming process is completed inside the tray. When the trays are stacked on the discharge unit, when the tray is supplied and discharged by a person, the entire facility must be stopped.

또한, 처리된 반도체 패키지의 처리상태를 확인하고자 할 경우에도 설비 전체를 중단시킨 후 그 배출부에 적층된 트레이를 들어내어 반도체패키지를 확인하게 됨에 따라 이 또한 전체 설비의 로스(LOSS)로 작용하게 된다는 문제점이 있다.In addition, in order to check the processing status of the processed semiconductor package, the entire equipment is stopped and the tray stacked on the discharge part is lifted to check the semiconductor package, which also acts as a loss of the entire equipment. There is a problem.

따라서, 본 발명은 상술한 문제점을 해결하기 위하여 안출 된 것으로서, 본 발명의 첫 번째 목적은 트레이의 공급 및 배출동작을 자동으로 행하도록 구현함에 따라 설비 전체를 중지시키는 것을 해소하도록 하는 트레이 자동반송장치를 갖는 반도체 패키지 제조장비를 제공하는 데 있다.Accordingly, the present invention has been made to solve the above-described problems, the first object of the present invention is to implement the automatic supply and discharge operation of the tray tray automatic transport apparatus to eliminate the stop of the entire facility It is to provide a semiconductor package manufacturing equipment having.

본 발명의 두 번째 목적은 처리된 반도체 패키지의 품질상태를 확인 할 경우 설비 전체를 중지시키는 것을 해소시키는 트레이 자동반송장치를 갖는 반도체 패키지 제조장비를 제공하는 데 있다.It is a second object of the present invention to provide a semiconductor package manufacturing apparatus having a tray automatic transfer device which eliminates the suspension of the entire installation when checking the quality state of the processed semiconductor package.

상술한 목적을 달성하기 위하여 본 발명은 공급되는 몰딩된 리드프레임 자재를 트림/포밍 작업을 행하여 낱개로 분리시키는 트림/포밍작업부와; 상기 트림/포밍작업부를 통해 처리된 낱개의 반도체 패키지들이 안착될 빈 트레이가 다수 적층되어 위치하는 공급부와; 상기 공급부로부터 이송되어 상기 트림/포밍작업부를 통해 처리된 낱개의 반도체 패키지들을 안착시킨 트레이가 다수 적층되는 배출부 및;상기 공급부에 복수의 빈 트레이를 자동으로 공급하고, 상기 배출부에 적층된 복수의 트레이를 자동으로 인출시키는 트레이반송수단을 포함한다.In order to achieve the above object, the present invention comprises a trim / forming operation for separating the molded lead frame material supplied by the trim / forming operation individually; A supply unit in which a plurality of empty trays on which the individual semiconductor packages processed through the trim / forming operation unit are seated are stacked; A discharge part configured to stack a plurality of trays which are transported from the supply part and seated individual semiconductor packages processed through the trim / forming work part; a plurality of empty trays are automatically supplied to the supply part, and a plurality of stacked parts are stacked on the discharge part It includes a tray conveying means for automatically withdrawing the tray of the.

상기 트레이반송수단은 상기 대기부 및 배출부로 통하도록 설치되는 제1,2이송수단 및; 상기 제1,2이송수단에 연결되어 직선 왕복운동이 가능하도록 설치되는 제1,2슬라이더를 포함하며, 상기 제1,2슬라이더는 “ㄷ ”자로 형성된다.The tray conveying means includes first and second conveying means installed to communicate with the atmospheric portion and the discharge portion; And first and second sliders connected to the first and second transfer means and installed to enable linear reciprocating motion, and the first and second sliders are formed of “c”.

상기 트레이반송수단이 설치된 양측에는 이상물체의 접근상태를 감지하여 감지상태에서는 상기 트레이반송수단의 가동을 중단하도록 하는 감지센서가 추가로 구성되며, 상기 감지센서는 광센서로 하고, 감지 영역을 확보하도록 바형태를 취한다.On both sides of the tray conveying means is installed a sensing sensor for detecting the approach state of the abnormal object to stop the operation of the tray conveying means in the sensing state, the sensing sensor is an optical sensor, and secures the sensing area Take the form of a bar.

다음 상술한 트레이반송수단에 의해 소정의 단으로 적층되어진 복수의 빈 트레이를 소정의 위치에서 대기하고 있는 제1슬라이더의 상측에 공급하는 제1단계와; 그 상면에 복수의 빈 트레이를 공급받은 상기 제1슬라이더를 이송수단에 의해 공급부로 이송시킨 후 다시 초기의 상태로 복귀시키는 제2단계와; 상기 공급부에 공급된 빈 트레이가 소정의 위치에 이송되어 트림/포밍작업부를 통해 낱개로 분리된 반도체 패키지들을 안착시킨 트레이를 배출부로 이송시키는 제3단계 및; 상기 배출부로 제2슬라이더가 이송되어 상기 배출부에 적층된 복수의 트레이를 안착시킨 후 인출부로 인출시키는 제4단계를 반복하여 행하는 트레이 반송방법에 의한다.A first step of supplying a plurality of empty trays stacked in predetermined stages by the above-mentioned tray conveying means to the upper side of the first slider waiting at a predetermined position; A second step of returning the first slider supplied with a plurality of empty trays to the supply part by a conveying means and then returning to the initial state again; A third step of transferring the tray on which the empty trays supplied to the supply unit are transferred to a predetermined position and seating the semiconductor packages individually separated through the trim / forming operation unit to the discharge unit; The second slider is transferred to the discharge unit, and the tray is transported by repeating the fourth step of seating the plurality of trays stacked on the discharge unit and withdrawing the discharge unit.

도 1은 본 발명의 일 실시 예에 의한 트레이 자동반송장치가 구성된 반도체 패키지 제조장비의 구성을 도시한 일부 사시도,1 is a partial perspective view showing the configuration of a semiconductor package manufacturing equipment is configured tray automatic transfer apparatus according to an embodiment of the present invention,

도 2는 상기 도 1의 트레이 자동반송장치의 구성을 확대해서 도시한 사시도이다.FIG. 2 is an enlarged perspective view of the configuration of the tray automatic transfer device of FIG. 1.

<도면의 주요 부분에 대한 부호의 설명><Explanation of symbols for the main parts of the drawings>

1 : 본체1a : 개구1: Body 1a: Opening

1b : 받침판3 : 트림/포밍작업부1b: Support plate 3: trim / forming work part

5 : 공급부7 : 배출부5 supply part 7 discharge part

9 : 대기부11 : 인출부9: waiting part 11: withdrawing part

13a,13b : 제1,2리프트핀20 : 트레이반송수단13a, 13b: 1st, 2nd lift pin 20: Tray conveyance means

21,23 : 제1,2이송수단25,27 : 제1,2슬라이더21,23: 1st, 2nd transfer means 25,27: 1st, 2nd slider

29 :감지센서T : 트레이29: Sensor T: Tray

이하, 첨부된 도면 도 1 및 도 2를 참조로 하여 본 발명의 일 실시 예에 의한 구성 및 작용에 대해서 상세히 설명한다.Hereinafter, with reference to the accompanying drawings, Figures 1 and 2 will be described in detail the configuration and operation according to an embodiment of the present invention.

도 1은 본 발명의 일 실시 예에 의한 트레이 자동반송장치가 마련된 반도체 패키지 제조장비의 구성을 도시한 전체구성도, 도 2는 상기 도 1의 트레이 자동반송장치의 구성을 확대 도시한 사시도이다.1 is an overall configuration diagram showing the configuration of a semiconductor package manufacturing apparatus equipped with a tray automatic transport apparatus according to an embodiment of the present invention, Figure 2 is a perspective view showing an enlarged configuration of the tray automatic transport apparatus of FIG.

상기 도면에 도시된 바와 같이 설비의 외관을 작업하는 본체(1)가 있고, 상기 본체(1)의 상부측에는 도시되지 않은 리드프레임자재를 공급받아 트림/포밍 작업을 행하여 낱개로 분리시키는 트림/포밍작업부(3)가 마련되고, 상기 트림포밍작업부(3)의 하측에는 상기 트림/포밍작업부(3)를 통해 처리된 낱개의 반도체 패키지들이 안착될 트레이(T)가 다수 적층되어 대기 상태를 이루는 공급부(5) 및 상기 공급부(5)로부터 이송되어 상기 트림/포밍작업부(5)를 통해 처리된 낱개의 반도체 패키지들을 안착시킨 복수의 트레이(T)들이 적층되는 배출부(7)가 마련된다.As shown in the figure there is a main body (1) for working the appearance of the equipment, the upper side of the main body (1) is supplied with a lead frame material (not shown) to trim / forming the trim / forming to separate The work part 3 is provided, and a plurality of trays T on which the individual semiconductor packages processed through the trim / forming work part 3 are stacked are stacked below the trim forming work part 3. And a discharge part 7 in which a plurality of trays T on which the plurality of trays, which are transported from the supply part 5 and the semiconductor part processed through the trim / forming work part 5, are stacked, are stacked. Prepared.

상기 공급부(5) 및 배출부(7)가 마련된 위치의 본체(1)는 개구(1a)가 작업되고, 그 개구(1a)의 하측에는 상기 공급부(5) 및 배출부(7)와 일직선을 이루어 상기 공급부(5)로 공급될 복수의 트레이(T)를 대기상태를 이루도록 하고, 상기 배출부(7)에 적층된 복수의 트레이(T)를 인출시키는 대기부(9) 및 인출부(11)를 마련하는 받침판(1b)이 연장되어 본체(1)의 외측으로 돌출 작업된다.The opening 1a is operated in the main body 1 at the position where the supply part 5 and the discharge part 7 are provided, and the supply part 5 and the discharge part 7 are aligned with the supply part 5 and the discharge part 7 below the opening part 1a. And a plurality of trays T to be supplied to the supply unit 5 in a standby state, and a standby unit 9 and an extraction unit 11 which draw out a plurality of trays T stacked on the discharge unit 7. ) Supporting plate (1b) is extended to protrude to the outside of the main body (1).

상기 공급부(5) 및 배출부(7)에는 그 상측에 적층된 트레이(T)를 승하강시키도록 도시되지 않은 승강구동수단에 의해 상하로 동작하는 복수의리프트핀(13a,13b)이 설치되고, 상기 공급부(5) 및 대기부(9)와, 상기 배출부(7) 및 인출부(11)에는 상기 공급부(5)에 빈 트레이(T)를 자동으로 공급하고, 상기 배출부(7)에 적층된 그 내부에 반도체 패키지가 안착된 트레이(T)를 자동으로 인출시키는 트레이반송수단(20)이 설치된다.The supply part 5 and the discharge part 7 are provided with a plurality of lift pins 13a and 13b which are operated up and down by lifting and lowering driving means, not shown, to lift and lower the tray T stacked thereon. The empty portion T is automatically supplied to the supply portion 5 to the supply portion 5 and the standby portion 9, the discharge portion 7, and the extraction portion 11, and the discharge portion 7. The tray conveying means 20 which automatically draws out the tray T on which the semiconductor package is mounted is installed in it.

상기 트레이반송수단(20)은 상기 공급부(5) 및 상기 대기부(9)와, 상기 배출부(7) 및 인출부(11)에 걸쳐 설치되는 복수의 제1,2이송수단(21,23)과, 상기 제1,2이송수단에 연결되어 직선 왕복운동이 가능하도록 설치되는 제1,2슬라이더(25,27)로 구성된다.The tray conveying means 20 includes a plurality of first and second conveying means 21 and 23 provided over the supply part 5 and the waiting part 9, and the discharge part 7 and the withdrawal part 11. ) And first and second sliders 25 and 27 connected to the first and second transfer means and installed to enable linear reciprocating motion.

상기 제1,2이송수단(21,23)은 도 2에 도시된 바와 같이 에어실린더(21a,23a) 및 상기 제1,2에어실린더(21a,23a)에 공급되는 유압에 의해 직선 이동하는 제1,2실린더이동체(21b,23b)로 구성함이 바람직하다.The first and second transfer means 21 and 23 are linearly moved by hydraulic pressure supplied to the air cylinders 21a and 23a and the first and second air cylinders 21a and 23a, as shown in FIG. It is preferable to comprise the 1, 2 cylinder moving bodies 21b and 23b.

또한, 상기 제1,2이송수단(21,23)은 주지된 바와 같이 동력을 발생시키는 모터와, 상기 모터의 축과 연결되어 소정의 방향으로 정역회전을 하는 볼스크루축과, 상기 볼스크루축에 외감되어 직선 왕복이동하는 이송너트로 하여 상기 이송너트에 상기 제1,2슬라이더(25,27)를 연결시켜 상기 제1,2슬라이더(25,27)가 직선 왕복 이동하도록 구성할 수 도 있을 것이다.In addition, the first and second transfer means (21, 23) is a motor for generating power as well known, a ball screw shaft connected to the shaft of the motor to perform a forward and reverse rotation in a predetermined direction, and the ball screw shaft The first and second sliders 25 and 27 may be configured to be linearly reciprocated by connecting the first and second sliders 25 and 27 to the transfer nut by using a transfer nut that is reciprocated in a linear manner. will be.

상기 제1,2슬라이더(25,27)는 “ㄷ ”자로 형성하여 공급부(5) 및 배출부(7)에 마련된 제1,2리프트핀(13a,13b)에 간섭되지 않도록 함이 바람직하다.The first and second sliders 25 and 27 may be formed as “c” so as not to interfere with the first and second lift pins 13a and 13b provided in the supply unit 5 and the discharge unit 7.

또한, 상기 본체(1)의 외측에는 이상물체(예컨대 작업자 팔 등)의 접근상태를 감지하여 감지상태에서는 트레이반송수단(20)의 가동을 중단함으로써, 안전사고발생의 위험성을 해소시키도록 감지센서(29)를 추가로 구성함이 바람직하며, 그 감지센서(29)는 광센서로 하고 그 감지영역을 확보하도록 바 형태를 취하도록 마련함이 바람직하다.In addition, by detecting the approach state of the abnormal object (for example, the operator's arm, etc.) on the outside of the main body 1 in the sensed state by stopping the operation of the tray transport means 20, the sensor to eliminate the risk of safety accidents (29) is preferably further configured, and the detection sensor 29 is preferably an optical sensor and preferably provided in the form of a bar to secure the detection area.

상기 도면에서 미설명부호(16)는 상기 감지센서(29)를 소정의 위치에 고정하는 브라켓을 나타낸다.In the drawing, reference numeral 16 denotes a bracket for fixing the detection sensor 29 to a predetermined position.

다음은 상술한 바와 같이 구성된 트레이반송수단(20)에 의해 트레이가 반송되는 상태에 대해서 설명한다.Next, a description will be given of a state in which the tray is conveyed by the tray conveying means 20 configured as described above.

먼저, 작업자가 소정의 단으로 적층된 빈 트레이(T)를 상기 대기부(9)에 대기중인 제1슬라이더(25)에 올려놓으면(제1단계), 제1에어실린더(21a)의 에어가 작용하여 제1실린더이동체(21a)가 화살표(↑)방향으로 따라 공급부(5)의 위치로 전진한다.First, when an operator places the empty trays T stacked in predetermined stages on the first slider 25 waiting on the waiting section 9 (first step), the air of the first air cylinder 21a In operation, the first cylinder moving body 21a is advanced to the position of the supply part 5 in the direction of the arrow ↑.

이때, 제1리프트핀(13a)은 하강된 상태를 유지하여 상기 제1슬라이더(25)에 얹혀져 있는 빈 트레이(T)의 최하단측 바닥의 위치보다 낮은 위치에 있게 된다.At this time, the first lift pin 13a may be in a lower position than the bottom of the lowermost side of the empty tray T on the first slider 25 while maintaining the lowered state.

그와 같이 제1슬라이더(25)가 공급부(5)로 이동을 하게 되면, 상기 제1리프트핀(13a)은 도시되지 않은 승강구동수단에 의해 상승되어 소정의 위치에 적층된 빈 티트레이(T)를 상승시켜 소정의 위치에 위치시킴과 동시에 상기 제1슬라이더(25)는 대기부(9)로 후진하여 대기 상태를 이루게 되어 다시 빈 트레이를 올려 놓을 수 있게 된다.(제2단계)As such, when the first slider 25 moves to the supply part 5, the first lift pin 13a is lifted by the lifting driving means (not shown) and the empty tea tray T stacked at a predetermined position. The first slider 25 moves backward to the waiting unit 9 to achieve a standby state by raising the position of the first slider 25 at a predetermined position by raising the position of the first tray.

다음, 상기 공급부(5)에서 공급되는 빈 티트레이(T)에 도시되지 않은 흡착수단에 의해 트림/포밍작업부(3)를 통해 낱개로 분리된 반도체 패키지들이 연속적으로 안착되어 완전히 수납된 상태를 이루게 되면 이송수단(미도시)에 의해 배출부(7)로 이송되고, 제2리프트핀(13b)이 상승하여 이송되어진 트레이(T)를 밀어 올려 적층시킨다.(제3단계)Next, the semiconductor packages individually separated by the trim / forming work part 3 by the suction means not shown in the empty tea tray T supplied from the supply part 5 are continuously seated and completely stored. When it is achieved, it is transferred to the discharge part 7 by a transfer means (not shown), and the second lift pin 13b is lifted up to push up the transferred tray T to be stacked.

다음, 상기 배출부(7)에 소정량의 트레이(T)가 적층된 상태를 이루게 되면, 제2이송수단(23)이 동작되어 제2슬라이더(27)를 배출부(7)로 전진시키고, 제2리프트핀(13b)이 동작되어 상기 배출부(7)에 적층되어 있던 트레이(T)를 하강시켜 상기 제2슬라이더(27)의 상면에 안착시킨다.Next, when a predetermined amount of tray T is stacked in the discharge part 7, the second transfer means 23 is operated to advance the second slider 27 to the discharge part 7, The second lift pin 13b is operated to lower the tray T stacked on the discharge part 7 and rest on the upper surface of the second slider 27.

그와 같은 상태에서 다시 제2이송수단(23)에 의해 제2슬라이더(27)는 상술한 방향의 역방향으로 이동되어 인출부(11)로 이송됨으로써 배출부(7)에 적층된 트레이(T)를 자동으로 인출시키게 된다.(제4단계)In such a state, the second slider 27 is moved in the opposite direction in the above-described direction by the second transfer means 23 to be transferred to the lead-out portion 11, thereby stacking the tray T stacked on the discharge portion 7. Will be automatically withdrawn (step 4).

상술한 바와 같은 방법에 의함에 따라 단순히 공급될 빈 트레이를 대기부(9)에 올려놓으면 자동으로 공급부(5)로 공급되고, 또한, 배출부(7)에 적층된 트레이가 소정량이 되면 인출부(11)로 자동으로 인출됨에 따라 작업자는 단순히 그 대기부(9) 및 인출부(11)의 상태를 확인하여 적절히 빈 트레이(T)를 공급하고 반도체 패키지가 수납된 트레이(T)를 빼내면 된다.According to the method as described above, simply placing the empty tray to be supplied to the standby section 9 is automatically supplied to the supply section 5, and when the tray stacked in the discharge section 7 has a predetermined amount, the drawing section As it is automatically drawn out to (11), the operator simply checks the state of the waiting section 9 and the drawing section 11, supplies the empty tray T appropriately, and pulls out the tray T in which the semiconductor package is stored. do.

따라서, 종래와 같이 트레이(T)를 공급하고, 빼내는 동안 설비를 중단시켜야만했던 문제점을 해소시킬 수 있게 되는 것이다.Therefore, it is possible to solve the problem of having to stop the equipment while supplying and removing the tray T as in the prior art.

또한, 상술한 바와 같은 작업과정에 의해 반도체 패키지를 제조하여 반송하는 동안 상기 반도체 패키지의 품질을 확인하고자 할 경우 도시되지 않은 조작부에 마련된 모니터버튼을 누르게 되면, 인출부(11)에 대기하고 있던 제2슬라이더(27)가배출부(7)로 이송된다.In addition, when the quality of the semiconductor package is to be checked during the manufacturing and transport of the semiconductor package by the above-described work process, when the monitor button provided on the operation unit (not shown) is pressed, the waiting unit for the drawing unit 11 is waited. Two sliders 27 are conveyed to the discharge part 7.

그와 같은 상태에서 리프트핀(13b)이 동작하여 상기 배출부(7)에 적층되어 있는 최하부의 트레이(T)를 하강시켜 상기 제2슬라이더(27)의 상면에 안착시키면 다시 이송수단(23)의 동작에 의해 제2슬라이더(27)는 후진하여 인출부(11)로 이송되어져 작업자는 그 처리된 반도체 패키지의 상태를 확인한다.In such a state, the lift pin 13b operates to lower the lowermost tray T stacked on the discharge part 7 and rest on the upper surface of the second slider 27 to transfer the transfer means 23. By the operation of the second slider 27 is moved back to the lead-out portion 11, the operator checks the state of the processed semiconductor package.

이와 같은 동작에 의해 종래와 같이 설비 전체를 중단시켜 트레이를 인출시켜야만 했던 설비 가동상의 손실을 효과적으로 줄일 수 있게 되는 것이다,By this operation, it is possible to effectively reduce the loss of equipment operation that had to be withdrawn the tray by stopping the entire equipment as in the prior art,

한편, 상기와 같이 동작하는 동안 감지센서(29)는 작업자의 팔과 같은 이상 물체의 접근 여부를 감지하여 그 감지상태에서는 트레이반송수단(20)의 동작을 멈추도록 함에 따라 사고 발생의 위험성을 해소시키게 된다.On the other hand, during the operation as described above, the sensor 29 detects the proximity of an abnormal object, such as the worker's arm, and in the detection state to stop the operation of the tray transport means 20 to eliminate the risk of accidents Let's go.

상술한 바와 같이 본 발명에 의한 트레이 자동반동장치를 갖는 반도체 패키지 제조장비 및 그 트레이 자동반송방법에 의하면, 빈 트레이를 공급하고 트림/포밍 공정을 거친 처리된 반도체 패키지를 수납한 트레이를 인출시키는 작업을 자동으로 쉽게 처리함에 따라 그 수납 및 인출 동작을 위해 설비를 중단시켜 설비의 로스를 발생시켰던 문제를 해소시킬 수 있는 이점이 있다.As described above, according to the semiconductor package manufacturing apparatus having the tray automatic recoil device according to the present invention and the tray automatic conveying method thereof, an operation of supplying an empty tray and drawing out a tray containing a processed semiconductor package which has undergone a trimming / forming process As it is automatically handled automatically there is an advantage that can solve the problem that caused the loss of the equipment by stopping the equipment for its storage and withdrawal operation.

또한, 반도체 패키지의 품질을 확인할 경우에도 설비를 중단시키지 않고 가능하게 되어 설비의 로스를 줄일 수 있다.In addition, even when checking the quality of the semiconductor package, it becomes possible without stopping the equipment, thereby reducing the loss of the equipment.

이와 같이 구성되는 이와 같이, 본 발명의 상세한 설명에서는 구체적인 실시 예에 관해 설명하였으나, 본 발명의 범주에서 벗어나지 않는 한도 내에서 여러 가지 변형이 가능함은 물론이다. 그러므로, 본 발명의 범위는 설명된 실시 예에 국한되어 정해져서는 안되며 후술하는 특허청구범위 뿐만 아니라 이 특허청구범위와 균등한 것들에 의해 정해져야 한다.As described above, in the detailed description of the present invention has been described with respect to specific embodiments, various modifications are of course possible without departing from the scope of the invention. Therefore, the scope of the present invention should not be limited to the described embodiments, but should be defined by the claims below and equivalents thereof.

Claims (7)

공급되는 몰딩된 리드프레임 자재를 트림/포밍 작업을 행하여 낱개로 분리시키는 트림/포밍작업부와;A trim / forming work unit which separates the molded leadframe material supplied by the trim / forming work into pieces; 상기 트림/포밍작업부를 통해 처리된 낱개의 반도체 패키지들이 안착될 빈 트레이가 다수 적층되어 위치하는 공급부와;A supply unit in which a plurality of empty trays on which the individual semiconductor packages processed through the trim / forming operation unit are seated are stacked; 상기 공급부로부터 이송되어 상기 트림/포밍작업부를 통해 처리된 낱개의 반도체 패키지들을 안착시킨 트레이가 다수 적층되는 배출부 및;A discharge part in which a plurality of trays, which are transported from the supply part and seated individual semiconductor packages processed through the trim / forming work part, are stacked; 상기 공급부에 복수의 빈 트레이를 자동으로 공급하고, 상기 배출부에 적층된 복수의 트레이를 자동으로 인출시키는 트레이반송수단을 포함하는 것을 특징으로 하는 트레이 자동반송장치를 갖는 반도체 패키지 제조장비.And a tray conveying means for automatically supplying a plurality of empty trays to the supply part and automatically drawing out a plurality of trays stacked on the discharge part. 제 1항에 있어서,The method of claim 1, 상기 트레이반송수단은 상기 공급부 및 배출부로 통하도록 설치되는 제1,2이송수단 및;The tray conveying means includes first and second conveying means installed to communicate with the supply part and the discharge part; 상기 제1,2이송수단에 연결되어 직선 왕복운동이 가능하도록 설치되는 제1,2슬라이더를 포함하는 것을 특징으로 하는 트레이 자동반송장치를 갖는 반도체 패키지 제조장비.And a first and second sliders connected to the first and second transfer means and installed to enable linear reciprocating motion. 제 1항에 있어서,The method of claim 1, 상기 제1,2슬라이더는 “ㄷ ”자로 형성된 것을 특징으로 하는 트레이 자동반송장치를 갖는 반도체 패키지 제조장비.The first and the second slider is a semiconductor package manufacturing equipment having a tray automatic transfer device, characterized in that formed by the letter "c". 제 1항에 있어서,The method of claim 1, 상기 트레이반송수단이 설치된 양측에는 이상물체의 접근상태를 감지하여 감지상태에서는 상기 트레이반송수단의 가동을 중단하도록 하는 감지센서가 추가로 구성되는 것을 특징으로 하는 트레이 자동반송장치를 갖는 반도체 패키지 제조장비.On both sides of the tray transport means is installed, the semiconductor package manufacturing equipment having an automatic tray transport device, characterized in that additional sensing sensor for detecting the approach state of the abnormal object to stop the operation of the tray transport means in the sensing state . 제 4항에 있어서,The method of claim 4, wherein 상기 감지센서는 광센서로 구성되는 것을 특징으로 하는 자동반송장치를 갖는 반도체 패키지 제조장비.The sensing sensor is a semiconductor package manufacturing equipment having an automatic transport device, characterized in that consisting of an optical sensor. 제 5항에 있어서,The method of claim 5, 상기 감지센서는 바형태로 마련되는 것을 특징으로 하는 자동반송장치를 갖는 반도체 패키지 제조장비.The sensing sensor is a semiconductor package manufacturing equipment having an automatic transfer device, characterized in that provided in the form of a bar. 소정의 단으로 적층되어진 복수의 빈 트레이를 소정의 위치에서 대기하고 있는 제1슬라이더의 상측에 공급하는 제1단계;A first step of supplying a plurality of empty trays stacked in predetermined stages to an upper side of the first slider waiting at a predetermined position; 그 상면에 복수의 빈 트레이를 공급받은 상기 제1슬라이더를 이송수단에 의해 공급부로 이송시킨 후 다시 초기의 상태로 복귀시키는 제2단계;A second step of transferring the first slider, which has received a plurality of empty trays on the upper surface thereof, to a supply part by a conveying means, and then returning to the initial state again; 상기 공급부에 공급된 빈 트레이가 소정의 위치에 이송되어 트림/포밍작업부를 통해 낱개로 분리된 반도체 패키지들을 안착시킨 트레이를 배출부로 이송시키는 제3단계 및;A third step of transferring the tray on which the empty trays supplied to the supply unit are transferred to a predetermined position and seating the semiconductor packages individually separated through the trim / forming operation unit to the discharge unit; 상기 배출부로 제2슬라이더가 이송되어 상기 배출부에 적층된 복수의 트레이를 안착시킨 후 인출부로 인출되는 제4단계를 반복하여 행하는 것을 특징으로 하는 반도체 패키지 제조장비의 트레이 자동반송방법.The second slider is transported to the discharge unit to seat the plurality of trays stacked on the discharge unit and repeating the fourth step to be taken out to the withdrawal unit repeating the tray automatic transfer method of the manufacturing equipment.
KR1020010074991A 2001-11-29 2001-11-29 Semiconductor package manufacturing equipment having tray auto sending apparatus and the tray auto sending method KR20030044282A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100905359B1 (en) * 2007-05-15 2009-07-21 윤점채 Semiconductor material tray withdrawal system
KR101324946B1 (en) * 2012-03-07 2013-11-04 한미반도체 주식회사 Semiconductor Material Sawing Device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100905359B1 (en) * 2007-05-15 2009-07-21 윤점채 Semiconductor material tray withdrawal system
KR101324946B1 (en) * 2012-03-07 2013-11-04 한미반도체 주식회사 Semiconductor Material Sawing Device

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