JP2875653B2 - Transport equipment for semiconductor devices - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for transporting storage devices such as semiconductor devices and pallets.

[0002]

2. Description of the Related Art FIG. 4 is a view showing the configuration of a conventional semiconductor device and a transfer device for a storage tool. In the drawing, 1 is a semiconductor device, 2 is a storage device such as a pallet for storing the semiconductor device 1, 3 is a suction device that vacuum-holds and holds the semiconductor device 1,
Reference numeral 4 denotes a base on which the suction tool 3 is mounted in accordance with the storage interval of the storage tool 2, and reference numeral 5 denotes a suction unit including the suction tool 3 and the base 4. Reference numeral 6 denotes a holder for holding the holder 2, reference numeral 7 denotes a driving unit provided on the holder 6, reference numeral 8 denotes a sensor provided to pass through the hole 2a of the holder 2, and reference numeral 9 denotes a semiconductor device. A rail is stored and conveyed. A indicates a take-out position of the semiconductor device 1 and B indicates a pay-out position of the empty storage device 2.
FIG. 5 is a configuration diagram showing the positions when the suction unit 5, the holder 6, and the driving unit 7 have moved.

Next, the operation will be described. The suction unit 5 is lowered above the take-out position A to a position where the suction tool 3 comes into contact with the surface of the semiconductor device 1, vacuum-suctions the semiconductor device 1, and rises again. Next, the suction part 5 moves to the upper part of the rail 9 and descends. At this time, the semiconductor device 1 is released from the vacuum suction of the suction tool 3, is settled in the rail 9, and the suction part 5 rises again. Next, the holder 6 and the driving unit 7 move to the upper part of the take-out position A when the suction unit 5 moves on the rail 9, and the driving unit 7 opens the holder 6 wider than the width of the storage unit 2. When it descends and the receiving surface of the holding tool 6 comes below the lower surface of the storage tool 2,
The holding tool 6 is closed to hold the storage tool 2. After the completion of the holding, it rises again, moves to the upper part of the dispensing position B, and descends. After descending, the holder 6 is opened, and the container 2 rises in a state where the storage unit 2 is left at the extracting position B. After this ascent, the holder 6 is moved from the payout position B to the takeout position A in order to proceed to the next cycle operation.
At the time of moving to the dispensing position B
The sensor 8 detects and confirms whether or not there is a residue of the semiconductor device 1 due to a factor such as a suction error or the like. Here, when it is determined that there is no remaining semiconductor device 1, the operation may be continued. However, when it is determined that there is a remaining semiconductor device 1, the device is stopped, and the semiconductor device 1 is left by means such as calling an operator. It was necessary to take out the semiconductor device.

[0004]

In the conventional semiconductor device transfer device, since the remaining detection sensors of the semiconductor device in the storage device are individually provided for each storage position, the detection device is structurally detected at the dispensing position of the storage device. It is necessary to take measures such as calling an operator even when the remaining semiconductor device is detected. In addition, the change in the number of storages in the storage device requires a change in the setup of the sensor in addition to the suction section, and the number of sensors is required for all storage positions.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and detects the remaining semiconductor device before dispensing the storage device. If it is determined that the semiconductor device remains, vacuum suction is performed again. It is an object of the present invention to provide a transfer device which can be taken out and conveyed to a rail, and which can cope with a change in the number of storages and intervals of storage devices only by changing the setup of the suction unit.

[0006]

According to the present invention, there is provided a semiconductor device transfer apparatus, wherein a detection pin for supplying / cutting a vacuum depending on the presence or absence of a semiconductor device is penetrated into a suction device for vacuum-suctioning a semiconductor device. A sensor for detecting the upper operating end of the detection pin is provided, and a suction unit in which the suction tool is assembled in accordance with the storage interval of the storage tool is installed below the driving unit of the holder of the storage tool.

[0007]

In the semiconductor device transfer device according to the present invention, the suction tool is lowered when the holding tool holds the storage tool after the semiconductor device is taken out, and the detection pin incorporated in the suction tool has the remaining semiconductor device. In this case, the sensor rises and the sensor is shielded from light, thereby determining that the semiconductor device remains.

[0008]

[Embodiment 1] An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a configuration diagram showing a transfer device for a semiconductor device, and FIG. 2 is a side view showing a suction portion thereof. In the figure, reference numeral 5 denotes a suction unit, which is configured as follows. That is, a detection pin 10 penetrates into the inside of the suction tool 3 and is slid up and down, 11 is a sensor for detecting the upper working end of the detection pin 10,
Reference numeral 12 denotes a base on which the suction device 3 is mounted in accordance with the storage interval of the storage device, 13 denotes a vacuum supply port integrated from the suction device 3 through the base 12, and 14 denotes a suction device to lower the detection pin 10 to the suction device 3. A compressed air supply port provided in the base 12. Reference numeral 15 denotes a transport unit including the suction unit 5, the holder 6, and the driving unit 7. FIG. 3 shows that the detection pin 10 of the suction unit 5 is
FIG. 10 is a front view showing a state when the remaining semiconductor device is detected.

Next, the operation will be described. The transport unit 15 is first located above the take-out position A (the state of FIG. 1). In addition, although the suction part 5 and the holder 6 have the function of being able to move up and down individually, detailed description of the configuration is omitted here. Here, the suction unit 5 descends to bring the suction tool 3 into contact with the surface of the semiconductor device 1 stored in the storage tool 2. At this time, the detection pin 10 incorporated in the interior of the suction tool 3 is pushed up only at the location where the semiconductor device 1 is stored. At this time, when a vacuum is supplied from the vacuum supply port 13, the vacuum is supplied only to the suction tool whose detection pin 10 is pushed up, and the semiconductor device 1
Is held by the suction device. And the semiconductor device 1 is a suction tool 3
After that, the suction unit 5 moves up, and the transport unit 15 moves to the upper part of the rail 9. After this movement is completed, the suction unit 5 is lowered, the supply of vacuum is stopped, and the semiconductor device 1 is separated from the suction tool 3 and stored in the rail 9. Next, the suction section 5 is raised, and the compressed air is supplied from the compressed air supply port 14, so that the detection pin 10 is lowered and protrudes from the end surface of the suction tool 3. At this time, the compressed air is supplied until all the detection pins 10 are lowered, that is, until the sensors 11 are in the transmission state. The transport unit 15 moves to the take-out position A during this time. The suction unit 5 is lowered under the condition that the transport unit is completely moved and all the detection pins 10 are lowered. When all the semiconductor devices 1 in the storage 2 have been dispensed, the detection pin 10 keeps the lowered state, so that the sensor 11 maintains the transparent state, and it is determined that the dispensing is completed. Conversely, if the semiconductor device 1 remains in the storage device 2 due to a suction error or the like, the remaining semiconductor device 1 pushes up the detection pin 10 at that portion, and the upper end of the detection pin shields the sensor 11 from light. It is determined that there is. Next, an operation when the semiconductor device 1 remains in the storage tool 2 will be described. At the lower end of the suction unit 5, the end face of the suction device 3 and the surface of the semiconductor device 1 are in contact with each other, and the semiconductor device 1 is held by the suction device 3 by supplying vacuum from the vacuum supply port 13. The semiconductor device 1 remaining on the rail 9 is transferred by repeating the same operation as the transfer of the semiconductor device 1 described above. Thereafter, this operation is repeated until it is determined that there is no remaining. Next, an operation when it is determined that the semiconductor device 1 does not remain on the storage device 2 will be described. The holding tool 6 opens and closes and moves up and down by the driving unit 7 in the same manner as the operation described in the related art, and holds the storage tool 2. After the holding is completed, the holder 6 is raised, and the transport unit 15 moves to the upper position of the payout position B. After the movement is completed, the holder 6 is lowered and opened,
The storage device 2 is transported to the payout position B, and the transport unit 15 moves to the takeout position A again to proceed to the next cycle operation.

Embodiment 2 FIG. In the above embodiment, the semiconductor device 1
After performing the determination as to whether or not is left on the storage device 2, when it is determined that there is no remaining, the holding device 6 holds the storage device 2 and transports the storage device 2 to the payout position.
In order to shorten the processing time, the semiconductor device 1 is transported on the rail 9, and immediately after the transport unit 15 has moved to the unloading position A, the holder 6 performs an operation of holding the storage 2, and is transported to the payout position B. The remaining of the semiconductor device 1 may be confirmed by lowering the suction unit 5 on the way. At this time, if the storage device 2 is dispensed to the dispensing position B and it is determined that the remaining device is present, the transport unit 15 operates in the same manner as in the above-described embodiment to operate the remaining semiconductor device 1.
Is transported to the rail 9 over the take-out position A and stored again. Although the distance over which the remaining semiconductor device is re-transported to the rail 9 increases, this does not cause a reduction in processing capacity because the frequency of the remaining semiconductor device 1 is low.

Embodiment 3 FIG. In the above embodiment, the storage device 2
It has been described that the suction unit 3 is configured by attaching the suction tool 3 in accordance with the storage interval of the storage device. However, if the processing time is particularly restricted, the semiconductor device 1 is processed one by one using the suction tool 3 alone. You may.

Embodiment 4 FIG. In the above embodiment, the suction unit 5
And the holder 6 has the function of being able to move up and down individually, but both may be moved up and down by the same drive unless interference with the rail 9 or the like becomes a problem.

[0013]

As described above, according to the present invention, the suction section incorporating the detection pin is arranged below the driving section for driving the holder, so that the storage section is caused by a suction error or the like. The detection when the semiconductor device remains inside can be performed before the storage device is dispensed, and even when the semiconductor device remains, the semiconductor device can be taken out and transported again, so that it is not necessary to call a worker as an abnormality of the device. . In addition, since the remaining detection sensor can be fixed, there is an effect that even in the case of a change in the number of storages and intervals of the storage tools, the change can be dealt with only by replacing the suction portion. In addition, penetrate the detection pin inside
In addition, a plurality of suction tools are integrated into the suction section to
Detection and adsorption are integrated, so operation
There is also an effect that simplification and high speed can be achieved.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing a semiconductor device transfer device according to an embodiment of the present invention.

FIG. 2 is a side view showing the suction unit of FIG. 1;

FIG. 3 is a front view showing a state when the suction unit detects the remaining semiconductor device in the storage device;

FIG. 4 is a configuration diagram showing a conventional semiconductor device transfer device.

FIG. 5 is a configuration diagram showing a state when a transfer device of a conventional semiconductor device moves.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Semiconductor device 2 Storage tool 3 Suction tool 5 Suction part 6 Holder 7 Drive part 10 Detection pin 11 Sensor

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁶ , DB name) H01L 21/66 H01L 21/68

Claims (1)

(57) [Claims] 1. A transfer device for taking out a semiconductor device from a storage device such as a pallet by vacuum suction and transporting the semiconductor device, and then discharging the empty storage device, wherein the semiconductor device is held inside the suction device by vacuum suction. A detection pin that is incorporated and penetrates into and out of the semiconductor device to supply and shut off the vacuum depending on the presence or absence of the semiconductor device, a sensor that detects the detection pin at the upper operating end, and a plurality of the suction tools according to a storage interval of the storage tool. Assembled suction unit,
Holder for holding the housing member, install the driver at the top of the retainer so as to drive the holder, and the suction unit is placed between the drive unit and the storage equipment, the suction unit
A transfer device for a semiconductor device, comprising: a transfer unit comprising: a holder; and a driving unit .