JPH0536799A - Conveyance apparatus of semiconductor device - Google Patents

Abstract

PURPOSE:To obtain the conveyance apparatus, of a semiconductor device, wherein, even when the semiconductor device is left in a housing utensil due to a suction error or the like, it can be detected and conveyed again, and, even when the number of housing utensils, the interval of the housing utensils and the like are changed, it is possible to comply with the change only by replacing the stage of a suction part. CONSTITUTION:The title apparatus is provided with the following: a suction part 5 in which a detection pin 10, which detects whether a semiconductor device 1 exists or not at the inside of a suction utensil 3 and which cuts off the supply of a vacuum, is assembled and in which the suction utensil 3 has been assembled so as to match the housing interval of a housing utensil 2; a holding utensil 6 which holds the housing utensil 2; and a drive utensil 6. The suction part 5 is installed at the lower part of the drive part 7.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a carrier device for a storage device such as a semiconductor device and a pallet.

[0002]

2. Description of the Related Art FIG. 4 is a block diagram showing a conventional semiconductor device and a container carrying device. In the figure, 1 is a semiconductor device, 2 is a storage device such as a pallet for storing the semiconductor device 1, 3 is a suction device for holding the semiconductor device 1 by vacuum suction,
Reference numeral 4 denotes a base on which the suction tool 3 is attached in accordance with the storage interval of the storage tool 2, and reference numeral 5 denotes a suction section composed of the suction tool 3 and the base 4. 6 is a holder for holding the container 2, 7 is a drive unit installed above the holder 6, 8 is a sensor provided to penetrate the hole 2a of the container 2, and 9 is the semiconductor device 1. A rail for storage and conveyance, A indicates a take-out position of the semiconductor device 1, and B indicates a pay-out position of the empty storage tool 2.
FIG. 5 is a configuration diagram showing the positions when the suction unit 5, the holder 6, and the drive unit 7 are moved.

Next, the operation will be described. The suction part 5 is lowered to a position where the suction tool 3 comes into contact with the surface of the semiconductor device 1 above the take-out position A, the semiconductor device 1 is vacuum-sucked, and the suction device 5 is moved up again. Next, the suction unit 5 moves to the upper portion of the rail 9 and descends, where the semiconductor device 1 releases the vacuum suction of the suction unit 3, is housed in the rail 9, and the suction unit 5 rises again. Next, the holder 6 and the drive unit 7 move to the upper part of the take-out position A when the suction unit 5 moves to the rail 9, and the drive unit 7 opens the holder 6 wider than the width of the storage tool 2. When it descends and the receiving surface of the holder 6 comes below the lower surface of the storage tool 2,
The holder 6 is closed to hold the storage tool 2. After this holding is completed, it rises again, moves to the upper part of the dispensing position B and descends, and after descending, the holder 6 is opened, and the container 2 is raised with the storage tool 2 left at the ejection position B. After this ascent, the holder 6 moves from the payout position B to the takeout position A in order to move to the next cycle operation.
Storage device 2 transported to the payout position B at the time of moving to
The sensor 8 detects and confirms whether or not the semiconductor device 1 remains due to a suction error or the like inside. If it is determined that the semiconductor device 1 does not remain, the operation may be continued. However, if it is determined that the semiconductor device 1 remains, the device is stopped and left by means such as calling an operator. It was necessary to take out the semiconductor device.

[0004]

In the conventional semiconductor device transporting apparatus, the detection sensor for the remaining semiconductor device in the container is provided individually for each storage position. Therefore, even if the rest of the semiconductor device is detected, it is necessary to call a worker. In addition, in response to changes in the number of storages in the storage device, it is necessary to change the setup of the sensor in addition to the suction portion, and the number of sensors is also required for all storage positions.

The present invention has been made to solve the above-mentioned problems, and the remaining semiconductor device is detected before the storage device is dispensed, and when it is determined that the remaining semiconductor device is present, vacuum suction is performed again. It is an object of the present invention to obtain a transfer device that can be taken out and transferred onto a rail, and that can cope with the change in the number of stored storage devices and intervals, etc. only by changing the stage of adsorption.

[0006]

According to the present invention, there is provided a semiconductor device carrying apparatus in which a detection pin for supplying / interrupting a vacuum depending on the presence / absence of the semiconductor device is inserted into a suction device for vacuum-sucking the semiconductor device. A sensor for detecting the upper operation end of the detection pin is provided, and a suction portion assembled by adjusting the suction tool to the storage interval of the storage tool is installed below the drive section of the holder of the storage tool.

[0007]

In the semiconductor device carrying apparatus according to the present invention, the suction tool is lowered when the holding tool holds the storage tool after the semiconductor device is taken out, and the detection pin incorporated in the suction tool has the semiconductor device remainder. In this case, the sensor rises and the sensor is shielded from light, and it is determined that the semiconductor device remains.

[0008]

EXAMPLES Example 1. An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a configuration diagram showing a carrying device of a semiconductor device, and FIG. 2 is a side view showing a suction portion thereof. In the figure, 5 is an adsorption part, which is configured as follows. That is, 10 is a detection pin that penetrates the inside of the suction tool 3 and slides up and down, and 11 is a sensor that detects the upper operating end of this detection pin 10.
12 is a base on which the suction tool 3 is attached according to the storage interval of the storage tool, 13 is a vacuum supply port gathered from the suction tool 3 through the base 12, and 14 is the suction tool 3 to lower the detection pin 10. It is a compressed air supply port provided inside the base 12. Reference numeral 15 is a transport unit including the suction unit 5, the holder 6, and the drive unit 7. It should be noted that in FIG.
FIG. 3 is a front view showing a state when the remaining semiconductor device in the inside is detected.

Next, the operation will be described. First, the transport unit 15 is located above the take-out position A (state of FIG. 1). The suction unit 5 and the holder 6 have the function of moving up and down individually, but detailed description of the configuration is omitted here. At this point, the suction unit 5 descends to bring the suction unit 3 into contact with the surface of the semiconductor device 1 housed in the storage unit 2. At this time, the detection pin 10 incorporated in the suction tool 3 is pushed up only at the place where the semiconductor device 1 is stored. If a vacuum is supplied from the vacuum supply port 13 at this time, the vacuum is supplied only to the suction tool whose detection pin 10 is pushed up, and the semiconductor device 1
Is held by the suction tool. The semiconductor device 1 is the suction tool 3
Then, the suction unit 5 moves up and the transport unit 15 moves to the upper part of the rail 9. After this movement is completed, the suction unit 5 descends, the vacuum supply is stopped, the semiconductor device 1 is separated from the suction tool 3, and is housed in the rail 9. Next, the suction part 5 rises, and the compressed air is supplied from the compressed air supply port 14, so that the detection pin 10 descends and projects from the end surface of the suction tool 3. At this time, the compressed air is supplied until all the detection pins 10 are lowered, that is, until the sensor 11 is in the transmission state. Further, the transport unit 15 moves to the take-out position A during this time. The suction unit 5 descends under the condition that the transport unit has completed its movement and all the detection pins 10 have descended. When all the semiconductor devices 1 in the container 2 have been dispensed, the detection pin 10 maintains the lowered state, so that the sensor 11 is maintained in the transparent state and it is determined that the dispensing is completed. On the contrary, when the semiconductor device 1 remains in the storage device 2 due to a suction error or the like, the remaining semiconductor device 1 pushes up the detection pin 10 in that portion, and the upper end of the detection pin shields the sensor 11 from light, so that it remains. It is determined that there is. Next, the operation when the semiconductor device 1 remains in the storage tool 2 will be described. At the lower end of the suction part 5, the end surface of the suction device 3 and the surface of the semiconductor device 1 are in contact with each other, and the semiconductor device 1 is held by the suction device 3 by supplying a vacuum from the vacuum supply port 13. The semiconductor device 1 remaining on the rail 9 is carried by repeating the same operation as the carrying of the semiconductor device 1 described above. After that, this operation is repeated until it is determined that there is no remaining. Next, the operation when it is determined that the semiconductor device 1 does not remain on the storage tool 2 will be described. The holder 6 holds the container 2 by opening and closing and moving up and down in the same manner as the operation described in the prior art by the drive unit 7. After the holding is completed, the holder 6 rises and the transport unit 15 moves to the upper part of the payout position B. After the movement is completed, the holder 6 descends and opens,
The storage tool 2 is transported to the payout position B, and the transport unit 15 moves to the removal position A again to proceed to the next cycle operation.

Embodiment 2. In the above embodiment, the semiconductor device 1
After carrying out the determination as to whether or not there is any left on the storage tool 2, the holding tool 6 holds the storage tool 2 and conveys it to the payout position when it is determined that there is no remaining.
In order to shorten the processing time, the semiconductor device 1 is transported to the rail 9, and the holder 6 holds the storage tool 2 immediately after the transport unit 15 moves to the take-out position A, and then to the payout position B. You may confirm the remainder of the semiconductor device 1 by lowering the adsorption part 5 on the way. At this time, when the storage tool 2 is dispensed to the dispensing position B and it is determined that there is remaining, the transport unit 15 performs the same operation as that of the above-described embodiment and the remaining semiconductor device 1 is operated.
Is sucked and held, jumps over the take-out position A, is transported to the position above the rail 9, and is stored again. It should be noted that the remaining semiconductor device is re-conveyed to the rail 9 for a longer distance, but this is not a factor that lowers the processing capacity because the semiconductor device 1 remains less frequently.

Embodiment 3. Further, in the above embodiment, the storage device 2
Although the suction unit 3 is attached according to the storage interval of the suction unit 5 to configure the suction unit 5, the suction unit 3 is used as a single unit to process each semiconductor device 1 if the processing time is restricted. You may.

Embodiment 4. Further, in the above-described embodiment, the suction unit 5
The holder 6 has been described as having the function of moving up and down individually, but both may be moved up and down by the same drive unless interference with the rail 9 or the like is a problem.

[0013]

As described above, according to the present invention, since the suction portion incorporating the detection pin is arranged under the drive portion for driving the holder, the storage tool is caused by a suction error or the like. If the semiconductor device remains inside, it can be detected before the storage device is discharged, and even if there is a remaining device, it can be taken out again and transported, and it is not necessary to call an operator as an abnormality of the device. .. Further, since the sensor for detecting the remaining amount can be fixed, there is an effect that even when the number of stored housings, the spacing, and the like are changed, it is possible to deal with the setup change only by exchanging the suction portion.

[Brief description of drawings]

FIG. 1 is a configuration diagram showing a semiconductor device carrying apparatus according to an embodiment of the present invention.

FIG. 2 is a side view showing a suction unit of FIG.

FIG. 3 is a front view showing a state when the suction unit detects a semiconductor device remaining in the housing.

FIG. 4 is a block diagram showing a conventional carrier device for a semiconductor device.

FIG. 5 is a configuration diagram showing a state when a transporting device of a conventional semiconductor device is moved.

[Explanation of symbols]

 1 Semiconductor Device 2 Storage Tool 3 Adsorption Tool 5 Adsorption Section 6 Holding Tool 7 Driving Section 10 Detection Pin 11 Sensor

Claims (1)

Claim: What is claimed is: 1. A carrier device for picking up a semiconductor device from a storage tool such as a pallet by vacuum suction and transporting the semiconductor device, and then discharging an empty storage tool. A detection pin that penetrates through the inside of the holding device that holds it and that supplies or interrupts a vacuum depending on the presence or absence of a semiconductor device, a sensor that detects this detection pin at the upper operating end, and a plurality of the above holding devices. Adsorption part assembled according to the storage interval of
A holding part for holding the storage tool, a driving part installed on the upper part of the holding part to drive the holding part, and the suction part is installed between the driving part and the storage tool. Characteristic semiconductor device transport device.