KR20030040713A - A cooling tube and a growing apparatus using a cooling tube - Google Patents

Abstract

PURPOSE: A cooling water pipe for cooling single crystalline ingot is provided to obtain high pull up speed of the single crystalline ingot by preventing flow congestion of cooling water inside the pipe and cooling the single crystalline ingot promptly, and a single crystalline ingot growing apparatus using the cooling water pipe is provided. CONSTITUTION: In a cooling water pipe (100) for cooling single crystalline ingot comprising inner pipe and outer pipe, wherein cooling water inlet and outlet are respectively formed on the outer pipe so that cooling water flown in from the cooling water inlet (102a) passes through between the inner and outer pipes to be discharged into the cooling water outlet, the cooling water pipe for cooling single crystalline ingot is characterized in that a downward flow part (110) is additionally installed between the inner and outer pipes to forcibly flow the cooling water flown in from the cooling water inlet downward, wherein the downward flow part is first and second vertical weirs (112a,112b) vertically formed between the inner and outer pipes at the lower side of the cooling water inlet, and wherein first and second horizontal weirs (114a,114b) are additionally formed on the first and second vertical weirs so that the downward flowing cooling water is flown horizontally. In a single crystalline ingot growing apparatus comprising a growing chamber for growing a single crystalline ingot, a quartz crucible installed inside the growing chamber to contain a polysilicon melt, an electrical heater for heating the quartz crucible, a cooling water pipe formed on the inner side of the growing chamber to cool the single crystalline ingot and first and second sensing sensors installed on the outer side of the growing chamber to detect the meniscus between the single crystalline ingot and polysilicon melt, the single crystalline ingot growing apparatus is characterized in that the cooling water pipe comprises an inner pipe, an outer pipe on which cooling water inlet and outlets are respectively formed, and a downward flow part installed between the inner and outer pipes to forcibly flow the cooling water flown in from the cooling water inlet downward.

Description

Water cooling tube for single crystal ingot cooling and single crystal ingot growth apparatus using the same {A cooling tube and a growing apparatus using a cooling tube}

The present invention relates to a single-crystal ingot cooling water cooling tube and a single-crystal ingot growth apparatus using the same, to prevent the flow of cooling water in the tube, and to quickly cool the single-crystal ingot to obtain a high pulling speed of the unitary ingot. The present invention relates to a single-crystal ingot cooling water cooling tube and a single crystal ingot growth apparatus using the same to improve the cooling efficiency of the single crystal ingot and to obtain a high pulling speed of the single crystal ingot.

In general, a single crystal ingot cooling water cooling tube used in a single crystal ingot growth apparatus is for rapidly cooling a single crystal ingot grown while being pulled up from a polysilicon melt of a quartz crucible to increase the pulling speed of the ingot.

1 is a cross-sectional view for explaining a conventional single crystal ingot cooling water cooling tube.

As shown, the conventional single crystal ingot cooling water cooling tube 10 is formed in the form of a double tube of the inner tube (10a) and the outer tube (10b) to form a space in which the coolant flows while the inside is sealed, the outer tube ( At a predetermined position of 10b), a coolant inlet 12a for supplying coolant to the space between the outer tube and the inner tube and a coolant outlet 12b for discharging the supplied coolant are respectively formed.

In addition, in the space between the outer tube and the inner tube between the coolant inlet and the coolant outlet, the coolant flows only to the bottom of the tube by blocking the space between the outer tube and the inner tube so that the coolant flows quickly by increasing the flow rate of the introduced coolant. A water barrier wed 14 is formed.

Although not shown, the cooling water inlet 12a and the cooling water outlet 12b are connected to an external cooling water circulation device so that the circulation cycle in which the cooling water is repeatedly drawn in and discharged is repeated.

The single crystal ingot cooling water cooling tube having such a configuration is a cross-sectional view for explaining a single crystal ingot growth apparatus equipped with a conventional single crystal ingot cooling water cooling tube, while being grown in a polysilicon melt of a quartz crucible 22. The single crystal ingot 28 is installed at the upper end of the growth chamber 20 to be cooled while passing therein and positioned inside the hot zone.

Here, the single crystal ingot cooling water cooling tube 10 is installed at the outer edge of the growth chamber 20 to detect a meniscus, which is a contact portion between the single crystal ingot 28 and the polysilicon melt, and the diameter and growth rate of the single crystal ingot. In this case, the first and second sensing sensors 26a and 26b for controlling the temperature of the electric heater are installed at positions that do not interfere with the sensing operation.

However, such a conventional single crystal ingot cooling water cooling tube has a problem that a scale is locally deposited inside the tube due to impurities contained in the cooling water, and this scale causes deterioration and corrosion of the tube, resulting in leakage of the cooling water. have.

More specifically, the conventional single crystal ingot cooling water cooling tube forms a water jet in its interior to generate a coolant flow through which the coolant flows quickly through the cooling water flow port. Generates unstable coolant flow.

That is, the coolant flowing into the coolant inlet spreads from side to side along the inside of the pipe and simultaneously hits a water barrier, and flows out of the passage formed at the lower portion of the water bank at a high speed.

Thus, the flow of the coolant around the coolant passage is faster than the other parts, while the coolant flowing from the coolant inlet and flowing immediately below the inlet exits through the coolant passage by the fast flowing coolant from the upper side to the lower side of the pipe. The eddy phenomenon that cannot go out occurs and becomes stagnant.

And, while the flow of cooling water is stagnant, the scale is deposited inside the tube, and this part is the portion closest to the polysilicon melt of the quartz crucible which is in a high temperature state, so it easily deteriorates and corrosion occurs.

Therefore, when corrosion occurs in the water cooling tube, the cooling water leaks and is directly injected into the polysilicon melt, causing failure of the growing single crystal ingot.

In addition, the conventional single crystal ingot cooling water cooling tube should always be installed inside the hot-zone so as not to interfere with the sensing operation of the first and second sensing sensors inside the growth chamber, so that the tube can be placed close to the polysilicon melt. none.

Therefore, there is a problem that it is not possible to quickly cool the single crystal ingot to increase the pulling speed of the ingot, there has been a design problem to change the hot-zone structure inside the growth chamber to solve this problem.

Accordingly, an object of the present invention is to provide a single crystal ingot cooling water cooling tube which prevents leakage of cooling water due to deterioration and corrosion of a tube by preventing scale from being deposited inside the tube.

In addition, the present invention is a water-cooled tube for single crystal ingot cooling that can grow the rapid single crystal ingot by placing the tube close to the polysilicon melt of the crucible without affecting the detection of the sensors for controlling the diameter and the pulling speed of the tube There is another purpose to provide.

Another object of the present invention is to provide a single crystal ingot growth apparatus capable of improving production yield per unit time by improving the cooling efficiency of the single crystal ingot by using the single crystal ingot cooling water cooling tube to increase the pulling speed of the single crystal ingot. There is this.

Therefore, in order to solve the above objects, the present invention is formed of an inner tube and an outer tube, and a coolant inlet and an outlet are respectively formed in the outer tube so that the coolant flowing from the coolant inlet flows between the inner tube and the outer tube to the coolant outlet. In the discharged single-crystal ingot cooling water cooling tube, a downward flow portion for generating a forced downward flow of the coolant flowed from the cooling water inlet is formed between the inner tube and the outer tube to form a single-crystal ingot growth water cooling tube, or the downward drive unit And at the bottom of the inner tube and the outer tube at the same time to form a penetrating portion through which the inner side of the inner tube is seen from the outside to form a single-crystal ingot growth water cooling tube.

In addition, the present invention provides a growth chamber for growing a single crystal ingot, an electric heater that is placed inside the growth chamber, rotates at a predetermined speed, and heats a quartz crucible and a quartz crucible containing polysilicon melt therein, and inside the growth chamber. A single crystal ingot formed by including a water cooling tube formed to surround and cooled a single crystal ingot grown from a quartz crucible, and first and second detection sensors formed outside the growth chamber to detect solidification interfaces of the single crystal ingot and polysilicon melt. In the growth apparatus, the water cooling tube is formed of an inner tube and an outer tube each formed with a cooling water inlet and an outlet, and constitutes a single crystal ingot growth apparatus including a downward flow unit for generating a forced downward flow of the cooling water introduced from the cooling water inlet, Or into the lower flow section of the water cooling pipe and the lower end of the inner pipe and the outer pipe. At the same time, a penetrating portion for allowing the inside of the side tube to be seen from the outside forms a single crystal ingot growth apparatus.

1 is a cross-sectional view illustrating a conventional single crystal ingot cooling water cooling tube.

2 is a cross-sectional view for explaining a single crystal ingot growth apparatus equipped with a conventional single crystal ingot cooling water cooling tube.

Figure 3 is a front view for explaining a first embodiment of the water cooling tube for cooling single crystal ingot according to the present invention.

4 is a cross-sectional view illustrating a first embodiment of a water cooling tube for cooling a single crystal ingot according to the present invention.

5 is a cross-sectional view for explaining a first embodiment of a single crystal ingot growth apparatus equipped with a single crystal ingot water cooling tube according to the present invention.

Figure 6 is a front view for explaining a second embodiment of the water cooling tube for cooling single crystal ingot according to the present invention.

7 is a cross-sectional view illustrating a second embodiment of a water cooling tube for cooling single crystal ingot according to the present invention.

8 is a cross-sectional view for explaining a second embodiment of a single crystal ingot growth apparatus equipped with a single crystal ingot water cooling tube according to the present invention;

Explanation of symbols on the main parts of the drawings

10,100,200: water cooling tube 20,120: growth chamber

22,122: quartz crucible 24,124: electric heater

26,126 sensor 110,210 downward flow

112,212 vertical weir 114,214 horizontal weir

230: through part

Hereinafter, exemplary embodiments of a single crystal ingot cooling water cooling tube and a single crystal ingot growth apparatus using the same will be described in detail with reference to the accompanying drawings.

3 and 4 are front and cross-sectional views illustrating a first embodiment of a water cooling tube for cooling single crystal ingots according to the present invention.

As shown, the water cooling tube 100 of the present invention is formed of the inner tube (100a) and the outer tube (100b), the coolant inlet (102a) and outlet 102b are formed in the outer tube (100b), respectively, the coolant Cooling water flowing from the inlet flows between the inner and outer tubes and is discharged to the cooling water outlet.

In addition, in the space between the outer tube and the inner tube between the coolant inlet and the coolant outlet, the flow rate of the introduced coolant is increased to close the space between the outer tube and the inner tube so that the coolant is discharged quickly, and the coolant flows out at the bottom of the tube. A water jet weir 104 forming a passage is formed.

Then, a downward flow portion 100 is formed to generate a downward flow of the cooling water introduced to the lower side of the cooling water inlet 102a.

Here, the downward flow portion 100 forms the first and second vertical weir (112a, 112b) between the inner tube and the outer tube and when the coolant flows into the cooling water in three directions by the first and second vertical weir, respectively. To be dispersed and flow downward.

In addition, the first and second vertical weirs are formed with first and second horizontal weirs 114a and 114b perpendicular to the weir, respectively, so that the coolant flows downward from the outside of the first and second vertical weirs 112a and 112b. It flows in the horizontal direction and flows downward between the first and second vertical weirs so that the coolant hitting the bottom rises in the horizontal direction.

The cooling water flow in the water cooling tube for single crystal ingot cooling according to the present invention having such a configuration will be described.

The coolant introduced through the coolant inlet 102a generates first to third downward flows (indicated by dashed lines in FIG. 3) by the first and second vertical weirs 112a and 112b.

Here, the first downward flow is the coolant flow flowing outward of the first vertical weir 112a, the second downward flow is the coolant flow flowing outward of the second vertical weir 112b, and the third downward flow is the first and second flows. Coolant flows between the second vertical weirs.

The first and second downward flows are flowed horizontally by the first and second horizontal weirs 114a and 114b, and the third downward flow is directed to the first and second horizontal weirs by hitting the bottom of the tube. In the horizontal direction.

The coolant flowing in the horizontal direction by the first and second horizontal weirs 114a and 114b quickly exits through the coolant passage of the water jetty 104.

As described above, the single crystal ingot cooling water cooling tube 100 according to the present invention has the first and second vertical weirs 112a while the coolant is introduced from the coolant inlet 102a and exits through the coolant passage of the water jetty 104. The vertical direction flow is generated by (112b) to prevent the flow of the cooling water in the tube.

Therefore, the deposition of scale in the inside of the pipe is blocked to prevent deterioration and corrosion of the pipe, and the flow of the cooling water is active to improve the cooling efficiency.

5 is a cross-sectional view illustrating a single crystal ingot growth apparatus equipped with a water cooling tube for cooling a single crystal ingot according to the present invention. The single crystal ingot growth apparatus according to the present invention includes a growth chamber 120 for growing a single crystal ingot, and growth. A quartz crucible 122 placed inside the chamber and rotating at a predetermined speed and containing polysilicon melt, an electric heater 124 for heating the quartz crucible, and a single crystal ingot formed inside the growth chamber and grown from the quartz crucible. A water cooling tube 200 enclosed and cooled, and first and second detection sensors 126a and 126b formed outside the growth chamber to detect the solidification interface between the single crystal ingot and the polysilicon melt. 3 and 4, the inner tube 100a and the outer tube 100b formed with the coolant inlet 102a and the outlet port 102b as shown in FIGS. 3 and 4, respectively, The outer pipe is formed by additionally forming a downward flow portion 110 for generating a forced downward flow of the cooling water introduced from the cooling water inlet.

Then, the downward flow portion 100 is composed of the first and second vertical weir (112a, 112b) formed between the inner tube (100a) and the outer tube (100b) when the coolant is introduced by the first and second vertical weir The cooling water is dispersed in three directions, respectively, to allow the flow downward.

In addition, the first and second vertical weirs are formed with first and second horizontal weirs 114a and 114b perpendicular to the weir, respectively, so that the coolant flowing downward from the outside of the first and second vertical weirs flows in the horizontal direction. And flows downward between the first and second vertical weirs so that the coolant hitting the bottom rises in the horizontal direction.

Therefore, the single crystal ingot growth apparatus according to the present invention is equipped with the above-described single crystal ingot cooling water cooling tube to prevent the flow of cooling water inside the single crystal ingot cooling water cooling tube, so that the high temperature heat of the single crystal ingot and the cooling water are quickly exchanged with the single crystal ingot. Even if we raise it at a high speed, it is possible to cool the single crystal ingot quickly.

6 and 7 are front and cross-sectional views illustrating a second embodiment of the single crystal ingot cooling water cooling tube according to the present invention. As shown in FIG. In order to increase the cooling range of the single crystal ingot by placing it close to the silicon melt, the length L2 of the water cooling tube is increased compared to the water cooling tube length L1 of the first embodiment.

6 and 7 refer to the description of the first embodiment when the same member as the first embodiment, and reference numerals are shown in units of 200.

More specifically, the second embodiment of the water cooling tube 200 is made of the same configuration as the first embodiment, when the length (L2) of the water cooling tube is mounted on the single crystal ingot growth apparatus, A penetrating portion 230 penetrating the inner tube and the outer tube is formed at the lower end of the tube so as not to interfere with the sensing of the sensors for controlling the diameter of the ingot and the temperature of the polysilicon melt.

The penetrating portion 230 may be formed in various forms so as not to interfere with the sensing of the sensors. Here, the penetrating portion 230 may be formed in an inverted U shape so as not to interfere with the sensing of the sensors.

Referring to FIG. 8, a single crystal ingot growth apparatus equipped with a water cooling tube having a second embodiment of the present invention having such a configuration, the end of the water cooling tube 200 is polysilicon of the quartz crucible 122. Although positioned close to the melt, the solidification interface between the single crystal ingot 128 and the polysilicon melt is detected by the first and second detection sensors 126a and 126b by the penetrating portion 230.

Accordingly, the first and second detection sensors enable the diameter control of the single crystal ingot, the adjustment of the pulling speed, the temperature control of the polysilicon melt, and the flow of the cooling water inside the water cooling tube for cooling the single crystal ingot. Since the heat exchange area with the single crystal ingot is increased, the high temperature heat and the cooling water of the single crystal ingot can be rapidly exchanged to quickly cool the single crystal ingot even if the single crystal ingot is rapidly increased.

As described above, the single crystal ingot cooling water cooling tube according to the present invention is prevented from stagnant flow of the cooling water inside the tube to have a uniform flow distribution of cooling water throughout the inside of the tube to prevent the generation of scale due to the deposition of impurities.

Therefore, the cooling water leaks due to the deterioration and corrosion of the tube, which prevents it from mixing in the polysilicon melt, thereby reducing the occurrence of defects in the growing single crystal ingot.

In addition, the single crystal ingot growth apparatus according to the present invention is a heat exchange between the single crystal ingot and the water cooling tube is made quickly to increase the growth rate of the single crystal ingot by the rapid cooling of the single crystal ingot, the production yield of the ingot per unit time It will be possible to improve.

Claims (14)

A single crystal ingot cooling water cooling tube is formed of an inner tube and an outer tube, and a coolant inlet and an outlet are formed in the outer tube, respectively, and the coolant flowing from the coolant inlet flows between the inner tube and the outer tube and is discharged to the coolant outlet. To A water cooling tube for single crystal ingot cooling, characterized in that a downward flow portion for generating a forced downward flow of the cooling water introduced from the cooling water inlet is formed between the inner tube and the outer tube. The method of claim 1, And said downward flow portion is a first and second vertical wefts formed vertically between said inner and outer tubes to the lower side of said cooling water inlet. The method of claim 2, And first and second horizontal dams are respectively formed in the first and second vertical dams to generate horizontal flow of the cooling water flowing downward. A growth chamber for growing a single crystal ingot, a quartz crucible placed inside the growth chamber, rotating at a predetermined speed and containing polysilicon melt, and an electric heater for heating the quartz crucible, and formed inside the growth chamber. A water cooling tube for enclosing and cooling the single crystal ingot grown from the quartz crucible, and first and second detection sensors formed outside the growth chamber to detect solidification interfaces of the single crystal ingot and the polysilicon melt. In the single crystal ingot growth apparatus, Wherein the water cooling tube is formed of an inner tube, an outer tube formed with a cooling water inlet and an outlet, respectively, and includes a downward flow portion for generating a forced downward flow of the cooling water introduced from the cooling water inlet. The method of claim 4, wherein And said downward flow portion is a first and a second vertical weir formed vertically between said inner and outer tubes to the lower side of said cooling water inlet to generate a downward flow of cooling water. The method of claim 5, And the first and second horizontal dams are respectively formed in the first and second vertical dams to generate horizontal flow of the cooling water flowing downward. In the inner tube and the outer tube, and the cooling water inlet and outlet are formed in the outer tube, respectively, the cooling water flowing in the cooling water inlet flows between the endothelial and the shell is discharged to the cooling water outlet in the single crystal ingot cooling water cooling tube , A downward flow portion formed between the inner tube and the outer tube to generate a forced downward flow of the cooling water introduced from the cooling water inlet; Water cooling tube for cooling single crystal ingot formed in the lower end of the inner tube and the outer tube and comprises a through portion to the inside of the inner tube to be seen from the outside. The method of claim 7, wherein And said downward flow portion is a first and second vertical wefts formed vertically between said inner and outer tubes to the lower side of said cooling water inlet to generate a downward flow of cooling water. The method of claim 8, And first and second horizontal dams are respectively formed in the first and second vertical dams to generate horizontal flow of the cooling water flowing downward. The method of claim 7, wherein The through portion is formed in the inverted U-shaped single crystal ingot cooling water cooling tube. A growth chamber for growing a single crystal ingot, a quartz crucible placed inside the growth chamber, rotating at a predetermined speed and containing polysilicon melt, and an electric heater for heating the quartz crucible, and formed inside the growth chamber. A water cooling tube for enclosing and cooling the single crystal ingot grown from the quartz crucible, and first and second detection sensors formed outside the growth chamber to detect solidification interfaces of the single crystal ingot and the polysilicon melt. In the single crystal ingot growth apparatus, The water cooling tube is formed of an inner tube and an outer tube formed with a cooling water inlet and an outlet, respectively, A downward flow portion is formed between the inner tube and the outer tube to generate a forced downward flow of the cooling water introduced from the cooling water inlet, Single crystal ingot growth apparatus, characterized in that the through-hole is formed at the lower end of the inner tube and the outer tube to the inside of the inner tube to be seen from the outside. The method of claim 11, And said downward flow portion is a first and a second vertical weir formed vertically between said inner and outer tubes to the lower side of said cooling water inlet to generate a downward flow of cooling water. The method of claim 12, Single and ingot growth apparatus, characterized in that the first and second vertical weeds are respectively provided with a first and a second horizontal weave to generate a horizontal flow of the cooling water flowing downward. The method of claim 11, Single penetrating ingot growth apparatus, characterized in that the through portion is formed in an inverted U shape.