CN219637399U - Water cooling screen and semiconductor process equipment - Google Patents
Water cooling screen and semiconductor process equipment Download PDFInfo
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- CN219637399U CN219637399U CN202321391446.2U CN202321391446U CN219637399U CN 219637399 U CN219637399 U CN 219637399U CN 202321391446 U CN202321391446 U CN 202321391446U CN 219637399 U CN219637399 U CN 219637399U
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- screen
- cylinder
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- 238000001816 cooling Methods 0.000 title claims abstract description 88
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims abstract description 73
- 238000000034 method Methods 0.000 title claims description 12
- 239000004065 semiconductor Substances 0.000 title claims description 12
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract description 27
- 230000000694 effects Effects 0.000 abstract description 8
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 16
- 229910052786 argon Inorganic materials 0.000 description 8
- 239000000110 cooling liquid Substances 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 239000007788 liquid Substances 0.000 description 3
- 238000004781 supercooling Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Abstract
The utility model provides a water-cooling screen, which comprises a water inlet pipeline, a water outlet pipeline, an outer cylinder, an inner cylinder and a top cover, wherein the inner cylinder comprises a straight cylinder part, a conical part and a pair of connecting parts, the straight cylinder part is provided with a cylindrical wall coaxial with the outer cylinder, the conical part is provided with a conical part coaxial with the outer cylinder, the distance between the conical part and an axis is gradually increased from bottom to top, an avoidance gap is formed on the straight cylinder part, the circumferential included angle between two vertical sides of the avoidance gap is a preset included angle, the bottom edge of the conical part is connected with the bottom edge of the avoidance gap of the straight cylinder part, and the connecting parts are connected between two side edges of the conical part and two vertical sides of the avoidance gap; the water-cooled screen also includes a plurality of cooling fins circumferentially disposed on the cone and extending along a vertical plane passing through the axis of the cone. According to the utility model, the plurality of cooling fins are circumferentially arranged on the conical part, so that the cooling effect of the water cooling screen on the monocrystalline silicon rod in the corresponding area of the conical part can be enhanced, and further the uniformity of the quality of the monocrystalline silicon rod along the circumferential direction is ensured.
Description
Technical Field
The utility model relates to the field of semiconductor process equipment, in particular to a water cooling screen and semiconductor process equipment.
Background
In the photovoltaic industry, single crystals are usually produced by a Czochralski method, namely, polycrystalline silicon is placed in a crucible in a single crystal furnace to be melted in an inert gas (argon) atmosphere, seed crystals are used for seeding to remove dislocation, and then the single crystal silicon rod is grown through processes of shouldering, shoulder turning, constant diameter and the like by controlling the temperature, the pulling speed and the diameter, wherein the length of the constant diameter accounts for about 70 percent. In the constant diameter process, heat of the monocrystalline silicon rod needs to be taken away through a water cooling screen, so that the monocrystalline silicon rod can grow rapidly. The faster the water cooling screen takes away heat, the faster the growth rate of the single crystal silicon rod and the higher the single crystal yield.
Therefore, how to improve the cooling effect of the water cooling screen is a technical problem to be solved in the field.
Disclosure of Invention
The utility model aims to provide a water cooling screen and semiconductor process equipment, wherein the water cooling screen can ensure the cooling efficiency of a monocrystalline silicon rod.
In order to achieve the above object, as one aspect of the present utility model, there is provided a water cooling screen, including a water inlet pipe, a water outlet pipe, an outer cylinder, an inner cylinder and a top cover, wherein the outer cylinder is sleeved outside the inner cylinder, and the bottom end of the outer cylinder is connected with the bottom end of the inner cylinder, a cooling cavity is formed between the outer cylinder and the inner cylinder, the top cover seals the top of the cooling cavity, the water inlet pipe and the water outlet pipe are both communicated with the cooling cavity, the water inlet pipe is used for injecting cooling liquid into the cooling cavity, the water outlet pipe is used for guiding out the cooling liquid in the cooling cavity, the inner cylinder includes a straight cylinder part, a tapered part and a pair of connecting parts, the straight cylinder part includes a cylindrical wall coaxial with the outer cylinder, the tapered part has a tapered part coaxial with the outer cylinder, and a distance between the tapered part and an axis is gradually increased from bottom to top, an avoidance gap is formed on the straight cylinder part, an included angle between two sides of the avoidance gap is a preset included angle, and the bottom end of the tapered part and the two sides of the tapered part are connected with two sides of the tapered gap;
the fins are circumferentially disposed on the cone and extend along a vertical plane passing through the cone axis.
As an alternative embodiment of the present utility model, the top end of the straight tube portion is lower than the top end of the outer tube, the top cover is conical, and an included angle between a bus bar of the top cover and a horizontal plane is 35 ° -45 °.
As an alternative embodiment of the present utility model, the included angle between the bus bar of the top cover and the horizontal plane is 45 °.
As an alternative embodiment of the present utility model, the heat sink has a vertical straight edge facing the axis of the tapered portion and an inclined straight edge located at the top of the heat sink, the distance between the vertical straight edge and the axis being identical to the distance between the inner wall of the straight tube portion and the axis, and the shape of the inclined straight edge being identical to the radial cross-sectional shape of the top surface of the top cover.
As an optional embodiment of the present utility model, the preset included angle is 90 ° to 120 °.
As an alternative embodiment of the present utility model, the preset included angle is 120 °.
As an alternative embodiment of the present utility model, the number of the heat radiating fins is 8.
As an alternative embodiment of the utility model, the angle between the generatrix of the conical part and the horizontal plane is 165 ° -170 °.
As an alternative embodiment of the present utility model, the angle between the generatrix of the conical portion and the horizontal plane is 167 °.
As an alternative embodiment of the present utility model, the outer cylinder includes a straight cylinder section, a first conical section and a second conical section sequentially connected from top to bottom, wherein the top end of the straight cylinder section is formed as the top end of the outer cylinder, the bottom end of the straight cylinder section is connected with the top end opening of the first conical section, the bottom end opening of the first conical section is smaller than the top end opening of the first conical section, the top end opening of the second conical section is connected with the bottom end opening of the first conical section, and the bottom end opening of the second conical section is connected with the bottom end of the inner cylinder.
As an alternative embodiment of the present utility model, the water inlet pipe and the water outlet pipe are respectively located at two sides of the inner cylinder, and one of the water inlet pipe and the water outlet pipe is communicated with the cooling cavity through the tapered portion.
As an alternative embodiment of the utility model, the water outlet conduit communicates with the cooling chamber through the cone.
As an optional embodiment of the present utility model, the heat sink is made of red copper.
As a second aspect of the present utility model, there is provided a semiconductor process apparatus, comprising a furnace body, a photographing device and a water-cooling screen, wherein the water-cooling screen is disposed in the furnace body, the photographing device is disposed at the top of the furnace body, and is used for photographing an internal image of the water-cooling screen, and the water-cooling screen is provided by the present utility model.
As an alternative embodiment of the present utility model, the photographing device is a charge-coupled device (CCD) camera.
In the water cooling screen and the semiconductor process equipment provided by the utility model, the outer cylinder, the inner cylinder and the top cover of the water cooling screen jointly define the cooling cavity for supercooling liquid, the straight cylinder part of the inner cylinder is provided with the avoidance notch, and the avoidance notch is blocked by the conical part and the connecting parts at two sides of the conical part, so that the inner cylinder is sunken towards one side of the outer cylinder in the corresponding area of the conical part, and the inner cylinder and the top cover are led to avoid a shooting path of a shooting device (such as a camera) in the area. Meanwhile, a plurality of cooling fins are circumferentially arranged on the conical part, so that the cooling effect of the water cooling screen on the monocrystalline silicon rod in the corresponding area of the conical part is enhanced by the cooling fins, the uniformity of the cooling effect of the water cooling screen on the monocrystalline silicon rod in all directions is further guaranteed, the uniformity of the quality of the monocrystalline silicon rod along the circumferential direction is guaranteed, and the product yield is improved.
Drawings
The accompanying drawings are included to provide a further understanding of the utility model, and are incorporated in and constitute a part of this specification, illustrate the utility model and together with the description serve to explain, without limitation, the utility model. In the drawings:
FIG. 1 is a schematic view of a water-cooled screen according to an embodiment of the present utility model;
FIG. 2 is a schematic cross-sectional view of a water-cooled screen provided by an embodiment of the present utility model;
FIG. 3 is a schematic cross-sectional view of a water-cooled screen provided by an embodiment of the present utility model;
FIG. 4 is a top view of a water cooled screen provided by an embodiment of the present utility model;
fig. 5 is a schematic structural diagram of a semiconductor processing apparatus according to an embodiment of the present utility model.
Reference numerals illustrate:
100: inlet channel 200: water outlet pipeline
300: outer cylinder 310: straight section
320: first tapered section 330: second conical section
400: inner barrel 420: straight tube part
410: taper 430: connecting part
500: top cover 600: heat sink
Detailed Description
The following describes specific embodiments of the present utility model in detail with reference to the drawings. It should be understood that the detailed description and specific examples, while indicating and illustrating the utility model, are not intended to limit the utility model.
In the related art, in order to ensure the growth quality of the single crystal silicon rod, the condition of the growth surface needs to be monitored in real time through a camera, and in order to avoid the water cooling screen blocking the view of the camera, the inner wall of the water cooling screen is usually hollowed out, so that the part of the water cooling screen on the shooting path of the camera is removed.
However, the distance between the inner wall of the hollowed-out area of the water cooling screen and the monocrystalline silicon rod is correspondingly larger than the distance between the inner wall of the rest area of the water cooling screen and the monocrystalline silicon rod, so that the heat exchange efficiency of the water cooling screen between the hollowed-out area and the monocrystalline silicon rod is reduced, and the uniformity of the quality of the monocrystalline silicon rod along the circumferential direction is further affected.
In order to solve the above technical problems, as an aspect of the present utility model, as shown in fig. 1, 2 and 4, a water cooling screen is provided, the water cooling screen includes a water inlet pipe 100, a water outlet pipe 200, an outer cylinder 300, an inner cylinder 400 and a top cover 500, the outer cylinder 300 is sleeved outside the inner cylinder 400, the bottom end of the outer cylinder 300 is connected with the bottom end of the inner cylinder 400, a cooling cavity is formed between the outer cylinder 300 and the inner cylinder 400, the top cover 500 seals the top of the cooling cavity, the water inlet pipe 100 and the water outlet pipe 200 are both communicated with the cooling cavity, the water inlet pipe 100 is used for injecting cooling liquid into the cooling cavity, the water outlet pipe 200 is used for guiding out the cooling liquid in the cooling cavity, the inner cylinder 400 includes a straight cylinder part 420, a tapered part 410 and a pair of connecting parts 430, the straight cylinder part 420 has a cylindrical wall coaxial with the outer cylinder 300, the tapered part 410 has a tapered part 410 coaxial with the outer cylinder 300, a distance between the tapered part 410 and an axis gradually increases from bottom to top, the upper side edge is a vertical clearance between the two side edges of the tapered part and the two side edges of the tapered part 410 are formed by a vertical clearance gap, and the two side edges of the vertical clearance edges are formed between the two side edges of the tapered part and the two side edges of the tapered part 410 are formed by the clearance edges;
the water cooling screen further includes a plurality of cooling fins 600, and the plurality of cooling fins 600 are circumferentially disposed on the tapered portion 410 (i.e., circumferentially disposed about the axis of the outer cylinder 300 and the tapered portion 410) and extend along a vertical plane passing through the axis of the tapered portion 410.
In the water-cooled screen provided by the utility model, the outer cylinder 300, the inner cylinder 400 and the top cover 500 together define a cooling cavity for supercooling liquid, the straight cylinder part 420 of the inner cylinder 400 is provided with the avoidance notch, and the avoidance notch is blocked by the conical part 410 and the connecting parts 430 at two sides of the conical part, so that the inner cylinder 400 is recessed to one side of the outer cylinder 300 in the area corresponding to the conical part 410, and the inner cylinder 400 and the top cover 500 are led to avoid a shooting path of a shooting device (for example, a camera) in the area. Meanwhile, the plurality of cooling fins 600 are further circumferentially arranged on the conical portion 410, so that the cooling effect of the water cooling screen on the monocrystalline silicon rod in the corresponding area of the conical portion 410 is enhanced by the cooling fins 600, the uniformity of the cooling effect of the water cooling screen on the monocrystalline silicon rod in all directions is further ensured, the uniformity of the quality of the monocrystalline silicon rod along the circumferential direction is ensured, and the product yield is improved.
To further secure the quality of the single crystal silicon rod, as a preferred embodiment of the present utility model, as shown in fig. 1 to 3, the top end of the straight tube part 420 is lower than the top end of the outer tube 300, the top cover 500 is tapered, and an angle α between a bus bar of the top cover 500 and a horizontal plane is 35 ° -45 °.
In the embodiment of the utility model, the top cover 500 is conical, and the included angle alpha between the bus of the top cover 500 and the horizontal plane is 35-45 degrees, compared with the scheme of horizontally arranging the top cover 500, the embodiment is more beneficial to the flow of argon, can effectively prevent the retention of the argon, and can prevent the argon from forming turbulence at the opening of the water cooling screen.
In addition, as shown in fig. 3, the shoulder angle γ of the monocrystalline silicon rod 10 is generally 40 ° to 50 °, and in the embodiment of the present utility model, the inclination angle of the bus bar of the top cover 500 is mirrored close to the shoulder angle γ of the monocrystalline silicon rod 10, so that when the shoulder of the monocrystalline silicon rod grows to the upper edge of the water-cooled screen, the flow angle and flow rate of argon flowing to the shoulder of the monocrystalline silicon rod are consistent with those of argon flowing to the top cover 500, so that the flow of argon is more concentrated and smoother, and when the shoulder of the monocrystalline silicon rod is far from the top of the water-cooled screen, the inclination angle can play an important role in the stability of the flow of argon.
As an alternative embodiment of the present utility model, the included angle α between the bus bar of the top cover 500 and the horizontal plane is 45 °.
As an alternative embodiment of the present utility model, the heat sink 600 has a vertical straight edge facing the axis of the taper portion 410 and an inclined straight edge located at the top of the heat sink 600, the distance between the vertical straight edge and the axis being consistent with the distance between the inner wall of the straight tube portion 420 and the axis, and the shape of the inclined straight edge being consistent with the radial sectional shape of the top surface of the top cap 500.
As an alternative embodiment of the present utility model, as shown in fig. 4, the preset included angle β is 90 ° -120 °.
As an alternative embodiment of the present utility model, the preset included angle β is 120 °.
As an alternative embodiment of the present utility model, as shown in fig. 2, the water inlet pipe 100 and the water outlet pipe 200 are respectively located at both sides of the inner cylinder 400, and one of the water inlet pipe 100 and the water outlet pipe 200 communicates with the cooling chamber through the tapered portion 410.
As an alternative embodiment of the present utility model, as shown in fig. 2, the outlet pipe 200 communicates with the cooling chamber through the tapered portion 410.
Considering that the pipe diameter of the water outlet pipe 200 is typically 48mm, the circumferential included angle between every two adjacent fins 600 is about 13 °, and as an alternative embodiment of the present utility model, as shown in fig. 4, the number of the fins 600 is 8.
As an alternative embodiment of the present utility model, the angle between the generatrix of the conical portion 410 and the horizontal plane is 165 DEG to 170 deg.
As an alternative embodiment of the present utility model, the included angle between the generatrix of the conical portion 410 and the horizontal plane is 167 °.
As an alternative embodiment of the present utility model, as shown in fig. 2, the outer cylinder 300 includes a straight cylinder section 310, a first tapered section 320 and a second tapered section 330 sequentially connected from top to bottom, the top end of the straight cylinder section 310 is formed as the top end of the outer cylinder 300, the bottom end of the straight cylinder section 310 is connected with the top end opening of the first tapered section 320, the bottom end opening of the first tapered section 320 is smaller than the top end opening of the first tapered section 320, the top end opening of the second tapered section 330 is connected with the bottom end opening of the first tapered section 320, and the bottom end opening of the second tapered section 330 is connected with the bottom end of the inner cylinder 400.
As an alternative embodiment of the present utility model, the heat sink 600 is made of red copper.
As a second aspect of the present utility model, there is provided a semiconductor process apparatus, comprising a furnace body 20, a photographing device 700 and a water-cooling screen, wherein the water-cooling screen is disposed in the furnace body 20, the photographing device 700 is disposed at the top of the furnace body, and the photographing device 700 is used for photographing an internal image of the water-cooling screen, and the water-cooling screen is provided by the present utility model.
In the semiconductor processing apparatus provided by the present utility model, the outer cylinder 300, the inner cylinder 400 and the top cover 500 of the water cooling screen together define a cooling cavity for supercooling liquid, an avoidance gap is formed on the straight cylinder portion 420 of the inner cylinder 400, and the avoidance gap is blocked by the tapered portion 410 and the connection portions 430 on both sides thereof, so that the inner cylinder 400 is recessed toward the outer cylinder 300 side in the region corresponding to the tapered portion 410, and the inner cylinder 400 and the top cover 500 are made to avoid the photographing path of the photographing device (for example, camera) in the region. Meanwhile, the plurality of cooling fins 600 are further circumferentially arranged on the conical portion 410, so that the cooling effect of the water cooling screen on the monocrystalline silicon rod in the corresponding area of the conical portion 410 is enhanced by the cooling fins 600, the uniformity of the cooling effect of the water cooling screen on the monocrystalline silicon rod in all directions is further ensured, the uniformity of the quality of the monocrystalline silicon rod along the circumferential direction is ensured, and the product yield is improved.
As an alternative embodiment of the present utility model, the photographing device 700 is a charge-coupled device (CCD) camera.
It is to be understood that the above embodiments are merely illustrative of the application of the principles of the present utility model, but not in limitation thereof. Various modifications and improvements may be made by those skilled in the art without departing from the spirit and substance of the utility model, and are also considered to be within the scope of the utility model.
Claims (10)
1. The water cooling screen comprises a water inlet pipeline, a water outlet pipeline, an outer cylinder, an inner cylinder and a top cover, wherein the outer cylinder is sleeved outside the inner cylinder, the bottom end of the outer cylinder is connected with the bottom end of the inner cylinder, a cooling cavity is formed between the outer cylinder and the inner cylinder, the top cover seals the top of the cooling cavity, the water inlet pipeline and the water outlet pipeline are communicated with the cooling cavity,
the inner cylinder comprises a straight cylinder part, a conical part and a pair of connecting parts, wherein the straight cylinder part is provided with a cylindrical wall coaxial with the outer cylinder, the conical part is provided with a conical part coaxial with the outer cylinder, the distance between the conical part and an axis is gradually increased from bottom to top, an avoidance gap is formed on the straight cylinder part, a circumferential included angle between two vertical sides of the avoidance gap is a preset included angle, the bottom end edge of the conical part is connected with the bottom edge of the avoidance gap of the straight cylinder part, and the connecting parts are connected between two side edges of the conical part and two vertical sides of the avoidance gap;
the water cooling screen further comprises a plurality of cooling fins which are circumferentially arranged on the conical portion and extend along a vertical plane passing through the axis of the conical portion.
2. The water screen of claim 1 wherein the top end of the straight barrel portion is lower than the top end of the outer barrel, the top cover is tapered, and an included angle between a generatrix of the top cover and a horizontal plane is 35 ° -45 °.
3. The water cooled screen of claim 2 wherein the fins have a vertical straight edge facing the axis of the cone and an inclined straight edge at the top of the fin, the distance between the vertical straight edge and the axis being consistent with the distance between the inner wall of the straight tube and the axis, the shape of the inclined straight edge being consistent with the radial cross-sectional shape of the top surface of the top cap.
4. A water screen according to any one of claims 1 to 3, wherein the predetermined angle is 90 ° -120 °.
5. A water cooled screen according to any one of claims 1 to 3 wherein the number of cooling fins is 8.
6. A water screen according to any one of claims 1 to 3 wherein the angle between the generatrix of the cone and the horizontal is 165 ° -170 °.
7. A water cooling screen according to any one of claims 1 to 3 wherein the outer barrel comprises a straight barrel section, a first conical section and a second conical section connected in sequence from top to bottom, the top end of the straight barrel section is formed as the top end of the outer barrel, the bottom end of the straight barrel section is connected with the top end opening of the first conical section, the bottom end opening of the first conical section is smaller than the top end opening of the first conical section, the top end opening of the second conical section is connected with the bottom end opening of the first conical section, and the bottom end opening of the second conical section is connected with the bottom end of the inner barrel.
8. A water screen as claimed in any one of claims 1 to 3 wherein the inlet and outlet conduits are located on either side of the inner barrel, respectively, and one of the inlet and outlet conduits communicates with the cooling chamber through the taper.
9. The semiconductor process equipment is characterized by comprising a furnace body, a shooting device and a water cooling screen, wherein the water cooling screen is arranged in the furnace body, the shooting device is arranged at the top of the furnace body and is used for shooting an internal image of the water cooling screen, and the water cooling screen is the water cooling screen according to any one of claims 1 to 8.
10. The semiconductor processing apparatus of claim 9, wherein the camera is a charge coupled device camera.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321391446.2U CN219637399U (en) | 2023-06-02 | 2023-06-02 | Water cooling screen and semiconductor process equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321391446.2U CN219637399U (en) | 2023-06-02 | 2023-06-02 | Water cooling screen and semiconductor process equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219637399U true CN219637399U (en) | 2023-09-05 |
Family
ID=87807674
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321391446.2U Active CN219637399U (en) | 2023-06-02 | 2023-06-02 | Water cooling screen and semiconductor process equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219637399U (en) |
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2023
- 2023-06-02 CN CN202321391446.2U patent/CN219637399U/en active Active
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