JPS62137147A - Apparatus for producing bar-shaped ingot - Google Patents

Apparatus for producing bar-shaped ingot

Info

Publication number
JPS62137147A
JPS62137147A JP27762985A JP27762985A JPS62137147A JP S62137147 A JPS62137147 A JP S62137147A JP 27762985 A JP27762985 A JP 27762985A JP 27762985 A JP27762985 A JP 27762985A JP S62137147 A JPS62137147 A JP S62137147A
Authority
JP
Japan
Prior art keywords
molten metal
solid phase
rod
skirt
ingot
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP27762985A
Other languages
Japanese (ja)
Inventor
Takahide Kimura
木村 隆秀
Kosaku Nakano
中野 耕作
Akira Yamazaki
明 山崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Furukawa Electric Co Ltd
Original Assignee
Furukawa Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Furukawa Electric Co Ltd filed Critical Furukawa Electric Co Ltd
Priority to JP27762985A priority Critical patent/JPS62137147A/en
Publication of JPS62137147A publication Critical patent/JPS62137147A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22DCASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
    • B22D11/00Continuous casting of metals, i.e. casting in indefinite lengths
    • B22D11/14Plants for continuous casting
    • B22D11/145Plants for continuous casting for upward casting

Abstract

PURPOSE:To stabilize the outside diameter of a cast rod and to decrease the intrusion of foreign matter by providing a cylindrical skirt concentrical with a seed bar extending into a molten metal so that the molten metal is separated to a peripheral molten metal part of a solid phase to solidify and the molten metal part around the same. CONSTITUTION:The bottom end of the seed bar 2 of the same type as the molten metal 1 is allowed to contact the surface of the molten metal and the solid phase 3 solidified at the bottom end of the seed bar 2 is rotated and pulled up while said phase is cooled by a water cooling jacket 4 and a cooling gas blow nozzle 5. A cylindrical support 6 consisting of the refractory heat resistant material concentrical with the seed bar 2 is provided around the jacket 4 and the concentrical cylindrical skirt 7 extending into the molten metal 1 is likewise attached to the support 6. The molten metal 1 is thus separated to the peripheral molten metal part 1a of the solid phase 3 to solidify and the molten metal part 1b around the same. The outside diameter of the casting lot is thereby stabilized and the intrusion of the foreign matter is decreased.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は鋳型を用いることなく、溶湯から直接固相を棒
状に引上げる棒状鋳塊製造装置に関し、特に直径10μ
クラスの超極細線用素材とする鋳塊を得るための鋳造装
置を提供するものである。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a rod-shaped ingot manufacturing apparatus that directly pulls solid phase into a rod shape from molten metal without using a mold.
The present invention provides a casting device for obtaining ingots that are used as raw materials for ultra-fine wires.

従来の技術 従来極細線用鋳塊は水冷鋳型を用い、溶湯面に対して鋳
塊を下方に引出す竪型連続鋳造方法、鋳塊を上方に引上
げる上引き連続鋳造方法、鋳塊を水平方向に引出す横型
連続鋳造方法、ベルトアンドホイール型連続鋳造方法、
ツインベルト型連続鋳造方法により造られている。しか
るに近年電子機器の超小型化、高精度化等により直径1
0μクラスの超極細線が要求されるようになり、特に内
部欠陥が少ない鋳塊の製造法の開発が望まれている。
Conventional technology Conventional ultra-fine wire ingots use water-cooled molds; vertical continuous casting method that pulls the ingot downwards against the molten metal surface; top-drawing continuous casting method that pulls the ingot upward; and horizontal casting method. Horizontal continuous casting method, belt and wheel continuous casting method,
Manufactured using twin belt continuous casting method. However, in recent years, due to the miniaturization and higher precision of electronic equipment, the diameter of
Ultra-fine wires of the 0μ class are now required, and there is a particular desire to develop a method for producing ingots with fewer internal defects.

CuやAtの超極細線では伸線加工工程における断線が
大きな問題となっており、断線の原因は大半が素材欠陥
である。
With ultra-fine Cu and At wires, wire breakage during the wire drawing process is a major problem, and the majority of wire breaks are caused by defects in the material.

完全無欠な結晶体を製造する方法としては、鋳型を用い
ることなくSiやGaASなどの半導体を引上げる方法
が知られているが、この方法では鋳塊を単結晶で、極度
に内部品質の高いものとするため、引上げを行なう装置
のみならず、母材や装置の設置されている部屋の清浄度
に注意を払っている。そのため生産性が悪く、長尺化も
されていない。最近この鋳型を用いることなく鋳塊を引
上げる装置を通常の雰囲気中に設置し、かつ小径長尺な
鋳塊ロッドとして強制冷却することにより、比較的高速
で回転引上げする方法が検討されている。
A known method for producing a perfect crystal is to pull semiconductors such as Si or GaAS without using a mold, but this method uses a single crystal ingot with extremely high internal quality. In order to ensure the highest quality, we pay attention to the cleanliness of not only the equipment that performs the lifting, but also the base material and the room where the equipment is installed. As a result, productivity is poor and lengthening is not possible. Recently, a method of pulling the ingot at a relatively high speed without using a mold is being considered by installing a device in a normal atmosphere to pull the ingot and forcing the ingot to cool as a small diameter and long rod. .

発明が解決しようとする問題点 検討中の鋳型を用いることなぐ鋳塊を引上げる方法では
溶湯面iをシ定に保つために、荒引線をフィードして溶
解しており、その結果溶湯中に異物が入り易く、ノロの
発生も起9やすい。
Problems to be Solved by the Invention In the method under consideration for pulling an ingot without using a mold, in order to keep the molten metal surface i constant, a rough drawing wire is fed and melted, and as a result, there are It is easy for foreign matter to get in, and it is also easy for slag to occur.

溶湯上に浮いているノロや異物が鋳塊に付着すると、ロ
ッド外径が急激に変化すると共に・付着部は欠陥となる
。また荒引線の挿入速度によって、凝固部回りの温度分
布が変化し、溶湯内を対流している異物を捕捉すること
ができず、更に溶湯中の酸素量を低減するための木炭等
の投入ができない等の欠点がある。
If slag or foreign matter floating on the molten metal adheres to the ingot, the outside diameter of the rod will change rapidly and the attached area will become defective. In addition, the temperature distribution around the solidification part changes depending on the insertion speed of the rough drawing wire, making it impossible to capture foreign substances convecting within the molten metal, and adding charcoal, etc. to reduce the amount of oxygen in the molten metal. There are drawbacks such as not being able to do so.

問題点を解決するための手段 本発明はこれに鑑み種々検討の結果、鋳型を用いること
なく鋳塊の引上げにおいて、鋳塊ロッドの外径を安定さ
せ、内部への異物の巻き込みを減らすことができる棒状
鋳塊製造装置を開発し、tものである。
Means for Solving the Problems In view of this, the present invention has been developed as a result of various studies, and it is possible to stabilize the outer diameter of the ingot rod when pulling the ingot without using a mold and reduce the entrainment of foreign matter inside. We have developed a rod-shaped ingot manufacturing device that can be used in a variety of ways.

このような本発明製造装置の一つは、金属溶湯面に、溶
湯と同種の種棒下端を接触させて、種棒と種棒下端に凝
固した固相を冷却1−ながら回転させて引上げることに
より、固相を棒状に生長させる装置において、溶湯中に
延びる種棒と同心状スカートを設け、溶湯を凝固する固
相周辺溶湯部とその囲りの溶湯部に分離したことを特徴
とするものである。
One of the manufacturing apparatuses of the present invention is to bring the lower end of a seed rod of the same type as the molten metal into contact with the surface of the molten metal, and rotate and pull up the seed rod and the solid phase solidified at the lower end of the seed rod while cooling. In this apparatus, a seed rod extending into the molten metal and a concentric skirt are provided, and the molten metal is separated into a molten area surrounding the solid phase that solidifies and a molten metal area surrounding the solid phase. It is something.

また本発明装置の他の一つは、金属溶湯面に、溶湯と同
種の種棒下端を接触させて、種棒と種棒下端に凝固した
固相を冷却しながら回転させて引上げることにより、固
相を棒状に生長させイルタを設け、溶湯を凝固する固相
周辺溶湯部と、その囲りの溶湯部に分離したことを特徴
とするものである。
Another device of the present invention is to bring the lower end of a seed rod of the same type as the molten metal into contact with the surface of the molten metal, and rotate and pull up the seed rod and the solid phase solidified on the lower end of the seed rod while cooling. , the solid phase is made to grow into a rod shape, and an ilter is provided to separate the molten metal into a molten area around the solid phase that solidifies the molten metal, and a molten metal area surrounding it.

即ち本発明の一つは、第1図に実線で示すように、金属
溶湯(1)面に溶湯(1)と同種の種棒(2)下端を接
触させて溶湯を凝固せしめ、これを図に用不活性ガスの
吹付はノズル(5)ヲ設け、引上げる種棒(2)及び棒
状固相(3)を強制冷却する。冷却ジャケット(4)の
囲りには種棒(2)と同心状の耐火耐熱材からなる円筒
状支持体(6)ヲ設け、該支持体(6)に溶湯(1)内
に延びる種棒(2]と同心状の円筒状スカート(7)を
取付け、溶湯(1)全凝固する固相(3)の周辺溶湯部
(1a〕とその囲りの溶湯部(1b〕に分離したもので
ある。面図において(8)は溶湯(1)補給のために挿
入する荒引線を示す。
That is, one aspect of the present invention is to solidify the molten metal by bringing the lower end of a seed rod (2) of the same type as the molten metal (1) into contact with the surface of the molten metal (1), as shown by the solid line in FIG. A nozzle (5) is provided for spraying the inert gas, and the seed rod (2) and rod-shaped solid phase (3) to be pulled up are forcibly cooled. A cylindrical support (6) made of a refractory and heat-resistant material is provided around the cooling jacket (4) and is concentric with the seed rod (2). A concentric cylindrical skirt (7) is attached to (2), and the molten metal (1) is separated into a completely solidified solid phase (3) into a surrounding molten metal part (1a) and a surrounding molten metal part (1b). In the plan view, (8) shows a rough line inserted to replenish the molten metal (1).

また本発明の他の一つは、第1図に示す装置に点線で示
すように、溶湯(1)内に延びるスカート(7)の長さ
を長くし、その下端にフィルタ全取付けたものである。
Another aspect of the present invention is that the length of the skirt (7) extending into the molten metal (1) is lengthened as shown by the dotted line in the apparatus shown in Fig. 1, and the entire filter is attached to the lower end of the skirt (7). be.

作用 スカートを設けることにより、溶湯補給のための囲りの
溶解部における荒引線の溶解等により、発生する目視で
きる範囲の異物が凝結する固相周辺溶湯部に進入するの
を有効に防止することができる。また囲りの溶湯部に脱
酸用の木炭を投入しても、その破片が鋳造性を阻害する
ことがない。更にスカート下端にフィルタを取付ければ
目視できないような異物が凝固する固相周辺溶湯に進入
するの全有効に防止することができる。
By providing a working skirt, it is possible to effectively prevent foreign matter within a visible range generated due to melting of rough lines in the melting part of the enclosure for molten metal replenishment from entering the molten metal part around the solid phase where it solidifies. I can do it. Furthermore, even if deoxidizing charcoal is poured into the surrounding molten metal, its fragments will not impede castability. Furthermore, by attaching a filter to the lower end of the skirt, it is possible to effectively prevent invisible foreign matter from entering the molten metal surrounding the solid phase.

スカートの材質としては囲りの溶湯部に溶湯補給の目的
で荒引線全溶解するための温度変化が、凝固する固相周
辺溶湯部への影響をできるだけ小さくし、かつ水冷ジャ
ケットの影響を防止するため、熱伝導率の低いアルミナ
系の耐火物を用い、更に溶湯の透過を防止するため、表
面にアルミナセメント’tコーティングしたものを用い
ることが望ましい。またスカート下端にフィルタを取付
けた装置ではスカート円径を棒状固相の外径の2倍以上
し、スカートとフィルタで囲まれた部分の溶湯量を1分
間当りの固相引上げ量の5倍以上することにより、固相
周辺溶湯部の温度の変動を抑止することができる。
The material of the skirt is to minimize the influence of the temperature change required to completely melt the rough wire for the purpose of replenishing the surrounding molten metal on the molten metal surrounding the solid phase, and to prevent the influence of the water cooling jacket. Therefore, it is desirable to use an alumina-based refractory material with low thermal conductivity, and to further prevent the permeation of molten metal, the surface is coated with alumina cement. In addition, in devices with a filter attached to the lower end of the skirt, the diameter of the skirt should be at least twice the outer diameter of the rod-shaped solid phase, and the amount of molten metal in the area surrounded by the skirt and filter should be at least 5 times the amount of solid phase pulled up per minute. By doing so, fluctuations in the temperature of the molten metal area around the solid phase can be suppressed.

実施例 (1)第1図に実線で示す装置を用い、純Cuの直径2
0−の棒状鋳塊を製造した。スカートには熱伝導率の低
いアルミナ系の気孔率の高い耐火物からなる外径110
鵡、円径60咽の円筒体を用い、その表面にアルミナ七
メンIfコーティングした。
Example (1) Using the apparatus shown by the solid line in Fig. 1, pure Cu with a diameter of 2
A rod-shaped ingot of 0- was manufactured. The skirt has an outer diameter of 110 mm made of alumina-based high porosity refractory material with low thermal conductivity.
A cylindrical body with a diameter of 60 mm was used, and its surface was coated with alumina.

先ずスカートを用いることなく、溶湯温度を搗 1100℃に保持し1、炭酸用木炭全使用することなく
鋳塊の引上げを行ない、該引上げ部より150咽離れた
位置に予熱し之荒引線を挿入して溶解し、溶湯面?はぼ
一定に保持した。その結果安定した鋳造状態で荒引線の
溶解部の溶湯温度は1090℃以下に低下し、鋳塊引上
げ部の溶湯温度は短時間で±3℃以上も変動し、これ得
ることかでがた。
First, without using a skirt, the temperature of the molten metal was maintained at 1,100°C, and the ingot was pulled up without using all the charcoal for carbonation.The ingot was preheated at a position 150 mm away from the pulling part, and a rough drawing wire was inserted. Then melt and the molten metal surface? was held approximately constant. As a result, under stable casting conditions, the temperature of the molten metal in the melting part of the rough drawing wire decreased to below 1090°C, and the temperature of the molten metal in the ingot pulling part fluctuated by more than ±3°C in a short period of time, which was difficult to achieve.

次に溶湯中に上記スカートを約2crn挿入したところ
、鋳塊引上げ部の溶湯温度の変動は±1℃以下となり、
引上げた鋳塊の外径変動も小さく、良好な鋳塊が得られ
た。更にスカートの外側に脱酸用木炭を挿入したが、鋳
塊引上げ部に木炭の侵入は全く認められなかつto (2)第1図に点線で示す装置を用い、純Cuの直径2
0閣の棒状鋳塊を製造した。スカートには上記(2)と
同様の円筒体を用い、その下端に厚さ10露のセラミッ
クフィルターを取付けた。
Next, when the skirt was inserted into the molten metal for about 2 crn, the temperature fluctuation of the molten metal at the ingot pulling part was less than ±1°C.
The pulled ingot had a small variation in outer diameter, and a good quality ingot was obtained. Furthermore, deoxidizing charcoal was inserted outside the skirt, but no charcoal was observed to enter the ingot pulling part.
A rod-shaped ingot with a size of 0 was manufactured. A cylindrical body similar to that in (2) above was used as the skirt, and a ceramic filter having a thickness of 10 dew was attached to the lower end of the cylindrical body.

このスカートを溶湯内に挿入し、その挿入深さと鋳塊引
上げ速度を変化させて、鋳塊引上げ部の温度変動を調べ
友。その代表的結果を第2図に示す。
This skirt was inserted into the molten metal, and the insertion depth and ingot pulling speed were varied to investigate temperature fluctuations at the ingot pulling part. The typical results are shown in FIG.

図は横軸にスカート内の体積〔スカートの断面積’に2
8.3cm(円径60■〕としたので溶湯面からフィル
ターまで距離で示し九〇〕、縦軸に鋳塊引上げ部の溶湯
面から10闇前後の溶湯温度全示したもので、図から判
るように良好な鋳塊を得るためには、スカート内の体積
を1分間の鋳塊引上げ量の5倍以上にしないと安定した
鋳造が行なえないことが判る。
In the figure, the horizontal axis shows the volume inside the skirt [the cross-sectional area of the skirt is 2
The distance from the molten metal surface to the filter is 8.3 cm (circle diameter 60 cm), so the distance from the molten metal surface to the filter is 90], and the vertical axis shows all the molten metal temperatures around 10 mm from the molten metal surface at the ingot pulling part, which can be understood from the figure. It can be seen that in order to obtain a good ingot, stable casting cannot be performed unless the volume inside the skirt is at least five times the amount of ingot pulled up per minute.

次に上記安定状態の鋳塊について、常法により熱間圧延
後冷間伸線と焼鈍を繰返し、線径が50μになるまでの
伸線加工性を従来のスカートを用いない鋳塊引上げ法に
よる鋳塊と比較した。その結果無断線伸線量が10%程
度同上した。
Next, the ingot in the stable state is hot-rolled, then cold-drawn and annealed repeatedly using a conventional method, and the wire drawability is evaluated by the conventional ingot-pulling method without using a skirt until the wire diameter reaches 50μ. Compared with ingot. As a result, the amount of wire drawing without permission increased by about 10%.

発明の効果 このように本発明によれば、異物による鋳塊欠陥が大幅
に減少し、外径精度及び引上げ速度を安定化し、特に直
径10μクラスの超極細線の製造を可能にする等工業上
顕著な効果金臭するものである。
Effects of the Invention As described above, according to the present invention, ingot defects due to foreign matter are greatly reduced, outer diameter accuracy and pulling speed are stabilized, and in particular, it is possible to manufacture ultra-fine wires with a diameter of 10 μ class, etc. The noticeable effect is that it smells like gold.

【図面の簡単な説明】[Brief explanation of drawings]

量の関係を示す説明図である。 】 溶湯  1a スカート内溶湯 1b スカート外側溶湯  2 種棒 3 固相(鋳塊)  4 水冷ジャケット5 冷却ガス
吹付はノズル  6 支持体7 スカート  8 荒引
線 第2図 0   (mm)
FIG. 2 is an explanatory diagram showing the relationship between quantities. ] Molten metal 1a Molten metal inside the skirt 1b Molten metal outside the skirt 2 Seed rod 3 Solid phase (ingot) 4 Water cooling jacket 5 Nozzle for cooling gas spray 6 Support 7 Skirt 8 Rough drawing line Fig. 2 0 (mm)

Claims (3)

【特許請求の範囲】[Claims] (1)金属溶湯面に、溶湯と同種の種棒下端を接触させ
て、種棒と種棒下端に凝固した固相を冷却しながら回転
させて引上げることにより、固相を棒状に生長させる装
置において、溶湯中に延びる種棒と同心状の円筒状スカ
ートを設け、溶湯を凝固する固相周辺溶湯部とその囲り
の溶湯部に分離したことを特徴とする棒状鋳塊製造装置
(1) The lower end of a seed rod of the same type as the molten metal is brought into contact with the surface of the molten metal, and the solid phase solidified on the seed rod and the lower end of the seed rod is rotated and pulled up while cooling, thereby growing the solid phase into a rod shape. 1. A rod-shaped ingot manufacturing device, characterized in that the device is provided with a seed rod extending into the molten metal and a concentric cylindrical skirt, separating the molten metal into a solid phase peripheral molten metal portion for solidifying the molten metal and a surrounding molten metal portion.
(2)金属溶湯面に、溶湯と同種の種棒下端を接触させ
て、種棒と種棒下端に凝固した固相を冷却しながら回転
させて引上げることにより、固相を棒状に生長させる装
置において、溶湯中に延びる種棒と同心状の円筒状スカ
ートを設け、該スカートの下端に溶湯を通過させるフィ
ルタを設け、溶湯を凝固する固相周辺溶湯部と、その囲
りの溶湯部に分離したことを特徴とする棒状鋳塊製造装
置。
(2) The lower end of a seed rod of the same type as the molten metal is brought into contact with the surface of the molten metal, and the solid phase solidified on the seed rod and the lower end of the seed rod is rotated and pulled up while cooling, thereby growing the solid phase into a rod shape. In the device, a cylindrical skirt is provided that is concentric with the seed rod that extends into the molten metal, and a filter is provided at the lower end of the skirt to allow the molten metal to pass through. A rod-shaped ingot manufacturing device characterized by being separated.
(3)スカート円径を棒状固相の外径の2倍以上とし、
スカートとフィルタで囲まれた部分の溶湯量を1分間当
りの引上げ固相量の5倍以上とする特許請求の範囲第2
項記載の棒状鋳塊製造装置。
(3) The skirt diameter is at least twice the outer diameter of the rod-shaped solid phase,
Claim 2 in which the amount of molten metal in the area surrounded by the skirt and filter is 5 times or more the amount of solid phase pulled per minute.
The rod-shaped ingot manufacturing apparatus described in 1.
JP27762985A 1985-12-09 1985-12-09 Apparatus for producing bar-shaped ingot Pending JPS62137147A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27762985A JPS62137147A (en) 1985-12-09 1985-12-09 Apparatus for producing bar-shaped ingot

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27762985A JPS62137147A (en) 1985-12-09 1985-12-09 Apparatus for producing bar-shaped ingot

Publications (1)

Publication Number Publication Date
JPS62137147A true JPS62137147A (en) 1987-06-20

Family

ID=17586090

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27762985A Pending JPS62137147A (en) 1985-12-09 1985-12-09 Apparatus for producing bar-shaped ingot

Country Status (1)

Country Link
JP (1) JPS62137147A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5803996A (en) * 1995-01-25 1998-09-08 Research Development Corporation Of Japan Rod-shaped or tubular amorphous Zr alloy made by die casting and method for manufacturing said amorphous Zr alloy
US5980652A (en) * 1996-05-21 1999-11-09 Research Developement Corporation Of Japan Rod-shaped or tubular amorphous Zr alloy made by die casting and method for manufacturing said amorphous Zr alloy
KR100445191B1 (en) * 2001-11-15 2004-08-21 주식회사 실트론 A cooling tube and a growing apparatus using a cooling tube

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5803996A (en) * 1995-01-25 1998-09-08 Research Development Corporation Of Japan Rod-shaped or tubular amorphous Zr alloy made by die casting and method for manufacturing said amorphous Zr alloy
US5980652A (en) * 1996-05-21 1999-11-09 Research Developement Corporation Of Japan Rod-shaped or tubular amorphous Zr alloy made by die casting and method for manufacturing said amorphous Zr alloy
KR100445191B1 (en) * 2001-11-15 2004-08-21 주식회사 실트론 A cooling tube and a growing apparatus using a cooling tube

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