KR20030008359A - A TiAlN origin multi-layer coated to cemented carbide tool - Google Patents

A TiAlN origin multi-layer coated to cemented carbide tool Download PDF

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KR20030008359A
KR20030008359A KR1020010043830A KR20010043830A KR20030008359A KR 20030008359 A KR20030008359 A KR 20030008359A KR 1020010043830 A KR1020010043830 A KR 1020010043830A KR 20010043830 A KR20010043830 A KR 20010043830A KR 20030008359 A KR20030008359 A KR 20030008359A
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tialn
coated
tialcrn
thin film
cutting
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KR100391501B1 (en
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박준현
박근우
정종규
김학규
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한국야금 주식회사
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/347Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with layers adapted for cutting tools or wear applications
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C29/00Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides
    • C22C29/16Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides based on nitrides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/35Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40Coatings including alternating layers following a pattern, a periodic or defined repetition
    • C23C28/42Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B2228/00Properties of materials of tools or workpieces, materials of tools or workpieces applied in a specific manner
    • B23B2228/10Coatings

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)

Abstract

PURPOSE: A covered hard alloy for cutting tools and wear resistance tools having cutting performance with superior wear resistance, impact resistance and heat resistance is provided. CONSTITUTION: In a TiAlN based multi-layered hard thin film coated on cutting tools or wear resistance tools using physical deposition method, the multi-layered hard thin film is formed by alternately laying up TiAlN covered hard layer and TiAlCrN covered hard layer on the tools in the order of TiAlN/TiAlCrN/TiAlN/TiAlCrN...., wherein the TiAlCrN covered hard layer comprises a composition of (TiaAlbCrc)N, wherein a+b+c=1, c= 5 to 12 at.%, the TiAlN covered hard layer comprises a composition of (TiaAlb)N, wherein a+b=1, a=50 to 60 at.%, and b=50 to 40 at.%, the multi-layered hard thin film is formed on the tools as a 100 to 1700 layer by alternately coating the thin film layer in the structure of TiAlN/TiAlCrN, and the TiaAlbCrcN covered hard layer has a preferential growing direction of <200> surface.

Description

공구용 초경합금에 코팅되는 TiAlN계 다층경질 박막{A TiAlN origin multi-layer coated to cemented carbide tool}TiAN origin multi-layer coated to cemented carbide tool coated on cemented carbide for tooling

본 발명은 내마모성과 내충격성 및 내열성이 우수한 절삭성능을 갖는 절삭공구/내마모성 공구용 피복경질합금에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a coated hard alloy for cutting tool / abrasion resistant tool having cutting performance excellent in wear resistance, impact resistance and heat resistance.

절삭공구/내마모성 공구에 내마모성을 향상시키기 위해서 물리증착법을 이용한 TiN,TiCN,TiAlN의 피복 경질 합금을 증착시키는 것은 일반적이며 이들 박막중 고온에서 가장 내마모성이 우수하여 근래에 금속 절삭 분야에서 가장 각광받고 있는 박막은 TiAlN 피복경질합금이다. 그러나 기계 산업이 고도로 발달하고 그 결과로서 가공조건이 고속화함에 따라 절삭공구 또는 내마모성 공구의 수명을 증대시키는 것이 요구되고 있다. 그러므로 경도가 비커스경도 2700이며 산화 개시 온도가 800℃로 알려진 TiAlN 피복경질합금 역시 고속 가공조건에서는 가공물에서의 온도가 800℃이상으로 발생하는 열로 인해 TiAlN 피복경질합금이 산화되면서 경도가 저하되어 공구의 수명이 단축되므로 고온에서도 고경도를 유지하면서 내산화성이 우수한 박막의 필요성이 대두되었다.In order to improve abrasion resistance of cutting tools / abrasion resistant tools, it is common to deposit TiN, TiCN, TiAlN-coated hard alloys using physical vapor deposition. The thin film is a TiAlN coated hard alloy. However, as the machinery industry develops highly and as a result, machining conditions are increased, it is required to increase the life of cutting tools or wear resistant tools. Therefore, TiAlN coated hard alloy, known as Vickers hardness 2700 and oxidation start temperature of 800 ° C, is also hardened due to oxidation of TiAlN coated hard alloy due to heat generated at temperatures above 800 ° C under high-speed processing conditions. As the life is shortened, there is a need for a thin film having excellent oxidation resistance while maintaining high hardness even at high temperatures.

이러한 필요성에 의해 최근에는 절삭공구 또는 내마모성 공구의 성능을 향상시키기 위해서 TiAlN 피복경질합금에 금속원소인 실리콘(Si),크롬(Cr),구리(Cu)등을 첨가한 TiAlXN 피복경질합금이 개발되었다.Recently, in order to improve the performance of cutting tools or wear-resistant tools, TiAlXN coated hard alloys containing silicon (Si), chromium (Cr), copper (Cu), etc., which are metal elements, have been developed. .

이러한 TiAlXN 피복경질합금의 경우 경도가 비커스경도 3000이상으로 나타나며 내산화온도가 1000℃ 이상으로 나타나 절삭공구 또는 내마모성 공구의 표면에 피복시 TiAlN 피복경질합금보다 고속 연속절삭에서 우수한 내마모성을 나타내는 것으로 알려져 있다.In the case of TiAlXN coated hard alloys, the hardness is Vickers hardness of 3000 or more, and the oxidation temperature is higher than 1000 ° C. .

그러나 TiAlXN 피복경질합금의 경우 경도가 높아 내마모성은 우수하나 내충격성은 TiAlN 피복경질합금보다 상대적으로 열세하여 단속이 발생하는 절삭시에는 공구의 파손이 발생하는 현상이 나타났다.However, TiAlXN coated hard alloys had high hardness and had good abrasion resistance, but impact resistance was relatively inferior to TiAlN coated hard alloys, resulting in breakage of the tool during interrupted cutting.

미국특허 5503912에 의하면 단속절삭시 파손이 일어나는 현상을 방지하기 위하여 결정 성장방향이 다른 피복경질합금을 교차하여 적층하므로써 파손을 줄일 수 있다고 언급되어있다.According to US Pat. No. 5,503,912, breakage can be reduced by stacking cross-coated hard alloys having different crystal growth directions in order to prevent breakage during interrupted cutting.

본 발명은 상기와 같은 종래의 문제점 및 과제를 해결하기 위한 것으로, TiAlN 피복경질합금에 금속원소인 Cr을 첨가한 (200) 우선 성장인 TiAlCrN 피복경질합금과 (111) 우선성장인 TiAlN 피복경질합금을 100-1700층으로 교차하여 적층 코팅하므로써 고온경도 유지 및 산화개시온도를 향상시킴과 동시에 내충격성을 향상시켜 고속가공이 가능한 피복경질합금을 얻는데 그 목적이 있다.The present invention is to solve the conventional problems and problems as described above, the TiAlCrN coated hard alloy (200) first growth and the (111) preferred growth TiAlN coated hard alloy with the addition of Cr as a metal element to the TiAlN coated hard alloy It is the purpose to obtain a coating hard alloy capable of high-speed processing by maintaining the high temperature hardness and improving the oxidation start temperature by cross-coating to 100-1700 layers and the impact resistance.

상기의 목적을 달성하기 위해서 본 발명은;The present invention to achieve the above object;

공구용 초경합금에 다층경질박막을 코팅하는 방법에 있어서,In the method of coating a multilayer hard thin film on a cemented carbide for tools,

피코팅물과 코팅물인 타겟들을 로에 장입하고 펌프를 이용하여 로내 압력을 5.0×10-5토르 이하로 진공배기한 후 히터로 로내 온도를 400℃까지 가열한 다음, Ar가스와 반응가스를 투입하고 바이어스 전압을 130V로 인가하고, 한쪽 타겟의 스퍼터 전력은 5KW로 고정하고 다른 한쪽 타겟의 스퍼터 전력은 1-5KW로 하고, 적층수 조절을 위해 피코팅물에 장착된 지그의 회전수를 조절하면서 물리증착법으로 코팅하는 다층 경질박막 코팅방법을 제공한다. 여기서, 상기 타겟들은 한쪽은 TiAl타겟이며, 다른한쪽은 TiAlCr 타겟으로함이 바람직하며, 또한 상기 반응 가스는 N2로 한다. 또한, 상기 코팅되는 다층경질박막의 두께는 2℃m로 증착하였으며, 또한 상기 다른 한쪽 타겟의 스퍼터전력을 가변으로 하는 것은 적층되는 Cr함량을 조절하기 위함이며, 본 발명에서의 코팅법은 물리증착 코팅법중 언밸런스드 마그네트론 스퍼터링법(이하 "UMB법")을 이용하여 코팅을 실시하여 종래의 마그네트론 스퍼터법에 별도의 자장을 만들어주어 스퍼터된 전자와 이온들이 자장에 구속되어 피코팅물까지 도달할 수 있도록 한다.Load the targets to be coated and coated into the furnace, evacuate the furnace pressure to 5.0 × 10 -5 Torr or less by using a pump, heat the furnace temperature to 400 ℃ with a heater, and add Ar gas and reaction gas. The bias voltage is applied at 130V, the sputter power of one target is fixed at 5KW, the sputter power of the other target is 1-5KW, and the physical speed is controlled by adjusting the number of revolutions of the jig mounted on the coated object to control the stacking number. Provided is a multilayer hard thin film coating method coated by vapor deposition. Here, the targets are preferably TiAl targets on one side, and TiAlCr targets on the other side, and the reaction gas is N 2 . In addition, the thickness of the coated multi-layered thin film was deposited at 2 ℃ m, and also to change the sputter power of the other target to control the Cr content to be laminated, the coating method in the present invention is physical vapor deposition Coating is performed using unbalanced magnetron sputtering method (hereinafter referred to as "UMB method") of the coating method to create a separate magnetic field in the conventional magnetron sputtering method, the sputtered electrons and ions are bound to the magnetic field to reach the coating object To be able.

본 발명은 또한, 상기와 같이 다층경질박막 코팅방법으로 코팅되는 다층경질박막으로서 상기 다층경질박막은 (TiaAlbCrc)N계이며 여기서 a+b+c=1이고, c=5원자%~12원자%이며 경질박막층은 TiAlN/TiAlCrN구조로 교차하여 100-1700층으로 코팅되는 다층경질박막을 제공한다. 여기서, 상기 TiAlCrN 피복층은 우선 성장 방위가(200)면임이 바람직하다.The present invention is also a multilayer hard thin film coated by the multilayer hard thin film coating method as described above, wherein the multilayer hard thin film is (TiaAlbCrc) N-based, where a + b + c = 1, c = 5 atomic% to 12 atomic% The hard thin film layer provides a multilayer hard thin film that is coated with a 100-1700 layer by crossing in a TiAlN / TiAlCrN structure. Here, the TiAlCrN coating layer is preferably a growth orientation (200) plane.

또한 본 발명에서 사용되는 TiAlN 피복경질층은 (TiaAlb)N의 조성으로 이루어저며 여기서 a+b=1이고 a=50원자%∼60원자%이고 b=50원자%∼40원자% 이다.In addition, the TiAlN coating hard layer used in the present invention is composed of (TiaAlb) N, wherein a + b = 1, a = 50 atomic% to 60 atomic% and b = 50 atomic% to 40 atomic%.

코팅을 실시한 시편의 조성을 결정하기 위해서 오제전자 분광(auger electron spectroscopy)분석(이하 AES)을 실시하였으며 X-선회절(XRD)법으로 회절피크를 조사하였다.To determine the composition of the coated specimen, Auger electron spectroscopy analysis (hereinafter referred to as AES) was performed, and the diffraction peaks were examined by X-ray diffraction (XRD) method.

<실시예1>Example 1

먼저 피코팅물은 초경합금을 사용하였으며 밀링 절삭 시험을 위해 P30 등급의 ISO 규격 SPCN1203EDTR을 코팅하였으며 엔드밀 절삭 시험을 위해 Z10 등급의 직경 8mm의 4날짜리 엔드밀에 코팅을 실시하였다.First, the coated material was cemented carbide, coated with P30 grade ISO standard SPCN1203EDTR for milling cutting test, and then coated on a Z10 grade 4 mm end mill for end mill cutting test.

적층수에 따른 성능을 파악하고자 코팅방법은 위에서 설명한 바와 같이 UBM법을 이용하여 TiAl 타겟은 스퍼터 전력을 5KW로 고정시키고 TiAlCr 타겟의 전력은 3KW로 고정시키고 Bias 전압은 130V로 고정시켰다.As described above, the coating method used the UBM method to fix the sputter power at 5KW, the TiAlCr target power at 3KW, and the bias voltage at 130V.

그리고 적층수를 조절하기 위하여 JIG의 회전수를 1-10rpm으로 가변시키면서 막두께가 2㎛가 될 때까지 코팅을 실시하였다.And coating was performed until the film thickness became 2 micrometer, changing the rotation speed of JIG to 1-10 rpm in order to adjust the lamination number.

아래의 표1에는 본 발명에 의해서 제조된 TiAlN 피복 경질 합금과 TiAlCrN 피복 경질 합금의 적층수에 따른 경도값에 대해서 나타내었다.Table 1 below shows the hardness values according to the number of stacked TiAlN-coated hard alloy and TiAlCrN-coated hard alloy prepared according to the present invention.

표1에 나타낸 것처럼 종래기술로 제작된 TiAlN과 TiAlCrN 피복 경질 합금을 비교하면 TiAlCrN 피복 경질합금의 경도가 상대적으로 높은 것을 알 수 있다.As shown in Table 1, when comparing TiAlN and TiAlCrN coated hard alloys manufactured in the prior art, it can be seen that the hardness of TiAlCrN coated hard alloys is relatively high.

경도값의 증가에 대한 정확한 이유는 아직 밝혀지지 않았으나 제3의 원소가 고온에서의 Ti의 산화를 방지하며 박막의 고밀도화를 이루는 것으로 추측된다.The exact reason for the increase of the hardness value is not yet known, but it is assumed that the third element prevents the oxidation of Ti at high temperature and densifies the thin film.

본 발명품의 경우 먼저 Cr의 함량이 12at%로 동일할 때 TiAlN 피복 경질 합금과 TiAlCrN 피복 경질 합금의 적층수에 따른 경도를 비교하면 적층수가 300층까지는 경도값이 거의 동일한 값을 나타내었으나 종래기술로 제작된 단층의 TiAlCrN 피복 경질 합금보다는 경도값이 높은 것을 알 수 있다. 적층수가 500층일 때부터 경도값이 비약적으로 증가하기 시작하여 1500층 일때 가장 높은 경도값을 나타냈다.In the case of the present invention, when the content of Cr is equal to 12at%, the hardness of TiAlN-coated hard alloy and TiAlCrN-coated hard alloy is compared to the hardness of up to 300 layers. It can be seen that the hardness value is higher than that of the prepared TiAlCrN-coated hard alloy. The hardness value started to increase dramatically when the number of laminated layers was 500 layers, and the highest hardness value was obtained when 1500 layers.

그러나 적층수가 1700층일 때는 경도값이 오히려 감소하여 단층의 TiAlCrN 피복 경질합금 보다 낮은 결과를 나타냈으며 적층수가 2000층일 때는 이보다 낮은 경도값을 나타냈다.However, when the lamination number was 1700 layers, the hardness value was rather decreased, which resulted in a lower result than the TiAlCrN-coated hard alloy of the single layer, and when the lamination number was 2000 layers, the hardness value was lower.

구분division 박막 조성Thin film composition 적층수Stacked Number 경도(Hv)Hardness (Hv) 내산화온도(℃)Oxidation Temperature (℃) 종래기술Prior art 1One (Ti0.5Al0.5)N(Ti 0.5 Al 0.5 ) N 1One 27002700 800800 22 (Ti0.44Al0.44Cr0.12)N(Ti 0.44 Al 0.44 Cr 0.12 ) N 1One 29502950 10001000 본발명품Invention 33 (Ti0.44Al0.44Cr0.12)N(Ti 0.44 Al 0.44 Cr 0.12 ) N 100100 29702970 11601160 44 (Ti0.44Al0.44Cr0.12)N(Ti 0.44 Al 0.44 Cr 0.12 ) N 300300 29802980 11601160 55 (Ti0.44Al0.44Cr0.12)N(Ti 0.44 Al 0.44 Cr 0.12 ) N 500500 30603060 11901190 66 (Ti0.44Al0.44Cr0.12)N(Ti 0.44 Al 0.44 Cr 0.12 ) N 700700 31003100 11901190 77 (Ti0.44Al0.44Cr0.12)N(Ti 0.44 Al 0.44 Cr 0.12 ) N 10001000 31203120 12101210 88 (Ti0.44Al0.44Cr0.12)N(Ti 0.44 Al 0.44 Cr 0.12 ) N 13001300 31403140 12101210 99 (Ti0.44Al0.44Cr0.12)N(Ti 0.44 Al 0.44 Cr 0.12 ) N 15001500 31803180 12001200 1010 (Ti0.44Al0.44Cr0.12)N(Ti 0.44 Al 0.44 Cr 0.12 ) N 17001700 29002900 11701170 1111 (Ti0.44Al0.44Cr0.12)N(Ti 0.44 Al 0.44 Cr 0.12 ) N 20002000 28002800 11701170

표 1Table 1

<실시예2>Example 2

실시예1에서 코팅한 시료를 이용하여 내산화 TEST를 실시하였다. 내산화TEST의 경우 표2 조건에서 실시하였으며 결과는 표1에 나타내었다.Oxidation test was performed using the sample coated in Example 1. The oxidation-resistant test was performed under the conditions of Table 2 and the results are shown in Table 1.

표1에 나타낸 것처럼 1번시료의 경우 산화온도가 800℃로 나타났으나 Cr을 12원자%첨가한 2번 시료의 경우 내산화 온도가 1000℃로 증가한 것으로 나타났다.As shown in Table 1, the oxidation temperature was 800 ° C. for sample No. 1, but the oxidation temperature was increased to 1000 ° C. for sample No. 2 containing 12 atomic percent Cr.

온도범위Temperature range 상온 - 1300℃Room temperature-1300 ℃ 온도증가율Temperature increase rate 10℃/min10 ℃ / min 분위기atmosphere 건조공기, 1atmDry air, 1atm 공기유량Air flow 공기유량: 150㎤/minAir flow rate: 150 cm3 / min

표 2TABLE 2

본 발명품의 적층수가 100층인 3번 시료부터는 내산화온도가 비약적으로 증가하는 것을 알 수 있다. 그러나 11번 시료까지 적층수가 증가할수록 산화 개시온도가 다소 차이는 있었지만 거의 동일한 결과를 나타내었으며 적층수가 1700층인 10번 시료부터는 산화개시온도가 저하되는 것을 알 수 있다. 그러므로 Cr의 함량이 동일할시 TiAlN/TiAlCrN의 적층수가 100층에서 1500층까지는 적층수에 따른 내산화성 개선의 효과는 동일한 것으로 나타났다.It can be seen from the sample No. 3 having the number of laminated layers of the present invention that the oxidation resistance increased dramatically. However, as the number of laminations increased to 11 samples, the oxidation initiation temperature was slightly different. The results showed almost the same results. From the sample No. 10 having 1700 layers, the oxidation start temperature was lowered. Therefore, when the content of Cr is the same, the number of TiAlN / TiAlCrN laminated number from 100 layers to 1500 layers showed the same effect of improving the oxidation resistance according to the laminated number.

<실시예3>Example 3

실시예1에서 코팅한 ISO 규격 SPCN1203EDTR을 이용하여 밀링 절삭성능 시험을 실시하였다. 절삭 성능시험은 연속 절삭 시험과 단속 절삭시험을 실시하였으며 평가 조건은 표3에 나타내었다.Milling performance test was performed using the ISO standard SPCN1203EDTR coated in Example 1. The cutting performance test was performed by the continuous cutting test and the intermittent cutting test. The evaluation conditions are shown in Table 3.

연속 내마모시험은 폭150mm, 길이 265mm의 각재를 가공하였으며 단속 절삭시험은 폭 25mm,길이 265mm인 각재 3장을 각각 3mm만큼 이격 시켜서 겹친 형태로 가공하였다.The continuous abrasion resistance test processed 150mm wide and 265mm long beams, and the intermittent cutting test was processed three layers of 25mm wide and 265mm long by 3mm apart.

연속 내마모시험의 평가는 10pass 가공후 여유면 마모량을 측정하였으며 단속 절삭시험은 아래의 조건에서 1회 실시하여 파손이 발생하지 않을 경우 날당 이송량을 증가하여 파손시까지 실시하였다.The evaluation of the continuous wear test measured the amount of wear on the surface after 10 pass machining. The intermittent cutting test was carried out once under the following conditions.

연속내마모시험Continuous wear test 단속절삭시험Intermittent Cutting Test 가공물Workpiece SCM440(HB250)SCM440 (H B 250) SCM440(HB250)SCM440 (H B 250) 절삭속도(m/min)Cutting speed (m / min) 271271 125125 날당이송량(mm/刃)Feed per day (mm / 刃) 0.1670.167 0.24 - 0.60.24-0.6 절입량(mm)Depth of cut (mm) 2.02.0 2.02.0 절삭유Coolant radish radish 가공 시간(pass)Pass time 1010 파손시까지Until breakage

표 3TABLE 3

평가결과는 표4에 나타내었으며 종래기술로 제작한 1번과 2번 시료를 비교하면 Cr 12원자%를 함유한 2번 시료가 내마모성은 우수하였지만 단속 절삭시험에서는 열세한 결과를 나타냈다.The results of the evaluation are shown in Table 4, and when the samples of No. 1 and No. 2 manufactured according to the prior art were compared, the No. 2 containing 12 atomic percent Cr was excellent in abrasion resistance but inferior in the interrupted cutting test.

본 발명품의 경우 적층수 100층인 3번 시료의 경우 단층인 2번 시료와 동일한 절삭 성능을 나타냈으나 적층수 300층인 4번 시료부터는 연속내마모성 및 단속 절삭성능이 개선되기 시작하여 5번 시료부터 9번 시료까지는 연속 내마모시험과 단속 절삭시험에서 우수한 성능을 나타내어 적층으로 인한 연속 및 단속 절삭성의 성능 개선의 효과가 있는 것으로 나타났다.In the case of the present invention, the sample No. 3 with 100 layers of lamination showed the same cutting performance as the sample No. 2 with single layer, but from the sample No. 4 with 300 layers of lamination, the continuous wear resistance and intermittent cutting performance began to improve. The burned samples showed excellent performance in the continuous wear test and the interrupted cutting test, which showed the effect of improving the performance of the continuous and interrupted cutting properties due to the lamination.

그러나 10번 시료는 단속 절삭성의 개선이 다소 열세한 것으로 나타났으며 11번시료는 연속 내마모성 및 단속 절삭성능의 개선효과가 없는 것으로 나타났다.However, sample 10 was inferior to the improvement of intermittent machinability, and sample 11 showed no improvement in continuous wear resistance and intermittent cutting performance.

구분division 박막 조성Thin film composition 적층수Stacked Number 연속내마모시험여유면마모(mm)Continuous wear resistance margin wear (mm) 단속절삭시험최대날당이송량(mm/刃)Intermittent cutting test Max feed rate (mm / 刃) 1One (Ti0.5Al0.5)N(Ti 0.5 Al 0.5 ) N 1One 0.280.28 0.480.48 22 (Ti0.44Al0.44Cr0.12)N(Ti 0.44 Al 0.44 Cr 0.12 ) N 1One 0.190.19 0.240.24 33 (Ti0.44Al0.44Cr0.12)N(Ti 0.44 Al 0.44 Cr 0.12 ) N 100100 0.200.20 0.300.30 44 (Ti0.44Al0.44Cr0.12)N(Ti 0.44 Al 0.44 Cr 0.12 ) N 300300 0.170.17 0.360.36 55 (Ti0.44Al0.44Cr0.12)N(Ti 0.44 Al 0.44 Cr 0.12 ) N 500500 0.1610.161 0.540.54 66 (Ti0.44Al0.44Cr0.12)N(Ti 0.44 Al 0.44 Cr 0.12 ) N 700700 0.150.15 0.540.54 77 (Ti0.44Al0.44Cr0.12)N(Ti 0.44 Al 0.44 Cr 0.12 ) N 10001000 0.1560.156 0.540.54 88 (Ti0.44Al0.44Cr0.12)N(Ti 0.44 Al 0.44 Cr 0.12 ) N 13001300 0.1580.158 0.540.54 99 (Ti0.44Al0.44Cr0.12)N(Ti 0.44 Al 0.44 Cr 0.12 ) N 15001500 0.1520.152 0.540.54 1010 (Ti0.44Al0.44Cr0.12)N(Ti 0.44 Al 0.44 Cr 0.12 ) N 17001700 0.180.18 0.30.3 1111 (Ti0.44Al0.44Cr0.12)N(Ti 0.44 Al 0.44 Cr 0.12 ) N 20002000 0.1950.195 0.240.24

표 4Table 4

<실시예4>Example 4

실시예1에서 코팅한 직경 8mm의 4날짜리 엔드밀을 이용하여 절삭 성능테스트를 실시하였으며 평가 조건은 표5에 나타내었다.Cutting performance test was carried out using a four-day end mill with a diameter of 8mm coated in Example 1 and the evaluation conditions are shown in Table 5.

엔드밀 절삭성능시험은 길이 265mm의 각재를 20pass 가공하였으며 가공후 각 날의 인선부 마모량을 측정하여 평균 마모량을 표6에 나타내었다.In the end mill cutting performance test, 20 passes were processed for 265mm length of the bar, and the average wear was measured in Table 6 after measuring the edge wear of each blade.

마모량 측정시 4날중 1날이라도 파손이 발생하였을 경우 평균 마모량에 파손이라고 표기하였다.When the wear amount was measured even if one day out of four days, the average amount of wear is indicated as breakage.

연속내마모시험Continuous wear test 가공물Workpiece SKD61(HRC52)SKD61 (HRC52) 절삭속도(m/min)Cutting speed (m / min) 6060 이송량(mm/tooth)Feed rate (mm / tooth) 0.0230.023 절입량(mm)Depth of cut (mm) 축방향:1.2반경방향:0.8Axial direction: 1.2 Radial direction: 0.8 절삭유Coolant radish 가공 시간(pass)Pass time 2020

표 5Table 5

평가결과는 표6에 나타내었으며 종래기술로 제작한 1번 시료는 4날중 2날이파손이 발생하였다.The evaluation results are shown in Table 6, and the first sample prepared according to the prior art had two blade breakages in four days.

본 발명품의 경우 3번 시료는 2번 시료와 유사한 마모량을 나타냈으며 적층수가 300층인 4번 시료부터는 내마모성이 개선되기 시작하여 적층수가 1300층인 8번 시료가 가장 우수한 절삭성능을 나타냈다.In the case of the present invention, sample 3 showed a similar amount of wear to sample 2, and sample 4 of which the number of laminated layers was 300 began to improve wear resistance, and sample 8 of the 1300 layers had the best cutting performance.

구분division 박막 조성Thin film composition 적층수Stacked Number 내마모 시험평균마모(mm)Abrasion resistance test average wear (mm) 1One (Ti0.5Al0.5)N(Ti 0.5 Al 0.5 ) N 1One 파 손damage 22 (Ti0.44Al0.44Cr0.12)N(Ti 0.44 Al 0.44 Cr 0.12 ) N 1One 0.1570.157 33 (Ti0.44Al0.44Cr0.12)N(Ti 0.44 Al 0.44 Cr 0.12 ) N 100100 0.1520.152 44 (Ti0.44Al0.44Cr0.12)N(Ti 0.44 Al 0.44 Cr 0.12 ) N 300300 0.1420.142 55 (Ti0.44Al0.44Cr0.12)N(Ti 0.44 Al 0.44 Cr 0.12 ) N 500500 0.1300.130 66 (Ti0.44Al0.44Cr0.12)N(Ti 0.44 Al 0.44 Cr 0.12 ) N 700700 0.1240.124 77 (Ti0.44Al0.44Cr0.12)N(Ti 0.44 Al 0.44 Cr 0.12 ) N 10001000 0.1100.110 88 (Ti0.44Al0.44Cr0.12)N(Ti 0.44 Al 0.44 Cr 0.12 ) N 13001300 0.1070.107 99 (Ti0.44Al0.44Cr0.12)N(Ti 0.44 Al 0.44 Cr 0.12 ) N 15001500 0.1120.112 1010 (Ti0.44Al0.44Cr0.12)N(Ti 0.44 Al 0.44 Cr 0.12 ) N 17001700 0.1420.142 1111 (Ti0.44Al0.44Cr0.12)N(Ti 0.44 Al 0.44 Cr 0.12 ) N 20002000 파 손damage

표 6Table 6

<실시예5>Example 5

절삭시료는 <실시예1>에서와 동일하게 코팅을 실시하였다.The cutting sample was coated in the same manner as in <Example 1>.

코팅방법은 <실시예1>에서 설명한바와 같이 동일한 방법으로 UBM법을 이용하여 TiAl 타겟은 스퍼터 전력을 5KW로 고정시키고 Cr의 함량을 조절하기 위해서 TiAlCr 타겟의 전력은 0.5-5KW로 가변시키고 Bias 전압은 130V로 고정시켰다. 그리고 JIG의 회전수는 6rpm으로 고정하여 막두께가 2㎛가 될 때까지 코팅을 실시하였다.As described in <Example 1>, the coating method uses the UBM method in order to fix the sputter power at 5 KW and control the Cr content in the TiAl target by varying the power of the TiAlCr target to 0.5-5 KW and the bias voltage. Fixed at 130V. And the rotation speed of the JIG was fixed at 6rpm was coated until the film thickness is 2㎛.

아래의 표7에는 본 발명에 의해서 제조된 Cr의 함량에 따른 TiAlN 피복 경질 합금과 TiAlCrN 피복 경질 합금의 다층박막에 대해서 나타내었다.Table 7 below shows the multi-layered thin film of TiAlN-coated hard alloy and TiAlCrN-coated hard alloy according to the amount of Cr prepared by the present invention.

표 7에 나타낸 것처럼 본 발명품의 경우 적층수가 1500층으로 동일할 때 Cr의 함량이 3원자%인 1번시료는 경도개선의 효과가 전혀 없었으며 오히려 단층의 TiAlCrN 피복 경질 합금 보다 경도가 낮은 값을 나타냈다.As shown in Table 7, in the present invention, when the number of laminated layers is the same as 1500 layers, sample 1 having 3 atomic percent Cr has no effect of improving the hardness, but rather has a lower hardness than the TiAlCrN-coated hard alloy of single layer. Indicated.

그러나 Cr의 함량이 5원자%인 2번 시료부터는 경도가 증가하기 시작하여 12원자%인 5번 시료가 가장 높은 경도값을 나타냈다. 그러나 12원자% 초과 첨가시에는 경도값이 저하되기 시작하는 것으로 나타나 Cr의 함량이 12원자% 이상일 때는 경도개선의 효과가 없는 것을 알수있다.However, from sample No. 2 with 5 atomic percent Cr, hardness increased, and sample No. 5 with 12 atomic percent showed the highest hardness. However, when more than 12 atomic% is added, the hardness value begins to decrease, and when the Cr content is more than 12 atomic%, it can be seen that there is no effect of improving the hardness.

구분division 박막 조성Thin film composition 적층수Stacked Number 경도(Hv)Hardness (Hv) 내산화온도(℃)Oxidation Temperature (℃) 본발명품Invention 1One (Ti0.485Al0.485Cr0.03)N(Ti 0.485 Al 0.485 Cr 0.03 ) N 15001500 28202820 10001000 22 (Ti0.475Al0.475Cr0.05)N(Ti 0.475 Al 0.475 Cr 0.05 ) N 15001500 30703070 10501050 33 (Ti0.465Al0.465Cr0.07)N(Ti 0.465 Al 0.465 Cr 0.07 ) N 15001500 31203120 11401140 44 (Ti0.455Al0.455Cr0.09)N(Ti 0.455 Al 0.455 Cr 0.09 ) N 15001500 31503150 11801180 55 (Ti0.44Al0.44Cr0.12)N(Ti 0.44 Al 0.44 Cr 0.12 ) N 15001500 31803180 12001200 66 (Ti0.425Al0.425Cr0.15)N(Ti 0.425 Al 0.425 Cr 0.15 ) N 15001500 31003100 10901090 77 (Ti0.41Al0.41Cr0.18)N(Ti 0.41 Al 0.41 Cr 0.18 ) N 15001500 29802980 10201020 88 (Ti0.4Al0.4Cr0.2)N(Ti 0.4 Al 0.4 Cr 0.2 ) N 15001500 28902890 970970

표 7TABLE 7

<실시예6>Example 6

실시예5에서 코팅한 시료를 이용하여 내산화 TEST를 실시하였다. 내산화 실험의 경우 표2와 동일조건에서 실시하였으며 결과는 표7에 나타내었다.Oxidation resistance test was performed using the sample coated in Example 5. In the case of the oxidation-resistant experiment was carried out under the same conditions as Table 2 and the results are shown in Table 7.

본 발명품의 경우 표7에 나타난 것처럼 1번 시료는 산화 개시 온도가 1000℃로 나타났으나 2번 시료부터는 산화 개시온도가 증가하기 시작하여 Cr을 7원자% 첨가한 3번 시료부터는 산화 개시온도가 비약적으로 증가하여 Cr을 12원자% 첨가한 5번 시료가 가장 높은 산화개시온도를 나타냈다.In the case of the present invention, as shown in Table 7, sample 1 showed an oxidation start temperature of 1000 ° C., but from sample 2, the oxidation start temperature started to increase and from sample 3 added with 7 atomic percent Cr, The 5th sample added with 12 atomic percent Cr showed the highest oxidation start temperature.

그러나 Cr을 15원자% 첨가한 6번 시료부터는 산화 개시 온도가 급격히 감소하기 시작하여 Cr을 12원자% 초과 첨가시에는 산화 개시온도의 개선 효과는 없는 것으로 나타났다.However, from the sixth sample in which Cr was added to 15 atomic%, the oxidation initiation temperature began to decrease rapidly.

<실시예7>Example 7

실시예5에서 코팅한 ISO 규격 SPCN1203EDTR을 이용하여 밀링 절삭성능 시험을 실시하였다. 절삭 성능시험은 연속 절삭 시험과 단속 절삭시험을 실시하였으며 평가 조건은 표3에 나타내었으며 내마모시험의 평가는 실시예 3과 동일한 방법으로 평가하였다.Milling cutting performance test was performed using the ISO standard SPCN1203EDTR coated in Example 5. The cutting performance test was performed by the continuous cutting test and the intermittent cutting test. The evaluation conditions are shown in Table 3, and the evaluation of the abrasion resistance test was evaluated in the same manner as in Example 3.

평가결과는 표8에 나타내었으며 본 발명품의 경우 Cr 5원자%를 함유한 2번 시료부터 연속, 단속 절삭성능이 개선되었으며 5번 시료까지 개선의 효과가 나타났으나 Cr을 12원자% 초과 함유한 6번, 7번 시료의 경우 단속 절삭성능은 우수하였으나 연속 내마모성은 5번 시료보다 열세한 결과를 나타냈다.The evaluation results are shown in Table 8. In the case of the present invention, the continuous and interrupted cutting performance was improved from sample No. 2 containing 5 atomic percent Cr, and the result was improved to sample no. 5 but containing more than 12 atomic percent Cr. Interrupted cutting performance was good for samples 6 and 7, but continuous wear resistance was inferior to sample 5.

구분division 박막 조성Thin film composition 연속내마모시험여유면마모(mm)Continuous wear resistance margin wear (mm) 단속절삭시험최대날당이송량(mm/刃)Intermittent cutting test Max feed rate (mm / 刃) 1One (Ti0.485Al0.485Cr0.03)N(Ti 0.485 Al 0.485 Cr 0.03 ) N 0.200.20 0.240.24 22 (Ti0.475Al0.475Cr0.05)N(Ti 0.475 Al 0.475 Cr 0.05 ) N 0.170.17 0.540.54 33 (Ti0.465Al0.465Cr0.07)N(Ti 0.465 Al 0.465 Cr 0.07 ) N 0.1510.151 0.540.54 44 (Ti0.455Al0.455Cr0.09)N(Ti 0.455 Al 0.455 Cr 0.09 ) N 0.150.15 0.540.54 55 (Ti0.44Al0.44Cr0.12)N(Ti 0.44 Al 0.44 Cr 0.12 ) N 0.1520.152 0.540.54 66 (Ti0.425Al0.425Cr0.15)N(Ti 0.425 Al 0.425 Cr 0.15 ) N 0.1680.168 0.540.54 77 (Ti0.41Al0.41Cr0.18)N(Ti 0.41 Al 0.41 Cr 0.18 ) N 0.1810.181 0.540.54 88 (Ti0.4Al0.4Cr0.2)N(Ti 0.4 Al 0.4 Cr 0.2 ) N 0.230.23 0.30.3

표 8Table 8

<실시예8>Example 8

실시예5에서 코팅한 직경 8mm의 4날짜리 엔드밀을 이용하여 절삭 성능테스트를 실시하였으며 평가 조건은 표5에 나타내었으며 엔드밀의 절삭성능 평가는 실시예4와 동일하게 평가하여 평가결과는 표9에 나타내었다.Cutting performance test was carried out using a four-day end mill coated with a diameter of 8mm in Example 5 and the evaluation conditions are shown in Table 5 and the evaluation of the cutting performance of the end mill was evaluated in the same manner as in Example 4. Shown in

본 발명품의 경우 Cr의 함유량이 증가할수록 내마모성이 개선되어 Cr이 9원자% 함유되어있는 4번 시료가 가장 우수한 성능을 나타내었으며 Cr의 함유량이 15원자%인 6번 시료까지는 마모량이 유사하게 나타났다.In the case of the present invention, as the Cr content was increased, the wear resistance was improved, and the fourth sample containing 9 atomic% Cr showed the best performance, and the wear amount was similar to the sixth sample containing 15 atomic% Cr.

그러나 Cr의 함유량이 18원자%인 7번 시료부터는 마모량이 증가하기 시작하여 절삭 성능의 개선의 효과가 없는 것으로 나타났다.However, from the 7th sample with 18 atomic% Cr content, the amount of wear began to increase, indicating no improvement in cutting performance.

구분division 박막 조성Thin film composition 내마모 시험평균마모(mm)Abrasion resistance test average wear (mm) 1One (Ti0.485Al0.485Cr0.03)N(Ti 0.485 Al 0.485 Cr 0.03 ) N 0.1720.172 22 (Ti0.475Al0.475Cr0.05)N(Ti 0.475 Al 0.475 Cr 0.05 ) N 0.1310.131 33 (Ti0.465Al0.465Cr0.07)N(Ti 0.465 Al 0.465 Cr 0.07 ) N 0.1190.119 44 (Ti0.455Al0.455Cr0.09)N(Ti 0.455 Al 0.455 Cr 0.09 ) N 0.1070.107 55 (Ti0.44Al0.44Cr0.12)N(Ti 0.44 Al 0.44 Cr 0.12 ) N 0.1100.110 66 (Ti0.425Al0.425Cr0.15)N(Ti 0.425 Al 0.425 Cr 0.15 ) N 0.1110.111 77 (Ti0.41Al0.41Cr0.18)N(Ti 0.41 Al 0.41 Cr 0.18 ) N 0.1250.125 88 (Ti0.4Al0.4Cr0.2)N(Ti 0.4 Al 0.4 Cr 0.2 ) N 0.1510.151

표 9Table 9

이상에서 언급한 바와 같이, 본 발명에 따르면 절삭공구 또는 내마모성 공구의 표면에 (111) 우선 성장인 TiAlN 피복경질층과 TiAlN 피복경질층에 금속원소인 Cr을 첨가하여 (200) 우선성장인 (TiaAlbCrc)N(여기서 a+b+c=1, c= 5원자%-12원자%)이 화학식을 갖는 피복 경질 합금을 100-1700층으로 교차하여 적층하면 내마모성과 내산화성 및 단속절삭에서 우수한 표면 피복 경질합금이 얻어진다.As mentioned above, according to the present invention, the TiAlN-coated hard layer and the TiAlN-coated hard layer, which are (111) preferential growth, are added to the surface of the cutting tool or the wear resistant tool, and the metal element Cr is added to the (200) preferred growth (TiaAlbCrc). When N (where a + b + c = 1, c = 5 atomic% -12 atomic%) is laminated with 100-1700 layers of coated hard alloy having the chemical formula, the surface coating is excellent in wear resistance, oxidation resistance and interrupted cutting. A hard alloy is obtained.

본 발명을 절삭공구 또는 내마모성 공구에 적용하면 고속 건식가공이 가능하며 특히 단속절삭 작업시 고속에서도 공구의 파손현상을 줄일 수 있다.When the present invention is applied to a cutting tool or a wear resistant tool, high speed dry processing is possible, and in particular, the breakage of the tool can be reduced even at high speed during intermittent cutting operations.

상기에서는 본 발명의 바람직한 실시 예를 참조하여 설명하였지만, 해당 기술분야의 숙련된 당업자는 하기의 특허 청구 범위에 기재된 본 발명의 사상 및 영역으로부터 벗어나지 않는 범위 내에서 본 발명을 다양하게 수정 및 변경시킬 수 있음을 이해할 수 있을 것이다.Although the above has been described with reference to a preferred embodiment of the present invention, those skilled in the art will be able to variously modify and change the present invention without departing from the spirit and scope of the invention described in the claims below. It will be appreciated.

Claims (5)

물리증착법을 이용하여 절삭공구 또는 내마모성 공구에 코팅되는 TiAlN계 다층경질박막에 있어서 TiAlN 피복경질층과 TiAlCrN 피복경질층을 TiAlN/TiAlCrN/TiAlN/TiAlCrN....으로 교차하여 적층함을 특징으로 하는 다층경질박막.TiAlN-coated hard layer and TiAlCrN-coated hard layer are laminated by TiAlN / TiAlCrN / TiAlN / TiAlCrN ... Multilayer hard thin film. 제 1항에 있어서, 상기 TiAlCrN 피복경질층은 (TiaAlbCrc)N의 조성으로 이루어져 있으며 여기서 a+b+c=1이고 c=5원자%-12원자%인 다층경질박막The multilayer hard film of claim 1, wherein the TiAlCrN coated hard layer is composed of (TiaAlbCrc) N, wherein a + b + c = 1 and c = 5 atomic% -12 atomic%. 제 1항에 있어서, 상기 TiAlN 피복경질층은 (TiaAlb)N의 조성으로 이루어져 있으며 여기서 a+b=1이고 a=50원자%-60원자%이고 b=50원자%-40원자%인 다층경질박막The method of claim 1, wherein the TiAlN coating hard layer is composed of (TiaAlb) N, wherein a + b = 1, a = 50 atomic% -60 atomic% and b = 50 atomic% -40 atomic% pellicle 제 1항에 있어서, 상기 박막층은 TiAlN/TiAlCrN 구조로 교차하여 100-1700층으로 코팅됨을 특징으로 하는 다층경질박막.The multilayer hard film of claim 1, wherein the thin film layer is coated with a TiAlN / TiAlCrN structure and coated with a 100-1700 layer. 제 3항에 있어서, 상기 TiaAlbCrcN 피복경질층은 우선 성장방위가 (200)면임을 특징으로 하는 다층경질박막.4. The multilayer hard thin film according to claim 3, wherein the TiaAlbCrcN coated hard layer has a growth direction of (200) plane.
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* Cited by examiner, † Cited by third party
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KR100622912B1 (en) * 2004-06-08 2006-09-19 한국야금 주식회사 A TiAlN-based multi-layer with antiwear and antishock coated to cutting tool
KR100729208B1 (en) * 2005-12-22 2007-06-19 한국야금 주식회사 A hardened thin film with superior surface intensity and bright and a process of thereof
KR100771968B1 (en) * 2006-09-01 2007-11-01 한국야금 주식회사 Pvd coated cutting tool with high wear resistance
KR100779740B1 (en) * 2005-10-19 2007-11-26 한국과학기술연구원 Coating materials for surface covering
CN102776474A (en) * 2012-07-12 2012-11-14 济南大学 Nano composite coating layer for surface treatment of substrate, and preparation method and device of nano composite coating layer

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KR100876366B1 (en) * 2008-04-24 2008-12-31 한국야금 주식회사 Multilayer with antiwear and antishockcoated to cutting tool

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DE3611492A1 (en) * 1986-04-05 1987-10-22 Leybold Heraeus Gmbh & Co Kg METHOD AND DEVICE FOR COATING TOOLS FOR CUTTING AND FORMING TECHNOLOGY WITH PLASTIC LAYERS
JPH04128363A (en) * 1990-09-19 1992-04-28 Limes:Kk Composite material
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JP3546967B2 (en) * 1993-12-28 2004-07-28 日立ツール株式会社 Coated hard alloy
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KR100622912B1 (en) * 2004-06-08 2006-09-19 한국야금 주식회사 A TiAlN-based multi-layer with antiwear and antishock coated to cutting tool
KR100779740B1 (en) * 2005-10-19 2007-11-26 한국과학기술연구원 Coating materials for surface covering
KR100729208B1 (en) * 2005-12-22 2007-06-19 한국야금 주식회사 A hardened thin film with superior surface intensity and bright and a process of thereof
KR100771968B1 (en) * 2006-09-01 2007-11-01 한국야금 주식회사 Pvd coated cutting tool with high wear resistance
CN102776474A (en) * 2012-07-12 2012-11-14 济南大学 Nano composite coating layer for surface treatment of substrate, and preparation method and device of nano composite coating layer

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