KR20020056049A - 유리기판 식각장치 - Google Patents
유리기판 식각장치 Download PDFInfo
- Publication number
- KR20020056049A KR20020056049A KR1020000085333A KR20000085333A KR20020056049A KR 20020056049 A KR20020056049 A KR 20020056049A KR 1020000085333 A KR1020000085333 A KR 1020000085333A KR 20000085333 A KR20000085333 A KR 20000085333A KR 20020056049 A KR20020056049 A KR 20020056049A
- Authority
- KR
- South Korea
- Prior art keywords
- glass substrate
- etching
- sludge
- brush
- cleaning
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/033—Apparatus for opening score lines in glass sheets
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1316—Methods for cleaning the liquid crystal cells, or components thereof, during manufacture: Materials therefor
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Liquid Crystal (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Optics & Photonics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
Description
Claims (3)
- 세정용기;상기 세정용기내의 상 하부의 모서리 부분의 일측에 증류수를 공급하는 샤워봉;상기 세정용기 내의 세정될 적어도 하나의 유리기판;상기 세정용기 상단에 위치하고, 상기 유리기판을 자동 및/또는 수동으로 업/다운하여 유리기판의 상하부면에 있는 침전물 및 슬러지를 제거하는 전후 및/또는 좌우 조정되는 제1브러시를 포함하여 구성되는 유리기판 식각장치.
- 제1항에 있어서,상기 적어도 하나의 유리기판의 측면과 마주하는 상기 세정용기의 측면부분에 고정되어 형성되고, 자동 또는 수동 업/다운되는 유리기판 측면의 침전물 및 슬러지를 제거하는 제2브러시를 더 포함하여 구성되는 유리기판 식각장치.
- 제1항에 있어서, 상기 샤워봉은 질소, 산소를 포함하는 가스를 더 공급하는 것을 특징으로 하는 유리기판 식각장치.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020000085333A KR100652040B1 (ko) | 2000-12-29 | 2000-12-29 | 유리기판 식각장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020000085333A KR100652040B1 (ko) | 2000-12-29 | 2000-12-29 | 유리기판 식각장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20020056049A true KR20020056049A (ko) | 2002-07-10 |
KR100652040B1 KR100652040B1 (ko) | 2006-11-30 |
Family
ID=27688559
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020000085333A KR100652040B1 (ko) | 2000-12-29 | 2000-12-29 | 유리기판 식각장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR100652040B1 (ko) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100741291B1 (ko) * | 2006-02-14 | 2007-07-23 | 에버테크노 주식회사 | Lcd 유리 슬리밍장치 |
KR100835745B1 (ko) * | 2006-12-29 | 2008-06-09 | 최찬규 | 하향식 유리 박형화 방법 |
WO2014142402A1 (ko) * | 2013-03-13 | 2014-09-18 | Pakr Kyung Yong | 글라스 기판 식각장치 및 방법 |
KR101680145B1 (ko) | 2015-06-13 | 2016-12-07 | 주식회사 에이유테크 | 플렉서블 디스플레이 세정장치 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101026744B1 (ko) * | 2010-09-29 | 2011-04-08 | 주식회사 아바텍 | 유리기판 에칭장치 |
KR101352469B1 (ko) | 2012-02-02 | 2014-01-17 | (주) 청심이엔지 | 유리기판 에칭 장치 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06120192A (ja) * | 1992-10-01 | 1994-04-28 | Sumitomo Precision Prod Co Ltd | 両面スクラブ洗浄装置 |
KR0151209B1 (ko) * | 1994-08-11 | 1998-10-01 | 구자홍 | 칼라 음극선관의 구조 및 제조방법 |
US5861066A (en) * | 1996-05-01 | 1999-01-19 | Ontrak Systems, Inc. | Method and apparatus for cleaning edges of contaminated substrates |
JPH11625A (ja) * | 1997-06-13 | 1999-01-06 | Mitsubishi Materials Corp | ウェーハの洗浄装置 |
US20020031914A1 (en) * | 1999-06-18 | 2002-03-14 | Julia S. Svirchevski | Post-plasma processing wafer cleaning method and system |
-
2000
- 2000-12-29 KR KR1020000085333A patent/KR100652040B1/ko not_active IP Right Cessation
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100741291B1 (ko) * | 2006-02-14 | 2007-07-23 | 에버테크노 주식회사 | Lcd 유리 슬리밍장치 |
KR100835745B1 (ko) * | 2006-12-29 | 2008-06-09 | 최찬규 | 하향식 유리 박형화 방법 |
WO2014142402A1 (ko) * | 2013-03-13 | 2014-09-18 | Pakr Kyung Yong | 글라스 기판 식각장치 및 방법 |
KR101680145B1 (ko) | 2015-06-13 | 2016-12-07 | 주식회사 에이유테크 | 플렉서블 디스플레이 세정장치 |
Also Published As
Publication number | Publication date |
---|---|
KR100652040B1 (ko) | 2006-11-30 |
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