KR20010094909A - X-ray detecter and a method for fabricating the same - Google Patents

Abstract

PURPOSE: An X-ray detector and a method for fabricating the same are provided to simplify a fabricating process by changing a structure of a gate and a data pad part. CONSTITUTION: A gate electrode(76) and a gate pad(72) are formed by depositing and patterning the first metal on a substrate(1). An active layer(102) and a gate insulating layer(100) are formed by depositing and patterning the first insulating layer and a semiconductor layer on the gate electrode(76) and the gate pad(72). The first capacitor electrode(90) and a drain auxiliary electrode(91) are formed by depositing and patterning the first transparent electrode thereon. A source electrode(86), a drain electrode(88), a data line(80), and a data pad(82) are formed by depositing and patterning the second metal on the whole surface of the first transparent electrode and the substrate(1). The data line(80) and the data pad(82) are formed with one body. A grounding line(96) is formed on the first capacitor electrode(90) by using the second metal. The second capacitor electrode(92) and a dielectric layer(106) are formed by forming and patterning the second insulating layer and the second transparent electrode on the second metal. A protective layer(108) is formed by depositing and patterning the third insulating layer on the second capacitor electrode(92) and the substrate(1). A data and a gate pad contact hole(110,118) and a drain and a capacitor contact hole(112,114) are formed in the protective layer(108). A pixel electrode(94) and a gate pad and a data pad electrode(74,84) are formed by depositing and patterning the third transparent electrode on the protective layer(108).

Description

X-ray detector and its manufacturing method {X-ray detecter and a method for fabricating the same}

The present invention relates to an X-ray image sensing device using a TFT array process and a method of manufacturing the same.

Diagnostic X-ray (X-ray) test method, which is widely used for medical purposes today, is photographed using an X-ray detection film, and a predetermined film print time has to be passed in order to know the result.

However, in recent years, with the development of semiconductor technology, digital X-ray detectors (hereinafter referred to as X-ray image sensing devices) using thin film transistors have been researched and developed. The X-ray image sensing device has a merit of diagnosing a result in real time immediately after imaging of the X-ray using a thin film transistor as a switching device.

Hereinafter, the configuration and operation of the X-ray image sensing device will be described.

1 is a schematic diagram illustrating the configuration and operation of the X-ray image sensing device 100, in which a substrate 1 is formed below the thin film transistor 3, the storage capacitor 10, the pixel electrode 12, and the luminous intensity. It consists of the front film 2, the protective film 20, the electrode 24, the high voltage | voltage DC power supply 26, etc.

The photoconductive film 2 forms an electrical signal, that is, electron and hole pair 6, internally in proportion to the signal intensity of an external electric wave or magnetic wave incident thereto. The photoconductive film 2 serves as a converter for converting an external signal, in particular, an X-ray into an electrical signal. The electron-hole pair 6 formed by the X-ray light is formed under the photoconductive film 2 by the voltage Ev applied from the high voltage DC power supply 26 to the conductive electrode 24 positioned on the photoconductive film 2. Collected in the form of a charge on the pixel electrode 12 is located, and stored in the storage capacitor 10 formed with a common electrode grounded from the outside. At this time, the charge stored in the storage capacitor 10 is sent to the external image processing element by the thin film transistor 3 to control the external to produce an X-ray image.

However, in order to detect even the weak X-ray light and convert it into a charge in the X-ray image sensing device, the number of trap state densities trapping the charge in the photoconductive film 2 is reduced, and the conductive electrode 24 and the pixel electrode 12 are separated. Apply a large vertical voltage (10V / μm or more) to reduce the current flowing by voltages other than the vertical direction.

The charges in the photoconductive film 2 generated by the X-ray light are trapped and collected not only on the pixel electrode but also on the passivation layer protecting the channel portion of the thin film transistor 3. The charges thus collected are collected in the channel region above the thin film transistor 3. The charge is induced to generate a large leakage current even when the thin film transistor 3 is in an off state, thereby preventing the thin film transistor 3 from performing a switching operation.

In addition, the electrical signal stored in the storage capacitor 10 may flow to the outside due to a large leakage current in the off state, a phenomenon may not be properly represented to obtain the image.

2 is a plan view showing one pixel portion of a general X-ray detector, in which the gate wirings 30 are arranged in the row direction, and the data wirings 40 are arranged in the column direction. In addition, the thin film transistor 3 is formed as a switching element having the gate electrode 32, the source electrode 42, and the drain electrode 44 at a portion where the gate wiring 30 and the data wiring 40 are perpendicular to each other. The ground wiring 52 is arranged as a common electrode which is commonly grounded with adjacent pixels adjacent to each other in the direction.

In the pixel portion, the first and second capacitor electrodes 46 and 47 are insulated from each other by a dielectric material (not shown) with a transparent electrode, and the first capacitor electrode 46 is formed on the ground line 52. Is in electrical contact with

That is, a storage capacitor having first and second capacitor electrodes 46 and 47 and a pixel electrode 56 as charge storage means is formed, and a silicon nitride film (not shown) is formed of a dielectric material.

Here, the pixel electrode 56 extends to the upper portion of the thin film transistor 3, and although not shown, the pixel electrode 56 collects electric charges so that holes generated in the photoconductive film can accumulate in the storage capacitor P. Play a role.

In addition, the pixel electrode 56 may be electrically connected to the drain electrode 44 through the drain contact hole 50 so that holes stored in the storage capacitor may be coupled with electrons introduced through the thin film transistor 3. It is connected.

In addition, a gate pad 34 is formed at one end of the gate line 30 and a data pad 41a is formed at one end of the data line 40.

The data pad 41a is formed with a data pad link portion 41b in contact with the data line 40, and the data pad link portion 41b is connected to the data line 40 through a data link contact hole 43a. ) And the data pad 41a are connected.

Here, the data pad 41a uses the same metal as the gate wire 30 and is formed at the same time. The reason for using the data pad 41a as the same metal as the gate wiring 30 as described above is to improve contact between the wire and each pad in a wire bonding process for connecting the driving circuit later. As the metal used as the gate wiring 30, a double structure such as aluminum and molybdenum is mainly used.

The function of the above-described X-ray detector is summarized as follows.

Holes generated from the photoconductive film (not shown) are collected in the pixel electrode 56 and stored in the storage capacitor configured together with the first and second capacitor electrodes 46 and 47.

In addition, the holes stored in the storage capacitor are moved to the source electrode 42 through the drain electrode 44 and the pixel electrode 56 by the operation of the thin film transistor 3, and from the external circuit (not shown) to the image Express.

In this case, charges that do not completely escape to the outside through the external circuit, that is, residual charge remaining in the storage capacitor are completely removed through the ground wiring 52 by an external circuit.

As shown in FIGS. 3A to 3F, the manufacturing process of the X-ray image sensing device will be described according to the section taken along the cutting line III-III of FIG. 2.

First, referring to FIG. 3A, a low-resistance metal such as aluminum (Al) or an aluminum alloy (preferably Mo / Al) is deposited and patterned as a first metal on the substrate 1 to form the gate electrode 32. And a data pad 41.

Here, the gate electrode 32 and the data pad 41 are formed independently. The reason why the data pad 41 is simultaneously formed when the gate electrode 32 is formed is to improve the performance of the bonding process by wires in the mounting process of the driving circuit. That is, aluminum (Al) included in the first metal is a metal that is well bonded in the wire bonding process.

The data pad 41 is substantially divided into two parts, one of which consists of a data pad electrode 41a in contact with a wire and a data link part 41b in contact with a data line to be formed in a later process.

The substrate 1 includes an expensive quartz plate having a high melting point of an insulating material and a glass substrate mainly used in a low temperature process.

3B illustrates forming a gate insulating film 60 and an active layer 65 on the patterned first metal, and patterning a gate insulating film covering the data link portion 41b to form a data link hole 43a. Figure is a diagram.

As the gate insulating layer 60, a silicon nitride film (SiN _x ) is mainly used, and the active layer 65 has a stacked structure of pure amorphous silicon 62 and impurity amorphous silicon 64.

After the active layer 65 is formed, a portion of the gate insulating layer 65 covering the data link portion 41b of the data pad 41 is patterned so that a portion of the data link portion 41b is exposed. The hole 43a is formed. The reason for forming the data link hole 43a is for contact between the data line to be formed in a later process and the data pad 41.

3C is a diagram illustrating a step of forming the first capacitor electrode 46 and the data line 40.

The first capacitor electrode 46 functions as the first electrode of the storage capacitor that stores the charge. The first capacitor electrode 46 is formed of ITO, which is a substantially transparent conductive material, and forms a drain auxiliary electrode 48 at a portion where the drain electrode is to be formed when the first storage capacitor is formed.

The drain auxiliary electrode 48 functions as a medium for connecting the pixel electrode and the drain electrode to be formed in a later process.

After forming the first capacitor electrode 46 and the drain auxiliary electrode 48, the source and drain electrodes 42 and 44 and the data line 40 are formed of a second metal.

The data line 40 comes into contact with the data link part 41b through the data link hole 43a and is substantially in contact with the data pad electrode 41a.

The source electrode 42 is in contact with the data line 40, and the drain electrode 44 is formed to overlap a portion of the drain auxiliary electrode 48.

In addition, a ground wiring 52 is formed on the first capacitor electrode 46 with the second metal.

FIG. 3D illustrates depositing a dielectric layer 66 and ITO over the entire substrate, and patterning the ITO to form a second capacitor electrode 47.

The dielectric layer 66 uses the same silicon nitride film as the gate insulating film 60.

The second capacitor electrode 47 functions as an etch stop layer that prevents overetching of the dielectric layer 66 by a later process, and functions as an electrode of the storage capacitor.

FIG. 3E illustrates a step of forming the passivation layer 68 and the pixel electrode 56 over the second capacitor electrode 47 and the entire surface of the substrate.

BCB (benzocyclobutene) having a low dielectric constant is used as the passivation layer 68, and a drain contact hole in which a part of the drain auxiliary electrode 48 and the second capacitor electrode 47 are partially exposed to the drain electrode 44 is exposed. 50 and a capacitor contact hole 54 are formed.

In this case, in order to form the drain contact hole 50, the passivation layer 68 and the dielectric layer 66 are simultaneously etched. Accordingly, the second capacitor electrode 47 performs a function of preventing the dielectric layer of the storage capacitor from being overetched.

Meanwhile, the passivation layer 68 and the dielectric layer 60 on the data pad part 41 are also simultaneously etched.

Thereafter, a transparent conductive material (ie, ITO) is deposited and patterned on the passivation layer to form the pixel electrode 56.

The pixel electrode 56 contacts the drain auxiliary electrode 48 and the second capacitor electrode 47 exposed through the drain contact hole 50 and the capacitor contact hole 54, respectively.

The reason why the drain auxiliary electrode 48 is formed to contact the drain electrode 44 and the pixel electrode 56 is that the contact resistance is reduced because the pixel electrode 56 and the drain auxiliary electrode 48 are made of the same material. Because.

FIG. 3F illustrates a step of finally exposing the data pad electrode 41a. The molybdenum layer positioned on the upper portion of the laminated structure of the gate insulating layer 60 and molybdenum / aluminum on the data pad electrode 41a is shown. Etch at the same time.

The reason for etching molybdenum and leaving only aluminum in the data pad electrode 41a is to smoothly bond between the wire and the data pad electrode 41a in the process of mounting the driving circuit.

As described above, the conventional X-ray detector is completed through about nine photolithography processes.

4 is a cross-sectional view taken along the cutting line IV-IV of FIG. 2 and corresponds to the gate pad electrode 34.

As shown in FIG. 4, the gate pad electrode 34 also has the same structure as the data pad electrode. This is because the gate pad electrode and the data pad electrode are simultaneously formed in the same process.

Briefly, the gate wiring 30 is formed on the substrate 1 in a laminated structure of molybdenum / aluminum, and the gate pad electrode 34 is formed in a single layer structure of aluminum at one end of the gate wiring 30. . The gate pad electrode 34 is exposed to the outside by the gate insulating layer 60, and is a place where the gate pad electrode 34 is bonded by the gate driving circuit and the wire in a subsequent driving circuit mounting process.

As described above, the conventional X-ray detector simultaneously forms the data and gate pad portions. This is to use aluminum used as the gate metal in wire bonding. In other words, wire bonding uses a metal having excellent ductility, so that data pads and gate pads are used as aluminum.

However, the manufacturing process of the conventional X-ray detector requires a very large number of processes.

In particular, a process of exposing the data pad from the gate insulating film is required for contact between the first data pad formed in the X-ray detector manufacturing process and the data line formed later.

This adds to the number of processes and adds to the photolithography process.

In addition, in order to mount the driving circuit on the completed X-ray detector, a conventional wire bonding method, which is a so-called sequential connection method, is used. This is advantageous for the connection of a semiconductor device having a small number of contact pins, but the time required for the wire bonding process increases as the number of contact pins increases.

In the wire bonding process, as shown in FIG. 5, the wire 71 is contacted to the gate and data pad electrodes 34 and 41a and then bonded by applying a physical force to the contact point O. Each pad 34, 41a is very likely to be damaged.

In order to solve the above problems of the conventional X-ray detector, the present invention aims to improve the product yield of the X-ray detector by reducing the number of manufacturing processes.

In addition, another object of the present invention is to improve the defect of the X-ray detector that may occur in the mounting of the drive circuit by the wire bonding.

1 is a cross-sectional view showing the operation of the X-ray image sensing device.

2 is a cross-sectional view showing a cross section corresponding to one pixel portion of a conventional X-ray image sensing device.

3A to 3F are process diagrams illustrating a fabrication process of a cross section taken along the cutting line III-III of FIG. 2.

4 is a cross-sectional view taken along the line IV-IV of FIG. 2.

5 is a diagram illustrating a method of wire bonding to a general X-ray detector.

6 is a plan view of an x-ray detector according to the present invention;

FIG. 7 is a cross-sectional view taken along the line VII-VII of FIG. 6. FIG.

8 is a cross-sectional view of a gate and data pad unit according to another example of the present invention.

<Explanation of symbols for main parts of drawing>

72: gate pad 76: gate electrode

74: gate pad electrode 80: data wiring

82: data pad 84: data pad electrode

86 source electrode 88 drain electrode

90: first capacitor electrode 92: second capacitor electrode

94: pixel electrode 96: ground wiring

In the present invention to achieve the above object and the substrate; First wiring arranged in the transverse direction on the substrate; A second wiring arranged insulated from said first wiring and a first insulating film in a longitudinal direction on said substrate; A switching element formed at an intersection of said first and second wirings; A storage capacitor having at least two electrodes comprising a second insulating film therebetween, one electrode of which is in contact with the switching element; First and second pads integrally extending in the first and second wirings, respectively; An X-ray detector array substrate including first and second electrodes of the same material as an electrode forming the storage capacitor in contact with the first and second pads, respectively.

In addition, the present invention comprises the steps of providing a substrate; Forming a first wiring in which a first pad is integrally formed at one end in a horizontal direction on the substrate; Forming a first insulating film on the entire surface of the first wiring and the substrate; Forming a second wiring on which the second pad is integrally formed at one end in the longitudinal direction on the first insulating film; Forming a switching element at a portion where the first and second wirings cross each other; Forming a storage capacitor having first and second electrodes insulated with the second insulating film; Forming a passivation layer over the entire surface of the switching element, the storage capacitor, and the substrate; Forming first, second, third and fourth contact holes on the passivation layer such that a part of the switching element and the second electrode and the first and second pads are exposed; A pixel electrode which simultaneously contacts the switching element and the second electrode exposed through the first and second contact holes by depositing and patterning a transparent conductive electrode on the passivation layer on which the contact hole is formed, and the third and fourth contact holes The method provides a method of manufacturing an X-ray detector, the method including forming first and second pad electrodes in contact with the first and second pads, respectively.

Hereinafter, the configuration and operation according to the embodiment of the present invention will be described with reference to the accompanying drawings.

In the present invention, in order to reduce the manufacturing process of the X-ray detector, the process of forming the gate pad and the data pad are separated, respectively, to fabricate the X-ray detector.

When the pad forming process is separated as described above, the patterning process of the gate insulating layer for connecting the data pad and the data line in the conventional X-ray detector manufacturing process can be reduced.

In addition, by contacting the gate pad and the data pad with the ITO, the driving circuit can be mounted by TAB bonding using TCP, rather than the mounting method of the driving circuit by wire bonding, thereby preventing damage to the gate and data pad. have.

Example

FIG. 6 is a diagram illustrating a plane of an X-ray detector according to the present invention, and includes a substrate in which a plurality of switching regions and a light receiving region are defined.

A gate line 70 is formed in the horizontal direction of the boundary of the light receiving region, and a gate pad 72 is integrally formed with the gate line 70 at one end thereof.

In addition, a data line 80 is formed in a vertical direction of the boundary of the light receiving region, and a data pad 82 is integrally formed with the data line 80 at one end of the data line 80.

A switching element S is formed at a portion where the gate and data lines 70 and 80 cross each other, and the switching element S receives a signal from the gate and data lines 70 and 80.

The storage capacitor P in contact with the switching element S is formed in the light receiving region.

The storage capacitor P is disposed on the first capacitor electrode 90, the second capacitor electrode 92, and the second capacitor electrode 92 insulated from the first capacitor electrode 90 by a dielectric layer (not shown). And a pixel electrode 94 in contact with the second capacitor electrode 92 by a contact hole 95 formed in the contact hole 95.

In addition, the first capacitor electrode 90 is in contact with the ground wiring 96, and the function of the ground wiring 96 will be described later.

Here, the first and second capacitor electrodes 90 and 92 and the pixel electrode 94 are made of the same material, and ITO, which is a transparent conductive material, is mainly used.

The gate and data pads 72 and 82 are made of the same material as the pixel electrode 94, and the gate and data pad electrodes 74 and 84 contact the gate and data pads 72 and 82, respectively. .

In the above-described X-ray detector according to the present invention, the X-ray detector and the switching element and the storage capacitor portion are almost the same, and the other portion is the gate and data pad portion.

That is, the data pad 82 of the X-ray detector according to the present invention is integrally formed with the data line 80, and since the data pad 82 is covered with ITO, a TAB process can be performed by TCP and a gate pad. 72 is similarly comprised.

FIG. 7 is a cross-sectional view taken along the line VII-VII of FIG. 6, and the cross-sectional structure of the X-ray detector according to the present invention is shown in detail.

Hereinafter, a manufacturing process of the X-ray detector according to the present invention will be described in detail with reference to FIG. 7.

First, the first metal is deposited and patterned on the substrate 1 to form the gate electrode 76 and the gate pad 72.

The first metal may be formed by stacking a single metal or two metals. For example, it is also possible to form metals, such as molybdenum / aluminum, in double.

Next, the first insulating layer and the semiconductor layer are sequentially deposited and patterned on the patterned first metals 76 and 72 to form the active layer 102 and the gate insulating layer 100.

An inorganic insulating film, such as a silicon nitride film (SiN _x ), is used as the gate insulating film 100, and the semiconductor layer is formed by stacking intrinsic amorphous silicon (a-Si: H) and impurity amorphous silicon (n ⁺ a-Si: H) It is formed into a structure.

After forming the active layer 102, the first transparent electrode is deposited and patterned to form a first capacitor electrode 90 and a drain auxiliary electrode 91, respectively.

Since the drain auxiliary electrode 91 has already been described above, a detailed description thereof will be omitted.

Thereafter, a second metal is deposited and patterned over the patterned first transparent electrode and the entire surface of the substrate, so as to contact the source and drain electrodes 86 and 88 and the source electrode 86 and the data. The data pad 82 integrated with the wiring 80 is formed at the same time.

The data pad 82 formed integrally with the data line 80 is the core of the present invention. That is, in the present invention, the data pad 82 is made of the same material as the data line 80 in the process of forming the data line 80.

Meanwhile, the ground wiring 96 is formed on the first capacitor electrode 90 using the second metal.

Here, chromium (Cr) is mainly used as the second metal, and a conductive metal such as molybdenum, tungsten, and aluminum may be used.

Thereafter, a second insulating film and a second transparent electrode are sequentially formed over the entire surface of the patterned second metal, and the second transparent electrode is patterned to form a second capacitor electrode 92 and a dielectric layer 106.

Here, the dielectric layer 106 exists between the first and second capacitor electrodes 90 and 92, and functions to substantially store charge in the storage capacitor, and a silicon nitride film is mainly used.

Next, a process of forming a protective film 108 having a plurality of contact holes by depositing and patterning a third insulating film over the entire surface of the second capacitor electrode 92 and the substrate.

A portion of the data and gate pad contact holes 110 and 118, the drain auxiliary electrode 91 and the second capacitor electrode 92, to which the data and gate pads 82 and 72 are exposed, may be formed in the passivation layer 108. Exposed drain and capacitor contact holes 112 and 114 are formed, respectively.

Here, each of the above-described contact holes is different in depth. That is, the data pad contact hole 110 and the drain contact hole 112 have a depth corresponding to the thickness of the passivation layer 108 and the dielectric layer 106, and the capacitor contact hole 114 has a thickness of the passivation layer 108. The gate pad contact hole 118 has a depth corresponding to the passivation layer 108, the dielectric layer 106, and the gate insulating layer 100, respectively.

On the other hand, the protective film 108 is made of a material that is substantially transparent to light, and uses benzocyclobutene (BCB), an organic insulating film, because the BCB is excellent in planarization rate, and the dielectric constant is about 3 or less It is a good material to use as a protective film.

In addition, the protective film 108 may be used, such as acrylic, polyimide.

Thereafter, a third transparent electrode is deposited and patterned on the patterned passivation layer 108 to form a pixel electrode 94, a gate pad, and a data pad electrode 74, 84, respectively.

The gate pad electrode 74 contacts the gate pad 72 exposed through the gate pad contact hole 118 formed in the passivation layer 108, and the data pad electrode 84 opens the data pad contact hole 110. In contact with the exposed data pad 82.

As described above, the biggest feature of the X-ray detector according to the present invention is that the data pad 82 is formed integrally with the data line 80, and the data and gate pads 82 and 72 are the same as the pixel electrode 94. It is in contact with the data of the material and the gate pad electrodes 84 and 74.

In this case, the first and second capacitor electrodes 90 and 92 and the pixel electrode 94 use ITO (indium tin oxide).

Although the following process is not shown, the photosensitive material is applied to the photosensitive material. The photosensitive material is used as a transducer for receiving an external signal and converting the signal into an electrical signal. The compound of amorphous selenium is converted into a vacuum using an evaporator. Deposit at -500 μm thickness. In addition, an X-ray photosensitive material having a low dark conductivity and sensitive to an external signal, particularly X-ray photoconductivity, may be used, such as HgI ₂ , PbO, CdTe, CdSe, thallium bromide, cadmium sulfide, and the like. When X-ray light is exposed to the photosensitive material, electron and hole pairs are generated in the photosensitive material according to the intensity of the exposed light.

After applying the X-ray photosensitive material, a transparent conductive electrode may be formed to transmit X-ray light.

The operation of the X-ray image sensing device according to the present invention described above is as follows.

When the photosensitive material is exposed to X-ray light, an electron / hole pair is formed internally, and when a strong DC voltage is applied to the conductive electrode, one component (electron or hole) of the electron / hole pair is the pixel electrode. Are gathered at (94).

Electrons or holes collected in the pixel electrode 94 are stored in the form of charge in the storage capacitor, and when the switching element is operated, charges stored in the storage capacitor are transferred to an external driving circuit (not shown). Is emitted and rendered as an image.

After the switching operation is completed, when the charge is present in the storage capacitor, residual charge present in the storage capacitor is removed through the ground line 96 in contact with the storage capacitor. That is, the ground line 96 is to perform a reset (reset) function.

The function of each component of the above-described X-ray image sensing device is as follows.

First, the photosensitive conductive layer and the conductive electrode which generate charge by sensing external X-ray light function as a photoelectric conversion part. Second, the storage capacitor which stores the charge generated in the photoelectric conversion part is a charge storage part. It will function as. Third, the thin film transistor which transfers the charge stored in the charge storage unit to an external driving circuit functions as a switching unit.

FIG. 8 is a diagram illustrating another example of the present invention and illustrates a cross section of the gate and data pad unit.

In the meantime, the gate and data pad portions of the X-ray detector illustrated in FIG. 7 may have the gate and data pads 72 and 82 exposed through the gate and data contact holes 118 and 110 formed in the passivation layer 108, respectively. The pads 72 and 82 are in contact with the gate and the data pad electrodes 74 and 84 through holes.

However, in another example of the present invention illustrated in FIG. 8, the gate insulating layer 100, the dielectric layer 106, the protective layer 108, the dielectric layer 106, and the protective layer formed on the gate and the data pads 72 and 82, respectively. In the process of etching the protective film 108, the entirety is etched to completely expose the gate and the data pads 72 and 82. Subsequently, when the pixel electrode 94 is formed, gate and data pad electrodes 84 and 74 are formed of the same material as the pixel electrode 94 to cover the gate and data pads 72 and 82, respectively. Here, the gate insulating layer 100 is present under the data pad 82.

As described above, in the method of manufacturing the X-ray detector according to the present invention, the data pads are integrally formed with the data lines, so that the processes are reduced compared to the conventional methods of separately forming and later contacting the data pads.

In addition, since the gate and data pads of the ITO material and the data pad electrodes 84 and 74 are in contact with the gate and the data pad of the X-ray detector according to the present invention, the drive circuit is used by using a TCP and TAB bonding process in the subsequent mounting of the driving circuit. Since the furnace can be mounted, the work efficiency is improved.

That is, since the TAB bonding process by TCP is the same process as the working process of a general liquid crystal display device, there is an effect that a separate production facility is reduced.

As described above, when the X-ray image sensing device is manufactured according to the embodiment of the present invention, since the photolithography process is reduced, the production yield may be increased.

In addition, since the driving circuit is mounted in the TAB bonding method using TCP instead of the wire bonding method, the pad may be prevented from being damaged by the wire bonding method.

Claims (9)

A substrate; First wiring arranged in the transverse direction on the substrate; A second wiring arranged insulated from said first wiring and a first insulating film in a longitudinal direction on said substrate; A switching element formed at an intersection of said first and second wirings; A storage capacitor having at least two electrodes comprising a second insulating film therebetween, one electrode of which is in contact with the switching element; First and second pads integrally extending in the first and second wirings, respectively; First and second electrodes of the same material as the electrodes constituting the storage capacitor in contact with the first and second pads, respectively. X-ray detector array substrate comprising a. The method according to claim 1, And the first wiring is a laminate of molybdenum / aluminum. The method according to claim 1, The electrode constituting the storage capacitor is an ITO of a transparent conductive material. The method according to any one of claims 2 to 3, The first and second electrodes A first pad formed on the substrate, A second pad formed on the substrate and having a first insulating film thereunder; X-ray detectors covering the first and second pads, respectively. Providing a substrate; Forming a first wiring in which a first pad is integrally formed at one end in a horizontal direction on the substrate; Forming a first insulating film on the entire surface of the first wiring and the substrate; Forming a second wiring on which the second pad is integrally formed at one end in the longitudinal direction on the first insulating film; Forming a switching element at a portion where the first and second wirings cross each other; Forming a storage capacitor having first and second electrodes insulated with the second insulating film; Forming a passivation layer over the entire surface of the switching element, the storage capacitor, and the substrate; Forming first, second, third and fourth contact holes on the passivation layer such that a part of the switching element and the second electrode and the first and second pads are exposed; A pixel electrode which simultaneously contacts the switching element and the second electrode exposed through the first and second contact holes by depositing and patterning a transparent conductive electrode on the passivation layer on which the contact hole is formed, and the third and fourth contact holes Forming first and second pad electrodes in contact with the first and second pads, respectively, through X-ray detector manufacturing method comprising a. The method according to claim 5, And the third and fourth contact holes expose only a portion of the first and second pads. The method according to claim 5, And the third and fourth contact holes expose the entirety of the first and second pads. The method according to any one of claims 5 to 7, The first and second pad electrodes A first pad formed on the substrate, A second pad formed on the substrate and having a first insulating film thereunder; The x-ray detector manufacturing method for covering the first and second pads, respectively. The method according to claim 5, The transparent conductive electrode is an indium tin oxide (ITO) X-ray detector manufacturing method.