KR20010053822A - the method and the apparatus of multi angular master shadowmask - Google Patents

Abstract

PURPOSE: A polygonal master shadow mask, a making method thereof, and a method for fabricating a shadow mask by electroforming using the master shadow mask are provided to improve productivity and accuracy and to increase the number of holes per unit area and the ratio of opening. CONSTITUTION: The master shadow mask(3) includes a silicon layer, a polygon-shaped supporting rim bearing the silicon layer and connected to a hub by spokes, and a framework(1) embedded in the silicon layer and having pointed tops protruded from a top surface of the silicon layer. In the making method of the master shadow mask(3), the pointed tops of the framework(1) are protruded by chemically polishing the top surface of the silicon layer. The shadow masks(9) are fabricated by electroforming technique employing the master shadow mask(3). While the master shadow mask(3) is immersed in a liquid metal for the shadow mask(9), the master shadow mask(3) is connected to the cathode and the liquid metal is connected to the anode. Therefore, ionized ions in the liquid metal are attracted to the pointed tops of the framework(1) and then form the shadow masks(9) on respective polygonal planes.

Description

Polygonal master shadow mask and processing method for producing same and shadow mask manufacturing method by pole casting using polygon master shadow mask {the method and the apparatus of multi angular master shadowmask}

The present invention relates to a polygonal master shadow mask, a processing method for making the same, and a method of manufacturing a shadow mask by electroplating using a polygonal master shadow mask. By developing the processing method that can produce shadow mask and master shadow mask more efficiently using electric pole processing method, it not only improves the production efficiency of shadow mask, but also provides more precise and large number of holes per unit area and shadow mask with increased opening degree. It is an object of the present invention to enable mass production.

The present invention belongs to the manufacturing technology of shadow masks, and has conventionally produced shadow masks by etching thin plates.

The present invention is a technique for making a shadow mask and a master shadow mask by a pole casting method. After the master shadow mask is manufactured, when the cathode is connected to the cathode of the master and the anode of the electricity is connected to the metal material constituting the shadow mask, the ions of the metal material on the anode side are caused by the force of electricity Move on to the master shadow mask to form a new shadow mask on top of the master shadow mask. In the present invention, it is a technical problem to make a master shadow mask in the form of a flat plate and a shadow mask by a pole casting method using the master shadow mask in the form of a plate.

1 is an explanatory diagram illustrating a structure of a skeleton

2nd section of the skeletal body

3 is an explanatory diagram of a polygon master shadow mask

4 is an explanatory diagram illustrating a step of forming a first shadow mask.

5 is an explanatory diagram of the reinforcement mold

6 is an explanatory view of an axis on which a cam groove is formed

7 is an explanatory diagram illustrating forming a shadow mask.

<< description of the main parts of the drawings >>

1: Skeletal body 2: Upper end of the skeleton 3: Polygonal shadow mask 4: Silicone body

5: Upper end of the skeleton 6: Polygonal support plate 7: Shaft 8: Spoke 9: Primary shadow mask

10: reinforcement mold 11: support holder 12: cam groove 13: liquid metal 14: permanent magnet

In the master shadow mask of the present invention, a silicon gas is formed by applying silicon up and down to a skeleton having a sharply formed upper end of the tip, and then polishing the upper part of the silicon gas by physical and chemical methods so that only the sharp top end of the skeleton is silicon. It is configured to be drawn on the upper surface. In order to produce a flat shadow mask, the master shadow mask must also be manufactured in a structure capable of forming a flat shape, so in the present invention, the shape of the master shadow mask is composed of polygons such as triangular, square, pentagonal, hexagonal, hexagonal, and octagonal. .

The present invention provides a forming process of forming a flat primary shadow mask from a polygonal master shadow mask by electric pole processing, a separation process of separating the first shadow mask from a master shadow mask, and the first primary mask. The shadow mask is composed of a reinforcement process that is reinforced by pole casting. Hereinafter, the present invention will be described in detail with reference to the drawings.

1 is an explanatory diagram for explaining the overall structure of a skeleton. The framework 1 is a continuous electrical conductor and the upper end 2 of the framework forms a sharp acute angle. As a typical skeletal form, the shape of a honey house can be mentioned, and a material can mention nickel.

FIG. 2 is an explanatory diagram for explaining that the upper portion 2 of the end of the skeleton of FIG. 1 is sharply formed. FIG. 2 shows a cross section of a-a in FIG. 1, showing that the upper end of the skeleton has a sharp structure like a blade.

3 is an explanatory diagram for explaining the formation of a polygonal master shadow mask for producing a planar shadow mask. The polygon master shadow mask 3 is formed in a polygonal structure consisting of planes. The skeleton 1 having a sharp upper portion has a planar quadrangular shape, and a skeleton having a planar quadrangular shape is formed on each side of the polygon of the master shadow mask. The framework is applied up and down by silicon, so that the framework 1 is embedded in the silicon substrate 4. The upper silicone in the skeleton coated by the silicone up and down is subjected to special processing so that only the sharp part of the skeleton is projected outward. Chemical polishing is performed to ensure that only the sharp vertices 5 of the framework are protruded to the outer surface of the silicon. By chemically polishing silicon, it is possible to protrude only the sharp apex of the skeleton. Chemical polishing is a chemical compound of thinner and acetone that polishes the surface of silicon. In addition, if a chemical polishing process is used to finish with toluene, the skeleton is not damaged at all, and only silicon is polished to a flat surface.

Polishing the silicon surface with these chemicals leaves only the sharpest vertices of the skeleton out of the silicon without damaging the skeleton, and the processed surface becomes planar. Exemplary embodiments of the framework in the present invention consist of nickel metal. Through the above processes, the silicon substrate is formed on the rectangular frame structure formed in the plane, and is formed on each side of the polygonal master shadow mask. In order to support the silicon substrate on which the skeleton is formed on each side of the master shadow mask in a planar state, a polygonal support plate 6 is formed and supported, and the polygon support plate is formed of the spokes 8 formed on the shaft 7. To support).

4 is an explanatory view for explaining a forming process of forming the primary shadow mask 9 of a plate by electroplating from a polygonal master shadow mask. When the cathode is connected to the framework 1 of the master shadow mask, and the anode is connected to the metal material constituting the shadow mask, the metal material on the anode side is ionized by electricity, so that the framework of the master shadow mask on the cathode side is ionized. Moving to the sharp apex, new apex is formed at the apex of the framework by metal ions. The newly formed apex is called the primary shadow mask 9. The most representative embodiment of the present invention in forming the primary shadow mask is to use a metal material on the anode side as nickel, wherein the nickel is placed in a tank in a liquid state and tangentially connects the anode electricity to the liquid nickel. It can be lifted. The primary shadow mask is formed in the form of a rectangular flat plate on each side of the polygon of the master shadow mask. After forming the primary shadow mask, a next step is a separation process of separating the primary shadow mask from the master shadow mask. The primary shadow mask separated from the master through the separation process is made in the rectangular shape of the plate as many as the number of sides of the master.

5 is an explanatory view of the reinforcement mold 10 that is used when the primary shadow mask separated through the separation process is reinforced by electric pole machining. The reinforcement mold is configured to form a polygonal shape such as a master shadow mask, and each side of the support holder 11 is formed to support the primary shadow mask having a rectangular shape of a flat plate. Also, spokes 8 are formed around the shaft 7 so as to support the respective support holders 11. The primary shadow mask is mounted on each side of the reinforcement mold through a support holder.

6 is an explanatory view of the configuration of the axis of the master shadow mask or the axis of the reinforcement mold. In the electroforming of the present invention, the master shadow mask or the reinforcing mold is immersed in the liquid metal, and the electric anode is tangential to the liquid metal, and the electric cathode is tangential to the skeleton or the primary shadow mask of the master shadow mask. Perform the pole processing in the state. In order to achieve a more uniform electric pole machining in electric pole machining, it is more efficient to rotate the axis of the master shadow mask or the axis of the reinforcement mold at a constant speed, and to move the axis back and forth using a cam. 6 shows a structure in which the cam groove 12 is formed in the shaft 7 so that the movement occurs even before and after the shaft rotates.

FIG. 7 shows the primary shadow masks 9 having a rectangular shape of a flat plate on each side of the reinforcement mold of FIG. 5 by supporting them with the support holders 11 and immersing them in the liquid metal 13 to perform electroforming. It is explanatory drawing explaining the thing. The first shadow masks attached to the reinforcement molds are gradually formed by thickening and thickening the shadow mask as the pole processing progresses. After that, the completed shadow mask can be removed from the reinforcement frame. As the electroplating process proceeds in the liquid metal, the impurities of the metal may be generated. In this case, the permanent magnet 14 is installed in the liquid metal tank to remove the impurities so that the electroplating process can be performed more efficiently. do.

The present invention manufactures a master shadow mask that can produce a flat shadow mask by electroplating, and provides a processing method that can mass produce a shadow mask more quickly than a shadow mask by an etching method, thereby efficiently producing a shadow mask. In addition to increasing the accuracy, the number of holes per unit area is increased, and the shadow mask with increased opening degree can be mass-produced.

Claims (8)

A polygonal master shadow mask which is formed of a silicon substrate, a skeleton in which only sharp vertices protrude from the upper surface of the silicon substrate, a polygonal support plate supporting the silicon substrate, and an axis supporting the polygonal support plate. The polygonal master shadow mask according to claim 1, wherein a cam groove is formed in the shaft. A method for producing a polygonal master shadow mask in which a skeleton is formed on a silicon substrate, wherein the polygonal master is formed by performing chemical polishing on the upper surface of the silicon substrate on which the skeleton is formed so that the sharp vertices of the skeleton are projected on the upper surface of the silicon substrate. Method of manufacturing a shadow mask. The method for producing a polygonal master shadow mask according to claim 3, wherein the chemical substance used for chemical polishing comprises a thinner. 4. The method of claim 3, wherein the chemical used for polishing comprises thinner and acetone. The method for producing a polygonal master shadow mask according to claim 3, wherein the chemical substance used for polishing comprises toluene. The method for producing a polygonal master shadow mask according to claim 3, wherein the chemicals used for polishing include toluene, thinner and acetone. An electric cathode is connected to a polygonal master shadow mask configured to protrude only the sharp vertices of the skeleton on the upper surface of the silicon substrate, and an electric pole is connected to the liquid metal to make the first shadow mask. The primary shadow mask is separated from the polygonal master shadow mask and then mounted on the reinforcement mold, the cathode of the electricity is connected to the primary shadow mask mounted on the reinforcement mold, and the anode of the electricity is connected to the liquid metal body. A method of manufacturing a shadow mask, characterized in that the complete shadow mask is made by electric pole processing.