WO2005076307A1

WO2005076307A1 - Shadow-mask made by electro-forming master of shadow-mask having a pin portion, and the manufacturing method of shadow-mask

Info

Publication number: WO2005076307A1
Application number: PCT/KR2004/000240
Authority: WO
Inventors: Jeong-Sik Kim
Original assignee: Graphion Technologies Usa, Llc
Priority date: 2004-02-07
Filing date: 2004-02-07
Publication date: 2005-08-18

Abstract

Disclosed is a shadow mask, capable of being repeatedly produced using an electro-forming master through an electro-forming process, and a method of manufacturing the same. The electro-forming master used for manufacturing the shadow mask includes an electrode base having an insulating part and a current-carrying part, and a plurality of metal layers formed on the current-carrying part of the electrode base through an electro-forming process and a plurality of exposure layers formed on the insulating part of the electrode base, each of which increases in height in a sequentially layering manner, in which the exposure layers are removed from the electrode base to form a depression part when the metal layers and the exposure layers reach predetermined heights, whereby the depression part is filled with an insulating material and the metal layers are removed from the electrode base, to form an insulating layer having a predetermined height.

Description

SHADOW-MASK MADE BY ELECTRO-FORMING MASTER OF SHADOW-MASK HAVING A PIN PORTION, AND THE MANUFACTURING METHOD OF SHADOW-MASK

Technical Field

The present invention relates to a shadow mask having small holes for use in display devices, in which the holes of the shadow mask are made by use of an electro-forming master for shadow masks through an electro-forming process. That is, the shadow mask of the present invention is manufactured by using the electro-forming master for shadow masks. Although a conventional shadow mask has been produced by a series of processes of coating of a photosensitive material on a flat plate, exposing to light and etching, the shadow mask of the present invention can be simply manufactured by means of the electro-forming process. As such, the reusable electro-forming master for shadow masks is utilized. In the present invention, the electro-forming master for shadow masks is immersed into an electro-forming bath to allow a metal shadow mask having very small holes to produce thereon. Then, the resultant shadow mask is released from the electro-forming master, and obtained as an end product. Also, the electro-forming master is immersed again into the electro-forming bath to repeatedly manufacture new shadow masks . The shadow mask of the present invention is produced by repeating the above procedure. Useful for the present invention, the electro-forming master for shadow masks is formed of an insulating material, and preferably, an elastic insulating material. More preferably, the elastic insulating material has releasability. To release the shadow mask from the electro-forming master, although a releasing layer is additionally formed to the electro- forming master, it is further preferred that the insulating material per se has releasability. Such a material having releasability, elasticity and insulation is exemplified by silicone, which is applied to the electro-forming master for shadow masks, whereby the electro-forming master can be reused.

Background Art

Typically, a shadow mask has been manufactured by means of an etching process acting to corrode a metal, thus having a limitation in accuracy. This is because the etching process causes the metal to corrode in a lateral direction as well as in a downward direction, and hence, it is difficult to ensure dimensional accuracy. Further, the etching process has the limitation of processable pitches, due to the lateral corrosion. Also, the etching process is disadvantageous in that the corroded amount of the material must be discarded. Therefore, in the present invention, an electro- forming process is adopted to produce a more accurate shadow mask, instead of the etching process. That is, a metal is allowed to form in only a defined range by a pin part of an electro-forming master used for the electro-forming process, whereby lateral corrosion of the etching process is not caused. As well, fine pitches can be processed. Further, the electro-forming process is characterized in that an electro-forming master is composed of only materials necessary for the production of the shadow mask, and thus, there is no waste of materials. Also, the electro-forming process enables end products to be simply manufactured, compared to conventional processes. That is, although every product should be conventionally subjected to being exposed to light and etching, the electro-forming process of the present invention does not need such processes, and allows end products to be repeatedly produced by use of an electro- forming master in an electro-forming bath. Of course, the shadow mask has been conventionally manufactured by the electro-forming process. However, an electro-forming master used for the conventional electro- forming process suffers from a single application. Otherwise, to prepare the reusable electro-forming master, a hard resister may be formed on an electrode base. In such cases, the hard resister creates stress between an electro-formed product and the resister. When the electro-formed product is released from the resister, such stress prevents the release of the electro-formed product from the resister. That is, the electro-formed product and the resister are mutually interacted upon the removal of the electro-formed product from the electro-forming master, whereby they may be damaged by each other. Hence, a conventional electro-forming process cannot be repeatedly applied. However, in the present invention, an elastic pin part is applied to manufacture an electro-forming master for shadow masks, instead of the hard resister, whereby the insulating material has no influence on the electro-formed product upon release. Accordingly, such an electro-forming master enables the electro-formed product to be easily released therefrom, and can be reused.

Disclosure of the Invention

A shadow mask has been conventionally manufactured by means of an etching process acting to corrode a metal, thus having a limitation in accuracy. This is because the etching process causes the metal to corrode in a lateral direction as well as in a downward direction, and hence, it is difficult to ensure dimensional accuracy. Further, the etching process has the limitation of processable pitches, due to the lateral corrosion. Also, the etching process is disadvantageous in that the corroded amount of the material must be discarded. However, in the present invention, an electro-forming process is adopted to produce a more accurate shadow mask, instead of the etching process. That is, a metal is allowed to form in only a defined range by a pin part, whereby lateral corrosion of the etching process is not caused. As well, fine pitches can be processed. Further, the electro-forming process is characterized in that an electro-forming master includes materials necessary for production of the shadow mask, and thus, there is no waste of materials. Also, the electro-forming process enables end products to be simply manufactured, compared to conventional processes. That is, although every product should be conventionally subjected to being exposed to light and etching, the electro-forming process of the present invention does not need such processes and allows end products to be repeatedly formed by use of an electro-forming master in an electro-forming bath. Of course, the shadow mask has been conventionally manufactured by the electro-forming process. However, an electro-forming master used for the conventional electro-forming process suffers from a single application. Otherwise, to prepare the reusable electro-forming master, a hard resister may be formed on an electrode base. In such cases, the hard resister creates stress between an electro-formed product and the resister. When the electro-formed product is released from the resister, such stress does not permit the release of the electro-formed product from the resister. That is, the electro-formed product and the resister are mutually interacted upon removal of the electro-formed product from the electro-forming master, whereby they may be damaged by each other. Hence, a conventional electro-forming process cannot be repeatedly applied. However, in the present invention, an elastic pin part is applied to manufacture an electro-forming master for shadow masks, instead of the hard resister, whereby the insulating material has no influence on the electro-formed product upon release. Accordingly, such an electro-forming master enables the electro-formed product to be easily released therefrom, and can be reused. Therefore, it is an object of the present invention to alleviate the problems in the related art and to provide a method of repeatedly manufacturing a shadow mask, by use of an electro-forming master through an electro-forming process . Another object of the present invention is to provide a shadow mask manufactured by the above method. To achieve the above objects, the present invention provides two types of electro-forming masters for shadow mask, which have a recess on an electrode base or not. The electro-forming master for shadow masks, which has the recess of the electrode base, is characterized in that the recess is formed at the upper portion of the electrode base, and is filed with an insulating material to prepare a root part, on which an insulating part is integrally formed with the root part and protrudes from the surface of the electrode base is formed. The insulating part protruding from the surface of the electrode base is referred to as a pin part, in the present invention. Also, the insulating material provided at a lower portion of the pin part is defined as the root part, which functions to firmly couple the pin part to the electrode base. To prepare the insulating part protruding from the electrode base, the electrode base is subjected to the electro-forming process at least twice. The pin part acts to limit the shape of the metal to be electro-formed to a predetermined shape. In addition, the pin part largely affects the shape of holes of the shadow mask and the thickness of the shadow mask. The shadow mask has a limited thickness by the height of the pin part. When the shadow mask needs to be formed in a predetermined thickness, the height of the pin part increases to be suitable for the thickness of the shadow mask. To prepare the electro-forming master having a high pin part, the electrode base is repeatedly subjected to electro-forming, to obtain a plurality of metal layers. In addition, the photosensitive material or insulating material stacks in proportion to the height of the metal layers . The present invention is characterized in that the height of the pin part can increase as necessary. Conventionally, in cases of electro-forming process using a resister, the resister has a limited height, and thus, the thickness of the shadow mask to be produced by use of the above resister cannot but be limited. However, in the present invention, since the pin part can have a selectively controllable height, the thickness of the shadow mask can freely increase. Moreover, the insulating part of the present invention preferably has elasticity, and is exemplified by silicone. Further, it is preferable that the insulating material used in the present invention has insulation, elasticity and releasability. Thus, silicone, as an example of the above insulating material, has superior insulation, releasability, and elasticity.

Brief Description of the Drawings

The above and other objects, features and other advantages of the present invention will be more clearly understood from the following detailed description taken in conjunction with the accompanying drawings, in which: FIG. 1 is a view showing a shadow mask; FIG. 2 is a view sequentially showing a process of preparing a root part of an electro-forming master for use in manufacturing a shadow mask, according to a first embodiment of the present invention; FIG. 3 is a view showing an electro-forming process to be performed by immersing an initial master into an electro-forming bath; FIG. 4 is a view sequentially showing a process of stacking an exposure layer and a second metal layer through an electro-forming process; FIG. 5 is a view sequentially showing a process of stacking an exposure layer and a third metal layer through an electro-forming process; FIG. 6 is a view sequentially showing a process of preparing a pin part having a desired height; FIG. 7 is a view sequentially showing a process of preparing a root part of an electro-forming master for use in manufacturing a shadow mask, according to a second embodiment of the present invention; FIG. 8 is a view showing an electro-forming process to be performed by immersing an initial master into an electro-forming bath; FIG. 9 is a view sequentially showing a process of stacking an insulating layer and a metal layer through an electro-forming process; FIG. 10 is a view sequentially showing a process of preparing a pin part having a desired height, by means of a plurality of insulating layers; FIG. 11 is a view showing a shadow mask; FIG. 12 is a sectional view of an electro-forming master for use in production of a flat shadow mask; FIG. 13 is a sectional view of an electro-forming master, capable of omitting a conventional forming process; FIG. 14 is a view showing the shadow mask obtained by subjecting the electro-forming master of FIG. 13 to electro-forming process; and FIG. 15 is a view showing the shadow mask of FIG. 14 released from the electro-forming master.

Best Mode for Carrying Out the Invention

Based on the present invention, an electro-forming master for shadow masks has an electrode base with an insulating part which can be reused. As for the electro- forming master for shadow masks, the insulating part protruding from the surface of the electrode base is defined as a pin part. Further, a recess is formed at a lower portion of the pin part, and an insulating material filled in the recess is defined as a root part, which functions to firmly couple the pin part to the electrode base . On the surface of the electrode base of the electro- forming master for shadow masks, a current-carrying part and an insulating part are formed. The current-carrying part is formed to be the same as the shape of the shadow mask, on which a metal ion begins to be formed in the electro-forming bath. In the present invention, the insulating part, which functions to prevent a current from flowing, is preferably formed of an insulating material with releasability, in consideration of release of the shadow mask as an electro-formed product. More preferably, the insulating part should have elasticity. The insulating part having elasticity may effectively endure against stress between the shadow mask and the insulating part, and allows the shadow mask to be easily removed therefrom, due to inherent elasticity thereof. Reference should now be made to the drawings, in which the same reference numerals are used throughout the different drawings to designate the same or similar components. FIGS. 1 to 6 illustrate the preparation process of an electro-forming master for use in manufacturing a shadow master, according to a first embodiment of the present invention. FIG. 1 is a view showing a shadow mask, which is a metal plate with very small holes. Such a shadow mask is variously applied for display devices. The production of the shadow mask begins from the use of a film having a transparent portion and an opaque portion. The film is variously patterned with the transparent portion and the opaque portion. In the present invention, the above film is used to prepare a patterned electrode base, which is then employed to prepare an electro-forming master capable of repeatedly producing the shadow mask. The present invention is characterized in that the shadow mask can be mass produced by use of the inventive electro-forming master. FIG. 2 sequentially shows the preparation process of a root part of an electro-forming master for shadow masks of the present invention. As shown in FIG. 2, an electrode base 1 is coated with a photosensitive material 2, on which a film having a predetermined pattern is exposed to light, to form an exposure part 3. Subsequently, an etching process is performed in a predetermined depth of an upper portion of the electrode base 1, to give a recess 4. Like this, the electrode base having the recess 4 is referred to as an electrode base 5 of an electro-forming master for shadow masks. Alternatively, the recess 4 may be formed by means of a mechanical process or a laser process. Then, a filler 6 is filled in the recess 4, after which it is trimmed to be flush with the electrode base 5. When such a filler is hardened, the photosensitive material is further coated on the entire upper surface of the filler and the electrode base, on which the film same as mentioned above is exposed to light, to give a first exposure layer 7. Meanwhile, a non-exposure part is washed and formed to be a depression part. Thusly structured electrode base is called an initial master. FIG. 3 is a view showing the electro-forming process to be performed by immersing the initial master into an electro-forming bath. As illustrated in FIG. 3, the electrode base 5 is connected with a negative electrode (-) to perform the electro-forming process in the electro- forming bath. Thereby, an ionized metal is formed on the electrode base 5, to manufacture a shadow mask of thin metal. That is, when the electro-forming process is carried out on the electrode base in the electro-forming bath, a metal ion is formed on the surface of the electrode base bared in the exposure parts 7 over time, therefore resulting in a first metal layer flush with the exposure layer 7. FIG. 4 is a view sequentially showing the preparation process of a second exposure layer and a second metal layer through electro-forming. As seen in FIG. 4, after the first metal layer 8 is obtained to be flush with the exposure layer 7 on the initial master, a photosensitive layer 9 is further coated thereon and then exposed to light, to obtain a second exposure layer 10. The photosensitive material is washed and removed, with the exception of the second exposure layer 10, to form a depression part. Thereafter, the electrode base 5 is subjected again to electro-forming, whereby a second metal layer 11 is formed on the above depression part to the height of the exposure layer 10. FIG. 5 is a view sequentially showing the preparation process of a third exposure layer and a third metal layer through electro-forming. As in FIG. 5, the electrode base 5 having the second exposure layer 10 and the second metal layer 11 is further coated with a photosensitive layer 12, to which a third exposure layer 13 is formed through an exposing process. The photosensitive material is washed and removed, with the exception of the third exposure layer 13, to form a depression part. Subsequently, the electrode base 5 is subjected again to electro-forming, whereby a third metal layer 14 is formed on the depression part to be flush with the exposure layer 13. FIG. 6 is a view sequentially showing the preparation process of a pin part having a desired height. As shown in FIG. 6, when the exposure layers and the metal layers reach a desired height, all the exposure layers stacked on the electrode base and the filler filled in the recess of the electrode base are removed to form a depression part 15. An insulating material 16 is filled in the depression part 15 up to the height of the third metal layer 14. After the insulating material 16 is hardened, all the metal layers formed on the electrode base are removed from the electrode base. Thereby, the electro-forming master for shadow masks is obtained, which has the insulating material 16 formed to a predetermined height in the depression part 15 of the electrode base 5. The recess of the electrode base is formed to be a root part, and a pin part is integrally formed on an upper portion of the root part and protrudes from the surface of the electrode base. The shape and height of the pin part functions to determine the shape and thickness of the shadow mask, respectively. Although a thick exposure layer cannot be formed at a time by use of a typical photosensitive material, the high pin part can be formed through the above process of the present invention, which is regarded to be important. Turning now to FIGS. 7 to 10, there is shown the preparation process of an electro-forming master for use in manufacturing a shadow mask, according to a second embodiment of the present invention. FIG. 7 is a view sequentially showing the preparation process of a root part of the electro-forming master of the present invention. As shown in FIG. 7 , an electrode base 17 is coated with a photosensitive material 18, on which a film is exposed to light, to form an exposure part 19. Subsequently, a non-exposure part 20 is washed and removed, after which an etching process is performed in a predetermined depth of the upper portion of the electrode base 17, to create a recess 21. The above electrode base having the recess 21 is referred to as an electrode base 22 of an electro-forming master for shadow masks. In addition, the recess 21 may be formed by means of a mechanical process or a laser process. As well, the recess 21 may be formed in various shapes, including triangular, circular, or trapezoid shapes. Then, an insulating material 23 is filled in the recess 21 of the electrode base 22, to form an insulating part 23, which is then trimmed to be flush with the electrode base 22. Thusly structured electrode base is called an initial master. FIG. 8 is a view showing the electro-forming process to be performed by immersing the initial master into an electro-forming bath. As seen in FIG. 8, the electrode base 22 is connected with a negative electrode (-) to perform the electro-forming process in the electro-forming bath. Thereby, an ionized metal begins to be formed on the electrode base 22, to produce a shadow mask 24 of thin metal. When the electro-forming process is carried out in the electro-forming bath, a metal ion is formed on the surface of the electrode base in the insulating parts 23 over time, resulting in a metal layer 24. FIG. 9 is a view sequentially showing the preparation process of a second insulating layer and a second metal layer through electro-forming. As apparent from FIG. 9, a first metal layer 25 of a predetermined height is formed on a current-carrying part of the electrode base 22 through the electro-forming process of the initial master in the electro-forming bath. Thereby, a depression part in the first metal layers is formed on the insulating part 23. Then, an insulating material is filled in the depression part to be flush with the first meal layer 25, thus preparing a first insulating layer 27. The insulating part 23 is to be a root part 28, and the first insulating layer 27 stacked on the root part is to be a pin part. Subsequently, the electrode base 22 having the first insulating layer 27 and the first metal layer 25 of the same height is immersed again into the electro-forming bath, whereby a second metal layer 29 is formed in a predetermined height on the first metal layer 25. In addition, a depression part in the second metal layers is formed on the first insulating layer 27 and then is filled with the insulating material to be flush with the second metal layer 29, to yield a second insulating layer 30. FIG. 10 is a view sequentially showing the preparation process of a pin part having a desired height, by means of a plurality of insulating layers. As shown in FIG. 10, after the second insulating layer 30 is formed to the height of the second metal layer 29, the electrode base 22 is immersed again into the electro-forming bath, and hence, a third metal layer 31 is formed to a predetermined height on the second metal layer 29. Thereby, a depression part, which is further formed on the second insulating layer 30, is filled with the insulating material to be flush with the third metal layer 31, to obtain a third insulating layer 32. By repeating the above procedure, when the third insulating layer 32 is formed in a desired height, all the metal layers 25, 29 and 31 are removed from the electrode base 22, hence preparing an electro-forming master for shadow masks having a pin part of a desired height on the electrode base. The recess of the electrode base 22 is to be a root part 28, and a pin part 32 is integrally formed on an upper portion of the root part 28 and protrudes from the surface of the electrode base 22. FIG. 11 is a view showing a shadow mask, which is formed in a flat plate or a curved plate. In some cases, the shadow mask may be fabricated in a flat plate, and then subjected to forming process to be a curved plate shape. A conventional shadow mask for CRT results from the etching process. That is, a flat base 33 is coated with a photosensitive material, and then an exposure part is formed using a film, followed by making holes of the shadow mask through an etching process and then a margin part 35 through a pressing process. Such a conventional method has plural manufacturing steps, which is involved. However, in the present invention,^" a metal ion is formed in the electro-forming bath by use of the electro-forming master for shadow masks, whereby the shadow mask having a desired shape can be produced through a single process. Of course, it is preferred that the shadow mask has no heat expansion. For this, the electro-forming bath used in the present invention is composed of an alloy of iron and nickel, and hence, the electro-forming process may be performed by use of Invar alloy without heat expansion. FIG. 12 is a sectional view of an electro-forming master, for use in manufacturing a flat shadow mask, in which a plurality of pin parts 38, serving to make holes of the shadow mask, are provided on an electrode base 39. FIG. 13 is a sectional view of an electro-forming master for shadow masks, capable of omitting a conventional forming process . As for the conventional manufacturing method of a shadow mask for CRT, holes of a flat shadow mask result from the etching process, a margin part thereof is obtained by means of the pressing process. However, in the present invention, the margin part is simply formed after the electro-forming process, without the pressing process, thereby leading to the desired shadow mask. As such, a plurality of pin parts 40 and a margin part 39 are provided on an electrode base. FIG. 14 is a view showing the shadow mask obtained by subjecting the electro-forming master of FIG. 13 to electro-forming process, in which a shadow mask 41 is formed to the electro-forming master. FIG. 15 is a view showing the shadow mask of FIG. 14 released from the electro-forming master, in which a released shadow mask 44 has a plurality of holes 42 and a margin part 43. By use of the electro-forming master of the present invention, the shadow mask having a curved surface may be easily and repeatedly produced. In the present invention, the electrode base and the insulating material may be made of various materials. For example, the electrode base is made of stainless steel, which has superior durability and functions to easily release the shadow mask of thin metal , such as copper or nickel, as an electro-formed product, from the electro- forming master. Further, the insulating material has elasticity. Thereby, such an insulating material does not generate stress with the shadow mask resulting from the electro-forming process, thus easily performing the releasing process. In addition, upon the releasing process, the shadow mask is not damaged from the insulating material . Therefore, it is preferred that the insulating material is elastic. Useful for the present invention, the insulating material having elasticity is exemplified by silicone. Since a silicone insulating material has elasticity and releasability at the same time, when the electro-formed product which is to be ^"the shadow mask of thin metal is released from the electro-forming master, the insulating material is not damaged. Also, silicone having high releasability acts to easily separate such an electro- formed product from the electro-forming master. Consequently, in the present invention, there are provided the shadow mask obtained by use of the above electro-forming master and the manufacturing method thereof.

Industrial Applicability

As described above, the present invention provides a shadow mask manufactured by use of an electro-forming master for shadow masks having a pin part and a method of manufacturing the same, characterized by repeatedly producing the shadow mask by use of the electro-forming master. As for the electro-forming master for shadow masks of the present invention, a pin part made of an insulating material affects the formation of a metal which is electro- formed, and also, a root part is formed at a lower portion of the pin part so as to securely couple the pin part to the electrode base. When the shadow mask should have a predetermined thickness, the height of the pin part increases to be suitable for the thickness of the shadow mask. With the intention of increasing the height of the pin part, while a photosensitive material is plurally layered and exposed to light, the electro-forming process is performed to form a plurality of metal layers. Alternatively, while an insulating material is plurally layered, the electro-forming process is carried out to prepare a plurality of metal layers, thus obtaining the electro-forming master for shadow masks. On the other hand, the insulating material used in the present invention has elasticity, and thus, acts to allow the shadow mask to be easily released from the electro-forming master after the electro-forming process. Further, the electro-forming master composed of the elastic insulating material can be reused. Although the preferred embodiments of the present invention have been disclosed for illustrative purposes, those skilled in the art will appreciate that various modifications, additions and substitutions are possible, without departing from the scope and spirit of the invention as disclosed in the accompanying claims.

Claims

1. A shadow mask, manufactured by use of an electro- forming master through an electro-forming process and then released from the electro-forming master, wherein the electro-forming master comprises an electrode base having a recess at an upper portion thereof, a root part formed by an insulating material filled in the recess of the electrode base, and a pin part integrally formed on an upper portion of the root part and protruding from an upper surface of the electrode base.

2. The shadow mask according to claim 1 , wherein the pin part increases in height in a manner of stacking a plurality of insulating layers while formation of a plurality of metal layers.

3. The shadow mask according to claim 1, wherein the pin part increases in height in a manner of stacking a plurality of exposure layers while formation of a plurality of metal layers .

4. The shadow mask according to claim 1 , wherein the shadow mask is made of Invar alloy without heat expansion.

5. The shadow mask according to claim 1, 2 , 3 , or 4, wherein the recess of the electrode base is formed through an etching process.

6. The shadow mask according to claim 1, 2 , 3 , or 4, wherein the recess of the electrode base is formed by a mechanical process or a laser process.

7. The shadow mask according to claim 1, 2, 3, or 4, wherein the pin part has elasticity.

8. The shadow mask according to claim 7 , wherein the pin part comprises silicone.

9. A shadow mask, manufactured by use of an electro- forming master through an electro-forming process and then released from the electro-forming master, wherein the electro-forming master comprises an electrode base including an insulating part through which a current does not flow and a current- carrying part which has a shape identical to that of the shadow mask, and a plurality of metal layers formed on the current- carrying part of the electrode base through an electro- forming process and a plurality of insulating layers formed on the insulating part of the electrode base, each of which increases in height in a sequentially layering manner, in which the metal layers are removed from the electrode base when the metal layers and the insulating layers reach predetermined heights, whereby only the insulating layers having a predetermined height remain on the electrode base.

10. The shadow mask according to claim 9, wherein the insulating part of the electrode base is prepared by filling an insulating material in a recess of the electrode base resulting from an etching process .

11. The shadow mask according to claim 9, wherein the insulating layer is formed of an elastic material .

12. The shadow mask according to claim 9 , wherein the shadow mask is made of Invar alloy without heat expansion.

13. The shadow mask according to claim 9, 10, 11, or 12, wherein the insulating layer comprises silicone.

14. A shadow mask, manufactured by use of an electro- forming master through an electro-forming process and then released from the electro-forming master, wherein the electro-forming master comprises an electrode base including an insulating part through which a current does not flow and a current- carrying part which has a shape identical to that of the shadow mask, and a plurality of metal layers formed on the current- carrying part of the electrode base through an electro- forming process and a plurality of exposure layers formed on the insulating part of the electrode base, each of which increases in height in a sequentially layering manner, in which the exposure layers are removed from the electrode base to form a depression part when the metal layers and the exposure layers reach predetermined heights, whereby the depression part is filled with an insulating material and the metal layers are removed from the electrode base, to form an insulating layer having a predetermined height .

15. The shadow mask according to claim 14, wherein the insulating part of the electrode base is prepared by filling an insulating material in a recess of the electrode base resulting from an etching process.

16. The shadow mask according to claim 14, wherein the insulating layer is formed of an elastic material.

17. The shadow mask according to claim 14, wherein the shadow mask is made of Invar alloy without heat expansion.

18. The shadow mask according to claim 14, 15, 16, or 17, wherein the insulating material filled in the depression part comprises silicone.

19. A shadow mask, manufactured by use of an electro- forming master for shadow masks having a reusable pin part with elasticity and insulation through an electro-forming process and then released from the electro-forming master, wherein the electro-forming master comprises an electrode base having a recess at an upper portion thereof, a root part formed by filling an insulating material in the recess, and a pin part integrally formed on an upper portion of the root part and protruding from the surface of the electrode base.

20. The shadow mask according to claim 19, wherein the pin part increases in height in a manner of stacking a plurality of insulating layers while formation of a plurality of metal layers.

21. The shadow mask according to claim 19, wherein the pin part increases in height in a manner of stacking a plurality of exposure layers while formation of a plurality of metal layers .

22. The shadow mask according to claim 19, wherein the shadow mask is made of Invar alloy without heat expansion.

23. The shadow mask according to claim 19, 20, 21, or 22, wherein the recess of the electrode base is formed through an etching process.

24. The shadow mask according to claim 19, 20, 21, or 22, wherein the recess of the electrode base is formed through a mechanical process or a laser process.

25. The shadow mask according to claim 19, 20, 21, or

22, wherein the pin part has elasticity.

26. The shadow mask according to claim 25, wherein the pin part comprises silicone.

27. A method of manufacturing a shadow mask, comprising: preparing an electro-forming master, which includes an electrode base having a recess, and a root part and a pin part formed by filling an insulating material in the recess of the electrode base, the pin part being integrally formed on an upper portion of the root part and protruding from the surface of the electrode base; electro-forming the electro-forming master, to manufacture a metal shadow mask; and releasing the shadow mask from the electro-forming master.

28. The method according to claim 27, wherein the pin part increases in height in a manner of stacking a plurality of insulating layers while formation of a plurality of metal layers.

29. The shadow mask according to claim 27, wherein the pin part increases in height in a manner of stacking a plurality of exposure layers while formation of a plurality of metal layers .

30. The shadow mask according to claim 27, wherein the shadow mask is made of Invar alloy without heat expansion.

31. The shadow mask according to claim 27, 28, 29, or 30, wherein the recess of the electrode base is formed through an etching process.

32. The shadow mask according to claim 27, 28, 29, or 30, wherein the recess of the electrode base is formed through a mechanical process or a laser process.

33. The shadow mask according to claim 27, 28, 29, or 30, wherein the pin part has elasticity.

34. The shadow mask according to claim 33, wherein the pin part comprises silicone.