KR20010017795A - Composite gas scrubber system - Google Patents

Abstract

PURPOSE: A multi-gas scrubber system is provided which uses exhaust gas as a fuel for a combustor of high temperature, economically and efficiently operated and maintained, and prevents corrosion and breakdown by purifying waste gas with divided into high temperature combustion and low temperature combustion according to types of the waste gas. CONSTITUTION: The multi-gas scrubber system comprises a high temperature combustor (20) having a waste gas inlet, a central combustion chamber (22) and a waste gas outlet, wherein a high temperature combustible waste gas generated from the chemical process is flown in to be oxidized by heat; a decomposition gas ejecting nozzle (40) installed on the waste gas inlet of the high temperature combustor (20), wherein a decomposition gas is ejected into the central combustion chamber (22) of the high temperature combustor (20); an electrolytic device (50) supplying water electrolyzed decomposition gas to the decomposition gas ejecting nozzle (40); a low temperature combustor (130) having a waste gas inlet, a central combustion chamber (132) and a waste gas outlet, wherein a low temperature combustible waste gas generated from the chemical process is flown in to be oxidized by heat; and a precipitator separating and removing powder in an oxidation gas exhausted through the waste gas outlet of the low temperature combustor (130).

Description

Compound gas scrubber system {COMPOSITE GAS SCRUBBER SYSTEM}

The present invention relates to a complex gas scrubber system for purifying waste gas discharged after being used in a chemical process or the like with clean air.

Waste gases emitted from chemical processes and semiconductor manufacturing are highly toxic, explosive, and corrosive, which not only harms the human body, but also causes environmental pollution when the waste gases are released into the atmosphere. Should be discharged.

On the other hand, various types of waste gases have different combustion temperatures, are highly explosive when mixed, and have a dangerous problem of chemical reactions. In addition, the gas scrubber oxidizes the waste gas by the heater element in consideration of safety, economy, and efficiency, and then separates the powder in the oxidizing gas or injects water into the oxidizing gas by driving a water sprayer. It is universal.

However, the gas scrubber as described above has a limitation in purifying the waste gas because it is very difficult to maintain a high temperature by the heater element, and there is a problem that the efficiency is greatly reduced. That is, when the high temperature is not maintained by the driving of the heater element, the oxidation of some waste gases may not be completely performed, which causes a problem that contaminants are included in the air purified by the gas scrubber.

In addition, in the case of maintaining a high temperature by driving the heater element, not only the wire of the heater element is easily disconnected due to deterioration, but also the controller of the heater element or the like degrades or malfunctions due to a heat fade. The use of such heater elements has been a fatal drawback to the operation and maintenance of gas scrubbers.

On the other hand, measures are required to cause corrosion of gas scrubbers by oxidizing gases such as HF, Cl ₂ and HCl having strong acidic properties. The amount of wastewater generated will increase. Since such waste water remains to be purified by a separate waste water treatment facility, the operation and maintenance cost of the gas scrubber is increased, resulting in inefficient and inefficient economic problems. In addition, when the gas scrubber is installed in a high temperature and low temperature combustion method, it takes up a lot of installation space, and there is a problem in that the operation and maintenance of the gas scrubber is impaired, and the burden on the operation and maintenance costs is increased.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned general problems, and an object of the present invention is to provide a complex gas scrubber system capable of completely purifying waste gas with clean air.

Another object of the present invention is to provide a complex gas scrubber system that is economical and efficient to operate and maintain.

It is still another object of the present invention to provide a combined gas scrubber system in which the amount of waste water generated is reduced by the circulating use of water.

It is still another object of the present invention to provide a complex gas scrubber system capable of purifying waste gas into high-temperature combustion and low-temperature combustion according to the type by a single configuration.

1 is a cross-sectional view schematically showing a complex gas scrubber system according to the present invention,

2 is a cross-sectional view showing a high temperature combustion device in the composite gas scrubber system according to the present invention,

3 is a piping diagram of the electrolysis device in the composite gas scrubber system according to the present invention,

Figure 4 is a perspective view showing a gas generating unit of the electrolysis device in the complex gas scrubber system according to the present invention,

5 is a cross-sectional view showing a low temperature combustion device in a composite gas scrubber system according to the present invention.

♣ Explanation of symbols for the main parts of the drawing ♣

10: frame 20: high temperature combustion device

22: central combustion chamber 40: cracked gas injection nozzle

50: electrolysis device 60: gas generating unit

62: plate electrode 64: insulating gasket

70: wet cleaning device 72: washing tank

76: reservoir 90: air supply

92: air nozzle 100: spraying device

110: neutralizer supply device 120: exhaust pipe

130: low temperature combustion device 132: central combustion chamber

144: heater element 150: dust collector

152: dust collecting chamber 160: collection device

162: collection tank 164: transfer device

166: collection tank 170: exhaust pipe

A feature of the present invention for achieving the above object is a high temperature combustion apparatus having a high temperature combustible waste gas generated in a chemical process and oxidized by heat, and having a waste gas inlet, a central combustion chamber, and a waste gas outlet; A cracked gas injection nozzle which is installed at a waste gas inlet of the hot combustion device and injects cracked gas into a central combustion chamber of the hot combustion device; An electrolysis device for supplying a decomposition gas in which water is electrolyzed to a decomposition gas injection nozzle; A low temperature combustion device which introduces a low temperature combustible waste gas generated in a chemical process and oxidizes it by heat, and has a waste gas inlet, a central combustion chamber, and a waste gas outlet; A composite gas scrubber system including a dust collecting device for separating and removing powder in oxidized gas discharged through a waste gas outlet of a low temperature combustion device.

In addition, by spraying water to the oxidizing gas discharged through the waste gas outlet of the high temperature combustion device to cool the oxidizing gas and at the same time further comprises a wet cleaning device for dissolving the powder and water-soluble components in the oxidizing gas in water, the high temperature combustion device An outer case and an inner case which are spaced apart at predetermined intervals so as to form a cooling water flow passage, and an insulating material, a heater element, and a ceramic tube which are sequentially installed in the inner circumference of the inner case are included.

DETAILED DESCRIPTION Hereinafter, exemplary embodiments of a complex gas scrubber system according to the present invention will be described in detail with reference to the accompanying drawings.

1 to 5 are views for explaining the composite gas scrubber system according to the present invention.

First, referring to Figures 1 and 2, the frame 10 of the composite gas scrubber system of the present invention is configured to be movable by a plurality of wheels 12, the high temperature on the upper side of the frame 10 The combustion device 20 is installed. The high temperature combustion device 20 has a vertical central combustion chamber 22, and the central combustion chamber 22 is an inner case 26 which is provided at a predetermined interval inside the outer case 24, and the inner case ( It consists of the heat insulating material 28 installed in the inner periphery of 26). The coolant is supplied to the passage formed between the outer case 24 and the inner case 26 of the central combustion chamber 22 to obtain a heat insulating effect.

In addition, a waste gas inlet 30 through which waste gas is introduced is connected to an upper portion of the central combustion chamber 22, and a waste gas outlet 32 through which oxidized gas is discharged is connected to a lower portion thereof. The cross-sectional area of the waste gas outlet 32 is formed to gradually narrow toward the outlet so as to smoothly discharge the oxidizing gas. The heater element 34 is installed in the inner circumference of the heat insulating material 28, and a ceramic tube 36 having excellent heat resistance and corrosion resistance is provided inside the heater element 34. The ceramic tube 36 not only protects the heater element 34 from heat generated during combustion of waste gas, but also prevents corrosion of the central combustion chamber 22 by oxidizing gas. The temperature sensor 38 for sensing a temperature is mounted on the upper portion of the central combustion chamber 22, and the decomposition gas injection nozzle 40 is installed downward in the upper center of the central combustion chamber 22.

As shown in FIG. 3, the decomposition gas injection nozzle 40 of the high temperature combustion device 20 is supplied with decomposition gas from the electrolysis device 50, and the electrolysis device 50 is installed at the lower portion of the frame 10. do. The electrolysis device 50 is provided with the gas generating unit 60 which produces | generates the water supplied through the feedback tank 52, the pump 54, and the tank 56 by decomposition into a decomposition gas by electrolysis. The feedback tank 52 supplies water at an appropriate flow rate, and the water supplied by the driving of the pump 54 is stored in the tank 56 and then appropriately supplied to the gas generating unit 60.

As shown in FIG. 4, in the gas generating unit 60, a plurality of plate electrodes 62 are stacked at a predetermined interval by the interposition of the insulating gaskets 64, and the plate electrodes 62 and the insulating gasket 64 are stacked. Are fastened by bolts 66, and each of the plate electrodes 62 is formed such that a water inlet hole 62a and a gas outlet hole 62b are coaxially positioned. The water inflow hole 62a of the plate electrodes 62 is connected to the tank 56 to receive water, and the decomposition gas injection nozzle 40 is connected to the gas discharge hole 62b. Inside the insulating gaskets 64, an annular shield 68 is mounted to prevent leakage.

Therefore, after supplying water from the tank 56 through the water inlet hole 62a of the plate electrodes 62 and then applying power to the plate electrodes 62 located on both sides of the plate electrodes 62, As the water supplied through the water inlet holes 62a is electrolyzed, cracked gas, that is, hydrogen and oxygen, is generated. The hydrogen and oxygen are discharged through the gas discharge holes 62b of the plate electrodes 62 and then supplied to the central combustion chamber 22 of the high temperature combustion device 20 through the decomposition gas injection nozzle 40.

Referring back to FIG. 3, a backfire prevention tank 58 is installed between the cracked gas injection nozzle 40 and the gas generating unit 60 to prevent the flame from going backward beyond the high temperature combustion device 20. do. The pump 54 and the gas generating unit 60 are respectively connected to the flashback prevention tank 58 so as to store an appropriate amount of water, and the cracked gas passing through the flashback prevention tank 58 is controlled by a valve device. It is supplied to the decomposition gas injection nozzle (40). In the figure, it was shown that two tanks 56 and gas generating units 60 of the electrolysis device 50 are employed, but the number of tanks 56 and gas generating units 60 can be changed as appropriate. . Various valve devices, piping accessories, measuring instruments, etc. constituting the pipe of the electrolysis device 50 are general ones, and thus detailed description thereof will be omitted.

As shown in FIG. 2, the waste gas outlet 32 of the high temperature combustion device 20 is connected to the upper one side of the wet cleaning device 70, and the wet cleaning device 70 includes a washing tank 72. A water supply pipe 74 for supplying water to an upper side of the washing tank 72 is connected, and a reservoir 76 is installed below the washing tank 72. Each of the washing tank 72 and the storage tank 76 is made of stainless steel having excellent corrosion resistance and acid resistance, and then paints acid resistant paint, for example, Teflon, on the inner surface thereof.

Moreover, one center of the washing tank 72 and the upper part of the water storage tank 76 are connected by the water supply pipe 78, and the water of the washing tank 72 is collect | recovered to the water storage tank 76 by this water supply pipe 78. FIG. The lower portion of the washing tank 72 and the upper portion of the reservoir 76 are connected via a manual valve 80, and the drain pipe 82 is connected to the lower portion of the reservoir 76. At the bottom of each of the washing tank 72 and the water storage tank 76, an air nozzle 92 is installed to generate air bubbles by injecting air supplied from the air supply device 90 installed on the upper portion of the frame 10. On one side of 76, a hydrogen ion concentration sensor 94 for measuring the concentration of hydrogen ions is provided. The water of the reservoir 76 is sprayed onto the oxidized gas discharged through the waste gas outlet 32 of the high temperature combustion device 20 connected to the washing tank 72 by the spray device 100. At this time, the spray device 100 is to spray the water by the Venturi principle. One side of the washing tank 72 is connected to the neutralizing agent supply device (110). The neutralizing agent supplied to the washing tank 72 by the neutralizing agent supply device 110 preferably uses potassium hydroxide, and potassium hydroxide neutralizes water to maintain a proper hydrogen ion concentration. The driving of the neutralizer supply device 110 may be controlled according to the measurement of the hydrogen ion concentration sensor 94.

On the other hand, the upper part of the washing tank 72 is located on the opposite side to the waste gas outlet 32, the exhaust pipe 120 for exhausting the purification gas is vertically connected, and removes the moisture in the purification gas exhausted inside the exhaust pipe 120 Demister 122 and membrane 124 are mounted respectively. In addition, a temperature sensor 126 for detecting a temperature of clean air and a pressure sensor 128 for detecting a pressure are mounted on an upper portion of the exhaust pipe 120, and a sampling port 130 is disposed on the upper portion of the temperature sensor 126. Is formed. Samples of clean air may be taken through the sampling port 130 to perform necessary inspections.

As shown in FIG. 1 and FIG. 5, the composite gas scrubber system of the present invention has a low temperature combustion device 130 installed separately from the high temperature combustion device 20 on the frame 10. The low temperature combustion device 130 has a vertical combustion chamber 132 that is vertically similar to the high temperature combustion device 20, and the central combustion chamber 132 has an inner case installed at a predetermined interval inside the outer case 134 ( 136 and the heat insulating material 138 provided in the inner circumference of the inner case 136. The coolant may be supplied to a space formed between the outer case 134 and the inner case 136 of the central combustion chamber 132 to obtain a heat insulating effect.

In addition, a waste gas inlet 140 through which waste gas is introduced is connected to an upper portion of the central combustion chamber 132, and a waste gas outlet 142 to which an oxidizing gas is discharged is connected to a lower portion thereof. The waste gas outlet 142 is formed to be bent in an elbow shape, and an air port 142a is formed at one side of the waste gas outlet 142 to inject air supplied from the air supply device 90 toward the outlet thereof. The heater element 144 is installed on the inner circumference of the heat insulator 138, and a ceramic tube 146 having excellent heat resistance and corrosion resistance is installed inside the heater element 144, and the central combustion chamber 132 is disposed above the central combustion chamber 132. Equipped with a temperature sensor 148 that senses the temperature of.

The waste gas outlet 142 of the low temperature combustion device 130 is connected to the dust collecting chamber 152 of the dust collecting device 150 for separating the powder in the oxidizing gas. The dust collector 150 separates the powder in the oxidizing gas by a rotary airflow. In the dust chamber 152 of the dust collector 150, air is supplied through the air port 142a of the waste gas outlet 142. The rotary airflow is generated, and at the same time, the oxidizing gas is burned by the indirect oxidation method.

A collecting device 160 for collecting and collecting powder separated from the oxidizing gas is installed below the dust collecting device 150. The collecting device 160 has a collecting tank 162 which is perpendicular to the dust collecting chamber 152 of the dust collecting device 150 so that the powder can be collected by dropping, and the powder collected in the collecting tank 162. Is collected and collected by the transfer device 164 into the collection tank 166. The transfer device 166 transfers the powder from the collection tank 162 to the collection tank 166 by blowing a gas, for example nitrogen gas, and on one side of the collection tank 166 a door to remove and remove the powder. 168 is mounted.

Meanwhile, the lower end of the exhaust pipe 170 is vertically penetrated to the dust collecting chamber 152 of the dust collecting device 150 so as to be positioned approximately in the center. Accordingly, when the oxidizing gas is discharged from the waste gas outlet 142 to the dust collecting chamber 152 of the dust collecting device 150, the phenomenon in which the powder in the oxidizing gas flows into the exhaust pipe 170 is prevented. A filter 172 for filtering purge gas passing through the dust collecting chamber 152 is mounted inside the exhaust pipe 170, and a temperature sensor 174 and a pressure sensor 176 are respectively mounted on the upper part of the exhaust pipe 170. The sampling port 178 is formed above the temperature sensor 174.

The operation of the combined gas scrubber system according to the present invention will now be described.

First, referring to FIG. 2, a series of purification processes by the high temperature combustion device 20 will be described. The high temperature suitable for high temperature combustion processing through the waste gas inlet 30 in the central combustion chamber 22 of the high temperature combustion device 10 will be described. When combustible waste gas, for example, NF ₃ , CF ₆ , C ₂ F ₆ , SF ₆ , CHF _3, or the like, the heater element 34 is driven to heat the waste gas. In addition, the cracked gas generated by the gas generating unit 60 of the electrolysis device 50 passes through the flashback prevention tank 58 in which water is stored, and through the cracked gas injection nozzle 40 to the central combustion chamber 22. Supplied.

The generation of such decomposition gas will be described in detail with reference to FIGS. 3 and 4. After water is supplied to the water inlet hole 62a of the plate electrode 62 through the feedback tank 52, the pump 54, and the tank 56, the plate electrode 62 located on both sides of the plate electrodes 62. When the power is applied to the electrodes), the water supplied to the water inlet hole 62a of the plate electrodes 62 is decomposed into hydrogen and oxygen to generate cracked gas. After the cracked gas is discharged through the gas discharge holes 62b of the plate electrodes 62, the cracked gas passes through the flashback prevention tank 58 and through the cracked gas injection nozzle 40, the central combustion chamber 20 of the high temperature combustion device 20. 22). Here, since the gas generating unit 60 is configured by stacking a plurality of plate electrodes 62 at predetermined intervals by the interposition of the insulating gaskets 64, the decomposition gas electrolyzed by each of the plate electrodes 62. Can be supplied in a sufficient amount.

Referring again to FIG. 2, the internal temperature of the central combustion chamber 22 is raised to about 750 ° C. by the driving of the heater element 34. In this process, hydrogen in the cracked gas spontaneously ignites and combusts when the internal temperature of the central combustion chamber 22 reaches about 580 ° C. Therefore, since the internal temperature of the central combustion chamber 22 rises to a high temperature of about 1200 ° C., waste gases such as CF ₄ , C ₂ F ₆ , SF ₆ , CHF ₃ , NF _3, and the like are efficiently combusted.

Thus, since the waste gas is completely burned at a high temperature using the cracked gas supplied from the electrolysis device 50 while heating the waste gas by driving the heater element 34, the treatment efficiency of the waste gas is increased. In addition, the performance of the heater element 34 is disconnected or the performance deterioration and failure due to the heat fade phenomenon is prevented to improve the reliability of the composite gas scrubber system. In addition, the use of cracked gas, which can be produced relatively economically by the electrolysis of water, makes the operation and maintenance of the complex gas scrubber system economical and efficient.

Subsequently, the oxidized gas combusted in the central combustion chamber 22 of the high temperature combustion device 20 is discharged to the washing tank 72 of the wet clean device 70 through the waste gas discharge port 32. At this time, since the waste gas outlet 32 is gradually narrowed from the upper end to the lower end, the exhaust gas is smoothly discharged.

In addition, the oxidized gas discharged to the washing tank 72 is sprayed with water by the Venturi principle driven by the spraying device 100 to cool and neutralize the oxidizing gas. The water to be sprayed dissolves the water-soluble gas in the oxidizing gas and removes dust, for example, the powder in the oxidizing gas. In parallel with this, the potassium hydroxide supplied from the neutralizing agent supply device 110 neutralizes the water in the washing tank 72 to maintain the hydrogen ion concentration appropriately.

In the wet cleaning device 70 of the present invention, the water in the washing tank 72 is drained and stored by the water tank 76 through the water pipe 78, and the water in the reservoir 76 is driven by the spraying device 100. Since the circulation flow path is sprayed back into the washing tank 72, the amount of water used may be minimized. As a result, the amount of wastewater discharged is also reduced, making the operation and maintenance of the complex gas scrubber system economical and efficient.

On the other hand, the air bubbles generated by the air injected through the air nozzle 92 of the air supply device 90 is installed on the bottom of each of the washing tank 72 and the reservoir 76, the washing tank 72 and the reservoir 76 This will prevent the powder in the water from settling on each floor. After the water in the reservoir 76 is drained through the drain pipe 82, the water pollution level of the water can be maintained at an appropriate level by supplying clean water through the water supply pipe 74 of the washing tank 72.

The purified gas purified through the wet clean device 70 is exhausted into the atmosphere through the exhaust pipe 120. At this time, moisture in the purge gas is removed by the demister 122 and the membrane 124 of the exhaust pipe 120 and exhausted into the clean air.

Next, referring to FIG. 5, a series of purification processes by the low temperature combustion device 130 will be described. The waste gas introduction port 140 is suitable for the low temperature combustion process in the central combustion chamber 132 of the low temperature combustion device 130. When a low temperature combustible waste gas, for example, SiH ₄ , SiH ₂ Cl ₂ , NH ₃ , WF ₆ , PH _3, etc., is introduced, the heater element 144 is driven to heat the waste gas. At this time, the internal temperature of the central combustion chamber 22 is increased by about 750 ° C. by the driving of the heater element 34 to burn the waste gas.

In addition, the oxidized gas combusted by the driving of the heater element 34 in the central combustion chamber 132 of the low temperature combustion device 130 is discharged to the dust collecting chamber 152 of the dust collecting device 150 through the waste gas outlet 142. do. In the dust collecting chamber 152 of the dust collecting device 150, the rotary airflow is generated by the air injected from the air supply device 90 through the air port 142a of the waste gas discharge port 142. The powder in the oxidizing gas is separated by the rotary airflow and is dropped into the collecting tank 162 and collected.

In addition, the oxidizing gas passing through the dust collecting chamber 152 of the dust collecting apparatus 150 is naturally ignited by the air injected through the air port 142a. That is, since the combustible gas in the oxidizing gas is heated, when air is supplied thereto, it is naturally ignited by the oxidation reaction. In this way, the oxidized gas combusted in the central combustion chamber 132 of the low temperature combustion device 130 is burned again while passing through the dust collecting chamber 152 of the dust collecting device 150, thereby improving the treatment efficiency significantly.

Meanwhile, the powder collected in the collection tank 162 may be transferred to the collection tank 166 by driving the transfer device 164, and the powder collected in the collection tank 166 may be removed by opening the door 168. . The purge gas purified in the dust collecting chamber 152 of the dust collecting apparatus 150 is exhausted into the atmosphere through the exhaust pipe 170. At this time, the dust of fine powder in the purification gas is filtered by the filter 172 of the exhaust pipe 170 and exhausted into the clean air.

The above embodiments are merely illustrative of the preferred embodiments of the present invention, and the scope of application of the present invention is not limited to these, and may be appropriately changed within the scope of the same idea. For example, the shape and structure of each component shown in the embodiment of the present invention can be modified.

As described above, according to the complex gas scrubber system according to the present invention, the waste gas can be completely purified by clean air by dividing the waste gas into a high temperature combustion device, a wet clean device, a low temperature combustion device, and a dust collector. In addition, the use of the decomposition gas obtained by the electrolysis of the electrolysis device as the fuel of the high-temperature combustion device, as well as the use of water can be reduced by the circulation of water, and the amount of waste water generated is reduced and the operation and maintenance is economical and efficient. It is made of. In addition, corrosion and failure can be effectively prevented to secure a competitive advantage of reliability and safety.

Claims (3)

A high temperature combustion device which introduces a high temperature combustible waste gas generated in a chemical process and oxidizes it by heat, and has a waste gas inlet, a central combustion chamber, and a waste gas outlet; A cracked gas injection nozzle which is installed at a waste gas inlet of the hot combustion apparatus and injects cracked gas into a central combustion chamber of the hot combustion apparatus; An electrolysis device for supplying decomposition gas obtained by electrolyzing water to the decomposition gas injection nozzle; A low temperature combustion device which introduces a low temperature combustible waste gas generated in a chemical process and oxidizes it by heat, and has a waste gas inlet, a central combustion chamber, and a waste gas outlet; And a dust collecting device for separating and removing powder in the oxidized gas discharged through the waste gas outlet of the low temperature combustion device. The apparatus of claim 1, further comprising a wet cleaning device that sprays water onto the oxidizing gas discharged through the waste gas outlet of the high temperature combustion device to cool the oxidizing gas and simultaneously dissolves powder and water-soluble components in the oxidizing gas in water. Composite gas scrubber system, characterized in that. According to claim 1 or claim 2, wherein the high-temperature combustion device is an outer case and inner case which is installed at a predetermined interval to form a cooling water flow passage, and the heat insulating material, the heater element which is sequentially installed on the inner circumference of the inner case And a ceramic tube.