KR20010007012A - Vibrating Gyroscope - Google Patents

Abstract

PURPOSE: To detect angular velocity against two directions with a single element. CONSTITUTION: A vibrating gyro 10 includes vibration plates 14 and 24 formed putting an intermediate member 12 in between. The vibration plate 14 includes contacted piezoelectric substrates 16 and 18. In the middle of its one side, separated electrodes 20a to 20d are formed, and on the other side, a full surface electrode 22 is formed. Similarly, the vibration plate 24 is formed with piezoelectric substrates 26 and 28, separated electrodes and a full surface electrode 32. An excitation detection means is formed with the separated electrodes of the vibration plates 14 and 24, the piezoelectric substrates and the full surface electrodes. The two separated electrodes 20c and 20d of the vibration plate 14 side is made the first detection part and the two separated electrodes of the vibration plate 24 side is made the second detection part. The combination of the electrodes to be a detection part is chosen from those crossing rectangularly.

Description

Vibrating Gyroscope

The present invention relates to a vibrating gyroscope, and more particularly to a vibrating gyroscope used in the case of sensing the angular velocity, for example to prevent camera shake.

11 is a perspective view showing an example of a conventional vibrating gyroscope. The vibrating gyroscope 1 comprises a vibrating body 2 in the form of an equilateral triangle, for example. As shown in Figs. 11 and 12, the three sides of the vibrator 2 have piezoelectric elements 3a, 3b, and 3c, respectively. In order to use the oscillating gyroscope 1 as shown in FIG. 12, for example, a vibration circuit 4 is connected between the piezoelectric elements 3a and 3b and the piezoelectric element 3c. In addition, the piezoelectric elements 3a and 3b are connected to a detection circuit 5. The detection circuit 5 includes, for example, a differential circuit, a synchronous detection circuit, a smoothing circuit and a DC amplifying circuit.

In the oscillating gyroscope 1, the signal output from the piezoelectric element 3c is fed back to the oscillator circuit 4. The oscillator 4 amplifies the returned signal and compensates the phase of the amplified signal to produce an excited signal. The excitation signal thus obtained is supplied to the piezoelectric elements 3a and 3b. This causes the vibrating body 2 to vibrate in a direction perpendicular to the surface on which the piezoelectric element 3c is formed. In this state, the bent states of the piezoelectric elements 3a and 3b are the same, and the signals output therefrom are also the same. Therefore, in the detection circuit 5, there is no output from the differential circuit. Rotation about the axis of the vibrating body 2 in the state where the vibrating body 2 is bent and vibrates generates a Coriolis force, and thus changes the vibration direction of the vibrating body 2. This causes a difference in the signal output from the piezoelectric elements 3a and 3b, and causes the signal to be output in the differential circuit. The output signal is smoothed in the smoothing circuit, and the smoothed signal is amplified in the direct current amplification circuit. Therefore, the angular rotational speed can be detected by measuring the signal output from the detection circuit 5.

In the vibrating gyroscope shown in FIG. 13, the vibrating body 2 can be manufactured by coupling of two piezoelectric plates 6a and 6b. As indicated by the arrows in Fig. 13, the piezoelectric plates are polarized so as to oppose each other in opposite directions. In this case, the electrodes 7a and 7b extending in the longitudinal direction, respectively, are formed at one of the opposing surfaces of the vibrating body 2, and the electrode 8 is formed at the other entire surface of the opposing surface. Using the circuit shown in FIG. 12, the gyroscope 1 described above can also detect angular velocity.

Nevertheless, in each vibratory gyroscope described above, only angular velocity about the vibrating axis is detected, and only angular velocity in one direction is detected. Thus, two vibratory gyroscopes are required to detect angular velocities in two directions, and two oscillator circuits must excite these vibratory gyroscopes. Since the oscillation circuit is expensive, it is expensive to detect angular velocities in various directions.

For this reason, we needed a vibratory gyroscope that could measure angular velocities in two directions using one device.

Accordingly, the present invention seeks to satisfy this need.

1 is a perspective view showing an example of a vibrating gyroscope according to the present invention.

FIG. 2 is a perspective view of the vibration gyroscope of FIG. 1 viewed from another angle. FIG.

3 is an exploded perspective view of the vibration gyroscope of FIG. 1.

4 is a structural diagram of a circuit used as the magnitude gyroscope shown in FIG.

FIG. 5A is a finite element method (FEM) analysis diagram in the buckling vibration mode of a vibrating gyroscope when not rotating. FIG.

5B is a sectional view of the vibration.

FIG. 6A is an FEM analysis diagram showing vibrations in a second bending vibration mode of a vibrating gyroscope as it rotates. FIG.

6B is a cross-sectional view of the vibration state taken along the dashed-dotted line of FIG. 6A.

7A is a structural diagram showing vibration of a diaphragm of a vibrating gyroscope when the vibrating gyroscope vibrates.

7B is a sectional view showing a vibration state when a Coriolis force is applied.

8 is an exploded perspective view showing another example of a vibrating gyroscope according to the present invention.

9 is an exploded perspective view showing still another example of a vibrating gyroscope according to the present invention.

10 is a structural diagram of a circuit having a modified electrode configuration.

11 is a perspective view showing an example of a conventional vibrating gyroscope.

12 is a structural diagram of a circuit using the conventional vibrating gyroscope shown in FIG.

13 is a perspective view showing another example of a conventional vibrating gyroscope.

The vibrating gyroscope according to the invention comprises two planar diaphragms facing each other. The two diaphragms degenerate in the buckling oscillation mode and the buckling oscillation mode or oscillate in adjacent secondary bend modes. The vibratory gyroscope detects the Coriolis force by detecting the displacement of the amplitude balance of the secondary bending vibration mode that occurs when a rotational angular velocity is applied about the axis parallel to the surface of the diaphragm.

The above-described vibrating gyroscope includes an intermediate member formed between two diaphragms to form a space portion between the two diaphragms, and a plurality of excitation and detection elements for vibrating the diaphragm and outputting a signal generated by the vibration of the diaphragm. Including; Here, the first detection unit (first detection unit) is formed by the combination of two adjacent excitation and detection elements, the second detection unit (second detection unit) is generated by another combination of adjacent excitation and detection elements, The first detector and the second detector are configured to be perpendicular to each other.

In such a case, the excitation and detection elements are preferably not formed at positions opposite to the intermediate member, but are formed at positions opposite to the space portions.

In addition, each excitation and detection element is formed of a piezoelectric substrate, and an electrode divided into four cross-shaped portions is formed on the piezoelectric plate, where the electrode and the piezoelectric substrate can be used to form the excitation and detection element.

In addition, the diaphragm may be formed of a metal plate, and the piezoelectric element divided into four portions of the cross shape and formed on the diaphragm may be used to form the excitation and detection elements.

In addition, the intermediate member may be formed as a frame member having a through hole formed at a central portion thereof.

In addition, the intermediate member may be formed of multiple members disposed on multiple end portions of the diaphragm.

For example, by applying excitation signals to all excitation and detection elements, buckling vibrations are generated such that the amplitude of the central portion of the individual vibrations reaches a maximum. When an angular velocity is applied such that the center of each axis is parallel to the surface of the diaphragm, the Coriolis force changes the oscillation of the diaphragm in the secondary bending oscillation mode. When the vibrations in the buckling vibration and the secondary bending vibration modes are degenerate or similarly arranged, the point where the amplitude of the diaphragm is maximized vibrates away from the center portion of the diaphragm. For this reason, a difference is caused between the two excitations forming the first and second detection zones and the bent states of the detection element, and a signal corresponding to Coriolis force is output in one of the first and second detection zones. do. Since the first and second detection regions are arranged perpendicular to each other, a signal corresponding to the angular velocity in two directions perpendicular to each other can be obtained.

Since the diaphragm and the intermediate member are not movable, the excitation and detection elements are preferably arranged at positions facing the space portion. This arrangement is made to cause buckling vibrations so that the amplitude at the center of the diaphragm is maximum.

In the above-described vibrating gyroscope, the piezoelectric substrate can be used as the vibrating substrate, and the piezoelectric substrate and the electrodes divided into four cross-shaped portions thereon can be used to form the excitation and detection elements.

Moreover, a metal plate can also be used for each diaphragm. In this case, the excitation and detection elements are formed by four piezoelectric elements divided into crosses, and are formed on the diaphragm.

In addition, the intermediate member is provided to form a space between the diaphragms facing each other. Therefore, the intermediate member may be formed of a frame member in which a hole penetrating therein or multiple members disposed at multiple ends of the diaphragm.

According to the invention, the angular velocity with respect to the axis in two directions can be measured by one oscillating gyroscope. In addition, since the vibration gyroscope can be excited by one vibration, a cost reduction effect can be obtained as compared with the conventional method using two vibration gyroscopes, respectively.

BRIEF DESCRIPTION OF DRAWINGS To describe the present invention in detail, some forms currently shown in the drawings are shown. However, the invention is not limited to the arrangements or means shown herein.

Other aspects and advantages of the present invention will become apparent from the following description of the invention with reference to the corresponding drawings.

<Detailed Description of Examples>

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a perspective view showing an example of a vibrating gyroscope according to the present invention. 2 is a perspective view of the oscillating gyroscope shown in FIG. 1 from another angle; 3 is an exploded perspective view thereof. The vibratory gyroscope 10 includes an intermediate member 12. As shown in FIG. 3, the intermediate member 12 is formed in a frame shape having a hole penetrating the central portion. The diaphragm 14 is formed in one of the mutually opposing sides of the intermediate member 12. As shown in FIG. The diaphragm 14 is formed by joining the piezoelectric substrates 16 and 18, for example. As indicated by the arrows in FIG. 3, the piezoelectric substrates 16 and 18 are polarized to oppose each other in the thickness direction.

On the piezoelectric substrate 16, sixteen divided electrodes are formed, of which four electrodes 20a, 20b, 20c and 20d are used for input and / or output of a signal. Such an electrode is formed by cutting a planar electrode into a lattice shape by a dicer. This allows the electrodes 20a, 20b, 20c and 20d to form a cross-shaped divided portion. In the oscillating gyroscope 10, because the electrodes are formed in this manner, sixteen electrodes are formed. However, electrodes 20a, 20b, 20c and 20d are necessary for vibrating gyroscope 10, and no other peripheral electrode is needed. Therefore, when the electrodes 20a, 20b, 20c and 20d are formed by printing on the piezoelectric substrate 16, the peripheral electrode does not need to be made. In the case where the electrodes 20a, 20b, 20c and 20d are formed by etching, the peripheral electrode can be similarly removed. In addition, the planar electrode 22 is formed on the piezoelectric substrate 18. These piezoelectric plates 16 and 18, the electrodes 20a, 20b, 20c and 20d and the planar electrode 22 form excitation and detection elements.

Further, another diaphragm 24 is formed on the other surfaces of the intermediate member 12 that face each other. The diaphragm 24 has a structure similar to the diaphragm 14. The diaphragm 24 includes piezoelectric substrates 26 and 28 bonded to each other, and the piezoelectric substrates 26 and 28 are polarized in directions opposing each other. As best seen in Fig. 2, there are 16 divided electrodes on the piezoelectric substrate 26, the electrodes 30a, 30b, 30c and 30d in the center of these electrodes being used for input and / or output of the signal. In addition, the planar electrode 32 is formed on the piezoelectric substrate 28. Piezoelectric substrates 26 and 28, electrodes 30a, 30b, 30c and 30d, and planar electrode 32 form excitation and detection elements.

The two diaphragms 14 and 24 are arranged so as to surround the intermediate member 12 like a sandwich; Thus, a space portion is formed between the diaphragms 14 and 24. The electrodes 20a, 20b, 20c and 20d and the electrodes 30a, 30b, 30c and 30d forming the excitation and detection elements are arranged at positions opposite to the space portion. This arrangement allows the vibrating substrates 14 and 24 to effectively buckle and vibrate against the excitation signal.

For use of the oscillating gyroscope 10 is connected as shown in FIG. 4. In order to show the interrelationship in connecting circuits with the respective electrodes in the oscillating gyroscope 10, FIG. 4 only shows electrodes 20a, 20b, 20c and 20d, electrodes 30a, 30b, 30c and 30d, planar electrodes 22 and 32 and Only the intermediate member 12 is shown. Each of the planar electrodes 22 and 32 and the intermediate member 12 are shown in the same outline size as the electrodes 20a, 20b, 20c and 20d. In practice, however, they have the same outer dimensions as the diaphragms 14 and 24, as shown in FIG. The electrodes 20a, 20b, 20c and 20d are connected to the resistors 40a, 40b, 40c and 40d, respectively. The electrodes 30a, 30b, 30c and 30d are connected to the resistors 42a, 42b, 42c and 42d, respectively. An oscillation circuit 44 is formed between the resistors 40a, 40b, 40c and 40d and the resistors 42a, 42b, 42c and 42d.

In order to provide such a connection, a conductive material is applied to part or all of the intermediate member 12. Thus, the intermediate member 12 is electrically connected to the planar electrodes 22 and 32; Accordingly, the planar electrodes 22 and 32 are connected to the oscillation circuit 44 through the intermediate member 12. As the material of the intermediate member 12, in order not to disturb the vibrations of the diaphragms 14 and 24, a material similar to the material used for the diaphragms 14 and 24 is preferable. Accordingly, the intermediate member 12 may be made of the same material as used for the piezoelectric substrates 16, 18, 26, and 28, and may be formed by forming an electrode layer on the material. In this case, the plate electrodes 22 and 32 are electrically connected to the electrode layer. On the other hand, a high elastic material may be used to make the intermediate member 12.

Two electrodes 20b and 20d adjacent to the surface of the diaphragm 14 are connected to a differential circuit 46. The signal output from the differential circuit 46 is detected in synchronization with the signal output from the oscillation circuit 44, for example in a synchronous detection circuit 48. The signal detected by the synchronous detection circuit 48 is smoothed in a smoothing circuit 50 and then amplified in a DC amplifying circuit 52. Similarly, two electrodes 30c and 30d adjacent to each other on the surface of the diaphragm 24 are connected to the differential circuit 54. The signal output from the differential circuit 54 is detected in synchronization with the signal output from the synchronization detection circuit 56, for example, the oscillation circuit 44. The signal detected by the synchronous detection circuit 56 is smoothed by the smoothing circuit 58 and then amplified by the DC amplifier 60.

In the circuit shown in Fig. 4, two electrodes 20b and 20d adjacent to each other form a first detection portion; Two electrodes 30c and 30d adjacent to each other form a second detector. Although each of the first detection unit and the second detection unit is a combination of arbitrarily selecting two electrodes adjacent to each other, the electrodes constituting the first detection unit and the second detection unit, respectively, should be selected from perpendicular to each other. Therefore, when the electrodes 20b and 20d are selected as the first detector, the electrodes 30a and 30b may be selected as the second detector. On the other hand, the electrodes 20c and 20d may be selected, and the electrodes 20d may be arranged so as to share the first and second detectors.

The signals output from the planar electrodes 22 and 32 can be fed back to the oscillator circuit 44. The feedback signal is amplified by the oscillator circuit 44, and the phase is adjusted to become an excitation signal. These excitation signals are applied to the electrodes 20a, 20b, 20c, and 20d and the electrodes 30a, 30b, 30c, and 30d. According to the above, as shown in FIGS. 5A and 5B, the diaphragms 14 and 24 vibrate in opposite directions in the buckling oscillation mode, with each diaphragm 14 and 24 vibrating to create the maximum amplitude at the center. It should be noted that the dashed line N in FIG. 5A indicates the vibration node.

At the same time, as shown in FIGS. 6A and 6B, the secondary bending vibration is also excited, and as described above, the secondary bending vibration and the buckling vibration are degenerate so that the detection sensitivity of the vibrating gyroscope is maximized. degenerate). It should be noted that other secondary flexural vibrations perpendicular to the secondary flexural vibration mode shown in FIG. 6A were also excited. The buckling vibration mode and the secondary bending vibration mode can be degenerate by optimizing the plate thickness, area (external size) and internal size of the space. Naturally, if the two vibration modes are similar to each other, that is, if the difference between the resonance frequencies of the two vibration modes is within 1% of the resonance frequency, a sufficiently high sensitivity can be obtained.

The vibration causes the same vibration state in the portions of the piezoelectric substrates 16 and 18 in which the electrodes 20a, 20b, 20c and 20d are formed and the signals output from the electrodes 20a, 20b, 20c and 20d are the same. Therefore, no signal is output from the differential circuit 54. This proves that no angular velocity is applied to the vibrating gyroscope 10.

In the vibration state, when rotation occurs around an axis that is parallel to the diaphragms 14 and 24 and extends between the electrodes 20b and 20d constituting the first detector, the rotation occurs in a direction perpendicular to the vibration direction when not rotating. The Coriolis force is generated because of the angular velocity, thus causing the diaphragms 14 and 24 to differ in the vibration mode as shown in FIG. 7A. Because of the Coriolis force, the maximum vibration positions of the diaphragms 14 and 24 deviate from the central portion. At the same time, the secondary bending vibration mode, which was symmetric about the center, is affected, and the degeneracy of the buckling vibration and the secondary bending vibration is solved. This causes a difference between the piezoelectric substrates 16 and 18, thus causing the electrodes 20b and 20d to output different signals.

Since the displacement in the vibration state of the piezoelectric substrates 16 and 18 corresponds to the magnitude of the Coriolis force, the change in the signal output from the electrodes 20b and 20d corresponds to the Coriolis force.

As shown by the dotted lines in FIG. 7B, the displacement becomes small when the buckling vibration and the secondary bending vibration are not degenerate or close to each other. In contrast, as shown in M of FIG. 7B, when the buckling vibration and the secondary refractive vibration are degenerate or close to each other, the displacement becomes large, and the vibration in the signal output from the electrodes 20b and 20d also becomes large, thus increasing the detection sensitivity. .

The difference between the signals is output from the differential circuit 46. Since the signals output from the electrodes 20b and 20d correspond to the Coriolis force, a large level signal corresponding to the deformation, or Coriolis force, can be obtained in the differential circuit 46. Each signal output from the differential circuit 46 is detected in synchronization with the signal output from the oscillation circuit 44. Accordingly, only one of the positive side and the negative side of the output signal is detected, or only the signal in which the positive and negative portions are inverted is detected. The detected signal is smoothed in the smoothing circuit 50 and amplified in the direct current amplifier circuit 52. Since the signal output from the differential circuit 46 has a level corresponding to the Coriolis force, the signal output from the DC amplifier circuit 52 also corresponds to the Coriolis force. In this case, the frequency of the angular velocity can be detected according to the level of the signal output from the DC amplifier circuit 52. Further, when the direction of the angular velocity applied to the vibrating gyroscope 10 is reversed, the polarity of the signal detected by the synchronous detection circuit 48 is also reversed. Therefore, the polarity of the signal output from the DC amplifier circuit 52 is also reversed. The polarity of the signal output from the DC amplifier 52 serves to detect the direction of the angular velocity.

As shown in FIG. 7A, the Coriolis force affects the direction opposite the diaphragm 14, which then displaces the vibration of the diaphragm 24. However, since the oscillation state changes on two sides of the axis extending between the electrodes 30b and 30d, the signals output from the electrodes 30c and 30d also change. Therefore, no signal is output to the differential circuit 54.

When the oscillating gyroscope 10 rotates with an axial attention parallel to the diaphragms 14 and 24 and extending between the electrodes 30c and 30d, similar to the vibration state described with reference to FIGS. 5A, 5B, 6A, 6B and 6C, the piezoelectric The vibrations of the substrates 26 and 28 change in response to Coriolis forces on two sides of the axis. This causes a difference between the signals output at the electrodes 30c and 30d, thus causing the differential circuit 54 to detect the signals output at the differential circuit 54. The signal is then smoothed in the smoothing circuit 58 and then amplified in the direct current amplification circuit 60, thereby making it possible to detect the angular velocity around the axis center extending between the electrodes 30c and 30d. At this time, the piezoelectric substrates 16 and 18 are displaced in the same manner as above because they are in the portion where the electrodes 20b and 20d of the diaphragm 14 are formed. Therefore, no signal is detected in the differential circuit 46.

In this way, as the signal output from the DC amplifier circuit 52 is measured, the angular velocity about the axis extending between the electrodes 20b and 20d can be detected. In addition, as the signal output from the DC amplifier 60 is measured, the angular velocity about the axis extending between the electrodes 30a, 30b, 30c and 30d can be detected. According to the arrangement in which the first detection portion composed of the electrodes 20b and 20d is perpendicular to the second detection portion composed of the electrodes 30c and 30d, the angular velocity about two axes perpendicular to each other can be detected. In addition, even with one oscillation circuit 44, vibration can be caused to excite the diaphragms 14 and 24. Compared with the conventional method, each using two excitation circuits, the method enables cost reduction.

As shown in FIG. 8, each of the diaphragms 14 and 24 may be in the shape of a circular disk. In this case, the intermediate member 12 is formed in a ring shape. Further, the electrodes 20a, 20b, 20c and 20d on the diaphragm 14 side and the electrodes 30a, 30b, 30c and 30d on the diaphragm 24 side are arched. In this case, the electrodes around the electrodes 20a, 20b, 20c and 20d and the electrodes around the electrodes 30a, 30b, 30c and 30d do not play a role in the operation of the vibrating gyroscope 10 and can be removed. The vibratory gyroscope described above can also detect the angular velocity by using the circuit shown in FIG. 4 when the two axes are perpendicular to each other.

As shown in FIG. 9, the intermediate member 12 need not be formed of a frame-shaped material having a through hole in the middle portion, and may be formed at each of four vertices of the diaphragms 14 and 24. Thus, all of them are essentially desired to be in the spaces formed corresponding to the electrodes 20a, 20b, 20c and 20d and the electrodes 30a, 30b, 30c and 30d used for the input and / or output of the signal. Therefore, the shape of the intermediate member 12 forming the space portion can be changed as necessary.

Also, as shown in FIG. 10. Each of the electrodes constituting the excitation element and the detection element may be divided into two electrodes. The electrodes 62a and 62b are formed on the diaphragm 14 side, and the electrodes 64a and 64b are formed on the diaphragm 24 side and are disposed perpendicular to each other. In such a case, using the circuit shown in FIG. 10 can excite the intermediate member 12 and enable detection of a signal corresponding to the angular velocity with respect to each axis perpendicular to each other. In the arrangement of the electrodes described above, as in other cases, the electrodes 62a and 62b and the electrodes 64a and 64b can be formed at positions corresponding to the space portions in which the intermediate member 12 is not present.

In the diaphragm, for example, a metal plate may be used instead of the piezoelectric substrate. In such a case, as the excitation and detection elements, piezoelectric elements each having electrodes on two surfaces of the piezoelectric layer may be used. At this time, the piezoelectric elements may be disposed similarly to the electrodes 20a, 20b, 20c and 20d and the electrodes 30a, 30b, 30c and 30d shown in FIG. 1 or the electrodes 62a and 62b and the electrodes 64a and 64b shown in FIG. Of course, the piezoelectric element need not be formed at a position corresponding to the peripheral electrode around the electrode. In this case, the intermediate member 12 may be formed of the same metal material as used for the diaphragms 14 and 24. The intermediate member 12 thus formed is connected to the oscillation circuit 44, thereby enabling the electrode on one side of each piezoelectric element to connect with the oscillation circuit 44. FIG.

In the foregoing, although a preferred embodiment of the present invention has been described, various modifications are envisioned to carry out the principles described above within the scope of the following claims. Therefore, the scope of the present invention is not limited above.

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibrating gyroscope capable of detecting angular velocities around two axes using one vibrating gyroscope, and excites the vibrating gyroscope with one oscillating circuit. It can be used to detect vibrations in devices such as cameras.

Claims (10)

Having two flat diaphragms arranged to face each other, The two diaphragms vibrate in a buckling vibration mode, and in a second bending vibration mode degenerate or proximate to the buckling vibration mode, A vibratory gyroscope that detects Coriolis forces by detecting displacement in the amplitude balance of the secondary bending vibration mode, which occurs when a rotational angular velocity is applied around an axis parallel to the surface of the diaphragm. The oscilloscope gyroscope of claim 1, further comprising: a vibrating gyroscope; An intermediate member formed between the two diaphragms to form a space between the two diaphragms, and A plurality of excitation and detection elements formed on the diaphragm for vibrating the diaphragm and outputting a signal generated by the vibration of the diaphragm, Wherein the first detector comprises a junction of two neighboring excitations and a detection element, the second detector comprises another junction of two other neighboring excitations and a detection element, the first detector and the second detector being mutually A vibratory gyroscope, characterized in that it is arranged to be vertical. The vibration gyroscope according to claim 2, wherein the excitation and detection elements are formed at positions opposite to the space portion, and are not opposed to the intermediate member. 3. A vibratory gyroscope according to claim 2, wherein each excitation and detection element comprises a piezoelectric substrate having an electrode divided therein crosswise. 3. A vibratory gyroscope according to claim 2, wherein each excitation and detection element comprises a piezoelectric substrate having four electrodes thereon. 3. The vibratory gyroscope according to claim 2, wherein each of the diaphragms is formed of a metal plate, and the excitation and detection elements include four piezoelectric electrodes divided crosswise over each of the metal plates. 3. The vibratory gyroscope according to claim 2, wherein the intermediate member is formed of a frame member having a through hole in a central portion thereof. 3. The vibratory gyroscope according to claim 2, wherein the intermediate member is formed of multiple members disposed on multiple ends of the diaphragm. 8. A vibratory gyroscope according to claim 7, wherein the individual excitation and detection elements are formed at positions opposite to the through holes. The vibration gyroscope according to claim 2, further comprising a circuit for applying an oscillation signal to the vibration and excitation element and a circuit for detecting a detection signal from the first and second detectors for vibrating the diaphragm. .