JP3287201B2 - Vibrating gyro - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a two-axis detection type vibrating gyroscope capable of detecting a rotational angular velocity about one axis and a rotational angular velocity about another axis that is not parallel to the axis. In particular, for example, the present invention relates to a two-axis detection type vibration gyro used for detecting a camera shake or the like of a video camera.

[0002]

2. Description of the Related Art Conventionally, in order to detect camera shake of a video camera, as shown in FIG. 12 , an X-axis and an X-axis in a plane parallel to a main surface of a CCD element 2 facing a lens 1 of the video camera. The two vibrating gyroscopes 3 and 4 are arranged along the Y-axis orthogonal to. Then, one of the vibrating gyroscopes 3 detects a rotational angular velocity about the X axis, and the other vibrating gyroscope 4 detects a rotational angular velocity about the Y axis, thereby detecting a camera shake of the video camera.

[0003]

However, in the prior art shown in FIG. 12 , since two vibrating gyroscopes are separately arranged, mounting and positioning are complicated. Also,
Not only are the circuit components of each vibrating gyroscope required separately, but also a large mounting area is required.

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to solve the above-mentioned problems, and it is possible to detect the rotational angular velocities around two axes that are small in mounting area and are not parallel to each other. The purpose is to provide a vibrating gyro.

[0005]

In order to achieve the above object, a vibrating gyroscope according to the present invention comprises a first vibrating body formed by laminating two piezoelectric substrates polarized in opposite thickness directions. A second vibrating body formed by laminating two piezoelectric substrates polarized in the thickness direction opposite to each other in the same shape as the first vibrating body, and a second vibrating body parallel to one main surface of the first vibrating body. At least two established
One electrode, at least one electrode provided on the other main surface of the first vibrator, at least one electrode provided on one main surface of the second vibrator, and at least two electrodes of the first vibrator Interposed between at least two electrodes arranged side by side on the other main surface of the second vibrator and the other main surface of the first vibrator and one main surface of the second vibrator so as not to be parallel to And,
Together to include an attachment member which is joined to a part or the whole of the vicinity of edge portion of one main surface of the part or whole and the second vibrator near the edge of the other main surface of the first vibrator
A plurality of divided first and second vibrating bodies.
Characterized by comprising a vibrating reed .

An electrode provided on one main surface of the first vibrator and an electrode provided on the other main surface of the second vibrator, an electrode provided on the other main surface of the first vibrator, and an electrode provided on the other main surface of the first vibrator. A driving means for applying a driving signal between the electrodes provided on one main surface of the second vibrating body and at least two of the electrodes provided on one main surface of the first vibrating body. Including first detection means for detecting a signal and second detection means for detecting a signal generated between at least two of the electrodes provided on the other main surface of the second vibrating body It is characterized by the following.

A driving means for applying a driving signal between an electrode provided on one main surface of the first vibrating body or the second vibrating body and an electrode provided on the other main surface; A first detecting means for detecting a signal generated between at least two of the electrodes provided on one main surface of the first vibrating body; and a first detecting means for detecting a signal generated on the other main surface of the second vibrating body. A second signal for detecting a signal generated between at least two electrodes;
And detecting means.

Further, in addition to the above-mentioned features, the first vibrating body and the second vibrating body are composed of a plurality of divided vibrating pieces, of which the vibrating piece provided with an electrode used for detection is:
It is characterized by being formed in a columnar shape having the same length in the thickness direction and the length in the width direction.

[0009]

That is, the vibrating gyroscope of the present invention has a first
An electrode provided on one main surface of the first vibrator and an electrode provided on the other main surface of the second vibrator, and an electrode provided on the other main surface of the first vibrator and one main surface of the second vibrator When a drive signal is applied between the first vibrating body and the second vibrating body, the vicinity of the edge joined to the mounting substrate is set as a node portion, and the first vibrating body and the second vibrating body are arranged in opposite thickness directions. Vibrate at the same frequency. In this state, if the vibrating gyroscope rotates around an axis parallel to the detection electrode provided on one main surface of the first vibrating body, the vibration direction of the first vibrating body changes due to Coriolis force, A signal corresponding to the rotational angular velocity is generated between detection electrodes provided on one main surface of the first vibrator. This signal is detected by the first detection means. When the vibrating gyroscope rotates about an axis parallel to the detection electrode provided on the other main surface of the second vibrating body, the direction of vibration of the second vibrating body changes due to Coriolis force, and A signal corresponding to the rotational angular velocity is generated between detection electrodes provided on the other main surface of the vibrator. And
This signal is detected by the second detection means.

Also, when a drive signal is applied between the electrode provided on one main surface of the first vibrating body or the second vibrating body and the electrode provided on the other main surface, one of the vibrating bodies is And vibrates in the thickness direction with the vicinity of the edge joined to the mounting board as a node portion. Then, this vibration propagates to the other vibrating body via the mounting member to cause the other vibrating body to resonate, and the other vibrating body vibrates in the thickness direction opposite to that of the one vibrating body. In this state, if the vibrating gyroscope rotates about an axis parallel to the detection electrode provided on one main surface of one vibrating body, the vibration direction of one vibrating body changes due to Coriolis force, and A signal corresponding to the rotational angular velocity is generated between detection electrodes provided on one main surface of the vibrator. Then, this signal is detected by the first detecting means. If the vibrating gyroscope rotates about an axis parallel to the detection electrode provided on the other main surface of the other vibrating body, the vibration direction of the other vibrating body changes due to Coriolis force, and the other vibrating body A signal corresponding to the rotational angular velocity is generated between the detection electrodes provided on the other main surface. And this signal is
Is detected by the detecting means.

[0012]

According to the vibrating gyroscope of the present invention, the rotation angular velocity about the axis of the first vibrating body can be known from the output signal of the first detecting means. Then, from the output signal of the second detecting means, it is possible to know the rotational angular velocity about the axis of the second vibrating body that is not parallel to the axis of the first vibrating body. In addition, since the first vibrating body and the second vibrating body vibrate at the same frequency, they do not interfere with each other, and the rotational angular velocities of the first vibrating body and the second vibrating body around the central axis can be accurately determined. Can be detected. Further, since the portions of the first vibrating body and the second vibrating body on which the detection electrodes are formed are formed in a columnar shape having the same length in the thickness direction and the same length in the width direction, vibration in the thickness direction ( The frequencies of the vertical vibration mode) and the vibration in the width direction (lateral vibration mode) can be made the same, and the detection efficiency of the rotational angular velocity can be increased.

According to the vibrating gyroscope of the present invention,
Compared to the conventional technology in which two vibrating gyroscopes are arranged separately,
Since two vibrators can be driven by one driving unit, the number of circuit components can be reduced. In addition, since the two vibrators are laminated via the mounting member, the mounting area can be reduced. Also, since the two vibrators, the mounting member, the driving means, and the two detecting means are integrated, mounting and positioning can be easily performed.

[0014]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of a vibrating gyroscope according to the present invention will be described below with reference to the drawings. FIG. 1 is a perspective view showing a main part of a first embodiment of the present invention, and FIG. 2 is an exploded perspective view thereof. The vibrating gyroscope 10 includes a first vibrating body 20, a second vibrating body 30, and a mounting member 40.

The first vibrating body 20 is composed of two substantially square piezoelectric substrates 21 polarized in opposite thickness directions.
And 23 are laminated. An electrode 25 is formed on one main surface of the first vibrating body 20, and an electrode 27 is formed on the other main surface. The piezoelectric substrates 21 and 2
Between the three, a dummy electrode may be formed.

The second vibrating body 30, like the first vibrating body 20, is formed by laminating two substantially square piezoelectric substrates 31 and 33 polarized in opposite thickness directions. An electrode 35 is provided on one main surface of the second vibrating body 30.
Is formed, and an electrode 37 is formed on the other main surface. Note that a dummy electrode may be formed between the piezoelectric substrates 31 and 33.

Further, the mounting member 40 includes the first vibrating body 2
It is made of a metal plate formed in the same substantially square shape as the 0 and the second vibrating bodies 30, and has a circular hole 41 in the center thereof. The mounting member 40 is arranged between the other main surface of the first vibrating body 20 and one main surface of the second vibrating body 30. Then, the other main surface of the first vibrating body 20 and one main surface of the mounting member 40 are joined near each other by a conductive adhesive or the like near the edges thereof, and the one main surface of the second vibrating body 30 and the mounting The other main surfaces of the members 40 are similarly joined near their edges. The shape of the attachment member in the present invention is not particularly limited as long as it can be joined to a part or all of the vicinity of the edges of the first vibrator and the second vibrator.

The first vibrating body 20 has a center axis X
Are formed into three substantially column-shaped vibrating pieces 20a, 20b, and 20c. Here, the central axis of the resonator element 20b sandwiched between the two grooves is
So as to coincide with the central axis X of the first vibrating body 20, and
As shown in FIG. 3, the length h in the thickness direction is equal to the length w in the width direction. And the vibrating bar 2
The electrode 25 on the one main surface side of Ob is divided into two by forming a groove in the center in the width direction. Thus, on one main surface of the first vibrating body 20, the electrode 25a is provided on the vibrating piece 20a, and the electrodes 25b and 25c are provided on the vibrating piece 20b.
However, an electrode 25d is formed on the resonator element 20c. In addition, the other main surface of the first vibrating body 20 has electrodes 2
7a, the electrode 27b is formed on the resonator element 20b, and the electrode 27c is formed on the resonator element 20c.

Similarly, the second vibrating body 30 is also formed with two grooves parallel to the central axis Y orthogonal to the central axis X of the first vibrating body 20, so that three substantially columnar three Vibrating piece 30
a, 30b, and 30c. Also in this case, the central axis of the vibrating piece 30b sandwiched between the two grooves is the second vibrating body 30
Are formed so as to coincide with the central axis Y of the first and second portions, and have the same length in the thickness direction and the length in the width direction. The electrode on the other main surface side of the resonator element 30b is divided into two by forming a groove in the center in the width direction.
Thus, on one main surface of the second vibrating body 30, the electrode 35a is provided on the vibrating piece 30a, the electrode 35b is provided on the vibrating piece 30b, and
The electrode 35c is formed on the resonator element 30c. The other main surface of the second vibrating body 30 has an electrode 37a on the vibrating piece 30a and an electrode on the vibrating piece 30b so as not to be parallel to the electrodes 25a to 25d on the one main surface side of the first vibrating body 20. 37b and 37c, the electrode 37d is formed on the resonator element 30c.

In the first vibrating body 20, the piezoelectric substrates 21 and 23 are polarized in opposite thickness directions.
For example, driving of a sine wave signal or the like is performed between the electrodes 25a to 25d formed on one main surface of the first vibrating body 20 and the electrodes 27a to 27c formed on the other main surface of the first vibrating body 20. When a signal is applied, the piezoelectric substrates 21 and 23 vibrate in opposite directions. In this case, one piezoelectric substrate 2
When 1 extends in a direction parallel to its main surface, the other piezoelectric substrate 23 contracts in a direction parallel to its main surface.
Conversely, when one piezoelectric substrate 21 is contracted in a direction parallel to its main surface, the other piezoelectric substrate 23 extends in a direction parallel to its main surface. Therefore, the first vibrating body 2
0 indicates that the edge joined to the mounting member 40 is a node portion, and the central portion is raised as shown in FIG. 4A, or the central portion is dented as shown in FIG. 4B. It vibrates by rubbing.

Similarly, also in the second vibrating body 30, since the piezoelectric substrates 31 and 33 are polarized in the thickness directions opposite to each other, the electrodes 35a to 35a formed on one main surface of the second vibrating body 20 are formed. If a drive signal is applied between 35c and the electrodes 37a to 37d formed on the other main surface of the second vibrating body 20, the piezoelectric substrates 31 and 33 vibrate in opposite directions. In this case, when one piezoelectric substrate 31 extends in a direction parallel to the main surface, the other piezoelectric substrate 33 contracts in a direction parallel to the main surface. Conversely, when one piezoelectric substrate 31 is contracted in a direction parallel to its main surface, the other piezoelectric substrate 33 extends in a direction parallel to its main surface. Therefore, similarly to the first vibrating body 20, the second vibrating body 30 has an edge portion joined to the mounting member 40 as a node portion, and its central portion rises,
Vibrates with dents.

As shown in FIGS. 5 (a) and 5 (b), the first vibrating body 20 and the second vibrating body 30 are supplied with an oscillation signal as shown in FIGS. One output terminal of the circuit 50 is connected to an electrode on one main surface side of the first vibrating body 20 and an electrode on the other main surface side of the second vibrating body 30, that is, the electrodes 25a to 25d and the electrode 37.
a to 37d, respectively. Further, the other output terminal of the oscillation circuit 50 is connected to the electrode on the other main surface side of the first vibrating body 20 and the electrode on the one main surface side of the second vibrating body 30, that is, the electrodes 27a to 27c and the electrode 35a. To 35c via a mounting member 40.

A non-inverting input terminal and an inverting input terminal of a first differential amplifier circuit (not shown) as first detecting means are connected to the electrodes 25b and 25c of the first vibrating body 20, respectively. Is done. Further, the electrode 3 of the second vibrating body 30
A non-inverting input terminal and an inverting input terminal of a second differential amplifier circuit (not shown) as second detecting means are connected to 7b and 37c, respectively.

In such a vibrating gyroscope 10, the first vibrating body 20 and the second vibrating body 30 are arranged as shown in FIG.
As shown in (b), they vibrate in the opposite directions at the same frequency. Here, since the hole 41 is formed in the mounting member 40, the mounting member 40 is
Does not hinder the vibration of the vibrating body 30.

In this state, when the vibrating gyroscope 10 rotates about the central axis X of the first vibrating body 20, the Coriolis force is parallel to both principal surfaces of the first vibrating body 20 and the central axis. It works in the direction perpendicular to X. Therefore, the first vibrating body 20
Is changed, and a signal corresponding to the rotational angular velocity is generated between the electrodes 25b and 25c of the vibrating piece 20b. Then, a signal generated between the electrodes 25b and 25c is detected by the first differential amplifier circuit.

The vibrating gyroscope 10 has a central axis Y of a second vibrating body 30 orthogonal to a central axis X of the first vibrating body 20.
, The Coriolis force acts in a direction parallel to both main surfaces of the second vibrating body 30 and orthogonal to the central axis Y. Therefore, the vibration direction of the second vibrating body 30 changes,
A signal corresponding to the rotational angular velocity is generated between the electrodes 37b and 37c of the resonator element 30b. Then, a signal generated between the electrodes 37b and 37c is detected by the second differential amplifier circuit.

Therefore, in this vibration gyro 10,
From the output signals of the first differential amplifier circuit and the second differential amplifier circuit, it is possible to know the rotational angular velocity about the center axes X and Y orthogonal to each other.

Further, since the first vibrating body 20 and the second vibrating body 30 vibrate at the same frequency, the respective rotational angular velocities can be accurately detected without interfering with each other.

Further, the vibrating piece 20b of the first vibrating body 20 and the second vibrating body 30 used for detecting the rotational angular velocity are used.
Are divided so that the length in the thickness direction and the length in the width direction are equal, so that vibration in the thickness direction (vertical vibration mode) and vibration in the width direction (horizontal vibration mode) are performed. ) Can be the same frequency,
The detection efficiency of the rotational angular velocity can be increased.

Further, in this vibrating gyroscope 10, the first vibrating body 20 and the second vibrating body 30 can be driven by one oscillation circuit 50 as compared with the prior art in which two vibrating gyroscopes are separately arranged. The number of circuit components can be reduced. In addition, the first vibrating body 20 and the second vibrating body 3
0, since the mounting members 40 are stacked, the mounting area can be reduced. Since the vibrating gyroscope 10 has an integral structure, attachment and positioning can be easily performed.

Further, in the vibrating gyroscope 10, since the vibrating body portion is formed by laminating the first vibrating body 20, the second vibrating body 30, and the mounting member 40, these can be easily manufactured and mass production is good. .

For example, in order to manufacture a vibrating body portion including the first vibrating body 20, the second vibrating body 30, and the mounting member 40 of the vibrating gyroscope 10, as shown in FIG. Two piezoelectric substrates 22 and 22
Are bonded with an adhesive. In this case, two piezoelectric substrates 2
Electrodes 26 are formed on both main surfaces 2 and 22, respectively. Similarly, two piezoelectric substrates 32 and 32 polarized in opposite thickness directions are bonded with an adhesive. In this case, electrodes 36 are also formed on both main surfaces of the two piezoelectric substrates 32 and 32, respectively. Further, a metal plate 42 is prepared. In this case, the metal plate 42 is provided with a plurality of circular holes 43 that are opened on both main surfaces thereof in parallel in the vertical and horizontal directions. Adhesive is applied.

Then, as shown in FIG. 7, the two piezoelectric substrates 22 and 22 and the two piezoelectric substrates 32 and 32 are joined via a metal plate 42, and the portion indicated by a dashed line A is formed. Each element 11 is formed by cutting.

Then, as shown in FIG.
Are cut at the portion indicated by the dashed line B, and the two piezoelectric substrates 32 of each element 11 are cut.
And 32 are cut at the portion indicated by the dashed line C.

Then, as shown in FIG.
The electrode 26 of each element 11 is cut at a portion indicated by a dashed-dotted line E, and the electrode 36 of each element 11 is cut at a portion indicated by a dashed-dotted line E. Thereby, the vibrating body portion of the vibrating gyroscope 10 can be mass-produced.

FIG. 10 is an explanatory view showing a second embodiment of the vibrating gyroscope according to the present invention. Note that the first
The same parts as those of the embodiment are denoted by the same reference numerals and the description thereof will be omitted. The vibrating gyroscope 100 of the second embodiment differs from the vibrating gyroscope 100 only in that the oscillation circuit 50 is connected to only one vibrating body.
This is different from the vibration gyro 10 of the first embodiment. That is, one output terminal of the oscillation circuit 50 is connected to the electrodes 25a to 25d on one main surface side of the first vibrating body 20, respectively. Further, the other output terminal of the oscillation circuit 50 is connected to the electrodes 27 a to 27 c on the other main surface side of the first vibrating body 20 via the mounting member 40. The oscillation circuit 50 may be connected to the second vibrating body 30.

In such a vibrating gyroscope 100, the first
When a drive signal is applied between the electrodes 25a to 25d of the vibrating body 20 and the electrodes 27a to 27c, the first vibrating body 20 vibrates. This vibration is transmitted to the second
And vibrates the second vibrating body 30. In this case, the second vibrating body 30 is
Vibrates in the opposite direction and at the same frequency.

In this state, the vibration gyro 100 is
Is rotated about the central axis X of the vibrating body 20, the Coriolis force acts in a direction parallel to both main surfaces of the first vibrating body 20 and orthogonal to the central axis X. Therefore, the first vibrating body 2
The vibration direction of 0 changes, and a signal corresponding to the rotational angular velocity is generated between the electrodes 25b and 25c of the vibrating piece 20b.
The signal generated between the electrodes 25b and 25c is
It is detected by the first differential amplifier circuit.

When the vibrating gyroscope 100 rotates about the center axis Y of the second vibrating body 30 orthogonal to the center axis X of the first vibrating body 20, Coriolis force is reduced. 30 works in a direction parallel to both main surfaces and perpendicular to the central axis Y. Therefore, the vibration direction of the second vibrating body 30 changes, and a signal corresponding to the rotational angular velocity is generated between the electrodes 37b and 37c of the vibrating piece 30b. And the electrode 37b
And 37c are detected by the second differential amplifier circuit.

Therefore, even in the vibration gyro 100, it is possible to know the rotational angular velocity about the center axes X and Y orthogonal to each other from the output signals of the first differential amplifier circuit and the second differential amplifier circuit. it can.

Further, since the first vibrating body 20 and the second vibrating body 30 vibrate at the same frequency, the respective rotational angular velocities can be accurately detected without interference with each other.

Further, the vibrating piece 20b of the first vibrating body 20 and the second vibrating body 30 used for detecting the rotational angular velocity are used.
Are divided so that the length h in the thickness direction and the length w in the width direction are equal, so that the vibration in the thickness direction (vertical vibration mode) and the vibration in the width direction (horizontal vibration) Of the vibration mode) can be the same, and the detection efficiency of the rotational angular velocity can be increased.

Also, the vibrating gyroscope 100 is one in comparison with the prior art in which two vibrating gyroscopes are separately arranged.
Since the first oscillator 20 and the second oscillator 30 can be driven by one oscillator circuit 50, the number of circuit components can be reduced. In addition, the first vibrating body 20 and the second vibrating body 3
0, since the mounting members 40 are stacked, the mounting area can be reduced. Since the vibrating gyroscope 100 has an integral structure, mounting and positioning can be easily performed.

Further, also in the vibrating gyroscope 100, the vibrating body portion is formed by laminating the first vibrating body 20, the second vibrating body 30, and the mounting member 40, so that they can be easily manufactured.
Good mass productivity.

Next, FIG. 11 is a perspective view showing a main part of a third embodiment of the vibrating gyroscope according to the present invention. Parts that are the same as or correspond to those in the first embodiment described above are given the same reference numerals, and descriptions thereof are omitted. The vibrating gyroscope 200 of the third embodiment includes a first vibrating body 20 and a second vibrating gyroscope.
Of the vibrating gyro 10 of the first embodiment is divided into five vibrating pieces, and the electrodes of all the vibrating pieces are each divided into two pieces and connected to the differential amplifier circuit. different. That is, the first vibrating body 20 is divided into five substantially columnar vibrating pieces 20a to 20e by forming four grooves parallel to the central axis X thereof. Here, the vibrating reed 20c is formed so that the central axis thereof coincides with the central axis X of the first vibrating body 20, and the vibrating reeds 20a to 20e have a thickness direction length and a width direction length. Each is formed to be equal. The electrodes on one main surface side of the vibrating bars 20a to 20e are each divided into two by forming a groove in the center in the width direction. As a result, the electrodes 25a and 25b are attached to the vibrating piece 20a on one main surface of the first vibrating body 20.
However, electrodes 25c and 25d are formed on vibrating piece 20b, electrodes 25e and 25f are formed on vibrating piece 20c, electrodes 25g and 25h are formed on vibrating piece 20d, and electrodes 25i and 25j are formed on vibrating piece 20e. On the other main surface of the first vibrating body 20, an electrode 27a is provided on the vibrating piece 20a.
The electrode 27b is formed on the vibrating piece 20c, the electrode 27c is formed on the vibrating piece 20d, and the electrode 27e is formed on the vibrating piece 20e.

Similarly, the second vibrating body 30 is also provided with four grooves parallel to the central axis Y orthogonal to the central axis X of the first vibrating body 20, thereby forming five substantially columnar vibrating pieces. It is divided into 30a to 30e. Here, the vibrating reed 30c is formed so that the central axis thereof coincides with the central axis Y of the second vibrating body 30, and the vibrating reeds 30a to 30e have a thickness direction length and a width direction length. Each is formed to be equal. The electrode on one main surface side of the vibrating bars 30a to 30e is divided into two by forming a groove in the center in the width direction. Thereby, the second
One main surface of the vibrating body 30 is provided with an electrode 35 on the vibrating piece 30a.
a, an electrode 35b on the vibrating reed 30b, an electrode 35c on the vibrating reed 30c, an electrode 35d on the vibrating reed 30d,
An electrode 35e is formed on e. The second vibrating body 30
On the other main surface of the first vibrating body 20, the electrodes 37a and 37b are provided on the vibrating piece 30a so as not to be parallel to the electrodes 25a to 25j on the one main surface side of the first vibrating body 20, and the electrodes 37c are provided on the vibrating piece 30b.
And 37d are provided with electrodes 37e and 37
f, electrodes 37g and 37h are formed on the resonator element 30d, and electrodes 37i and 37j are formed on the resonator element 30e.

The first vibrating body 20 and the second vibrating body 30 have one output terminal of the oscillation circuit 50 connected to the electrodes 25 a to 25 j of the first vibrating body 20 and the second vibrating body 2.
0 electrodes 37a to 37j, respectively. Further, the other output terminal of the oscillation circuit 50 is connected to the first vibrating body 2.
The electrodes 27a to 27e of the zero vibrator and the electrodes 35a to 35e of the second vibrating body 20 are connected via a mounting member 40.

The electrodes 25a, 2 of the first vibrating body 20
Non-inverting input terminals of the first differential amplifier circuit are connected to 5c, 25e, 25g, and 25i, respectively. And the first
Electrodes 25b, 25d, 25f, 25h of the vibrating body 20 of FIG.
25j is connected to an inverting input terminal of the first differential amplifier circuit. Furthermore, the electrode 37 of the second vibrating body 30
The non-inverting input terminals of the second differential amplifier circuit are connected to a, 37c, 37e, 37g, and 37i, respectively. Then, the electrodes 37b, 37d, 37f of the second vibrating body 30,
37h and 37j are connected to the inverting input terminals of the second differential amplifier circuit, respectively.

Even in such a vibrating gyroscope 200, the first
Vibrating body 20 and second vibrating body 30 vibrate in the opposite directions at the same frequency.

In this state, the vibration gyro 200 is
Is rotated about the central axis X of the vibrating body 20, the Coriolis force acts in a direction parallel to both main surfaces of the first vibrating body 20 and orthogonal to the central axis X. Therefore, the first vibrating body 2
The vibration direction of 0 changes, and the electrodes 25a, 25c, 25e,
25g, 25i and electrodes 25b, 25d, 25f, 2
A signal corresponding to the angular velocity is generated between 5h and 25j. Then, a signal generated between them is detected by the first differential amplifier circuit.

When the vibrating gyroscope 200 rotates about the center axis Y of the second vibrating body 30 orthogonal to the center axis X of the first vibrating body 20, the Coriolis force is reduced. 30 works in a direction parallel to both main surfaces and perpendicular to the central axis Y. Therefore, the vibration direction of the second vibrating body 30 changes, and a signal corresponding to the rotational angular velocity is generated between the electrodes 37a, 37c, 37e, 37g, 37i and the electrodes 37b, 37d, 37f, 37h, 37j. Then, a signal generated between them is detected by the second differential amplifier circuit.

Therefore, also in the vibrating gyroscope 200, it is possible to detect the rotational angular velocity about the center axes X and Y orthogonal to each other by the output signals of the first differential amplifier circuit and the second differential amplifier circuit. it can.

Further, since the first vibrating body 20 and the second vibrating body 30 vibrate at the same frequency, the respective rotational angular velocities can be accurately detected without interference with each other.

Further, the vibrating bars 20a to 20e of the first vibrating body 20 and the vibrating bars 30a to 30e of the second vibrating body 30, which are used for detecting the rotational angular velocity, have a length in the thickness direction and a length in the width direction, respectively. Are divided so as to be equal, the frequency of vibration in the thickness direction (vertical vibration mode) and the frequency of vibration in the width direction (horizontal vibration mode) can be made the same, and the detection efficiency of the rotational angular velocity can be increased. be able to.

Further, the vibrating gyroscope 1 of the first embodiment
Since the number of vibrating reeds used for detecting the rotational angular velocity is larger than that of zero, the rotational angular velocity detection sensitivity can be higher than that of the vibrating gyroscope 10 of the first embodiment.

The vibrating gyroscope 200 also has one advantage compared to the prior art in which two vibrating gyroscopes are separately arranged.
Since the first oscillator 20 and the second oscillator 30 can be driven by one oscillator circuit 50, the number of circuit components can be reduced. In addition, the first vibrating body 20 and the second vibrating body 3
0, since the mounting members 40 are stacked, the mounting area can be reduced. Since the vibrating gyroscope 200 has an integral structure, mounting and positioning can be easily performed.

Further, also in the vibrating gyroscope 200, since the vibrating body portion is formed by laminating the first vibrating body 20, the second vibrating body 30, and the mounting member 40, the manufacturing thereof is easy.
Good mass productivity.

In the vibrating gyroscope 200 of the third embodiment, the first vibrating body 20 and the second vibrating body 30
Are divided into five vibrating bars, respectively, but in the vibrating gyroscope according to the present invention, the number of vibrating bars to be divided may be any number, and the electrodes of all the vibrating bars are necessarily divided into two and detected. It need not be connected to the means.

Further, in the vibrating gyroscope 200 of the third embodiment described above, the first vibrating body 20 and the second vibrating body 30
Although the oscillation circuit 50 is connected to both of them, even if the oscillation circuit 50 is connected to only one of the vibrators, the first vibrator 20 and the second vibrator 30 vibrate, and the same effect can be obtained. it can.

[0060]

[0061]

[0062]

[0063]

[0064]

[0065]

[0066]

[0067]

[0068]

[0069]

[0070]

[0071]

[Brief description of the drawings]

FIG. 1 is a perspective view showing a main part of a vibrating gyroscope according to a first embodiment of the present invention.

FIG. 2 is an exploded perspective view showing the vibrating gyroscope of FIG.

FIG. 3 is a front view showing a resonator element used for detecting the vibration gyro of FIG. 1;

FIG. 4 is an explanatory diagram showing a vibration state of a vibrating body of the vibrating gyroscope of FIG. 1;

FIG. 5 is an explanatory view showing a vibration state of a vibrating body of the vibrating gyroscope of FIG. 1;

FIG. 6 is a perspective view showing a process of manufacturing a vibrating body portion of the vibrating gyroscope of FIG. 1;

FIG. 7 is a perspective view showing a manufacturing process of a vibrating body portion of the vibrating gyroscope of FIG. 1;

FIG. 8 is a perspective view showing a manufacturing process of a vibrating body portion of the vibrating gyroscope of FIG.

FIG. 9 is a perspective view showing a manufacturing process of a vibrating body portion of the vibrating gyroscope of FIG. 1;

FIG. 10 is an explanatory view showing a vibrating gyroscope according to a second embodiment of the present invention.

FIG. 11 is a perspective view showing a main part of a vibrating gyroscope according to a third embodiment of the present invention.

FIG. 12 is an explanatory diagram showing a conventional technique.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 ... Vibrating gyroscope 20 ... 1st vibrating body 20a-20c ... Vibrating piece 21, 23 ... Piezoelectric substrate 25 (25a-25d) ... Electrode 27 (27a-27c) ... Electrode 30 ... 2nd vibrating body 30a-30c ... Vibrating pieces 31, 33 Piezoelectric substrate 35 (35a to 35d) Electrode 37 (37a to 37c) Electrode 40 Mounting member

Claims (4)

(57) [Claims] A first vibrating body formed by laminating two piezoelectric substrates polarized in mutually opposite thickness directions; and a first vibrating body having the same shape as the first vibrating body and being polarized in mutually opposite thickness directions. A second vibrating body formed by laminating the two piezoelectric substrates thus formed;
At least two electrodes arranged in parallel on one main surface of the vibrating body, and at least one electrode provided on the other main surface of the first vibrating body.
One electrode, at least one electrode provided on one principal surface of the second vibrating body, and at least two electrodes of the first vibrating body.
At least two electrodes arranged side by side on the other main surface of the second vibrating body so as not to be parallel to the two electrodes, and the other main surface of the first vibrating body and the one main surface of the second vibrating body. The first vibrating body is joined to a part or all near the edge on the other main surface of the first vibrating body and a part or all near the edge on the one main surface of the second vibrating body. An attachment member, and the first vibrating body and the front
The vibrating gyroscope wherein the second vibrating body comprises a plurality of divided vibrating reeds. 2. An electrode provided on one main surface of the first vibrator and an electrode provided on the other main surface of the second vibrator, and an electrode provided on the other main surface of the first vibrator. Driving means for applying a drive signal between the first vibrating body and an electrode provided on one main surface of the second vibrating body; and at least two electrodes among electrodes provided on one main surface of the first vibrating body. The first for detecting a signal generated between
And a second means for detecting a signal generated between at least two of the electrodes provided on the other main surface of the second vibrating body.
2. The vibrating gyroscope according to claim 1, further comprising: detecting means. 3. A driving unit for applying a driving signal between an electrode provided on one main surface of the first vibrating body or the second vibrating body and an electrode provided on the other main surface, A first vibrator for detecting a signal generated between at least two of the electrodes provided on one main surface of the first vibrating body;
And a second means for detecting a signal generated between at least two of the electrodes provided on the other main surface of the second vibrating body.
2. The vibrating gyroscope according to claim 1, further comprising: detecting means. 4. The first vibrating body and the second vibrating body are composed of a plurality of divided vibrating pieces, of which the vibrating piece provided with an electrode used for detection has a length and a width in a thickness direction. The vibrating gyroscope according to any one of claims 1 to 3, wherein the vibrating gyroscope is formed in a column shape having the same length in the direction.