JPH07332984A - Vibration gyro - Google Patents

Abstract

PURPOSE:To more accurately detect each rotary angular speed with the center axis of two mutually non-parallel vibrators as a center by joining a first vibrator to a second vibrator near each node part. CONSTITUTION:A first vibrator 2 and a second vibrator 3 are joined each other by welding or using an adhesive, etc., so that the ridges cross at the ridge part between piezoelectric elements 4a and 4b near each one node point. Then, by matching the resonance frequency of the vibrator 2 to that of the vibrator 3, the vibration of the vibrators 2 and 3 leaking to the outside from the joint part of the vibrators 2 and 3 can be canceled by each interference. Therefore, the vibrators 2 and 3 can suppress the vibration leakage to the outside and the rotary angular velocity with the center axes of the vibrators 2 and 3 as the center can be detected more accurately.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibration gyro,
In particular, it is possible to detect a rotational angular velocity about one axis and a rotational angular velocity about another axis that is not parallel to that axis, and is used for detecting, for example, a video camera or camera shake. Vibration gyro.

[0002]

2. Description of the Related Art Some conventional video cameras have a function of detecting camera shake and correcting it. Among them, in order to detect camera shake, as shown in FIG. 3, the X axis in the plane parallel to the main surface of the CCD element 32 facing the lens 31 of the video camera and the Y axis orthogonal to the X axis are centered. Two vibrating gyros 33 and 34 are used to detect the respective rotational angular velocities. In this case, the two vibrating gyros 33 and 34 are arranged such that their central axes are parallel to the X axis and the Y axis, respectively. Then, one vibration gyro 33 detects the rotational angular velocity about the X axis, and the other vibration gyro 34 detects the rotational angular velocity about the Y axis.

[0003]

However, in the conventional vibrating gyros 33 and 34 as described above, vibration is leaked to the outside from the portion supporting the vibrating gyros 33 and 34, and a signal for detecting the rotational angular velocity is output. It weakens, and the sensitivity characteristic that should be obtained originally cannot be obtained. Therefore, in this conventional technique, the image stabilization function of the video camera may malfunction.

Further, as shown in FIG. 3, since the two vibrating gyros 33 and 34 are separately arranged, the positioning is complicated, and the circuit parts of the respective vibrating gyros are separately required. The mounting area becomes large.

Therefore, a main object of the present invention is to provide a vibrating gyro having a small mounting area and capable of detecting respective rotational angular velocities about the central axes of two non-parallel vibrating bodies. It is to be.

[0006]

In order to achieve the above-mentioned object, the present invention provides a columnar first vibrating body and a columnar body whose central axis is not parallel to the central axis of the first vibrating body. And a second vibrating body, wherein the first vibrating body and the second vibrating body are joined to each other in the vicinity of their node points.

Further, a columnar first vibrating body, a columnar second vibrating body whose central axis is not parallel to the central axis of the first vibrating body, the first vibrating body and the second vibrating body. And a support member fixed near each of two node points of the vibrating body, wherein the support member is integrally molded.

[0008]

According to the above construction, when the first vibrating body is rotated about the central axis, the Coriolis force changes the vibrating direction of the first vibrating body, and a signal corresponding to the rotational angular velocity is generated. To do. When the second vibrating body rotates about the central axis, the Coriolis force changes the vibrating direction of the second vibrating body, and a signal corresponding to the angular velocity of rotation is generated. Furthermore, by joining the first vibrating body and the second vibrating body directly in the vicinity of the node point or through the support member, the vibrations leaking from there to interfere with each other,
Can be offset.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of a vibrating gyroscope according to the present invention will be described below with reference to the drawings. As shown in FIG. 1, the vibrating gyro 1 includes, for example, a first vibrating body 2 and a second vibrating body 3 each having a substantially equilateral triangular prism shape. First vibrating body 2 and second
The vibrating body 3 is formed of a constant elastic metal material such as Elinba or 42Ni alloy, or a material that generally causes mechanical vibration such as quartz, glass, crystal, or ceramic. Piezoelectric elements 4a, 4b and 4c are formed on the three side surfaces of the first vibrating body 2 and the second vibrating body 3, respectively.

The piezoelectric element 4a is a piezoelectric layer 5 made of porcelain or the like.
Electrodes 6a and 7a are formed on both surfaces of the piezoelectric layer 5a including a. Then, the one electrode 6a is connected to the first vibrating body 2
And is bonded to the side surface of the second vibrating body 3. Similarly, the piezoelectric elements 4b and 4c include piezoelectric layers 5b and 5c, respectively, and electrodes 6b and 7b are formed on both surfaces of the piezoelectric layer 5b.
Electrodes 6c and 7c are formed on both surfaces of the piezoelectric layer 5c. Then, one electrode 6b of these piezoelectric elements 4b, 4c,
6c is bonded to the side surfaces of the first vibrating body 2 and the second vibrating body 3.

These first vibrating body 2 and second vibrating body 3
Are piezoelectric elements 4a, 4a near one of the node points, respectively.
At the ridge line portion between b, they are joined to each other by welding, adhesive, soldering, or the like so that these ridge lines are orthogonal to each other. Then, substantially U-shaped support members 8 and 9 are attached to the ridge portions near the two node points of the first vibrating body 2. The supporting members 8 and 9 are formed of, for example, a metal wire or the like, and are fixed to the first vibrating body 2 by welding, adhesive, soldering, or the like, and the ends thereof are attached to a supporting substrate (not shown) or the like. It is attached. Further, a supporting member 10 having the same shape as the supporting members 8 and 9 is attached to a ridge line portion near the other node point of the second vibrating body 3 which is not joined to the first vibrating body 2, and the end thereof is attached. The part is attached to a support substrate (not shown) or the like.

The first vibrating body 2 and the second vibrating body 3 have piezoelectric elements 4a and 4b and a piezoelectric element 4c, respectively.
An oscillating circuit (not shown) is connected between and. This oscillation circuit causes the first vibrating body 2 and the second vibrating body 3 to flexurally vibrate in a direction orthogonal to the surface on which the piezoelectric element 4c is formed. In this state, when rotating about the central axis of the first vibrating body 2, the direction of bending vibration changes due to the Coriolis force. As a result, a difference occurs in the output signals of the piezoelectric elements 4a and 4b, and if the difference in the output voltage between the piezoelectric elements 4a and 4b is measured, the rotational angular velocity about the central axis of the first vibrating body 2 is detected. be able to. Further, when the second vibrating body 3 is rotated about the central axis, the direction of the bending vibration is similarly changed by the Coriolis force. Thereby, the piezoelectric element 4
A difference occurs in the output signals of a and 4b, and the rotational angular velocity about the central axis of the second vibrating body 3 can be detected by measuring the difference in the output voltage between the piezoelectric elements 4a and 4b.

Further, in this vibrating gyro 1, the resonance frequency of the first vibrating body 2 and the resonance frequency of the second vibrating body 3 are made to coincide with each other, whereby the first vibrating body 2 and the second vibrating body 3 are made.
The first vibrating body 2 and the second vibrating body 2 which leak to the outside from the joint portion of
The vibrations of the vibrating body 3 can be canceled by interfering with each other. Therefore, the first vibrating body 2 and the second vibrating body 3 can suppress the vibration leakage to the outside, and the rotational angular velocity about the central axes of the first vibrating body 2 and the second vibrating body 3 can be further improved. Can be accurately detected.

Further, in this vibrating gyro 1, since the first vibrating body 2 and the second vibrating body 3 are joined to each other, the two vibrating gyros are separated as in the prior art shown in FIG. Since it is not necessary to position it at the same time, the mounting area can be reduced by sharing the circuit components.

Next, a second embodiment of the vibrating gyroscope according to the present invention will be described with reference to FIG. Here, parts that are the same as or equivalent to those in the first embodiment described above are assigned the same reference numerals and explanations thereof are omitted.

As shown in FIG. 2, the vibrating gyro 21 includes:
Etching the first vibrating body 2 and the second vibrating body 3,
Alternatively, it has the support member 22 integrally molded into a substantially square frame shape by press molding or the like. And the support member 2
2 is provided with a ridge line portion between the piezoelectric elements 4a and 4b near the two node points of the first vibrating body 2 on the one main surface side, and near two node points of the second vibrating body 3 on the other main surface side. The ridge line portion between the piezoelectric elements 4a and 4b is attached. in this case,
The first vibrating body 2 and the second vibrating body 3 are attached near the centers of the two sides of the support member 22 that face each other so that their ridge lines are orthogonal to each other. Further, the support member 22 is
Feet 23 extending horizontally from a pair of two sides facing each other are provided, and are attached to a support substrate (not shown) by bending them perpendicularly to the main surface of the support member 22.

When such a vibrating gyroscope 21 rotates about the central axis of the first vibrating body 2, the direction of the flexural vibration changes due to the Coriolis force. As a result, a difference occurs in the output signals of the piezoelectric elements 4a and 4b, and the piezoelectric elements 4a and 4b
By measuring the difference in the output voltage between b, the rotational angular velocity about the central axis of the first vibrating body 2 can be detected.
Further, when the second vibrating body 3 is rotated about the central axis, the direction of the bending vibration is similarly changed by the Coriolis force. As a result, a difference occurs in the output signals of the piezoelectric elements 4a and 4b, and if the difference in the output voltage between the piezoelectric elements 4a and 4b is measured, the rotational angular velocity about the central axis of the second vibrating body 3 is detected. be able to.

Further, in this vibrating gyro 21, the resonance frequency of the first vibrating body 2 and the resonance frequency of the second vibrating body 3 are made to coincide with each other, so that the first vibrating body 2 and the second vibrating body 2 leaking from the support member 22 to the outside. The vibrations of the second vibrating body 3 can be canceled by interfering with each other on the support member 22.
Therefore, the first vibrating body 2 and the second vibrating body 3 can suppress the vibration leakage from the support member 22 to the outside, and center the center axes of the first vibrating body 2 and the second vibrating body 3. The rotational angular velocity can be detected more accurately.

Further, in this vibrating gyro 21, the first
Since the vibrating body 2 and the second vibrating body 3 are joined to each other, it is not necessary to separately position the two vibrating gyros as in the conventional technique shown in FIG. The mounting area also becomes smaller.

Although the vibrating bodies 2 and 3 each having a substantially equilateral triangular prism shape are used in the above-described embodiments, the vibrating bodies 2 and 3 may have any other prismatic shape such as a quadrangular prism shape or a cylindrical shape. May be. Further, although the second embodiment has been described using the support member 22 having a substantially square frame shape, the shape may be another polygonal frame shape or a circular frame shape.

[0021]

As described above, according to the vibrating gyroscope of the present invention, the resonance frequency of the first vibrating body and the second vibrating body
By making the resonance frequencies of the vibrating bodies coincide with each other, the first vibrating body and the second vibrating body interfere with each other the vibrations leaking from the portion fixed to the support member to the outside, and as a result, the leakage of the vibrations is suppressed. As a result, it is possible to obtain good characteristics in terms of sensitivity. Further, since the first vibrating body and the second vibrating body are joined to each other, it is not necessary to separately position the two vibrating gyros as in the conventional case, and the mounting area can be increased by sharing the circuit components. It will be smaller and will help to make the set smaller.

[Brief description of drawings]

FIG. 1A is a perspective view showing a vibrating gyroscope according to a first embodiment of the present invention, and FIG. 1B is a front view thereof.

2A is a perspective view showing a vibrating gyroscope according to a second embodiment of the present invention, and FIG. 2B is a front view thereof.

FIG. 3 is an illustrative view showing a conventional vibrating gyro.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Vibration gyro 2 1st vibrating body 3 2nd vibrating body 22 Support member

Claims (2)

[Claims] 1. A columnar first vibrating body and the central axis of which is the first vibrating body.
A columnar second vibrating body that is non-parallel to the central axis of the vibrating body of
A vibrating gyroscope including: the first vibrating body and the second vibrating body, which are bonded to each other in the vicinity of node points. 2. A columnar first vibrating body, and the central axis is the first vibrating body.
A columnar second vibrating body that is non-parallel to the central axis of the vibrating body of
A vibrating gyroscope, comprising: a support member fixed near two node points of each of the first vibrating body and the second vibrating body; and integrally molding the support members.