JPH0989569A - Vibrating gyro - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vibrating gyro of new constitution which is detectable of rotating angular velocity stably without being influenced by a holding part of a vibrator and suppressing the change of vibration detecting sensitivity. SOLUTION: In a vibrating gyro provided with a vibrating plate 1 shaped in rotation symmetry, the vibrating plate 1 is provided with an even number of opening parts 2 (four or more) disposed in rotation symmetry with respect to a center point O of the vibrating plate 1, and outer frame parts 3 to be vibrating parts, and inner frame parts 4 for holding the respective vibrating parts from the center point O are respectively formed. A driving electrode 5 for driving the vibrating part is formed at each outer frame part 3, a detecting electrode 6 for detecting torsional vibration is formed between the outer frame parts 3, and an earthing electrode 7 making a pair with the detecting electrode 6 is formed at the back face of the inner frame part 4.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibration gyro used for detecting a rotational angular velocity of an object to control a posture of a navigation system for moving bodies and various devices during movement.

[0002]

2. Description of the Related Art High-precision rotational angular velocity sensors are required for navigation systems and inertial navigation devices for moving bodies such as automobiles, airplanes, and ships, as well as for direction detection and attitude control of automated guided vehicles and mobile robots. Therefore, various vibration gyros and integral gyros have been proposed so far. As a typical example of such a vibration gyro,
There are tuning fork type and tuning piece type.

In a tuning fork type vibration gyro, when a tuning fork branch is vibrated and rotated about an axis in the length direction of the branch, a Coriolis force exerts a motion perpendicular to the vibrating surface of the tuning fork to cause torsional vibration in the entire tuning fork. Therefore, the rotational angular velocity is detected by electrostatically or piezoelectrically detecting the twisted vibration. Various efforts have been made to detect this twisting vibration.

In such a tuning fork type vibration gyro, holding the tuning fork has been a problem. This is because the vibration of the tuning fork branch causes vibration in the length direction of the branch and is added to the holding part of the tuning fork, and the twisting vibration when the entire tuning fork is twisted is also added to the holding part. It was devised so that the holding was made elastic and did not hinder vibration.

On the other hand, in the sound piece type vibration gyro, an elastic member is attached to and held at the node of flexural vibration of the sound piece, but the sound piece makes a rasping motion as the sound piece rotates about its longitudinal axis. Since the generated vibrations are generated in the holding portion, holding the tuning piece becomes a problem as in the tuning fork type, and various measures have been taken.

In addition to such a vibrating gyro, there is known a method called an integral gyro, which vibrates a wine glass-like cylindrical portion to detect the turning state of a resonance mode piezoelectrically. This method has an advantage in that it is relatively unaffected by the holding of the vibrating body because it does not cause any special vibration due to rotation, although it is accompanied by slight vibration in the axial direction.

[0007]

However, the tuning fork type vibration gyro has a problem that if the tuning fork is elastically held, variations in holding and variations in sensitivity of vibration detection due to temperature characteristics cannot be avoided. In particular, when trying to downsize the vibration gyro itself and its component parts such as the tuning fork and the holding part, this effect becomes noticeable, and it becomes necessary to fix it to a table with a large weight to trap the vibration energy. There was a point.

When a plurality of vibrating gyros are used together, the vibrating gyros may interfere with each other due to vibration leakage, and the interference with the acoustic circuits placed around them may not be neglected. There was also a problem that there was.

This situation is exactly the same for the tuning-bar vibrating gyro, and the vibration generated in the holding portion due to the above-mentioned rubbing movement leaks to the outside of the vibrating gyro, causing the same problem as the tuning-fork type. It was

Further, in the integral gyro, there is a problem that it is difficult to reduce the size because the shape of the vibrating body is relatively large, and the vibrating body is required to have high machining accuracy, and it is difficult to assemble and adjust. . Therefore, it has not been widely put into practical use even now.

The present invention was newly created by the present inventor to solve the above problems, and its purpose is to detect the rotational angular velocity stably without being affected by the holding portion of the vibrating body. Another object of the present invention is to provide a vibration gyro having a novel structure that can suppress the change in vibration detection sensitivity.

Another object of the present invention is to provide a vibration gyro which is small in size, has a small number of parts, is easy to assemble and adjust, and is inexpensive.

[0013]

A vibrating gyroscope according to the present invention has 2 + 2n (n is a natural number) openings which are rotationally symmetrical with respect to the center point of the vibrating plate. To form the 2 + 2n outer frame portions to be the vibrating portions and the inner frame portion that holds each vibrating portion from the center point, and to form the outer main portion of the outer frame portion from the one main surface of the outer frame portion to the other main portion of the adjacent outer frame portion. A drive electrode for driving the vibrating portion over the surface, a detection electrode for detecting strain vibration on one main surface between the outer frame portions, and a ground electrode paired with the detection electrode on the other main surface of the inner frame portion are formed. It is characterized by having done.

Further, in the vibrating gyroscope of the present invention, in the above structure, the signal applying portion of the drive electrode and the signal output portion of the detecting electrode are extended to the vicinity of the center point on one main surface of each inner frame portion. It is characterized by being present.

Further, the vibrating gyroscope of the present invention is characterized in that, in each of the above-mentioned configurations, the ground electrode is formed as a common electrode on the other main surface of the inner frame portion.

Further, in the vibrating gyroscope of the present invention, in each of the above-mentioned constitutions, the disc-shaped vibrating plate has 2 + 2n (n is a natural number).
The fan-shaped openings are arranged rotationally symmetrically with respect to the center point of the diaphragm to form an arcuate outer frame portion and a radial inner frame portion.

[0017]

BEST MODE FOR CARRYING OUT THE INVENTION The vibrating gyroscope of the present invention is 2 + 2.
Vibration of a vibration plate of n (n is a natural number), that is, an even number of 4 or more openings arranged rotationally symmetrically with respect to the center point (for example, a circle, square, regular hexagon, regular octagon, etc.) When used as a body, the outer frame formed between the outer periphery of the diaphragm and the opening is used as a vibrating section that vibrates toward the center point of rotational symmetry, and when the diaphragm rotates around the center point of rotational symmetry. In addition, the change in the rotational angular velocity around the center point of the diaphragm is detected by detecting the strain vibration generated in each vibration part in the direction perpendicular to the vibration with the detection electrode formed between the outer frame parts.

According to such a vibrating gyroscope of the present invention, since the vibrating body is composed of a vibrating plate having a rotationally symmetrical shape, the volume occupied by the vibrating body is reduced and the vibrating plate is held at the center point of the rotationally symmetrical position. However, it does not require a special structure such as elastic holding.

Therefore, the vibration gyro can be housed in a container smaller than the conventional vibration gyro having another structure, and a small vibration gyro is obtained.

In addition, each vibrating section alternately vibrates toward the center of rotation in the adjacent vibrating section and vibrates in the opposite direction, and since such an even number of vibrating sections are arranged in rotational symmetry, rotational symmetry is achieved. Since the force acting due to those vibrations is canceled at the center point of, the center of gravity of the diaphragm does not move due to the vibration of each vibrating part, and it is possible to maintain a stable vibration state with a simple holding structure at the center point. Become.

The vibration gyro of the present invention will be described below with reference to the drawings. The present invention is not limited to the following examples, and various shapes and structures can be adopted without departing from the spirit of the present invention.

1 and 2 are a top view and a bottom view, respectively, showing an example of a diaphragm of a vibrating gyroscope according to the present invention.
Here, an example is shown in which a disc-shaped diaphragm is used as the rotationally symmetrical vibrating body, and four openings are arranged in the rotationally symmetrical manner.

The diaphragm 1 shown in FIGS. 1 and 2 has a disk-shaped piezoelectric substrate which is subjected to a window opening processing method such as sandblasting or etching to make the fan-shaped openings 2 ... The arc-shaped outer frame portion 3 serving as a vibrating portion is provided between the outer periphery of the diaphragm 1 and the openings 2 ...
However, radial inner frame portions 4 that hold the outer frame portions 3 from the center point O are formed between the openings 2. Here, each of the outer frame portions 3 becomes a portion that operates as a vibrating portion when an AC signal is applied by the drive electrode as described later.

Further, from one main surface (upper surface) of each outer frame portion 3 to the other main surface (lower surface) of the adjacent outer frame portion 3 ...
The drive electrodes 5 ... Are formed by a method such as vapor deposition via the end faces. Further, detection electrodes 6 for detecting strain vibrations are provided on the upper surface between the outer frame portions 3 serving as detection portions for strain vibrations generated by the rotation of the diaphragm 1, and those detection electrodes are provided on the lower surface. The ground electrode 7 forming a pair with 6 ... Is similarly formed by a method such as vapor deposition.

On the upper surface of each inner frame portion 5, the signal application portions 8 of the drive electrodes 5 and the signal output portions 9 of the detection electrodes 6 are extended to the vicinity of the center point O. There is. By extending the signal applying section 8 and the signal outputting section 9 in the vicinity of the center point O in this way, it is possible to connect to the drive / detection circuit from a position where there is no vibration, causing vibration damping or disconnecting the connecting line. This is preferable because it does not cause problems such as

In this example, the ground electrode 7 is integrally formed as a common electrode on the lower surface of the inner frame portions 6 ... And the ground connection portion 10 formed near the center point of the inner frame portions 4. It is connected. It is preferable to use the common electrode and the ground connection portion 10 in the vicinity of the center point O of the upper surface in this way because the wiring can be easily connected from the upper surface. Alternatively, an electrode pattern may be formed on the fixed electrode, and the fixed electrode may be attached to the ground connection portion on the lower surface with a conductive paste or solder to omit the wiring on the upper surface.

Further, chromium (Cr), gold (Au) or the like is used as a material for each of the above-mentioned electrodes, and when formed by vapor deposition, a thin-layer stable electrode having excellent adhesion to the substrate can be obtained. It is suitable in that it can be performed.

Next, the principle of operation of the vibrating gyroscope of the present invention in the vibrating plate 1 having the above-described structure will be described with reference to FIGS. 3A and 3B are cross-sectional views showing the vibrating portion and the detecting portion of the diaphragm 1, respectively. FIG. 4 is a top view for explaining the vibration caused by driving the diaphragm 1 and the strain vibration generated as the diaphragm 1 rotates. 5 (a) and 5 (b) are top views showing the vibration caused by driving the diaphragm 1 and the strain vibration caused by the rotation of the diaphragm 1, respectively.

The piezoelectric substrate to be the vibrating plate 1 is a piezoelectric ceramic plate such as PZT or LN or LT having a polarization axis in the thickness direction.
Polarized in the thickness direction with a single crystal material such as
The outer dimension is about 5 to 10 mmφ and the thickness is about 0.1 to 0.2 mm. As shown in FIG. 3A, in the vibrating portion, drive electrodes 5 are formed on the upper surface and the lower surface of the diaphragm 1, respectively. For example, if a voltage of − is applied to the upper surface and + is applied to the lower surface as an AC signal, if they are polarized as shown by the horizontal stripe arrow in the figure, the spread as shown by the white arrow is shown. It causes vibration. This vibration vibrates in the radial direction such that the vibrating portion of the outer frame portions 3 ... goes to the center point O and moves away from the center point O.

Further, as shown in FIG. 3B, the detection electrode 6 is formed on the upper surface of the diaphragm 1 and the ground electrode 7 is formed on the lower surface thereof in the detection portion. When polarization is applied as indicated by the horizontal stripe arrow in the figure, if compressive pressure is applied by strain vibration as indicated by the white arrow, for example, the detection electrode 6 and the ground electrode 7 are separated from each other. Piezoelectricity can be generated between them, and a + piezoelectric signal can be detected from the detection electrode 6.

As shown in FIGS. 1 and 2, drive electrodes 5 are formed on the diaphragm 1 from the upper surface of each outer frame portion 3 to the lower surface of the adjacent outer frame portion 3 via its end face. Therefore, the vibrating portions of the outer frame portions 3 ... Alternately generate vibration that spreads away from the center point and vibration that contracts toward the center point. On the other hand, the strain vibration generated by the rotation of the diaphragm 1 is generated in a direction perpendicular to the vibrations, and the compressive force and the tensile force are alternately applied to the detection unit. This is shown in FIG.

In FIG. 4, the mass of the vibrating portion of each outer frame portion of the vibrating body 1 is represented by the shaded portions, and mA and m are alternately shown.
B ... When an AC signal is applied to each drive electrode (not shown) formed on the outer frame part to vibrate the vibrating part, when mA vibrates in the direction of a solid arrow FA as shown in the figure, mB is a solid line. It is driven so as to vibrate in the direction of arrow FB.

Here, when the rotation R is applied to the vibrating body 1 about the center point O, distortion vibration due to Coriolis vibration proportional to the magnitude of change in the angular velocity ω is generated, and each mA · mB
, FA and fB are indicated by broken line arrows, respectively.
Vibrations in the tangential direction at right angles to A and FB are generated in the same direction but in opposite directions.

As a result, fA is detected in the detection section between the outer frame sections.
Since a compressive force is applied at a position where fB and fB face each other and a tensile force is applied at a position where fA and fB are separated from each other, piezoelectric force corresponding to their magnitude is generated. Therefore, the piezoelectric force is detected by the detection electrodes 6 ... This makes it possible to detect a change in the angular velocity ω of the vibrating body 1 due to the rotation R.

Piezoelectricity which can be detected by the above-mentioned detection electrodes 6 becomes an electric signal of opposite polarity between the detecting portion which receives the compressive force and the detecting portion which receives the tensile force, so if they are detected and differentially amplified. , The change in the angular velocity ω can be detected with high sensitivity.

Further, as described above, drive vibrations FA.FB which are symmetrical with respect to the center point O are generated in each mA.mAB, and the number of the even number MAA.mB is 4 or more. , As shown by the broken line in FIG.
Is deformed symmetrically with respect to the center point O, the vibration force acting on the center point O is canceled, and the center point O does not move at all.

Further, as described above, the strain vibrations fA and fB generated in the respective mA and mB by the rotation R are alternately generated in the tangential direction in the opposite directions and have the same magnitude.
・ Because the even number of mb is 4 or more,
As indicated by solid arrows fA 'and fB' in (b), the forces due to strain vibration act in opposite directions with equal magnitude, and the compressive force and the tensile force in each detecting portion are balanced and, as a whole, Since it is canceled, the vibration force acting on the center point O is also canceled, and the center point O does not move at all.

Therefore, the vibrating plate 1 of the vibrating gyroscope according to the present invention.
When held at the center point O, the holding portion is not affected by drive vibration or strain vibration due to rotation, and the rotational angular velocity ω can be detected stably. On the contrary, if the vibrating body 1 is held at the center point O, even if there is some variation in holding or fixing, the driving vibration and the detection vibration (distortion vibration due to rotation) are not affected, and the vibration detection can be performed. Since the change in sensitivity can be suppressed, a special holding structure is unnecessary.

In the above example, a disk-shaped piezoelectric substrate is used as the vibrating body 1. However, since the vibrating body 1 may be a flat plate having a rotationally symmetrical shape, it may be a tuning fork type or a tuning piece type. Compared with such conventional diaphragms, the occupying volume of the vibrating body in the vibrating gyro is smaller, and its holding structure does not require a special structure such as elastic holding, so it can be stored in a small container and is small and stable. It becomes a vibrating gyro.

To adjust the balance of the driving vibration of the diaphragm 1 and the detection sensitivity of the change of the angular velocity ω in the vibrating gyroscope of the present invention, an AC signal for driving is applied to the driving electrodes 5 of each outer frame 3. While the resonance frequency f of the vibrating portion of each outer frame portion 3 ...
Confirm 0, add or remove mass of the vibrating part as necessary, and adjust the resonance frequency f0 of each vibrating part.

FIG. 6 shows an example of a vibrating gyroscope using the vibrating plate 1 as described above. FIG. 6 is an external perspective view showing a configuration example of the vibration gyro of the present invention. In the figure, reference numeral 1 is a diaphragm, and electrodes and the like formed on the main surface thereof are not shown. 11 is a storage container such as a ceramic package,
In addition to the bottomed rectangular parallelepiped having an opening on the upper side as shown in the figure, various shapes such as a cylindrical shape can be used depending on the installation location of the vibration gyro. Also,
It may be installed on the stem and can-sealed.

Electrodes 12 for connecting to an external circuit are provided on the side surface or bottom surface of the storage container 11, through which an AC signal for power input or drive is applied or a detection signal is output. Or ground. Further, by integrally forming the terminals on the outer surface of the storage container 11, it is possible to provide a vibration gyro that is compatible with surface mounting. Reference numeral 13 is an IC for driving the diaphragm 1 and differentially amplifying the detection signal from the detection electrode. Reference numeral 14 denotes wire bonding for connecting the vibration plate 1 and the wire bonding connection pads provided around the holding portion on the inner surface of the storage container 11, and these are connected to the signal applying portion and the signal outputting portion.
It is connected to the ground connection portion to drive the diaphragm 1 and detect a signal associated with a change in the angular velocity ω. Then, a lid (not shown) is placed on the opening 15 of the storage container 11 and sealed by seam welding, an adhesive or the like.

In assembling the vibrating gyroscope of the present invention as described above, first, the central portion of the lower surface of the vibrating plate 1 is adhesively fixed to the convex portion provided on the circuit board or the storage container 11 using an adhesive such as an epoxy resin. Then, the diaphragm 1 is installed in the storage container 11 in which the IC 13 and the like are installed. Next, wires are connected to the signal applying section 8 and the signal outputting section 9 and the ground connecting section 10 by wire bonding 14 or the like. Next, the lid is placed on the opening 15 of the storage container 11 and sealed. The container 11 is sealed in a vacuum in order to prevent changes in the rotation detection sensitivity due to changes over time in the container 11 including the vibrating body 1 and changes in the operating environment.

Next, FIG. 7 is a top view showing an example of a method of adjusting the balance of driving vibration and the detection sensitivity of the change in the angular velocity ω by adding or deleting the mass of the vibrating portion of the vibrating plate 1 in the vibrating gyroscope of the present invention. Indicate.

The diaphragm 1 shown in FIG.
-The same parts as those in FIG. 5 are denoted by the same reference numerals. As shown by the shaded portions 16 ... In the figure, the opening 2 ... side of the connecting portion between the outer frame portion 3 ... and the inner frame portion 4 corresponding to both ends of the vibrating portion is deleted by machining or laser machining. By doing so, the resonance frequency f0 of the vibrating section can be lowered. Similarly, as shown by the shaded portions 17 ..., the opening 2 near the center of the vibrating portion
The resonance frequency f0 of the vibrating portion can be increased by deleting the portion on the ... Side by machining or laser processing. In this way, the resonance frequency f0 and the detection sensitivity of each outer frame portion 3 are adjusted to balance the overall vibration of the diaphragm 1, so that the diaphragm 1 vibrates uniformly as a whole and each speed ω It can be adjusted so that the change detection sensitivity is stable.

In the above example, the shape of the diaphragm 1 is a disk shape, but an example in which a square diaphragm having a rotationally symmetrical shape is used as the vibrator is shown in a top view in FIG.

In the vibration plate 18 shown in FIG. 8, four square openings 19 are arranged rotationally symmetrically with respect to the center point O by subjecting a square piezoelectric substrate to a window forming method such as sandblasting or etching. As a result, between the outer periphery of the diaphragm 18 and the opening 19 ...
Further, thin plate-shaped inner frame portions 21 ... For holding the outer frame portions 20 ... From the center point O are formed between the openings 19. Like the outer frame portions 3 of the diaphragm 1, the outer frame portions 20 ... Also serve as the vibrating portions when an AC signal is applied by the drive electrodes.

Further, from one main surface (upper surface) of each outer frame portion 20 ... To the other main surface (lower surface) of the outer frame portion 20 ...
The drive electrodes 22 ... Are formed via the end face by a method such as vapor deposition. Further, between each outer frame portion 20 serving as a detection portion of strain vibration generated as the diaphragm 18 rotates, detection electrodes 23 for detecting strain vibration are disposed on the upper surface, and detection electrodes 23 are disposed on the lower surface. A ground electrode 24 (not shown) forming a pair with 23 ... Is similarly formed by a method such as vapor deposition.

On the upper surface of each inner frame portion 20, the signal application portions 25 of the drive electrodes 22 and the signal output portions 26 of the detection electrodes 23 are extended to the vicinity of the center point O. There is. Diaphragm
Also in 18 the signal applying section 25 ...
By extending ... in the vicinity of the center point O, it is possible to connect to the drive / detection circuit from a position where there is no vibration, and there is no problem of vibration damping or disconnection of the connection line, which is preferable. .

Also in this example, the ground electrode 24 is integrally formed as a common electrode on the lower surface of the inner frame portions 21 ... And the ground connection portion 27 formed near the center point of the inner frame portions 21. It is connected.

Even in the vibration plate 18 having such a shape, the expanding vibration of the outer frame portions 20 vibrates toward the center point O and away from the center point O, and is effective for such vibration. Will be converted. Then, like the diaphragm 1, when the rotation R around the center point O is applied, the angular velocity ω
Since distortion vibration due to Coriolis vibration that is proportional to the magnitude of the change occurs, and piezoelectricity is generated according to those magnitudes, by detecting the piezoelectricity with the detection electrodes 23,
The change in the angular velocity ω of the vibrating body 18 due to the rotation R can be detected.

[0052]

As described above, according to the present invention, 2 + 2n
A vibrating plate having a rotationally symmetrical shape in which (n is a natural number) openings are arranged rotationally symmetrically with respect to the center point is used as a vibrating body, and the outer frame part of the vibrating plate is used as the vibrating part, and the vibrating plate is the center point. Strain vibration that occurs in each vibrating part when it is rotated around is detected by the detection electrodes between the outer frame parts, so that the rotational angular velocity is stable without being affected by the holding part of the diaphragm. It was possible to provide a vibration gyro that has a novel structure and that can detect the vibration and that suppresses the change in the vibration detection sensitivity.

Further, according to the vibrating gyroscope of the present invention, since the vibrating body is composed of a vibrating plate having a rotationally symmetric shape, the volume occupied by the vibrating body becomes small and the vibrating plate is held at the rotationally symmetrical center point. It is possible to provide a vibration gyro that does not require a special structure such as elastic holding, is small in size, has a small number of parts, is easy to assemble and adjust, and can be manufactured at a low cost.

[Brief description of drawings]

FIG. 1 is a top view showing an example of a vibrating plate of a vibrating gyroscope of the present invention.

FIG. 2 is a bottom view showing an example of the diaphragm of the vibrating gyroscope of the present invention.

3A and 3B are cross-sectional views showing a vibrating portion and a detecting portion of a vibrating plate of a vibrating gyroscope of the present invention, respectively.

FIG. 4 is a top view for explaining the vibration caused by driving the diaphragm of the vibrating gyroscope of the present invention and the strain vibration generated due to the rotation.

5 (a) and 5 (b) are top views showing a vibration caused by driving and rotating a vibration plate of the vibration gyroscope of the present invention, respectively.

FIG. 6 is an external perspective view showing a configuration example of the vibration gyro of the present invention.

FIG. 7 is a top view showing an example of a method for adjusting the balance of drive vibrations and the detection sensitivity of changes in angular velocity ω in the vibration plate of the vibration gyroscope of the present invention.

FIG. 8 is a top view showing another example of the diaphragm of the vibrating gyroscope of the present invention.

[Explanation of symbols]

 1, 18 Vibration plate 2, 19 Opening part 3, 20 Outer frame part 4, 21 Inner frame part 5, 22 Drive electrode 6, 23 Detection electrode 7, 24 Ground electrode 8, 25 Signal application part 9, 26 Signal detection part 10 , 27 Ground connection O Center point

Claims (4)

[Claims] 1. A vibration plate having a rotationally symmetric shape, 2 + 2n
(N is a natural number) openings are arranged rotationally symmetrically with respect to the center point of the vibrating plate, and 2 + 2n outer frame sections serving as vibrating sections and an inner frame section holding each vibrating section from the center point. And a driving electrode for driving the vibrating portion from one main surface of each outer frame portion to the other main surface of the adjacent outer frame portion, and strain vibration is detected on one main surface between the outer frame portions. A vibrating gyroscope characterized in that a detection electrode and a ground electrode paired with the detection electrode are formed on the other main surface of the inner frame portion. 2. The signal application section of the drive electrode and the signal output section of the detection electrode are extended to near the center point on one main surface of each inner frame section. Vibrating gyro. 3. The vibrating gyro according to claim 1, wherein the ground electrode is formed as a common electrode on the other main surface of the inner frame portion. 4. A disk-shaped diaphragm is provided with 2 + 2n (n is a natural number) fan-shaped openings rotationally symmetrical with respect to a center point of the diaphragm, and an arc-shaped outer frame portion and a radial shape are provided. The vibrating gyroscope according to claim 1, further comprising an inner frame portion.