KR20000061491A - device for temperature regulation of nozzle in medicinal fluid sprayer - Google Patents

device for temperature regulation of nozzle in medicinal fluid sprayer Download PDF

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Publication number
KR20000061491A
KR20000061491A KR1019990010554A KR19990010554A KR20000061491A KR 20000061491 A KR20000061491 A KR 20000061491A KR 1019990010554 A KR1019990010554 A KR 1019990010554A KR 19990010554 A KR19990010554 A KR 19990010554A KR 20000061491 A KR20000061491 A KR 20000061491A
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KR
South Korea
Prior art keywords
head
temperature
nozzle
temperature value
power supply
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Application number
KR1019990010554A
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Korean (ko)
Inventor
이상천
Original Assignee
김영환
현대반도체 주식회사
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Priority to KR1019990010554A priority Critical patent/KR20000061491A/en
Publication of KR20000061491A publication Critical patent/KR20000061491A/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/24—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means incorporating means for heating the liquid or other fluent material, e.g. electrically
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B1/00—Details of electric heating devices
    • H05B1/02—Automatic switching arrangements specially adapted to apparatus ; Control of heating devices
    • H05B1/0202—Switches
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B1/00—Details of electric heating devices
    • H05B1/02—Automatic switching arrangements specially adapted to apparatus ; Control of heating devices
    • H05B1/0227—Applications
    • H05B1/023—Industrial applications
    • H05B1/0244—Heating of fluids
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
    • H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
    • H05B3/26—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base
    • H05B3/267—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base the insulating base being an organic material, e.g. plastic

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  • Coating Apparatus (AREA)

Abstract

PURPOSE: A temperature-controlling device of a nozzle for a chemical injector is provided which keeps a fixed temperature not to solidify chemicals around the chemical injector when the chemical injection stops. CONSTITUTION: The temperature-controlling device of the nozzle comprises a temperature sensor(3) to detect a temperature of a head(2) of the nozzle(1), a heater(5) fixed on the outside of the head(2) to heat the head(2) by electric power supplied through a power supply line(4), a controller(6) to selectively control a power supply on/off according to the temperature of the head(2). The heater(5) has a nichrome plate(5a) to get the power supply and generate heat. The controller(6) converts a direct current(D.C.) caused by a difference between the perceived temperature and the set temperature into an alternating current(A.C.) and then switches the power supply on/off according to a width of the A.C. pulse.

Description

약액분사기용 노즐의 온도 조절장치{device for temperature regulation of nozzle in medicinal fluid sprayer}Device for temperature regulation of nozzle in medicinal fluid sprayer

본 발명은 반도체 웨이퍼에 필름을 형성하기 전에 약액을 분사하는데 사용하는 약액분사기에 관련된 것으로서, 더욱 상세하게는 실제로 약액이 분사되는 노즐의 헤드 온도를 항상 일정온도로 유지시켜 주도록 한 약액분사기용 노즐의 온도 조절장치에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a chemical liquid injector used to inject a chemical liquid before forming a film on a semiconductor wafer, and more particularly, to a chemical liquid injector nozzle which maintains the head temperature of a nozzle to which the chemical liquid is actually injected at a constant temperature at all times. It relates to a temperature control device.

일반적으로 약액분사기용 노즐은 첨부된 도 1 내지 도 2와 같이 끝단부가 개방된 상태로 공간부(1a)를 갖는 노즐몸체(1)와, 상기 노즐몸체의 끝단부에 고정되어 실제로 약액이 분사될 수 있도록 복수개의 분사공(2a)을 갖는 헤드(2)로 구성되어 있다.In general, the nozzle for the chemical liquid injector is fixed to the end of the nozzle body (1) and the nozzle body having a space portion (1a) with the open end as shown in Figs. It is comprised by the head 2 which has several injection hole 2a so that it may be carried out.

따라서 약액이 노즐몸체(1) 내의 공간부(1a)로 들어오면, 이 들어온 약액은 상기 노즐몸체(1)의 끝단부에 복수개의 분사공(2a)을 갖는 헤드(2)가 고정되어 있음에 따라 상기 헤드의 각 분사공(2a)을 통해 분사되고, 이 분사된 약액이 웨이퍼에 뭏으면서 막을 형성하게 된다.Therefore, when the chemical liquid enters the space portion 1a of the nozzle body 1, the head of the chemical liquid is fixed to the head 2 having a plurality of injection holes 2a at the end of the nozzle body 1. Therefore, it is injected through each injection hole 2a of the head, and the injected chemical liquid forms a film while floating on the wafer.

그러나 이와같은 일반적인 약액분사기용 노즐은 노즐을 구성하는 헤드의 온도를 항상 일정온도로 유지시켜 주기 위한 별도의 온도 조절장치를 갖추고 있지 않으므로 헤드에 형성된 각 분사공을 통해 약액이 분사되는 상태에서는 상기 약액의 온도에 따라 헤드의 온도도 올라가지만 약액이 분사되다가 정지된 상태에서는 헤드의 온도가 떨어지므로 열적변화에 의해 상기 헤드의 분사공에는 약액이 굳어 피막을 형성하게 되고, 이 경우에는 다음 약액의 분사시 분사공의 직경이 줄어드는 결과를 초래하므로 상기 분사공을 통한 약액의 분사가 전부분에 걸쳐 고르지 못함에 따라 결국 웨이퍼에 약액의 막이 균일하게 형성되지 못하는 문제점이 있음은 물론 상기 분사공에 굳어 있던 피막찌꺼기가 떨어지면서 웨이퍼에 뭏게되므로 결국 웨이퍼 불량이 발생되는 문제점도 있었다.However, since such a conventional chemical spray nozzle does not have a separate temperature control device for maintaining the temperature of the head constituting the nozzle at a constant temperature at all times, the chemical liquid is sprayed through each injection hole formed in the head. The temperature of the head also increases according to the temperature of the head, but in the state where the chemical liquid is injected and the head temperature drops, the chemical liquid hardens in the injection hole of the head to form a film due to the thermal change. In this case, the next chemical liquid is injected. Since the diameter of the injection hole is reduced, the injection of the chemical liquid through the injection hole is uneven throughout, so that the film of the chemical liquid is not uniformly formed on the wafer, as well as was hardened in the injection hole. Wafer defects eventually fall on the wafer, causing wafer defects. There was also a problem.

본 발명은 상기한 문제점을 해결하기 위하여 안출한 것으로서, 분사공이 형성된 약액분사기용 노즐의 헤드 온도를 검출하여 헤드의 분사공을 통한 약액의 분사유무에 관계없이 상기 헤드의 온도를 항상 일정온도로 유지시켜 주도록 별도의 온도 조절방치를 부가함에 따라 약액이 분사공을 통해 분사되다가 정지되더라도 상기 분사공에 굳으면서 피막을 형성하는 일이 없도록 하여 분사공을 통한 약액의 재분사시에도 전부분에 걸쳐 고르게 행하여 지도록 함과 함께 상기 분사공에 굳어 있던 피막찌꺼기가 떨어지면서 웨이퍼에 뭏게되는 일도 발생되지 않도록 하는데 그 목적이 있다.The present invention has been made in order to solve the above problems, by detecting the head temperature of the nozzle for the chemical liquid injector with the injection hole to maintain the temperature of the head at a constant temperature regardless of whether or not the injection of the chemical liquid through the injection hole of the head By adding a separate temperature control device, even if the chemical is injected through the injection hole and stops, it does not form a film while solidifying in the injection hole, so that evenly during the re-injection of the chemical through the injection hole The purpose of the present invention is to prevent the coating dregs that have solidified in the injection hole from falling off and also become loose on the wafer.

상기 목적을 달성하기 위한 본 발명 형태에 따르면, 노즐몸체의 끝단부에 고정된 헤드에 부착되어 상기 헤드의 온도를 검출하는 온도감지부재와, 상기 헤드의 바깥쪽면에 고정되어 전원을 공급받아 발열하면서 헤드를 가열시켜 주는 가열부재와, 상기 온도감지부재에 의해 검출된 헤드의 온도값에 따라 가열부재로 공급되는 전원의 온,오프를 선택적으로 제어하는 제어기로 구성하여서 된 약액분사기용 노즐의 온도 조절장치가 제공된다.According to the present invention for achieving the above object, the temperature sensing member is attached to the head fixed to the end of the nozzle body for detecting the temperature of the head, and fixed to the outer surface of the head while being supplied with power to generate heat Temperature control of the nozzle for chemical liquid injector comprising a heating member for heating the head and a controller for selectively controlling the on / off of power supplied to the heating member according to the temperature value of the head detected by the temperature sensing member. An apparatus is provided.

도 1은 약액분사기용 노즐을 나타낸 요부 종단면도1 is a longitudinal sectional view showing main parts of a nozzle for a chemical liquid injector;

도 2은 약액분사기용 노즐을 나타낸 저면도Figure 2 is a bottom view showing a nozzle for a chemical liquid injector

도 3은 본 발명 장치를 갖는 약액분사기용 노즐을 나타낸 요부 종단면도Fig. 3 is a longitudinal sectional view of principal parts showing the nozzle for a chemical liquid injector having the present invention apparatus.

도 4는 본 발명 장치를 갖는 약액분사기용 노즐을 나타낸 저면도Figure 4 is a bottom view showing a nozzle for a chemical liquid injector having a device of the present invention

도 5는 본 발명 장치의 회로 구성도5 is a circuit diagram of the device of the present invention.

도면의 주요 부분에 대한 부호의 설명Explanation of symbols for the main parts of the drawings

1. 노즐몸체 2. 헤드1. Nozzle body 2. Head

3. 온도감지부재 5. 가열부재3. Temperature sensing member 5. Heating member

5a. 니크롬판 5b. 절연테이프5a. Nichrome plate 5b. Insulation tape

5c. 보호케이스 6. 제어기5c. Protective case 6. Controller

6a. 비교부 6b. 변환부6a. Comparator 6b. Converter

6c. 스위치6c. switch

이하 본 발명을 일 실시예로 도시한 첨부된 도 3 내지 도 5를 참고로 하여 더욱 상세히 설명하면 다음과 같다.Hereinafter, the present invention will be described in more detail with reference to the accompanying drawings.

첨부된 도 3은 본 발명 장치를 갖는 약액분사기용 노즐을 나타낸 요부 종단면도이고, 도 4는 본 발명 장치를 갖는 약액분사기용 노즐을 나타낸 저면도이며, 도 5는 본 발명 장치의 회로 구성도로서, 본 발명은 노즐몸체(1)의 끝단부에 고정된 헤드(2)에 부착되어 상기 헤드의 온도를 감지하는 온도감지부재(3)와, 상기 헤드(2)의 바깥쪽면에 고정되어 전원공급선(4)을 통해 전원을 공급받아 발열하면서 헤드를 가열시켜 주는 가열부재(5)와, 상기 온도감지부재(3)에 의해 감지된 헤드(2)의 온도값에 따라 가열부재(5)로 공급되는 전원의 온,오프를 선택적으로 제어하는 제어기(6)로 구성된다.FIG. 3 is a longitudinal sectional view showing main parts of the nozzle for chemical liquid injector having the apparatus of the present invention, FIG. 4 is a bottom view showing the nozzle for chemical liquid injector having the apparatus of the present invention, and FIG. 5 is a circuit diagram of the apparatus of the present invention. The present invention is attached to the head (2) fixed to the end of the nozzle body (1) is a temperature sensing member (3) for sensing the temperature of the head, and is fixed to the outer surface of the head (2) power supply line (4) is supplied to the heating member (5) according to the temperature value of the heating member (5) for heating the head while the heat is supplied by the power supply and the head (2) detected by the temperature sensing member (3) It consists of a controller 6 for selectively controlling the on and off of the power supply.

상기 가열부재(5)는 헤드(2)의 중심부 및 가장자리부에 일체로 접촉되어 전원을 공급받아 발열하는 니크롬판(5a)와, 상기 니크롬판을 감싸고 있는 절연테이프(5b)와, 상기 절연테이프가 감겨진 니크롬판(5a)을 외부조건으로 부터 보호하는 보호케이스(5c)로 구성되어 있는데, 상기 보호케이스는 복수개의 스크류(7)로서 헤드(2)에 고정된다.The heating member 5 is in contact with the central portion and the edge of the head (2) integrally nichrome plate 5a for generating heat, the insulating tape (5b) surrounding the nichrome plate, and the insulating tape Is composed of a protective case (5c) for protecting the wound nichrome plate (5a) from external conditions, the protective case is fixed to the head (2) as a plurality of screws (7).

또한 제어기(6)는 온도감지부재(3)에 의해 감지된 온도값과 기 입력되어 있는 설정 온도값을 비교하는 비교부(6a)와, 상기 비교부에 의해 비교된 감지 온도값과 설정 온도값의 차이값에 따른 DC전류를 AC전류로 변환하는 변환부(6b)와, 상기 변환부에 의해 변환된 AC전류의 펄스폭에 따라 가열부재(5)로의 전원공급을 온,오프하는 스위치(6c)로 구성된다.In addition, the controller 6 includes a comparator 6a for comparing a temperature value sensed by the temperature sensing member 3 with a preset temperature value, and a sensed temperature value and a set temperature value compared by the comparator. A converter 6b for converting the DC current according to the difference value of the electric current into an AC current, and a switch 6c for turning on and off the power supply to the heating member 5 according to the pulse width of the AC current converted by the converter. It is composed of

이와같이 구성된 본 발명의 작용을 설명하면 다음과 같다.Referring to the operation of the present invention configured as described above is as follows.

노즐몸체(1)에 고정된 헤드(2)의 각 분사공(2a)을 통해 약액이 분사될 때는 물론 분사됨이 중단될 때 상기 헤드(2)에 부착된 온도감지부재(3)가 헤드(2)의 온도를 감지하여 이 감지된 온도값을 제어기(6)를 구성하는 비교부(6a)로 보내주는데, 이때 상기 비교부는 온도감지부재(3)에 의해 감지된 온도값과 기 입력되어 있는 설정 온도값을 비교하여 그 차이값에 따른 DC전류를 변환부(6b)로 보내주고, 상기 변환부는 DC전류를 AC전류로 변환하여 그 변환된 AC전류에 따른 펄스를 발생시킨다.When the chemical liquid is injected through the respective injection holes 2a of the head 2 fixed to the nozzle body 1 as well as when the injection is stopped, the temperature sensing member 3 attached to the head 2 is attached to the head ( 2) senses the temperature and sends the detected temperature value to the comparator 6a constituting the controller 6, wherein the comparator is pre-input with the temperature value detected by the temperature sensing member 3. The set temperature value is compared and the DC current according to the difference value is sent to the converter 6b. The converter converts the DC current into an AC current to generate a pulse according to the converted AC current.

이와같이 하여 변환부(6b)에 의해 변환된 AC전류의 펄스는 그 펄스의 주기는 항상 동일하지만 감지 온도값과 설정 온도값과의 차이값이 크면 클수록 상기 한 주기당 펄스폭도 크므로 상기 펄스폭 만큼 스위치(6c)의 온되는 시간이 길어짐에 따라 상기 스위치의 온시간 동안 전원공급선(4)을 통한 전원공급이 가열부재(5)로 이루어지므로 상기 가열부재의 가열에 따라 헤드(2)의 온도가 일정온도를 유지하게 된다.In this way, the pulse of the AC current converted by the converter 6b is always the same, but the larger the difference between the detected temperature value and the set temperature value is, the larger the pulse width per cycle is. As the on time of the switch 6c becomes longer, the power supply through the power supply line 4 is made of the heating member 5 during the on time of the switch, so that the temperature of the head 2 increases according to the heating of the heating member. Maintain a constant temperature.

즉, 노즐몸체(1)에 고정된 헤드(2)의 각 분사공(2a)을 통해 약액이 분사되지 않을 때에는 상기 헤드(2)의 온도가 크게 떨어지므로 온도감지부재(3)에 의해 감지된 온도값과 기 입력되어 있는 설정 온도값을 제어기(6)를 구성하는 비교부(6a)가 비교할 때의 차이값이 크므로 변환부(6b)에 의해 변환된 AC전류의 펄스폭이 매우 넓어지고, 이에따라 스위치(6c)의 온시간이 그만큼 길어지므로 가열부재(5)에 의한 헤드(2)의 온도가 신속히 일정온도대로 올라가게 되는데, 이 과정에서 상기 헤드의 온도가 일정온도대 까지 근접되면 될수록 온도감지부재(3)에 의해 감지된 온도값과 기 입력되어 있는 설정 온도값의 차이값이 작아지므로 변환부(6b)에 의해 변환된 AC전류의 펄스폭도 그만큼 좁아짐에 따라 상기 스위치(6c)의 온시간도 짧아지다가 헤드(2)의 온도가 완전히 일정온도대에 도달되면 변환부(6b)에 의해 변환된 AC전류의 펄스폭이 0(제로)으로 되므로 스위치(6c)는 완전이 오프되면서 가열부재(5)로의 전원공급이 중단됨에 따라 상기 가열부재에 의한 헤드(2)의 가열이 더이상 행하여 지지 않는다.That is, when the chemical liquid is not injected through each injection hole (2a) of the head (2) fixed to the nozzle body 1, the temperature of the head (2) is greatly reduced, so detected by the temperature sensing member (3) Since the difference value is large when the comparison unit 6a constituting the controller 6 compares the temperature value with the preset set temperature value, the pulse width of the AC current converted by the conversion unit 6b becomes very wide. In this way, since the on time of the switch 6c becomes longer, the temperature of the head 2 by the heating member 5 quickly rises to a predetermined temperature. In this process, the temperature of the head approaches the predetermined temperature zone. Since the difference value between the temperature value sensed by the temperature sensing member 3 and the preset temperature value input is small, the pulse width of the AC current converted by the converter 6b is also narrowed, so that the switch 6c The on time is also shortened and the temperature of the head 2 is completely When the temperature reaches the constant temperature range, the pulse width of the AC current converted by the converter 6b becomes 0 (zero), so that the switch 6c is completely turned off while the power supply to the heating member 5 is stopped. The heating of the head 2 by the member is no longer performed.

이하 본 발명을 구성하는 가열부재(5)가 전원을 공급받아 발열하면서 헤드(2)를 가열시켜 주는 과정을 구체적으로 설명하면 다음과 같다.Hereinafter, a process of heating the head 2 while the heating member 5 constituting the present invention is supplied with power and generates heat will be described in detail.

제어기(6)를 구성하는 스위치(6c)가 온상태일 때 전원공급선(4)을 통한 전원공급은 헤드(2)의 바깥쪽면 중심부 및 가장자리부에 걸쳐 일체화된 상태로 배치된 니크롬판(5a)으로 이루어 지므로 상기 니크롬판의 발열에 의해 헤드(2)가 가열되는데, 상기 니크롬판(5a)은 절연테이프(5b)에 의해 감싸여져 있음은 물론 헤드(2)에 스크류(7)로서 고정되어 있는 보호케이스(5c)에 의해 보호되어 있으므로 외부적인 영향에 의해 쇼트되거나 하는 등의 문제는 없다.When the switch 6c constituting the controller 6 is in an on state, the power supply through the power supply line 4 is integrally disposed over the center and the edge of the outer surface of the head 2, and the nichrome plate 5a is arranged. Since the head 2 is heated by heat of the nichrome plate, the nichrome plate 5a is not only wrapped by the insulating tape 5b but also fixed to the head 2 as a screw 7. Since it is protected by the protective case 5c, there is no problem such as being shorted by an external influence.

그러므로 본 발명은 별도의 온도 조절장치에 의해 노즐을 구성하는 헤드의 온도를 항상 일정온도로 유지시켜 주므로 헤드의 분사공을 통한 약액의 분사가 중단될 때에도 열적변화에 의해 약액이 상기 헤드의 분사공에서 굳어 피막을 형성하게 되는 일이 없음에 따라 분사공의 직경이 줄어드는 일이 없어 이후에 약액의 분사가 행하여 지더라도 상기 분사공을 통한 약액의 분사가 전체적으로 고르게 되어 웨이퍼에 형성된 약액의 막이 전부분 동일한 두께로 형성되는 효과가 있음은 물론 웨이퍼에 형성된 막으로 피막찌꺼기 등이 뭏어 있게되는 일이 없어 웨이퍼 불량율이 그만큼 감소되는 효과가 있다.Therefore, the present invention maintains the temperature of the head constituting the nozzle at a constant temperature at all times by a separate temperature control device, so that the chemical liquid is injected by the thermal change even when the injection of the chemical liquid through the injection hole of the head is stopped. Since the diameter of the injection hole does not decrease as the film is hardened to form a film, the injection of the chemical solution through the injection hole is uniform even when the injection of the chemical liquid is performed. As well as the effect of forming the same thickness, there is no effect that the film dregs, such as the film formed on the wafer is not stuck, the wafer defect rate is reduced by that much.

Claims (3)

노즐몸체의 끝단부에 고정된 헤드에 부착되어 상기 헤드의 온도를 검출하는 온도감지부재와,A temperature sensing member attached to a head fixed to an end of the nozzle body and detecting a temperature of the head; 상기 헤드의 바깥쪽면에 고정되어 전원을 공급받아 발열하면서 헤드를 가열시켜 주는 가열부재와,A heating member fixed to an outer surface of the head to heat the head while generating heat by receiving power; 상기 온도감지부재에 의해 검출된 헤드의 온도값에 따라 가열부재로 공급되는 전원의 온,오프를 선택적으로 제어하는 제어기로 구성하여서 됨을 특징으로 하는 약액분사기용 노즐의 온도 조절장치.And a controller for selectively controlling the on / off of power supplied to the heating member according to the temperature value of the head detected by the temperature sensing member. 제 1 항에 있어서,The method of claim 1, 가열부재는;The heating member is; 헤드의 중심부 및 가장자리부에 걸쳐 일체화된 상태로 배치되어 전원을 공급받아 발열하는 니크롬판과,A nichrome plate disposed in an integrated state across the center and the edge of the head and generating heat by being supplied with power; 상기 니크롬판을 감싸고 있는 절연테이프와,An insulating tape surrounding the nichrome plate, 상기 절연테이프가 감겨진 니크롬판을 외부조건으로 부터 보호하는 보호케이스로 구성된 것을 특징으로 하는 약액분사기용 노즐의 온도 조절장치.The temperature control device of the nozzle for chemical liquid injector, characterized in that consisting of a protective case for protecting the insulating tape wound nichrome plate from external conditions. 제 1 항에 있어서,The method of claim 1, 제어기는;The controller; 온도감지부재에 의해 감지된 온도값과 기 입력되어 있는 설정 온도값을 비교하는 비교부와,A comparison unit for comparing the temperature value detected by the temperature sensing member with a preset temperature value, 상기 비교부에 의해 비교된 감지 온도값과 설정 온도값의 차이값에 따른 DC전류를 AC전류로 변환하는 변환부와,A converter for converting the DC current according to the difference between the sensed temperature value and the set temperature value compared by the comparison unit into an AC current; 상기 변환부에 의해 변환된 AC전류의 펄스폭에 따라 가열부재로의 전원공급을 온,오프하는 스위치로 구성하여서 된 것을 특징으로 하는 약액분사기용 노즐의 온도 조절장치.And a switch for turning on and off the power supply to the heating member in accordance with the pulse width of the AC current converted by the converting unit.
KR1019990010554A 1999-03-26 1999-03-26 device for temperature regulation of nozzle in medicinal fluid sprayer KR20000061491A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100361608B1 (en) * 2000-01-18 2002-11-22 박열웅 Smoke sterilizer
KR20150047207A (en) * 2013-10-24 2015-05-04 세메스 주식회사 Unit for supplying chemical

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100361608B1 (en) * 2000-01-18 2002-11-22 박열웅 Smoke sterilizer
KR20150047207A (en) * 2013-10-24 2015-05-04 세메스 주식회사 Unit for supplying chemical

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