KR20000021091A - Surface treatment unit using plasma having concentration injecting means - Google Patents

Abstract

PURPOSE: A surface treatment unit using plasma having a concentration injecting device is provided to prevent unnecessary polymer to be formed on an electrode other than a specimen and shorten a time taken in synthesizing the polymer. CONSTITUTION: A surface treatment unit comprises: an electrode part having an anode(22)(or active electrode) positively or negatively biased by applying a DC voltage or RF(Radio frequency) pulse voltage and a cathode(24)(or passive electrode) grounded to the ground terminal; a chamber(21); a vacuum pump(26) for providing a vacuum to the chamber; a voltage supplying part(23) for supplying a voltage; and a gas injecting part(9,10) for injecting a reactant gas into the chamber. The gas injecting part locally injects a pressurized reactant gas into the anode, thereby shortening the process time, lowering the contamination velocity, and saving the reactant gas.

Description

Surface treatment apparatus using plasma having concentrated injection means

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface treatment apparatus for depositing a polymer film having a specific property on a sample and directing the surface of the sample by using a direct current or a high frequency plasma, and in particular, by modifying the shape of an injection portion for injecting a reactive gas into the chamber. The present invention relates to a surface treatment apparatus capable of shortening time and reducing reactive gas.

According to the prior art, in order to synthesize the polymer polymer and treat the sample surface, ion implantation or ion beam irradiation method using high energy (tens of keV to several MeV) is used or relatively low energy (0 Polymers may be formed by ion beam sputtering deposition using ion sources that produce particles of several keV, multi ion beam deposition, or ion assisted deposition. The deposition method on the sample surface was used.

However, since this method requires a relatively high energy and low vacuum state, the synthesis of the polymer is not easy and the cost required is high.

On the other hand, the surface treatment method using the plasma which can modify the surface by forming a polymer polymer on the sample substrate in a low energy and low vacuum state has been developed. In the above method, when a reactive gas made of monomers of a material to be synthesized is injected into a chamber, a vacuum is applied, and then discharged at a DC or high frequency using a power supply device, the plasma of the reactive gas is generated. Generated, and certain ions are transferred to the sample substrate or the electrode to synthesize the predetermined polymer thereon. At this time, various chemical bonds are made according to the type and mixing ratio of the reaction gas, DC current, voltage, high frequency power or deposition time, and the polymer polymer having the required physical properties such as surface strength, adhesion and adsorption, hydrophilicity and hydrophobicity is sampled. By depositing on the surface, the sample surface can be modified without affecting the inherent properties of the sample substrate.

The apparatus used for synthesizing the polymer using plasma is generally composed of a chamber, an electrode, a direct current or a high frequency power supply, a reactive gas injection port, a vacuum pump, and a vacuum measuring means, but there are no impurities in the chamber. In this case, there is no need to vacuum the inside of the chamber, and in this case, a vacuum pump and a vacuum measuring means are not necessary.

One embodiment of such a device is shown in FIG. 1, which is comprised of a chamber 1, a power supply 3, an electrode 4, a diffusion pump 5, and a rotary pump 6. It consists of a thermocouple vacuum gauge 7 for measuring the degree of vacuum, an ion gauge 8 and injection ports 9, 10 for injecting reactive gases.

In order to deposit the polymer polymer on the sample 2 using the apparatus, the sample 2 is installed inside the chamber 1, and the rotary pump 6 and the diffusion pump 5 are started to increase the pressure inside the chamber. Maintain below 10 ^-3 Torr, checking with a thermocouple gauge (7) and ion gauge (8) attached to the chamber. The sample is positioned where it is biased by the power supply 3 to the anode (+) or the cathode (-), and the opposite electrode 4 is grounded. When the pressure of the chamber is maintained at a constant vacuum, a predetermined amount of reactive gas such as acetylene and nitrogen is injected into the chamber through the injection ports 9 and 10, and then the predetermined power to the substrate using the power supply 3 The reactive gas is discharged by applying. Then, the molecular bonds of the reaction gases in the plasma generated by direct current or high frequency are broken, and the broken chain and the activated cations or anions are bonded to form a polymer polymer on the surface of the sample substrate positioned between the electrodes. The anion is mainly used for the synthesis of the polymer polymer in the sample substrate having a, and the cation is mainly helpful in the sample substrate or the electrode having the low potential. At this time, although the substrate is mainly used aluminum (Al), insulators, ceramics or polymers other than metal may be used. In addition, the type of polymer deposited can be changed by changing the position of the sample substrate between the electrodes. Instead of placing the sample substrate between the two grounded electrodes, one of the electrodes is replaced with a sample substrate to supply power to the sample substrate. It is also possible to apply and ground the remaining electrodes.

In the case of forming a polymer polymer and treating the surface by using such a conventional apparatus, a polymer is formed by radical reaction in a plasma of a reactive gas, and the polymer is combined with a metal by kinetic energy of electrons or cations. The cathode and the cathode have different potentials, average electron energies, etc., and thus polymerized membranes having different properties are formed according to the positions of the samples. However, when the polymer film is formed on the electrode other than the sample, the generation of the plasma is prevented and the surface modification is incomplete. In addition, in the conventional apparatus, when the reactive gas is injected for a predetermined time and uniformized, power supply is started, so that a long time is required for gas injection, and thus the overall process time increases, adversely affecting productivity.

Accordingly, it is an object of the present invention to provide a plasma polymer polymer synthesizing apparatus capable of preventing formation of unnecessary polymers on electrodes other than a sample.

Another object of the present invention is to provide an apparatus for synthesizing a plasma polymer which can shorten the time required for synthesizing a polymer.

It is still another object of the present invention to provide an apparatus for synthesizing a plasma polymer polymer, which can reduce the amount of reactive gas as compared with the conventional apparatus.

1 is a view showing a surface treatment apparatus using a plasma according to the prior art.

Figure 2 shows a surface treatment apparatus according to an embodiment of the present invention, the reactive gas injection unit is provided with a concentrated injection means and a pressurizing means.

Figure 3 shows the process time when using the apparatus according to the present invention in comparison with the conventional example.

** Description of the symbols for the main parts of the drawings **

1: Chamber 2: Sample

3: power supply device 4: electrode

5: diffusion pump 6: rotary pump

7: thermocouple vacuum gauge 8: ion gauge

9, 10: reaction gas injection unit

21: chamber 22: sample (anode)

23: power supply device 24: electrode (cathode)

26: vacuum pump 27: vacuum degree measuring means

28: concentrated injection type injection port 29: pressurizing means

An apparatus for achieving the above object of the present invention is a surface treatment apparatus for injecting a reactive gas into the chamber and applying DC or high frequency power to synthesize a polymer polymer on the surface of a sample by plasma discharge to modify the surface. The injection unit for injecting the reactive gas is a concentrated injection means for intensively ejecting the reactive gas only on the surface of the sample.

Specifically, the device according to the present invention includes a chamber, a vacuum pump, a power supply, a reactive gas injector, and an electrode unit, wherein the electrode unit is an anode or active to which a DC high voltage or a high frequency pulse voltage is applied. In the plasma polymer polymer synthesis apparatus consisting of an electrode (electrode) and a cathode or a cathode (passive electrode) grounded in correspondence with the anode or the active electrode, the concentrated gas injection unit toward the sample Characterized in that the injection port.

In another embodiment of the present invention, a pressurizing means for pressurizing and spraying the reactive gas may be further provided. In the form of an electrode part, two grounded electrodes constitute a cathode, and a sample as an anode is disposed therebetween, and DC or high frequency power is applied to the sample, but it is composed of one cathode and one anode, and one anode Is the sample and power can be applied there.

In the process of synthesizing the polymer polymer through such a device, the sample is first placed at a proper position (between two cathodes or one cathode), and the inside of the chamber is vacuumed to about 10 ^-3 Torr through a vacuum pump. Then, the central injection nozzle is opened to eject the reactive gas around the sample and at the same time, the electric power is applied to the sample, thereby causing plasma discharge. Then, the polymer is formed by the reaction of radicals in the plasma, and the polymer polymer is formed on the sample by the kinetic energy of the electrons or cations, and the type and composition ratio of the reactive gas, the position of the sample with respect to the electrode, the synthesis time, the power, etc. By controlling, it is possible to form a polymer polymer having a desired characteristic. At this time, since the reactive gas is mainly directed to the sample, almost no polymer is synthesized on the electrode (cathode), so that electrode replacement due to electrode contamination is unnecessary or the number of times of the electrode replacement is reduced, thereby increasing productivity. In addition, compared to the conventional apparatus that fills the entire chamber with the reaction gas, synthesizes the polymer, and discharges the residues, the amount of reactive gas required can be reduced by intensively injecting only the reaction gas required for the synthesis into the sample. .

In a conventional apparatus, the interior of the chamber is vacuumed to remove impurities other than reactive gases to form the desired polymeric polymer. Therefore, even if the reactive gas is not pressurized, it can be injected toward the sample through the concentrated injection port. However, in order to sufficiently remove impurities in the chamber, it is not necessary to form a vacuum. In this case, in order to achieve the object of the present invention, a pressurization device capable of injecting a reactive gas above atmospheric pressure and spraying it toward the sample Additionally required.

In one embodiment of the invention shown in FIG. 2, a chamber 21, a sample 22 supplied with power by the power supply device 23, a grounded electrode 24, and a vacuum pump 26. And a vacuum degree measuring means 27, a concentrated injection type injection port 28, and a pressurization device 29. In this embodiment, the electrode portion is composed of a sample to which electric power is applied and one electrode, and the concentrated injection type injection port 28 is disposed to face the sample.

In FIG. 3, in the conventional apparatus and the present invention, the time required for synthesizing the polymer polymer through one plasma discharge is shown. The vertical axis represents the reactive gas pressure around the sample, and the horizontal axis represents the time required for each process when the time required for the conventional surface treatment process by a single plasma discharge is 100%. In the conventional apparatus, since the reactive gas is slowly injected, the reactive gas pressure around the sample gradually increases linearly to start the plasma discharge at the point A when the pressure is sufficient and the one plasma discharge process is terminated at the point B. In the present invention, since the reactive gas is injected at a predetermined pressure and the plasma discharge is started (A '), the discharge is terminated at the time of B', so that the time required for the synthesis of the whole can be shortened. In other words, the time required to completely fill the chamber with the reactive gas can be shortened.

In the actual process, the time required for vacuum is about 5 minutes, the time required for gas introduction is about 2 minutes, the plasma treatment time is about 1 minute and the exhaust time is about 3 minutes. In this case, the time can be reduced by about 20%.

In the surface treatment apparatus for modifying the surface of a sample by forming a polymer polymer having a specific property on a sample substrate by using a plasma of a reactive gas through direct current or high frequency power, by configuring the reactive gas inlet by a (pressurized) concentrated injection method, Electrodes other than the sample can be prevented from being contaminated with the polymer, the process time can be shortened, and the amount of reactive gas can be reduced.

In addition, as a side effect, air pollution due to unnecessary exhaust gas generated in the conventional apparatus can be prevented.

Claims (2)

A surface treatment apparatus for injecting a reactive gas into a chamber and applying DC or high frequency power to synthesize a polymer polymer on the surface of a sample by plasma discharge to modify the surface of the sample. And an injection unit for injecting the reactive gas is a concentrated injection means for intensively ejecting a reactive gas only onto a surface of a sample. The surface treatment apparatus using plasma according to claim 1, further comprising a pressurizing means for pressurizing and injecting a reactive gas.