KR20010077659A - Plasma polymerization apparatus having hollow type gas inlet - Google Patents

Abstract

PURPOSE: A polymerizing apparatus using plasma with a hollow type gas injector is provided to realize uniform gas supply over all surfaces of a sample to enhance the usage efficiency of gas and the uniformity of plasma discharge. CONSTITUTION: The box type gas injectors(10) including a surface with a plurality of holes in a gas flow direction are installed in a plasma polymerizing area of an anode and a cathode. It is preferable that the diameters of the plurality of holes and the gaps between the holes are dependent on gas flow rate flowing in a central chamber through the gas injector. Further, it is desirable that an electrode of mesh shape or an electrode having a plurality of holes is used as the cathode. When a sheet type sample(2) enters a polymerizing chamber through a space between the gas injectors(10), gas is directly applied to both surfaces of the sample(2) from the gas injectors(10), thereby realizing uniform gas distribution over all surfaces of the sample.

Description

Polymer polymerization apparatus using plasma having hollow gas inlet {PLASMA POLYMERIZATION APPARATUS HAVING HOLLOW TYPE GAS INLET}

The present invention relates to a polymer polymerization apparatus using a plasma having a hollow gas injection port.

Conventionally, in order to modify the surface of a sample by synthesizing a polymer, ion implantation or ion beam irradiation using high energy (tens of keV to several MeV) is used or relatively low energy (0 to number) the polymer surface by ion beam sputtering, multi ion beam deposition, or ion assisted deposition using an ion source that generates particles of keV The deposition method was used.

However, since this method requires a relatively high energy and low vacuum state, the synthesis of the polymer is not easy and the cost required is high.

Therefore, a surface treatment method using a plasma capable of forming a polymer polymer on a sample substrate in a low energy and low vacuum state has been developed. In the above method, a vacuum is applied to the chamber, a reactive gas of monomers of the material to be synthesized is injected into the chamber, and then discharged at a direct current or high frequency using a power supply device. Plasma is generated, and predetermined ions are transferred to the sample substrate or the electrode to synthesize the predetermined polymer thereon. At this time, various chemical bonds are made according to the type and mixing ratio of the reaction gas, DC current, voltage, high frequency power or deposition time, and the polymer polymer having the required physical properties such as surface strength, adhesion and adsorption, hydrophilicity and hydrophobicity is sampled. By depositing on the surface, the sample surface can be modified without affecting the inherent properties of the sample substrate.

The conventional polymer polymerization apparatus using such a plasma has the configuration of FIG. Polymer polymerization using plasma is carried out in a polymerization chamber 1 having a gas injection port 7, a gas exhaust port 8, a vacuum pump 9, and an electrode 3 for generating a potential difference in the sample. 2) is transferred from the unwinding chamber 4 through the roller 6 to the winding chamber 5 to start the vacuum pump 9 to regulate the pressure inside the chamber and generate a potential difference in the sample by the electrode 3. Then, the plasma is discharged while the reaction gas injected through the gas injection port 7 is guided on the surface of the sample 2. During plasma discharge, the molecular bonds of the reaction gases are broken, and the polymer polymer is formed on the surface of the sample (2) which is broken and the activated cations or anions are bonded to each other and proceed between the electrodes.

However, since the above-described conventional gas injection port 7 is provided in the corner of the polymerization chamber, it is impossible to supply uniform gas to the entire area of the sample supplied in the form of a sheet having a large area. That is, when the gas is injected in the sheet advancing direction or in the opposite direction, the gas is unevenly introduced according to the pressure gradient of the gas injection hole, resulting in uneven performance of the polymerized film polymerized on the sheet-shaped sample surface.

Therefore, an object of the present invention is to improve the conventional gas inlet described above.

1 is a schematic diagram of a surface treatment apparatus using a plasma according to the prior art.

Figure 2 shows the structure of a hollow gas inlet in accordance with the present invention.

*** Explanation of symbols for main parts of drawing ***

1: polymerization chamber 2: sample

3: electrode 4: loosening chamber

5: winding chamber 6: roller

7: gas inlet 8: gas exhaust

9: vacuum pump 10: hollow gas inlet

Accordingly, the present invention provides a polymer polymerization apparatus using a plasma having a hollow gas inlet having a box-shaped gas inlet including a surface having a plurality of holes in the gas inflow direction above or below the plasma polymerization region of the anode and cathode. to provide. Here, the diameter and spacing of the plurality of holes is preferably dependent on the gas flow rate introduced into the polymerization chamber through the gas inlet. In addition, when the electrode having a mesh form or a plurality of holes is used as the cathode can maximize the effect of the present invention.

An electrode for a polymer polymerization apparatus using a plasma having an electrode made of a thin plate having a plurality of holes is provided. Here, the plurality of holes is preferably formed regularly, it is preferable to include a spare portion for electrode clamps at both ends of the electrode.

The inventors of the present invention find that it is difficult to obtain a uniform gas density across a large area of the sample surface when a gas injection port is installed in the corner or sidewall surface of the polymerization chamber and the gas is injected in the traveling direction or the opposite direction of the sheet. After recognizing and studying a method of forcibly supplying gas to the entire surface of a sample to be treated, the present invention was completed. That is, a gas injection hole is provided directly above the region between the anode and the cathode where the plasma discharge occurs or just below the region between the anode and the cathode. In particular, in order to achieve a uniform gas distribution over the entire sheet surface desired in the present invention, a box-type structure having a plurality of holes in the gas inlet is adopted.

As shown in Fig. 2, when the sheet-shaped sample 2 is introduced into the polymerization chamber, the hollow gas inlet 10 according to the present invention is installed in the upper part and the lower part of the electrode 3, so that the hollow The gas can be introduced directly from the type gas inlet 10 onto the large area sheet surface, thereby making it possible to achieve a uniform reaction gas distribution over the entire surface of the sample to be surface treated. In particular, in the present invention, in order to enable such a uniform gas distribution, the hollow gas inlet 10 is designed in the form of a box having a plurality of holes, and after the gas introduced from the external conduit passes through the box, the surface treatment is performed. Sample (3) was to be introduced over the entire surface. In order for the gas to be introduced uniformly throughout the sample surface, consideration must be given to the spacing and diameter of the holes of the box-shaped gas inlet. If the gas hole is large despite the relatively small amount of gas injection, most of the injected gas will be discharged out without reaching the rear of the box. Therefore, the diameter and spacing of the holes should be selected in consideration of the gas injection amount introduced into the polymerization chamber. However, the size and spacing of the holes illustrated in FIG. 2 is only one embodiment, and the scope of the present invention is not limited thereto.

In addition, by forcibly supplying the reaction gas directly above or below the plasma discharge region formed between the anode and the cathode, the utilization efficiency of the gas can be increased and the uniformity of the plasma discharge over the entire sample surface can be improved. The characteristic of can be maximized by having the electrode used of the cathode have a hole through which the reaction gas can pass. That is, if a mesh-shaped electrode or an electrode having a plurality of holes is used as the cathode, since the gas introduced into the polymerization chamber through the gas injection hole according to the present invention can be introduced directly into the plasma discharge region through the hole of the cathode. It is possible to maximize the effect of the present invention.

According to the present invention, it is possible to supply a uniform gas to the entire surface of the sample, improve the utilization efficiency of the gas, improve the uniformity of the plasma discharge, and improve the performance of the final surface-treated sample.

Claims (1)

A polymer polymerization apparatus using a plasma having a hollow gas inlet, characterized in that a box-shaped gas inlet including a surface having a plurality of holes in the gas inlet direction is provided above or below the plasma polymerization region of the anode and cathode.