KR20010088099A - Electrode for plasma polymerization apparatus - Google Patents

Abstract

PURPOSE: An electrode for polymerization apparatus using plasma is provided to use the electrode in a semi-permanent manner over a long period of time of plasma polymer synthesization process, by preventing the electrode edge from being carbonized. CONSTITUTION: An electrode is formed of a sheet plate having a plurality of holes formed in a regular manner so as to form more holes per unit area. The electrode has electrode holding portions formed at both ends of the electrode. Thus, carbonization at the edge of electrode is prevented, while minimizing arc generation. A uniform plasma discharge is obtained by applying voltages in a uniform manner throughout the surface of the electrode.

Description

Electrode for Polymer Polymerization Device Using Plasma {ELECTRODE FOR PLASMA POLYMERIZATION APPARATUS}

The present invention relates to an electrode for polymer polymerization devices using plasma.

Conventionally, in order to modify the surface of a sample by synthesizing a polymer, ion implantation or ion beam irradiation using high energy (tens of keV to several MeV) is used or relatively low energy (0 to number) the polymer surface by ion beam sputtering, multi ion beam deposition, or ion assisted deposition using an ion source that generates particles of keV The deposition method was used.

However, since this method requires a relatively high energy and low vacuum state, the synthesis of the polymer is not easy and the cost required is high.

Therefore, a surface treatment method using a plasma capable of forming a polymer polymer on a sample substrate in a low energy and low vacuum state has been developed. In the above method, a vacuum is applied to the chamber, a reactive gas of monomers of the material to be synthesized is injected into the chamber, and then discharged at a direct current or high frequency using a power supply device. Plasma is generated, and predetermined ions are transferred to the sample substrate or the electrode to synthesize the predetermined polymer thereon. At this time, various chemical bonds are made according to the type and mixing ratio of the reaction gas, DC current, voltage, high frequency power or deposition time, and the polymer polymer having the required physical properties such as surface strength, adhesion and adsorption, hydrophilicity and hydrophobicity is sampled. By depositing on the surface, the sample surface can be modified without affecting the inherent properties of the sample substrate.

The conventional polymer polymerization apparatus using such a plasma has the configuration of FIG. Polymer polymerization using plasma is carried out in a polymerization chamber (1) having a gas inlet (7), a gas exhaust port (8), a vacuum pump (9), and an electrode (3) for generating a potential difference in the sample. 2) is transferred from the unwinding chamber 4 through the roller 6 to the winding chamber 5 to start the vacuum pump 9 to regulate the pressure inside the chamber and generate a potential difference in the sample by the electrode 3. Then, the plasma is discharged while the reaction gas injected through the gas injection port 7 is guided on the surface of the sample 2. During plasma discharge, the molecular bonds of the reaction gases are broken, and the polymer polymer is formed on the surface of the sample (2) which is broken and the activated cations or anions are bonded to each other and proceed between the electrodes.

However, until now, since the plate-shaped electrode was used as the electrode 3, there was a problem in that carbonization occurred at the edge portion, and the produced carbide fell on the surface of the sample 2 to contaminate the sample surface. In addition, irregular arcs occur during plasma discharge at the edge of the plate-shaped electrode 3, which causes serious problems in the quality and uniformity of the resulting polymer. In addition, since such carbonization is concentrated only at the edge, there is a problem in that the electrode needs to be replaced frequently during long operation.

Therefore, an object of the present invention is to solve the above-mentioned problem of the plate-shaped electrode.

1 is a schematic diagram of a surface treatment apparatus using a plasma according to the prior art.

2 shows an electrode for a surface treatment apparatus using a plasma according to the present invention.

*** Explanation of symbols for main parts of drawing ***

1: polymerization chamber 2: sample

3: electrode 4: loosening chamber

5: winding chamber 6: roller

7: gas inlet 8: gas exhaust

9: vacuum pump

Accordingly, the present invention provides an electrode for polymer polymerization apparatus using a plasma having an electrode made of a thin plate having a plurality of holes. Here, the plurality of holes is preferably formed regularly, it is preferable to include a spare portion for electrode clamps at both ends of the electrode.

The inventors of the present invention recognize that carbonization is concentrated at the edge portion of the conventional plate-shaped electrode because the plasma discharge is concentrated due to the intense emission of electrons or ions at the edge portion compared to the inner surface portion of the plate-shaped electrode. The present invention was completed while studying to distribute the edges evenly over the entire electrode surface. That is, when the edge portion of the plate-like electrode is formed where two or more surfaces meet, and a plurality of portions (parts where two or more surfaces meet) corresponding to the edge portion are formed on the entire electrode surface, a uniform plasma discharge can be obtained over the entire electrode surface. I thought I could.

Referring to the configuration and operation of the present invention according to the accompanying drawings as follows.

As shown in Fig. 2, the electrode according to the present invention has a plurality of holes. Each hole of such an electrode forms a portion where two or more surfaces meet, like the edge portion of the plate-shaped electrode, where the electron or ion emission is concentrated. Such a hole may be formed regularly or irregularly, but when formed regularly, it is preferable that the hole be formed regularly because more holes may be formed per unit area. In addition, although both ends of the electrode preferably have a margin to which the electrode clamp can be fastened, such a margin is not necessary.

In addition, although the diameter of the hole or the gap between the holes is illustrated in FIG. 2, these details can be changed as much as possible in the actual application process.

According to the present invention, carbonization of the plate electrode edge portion can be prevented and arc generation can be minimized, so that the electrode can be used semi-permanently during the synthesis process of the plasma polymer film for a long time. In addition, a uniform voltage is applied across the entire surface of the sample to enable uniform plasma discharge.

Claims (1)

An electrode for polymer polymerization apparatus using a plasma having an electrode made of a thin plate having a plurality of holes.