KR19990028767A - 반도체 웨이퍼 일괄 적재 시스템 및 반도체 웨이퍼 조작 시스템 - Google Patents

반도체 웨이퍼 일괄 적재 시스템 및 반도체 웨이퍼 조작 시스템 Download PDF

Info

Publication number
KR19990028767A
KR19990028767A KR1019980700066A KR19980700066A KR19990028767A KR 19990028767 A KR19990028767 A KR 19990028767A KR 1019980700066 A KR1019980700066 A KR 1019980700066A KR 19980700066 A KR19980700066 A KR 19980700066A KR 19990028767 A KR19990028767 A KR 19990028767A
Authority
KR
South Korea
Prior art keywords
door
conveyer
carrier
chamber
loading
Prior art date
Application number
KR1019980700066A
Other languages
English (en)
Korean (ko)
Inventor
리챠드 에스. 무카
미카엘 더블유. 피핀스
밋첼 에이. 드류
Original Assignee
스탠리 디. 피에코스
브룩스 오토메이션 인코퍼레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/498,859 external-priority patent/US5607276A/en
Priority claimed from US08/498,597 external-priority patent/US5609459A/en
Priority claimed from US08/499,069 external-priority patent/US5613821A/en
Application filed by 스탠리 디. 피에코스, 브룩스 오토메이션 인코퍼레이티드 filed Critical 스탠리 디. 피에코스
Publication of KR19990028767A publication Critical patent/KR19990028767A/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • H01L21/67781—Batch transfer of wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1019980700066A 1995-07-06 1996-07-02 반도체 웨이퍼 일괄 적재 시스템 및 반도체 웨이퍼 조작 시스템 KR19990028767A (ko)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
US49898795A 1995-07-06 1995-07-06
US8/499069 1995-07-06
US08/498,859 US5607276A (en) 1995-07-06 1995-07-06 Batchloader for substrate carrier on load lock
US08/498,597 US5609459A (en) 1995-07-06 1995-07-06 Door drive mechanisms for substrate carrier and load lock
US8/498859 1995-07-06
US08/499,069 US5613821A (en) 1995-07-06 1995-07-06 Cluster tool batchloader of substrate carrier
US8/498987 1995-07-06
US8/498597 1995-07-06

Publications (1)

Publication Number Publication Date
KR19990028767A true KR19990028767A (ko) 1999-04-15

Family

ID=27504398

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019980700066A KR19990028767A (ko) 1995-07-06 1996-07-02 반도체 웨이퍼 일괄 적재 시스템 및 반도체 웨이퍼 조작 시스템

Country Status (7)

Country Link
EP (1) EP0886617A1 (de)
JP (1) JP4306798B2 (de)
KR (1) KR19990028767A (de)
CN (1) CN1195332A (de)
AU (1) AU6408996A (de)
TW (1) TW278200B (de)
WO (1) WO1997002199A1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG47226A1 (en) * 1996-07-12 1998-03-20 Motorola Inc Method and apparatus for transporting and using a semiconductor substrate carrier
US6280134B1 (en) 1997-06-17 2001-08-28 Applied Materials, Inc. Apparatus and method for automated cassette handling
DE19805624A1 (de) * 1998-02-12 1999-09-23 Acr Automation In Cleanroom Schleuse zum Öffnen und Schließen von Reinraumtransport-Boxen
US6610150B1 (en) * 1999-04-02 2003-08-26 Asml Us, Inc. Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer system
JP4628530B2 (ja) * 2000-08-25 2011-02-09 株式会社ライト製作所 搬送容器の蓋着脱装置
SG115630A1 (en) * 2003-03-11 2005-10-28 Asml Netherlands Bv Temperature conditioned load lock, lithographic apparatus comprising such a load lock and method of manufacturing a substrate with such a load lock
KR101131417B1 (ko) * 2003-11-12 2012-04-03 주성엔지니어링(주) 로드락 장치 및 이를 설치한 로드락 챔버
JP4748816B2 (ja) 2008-11-28 2011-08-17 Ｔｄｋ株式会社 密閉容器の蓋開閉システム
JP5279576B2 (ja) * 2009-03-27 2013-09-04 大日本スクリーン製造株式会社 基板処理装置
JP4919123B2 (ja) 2010-03-08 2012-04-18 Ｔｄｋ株式会社 処理基板収納ポッド及び処理基板収納ポッドの蓋開閉システム
US10741432B2 (en) * 2017-02-06 2020-08-11 Applied Materials, Inc. Systems, apparatus, and methods for a load port door opener
US10510573B2 (en) * 2017-11-14 2019-12-17 Taiwan Semiconductor Manufacturing Co., Ltd. Loading apparatus and operating method thereof
KR102247183B1 (ko) * 2020-05-29 2021-05-04 주식회사 싸이맥스 효율적인 설치면적을 갖는 웨이퍼 공정 장치
KR102200250B1 (ko) * 2020-05-29 2021-01-11 주식회사 싸이맥스 풉 로드락 도어가 구비된 로드포트모듈 및 로드포트모듈 도어와 풉 로드락 도어의 개폐방법
CN114777490B (zh) * 2022-06-21 2022-09-09 上海陛通半导体能源科技股份有限公司 可实现自动全向开合的半导体设备

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4550242A (en) * 1981-10-05 1985-10-29 Tokyo Denshi Kagaku Kabushiki Kaisha Automatic plasma processing device and heat treatment device for batch treatment of workpieces
JPH0461146A (ja) * 1990-06-22 1992-02-27 Mitsubishi Electric Corp 半導体ウエハ移替装置
JPH04206547A (ja) * 1990-11-30 1992-07-28 Hitachi Ltd 装置間搬送方法
JP3275390B2 (ja) * 1992-10-06 2002-04-15 神鋼電機株式会社 可搬式密閉コンテナ流通式の自動搬送システム

Also Published As

Publication number Publication date
TW278200B (en) 1996-06-11
CN1195332A (zh) 1998-10-07
WO1997002199A1 (en) 1997-01-23
EP0886617A1 (de) 1998-12-30
AU6408996A (en) 1997-02-05
JP4306798B2 (ja) 2009-08-05
JPH11513006A (ja) 1999-11-09

Similar Documents

Publication Publication Date Title
US5664925A (en) Batchloader for load lock
US5613821A (en) Cluster tool batchloader of substrate carrier
US5607276A (en) Batchloader for substrate carrier on load lock
US5609459A (en) Door drive mechanisms for substrate carrier and load lock
US5752796A (en) Vacuum integrated SMIF system
US6176023B1 (en) Device for transporting flat objects and process for transferring said objects between said device and a processing machine
US6120229A (en) Substrate carrier as batchloader
EP0980585B1 (de) Vorrichtung zur behandlung von einzelnen halbleiterscheiben mit mehreren schleusenkammern und verfahren zum beladen und entladen
US5884392A (en) Automatic assembler/disassembler apparatus adapted to pressurized sealable transportable containers
US6026561A (en) Automatic assembler/disassembler apparatus adapted to pressurized sealable transportable containers
US5451131A (en) Dockable interface airlock between process enclosure and interprocess transfer container
US5382127A (en) Pressurized interface apparatus for transferring a semiconductor wafer between a pressurized sealable transportable container and a processing equipment
USRE43023E1 (en) Dual loading port semiconductor processing equipment
US5388945A (en) Fully automated and computerized conveyor based manufacturing line architectures adapted to pressurized sealable transportable containers
US6592318B2 (en) Docking cart with integrated load port
US5713711A (en) Multiple interface door for wafer storage and handling container
KR19990028767A (ko) 반도체 웨이퍼 일괄 적재 시스템 및 반도체 웨이퍼 조작 시스템
EP0582016A1 (de) Tragbare abdichtbare unter Druck stehende Behältern zum Speichern von Halbleiterwafern in einer Schützenden gasartigen Umgebung
EP0582017A1 (de) Verteilungseinrichtung mit Gaszufuhr-Abgabevorrichtung zum Handhaben und Speichern von abdichtbaren tragbaren unter Druck stehenden Behältern
JP2595132B2 (ja) 真空処理装置
US6575687B2 (en) Wafer transport system
US5364225A (en) Method of printed circuit panel manufacture
US5395198A (en) Vacuum loading chuck and fixture for flexible printed circuit panels
KR100806250B1 (ko) 로드포트 직결식 로드락 챔버를 위한 풉 적재장치
KR102365815B1 (ko) 기판 처리 장치

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
NORF Unpaid initial registration fee