AU6408996A - Door drive mechanisms for substrate carrier and load lock - Google Patents

Door drive mechanisms for substrate carrier and load lock

Info

Publication number
AU6408996A
AU6408996A AU64089/96A AU6408996A AU6408996A AU 6408996 A AU6408996 A AU 6408996A AU 64089/96 A AU64089/96 A AU 64089/96A AU 6408996 A AU6408996 A AU 6408996A AU 6408996 A AU6408996 A AU 6408996A
Authority
AU
Australia
Prior art keywords
load lock
substrate carrier
drive mechanisms
door drive
door
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU64089/96A
Other languages
English (en)
Inventor
Mitchell A. Drew
Richard S. Muka
Michael W. Pippins
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azenta Inc
Original Assignee
Brooks Automation Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/498,597 external-priority patent/US5609459A/en
Priority claimed from US08/499,069 external-priority patent/US5613821A/en
Priority claimed from US08/498,859 external-priority patent/US5607276A/en
Application filed by Brooks Automation Inc filed Critical Brooks Automation Inc
Publication of AU6408996A publication Critical patent/AU6408996A/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • H01L21/67781—Batch transfer of wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
AU64089/96A 1995-07-06 1996-07-02 Door drive mechanisms for substrate carrier and load lock Abandoned AU6408996A (en)

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
US49898795A 1995-07-06 1995-07-06
US08/498,597 US5609459A (en) 1995-07-06 1995-07-06 Door drive mechanisms for substrate carrier and load lock
US498859 1995-07-06
US08/499,069 US5613821A (en) 1995-07-06 1995-07-06 Cluster tool batchloader of substrate carrier
US498987 1995-07-06
US499069 1995-07-06
US08/498,859 US5607276A (en) 1995-07-06 1995-07-06 Batchloader for substrate carrier on load lock
US498597 1995-07-06
PCT/US1996/011244 WO1997002199A1 (en) 1995-07-06 1996-07-02 Door drive mechanisms for substrate carrier and load lock

Publications (1)

Publication Number Publication Date
AU6408996A true AU6408996A (en) 1997-02-05

Family

ID=27504398

Family Applications (1)

Application Number Title Priority Date Filing Date
AU64089/96A Abandoned AU6408996A (en) 1995-07-06 1996-07-02 Door drive mechanisms for substrate carrier and load lock

Country Status (7)

Country Link
EP (1) EP0886617A1 (de)
JP (1) JP4306798B2 (de)
KR (1) KR19990028767A (de)
CN (1) CN1195332A (de)
AU (1) AU6408996A (de)
TW (1) TW278200B (de)
WO (1) WO1997002199A1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG47226A1 (en) * 1996-07-12 1998-03-20 Motorola Inc Method and apparatus for transporting and using a semiconductor substrate carrier
US6280134B1 (en) * 1997-06-17 2001-08-28 Applied Materials, Inc. Apparatus and method for automated cassette handling
DE19805624A1 (de) * 1998-02-12 1999-09-23 Acr Automation In Cleanroom Schleuse zum Öffnen und Schließen von Reinraumtransport-Boxen
US6610150B1 (en) * 1999-04-02 2003-08-26 Asml Us, Inc. Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer system
JP4628530B2 (ja) * 2000-08-25 2011-02-09 株式会社ライト製作所 搬送容器の蓋着脱装置
SG115630A1 (en) * 2003-03-11 2005-10-28 Asml Netherlands Bv Temperature conditioned load lock, lithographic apparatus comprising such a load lock and method of manufacturing a substrate with such a load lock
KR101131417B1 (ko) * 2003-11-12 2012-04-03 주성엔지니어링(주) 로드락 장치 및 이를 설치한 로드락 챔버
JP4748816B2 (ja) 2008-11-28 2011-08-17 Ｔｄｋ株式会社 密閉容器の蓋開閉システム
JP5279576B2 (ja) * 2009-03-27 2013-09-04 大日本スクリーン製造株式会社 基板処理装置
JP4919123B2 (ja) 2010-03-08 2012-04-18 Ｔｄｋ株式会社 処理基板収納ポッド及び処理基板収納ポッドの蓋開閉システム
US10741432B2 (en) * 2017-02-06 2020-08-11 Applied Materials, Inc. Systems, apparatus, and methods for a load port door opener
US10510573B2 (en) * 2017-11-14 2019-12-17 Taiwan Semiconductor Manufacturing Co., Ltd. Loading apparatus and operating method thereof
KR102247183B1 (ko) * 2020-05-29 2021-05-04 주식회사 싸이맥스 효율적인 설치면적을 갖는 웨이퍼 공정 장치
KR102200250B1 (ko) * 2020-05-29 2021-01-11 주식회사 싸이맥스 풉 로드락 도어가 구비된 로드포트모듈 및 로드포트모듈 도어와 풉 로드락 도어의 개폐방법
CN114777490B (zh) * 2022-06-21 2022-09-09 上海陛通半导体能源科技股份有限公司 可实现自动全向开合的半导体设备

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4550242A (en) * 1981-10-05 1985-10-29 Tokyo Denshi Kagaku Kabushiki Kaisha Automatic plasma processing device and heat treatment device for batch treatment of workpieces
JPH0461146A (ja) * 1990-06-22 1992-02-27 Mitsubishi Electric Corp 半導体ウエハ移替装置
JPH04206547A (ja) * 1990-11-30 1992-07-28 Hitachi Ltd 装置間搬送方法
JP3275390B2 (ja) * 1992-10-06 2002-04-15 神鋼電機株式会社 可搬式密閉コンテナ流通式の自動搬送システム

Also Published As

Publication number Publication date
JPH11513006A (ja) 1999-11-09
CN1195332A (zh) 1998-10-07
EP0886617A1 (de) 1998-12-30
JP4306798B2 (ja) 2009-08-05
TW278200B (en) 1996-06-11
WO1997002199A1 (en) 1997-01-23
KR19990028767A (ko) 1999-04-15

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