KR102905636B1 - 유동 기재 - Google Patents

유동 기재

Info

Publication number
KR102905636B1
KR102905636B1 KR1020217026854A KR20217026854A KR102905636B1 KR 102905636 B1 KR102905636 B1 KR 102905636B1 KR 1020217026854 A KR1020217026854 A KR 1020217026854A KR 20217026854 A KR20217026854 A KR 20217026854A KR 102905636 B1 KR102905636 B1 KR 102905636B1
Authority
KR
South Korea
Prior art keywords
cap
substrate
fluid
substrate body
lip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020217026854A
Other languages
English (en)
Korean (ko)
Other versions
KR20210119478A (ko
Inventor
프레데릭 레재이
Original Assignee
컴파트 시스템즈 피티이. 엘티디.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 컴파트 시스템즈 피티이. 엘티디. filed Critical 컴파트 시스템즈 피티이. 엘티디.
Priority to KR1020257043063A priority Critical patent/KR20260003435A/ko
Publication of KR20210119478A publication Critical patent/KR20210119478A/ko
Application granted granted Critical
Publication of KR102905636B1 publication Critical patent/KR102905636B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803Modular units
    • F15B13/0807Manifolds
    • F15B13/0814Monoblock manifolds
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00Electron-beam welding or cutting
    • B23K15/04Electron-beam welding or cutting for welding annular seams
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/16Casings; Cylinders; Cylinder liners or heads; Fluid connections
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803Modular units
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803Modular units
    • F15B13/0807Manifolds
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/06Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
    • F15B13/08Assemblies of units, each for the control of a single servomotor only
    • F15B13/0803Modular units
    • F15B13/0807Manifolds
    • F15B13/0817Multiblock manifolds
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00Construction of housing; Use of materials therefor
    • F16K27/003Housing formed from a plurality of the same valve elements
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16LPIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L41/00Branching pipes; Joining pipes to walls
    • F16L41/02Branch units, e.g. made in one piece, welded, riveted
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16LPIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L41/00Branching pipes; Joining pipes to walls
    • F16L41/02Branch units, e.g. made in one piece, welded, riveted
    • F16L41/025Branch units, e.g. made in one piece, welded, riveted with rectangular cross-section
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16LPIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L41/00Branching pipes; Joining pipes to walls
    • F16L41/02Branch units, e.g. made in one piece, welded, riveted
    • F16L41/03Branch units, e.g. made in one piece, welded, riveted comprising junction pieces for four or more pipe members
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16LPIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L41/00Branching pipes; Joining pipes to walls
    • F16L41/08Joining pipes to walls or pipes, the joined pipe axis being perpendicular to the plane of a wall or to the axis of another pipe
    • F16L41/082Non-disconnectable joints, e.g. soldered, adhesive or caulked joints
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16LPIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L41/00Branching pipes; Joining pipes to walls
    • F16L41/08Joining pipes to walls or pipes, the joined pipe axis being perpendicular to the plane of a wall or to the axis of another pipe
    • F16L41/082Non-disconnectable joints, e.g. soldered, adhesive or caulked joints
    • F16L41/084Soldered joints
    • H01L21/67017
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04Apparatus for manufacture or treatment
    • H10P72/0402Apparatus for fluid treatment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00Articles made by soldering, welding or cutting
    • B23K2101/04Tubular or hollow articles

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Valve Housings (AREA)
  • Branch Pipes, Bends, And The Like (AREA)
  • Micromachines (AREA)
  • Shaping Metal By Deep-Drawing, Or The Like (AREA)
KR1020217026854A 2019-01-29 2020-01-28 유동 기재 Active KR102905636B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020257043063A KR20260003435A (ko) 2019-01-29 2020-01-28 유동 기재

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201962798371P 2019-01-29 2019-01-29
US62/798,371 2019-01-29
PCT/IB2020/000069 WO2020157574A1 (en) 2019-01-29 2020-01-28 Weld cap and plug welds fluid delivery systems

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020257043063A Division KR20260003435A (ko) 2019-01-29 2020-01-28 유동 기재

Publications (2)

Publication Number Publication Date
KR20210119478A KR20210119478A (ko) 2021-10-05
KR102905636B1 true KR102905636B1 (ko) 2025-12-30

Family

ID=70476252

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020217026854A Active KR102905636B1 (ko) 2019-01-29 2020-01-28 유동 기재
KR1020257043063A Pending KR20260003435A (ko) 2019-01-29 2020-01-28 유동 기재

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020257043063A Pending KR20260003435A (ko) 2019-01-29 2020-01-28 유동 기재

Country Status (11)

Country Link
US (1) US12577966B2 (https=)
EP (2) EP4729814A2 (https=)
JP (2) JP2022519042A (https=)
KR (2) KR102905636B1 (https=)
CN (1) CN113631846A (https=)
CA (1) CA3126775A1 (https=)
IL (2) IL285180B2 (https=)
MX (1) MX2021008838A (https=)
PH (1) PH12021551809A1 (https=)
SG (1) SG11202107658VA (https=)
WO (1) WO2020157574A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113994460B (zh) * 2019-04-15 2025-05-20 朗姆研究公司 用于气体输送的模块部件系统
CN118176380A (zh) * 2021-10-29 2024-06-11 朗姆研究公司 用于半导体设备的阀

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007134156A (ja) * 2005-11-10 2007-05-31 Nec Tokin Corp 密閉型電池
US20140020779A1 (en) * 2009-06-10 2014-01-23 Vistadeltek, Llc Extreme flow rate and/or high temperature fluid delivery substrates

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3278156A (en) 1965-12-27 1966-10-11 Nuclear Products Company Bellows valve
US3521910A (en) 1968-11-12 1970-07-28 Cajon Co Tube coupling
DE7737499U1 (de) * 1977-12-09 1978-05-24 Steag Kernenergie Gmbh, 4300 Essen Abschirmtransport- und/oder abschirmlagerbehaelter fuer radioaktive abfaelle
JPH0544018Y2 (https=) * 1986-10-30 1993-11-08
JPH02149113A (ja) * 1988-11-30 1990-06-07 Nippon Dempa Kogyo Co Ltd 圧電振動子
EP0412626A1 (en) * 1989-08-11 1991-02-13 Form Rite Limited Hydraulic fitting
JPH0552309U (ja) * 1991-12-18 1993-07-13 株式会社ユニシアジェックス 流体給排用ポートの取付構造
DE69427645T2 (de) 1993-10-06 2002-05-08 Unit Instruments, Inc. Apparat zur handhabung von prozess fluiden
JPH09151730A (ja) * 1995-12-01 1997-06-10 Sango Co Ltd 排気二重管
US5730423A (en) 1996-10-16 1998-03-24 Parker-Hannifin Corporation All metal diaphragm valve
CN1203356A (zh) * 1997-06-20 1998-12-30 日野汽车工业株式会社 树脂制散热器贮槽机构及其制造方法
JPH11273637A (ja) 1998-03-19 1999-10-08 Mitsubishi Cable Ind Ltd 密閉型電池の製造方法
JP2000021365A (ja) * 1998-07-06 2000-01-21 Mitsubishi Cable Ind Ltd 密閉型電池の製造方法
JP2001289339A (ja) * 2000-04-10 2001-10-19 Tcm Corp チェック弁
US6357760B1 (en) 2000-05-19 2002-03-19 Michael Doyle Ring seal
CN1887029A (zh) 2003-11-07 2006-12-27 迅捷公司 表面安装的加热器
JP4405473B2 (ja) * 2006-03-16 2010-01-27 健 小田 改修用ドレンおよび改修用ドレンの製造方法
JP2009146645A (ja) 2007-12-12 2009-07-02 Toyota Motor Corp 溶接構造体の製造方法及び電池の製造方法
US8307854B1 (en) 2009-05-14 2012-11-13 Vistadeltek, Inc. Fluid delivery substrates for building removable standard fluid delivery sticks
WO2010144541A2 (en) * 2009-06-10 2010-12-16 Vistadeltek, Llc Extreme flow rate and/or high temperature fluid delivery substrates
CN202391550U (zh) * 2011-12-06 2012-08-22 浙江世纪华通车业股份有限公司 一种汽车散热器水室的加水管工艺口封盖密封结构
JP2015092456A (ja) * 2013-10-01 2015-05-14 住友電気工業株式会社 密閉型蓄電デバイスおよびその製造方法
CN108352466A (zh) 2015-11-10 2018-07-31 株式会社丰田自动织机 蓄电装置
DE102016107160A1 (de) 2016-04-18 2017-10-19 Eto Magnetic Gmbh Pneumatische Mehrventilvorrichtung sowie Herstellungsverfahren

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007134156A (ja) * 2005-11-10 2007-05-31 Nec Tokin Corp 密閉型電池
US20140020779A1 (en) * 2009-06-10 2014-01-23 Vistadeltek, Llc Extreme flow rate and/or high temperature fluid delivery substrates

Also Published As

Publication number Publication date
EP4729814A2 (en) 2026-04-22
WO2020157574A1 (en) 2020-08-06
EP3918239B1 (en) 2026-03-11
EP3918239A1 (en) 2021-12-08
IL285180A (en) 2021-09-30
KR20210119478A (ko) 2021-10-05
PH12021551809A1 (en) 2022-07-18
IL322226A (en) 2025-09-01
IL285180B2 (en) 2025-12-01
US20200240565A1 (en) 2020-07-30
MX2021008838A (es) 2021-09-08
JP2025074319A (ja) 2025-05-13
KR20260003435A (ko) 2026-01-06
CA3126775A1 (en) 2020-08-06
JP2022519042A (ja) 2022-03-18
CN113631846A (zh) 2021-11-09
IL285180B1 (en) 2025-08-01
SG11202107658VA (en) 2021-08-30
US12577966B2 (en) 2026-03-17

Similar Documents

Publication Publication Date Title
US8496029B2 (en) Extreme flow rate and/or high temperature fluid delivery substrates
US20140020779A1 (en) Extreme flow rate and/or high temperature fluid delivery substrates
JP2025074319A (ja) 流体送給システム用の溶接蓋体及びプラグ溶接
KR102380863B1 (ko) 밸브 장치, 이 밸브 장치를 사용한 유체제어장치 및 반도체 제조 장치
US20240052489A1 (en) Mounting structures for flow substrates
US7896031B2 (en) Fluid transport in monolithic structures
KR102341939B1 (ko) 밸브 장치, 이 밸브 장치를 사용한 유체제어장치 및 반도체 제조 장치
KR102295310B1 (ko) 밸브장치
US20250020248A1 (en) Universal tube stub plug with seal port
TW200907204A (en) MSM component and associated gas panel assembly
KR20210114534A (ko) 유로 어셈블리, 이 유로 어셈블리를 사용한 밸브 장치, 유체제어장치, 반도체 제조 장치 및 반도체 제조 방법
CN107923558A (zh) 管接头、流体控制器、流体控制装置、半导体制造装置以及管接头的制造方法
HK1177552B (en) Extreme flow rate and/or high temperature fluid delivery substrates

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E90F Notification of reason for final refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

D22 Grant of ip right intended

Free format text: ST27 STATUS EVENT CODE: A-1-2-D10-D22-EXM-PE0701 (AS PROVIDED BY THE NATIONAL OFFICE)

PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

A16 Divisional, continuation or continuation in part application filed

Free format text: ST27 STATUS EVENT CODE: A-0-1-A10-A16-DIV-PA0104 (AS PROVIDED BY THE NATIONAL OFFICE)

F11 Ip right granted following substantive examination

Free format text: ST27 STATUS EVENT CODE: A-2-4-F10-F11-EXM-PR0701 (AS PROVIDED BY THE NATIONAL OFFICE)

PA0104 Divisional application for international application

St.27 status event code: A-0-1-A10-A16-div-PA0104

PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

U12 Designation fee paid

Free format text: ST27 STATUS EVENT CODE: A-2-2-U10-U12-OTH-PR1002 (AS PROVIDED BY THE NATIONAL OFFICE)

Year of fee payment: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

Q13 Ip right document published

Free format text: ST27 STATUS EVENT CODE: A-4-4-Q10-Q13-NAP-PG1601 (AS PROVIDED BY THE NATIONAL OFFICE)

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000