KR102831769B1 - 광학 소자, 촬상 소자 및 촬상장치 - Google Patents

광학 소자, 촬상 소자 및 촬상장치 Download PDF

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KR102831769B1
KR102831769B1 KR1020237017918A KR20237017918A KR102831769B1 KR 102831769 B1 KR102831769 B1 KR 102831769B1 KR 1020237017918 A KR1020237017918 A KR 1020237017918A KR 20237017918 A KR20237017918 A KR 20237017918A KR 102831769 B1 KR102831769 B1 KR 102831769B1
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light
pixel
optical element
structures
wavelength
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KR20230093052A (ko
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마사시 미야타
나루 네모토
후미히데 코바야시
토시카즈 하시모토
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니폰 덴신 덴와 가부시끼가이샤
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/805Coatings
    • H10F39/8053Colour filters
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/806Optical elements or arrangements associated with the image sensors
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/002Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/201Filters in the form of arrays
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/10Cameras or camera modules comprising electronic image sensors; Control thereof for generating image signals from different wavelengths
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/20Cameras or camera modules comprising electronic image sensors; Control thereof for generating image signals from infrared radiation only
    • H04N23/21Cameras or camera modules comprising electronic image sensors; Control thereof for generating image signals from infrared radiation only from near infrared [NIR] radiation
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/50Constructional details
    • H04N23/55Optical parts specially adapted for electronic image sensors; Mounting thereof
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10Integrated devices
    • H10F39/12Image sensors
    • H10F39/18Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • H10F39/182Colour image sensors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/805Coatings
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/806Optical elements or arrangements associated with the image sensors
    • H10F39/8063Microlenses
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/02Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of crystals, e.g. rock-salt, semi-conductors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10Integrated devices
    • H10F39/12Image sensors
    • H10F39/199Back-illuminated image sensors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Optical Filters (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
KR1020237017918A 2020-11-30 2020-11-30 광학 소자, 촬상 소자 및 촬상장치 Active KR102831769B1 (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/044530 WO2022113352A1 (ja) 2020-11-30 2020-11-30 光学素子、撮像素子及び撮像装置

Publications (2)

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KR20230093052A KR20230093052A (ko) 2023-06-26
KR102831769B1 true KR102831769B1 (ko) 2025-07-09

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Country Status (6)

Country Link
US (1) US20240006441A1 (https=)
EP (1) EP4242701A4 (https=)
JP (1) JP7574858B2 (https=)
KR (1) KR102831769B1 (https=)
CN (1) CN116547566B (https=)
WO (1) WO2022113352A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102587961B1 (ko) * 2021-08-05 2023-10-11 삼성전자주식회사 색분리 렌즈 어레이를 구비하는 이미지 센서 및 이를 포함하는 전자 장치
US12481094B2 (en) * 2021-10-04 2025-11-25 Phoebus Optoelectronics Llc Filters with reduced angle-of-incidence dependence
WO2025079513A1 (ja) * 2023-10-11 2025-04-17 ソニーセミコンダクタソリューションズ株式会社 撮像装置及び電子機器
US20250297855A1 (en) * 2024-03-21 2025-09-25 Kla Corporation System and method for device-like overlay targets measurement

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011040441A (ja) * 2009-08-06 2011-02-24 Panasonic Corp 固体撮像装置
JP2015028960A (ja) 2011-12-01 2015-02-12 ソニー株式会社 固体撮像装置および電子機器
JP2019184986A (ja) 2018-04-17 2019-10-24 日本電信電話株式会社 カラー撮像素子および撮像装置

Family Cites Families (10)

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Publication number Priority date Publication date Assignee Title
WO2005101067A1 (ja) * 2004-04-13 2005-10-27 Matsushita Electric Industrial Co., Ltd. 集光素子および固体撮像装置
EP1785750A1 (en) * 2004-09-01 2007-05-16 Matsushita Electric Industrial Co., Ltd. Condensing element, solid-state imaging device and method for fabricating the same
DE102007016588B4 (de) * 2007-04-05 2014-10-09 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikroskop mit Subwellenlängenauflösung und Verfahren zum Erzeugen eines Bilds eines Objekts
TWI424200B (zh) 2008-12-31 2014-01-21 Ind Tech Res Inst 色彩分離光學元件以及所應用的影像裝置
JP6035744B2 (ja) * 2012-01-10 2016-11-30 凸版印刷株式会社 固体撮像素子
CN111580190B (zh) * 2015-11-24 2021-12-28 哈佛学院院长及董事 制造针对可见光谱波长的电介质超颖表面的原子层沉积处理
JP7062366B2 (ja) 2017-03-03 2022-05-06 株式会社ジャパンディスプレイ 表示装置、表示方法及び色分離素子
JP6857163B2 (ja) 2018-09-26 2021-04-14 日本電信電話株式会社 偏光イメージング撮像システム
EP3905330A4 (en) * 2018-12-27 2022-03-30 Sony Semiconductor Solutions Corporation IMAGING ELEMENT AND METHOD OF MAKING AN IMAGING ELEMENT
EP3812801B1 (en) * 2019-10-23 2024-06-19 Samsung Electronics Co., Ltd. Image sensor including color separating lens array and electronic device including the image sensor

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011040441A (ja) * 2009-08-06 2011-02-24 Panasonic Corp 固体撮像装置
JP2015028960A (ja) 2011-12-01 2015-02-12 ソニー株式会社 固体撮像装置および電子機器
JP2019184986A (ja) 2018-04-17 2019-10-24 日本電信電話株式会社 カラー撮像素子および撮像装置

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Publication number Publication date
WO2022113352A1 (ja) 2022-06-02
JP7574858B2 (ja) 2024-10-29
JPWO2022113352A1 (https=) 2022-06-02
KR20230093052A (ko) 2023-06-26
CN116547566A (zh) 2023-08-04
US20240006441A1 (en) 2024-01-04
EP4242701A1 (en) 2023-09-13
CN116547566B (zh) 2025-06-24
EP4242701A4 (en) 2024-07-17

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