KR102718045B1 - 이미지 기반 오버레이 계측에서 타겟 피처 초점을 결정하기 위한 시스템 및 방법 - Google Patents

이미지 기반 오버레이 계측에서 타겟 피처 초점을 결정하기 위한 시스템 및 방법 Download PDF

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KR102718045B1
KR102718045B1 KR1020237010248A KR20237010248A KR102718045B1 KR 102718045 B1 KR102718045 B1 KR 102718045B1 KR 1020237010248 A KR1020237010248 A KR 1020237010248A KR 20237010248 A KR20237010248 A KR 20237010248A KR 102718045 B1 KR102718045 B1 KR 102718045B1
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target
focus
overlay
training
features
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KR20230078666A (ko
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이타이 라베르트
암논 마나쎈
요씨 시몬
디미트리 산코
아브너 사프라니
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케이엘에이 코포레이션
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    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
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    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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    • G06N3/04—Architecture, e.g. interconnection topology
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    • G06V10/00—Arrangements for image or video recognition or understanding
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    • G06V10/40—Extraction of image or video features
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    • G06V10/764—Arrangements for image or video recognition or understanding using pattern recognition or machine learning using classification, e.g. of video objects
    • G06V10/765—Arrangements for image or video recognition or understanding using pattern recognition or machine learning using classification, e.g. of video objects using rules for classification or partitioning the feature space
    • G—PHYSICS
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    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
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    • G06T2200/24—Indexing scheme for image data processing or generation, in general involving graphical user interfaces [GUIs]
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    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
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    • G—PHYSICS
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    • G06V2201/06—Recognition of objects for industrial automation
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    • G06V2201/07—Target detection

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  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Software Systems (AREA)
  • Data Mining & Analysis (AREA)
  • Artificial Intelligence (AREA)
  • Evolutionary Computation (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Multimedia (AREA)
  • Computing Systems (AREA)
  • Mathematical Physics (AREA)
  • Medical Informatics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Human Computer Interaction (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • Evolutionary Biology (AREA)
  • Bioinformatics & Computational Biology (AREA)
  • Computational Linguistics (AREA)
  • Databases & Information Systems (AREA)
  • Immunology (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Pathology (AREA)
  • Molecular Biology (AREA)
  • Biophysics (AREA)
  • Quality & Reliability (AREA)
  • Signal Processing (AREA)
  • Biomedical Technology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
KR1020237010248A 2020-10-01 2021-09-21 이미지 기반 오버레이 계측에서 타겟 피처 초점을 결정하기 위한 시스템 및 방법 Active KR102718045B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US17/060,372 US11556738B2 (en) 2020-10-01 2020-10-01 System and method for determining target feature focus in image-based overlay metrology
US17/060,372 2020-10-01
PCT/US2021/051163 WO2022072162A1 (en) 2020-10-01 2021-09-21 System and method for determining target feature focus in image-based overlay metrology

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KR20230078666A KR20230078666A (ko) 2023-06-02
KR102718045B1 true KR102718045B1 (ko) 2024-10-15

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US (2) US11556738B2 (https=)
EP (1) EP4200599A4 (https=)
JP (1) JP7642804B2 (https=)
KR (1) KR102718045B1 (https=)
CN (2) CN118225804B (https=)
TW (1) TWI872283B (https=)
WO (1) WO2022072162A1 (https=)

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US11556738B2 (en) * 2020-10-01 2023-01-17 Kla Corporation System and method for determining target feature focus in image-based overlay metrology
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TWI890995B (zh) 2022-04-18 2025-07-21 新加坡商綠色鋰離子私人有限公司 用於自鋰離子電池組回收鋰之方法及系統
EP4367610A1 (en) * 2022-09-13 2024-05-15 Google LLC Method for retraining with auto-validation of machine learning models
US12535744B2 (en) * 2022-10-31 2026-01-27 Kla Corporation Overlay estimation based on optical inspection and machine learning
US12322771B2 (en) 2023-08-23 2025-06-03 Green Li-Ion Pte. Ltd. Adaptable processes and systems for purifying co-precipitated or independent streams of manganese, nickel, and cobalt from lithium-ion battery waste streams
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TW202219459A (zh) 2022-05-16
EP4200599A4 (en) 2024-10-09
US11921825B2 (en) 2024-03-05
US20240020353A1 (en) 2024-01-18
US11556738B2 (en) 2023-01-17
JP2025074126A (ja) 2025-05-13
WO2022072162A1 (en) 2022-04-07
KR20230078666A (ko) 2023-06-02
JP7642804B2 (ja) 2025-03-10
CN118225804B (zh) 2025-09-19
EP4200599A1 (en) 2023-06-28
CN116235042A (zh) 2023-06-06
US20220108128A1 (en) 2022-04-07
CN116235042B (zh) 2024-04-12
JP2023544388A (ja) 2023-10-23
TWI872283B (zh) 2025-02-11
CN118225804A (zh) 2024-06-21

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