KR102696681B1 - Photosensitive Resin Composition, Protrusion Pattern and Display Device Using the Same - Google Patents
Photosensitive Resin Composition, Protrusion Pattern and Display Device Using the Same Download PDFInfo
- Publication number
- KR102696681B1 KR102696681B1 KR1020210112708A KR20210112708A KR102696681B1 KR 102696681 B1 KR102696681 B1 KR 102696681B1 KR 1020210112708 A KR1020210112708 A KR 1020210112708A KR 20210112708 A KR20210112708 A KR 20210112708A KR 102696681 B1 KR102696681 B1 KR 102696681B1
- Authority
- KR
- South Korea
- Prior art keywords
- group
- photosensitive resin
- resin composition
- independently
- anhydride
- Prior art date
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- 239000011342 resin composition Substances 0.000 title claims abstract description 61
- 239000000126 substance Substances 0.000 claims abstract description 86
- 239000010954 inorganic particle Substances 0.000 claims abstract description 13
- 230000001747 exhibiting effect Effects 0.000 claims abstract description 7
- 150000001875 compounds Chemical class 0.000 claims description 93
- 239000011347 resin Substances 0.000 claims description 65
- 229920005989 resin Polymers 0.000 claims description 65
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 claims description 43
- -1 tetracarboxylic acid dianhydride Chemical class 0.000 claims description 31
- 239000002253 acid Substances 0.000 claims description 24
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 21
- 239000002904 solvent Substances 0.000 claims description 19
- 239000003999 initiator Substances 0.000 claims description 16
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 claims description 14
- 150000008065 acid anhydrides Chemical group 0.000 claims description 14
- 125000005843 halogen group Chemical group 0.000 claims description 12
- 125000003118 aryl group Chemical group 0.000 claims description 11
- 125000003396 thiol group Chemical group [H]S* 0.000 claims description 10
- 125000003277 amino group Chemical group 0.000 claims description 9
- 125000004432 carbon atom Chemical group C* 0.000 claims description 9
- 125000006159 dianhydride group Chemical group 0.000 claims description 9
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 9
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 claims description 9
- 125000000732 arylene group Chemical group 0.000 claims description 8
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 8
- KMOUUZVZFBCRAM-OLQVQODUSA-N (3as,7ar)-3a,4,7,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C=CC[C@@H]2C(=O)OC(=O)[C@@H]21 KMOUUZVZFBCRAM-OLQVQODUSA-N 0.000 claims description 7
- 125000003161 (C1-C6) alkylene group Chemical group 0.000 claims description 7
- JVERADGGGBYHNP-UHFFFAOYSA-N 5-phenylbenzene-1,2,3,4-tetracarboxylic acid Chemical compound OC(=O)C1=C(C(O)=O)C(C(=O)O)=CC(C=2C=CC=CC=2)=C1C(O)=O JVERADGGGBYHNP-UHFFFAOYSA-N 0.000 claims description 7
- 125000002947 alkylene group Chemical group 0.000 claims description 7
- 125000002993 cycloalkylene group Chemical group 0.000 claims description 7
- 125000000524 functional group Chemical group 0.000 claims description 6
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 6
- LGRFSURHDFAFJT-UHFFFAOYSA-N Phthalic anhydride Natural products C1=CC=C2C(=O)OC(=O)C2=C1 LGRFSURHDFAFJT-UHFFFAOYSA-N 0.000 claims description 5
- JHIWVOJDXOSYLW-UHFFFAOYSA-N butyl 2,2-difluorocyclopropane-1-carboxylate Chemical compound CCCCOC(=O)C1CC1(F)F JHIWVOJDXOSYLW-UHFFFAOYSA-N 0.000 claims description 5
- 229910052760 oxygen Inorganic materials 0.000 claims description 5
- 229910052717 sulfur Inorganic materials 0.000 claims description 5
- 125000004169 (C1-C6) alkyl group Chemical group 0.000 claims description 4
- FALRKNHUBBKYCC-UHFFFAOYSA-N 2-(chloromethyl)pyridine-3-carbonitrile Chemical compound ClCC1=NC=CC=C1C#N FALRKNHUBBKYCC-UHFFFAOYSA-N 0.000 claims description 4
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 claims description 4
- 229940014800 succinic anhydride Drugs 0.000 claims description 4
- MUTGBJKUEZFXGO-OLQVQODUSA-N (3as,7ar)-3a,4,5,6,7,7a-hexahydro-2-benzofuran-1,3-dione Chemical compound C1CCC[C@@H]2C(=O)OC(=O)[C@@H]21 MUTGBJKUEZFXGO-OLQVQODUSA-N 0.000 claims description 3
- OFNISBHGPNMTMS-UHFFFAOYSA-N 3-methylideneoxolane-2,5-dione Chemical compound C=C1CC(=O)OC1=O OFNISBHGPNMTMS-UHFFFAOYSA-N 0.000 claims description 3
- MWSKJDNQKGCKPA-UHFFFAOYSA-N 6-methyl-3a,4,5,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1CC(C)=CC2C(=O)OC(=O)C12 MWSKJDNQKGCKPA-UHFFFAOYSA-N 0.000 claims description 3
- ZCILODAAHLISPY-UHFFFAOYSA-N biphenyl ether Natural products C1=C(CC=C)C(O)=CC(OC=2C(=CC(CC=C)=CC=2)O)=C1 ZCILODAAHLISPY-UHFFFAOYSA-N 0.000 claims description 3
- ANSXAPJVJOKRDJ-UHFFFAOYSA-N furo[3,4-f][2]benzofuran-1,3,5,7-tetrone Chemical compound C1=C2C(=O)OC(=O)C2=CC2=C1C(=O)OC2=O ANSXAPJVJOKRDJ-UHFFFAOYSA-N 0.000 claims description 3
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 claims description 3
- UITKHKNFVCYWNG-UHFFFAOYSA-N 4-(3,4-dicarboxybenzoyl)phthalic acid Chemical compound C1=C(C(O)=O)C(C(=O)O)=CC=C1C(=O)C1=CC=C(C(O)=O)C(C(O)=O)=C1 UITKHKNFVCYWNG-UHFFFAOYSA-N 0.000 claims description 2
- FLBJFXNAEMSXGL-UHFFFAOYSA-N het anhydride Chemical compound O=C1OC(=O)C2C1C1(Cl)C(Cl)=C(Cl)C2(Cl)C1(Cl)Cl FLBJFXNAEMSXGL-UHFFFAOYSA-N 0.000 claims description 2
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 30
- 238000006243 chemical reaction Methods 0.000 description 25
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical group N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 20
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 18
- 239000000243 solution Substances 0.000 description 17
- 239000000758 substrate Substances 0.000 description 17
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 16
- 230000015572 biosynthetic process Effects 0.000 description 15
- 238000000034 method Methods 0.000 description 15
- 238000003786 synthesis reaction Methods 0.000 description 15
- 229910052757 nitrogen Chemical group 0.000 description 13
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 12
- 238000011161 development Methods 0.000 description 12
- 239000000203 mixture Substances 0.000 description 11
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 11
- 230000000052 comparative effect Effects 0.000 description 10
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Natural products CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 9
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 9
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 9
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 9
- 239000011248 coating agent Substances 0.000 description 9
- 238000000576 coating method Methods 0.000 description 9
- 238000011156 evaluation Methods 0.000 description 9
- 239000007787 solid Substances 0.000 description 9
- 229930185605 Bisphenol Natural products 0.000 description 7
- 239000004593 Epoxy Substances 0.000 description 7
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 7
- 239000007864 aqueous solution Substances 0.000 description 7
- 239000011521 glass Substances 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 239000000178 monomer Substances 0.000 description 7
- 238000010992 reflux Methods 0.000 description 7
- 238000003756 stirring Methods 0.000 description 7
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 6
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 6
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 6
- 230000000977 initiatory effect Effects 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 239000012044 organic layer Substances 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- BRLQWZUYTZBJKN-UHFFFAOYSA-N Epichlorohydrin Chemical compound ClCC1CO1 BRLQWZUYTZBJKN-UHFFFAOYSA-N 0.000 description 5
- 239000000654 additive Substances 0.000 description 5
- 238000000605 extraction Methods 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 4
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 4
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 4
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 4
- CSNNHWWHGAXBCP-UHFFFAOYSA-L Magnesium sulfate Chemical compound [Mg+2].[O-][S+2]([O-])([O-])[O-] CSNNHWWHGAXBCP-UHFFFAOYSA-L 0.000 description 4
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 4
- 150000008064 anhydrides Chemical class 0.000 description 4
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical class C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 4
- HTZCNXWZYVXIMZ-UHFFFAOYSA-M benzyl(triethyl)azanium;chloride Chemical compound [Cl-].CC[N+](CC)(CC)CC1=CC=CC=C1 HTZCNXWZYVXIMZ-UHFFFAOYSA-M 0.000 description 4
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 4
- 230000008034 disappearance Effects 0.000 description 4
- NIHNNTQXNPWCJQ-UHFFFAOYSA-N fluorene Chemical compound C1=CC=C2CC3=CC=CC=C3C2=C1 NIHNNTQXNPWCJQ-UHFFFAOYSA-N 0.000 description 4
- 125000001072 heteroaryl group Chemical group 0.000 description 4
- 238000004811 liquid chromatography Methods 0.000 description 4
- DNIAPMSPPWPWGF-UHFFFAOYSA-N monopropylene glycol Natural products CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 4
- CQKAPARXKPTKBK-UHFFFAOYSA-N tert-butylazanium;bromide Chemical compound Br.CC(C)(C)N CQKAPARXKPTKBK-UHFFFAOYSA-N 0.000 description 4
- RIOQSEWOXXDEQQ-UHFFFAOYSA-N triphenylphosphine Chemical compound C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 RIOQSEWOXXDEQQ-UHFFFAOYSA-N 0.000 description 4
- CNJRPYFBORAQAU-UHFFFAOYSA-N 1-ethoxy-2-(2-methoxyethoxy)ethane Chemical compound CCOCCOCCOC CNJRPYFBORAQAU-UHFFFAOYSA-N 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- UHFFVFAKEGKNAQ-UHFFFAOYSA-N 2-benzyl-2-(dimethylamino)-1-(4-morpholin-4-ylphenyl)butan-1-one Chemical compound C=1C=C(N2CCOCC2)C=CC=1C(=O)C(CC)(N(C)C)CC1=CC=CC=C1 UHFFVFAKEGKNAQ-UHFFFAOYSA-N 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- 239000004215 Carbon black (E152) Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 125000004018 acid anhydride group Chemical group 0.000 description 3
- 230000009471 action Effects 0.000 description 3
- 239000003513 alkali Substances 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000004821 distillation Methods 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- BHXIWUJLHYHGSJ-UHFFFAOYSA-N ethyl 3-ethoxypropanoate Chemical compound CCOCCC(=O)OCC BHXIWUJLHYHGSJ-UHFFFAOYSA-N 0.000 description 3
- 229930195733 hydrocarbon Natural products 0.000 description 3
- 150000002430 hydrocarbons Chemical class 0.000 description 3
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 3
- BDJSOPWXYLFTNW-UHFFFAOYSA-N methyl 3-methoxypropanoate Chemical compound COCCC(=O)OC BDJSOPWXYLFTNW-UHFFFAOYSA-N 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 3
- 238000000016 photochemical curing Methods 0.000 description 3
- 239000003505 polymerization initiator Substances 0.000 description 3
- 238000006116 polymerization reaction Methods 0.000 description 3
- RMVRSNDYEFQCLF-UHFFFAOYSA-N thiophenol Chemical compound SC1=CC=CC=C1 RMVRSNDYEFQCLF-UHFFFAOYSA-N 0.000 description 3
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- KMOUUZVZFBCRAM-UHFFFAOYSA-N 1,2,3,6-tetrahydrophthalic anhydride Chemical compound C1C=CCC2C(=O)OC(=O)C21 KMOUUZVZFBCRAM-UHFFFAOYSA-N 0.000 description 2
- LIPRQQHINVWJCH-UHFFFAOYSA-N 1-ethoxypropan-2-yl acetate Chemical compound CCOCC(C)OC(C)=O LIPRQQHINVWJCH-UHFFFAOYSA-N 0.000 description 2
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 2
- 238000005160 1H NMR spectroscopy Methods 0.000 description 2
- JRPBSTGRRSTANR-UHFFFAOYSA-N 2,6-bis(2-methylpropyl)phenol Chemical compound CC(C)CC1=CC=CC(CC(C)C)=C1O JRPBSTGRRSTANR-UHFFFAOYSA-N 0.000 description 2
- YTZSKPAYFHSKOL-UHFFFAOYSA-N 2-(2,3-dichlorophenyl)-2-[2-(2,3-dichlorophenyl)-4,5-diphenylimidazol-2-yl]-4,5-diphenylimidazole Chemical compound ClC1=CC=CC(C2(N=C(C(=N2)C=2C=CC=CC=2)C=2C=CC=CC=2)C2(N=C(C(=N2)C=2C=CC=CC=2)C=2C=CC=CC=2)C=2C(=C(Cl)C=CC=2)Cl)=C1Cl YTZSKPAYFHSKOL-UHFFFAOYSA-N 0.000 description 2
- GBOJZXLCJZDBKO-UHFFFAOYSA-N 2-(2-chlorophenyl)-2-[2-(2-chlorophenyl)-4,5-diphenylimidazol-2-yl]-4,5-diphenylimidazole Chemical compound ClC1=CC=CC=C1C1(C2(N=C(C(=N2)C=2C=CC=CC=2)C=2C=CC=CC=2)C=2C(=CC=CC=2)Cl)N=C(C=2C=CC=CC=2)C(C=2C=CC=CC=2)=N1 GBOJZXLCJZDBKO-UHFFFAOYSA-N 0.000 description 2
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 2
- PSYGHMBJXWRQFD-UHFFFAOYSA-N 2-(2-sulfanylacetyl)oxyethyl 2-sulfanylacetate Chemical compound SCC(=O)OCCOC(=O)CS PSYGHMBJXWRQFD-UHFFFAOYSA-N 0.000 description 2
- JJSYPAGPNHFLML-UHFFFAOYSA-N 2-ethyl-2-(hydroxymethyl)propane-1,3-diol;3-sulfanylpropanoic acid Chemical compound OC(=O)CCS.OC(=O)CCS.OC(=O)CCS.CCC(CO)(CO)CO JJSYPAGPNHFLML-UHFFFAOYSA-N 0.000 description 2
- XLLIQLLCWZCATF-UHFFFAOYSA-N 2-methoxyethyl acetate Chemical compound COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 2
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 2
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- 238000005481 NMR spectroscopy Methods 0.000 description 2
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- JOBBTVPTPXRUBP-UHFFFAOYSA-N [3-(3-sulfanylpropanoyloxy)-2,2-bis(3-sulfanylpropanoyloxymethyl)propyl] 3-sulfanylpropanoate Chemical class SCCC(=O)OCC(COC(=O)CCS)(COC(=O)CCS)COC(=O)CCS JOBBTVPTPXRUBP-UHFFFAOYSA-N 0.000 description 2
- YAAUVJUJVBJRSQ-UHFFFAOYSA-N [3-(3-sulfanylpropanoyloxy)-2-[[3-(3-sulfanylpropanoyloxy)-2,2-bis(3-sulfanylpropanoyloxymethyl)propoxy]methyl]-2-(3-sulfanylpropanoyloxymethyl)propyl] 3-sulfanylpropanoate Chemical compound SCCC(=O)OCC(COC(=O)CCS)(COC(=O)CCS)COCC(COC(=O)CCS)(COC(=O)CCS)COC(=O)CCS YAAUVJUJVBJRSQ-UHFFFAOYSA-N 0.000 description 2
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- ZSIAUFGUXNUGDI-UHFFFAOYSA-N hexan-1-ol Chemical compound CCCCCCO ZSIAUFGUXNUGDI-UHFFFAOYSA-N 0.000 description 2
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- 229910052943 magnesium sulfate Inorganic materials 0.000 description 2
- 235000019341 magnesium sulphate Nutrition 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
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- 230000007935 neutral effect Effects 0.000 description 2
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 2
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- NWVVVBRKAWDGAB-UHFFFAOYSA-N p-methoxyphenol Chemical compound COC1=CC=C(O)C=C1 NWVVVBRKAWDGAB-UHFFFAOYSA-N 0.000 description 2
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
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- C08F2/00—Processes of polymerisation
- C08F2/44—Polymerisation in the presence of compounding ingredients, e.g. plasticisers, dyestuffs, fillers
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- C08F2/00—Processes of polymerisation
- C08F2/46—Polymerisation initiated by wave energy or particle radiation
- C08F2/48—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
- C08F2/50—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light with sensitising agents
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F222/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a carboxyl radical and containing at least one other carboxyl radical in the molecule; Salts, anhydrides, esters, amides, imides, or nitriles thereof
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- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F290/00—Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups
- C08F290/08—Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups on to polymers modified by introduction of unsaturated side groups
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
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- G—PHYSICS
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- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
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Abstract
본 발명은 감광성 수지 조성물, 이를 이용한 돌출형 패턴 및 화상표시장치에 관한 것이다. 본 발명에 따른 감광성 수지 조성물은 무기 입자를 사용하지 않으면서도 고굴절률을 나타내는 패턴을 형성할 수 있으며, 저온 경화시에도 패턴 특성과 내화학성이 우수하다.The present invention relates to a photosensitive resin composition, a protruding pattern using the same, and an image display device. The photosensitive resin composition according to the present invention can form a pattern exhibiting a high refractive index without using inorganic particles, and has excellent pattern characteristics and chemical resistance even when cured at low temperatures.
Description
본 발명은 감광성 수지 조성물, 이를 이용한 돌출형 패턴 및 화상표시장치에 관한 것으로, 보다 상세하게는 무기 입자를 사용하지 않으면서도 고굴절률을 나타내는 패턴을 형성할 수 있으며, 저온 경화시에도 패턴 특성과 내화학성이 우수한 감광성 수지 조성물, 이를 이용한 돌출형 패턴 및 화상표시장치에 관한 것이다.The present invention relates to a photosensitive resin composition, a protruding pattern, and an image display device using the same, and more specifically, to a photosensitive resin composition capable of forming a pattern exhibiting a high refractive index without using inorganic particles and having excellent pattern characteristics and chemical resistance even when cured at low temperatures, and a protruding pattern and an image display device using the same.
유기발광다이오드(Organic light emitting diode, 이하 OLED)는 빠른 응답속도와, 광 시야각, 저전압 구동 등의 장점으로 인해 최근 차세대 디스플레이 및 조명장치로 기대되고 있다.Organic light emitting diodes (OLEDs) are expected to be the next-generation display and lighting devices due to their advantages such as fast response speed, wide viewing angle, and low-voltage operation.
일반적으로 OLED는 발광 소재나 전하 이동 소재 등으로 이루어진 유기물층이 상부 전극과 하부 전극 사이에 위치한다. OLED는 굴절률이 상이한 소재가 적층된 구조를 가지고 있어서, 이들 소재의 계면에서의 반사가 일어나기 때문에, 외부로의 광 추출 효율이 낮다.In general, OLEDs have an organic layer made of light-emitting materials or charge-transfer materials positioned between the upper and lower electrodes. OLEDs have a structure in which materials with different refractive indices are laminated, so reflection occurs at the interfaces of these materials, and thus the efficiency of light extraction to the outside is low.
구체적으로 살펴보면, OLED를 구성하는 유기발광층의 굴절률은 대략 1.7이고, 투명 전극으로 사용되는 ITO의 굴절률은 2.0이며, 유리 기판의 굴절률은 1.5이다. 이 경우에, 투명 전극이나 유기물층에 갇혀서(trapped) 추출할 수 없는 도파광의 비율은 약 45%이고, 기판 내에 갇혀서 추출할 수 없는 기판 도파광의 비율은 약 35%이다. 따라서, OLED에서 발광한 빛 중에서 20% 정도의 광만 외부로 추출된다.Specifically, the refractive index of the organic light-emitting layer constituting the OLED is approximately 1.7, the refractive index of the ITO used as the transparent electrode is 2.0, and the refractive index of the glass substrate is 1.5. In this case, the ratio of guided light that is trapped in the transparent electrode or organic layer and cannot be extracted is approximately 45%, and the ratio of substrate guided light that is trapped in the substrate and cannot be extracted is approximately 35%. Therefore, only about 20% of the light emitted from the OLED is extracted to the outside.
이를 해결하기 위한 다양한 연구가 진행되고 있으며 대표적으로는 마이크로 렌즈 어레이가 있다. 마이크로 렌즈 어레이는 OLED 소자의 유리 기판과 공기 표면의 계면에 입사되는 각을 변화시킴으로써 광 추출 효율을 증가시키는 역할을 한다.Various studies are being conducted to solve this problem, and a representative example is the micro lens array. The micro lens array increases the light extraction efficiency by changing the angle of incidence at the interface between the glass substrate of the OLED element and the air surface.
마이크로 렌즈 어레이는 유리 기판의 굴절률 이상의 고굴절률을 나타내야 한다. 통상 무기 입자는 유기물에 비하여 고굴절률을 가지고 있으나, 무기 입자를 포함하는 감광성 수지 조성물을 이용하여 패턴을 형성할 경우에는 패턴의 표면 조도(roughness)가 커지고, 크랙이 발생하며 내굴곡성이 떨어져 플렉서블 화상표시장치에 적용하기 곤란하다.The microlens array must exhibit a high refractive index higher than that of the glass substrate. Normally, inorganic particles have a high refractive index compared to organic substances, but when a pattern is formed using a photosensitive resin composition containing inorganic particles, the surface roughness of the pattern increases, cracks occur, and the bending resistance is low, making it difficult to apply to a flexible display device.
따라서, 무기 입자를 사용하지 않으면서도 유리 기판의 굴절률 이상의 고굴절률을 나타내는 패턴을 형성할 수 있는 감광성 수지 조성물에 대한 개발이 필요하다.Therefore, there is a need for development of a photosensitive resin composition capable of forming a pattern exhibiting a high refractive index higher than the refractive index of a glass substrate without using inorganic particles.
아울러, 플렉서블 화상표시장치에 적용하기 위하여 저온 경화를 수행하더라도 우수한 패턴 특성을 나타내며, 후공정시에도 막두께 변화가 없도록 내화학성이 뛰어난 감광성 수지 조성물에 대한 개발이 요구되고 있다.In addition, there is a demand for the development of a photosensitive resin composition that exhibits excellent pattern characteristics even when low-temperature curing is performed for application to flexible display devices and has excellent chemical resistance so that the film thickness does not change even during post-processing.
본 발명의 한 목적은 무기 입자를 사용하지 않으면서도 고굴절률을 나타내는 패턴을 형성할 수 있으며, 저온 경화시에도 패턴 특성과 내화학성이 우수한 감광성 수지 조성물을 제공하는 것이다.One object of the present invention is to provide a photosensitive resin composition capable of forming a pattern exhibiting a high refractive index without using inorganic particles, and having excellent pattern characteristics and chemical resistance even when cured at low temperatures.
본 발명의 다른 목적은 상기 감광성 수지 조성물을 이용하여 형성되는 돌출형 패턴을 제공하는 것이다.Another object of the present invention is to provide a protruding pattern formed using the photosensitive resin composition.
본 발명의 또 다른 목적은 상기 돌출형 패턴을 포함하는 화상표시장치를 제공하는 것이다.Another object of the present invention is to provide an image display device including the above-mentioned protruding pattern.
한편으로, 본 발명은 하기 화학식 1 내지 6 중 적어도 하나의 반복 단위를 포함하는 알칼리 가용성 수지, 카도계 광중합성 화합물, 다관능 아크릴레이트 광중합성 화합물, 광중합 개시제 및 용제를 포함하는 감광성 수지 조성물을 제공한다.On the one hand, the present invention provides a photosensitive resin composition comprising an alkali-soluble resin comprising at least one repeating unit of the following chemical formulas 1 to 6, a cardo-type photopolymerizable compound, a multifunctional acrylate photopolymerizable compound, a photopolymerization initiator, and a solvent.
[화학식 1][Chemical Formula 1]
[화학식 2][Chemical formula 2]
[화학식 3][Chemical Formula 3]
[화학식 4][Chemical Formula 4]
[화학식 5][Chemical Formula 5]
[화학식 6][Chemical formula 6]
상기 식에서,In the above formula,
X 및 X'는 각각 독립적으로 단일 결합, -CO-, -SO2-, -C(CF3)2-, -Si(CH3)2-, -CH2-, -C(CH3)2-, -O-, , , , , , , , , , , , 또는 이고,X and X' are each independently a single bond, -CO-, -SO 2 -, -C(CF 3 ) 2 -, -Si(CH 3 ) 2 -, -CH 2 -, -C(CH 3 ) 2 -, -O-, , , , , , , , , , , , or And,
Y는 산무수물 잔기이며,Y is an acid anhydride residue,
Z는 산2무수물 잔기이고,Z is an acid dianhydride residue,
R'는 수소 원자, 에틸기, 페닐기, -C2H4Cl, -C2H4OH 또는 -CH2CH=CH2이며,R' is a hydrogen atom, an ethyl group, a phenyl group, -C 2 H 4 Cl, -C 2 H 4 OH or -CH 2 CH=CH 2 ,
R1, R1', R2, R2', R3, R3', R4, R4', R5, R5', R6 및 R6'은 각각 독립적으로 수소 원자 또는 메틸기이고,R1, R1', R2, R2', R3, R3', R4, R4', R5, R5', R6 and R6' are each independently a hydrogen atom or a methyl group,
R7, R7', R8 및 R8'은 각각 독립적으로 C1-C6의 알킬렌기이며, 상기 알킬렌기는 에스테르 결합, C6-C14의 사이클로알킬렌기 및 아릴렌기 중 적어도 하나로 개재되거나 개재되지 않고,R7, R7', R8 and R8' are each independently a C 1 -C 6 alkylene group, wherein the alkylene group is or is not interrupted by at least one of an ester bond, a C 6 -C 14 cycloalkylene group and an arylene group,
R9, R9', R10, R10', R11, R11', R12 및 R12'는 각각 독립적으로 수소 원자, 할로겐 원자 또는 C1-C6의 알킬기이며,R9, R9', R10, R10', R11, R11', R12 and R12' are each independently a hydrogen atom, a halogen atom or a C 1 -C 6 alkyl group,
m 및 n은 각각 독립적으로 1 내지 30의 정수이고,m and n are each independently an integer from 1 to 30,
t 및 u는 각각 독립적으로 0 내지 1의 정수이며,t and u are each independently integers from 0 to 1,
P는 각각 독립적으로 , , , 또는 이고,P is each independently , , , or And,
R13 및 R14는 각각 독립적으로 수소 원자, 히드록시기, 티올기, 아미노기, 니트로기 또는 할로겐 원자이며,R13 and R14 are each independently a hydrogen atom, a hydroxyl group, a thiol group, an amino group, a nitro group or a halogen atom,
Ar1은 각각 독립적으로 아릴기이고,Ar1 is each independently an aryl group,
Y'는 산무수물 잔기이며,Y' is an acid anhydride residue,
Z'는 산2무수물 잔기이고,Z' is an acid dianhydride residue,
A는 O, S, NR', Si(R')2 또는 Se이며,A is O, S, NR', Si(R') 2 or Se,
a 및 b는 각각 독립적으로 1 내지 6의 정수이고,a and b are each independently an integer from 1 to 6,
p 및 q은 각각 독립적으로 1 내지 30의 정수이다.p and q are each independently an integer from 1 to 30.
본 발명의 일 실시형태에 따른 감광성 수지 조성물은 경화 도막이 550nm 파장에서 1.60 이상의 굴절률을 나타낼 수 있다.According to one embodiment of the present invention, a photosensitive resin composition can exhibit a refractive index of 1.60 or more at a wavelength of 550 nm in a cured film.
본 발명의 일 실시형태에서, 상기 산무수물은 무수말레인산, 무수숙신산, 무수이타콘산, 무수프탈산, 무수테트라히드로프탈산, 무수헥사히드로프탈산, 무수메틸엔도메틸렌테트라히드로프탈산, 무수클로렌드산 및 무수메틸테트라히드로프탈산으로 구성된 군으로부터 선택되는 것일 수 있다.In one embodiment of the present invention, the acid anhydride may be selected from the group consisting of maleic anhydride, succinic anhydride, itaconic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, methylendomethylenetetrahydrophthalic anhydride, chlorendic anhydride, and methyltetrahydrophthalic anhydride.
본 발명의 일 실시형태에서, 상기 산2무수물은 무수피로멜리트산, 벤조페논테트라카르복시산2무수물, 바이페닐테트라카르복시산2무수물 및 바이페닐에테르테트라카르복시산2무수물로 구성된 군으로부터 선택되는 것일 수 있다.In one embodiment of the present invention, the acid dianhydride may be selected from the group consisting of pyromellitic anhydride, benzophenone tetracarboxylic acid dianhydride, biphenyl tetracarboxylic acid dianhydride, and biphenyl ether tetracarboxylic acid dianhydride.
본 발명의 일 실시형태에서, 상기 카도계 광중합성 화합물은 하기 화학식 7 내지 9 중 어느 하나로 표시되는 화합물을 포함할 수 있다.In one embodiment of the present invention, the cardo-based photopolymerizable compound may include a compound represented by any one of the following chemical formulas 7 to 9.
[화학식 7][Chemical formula 7]
[화학식 8][Chemical formula 8]
[화학식 9][Chemical formula 9]
상기 식에서, In the above formula,
R15 및 R16은 각각 독립적으로 수소 원자, 히드록시기, 티올기, 아미노기, 니트로기, 할로겐 원자, 또는 불포화 이중결합을 갖는 탄소수 2 내지 20의 중합성 작용기이고, R15 또는 R16 중 적어도 하나는 불포화 이중결합을 갖는 탄소수 2 내지 20의 중합성 작용기이다.R15 and R16 are each independently a hydrogen atom, a hydroxyl group, a thiol group, an amino group, a nitro group, a halogen atom, or a polymerizable functional group having 2 to 20 carbon atoms and an unsaturated double bond, and at least one of R15 or R16 is a polymerizable functional group having 2 to 20 carbon atoms and an unsaturated double bond.
본 발명의 일 실시형태에서, R15 및 R16은 각각 독립적으로 수소 원자, 히드록시기, 티올기, 아미노기, 니트로기, 할로겐 원자, 또는 이고, R15 또는 R16 중 적어도 하나는 이며, In one embodiment of the present invention, R15 and R16 are each independently a hydrogen atom, a hydroxyl group, a thiol group, an amino group, a nitro group, a halogen atom, or and at least one of R15 or R16 And,
R17은 C1-C6의 알킬렌기이며, 상기 알킬렌기는 에스테르 결합, C6-C14의 사이클로알킬렌기 및 아릴렌기 중 적어도 하나로 개재되거나 개재되지 않고,R17 is a C 1 -C 6 alkylene group, wherein the alkylene group is or is not interrupted by at least one of an ester bond, a C 6 -C 14 cycloalkylene group, and an arylene group,
R18은 수소 원자 또는 메틸기일 수 있다.R18 can be a hydrogen atom or a methyl group.
본 발명의 일 실시형태에서, 상기 카도계 광중합성 화합물은 알칼리 가용성 수지 100 중량부에 대하여 30 내지 70 중량부의 양으로 포함될 수 있다.In one embodiment of the present invention, the cardo-based photopolymerizable compound may be included in an amount of 30 to 70 parts by weight per 100 parts by weight of the alkali-soluble resin.
본 발명의 일 실시형태에서, 상기 다관능 아크릴레이트 광중합성 화합물은 알칼리 가용성 수지 100 중량부에 대하여 30 내지 120 중량부의 양으로 포함될 수 있다.In one embodiment of the present invention, the multifunctional acrylate photopolymerizable compound may be included in an amount of 30 to 120 parts by weight per 100 parts by weight of the alkali-soluble resin.
본 발명의 일 실시형태에 따른 감광성 수지 조성물은 다관능 티올 화합물을 추가로 포함할 수 있다.The photosensitive resin composition according to one embodiment of the present invention may additionally contain a multifunctional thiol compound.
본 발명의 일 실시형태에 따른 감광성 수지 조성물은 무기 입자를 포함하지 않을 수 있다.The photosensitive resin composition according to one embodiment of the present invention may not contain inorganic particles.
다른 한편으로, 본 발명은 상기 감광성 수지 조성물을 이용하여 형성되는 돌출형 패턴을 제공한다.On the other hand, the present invention provides a protruding pattern formed using the photosensitive resin composition.
또 다른 한편으로, 본 발명은 상기 돌출형 패턴을 포함하는 화상표시장치를 제공한다.On the other hand, the present invention provides an image display device including the above-mentioned protruding pattern.
본 발명에 따른 감광성 수지 조성물은 특정 구조의 반복단위를 포함하는 카도계 알칼리 가용성 수지, 카도계 광중합성 화합물 및 다관능 아크릴레이트 광중합성 화합물을 사용함으로써 무기 입자를 사용하지 않으면서도 550nm 파장에서 1.60 이상의 고굴절률을 나타내는 패턴을 형성할 수 있으며, 저온경화시에도 현상속도, 잔사, 밀착성, 표면 경도 특성 등의 패턴 특성이 우수하고, 현상액 및 모노머에 대한 내화학성이 뛰어나다.The photosensitive resin composition according to the present invention can form a pattern exhibiting a high refractive index of 1.60 or more at a wavelength of 550 nm without using inorganic particles by using a cardo-based alkali-soluble resin containing a repeating unit of a specific structure, a cardo-based photopolymerizable compound, and a multifunctional acrylate photopolymerizable compound, and has excellent pattern characteristics such as development speed, residue, adhesion, and surface hardness even when cured at low temperatures, and has excellent chemical resistance to a developer and monomer.
이하, 본 발명을 보다 상세히 설명한다. Hereinafter, the present invention will be described in more detail.
본 발명의 일 실시형태는 알칼리 가용성 수지(A), 카도계 광중합성 화합물(B), 다관능 아크릴레이트 광중합성 화합물(C), 광중합 개시제(D) 및 용제(E)를 포함하는 감광성 수지 조성물에 관한 것이다.One embodiment of the present invention relates to a photosensitive resin composition comprising an alkali-soluble resin (A), a cardo-type photopolymerizable compound (B), a multifunctional acrylate photopolymerizable compound (C), a photopolymerization initiator (D), and a solvent (E).
본 발명의 일 실시형태에 따른 감광성 수지 조성물은 특정 구조의 반복단위를 포함하는 카도계 알칼리 가용성 수지, 카도계 광중합성 화합물 및 다관능 아크릴레이트 광중합성 화합물을 사용함으로써 무기 입자를 사용하지 않으면서도 550nm 파장에서 1.60 이상, 예를 들어 1.60 내지 1.7의 고굴절률을 나타내는 패턴을 형성할 수 있다. 따라서, 본 발명의 일 실시형태에 따른 감광성 수지 조성물을 이용하여 포토리소그라피 공정을 통하여 패터닝된 절연막은 자발광 장치의 광추출 소재로 사용될 수 있으며, 이에 따라 자발광 장치에서 방출되는 빛의 광추출 효율과 발광 휘도를 크게 향상시킬 수 있다.According to one embodiment of the present invention, a photosensitive resin composition comprises a cardo-based alkali-soluble resin having a repeating unit having a specific structure, a cardo-based photopolymerizable compound, and a multifunctional acrylate photopolymerizable compound, thereby forming a pattern having a high refractive index of 1.60 or higher, for example, 1.60 to 1.7, at a wavelength of 550 nm without using inorganic particles. Accordingly, an insulating film patterned through a photolithography process using the photosensitive resin composition according to one embodiment of the present invention can be used as a light extraction material for a self-luminous device, and thereby significantly improves the light extraction efficiency and luminance of light emitted from the self-luminous device.
또한, 본 발명의 일 실시형태에 따른 감광성 수지 조성물은 저온 경화시에도 노광부와 비노광부가 분명하도록 현상속도의 비를 나타내고, 잔사, 밀착성, 표면 경도 특성 등의 패턴 특성이 우수하며, 우수한 경화도로 인하여 후공정에서 사용되는 현상액 및/또는 모노머에 대한 내화학성이 뛰어나다.In addition, the photosensitive resin composition according to one embodiment of the present invention exhibits a ratio of development speeds so that the exposed and unexposed areas are clear even when cured at low temperatures, has excellent pattern characteristics such as residue, adhesion, and surface hardness, and has excellent chemical resistance to a developer and/or monomer used in a post-process due to its excellent curing degree.
알칼리 가용성 수지(A)Alkali soluble resin (A)
본 발명의 일 실시형태에서, 상기 알칼리 가용성 수지(A)는 통상 광이나 열의 작용에 의한 반응성을 갖고, 패턴을 형성할 때의 현상 처리 공정에서 이용되는 알칼리 현상액에 대해서 가용성을 부여하는 성분이다.In one embodiment of the present invention, the alkali-soluble resin (A) is a component that usually has reactivity due to the action of light or heat and provides solubility for an alkaline developer used in a developing process when forming a pattern.
상기 알칼리 가용성 수지(A)는 카도계 알칼리 가용성 수지를 포함한다. 상기 카도계 알칼리 가용성 수지는 하기 화학식 1 내지 6 중 적어도 하나의 반복 단위를 포함한다.The above alkali-soluble resin (A) includes a cardo-based alkali-soluble resin. The cardo-based alkali-soluble resin includes at least one repeating unit of the following chemical formulas 1 to 6.
[화학식 1][Chemical Formula 1]
[화학식 2][Chemical formula 2]
[화학식 3][Chemical Formula 3]
[화학식 4][Chemical Formula 4]
[화학식 5][Chemical Formula 5]
[화학식 6][Chemical formula 6]
상기 식에서,In the above formula,
X 및 X'는 각각 독립적으로 단일 결합, -CO-, -SO2-, -C(CF3)2-, -Si(CH3)2-, -CH2-, -C(CH3)2-, -O-, , , , , , , , , , , , 또는 이고,X and X' are each independently a single bond, -CO-, -SO 2 -, -C(CF 3 ) 2 -, -Si(CH 3 ) 2 -, -CH 2 -, -C(CH 3 ) 2 -, -O-, , , , , , , , , , , , or And,
Y는 산무수물 잔기이며,Y is an acid anhydride residue,
Z는 산2무수물 잔기이고,Z is an acid dianhydride residue,
R'는 수소 원자, 에틸기, 페닐기, -C2H4Cl, -C2H4OH 또는 -CH2CH=CH2이며,R' is a hydrogen atom, an ethyl group, a phenyl group, -C 2 H 4 Cl, -C 2 H 4 OH or -CH 2 CH=CH 2 ,
R1, R1', R2, R2', R3, R3', R4, R4', R5, R5', R6 및 R6'은 각각 독립적으로 수소 원자 또는 메틸기이고,R1, R1', R2, R2', R3, R3', R4, R4', R5, R5', R6 and R6' are each independently a hydrogen atom or a methyl group,
R7, R7', R8 및 R8'은 각각 독립적으로 C1-C6의 알킬렌기이며, 상기 알킬렌기는 에스테르 결합, C6-C14의 사이클로알킬렌기 및 아릴렌기 중 적어도 하나로 개재되거나 개재되지 않고,R7, R7', R8 and R8' are each independently a C 1 -C 6 alkylene group, wherein the alkylene group is or is not interrupted by at least one of an ester bond, a C 6 -C 14 cycloalkylene group and an arylene group,
R9, R9', R10, R10', R11, R11', R12 및 R12'는 각각 독립적으로 수소 원자, 할로겐 원자 또는 C1-C6의 알킬기이며,R9, R9', R10, R10', R11, R11', R12 and R12' are each independently a hydrogen atom, a halogen atom or a C 1 -C 6 alkyl group,
m 및 n은 각각 독립적으로 1 내지 30의 정수이고,m and n are each independently an integer from 1 to 30,
t 및 u는 각각 독립적으로 0 내지 1의 정수이며,t and u are each independently integers from 0 to 1,
P는 각각 독립적으로 , , , 또는 이고,P is each independently , , , or And,
R13 및 R14는 각각 독립적으로 수소 원자, 히드록시기, 티올기, 아미노기, 니트로기 또는 할로겐 원자이며,R13 and R14 are each independently a hydrogen atom, a hydroxyl group, a thiol group, an amino group, a nitro group or a halogen atom,
Ar1은 각각 독립적으로 아릴기이고,Ar1 is each independently an aryl group,
Y'는 산무수물 잔기이며,Y' is an acid anhydride residue,
Z'는 산2무수물 잔기이고,Z' is an acid dianhydride residue,
A는 O, S, NR', Si(R')2 또는 Se이며,A is O, S, NR', Si(R') 2 or Se,
a 및 b는 각각 독립적으로 1 내지 6의 정수이고,a and b are each independently an integer from 1 to 6,
p 및 q은 각각 독립적으로 1 내지 30의 정수이다.p and q are each independently an integer from 1 to 30.
본 명세서에서 사용되는 C1-C6의 알킬렌기는 탄소수 1 내지 6개로 구성된 직쇄형 또는 분지형의 2가 탄화수소를 의미하며, 예를 들어 메틸렌, 에틸렌, 프로필렌, 부틸렌 등이 포함되나 이에 한정되는 것은 아니다.As used herein, the C 1 -C 6 alkylene group means a straight-chain or branched divalent hydrocarbon having 1 to 6 carbon atoms, and examples thereof include, but are not limited to, methylene, ethylene, propylene, butylene, etc.
본 명세서에서 사용되는 C6-C14의 사이클로알킬렌기는 탄소수 6 내지 14개로 구성된 단순 또는 융합 고리형 2가 탄화수소를 의미하며, 예를 들어 사이클로헥실렌, 사이클로헵틸렌, 사이클로옥틸렌 등이 포함되나 이에 한정되는 것은 아니다.As used herein, the C 6 -C 14 cycloalkylene group means a simple or fused ring divalent hydrocarbon having 6 to 14 carbon atoms, and examples thereof include, but are not limited to, cyclohexylene, cycloheptylene, and cyclooctylene.
본 명세서에서 사용되는 아릴렌기는 2가의 아로메틱기와 헤테로아로메틱기 및 그들의 부분적으로 환원된 유도체를 모두 포함한다. 상기 아로메틱기는 5원 내지 15원의 단순 또는 융합 고리형이며, 헤테로아로메틱기는 산소, 황 또는 질소를 하나 이상 포함하는 아로메틱기를 의미한다. 대표적인 아릴렌기의 예로는 페닐렌, 나프틸렌, 피리디닐렌(pyridinylene), 푸라닐렌(furanylene), 티오페닐렌(thiophenylene), 인돌릴렌(indolylene), 퀴놀리닐렌(quinolinylene), 이미다졸리닐렌(imidazolinylene), 옥사졸릴렌(oxazolylene), 티아졸릴렌(thiazolylene), 테트라히드로나프틸렌 등이 있으나 이에 한정되는 것은 아니다.The arylene group used herein includes both divalent aromatic groups, heteroaromatic groups, and partially reduced derivatives thereof. The aromatic group is a simple or fused ring having 5 to 15 members, and the heteroaromatic group means an aromatic group containing at least one oxygen, sulfur, or nitrogen. Representative examples of arylene groups include, but are not limited to, phenylene, naphthylene, pyridinylene, furanylene, thiophenylene, indolylene, quinolinylene, imidazolinylene, oxazolylene, thiazolylene, and tetrahydronaphthylene.
본 명세서에서 사용되는 C1-C6의 알킬기는 탄소수 1 내지 6개로 구성된 직쇄형 또는 분지형의 1가 탄화수소를 의미하며, 예를 들어 메틸, 에틸, n-프로필, i-프로필, n-부틸, i-부틸, t-부틸, n-펜틸, n-헥실 등이 포함되나 이에 한정되는 것은 아니다.As used herein, the C 1 -C 6 alkyl group means a straight-chain or branched monovalent hydrocarbon having 1 to 6 carbon atoms, and examples thereof include, but are not limited to, methyl, ethyl, n-propyl, i-propyl, n-butyl, i-butyl, t-butyl, n-pentyl, n-hexyl, and the like.
본 명세서에서 사용되는 아릴기는 1가의 아로메틱기와 헤테로아로메틱기 및 그들의 부분적으로 환원된 유도체를 모두 포함한다. 상기 아로메틱기는 5원 내지 15원의 단순 또는 융합 고리형이며, 헤테로아로메틱기는 산소, 황 또는 질소를 하나 이상 포함하는 아로메틱기를 의미한다. 대표적인 아릴기의 예로는 페닐, 나프틸, 피리디닐(pyridinyl), 푸라닐(furanyl), 티오페닐(thiophenyl), 인돌릴(indolyl), 퀴놀리닐(quinolinyl), 이미다졸리닐(imidazolinyl), 옥사졸릴(oxazolyl), 티아졸릴(thiazolyl), 테트라히드로나프틸 등이 있으나 이에 한정되는 것은 아니다.The aryl group used in the present specification includes a monovalent aromatic group, a heteroaromatic group, and partially reduced derivatives thereof. The aromatic group is a simple or fused ring having 5 to 15 members, and the heteroaromatic group means an aromatic group containing at least one oxygen, sulfur, or nitrogen. Representative examples of aryl groups include, but are not limited to, phenyl, naphthyl, pyridinyl, furanyl, thiophenyl, indolyl, quinolinyl, imidazolinyl, oxazolyl, thiazolyl, and tetrahydronaphthyl.
본 명세서에서 사용되는 산무수물 잔기는 본 발명의 카도계 수지의 합성 중간체와 산무수물을 반응시켜 얻어질 수 있다. 산무수물 잔기를 도입할 수 있는 산무수물은 특별히 한정되지 않으며, 예를 들면, 무수말레인산, 무수숙신산, 무수이타콘산, 무수프탈산, 무수테트라히드로프탈산, 무수헥사히드로프탈산, 무수메틸엔도메틸렌테트라히드로프탈산, 무수클로렌드산, 무수메틸테트라히드로프탈산 등을 들 수 있다. 이들 산무수물은 단독으로 또는 2종 이상 조합하여 사용될 수 있다.The acid anhydride residue used in this specification can be obtained by reacting the synthetic intermediate of the cardo resin of the present invention with an acid anhydride. The acid anhydride capable of introducing the acid anhydride residue is not particularly limited, and examples thereof include maleic anhydride, succinic anhydride, itaconic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, methylendomethylene tetrahydrophthalic anhydride, chlorenedic anhydride, and methyl tetrahydrophthalic anhydride. These acid anhydrides can be used alone or in combination of two or more.
본 명세서에서 사용되는 산2무수물 잔기는 본 발명의 카도계 수지의 합성 중간체와 산2무수물을 반응시켜 얻어질 수 있다. 산2무수물 잔기를 도입할 수 있는 산2무수물은 특별히 한정되지 않으며, 예를 들면, 무수피로멜리트산, 벤조페논테트라카르복실산2무수물, 바이페닐테트라카르복실산2무수물, 바이페닐에테르테트라카르복실산2무수물 등을 들 수 있다. 이들 산2무수물은 단독으로 또는 2종 이상 조합하여 사용될 수 있다.The acid dianhydride residue used in this specification can be obtained by reacting the synthetic intermediate of the cardo resin of the present invention with an acid dianhydride. The acid dianhydride into which the acid dianhydride residue can be introduced is not particularly limited, and examples thereof include pyromellitic anhydride, benzophenone tetracarboxylic dianhydride, biphenyl tetracarboxylic dianhydride, biphenyl ether tetracarboxylic dianhydride, and the like. These acid dianhydrides can be used alone or in combination of two or more.
본 명세서에서 상기 산2무수물은 분자 내에 산무수물기를 2개 포함하는 화합물을 의미한다.In this specification, the acid dianhydride refers to a compound containing two acid anhydride groups in the molecule.
본 발명에 따른 감광성 수지 조성물은 상기 화학식 1 내지 6 중 적어도 하나의 반복 단위를 포함하는 카도계 알칼리 가용성 수지를 포함함으로써 550nm 파장에서 1.60 이상의 고굴절률을 나타내는 패턴을 형성할 수 있고, 저온 경화시에도 패턴 특성이 우수하며, 후공정에서 사용되는 현상액 및/또는 모노머에 대한 내화학성이 뛰어나다.The photosensitive resin composition according to the present invention can form a pattern exhibiting a high refractive index of 1.60 or more at a wavelength of 550 nm by including a cardo-based alkali-soluble resin including at least one repeating unit among the chemical formulas 1 to 6, has excellent pattern characteristics even when cured at low temperatures, and has excellent chemical resistance to a developer and/or monomer used in a post-process.
상기 카도계 알칼리 가용성 수지의 제조방법은 특별히 한정되지 않는다. 예컨대, 상기 카도계 알칼리 가용성 수지는 비스페놀 화합물과 에폭시 화합물을 반응시켜 비스페놀 에폭시 화합물을 합성한 후, 합성된 비스페놀 에폭시 화합물을 아크릴레이트 화합물과 반응시켜 비스페놀 에폭시아크릴레이트 화합물을 합성한 뒤, 비스페놀 에폭시아크릴레이트 화합물을 산무수물, 산2무수물 또는 이들의 혼합물과 반응시켜 제조할 수 있다.The method for producing the above-mentioned cardo-based alkali-soluble resin is not particularly limited. For example, the cardo-based alkali-soluble resin can be produced by reacting a bisphenol compound and an epoxy compound to synthesize a bisphenol epoxy compound, reacting the synthesized bisphenol epoxy compound with an acrylate compound to synthesize a bisphenol epoxy acrylate compound, and then reacting the bisphenol epoxy acrylate compound with an acid anhydride, an acid dianhydride, or a mixture thereof.
상기 카도계 알칼리 가용성 수지는 산가가 20 내지 200(KOH ㎎/g)일 수 있다. 산가가 상기 범위에 있으면, 현상액 중의 용해성이 향상되어, 비-노출부가 쉽게 용해되고 감도가 증가하여, 결과적으로 노출부의 패턴이 현상시에 남아서 잔막율(film remaining ratio)을 개선하게 되어 바람직하다. 여기서 산가란, 중합체 1g을 중화하는 데 필요한 수산화칼륨의 양(mg)으로서 측정되는 값이며, 통상적으로 수산화칼륨 수용액을 사용하여 적정함으로써 구할 수 있다.The above-described cardo-based alkali-soluble resin may have an acid value of 20 to 200 (KOH mg/g). When the acid value is in the above range, the solubility in the developer is improved, so that the non-exposed portion is easily dissolved and the sensitivity is increased, and as a result, the pattern of the exposed portion remains during development, thereby improving the film remaining ratio, which is preferable. Here, the acid value is a value measured as the amount (mg) of potassium hydroxide required to neutralize 1 g of the polymer, and can be typically obtained by titration using a potassium hydroxide aqueous solution.
상기 카도계 알칼리 가용성 수지의 겔 투과 크로마토그래피(GPC; 테트라히드로퓨란을 용출용제로 함)로 측정한 폴리스티렌 환산 중량평균분자량(이하, 간단히 '중량평균분자량'이라고 한다)은 1,000 g/mol 내지 30,000 g/mol인 것이 바람직하다. 중량평균분자량이 상기 범위에 있으면, 비-노출부가 현상액에 용해되는 감도가 증가하며, 열경화 후에 진행되는 후공정에서 우수한 내약품성을 나타낼 수 있어 바람직하다.The polystyrene-converted weight average molecular weight (hereinafter simply referred to as “weight average molecular weight”) measured by gel permeation chromatography (GPC; using tetrahydrofuran as a dissolution solvent) of the above-mentioned cardo-based alkali-soluble resin is preferably 1,000 g/mol to 30,000 g/mol. When the weight average molecular weight is within the above range, the sensitivity of the non-exposed portion to dissolve in a developer increases, and excellent chemical resistance can be exhibited in a post-process performed after thermal curing, which is preferable.
상기 카도계 알칼리 가용성 수지의 분자량 분포[중량평균분자량(Mw)/수평균분자량(Mn)]는 1.0 내지 6.0인 것이 바람직하고, 1.5 내지 6.0인 것이 보다 바람직하다. 분자량분포가 1.5 내지 6.0이면 신뢰성이 우수하기 때문에 바람직하다.The molecular weight distribution [weight average molecular weight (Mw)/number average molecular weight (Mn)] of the above-mentioned cardo-based alkali-soluble resin is preferably 1.0 to 6.0, more preferably 1.5 to 6.0. A molecular weight distribution of 1.5 to 6.0 is preferable because it has excellent reliability.
상기 알칼리 가용성 수지(A)는 감광성 수지 조성물 중 고형분 전체 100 중량%에 대하여 10 내지 70 중량%, 바람직하게는 20 내지 50 중량%의 양으로 포함될 수 있다. 상기 알칼리 가용성 수지의 함량이 10 중량% 미만인 경우에는 비-노출부가 현상액에 용해되는 감도가 저하되어 잔사가 발생할 수 있고, 70 중량% 초과인 경우에는 광경화도가 저하되어 노출부가 현상액에 용해될 수 있다.The alkali-soluble resin (A) may be included in an amount of 10 to 70 wt%, preferably 20 to 50 wt%, based on 100 wt% of the total solid content of the photosensitive resin composition. When the content of the alkali-soluble resin is less than 10 wt%, the sensitivity of the non-exposed portion to be dissolved in the developer may be reduced, resulting in the generation of residues. When the content exceeds 70 wt%, the degree of photocuring may be reduced, resulting in the exposure portion being dissolved in the developer.
본 발명에서 감광성 수지 조성물 중 고형분이란, 용제를 제거한 성분의 합계를 의미한다.In the present invention, the solid content of the photosensitive resin composition means the total amount of components from which the solvent has been removed.
카도계 광중합성 화합물(B)Cardo-type photopolymerizable compound (B)
본 발명의 일 실시형태에서, 상기 카도계 광중합성 화합물(B)은 광 및 후술할 광중합 개시제의 작용으로 중합할 수 있는 카도계 화합물로서, 굴절률을 상승시키는 역할을 한다.In one embodiment of the present invention, the cardo-based photopolymerizable compound (B) is a cardo-based compound that can be polymerized by the action of light and a photopolymerization initiator described below, and serves to increase the refractive index.
상기 카도계 광중합성 화합물은 하기 화학식 7 내지 9 중 어느 하나로 표시되는 화합물을 포함할 수 있다.The above-mentioned cardo-type photopolymerizable compound may include a compound represented by any one of the following chemical formulas 7 to 9.
[화학식 7][Chemical formula 7]
[화학식 8][Chemical formula 8]
[화학식 9][Chemical formula 9]
상기 식에서, In the above formula,
R15 및 R16은 각각 독립적으로 수소 원자, 히드록시기, 티올기, 아미노기, 니트로기, 할로겐 원자, 또는 불포화 이중결합을 갖는 탄소수 2 내지 20의 중합성 작용기이고, R15 또는 R16 중 적어도 하나는 불포화 이중결합을 갖는 탄소수 2 내지 20의 중합성 작용기이다.R15 and R16 are each independently a hydrogen atom, a hydroxyl group, a thiol group, an amino group, a nitro group, a halogen atom, or a polymerizable functional group having 2 to 20 carbon atoms and an unsaturated double bond, and at least one of R15 or R16 is a polymerizable functional group having 2 to 20 carbon atoms and an unsaturated double bond.
본 발명의 일 실시형태에서, R15 및 R16은 각각 독립적으로 수소 원자, 히드록시기, 티올기, 아미노기, 니트로기, 할로겐 원자, 또는 이고, R15 또는 R16 중 적어도 하나는 이며, In one embodiment of the present invention, R15 and R16 are each independently a hydrogen atom, a hydroxyl group, a thiol group, an amino group, a nitro group, a halogen atom, or and at least one of R15 or R16 And,
R17은 C1-C6의 알킬렌기이며, 상기 알킬렌기는 에스테르 결합, C6-C14의 사이클로알킬렌기 및 아릴렌기 중 적어도 하나로 개재되거나 개재되지 않고,R17 is a C 1 -C 6 alkylene group, wherein the alkylene group is or is not interrupted by at least one of an ester bond, a C 6 -C 14 cycloalkylene group, and an arylene group,
R18은 수소 원자 또는 메틸기일 수 있다.R18 can be a hydrogen atom or a methyl group.
구체적으로, 상기 카도계 광중합성 화합물은 하기 화학식 10 내지 14 중 어느 하나로 표시되는 화합물을 포함할 수 있다.Specifically, the above-mentioned cardo-type photopolymerizable compound may include a compound represented by any one of the following chemical formulas 10 to 14.
[화학식 10][Chemical Formula 10]
[화학식 11][Chemical Formula 11]
[화학식 12][Chemical Formula 12]
[화학식 13][Chemical Formula 13]
[화학식 14][Chemical Formula 14]
본 발명의 일 실시형태에서, 상기 카도계 광중합성 화합물은 알칼리 가용성 수지 100 중량부에 대하여 30 내지 70 중량부, 바람직하게는 30 내지 60 중량부의 양으로 포함될 수 있다. 상기 카도계 광중합성 화합물이 알칼리 가용성 수지 100 중량부에 대하여 30 중량부 미만의 양으로 포함되면 굴절률이 향상되지 않을 수 있고, 70 중량부 초과의 양으로 포함되면 비-노출부가 현상액에 용해되는 감도가 저하되어 잔사가 발생할 수 있다.In one embodiment of the present invention, the cardo-type photopolymerizable compound may be included in an amount of 30 to 70 parts by weight, preferably 30 to 60 parts by weight, relative to 100 parts by weight of the alkali-soluble resin. If the cardo-type photopolymerizable compound is included in an amount less than 30 parts by weight relative to 100 parts by weight of the alkali-soluble resin, the refractive index may not be improved, and if it is included in an amount exceeding 70 parts by weight, the sensitivity of the non-exposed portion to be dissolved in a developer may be reduced, resulting in the generation of a residue.
상기 카도계 광중합성 화합물(B)은 감광성 수지 조성물 중 고형분 전체 100 중량%에 대하여 5 내지 50 중량%, 바람직하게는 10 내지 30 중량%로 포함될 수 있다. 상기 카도계 광중합성 화합물의 함량이 5 중량% 미만인 경우에는 굴절률이 향상되지 않을 수 있고, 50 중량% 초과인 경우에는 비-노출부가 현상액에 용해되는 감도가 저하되어 잔사가 발생할 수 있다.The above-mentioned cardo-type photopolymerizable compound (B) may be included in an amount of 5 to 50 wt%, preferably 10 to 30 wt%, based on 100 wt% of the total solid content of the photosensitive resin composition. When the content of the above-mentioned cardo-type photopolymerizable compound is less than 5 wt%, the refractive index may not be improved, and when it exceeds 50 wt%, the sensitivity of the non-exposed portion to be dissolved in the developer may be reduced, resulting in the generation of residue.
다관능 아크릴레이트 광중합성 화합물(C)Multifunctional acrylate photopolymerizable compound (C)
본 발명의 일 실시형태에서, 상기 다관능 아크릴레이트 광중합성 화합물(C)은 광 및 후술할 광중합 개시제의 작용으로 중합할 수 있는 화합물로서, 노광 공정에 의해 중합되어 패턴의 경도, 밀착성 등의 기계적 특성을 향상시키거나, 상기 알칼리 가용성 수지의 현상성을 보완하는 역할을 한다.In one embodiment of the present invention, the multifunctional acrylate photopolymerizable compound (C) is a compound that can be polymerized by the action of light and a photopolymerization initiator to be described later, and is polymerized by an exposure process to improve mechanical properties such as hardness and adhesion of a pattern, or to play a role in supplementing the developability of the alkali-soluble resin.
상기 다관능 아크릴레이트 광중합성 화합물은 분자 내에 2개 이상, 바람직하게는 3개 이상, 더욱 바람직하게는 4개 이상의 (메타)아크릴로일옥시기를 가지는 화합물이다.The above multifunctional acrylate photopolymerizable compound is a compound having two or more, preferably three or more, and more preferably four or more (meth)acryloyloxy groups in the molecule.
상기 다관능 아크릴레이트 광중합성 화합물로는 예를 들어 1,6-헥산디올디(메타) 아크릴레이트, 에틸렌글리콜디(메타)아크릴레이트, 네오펜틸글리콜디(메타) 아크릴레이트, 트리에틸렌글리콜디(메타)아크릴레이트, 비스페놀 A의 비스(아크릴로일옥시에틸)에테르 또는 3-메틸펜탄디올디(메타)아크릴레이트 등의 2관능 아크릴레이트 광중합성 화합물; 트리메틸올프로판트리(메타) 아크릴레이트, 에톡실레이티드트리메틸올프로판트리(메타)아크릴레이트, 프로폭실레이티드트리메틸올프로판트리(메타)아크릴레이트, 펜타에리스리톨트리(메타)아크릴레이트 등의 3관능 아크릴레이트 광중합성 화합물; 디트리메틸올프로판테트라(메타)아크릴레이트, 펜타에리스리톨테트라(메타)아크릴레이트, 에톡시레이티드펜타에리스리톨테트라(메타)아크릴레이트 등의 4관능 아크릴레이트 광중합성 화합물; 디펜타에리스리톨펜타(메타)아크릴레이트 등의 5관능 아크릴레이트 광중합성 화합물; 에톡실레이티드디펜타에리스리톨헥사(메타)아크릴레이트, 프로폭실레이티드디펜타에리스리톨헥사(메타)아크릴레이트 또는 디펜타에리스리톨헥사(메타)아크릴레이트 등의 6관능 아크릴레이트 광중합성 화합물을 들 수 있다.Examples of the above-mentioned multifunctional acrylate photopolymerizable compounds include bifunctional acrylate photopolymerizable compounds such as 1,6-hexanediol di(meth)acrylate, ethylene glycol di(meth)acrylate, neopentyl glycol di(meth)acrylate, triethylene glycol di(meth)acrylate, bis(acryloyloxyethyl)ether of bisphenol A or 3-methylpentanediol di(meth)acrylate; trifunctional acrylate photopolymerizable compounds such as trimethylolpropane tri(meth)acrylate, ethoxylated trimethylolpropane tri(meth)acrylate, propoxylated trimethylolpropane tri(meth)acrylate, and pentaerythritol tri(meth)acrylate. Examples of the photopolymerizable compounds include tetrafunctional acrylate photopolymerizable compounds such as ditrimethylolpropane tetra(meth)acrylate, pentaerythritol tetra(meth)acrylate, and ethoxylated pentaerythritol tetra(meth)acrylate; pentafunctional acrylate photopolymerizable compounds such as dipentaerythritol penta(meth)acrylate; and hexafunctional acrylate photopolymerizable compounds such as ethoxylated dipentaerythritol hexa(meth)acrylate, propoxylated dipentaerythritol hexa(meth)acrylate, and dipentaerythritol hexa(meth)acrylate.
상기에서 예시한 다관능 아크릴레이트 광중합성 화합물은 단독 또는 2종 이상 혼합하여 사용할 수 있다.The multifunctional acrylate photopolymerizable compounds exemplified above can be used alone or in combination of two or more.
본 발명의 일 실시형태에서, 상기 다관능 아크릴레이트 광중합성 화합물은 알칼리 가용성 수지 100 중량부에 대하여 30 내지 120 중량부, 바람직하게는 40 내지 110 중량부의 양으로 포함될 수 있다. 상기 다관능 아크릴레이트 광중합성 화합물이 알칼리 가용성 수지 100 중량부에 대하여 30 중량부 미만의 양으로 포함되면 광경화도가 저하되어 노출부가 현상액에 용해될 수 있고, 120 중량부 초과의 양으로 포함되면 하부 기재에 잔사가 발생하거나, 굴절률이 저하될 수 있다.In one embodiment of the present invention, the multifunctional acrylate photopolymerizable compound may be included in an amount of 30 to 120 parts by weight, preferably 40 to 110 parts by weight, based on 100 parts by weight of the alkali-soluble resin. If the multifunctional acrylate photopolymerizable compound is included in an amount less than 30 parts by weight based on 100 parts by weight of the alkali-soluble resin, the degree of photocuring may be reduced and the exposed portion may be dissolved in the developer, and if it is included in an amount exceeding 120 parts by weight, a residue may be generated on the underlying substrate or the refractive index may be reduced.
상기 다관능 아크릴레이트 광중합성 화합물(C)은 감광성 수지 조성물 중 고형분 전체 100 중량%에 대하여 5 내지 80 중량%, 바람직하게는 10 내지 60 중량%로 포함될 수 있다. 상기 다관능 아크릴레이트 광중합성 화합물의 함량이 5 중량% 미만인 경우에는 광경화도가 저하되어 노출부가 현상액에 용해될 수 있고, 80 중량% 초과인 경우에는 하부 기재에 잔사가 발생하거나, 굴절률이 저하될 수 있다.The above multifunctional acrylate photopolymerizable compound (C) may be included in an amount of 5 to 80 wt%, preferably 10 to 60 wt%, based on 100 wt% of the total solid content of the photosensitive resin composition. When the content of the above multifunctional acrylate photopolymerizable compound is less than 5 wt%, the degree of photocuring may be reduced and the exposed portion may be dissolved in the developer, and when it exceeds 80 wt%, a residue may be generated on the underlying substrate or the refractive index may be reduced.
광중합 개시제(D)Photopolymerization initiator (D)
본 발명의 일 실시형태에서, 상기 광중합 개시제(D)는 카도계 광중합성 화합물(B) 및 다관능 아크릴레이트 광중합성 화합물(C)을 중합시킬 수 있는 것이면 그 종류를 특별히 제한하지 않고 사용할 수 있다. 특히, 상기 광중합 개시제(D)는 중합특성, 개시효율, 흡수파장, 입수성, 가격 등의 관점에서 아세토페논계 화합물, 벤조페논계 화합물, 트리아진계 화합물, 비이미다졸계 화합물, 옥심계 화합물 및 티오크산톤계 화합물로 구성된 군으로부터 선택되는 1종 이상의 화합물을 사용하는 것이 바람직하며, 특히 아세토페논계 화합물이 바람직하다.In one embodiment of the present invention, the photopolymerization initiator (D) can be used without particular limitation as long as it can polymerize the cardo-based photopolymerizable compound (B) and the multifunctional acrylate photopolymerizable compound (C). In particular, the photopolymerization initiator (D) is preferably at least one compound selected from the group consisting of acetophenone-based compounds, benzophenone-based compounds, triazine-based compounds, biimidazole-based compounds, oxime-based compounds, and thioxanthone-based compounds, from the viewpoints of polymerization characteristics, initiation efficiency, absorption wavelength, availability, price, etc., and an acetophenone-based compound is particularly preferable.
상기 아세토페논계 화합물의 구체적인 예로는 디에톡시아세토페논, 2-히드록시-2-메틸-1-페닐프로판-1-온, 벤질디메틸케탈, 2-히드록시-1-[4-(2-히드록시에톡시)페닐]-2-메틸프로판-1-온, 1-히드록시시클로헥실페닐케톤, 2-메틸-1-(4-메틸티오페닐)-2-모르폴리노프로판-1-온, 2-벤질-2-디메틸아미노-1-(4-모르폴리노페닐)부탄-1-온, 2-히드록시-2-메틸-1-[4-(1-메틸비닐)페닐]프로판-1-온, 2-(4-메틸벤질)-2-(디메틸아미노)-1-(4-모르폴리노페닐)부탄-1-온 등을 들 수 있다.Specific examples of the above acetophenone compounds include diethoxyacetophenone, 2-hydroxy-2-methyl-1-phenylpropan-1-one, benzyldimethylketal, 2-hydroxy-1-[4-(2-hydroxyethoxy)phenyl]-2-methylpropan-1-one, 1-hydroxycyclohexylphenyl ketone, 2-methyl-1-(4-methylthiophenyl)-2-morpholinopropan-1-one, 2-benzyl-2-dimethylamino-1-(4-morpholinophenyl)butan-1-one, 2-hydroxy-2-methyl-1-[4-(1-methylvinyl)phenyl]propan-1-one, 2-(4-methylbenzyl)-2-(dimethylamino)-1-(4-morpholinophenyl)butan-1-one, etc.
상기 벤조페논계 화합물로서는, 예를 들면 벤조페논, 0-벤조일벤조산 메틸, 4-페닐벤조페논, 4-벤조일-4'-메틸디페닐술피드, 3,3',4,4'-테트라(tert-부틸퍼옥시카르보닐)벤조페논, 2,4,6-트리메틸벤조페논 등이 있다. Examples of the above benzophenone compounds include benzophenone, 0-benzoylbenzoate methyl, 4-phenylbenzophenone, 4-benzoyl-4'-methyldiphenyl sulfide, 3,3',4,4'-tetra(tert-butylperoxycarbonyl)benzophenone, 2,4,6-trimethylbenzophenone, etc.
상기 트리아진계 화합물의 구체적인 예로는 2,4-비스(트리클로로메틸)-6-(4-메톡시페닐)-1,3,5-트리아진, 2,4-비스(트리클로로메틸)-6-(4-메톡시나프틸)-1,3,5-트리아진, 2,4-비스(트리클로로메틸)-6-피페로닐-1,3,5-트리아진, 2,4-비스(트리클로로메틸)-6-(4-메톡시스티릴)-1,3,5-트리아진, 2,4-비스(트리클로로메틸)-6-[2-(5-메틸퓨란-2-일)에테닐]-1,3,5-트리아진, 2,4-비스(트리클로로메틸)-6-[2-(퓨란-2-일)에테닐]-1,3,5-트리아진, 2,4-비스(트리클로로메틸)-6-[2-(4-디에틸아미노-2-메틸페닐)에테닐]-1,3,5-트리아진, 2,4-비스(트리클로로메틸)-6-[2-(3,4-디메톡시페닐)에테닐]-1,3,5-트리아진 등을 들 수 있다. Specific examples of the above triazine compounds include 2,4-bis(trichloromethyl)-6-(4-methoxyphenyl)-1,3,5-triazine, 2,4-bis(trichloromethyl)-6-(4-methoxynaphthyl)-1,3,5-triazine, 2,4-bis(trichloromethyl)-6-piperonyl-1,3,5-triazine, 2,4-bis(trichloromethyl)-6-(4-methoxystyryl)-1,3,5-triazine, 2,4-bis(trichloromethyl)-6-[2-(5-methylfuran-2-yl)ethenyl]-1,3,5-triazine, 2,4-bis(trichloromethyl)-6-[2-(furan-2-yl)ethenyl]-1,3,5-triazine, Examples thereof include 2,4-bis(trichloromethyl)-6-[2-(4-diethylamino-2-methylphenyl)ethenyl]-1,3,5-triazine, 2,4-bis(trichloromethyl)-6-[2-(3,4-dimethoxyphenyl)ethenyl]-1,3,5-triazine, etc.
상기 비이미다졸계 화합물의 구체적인 예로는 2,2'-비스(2-클로로페닐)-4,4',5,5'-테트라페닐비이미다졸, 2,2'-비스(2,3-디클로로페닐)-4,4',5,5'-테트라페닐비이미다졸, 2,2'-비스(2-클로로페닐)-4,4',5,5'-테트라(알콕시페닐)비이미다졸, 2,2'-비스(2-클로로페닐)-4,4',5,5'-테트라(트리알콕시페닐)비이미다졸, 2,2-비스(2,6-디클로로페닐)-4,4',5,5'-테트라페닐-1,2'-비이미다졸 또는 4,4',5,5' 위치의 페닐기가 카르보알콕시기에 의해 치환되어 있는 비이미다졸 화합물 등을 들 수 있다. 이들 중에서 2,2'-비스(2-클로로페닐)-4,4',5,5'-테트라페닐비이미다졸, 2,2'-비스(2,3-디클로로페닐)-4,4',5,5'-테트라페닐비이미다졸, 2,2-비스(2,6-디클로로페닐)-4,4',5,5'-테트라페닐-1,2'-비이미다졸이 바람직하게 사용된다.Specific examples of the above biimidazole compounds include 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenylbiimidazole, 2,2'-bis(2,3-dichlorophenyl)-4,4',5,5'-tetraphenylbiimidazole, 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetra(alkoxyphenyl)biimidazole, 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetra(trialkoxyphenyl)biimidazole, 2,2-bis(2,6-dichlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-biimidazole, or biimidazole compounds in which the phenyl group at the 4,4',5,5' position is substituted by a carboalkoxy group. Among these, 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenylbiimidazole, 2,2'-bis(2,3-dichlorophenyl)-4,4',5,5'-tetraphenylbiimidazole, and 2,2-bis(2,6-dichlorophenyl)-4,4',5,5'-tetraphenyl-1,2'-biimidazole are preferably used.
상기 옥심계 화합물의 구체적인 예로는 o-에톡시카르보닐-α-옥시이미노-1-페닐프로판-1-온, 1,2-옥타디온,-1-(4-페닐치오)페닐,-2-(o-벤조일옥심), 에타논,-1-(9-에틸)-6-(2-메틸벤조일-3-일)-,1-(o-아세틸옥심) 등을 들 수 있으며, 시판품으로 CGI-124(시바가이기사), CGI-224(시바가이기사), Irgacure OXE-01(BASF사), Irgacure OXE-02(BASF사), N-1919(아데카사), NCI-831(아데카사) 등을 들 수 있다.Specific examples of the above oxime compounds include o-ethoxycarbonyl-α-oxyimino-1-phenylpropan-1-one, 1,2-octadione, -1-(4-phenylthio)phenyl, -2-(o-benzoyloxime), ethanone, -1-(9-ethyl)-6-(2-methylbenzoyl-3-yl)-, 1-(o-acetyloxime), etc. Commercially available products include CGI-124 (Ciba-Geigy), CGI-224 (Ciba-Geigy), Irgacure OXE-01 (BASF), Irgacure OXE-02 (BASF), N-1919 (Adeka), NCI-831 (Adeka), etc.
상기 티오크산톤계 화합물로서는, 예를 들면 2-이소프로필티오크산톤, 2,4-디에틸티오크산톤, 2,4-디클로로티오크산톤, 1-클로로-4-프로폭시티오크산톤 등이 있다.Examples of the above thioxanthone compounds include 2-isopropylthioxanthone, 2,4-diethylthioxanthone, 2,4-dichlorothioxanthone, 1-chloro-4-propoxythioxanthone, etc.
또한, 본 발명의 효과를 손상하지 않는 범위 내에서, 상기 이외의 광중합 개시제 등을 추가로 병용할 수도 있다. 예컨대, 벤조인계 화합물 또는 안트라센계 화합물 등을 들 수 있으며, 이들은 각각 단독 또는 2종 이상을 조합하여 사용할 수 있다.In addition, within a range that does not impair the effects of the present invention, a photopolymerization initiator other than the above may be additionally used in combination. Examples thereof include benzoin compounds or anthracene compounds, and these may be used singly or in combination of two or more.
상기 벤조인계 화합물로는 예를 들면, 벤조인, 벤조인메틸에테르, 벤조인에틸에테르, 벤조인이소프로필에테르 또는 벤조인이소부틸에테르 등이 있다.Examples of the above benzoin compounds include benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, and benzoin isobutyl ether.
상기 안트라센계 화합물로서는, 예를 들면 9,10-디메톡시안트라센, 2-에틸-9,10-디메톡시안트라센, 9,10-디에톡시안트라센 또는 2-에틸-9,10-디에톡시안트라센 등이 있다.Examples of the above anthracene compounds include 9,10-dimethoxyanthracene, 2-ethyl-9,10-dimethoxyanthracene, 9,10-diethoxyanthracene, or 2-ethyl-9,10-diethoxyanthracene.
그 밖에 2,4,6-트리메틸벤조일디페닐포스핀옥시드, 10-부틸-2-클로로아크리돈, 2-에틸안트라퀴논, 9,10-페난트렌퀴논, 캄포퀴논, 페닐클리옥실산 메틸 또는 티타노센 화합물 등을 광중합 개시제로서 추가로 병용하여 사용할 수 있다.In addition, 2,4,6-trimethylbenzoyldiphenylphosphine oxide, 10-butyl-2-chloroacridone, 2-ethylanthraquinone, 9,10-phenanthrenequinone, camphorquinone, methyl phenylchlorooxylate, or titanocene compounds can be additionally used in combination as photopolymerization initiators.
상기 광중합 개시제(D)는 감광성 수지 조성물 중 고형분 전체 100 중량%에 대하여 1 내지 15 중량%, 바람직하게는 3 내지 10 중량%로 포함될 수 있다. 상기 함량 범위는 광중합 속도 및 최종 얻어지는 도막의 물성을 고려한 것으로, 상기 범위 미만이면 중합 속도가 낮아 전체적인 공정 시간이 길어질 수 있으며, 반대로 상기 범위를 초과할 경우 과도한 반응에 의해 가교 반응이 지나쳐 도막의 물성이 오히려 저하될 수 있기 때문에, 상기 범위 내에서 적절히 사용한다.The above photopolymerization initiator (D) may be included in an amount of 1 to 15 wt%, preferably 3 to 10 wt%, based on 100 wt% of the total solid content of the photosensitive resin composition. The above content range takes into consideration the photopolymerization speed and the properties of the final coating film. If it is less than the above range, the polymerization speed may be low, which may lengthen the overall process time. On the other hand, if it exceeds the above range, the crosslinking reaction may be excessive due to excessive reaction, which may deteriorate the properties of the coating film. Therefore, it is appropriately used within the above range.
또한, 광중합 개시제와 함께 광중합 개시 보조제를 사용할 수 있는데, 상기 광중합 개시제와 함께 광중합 개시 보조제를 사용하는 경우 감광성 수지 조성물이 더욱 고감도가 되어 생산성이 향상되므로 바람직하다. 상기 광중합 개시 보조제로는 아민 및 카르복실산 화합물로 이루어진 군으로부터 선택되는 1종 이상의 화합물이 바람직하게 사용될 수 있다.In addition, a photopolymerization initiation assistant may be used together with the photopolymerization initiator. When the photopolymerization initiation assistant is used together with the photopolymerization initiator, the photosensitive resin composition becomes more sensitive, thereby improving productivity, and thus is preferable. As the photopolymerization initiation assistant, at least one compound selected from the group consisting of amine and carboxylic acid compounds may be preferably used.
이러한 광중합 개시 보조제는 광중합 개시제 1 몰당 통상적으로 10 몰 이하, 바람직하게는 0.01 내지 5 몰의 범위 내에서 사용하는 것이 바람직하다. 상기 범위 내에서 광중합 개시 보조제를 사용할 경우 중합 효율을 높여 생산성 향상 효과를 기대할 수 있다.It is preferable to use such photopolymerization initiation assistant in an amount of typically 10 moles or less, preferably 0.01 to 5 moles per mole of photopolymerization initiator. When the photopolymerization initiation assistant is used within the above range, the polymerization efficiency can be increased, and the productivity can be improved.
용제(E)Solvent (E)
본 발명의 일 실시형태에서, 감광성 수지 조성물에 함유되는 용제는 특별히 제한되지 않으며 감광성 수지 조성물의 분야에서 사용되고 있는 각종 유기 용제를 사용할 수 있다. In one embodiment of the present invention, the solvent contained in the photosensitive resin composition is not particularly limited, and various organic solvents used in the field of photosensitive resin compositions can be used.
구체예로서는 에틸렌글리콜모노메틸에테르, 에틸렌글리콜모노에틸에테르, 에틸렌글리콜모노프로필에테르,에틸렌글리콜모노부틸에테르 등의 에틸렌글리콜모노알킬에테르류, 디에틸렌글리콜디메틸에테르, 디에틸렌글리콜디에틸에테르, 디에틸렌글리콜디프로필에테르, 디에틸렌글리콜디부틸에테르 등의 디에틸렌글리콜디알킬에테르류, 메틸셀로솔브아세테이트, 에틸셀로솔브아세테이트 등의 에틸렌글리콜알킬에테르아세테이트류, 프로필렌글리콜모노메틸에테르아세테이트, 프로필렌글리콜모노에틸에테르아세테이트, 프로필렌글리콜모노프로필에테르아세테이트, 메톡시부틸아세테이트 및 메톡시펜틸아세테이트 등의 알킬렌글리콜알킬에테르아세테이트류, 벤젠, 톨루엔, 크실렌, 메시틸렌 등의 방향족 탄화수소류, 메틸에틸케톤, 아세톤, 메틸아밀케톤, 메틸이소부틸케톤, 시클로헥사논등의 케톤류, 에탄올, 프로판올, 부탄올, 헥사놀, 시클로헥산올, 에틸렌글리콜, 글리세린 등의 알코올류, 3-에톡시프로피온산 에틸, 3-메톡시프로피온산 메틸 등의 에스테르류, γ-부티롤락톤 등의 환상 에스테르류 등을 들수 있다. Specific examples thereof include ethylene glycol monoalkyl ethers such as ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monopropyl ether, and ethylene glycol monobutyl ether; diethylene glycol dialkyl ethers such as diethylene glycol dimethyl ether, diethylene glycol diethyl ether, diethylene glycol dipropyl ether, and diethylene glycol dibutyl ether; ethylene glycol alkyl ether acetates such as methyl cellosolve acetate and ethyl cellosolve acetate; alkylene glycol alkyl ether acetates such as propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, propylene glycol monopropyl ether acetate, methoxybutyl acetate, and methoxypentyl acetate; aromatic hydrocarbons such as benzene, toluene, xylene, and mesitylene; methyl ethyl ketone, acetone, methyl amyl ketone, and methyl isobutyl ketone; Examples include ketones such as cyclohexanone, alcohols such as ethanol, propanol, butanol, hexanol, cyclohexanol, ethylene glycol, and glycerin, esters such as ethyl 3-ethoxypropionate and methyl 3-methoxypropionate, and cyclic esters such as γ-butyrolactone.
상기의 용제 중, 도포성, 건조성면에서 바람직하게는 비점이 100℃ 내지 200℃인 유기 용제를 사용할 수 있고, 보다 바람직하게는 알킬렌글리콜알킬에테르아세테이트류, 케톤류, 3-에톡시프로피온산 에틸이나, 3-메톡시프로피온산 메틸 등의 에스테르류를 사용할 수 있으며, 더욱 바람직하게는 프로필렌글리콜모노메틸에테르아세테이트, 프로필렌글리콜모노에틸에테르아세테이트, 시클로헥사논, 3-에톡시프로피온산 에틸, 3-메톡시프로피온산 메틸 등을 사용할 수 있다. 이들 용제는 각각 단독으로 또는 2종 이상 혼합하여 사용할 수 있다.Among the above solvents, in terms of applicability and drying property, it is preferable to use an organic solvent having a boiling point of 100°C to 200°C, more preferably an alkylene glycol alkyl ether acetate, a ketone, an ester such as ethyl 3-ethoxypropionate or methyl 3-methoxypropionate, and even more preferably a propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, cyclohexanone, ethyl 3-ethoxypropionate, methyl 3-methoxypropionate, etc. can be used. These solvents can be used alone or in mixtures of two or more.
상기 용제(E)는 감광성 수지 조성물 전체 100 중량%에 대하여 통상 60 내지 90 중량%, 바람직하게는 70 내지 85 중량%로 포함될 수 있다. 상기 범위를 만족하는 경우, 롤 코터, 스핀 코터, 슬릿 앤드 스핀 코터, 슬릿 코터(다이 코터라고도 하는 경우가 있음), 잉크젯 등의 도포 장치로 도포했을 때 도포성이 양호해지는 경향이 있기 때문에 바람직하다.The above solvent (E) may be included in an amount of usually 60 to 90 wt%, preferably 70 to 85 wt%, based on 100 wt% of the total photosensitive resin composition. When the above range is satisfied, the coating property tends to be improved when applied using a coating device such as a roll coater, a spin coater, a slit and spin coater, a slit coater (sometimes also called a die coater), or an inkjet, which is preferable.
다관능 티올 화합물(F)Multifunctional thiol compound (F)
본 발명의 일 실시형태에 따른 감광성 수지 조성물은 다관능 티올 화합물(F)을 추가로 포함할 수 있다.The photosensitive resin composition according to one embodiment of the present invention may additionally contain a multifunctional thiol compound (F).
상기 다관능 티올 화합물(F)은 경화도를 향상시키고, 패턴의 굴절률을 상승시키는 역할을 하는 성분으로, 분자 내에 2개 이상, 바람직하게는 3개 이상의 티올기를 가지는 화합물이다.The above multifunctional thiol compound (F) is a component that improves the degree of curing and increases the refractive index of the pattern, and is a compound having two or more, preferably three or more, thiol groups in the molecule.
예를 들어, 상기 다관능 티올 화합물은 부탄-1,4-디일 비스(머캅토아세테이트), 에톡시화 펜타에리트리톨 테트라(3-머캅토프로피오네이트), 트리메틸올프로판트리(3-머캅토프로피오네이트), 트리메틸올프로판트리(3-머캅토아세테이트), 글리콜 디-(3-머캅토프로피오네이트), 에톡시화 트리메틸올프로판 트리(3-머캅토프로피오네이트), 글리콜디머캅토 아세테이트, 에톡시화 글리콜디머캅토아세테이트, 1,4-비스(3-머캅토부티릴옥시)부탄, 트리스[2-(3-머캅토프로피오닐옥시)에틸]이소시아누레이트, 1,3,5-트리스(3-머캅토부틸옥시에틸)-1,3,5-트리아진-2,4,6(1H, 3H, 5H)-트리온, 펜타에리트리톨 테트라키스(3-머캅토프로피오네이트), 펜타에리트리톨 테트라키스(3-머캅토부티레이트), 펜타에리트리톨 테트라키스(2-머캅토아세테이트), 디펜타에리트리톨 헥사키스(3-머캅토프로피오네이트), 1,6-헥산디티올, 1,3-프로판디티올, 1,2-에탄디티올, 에틸렌글라이콜 반복 단위를 1 내지 10개 포함하는 폴리에틸렌글라이콜 디티올, 또는 이들의 조합일 수 있다.For example, the above Polyfunctional thiol compounds include butane-1,4-diyl bis(mercaptoacetate), ethoxylated pentaerythritol tetra(3-mercaptopropionate), trimethylolpropane tri(3-mercaptopropionate), trimethylolpropane tri(3-mercaptoacetate), glycol di-(3-mercaptopropionate), ethoxylated trimethylolpropane tri(3-mercaptopropionate), glycol dimercapto acetate, ethoxylated glycol dimercaptoacetate, 1,4-bis(3-mercaptobutyryloxy)butane, tris[2-(3-mercaptopropionyloxy)ethyl]isocyanurate, 1,3,5-tris(3-mercaptobutyloxyethyl)-1,3,5-triazine-2,4,6(1H, 3H, 5H)-trione, It can be pentaerythritol tetrakis(3-mercaptopropionate), pentaerythritol tetrakis(3-mercaptobutyrate), pentaerythritol tetrakis(2-mercaptoacetate), dipentaerythritol hexakis(3-mercaptopropionate), 1,6-hexanedithiol, 1,3-propanedithiol, 1,2-ethanedithiol, polyethyleneglycol dithiol comprising 1 to 10 ethylene glycol repeating units, or a combination thereof.
상기 다관능 티올 화합물(F)은 감광성 수지 조성물 중 고형분 전체 100 중량%에 대하여 20 중량% 이하, 예를 들어 0.5 내지 20 중량%, 바람직하게는 1 내지 10 중량%로 포함될 수 있다. 상기 다관능 티올 화합물의 함량이 20 중량% 초과인 경우에는 비-노출부가 현상액에 현상되지 않을 수 있다.The above multifunctional thiol compound (F) may be included in an amount of 20 wt% or less, for example, 0.5 to 20 wt%, preferably 1 to 10 wt%, based on 100 wt% of the total solid content of the photosensitive resin composition. When the content of the multifunctional thiol compound exceeds 20 wt%, the non-exposed portion may not be developed in a developer.
첨가제(G)Additive (G)
본 발명의 일 실시형태에 따른 감광성 수지 조성물은 상기한 성분들 이외에, 필요에 따라 계면활성제, 밀착 촉진제, 산화 방지제 등의 첨가제를 추가로 포함할 수 있다.The photosensitive resin composition according to one embodiment of the present invention may additionally contain additives such as a surfactant, an adhesion promoter, and an antioxidant, in addition to the above-described components, as necessary.
상기 계면 활성제로서, 예를 들면 폴리옥시에틸렌알킬에테르류, 폴리옥시에틸렌알킬페닐에테르류, 폴리에틸렌글리콜 디에스테르류, 소르비탄 지방산 에스테르류, 지방산 변성 폴리에스테르류, 3급아민 변성 폴리우레탄류, 폴리에틸렌이민류 등이 있으며 이외에, 상품명으로 KP(신에쯔 가가꾸 고교㈜ 제조), 폴리플로우(POLYFLOW)(교에이샤 가가꾸㈜ 제조), 에프톱(EFTOP)(토켐 프로덕츠사 제조), 메가팩(MEGAFAC)(다이닛본 잉크 가가꾸 고교㈜ 제조), 플로라드(Flourad)(스미또모 쓰리엠㈜ 제조), 아사히가드(Asahi guard), 서플론(Surflon)(이상, 아사히글라스㈜ 제조), 솔스퍼스(SOLSPERSE)(제네까㈜ 제조), EFKA(EFKA 케미칼스사 제조), PB 821(아지노모또㈜ 제조), DISPER BYK(BYK사 제조) 등을 들 수 있다.As the above surfactants, for example, polyoxyethylene alkyl ethers, polyoxyethylene alkyl phenyl ethers, polyethylene glycol diesters, sorbitan fatty acid esters, fatty acid-modified polyesters, tertiary amine-modified polyurethanes, polyethylene imines, etc., and in addition, there are trade names such as KP (manufactured by Shin-Etsu Chemical Co., Ltd.), POLYFLOW (manufactured by Kyoeisha Chemical Co., Ltd.), EFTOP (manufactured by Tochem Products Co., Ltd.), MEGAFAC (manufactured by Dainippon Ink & Chemical Co., Ltd.), Flourad (manufactured by Sumitomo 3M Co., Ltd.), Asahi guard, Surflon (all manufactured by Asahi Glass Co., Ltd.), SOLSPERSE (manufactured by Zeneca Co., Ltd.), EFKA (manufactured by EFKA Chemicals Co., Ltd.), PB 821 (manufactured by Ajinomoto Co., Ltd.), and DISPER. Examples include BYK (manufactured by BYK).
상기 밀착 촉진제로서, 예를 들면 비닐트리메톡시실란, 비닐트리에톡시실란, 비닐트리스(2-메톡시에톡시)실란, N-(2-아미노에틸)-3-아미노프로필메틸디메톡시실란, N-(2-아미노에틸)-3-아미노프로필트리메톡시실란, N-(2-아미노에틸)-8-아미노옥틸트리메톡시실란, 3-아미노프로필트리에톡시실란, 3-글리시독시프로필트리메톡시실란, 3-글리시독시프로필메틸디메톡시실란, 2-(3,4-에폭시시클로헥실)에틸트리메톡시실란, 3-클로로프로필메틸디메톡시실란, 3-클로로프로필트리메톡시실란, 3-메타크릴옥시프로필트리메톡시실란, 3-머캅토프로필트리메톡시실란 등을 들 수 있다.Examples of the adhesion promoter include vinyltrimethoxysilane, vinyltriethoxysilane, vinyltris(2-methoxyethoxy)silane, N-(2-aminoethyl)-3-aminopropylmethyldimethoxysilane, N-(2-aminoethyl)-3-aminopropyltrimethoxysilane, N-(2-aminoethyl)-8-aminooctyltrimethoxysilane, 3-aminopropyltriethoxysilane, 3-glycidoxypropyltrimethoxysilane, 3-glycidoxypropylmethyldimethoxysilane, 2-(3,4-epoxycyclohexyl)ethyltrimethoxysilane, 3-chloropropylmethyldimethoxysilane, 3-chloropropyltrimethoxysilane, 3-methacryloxypropyltrimethoxysilane, 3-mercaptopropyltrimethoxysilane, and the like.
산화 방지제로서는 구체적으로 2,2'-티오비스(4-메틸-6-t-부틸페놀), 2,6-디-t-부틸-4-메틸페놀 등을 들 수 있다.Specific examples of antioxidants include 2,2'-thiobis(4-methyl-6-t-butylphenol), 2,6-di-t-butyl-4-methylphenol, etc.
상기 첨가제는 감광성 수지 조성물 중 고형분 전체 100 중량%에 대하여 10 중량% 이하, 예를 들어 0.1 내지 10 중량%, 바람직하게는 0.1 내지 5 중량%로 포함될 수 있으나, 이에 한정되는 것은 아니다.The above additive may be included in an amount of 10 wt% or less, for example, 0.1 to 10 wt%, preferably 0.1 to 5 wt%, based on 100 wt% of the total solid content of the photosensitive resin composition, but is not limited thereto.
본 발명의 일 실시형태에 따른 감광성 수지 조성물은 무기 입자를 포함하지 않을 수 있다. 즉, 본 발명의 일 실시형태에 따른 감광성 수지 조성물은 금속산화물 입자 등의 산란입자, 예를 들면, 유리, 실리카, 알루미나 등의 충진제와 같은 무기 입자를 포함하지 않을 수 있다.The photosensitive resin composition according to one embodiment of the present invention may not contain inorganic particles. That is, the photosensitive resin composition according to one embodiment of the present invention may not contain inorganic particles such as scattering particles such as metal oxide particles, fillers such as glass, silica, alumina, etc.
이에 따라, 본 발명의 일 실시형태에 따른 감광성 수지 조성물은 패턴의 표면 조도(roughness)가 낮아지고, 크랙 발생이 방지되며 플렉서블 화상표시장치에 적용하기에 충분한 내굴곡성을 가질 수 있다.Accordingly, the photosensitive resin composition according to one embodiment of the present invention can have a reduced surface roughness of a pattern, prevent crack occurrence, and have sufficient bending resistance for application to a flexible display device.
본 발명의 일 실시형태는 상술한 감광성 수지 조성물을 이용하여 형성되는 돌출형 패턴에 관한 것이다.One embodiment of the present invention relates to a protruding pattern formed using the photosensitive resin composition described above.
상기 돌출형 패턴은 자발광 장치의 광 추출 효율을 증가시키기 위해 사용되는 마이크로렌즈 어레이에 이용될 수 있다.The above protruding pattern can be utilized in a microlens array used to increase the light extraction efficiency of a self-luminous device.
상기 돌출형 패턴은 반구형, 사다리꼴형, 원뿔형 등의 형태를 가질 수 있다.The above protruding pattern may have a shape such as a hemisphere, trapezoid, or cone.
상기 돌출형 패턴은 기판 상에 상술한 감광성 수지 조성물을 도포하고 소정의 패턴으로 노광 및 현상한 후 포스트베이크를 실시하여 형성될 수 있다.The above-described protruding pattern can be formed by applying the above-described photosensitive resin composition on a substrate, exposing and developing it in a predetermined pattern, and then performing a post-baking.
먼저, 본 발명의 감광성 수지 조성물을 기판에 도포한 후 가열 건조함으로써 용매 등의 휘발 성분을 제거하여 평활한 도막을 얻는다.First, the photosensitive resin composition of the present invention is applied to a substrate and then heated and dried to remove volatile components such as solvents, thereby obtaining a smooth coating film.
도포 방법으로는, 예를 들어 잉크젯 프린팅, 스핀 코트, 유연 도포법, 롤 도포법, 슬릿 앤 스핀 코트 또는 슬릿 코트법 등을 들 수 있다.Application methods include, for example, inkjet printing, spin coating, flexible coating, roll coating, slit and spin coating, or slit coating.
도포 후 가열 건조(프리 베이크) 또는 감압 건조 후에 가열하여 용매 등의 휘발 성분을 휘발시킨다. 이때 가열 온도는 상대적으로 저온인 70 내지 100℃이다.After application, heat drying (pre-bake) or drying under reduced pressure is performed, and then heating is performed to volatilize volatile components such as solvents. The heating temperature at this time is relatively low, at 70 to 100°C.
이렇게 하여 얻어진 도막에, 목적으로 하는 패턴을 형성하기 위한 마스크를 통해 자외선을 조사한다. 이때, 노광부 전체에 균일하게 평행 광선이 조사되고, 또한 마스크와 기판의 정확한 위치 맞춤이 실시되도록, 마스크 얼라이너나 스테퍼 등의 장치를 사용하는 것이 바람직하다. 자외선을 조사하면, 자외선이 조사된 부위의 경화가 이루어진다.The film thus obtained is irradiated with ultraviolet rays through a mask for forming the desired pattern. At this time, it is preferable to use a device such as a mask aligner or a stepper so that parallel rays are irradiated evenly over the entire exposure area and accurate alignment of the mask and substrate is achieved. When irradiated with ultraviolet rays, the area irradiated with ultraviolet rays is cured.
상기 자외선으로는 g선(파장: 436㎚), h선, i선(파장: 365㎚) 등을 사용할 수 있다. 자외선의 조사량은 필요에 따라 적절히 선택될 수 있다. The above ultraviolet rays may be used including g-line (wavelength: 436 nm), h-line, i-line (wavelength: 365 nm), etc. The amount of ultraviolet ray may be appropriately selected as needed.
이후, 경화가 종료된 도막을 현상액에 접촉시켜 비노광부를 용해시켜 현상하는 공정을 수행한다.Afterwards, a process of developing is performed by bringing the cured film into contact with a developer to dissolve the unexposed area.
상기 현상 방법은, 액첨가법, 디핑법, 스프레이법 등의 어느 것이어도 된다. 또한 현상 시에 기판을 임의의 각도로 기울여도 된다.The above developing method may be any of the liquid addition method, dipping method, spraying method, etc. In addition, the substrate may be tilted at any angle during developing.
현상 후 수세하고, 상대적으로 저온인 70 내지 100℃에서 10 내지 60분 동안 포스트베이크를 실시한다.After development, wash and post-bake at a relatively low temperature of 70 to 100°C for 10 to 60 minutes.
본 발명의 일 실시형태는 상술한 돌출형 패턴을 포함하는 화상표시장치에 관한 것이다. 상기 화상표시장치로는 액정표시장치(LCD), 유기발광소자(OLED) 등이 있을 수 있으나 이에 한정되는 것은 아니며, 적용이 가능한 당해 기술분야에 알려진 모든 화상표시장치를 포함할 수 있다. 특히, 상기 화상표시장치는 플렉서블 디스플레이일 수 있다.One embodiment of the present invention relates to an image display device including the above-described protruding pattern. The image display device may include, but is not limited to, a liquid crystal display (LCD), an organic light emitting diode (OLED), and the like, and may include any image display device known in the relevant technical field to which the image display device is applicable. In particular, the image display device may be a flexible display.
이하, 실시예, 비교예 및 실험예에 의해 본 발명을 보다 구체적으로 설명하고자 한다. 이들 실시예, 비교예 및 실험예는 오직 본 발명을 설명하기 위한 것으로, 본 발명의 범위가 이들에 국한되지 않는다는 것은 당업자에게 있어서 자명하다.Hereinafter, the present invention will be described in more detail by examples, comparative examples, and experimental examples. These examples, comparative examples, and experimental examples are only for explaining the present invention, and it is obvious to those skilled in the art that the scope of the present invention is not limited thereto.
합성예 1: 카도계 알칼리 가용성 수지(A-1)Synthesis Example 1: Cardo-based alkali-soluble resin (A-1)
반응기에 비스페놀 에폭시 화합물인 9,9'-비스(4-글리시딜옥시페닐)플루오렌(Hear chem社) 138g, 2-카복시에틸 아크릴레이트(2-carboxyethyl acrylate) 54g, 벤질트리에틸암모늄클로라이드(대정화금社) 1.4g, 트리페닐포스핀(Aldrich社) 1g, 프로필렌글리콜 메틸에틸아세테이트(Daicel Chemical社) 128g, 및 하이드로퀴논 0.5g을 넣고 120℃로 승온 후 12시간 유지하여, 하기 화학식 11로 표시되는 화합물을 합성하였다.In a reactor, 138 g of 9,9'-bis(4-glycidyloxyphenyl)fluorene, a bisphenol epoxy compound (Hear Chem), 54 g of 2-carboxyethyl acrylate, 1.4 g of benzyltriethylammonium chloride (Daejung Chemicals), 1 g of triphenylphosphine (Aldrich), 128 g of propylene glycol methyl ethyl acetate (Daicel Chemical), and 0.5 g of hydroquinone were placed, the temperature was increased to 120°C, and maintained for 12 hours to synthesize a compound represented by the following chemical formula 11.
반응기에 상기 화학식 11로 표시되는 화합물 60g, 비페닐테트라카르복실산 디무수물(Mitsubishi Gas社) 11g, 테트라히드로프탈 무수물(Aldrich社) 3g, 프로필렌글리콜 메틸에틸아세테이트(Daicel Chemical社) 20g, 및 N,N'-테트라메틸암모늄 클로라이드 0.1g을 넣고 120℃로 승온 후 2시간 유지하여, 하기 화학식 15로 표시되는 수지를 합성하였다. 얻어진 수지의 중량평균분자량은 5,400 g/mol이었다.60 g of the compound represented by the chemical formula 11, 11 g of biphenyltetracarboxylic acid di-anhydride (Mitsubishi Gas Co.), 3 g of tetrahydrophthalic anhydride (Aldrich Co.), 20 g of propylene glycol methyl ethyl acetate (Daicel Chemical Co.), and 0.1 g of N,N'-tetramethylammonium chloride were placed in a reactor, the temperature was increased to 120°C, and maintained for 2 hours to synthesize a resin represented by the chemical formula 15 below. The weight average molecular weight of the obtained resin was 5,400 g/mol.
[화학식 11][Chemical Formula 11]
[화학식 15][Chemical Formula 15]
합성예 2: 카도계 알칼리 가용성 수지(A-2)Synthesis Example 2: Cardo-based alkali-soluble resin (A-2)
반응기에 비스페놀 에폭시 화합물인 9,9'-비스(4-글리시딜옥시페닐)플루오렌(Hear chem社) 138g, 모노-2-아크릴로일옥시에틸 숙시네이트(mono-2-acryloyloxyethyl succinate) 54g, 벤질트리에틸암모늄클로라이드(대정화금社) 1.4g, 트리페닐포스핀(Aldrich社) 1g, 프로필글리콜메틸에틸아세테이트(Daicel Chemical社) 128g, 및 하이드로퀴논 0.5g을 넣고 120℃로 승온 후 12시간 유지하여, 하기 화학식 12로 표시되는 화합물을 합성하였다.In a reactor, 138 g of 9,9'-bis(4-glycidyloxyphenyl)fluorene, a bisphenol epoxy compound (Hear Chem), 54 g of mono-2-acryloyloxyethyl succinate, 1.4 g of benzyltriethylammonium chloride (Daejung Chemicals), 1 g of triphenylphosphine (Aldrich), 128 g of propylglycolmethylethylacetate (Daicel Chemical), and 0.5 g of hydroquinone were placed, the temperature was increased to 120°C, and maintained for 12 hours to synthesize a compound represented by the following chemical formula 12.
반응기에 상기 화학식 12로 표시되는 화합물 60g, 비페닐테트라카르복실산 디무수물(Mitsubishi Gas社) 11g, 테트라히드로프탈 무수물(Aldrich社) 3g, 프로필글리콜메틸에틸아세테이트(Daicel Chemical社) 20g, 및 N,N'-테트라메틸암모늄 클로라이트 0.1g을 넣고 120℃로 승온 후 2시간 유지하여, 하기 화학식 16으로 표시되는 수지를 합성하였다. 얻어진 수지의 중량평균분자량은 5,400 g/mol이었다.In a reactor, 60 g of the compound represented by the chemical formula 12, 11 g of biphenyltetracarboxylic acid di-anhydride (Mitsubishi Gas Co.), 3 g of tetrahydrophthalic anhydride (Aldrich Co.), 20 g of propyl glycol methyl ethyl acetate (Daicel Chemical Co.), and 0.1 g of N,N'-tetramethylammonium chlorite were placed, the temperature was raised to 120°C, and maintained for 2 hours to synthesize a resin represented by the chemical formula 16 below. The weight average molecular weight of the obtained resin was 5,400 g/mol.
[화학식 12][Chemical Formula 12]
[화학식 16][Chemical Formula 16]
합성예 3: 카도계 알칼리 가용성 수지(A-3)Synthesis Example 3: Cardo-based alkali-soluble resin (A-3)
3000ml 삼구 라운드 플라스크에 3',6'-디하이드록시스피로(플루오렌-9,9-잔텐)(3′,6′-dihydroxyspiro(fluorene-9,9-xanthene) 364.4g과 t-부틸암모늄 브로마이드 0.4159g을 혼합하고, 에피클로로히드린 2359g을 넣고 90℃로 가열하여 반응시켰다. 액체크로마토그래피로 분석하여 3',6'-디하이드록시스피로(플루오렌-9,9-잔텐)이 완전히 소진되면 30℃로 냉각하여 50% NaOH 수용액(3당량)을 천천히 첨가하였다. 액체 크로마토그래피로 분석하여 에피클로로히드린이 완전히 소진되었으면, 디클로로메탄으로 추출한 후 3회 수세한 다음 유기층을 황산마그네슘으로 건조시킨 후 디클로로메탄을 감압 증류하고 디클로로메탄과 메탄올의 혼합용매(50:50, v/v)를 사용하여 재결정하였다.In a 3000 ml three-necked round bottom flask, 3',6'-dihydroxyspiro(fluorene-9,9-xanthene) (364.4 g) and t-butylammonium bromide (0.4159 g) were mixed, 2359 g of epichlorohydrin was added, and the mixture was heated to 90°C for reaction. When 3',6'-dihydroxyspiro(fluorene-9,9-xanthene) was completely consumed as analyzed by liquid chromatography, the mixture was cooled to 30°C, and 50% NaOH aqueous solution (3 equivalents) was slowly added. When epichlorohydrin was completely consumed as analyzed by liquid chromatography, the mixture was extracted with dichloromethane, washed three times, and the organic layer was dried over magnesium sulfate. Dichloromethane was distilled under reduced pressure, and dichloromethane and Recrystallization was performed using a mixed solvent of methanol (50:50, v/v).
이렇게 합성된 에폭시 화합물 1당량과 t-부틸암모늄 브로마이드 0.004당량, 2,6-디이소부틸페놀 0.001당량, 아크릴산 2.2당량을 혼합한 후 용매 프로필렌글리콜모노메틸에테르아세테이트 24.89g을 넣어 혼합하였다. 이 반응 용액에 공기를 25ml/min으로 불어넣으면서 온도를 90~100℃로 가열 용해하였다. 반응 용액이 백탁한 상태에서 온도를 120℃까지 가열하여 완전히 용해시켰다. 용액이 투명해지고 점도가 높아지면 산가를 측정하여 산가가 1.0mgKOH/g 미만이 될 때까지 교반하였다. 산가가 목표(0.8)에 이를 때까지 11시간이 필요했다. 반응 종결 후 반응기의 온도를 실온으로 내려 무색 투명한 하기 화학식 13의 화합물을 얻었다.After mixing 1 equivalent of the synthesized epoxy compound, 0.004 equivalent of t-butylammonium bromide, 0.001 equivalent of 2,6-diisobutylphenol, and 2.2 equivalents of acrylic acid, 24.89 g of the solvent propylene glycol monomethyl ether acetate was added and mixed. The reaction solution was heated to 90 to 100°C and dissolved while blowing air at 25 ml/min. While the reaction solution was cloudy, the temperature was heated to 120°C and completely dissolved. When the solution became transparent and the viscosity increased, the acid value was measured and stirred until the acid value was less than 1.0 mgKOH/g. It took 11 hours for the acid value to reach the target (0.8). After the reaction was completed, the temperature of the reactor was lowered to room temperature to obtain a colorless and transparent compound of the following chemical formula 13.
[화학식 13][Chemical Formula 13]
상기 화학식 13의 화합물 307.0g에 프로필렌글리콜모노메틸에테르아세테이트 600g을 첨가하여 용해한 후, 비페닐테트라카르복실산 2무수물 78g 및 브롬화테트라에틸암모늄 1g을 혼합하고 서서히 승온시켜 110∼115℃에서 4시간 동안 반응시켰다. 산 무수물기의 소실을 확인한 후, 1,2,3,6-테트라히드로무수프탈산 38.0g을 혼합하여 90℃에서 6시간 동안 반응시켜 수지를 얻었다. 무수물의 소실은 IR 스펙트럼에 의해 확인하였다.To 307.0 g of the compound of the above chemical formula 13, 600 g of propylene glycol monomethyl ether acetate was added and dissolved, and then 78 g of biphenyl tetracarboxylic dianhydride and 1 g of tetraethylammonium bromide were mixed and the temperature was gradually increased to react at 110-115°C for 4 hours. After confirming the disappearance of the acid anhydride group, 38.0 g of 1,2,3,6-tetrahydrophthalic anhydride was mixed and reacted at 90°C for 6 hours to obtain a resin. The disappearance of the anhydride was confirmed by IR spectrum.
합성예 4: 카도계 알칼리 가용성 수지(A-4)Synthesis Example 4: Cardo-based alkali-soluble resin (A-4)
3000ml 삼구 라운드 플라스크에 4,4′-(9H-잔텐-9,9-디일)디페놀 (4,4′-(9H-xanthene-9,9-diyl)diphenol) 364.4g과 t-부틸암모늄 브로마이드 0.4159g을 혼합하고, 에피클로로히드린 2359g을 넣고 90℃로 가열하여 반응시켰다. 액체크로마토그래피로 분석하여 4,4′-(9H-잔텐-9,9-디일)디페놀 (4,4′-(9H-xanthene-9,9-diyl)diphenol)이 완전히 소진되면 30℃로 냉각하여 50% NaOH 수용액(3당량)을 천천히 첨가하였다. 액체 크로마토그래피로 분석하여 에피클로로히드린이 완전히 소진되었으면, 디클로로메탄으로 추출한 후 3회 수세한 후 유기층을 황산마그네슘으로 건조시킨 후 디클로로메탄을 감압 증류하고 디클로로메탄과 메탄올의 혼합용매(50:50, v/v)를 사용하여 재결정하였다.In a 3000-mL three-necked round bottom flask, 364.4 g of 4,4′-(9H-xanthene-9,9-diyl)diphenol and 0.4159 g of t-butylammonium bromide were mixed, 2359 g of epichlorohydrin was added, and the mixture was heated to 90°C to react. After analysis by liquid chromatography of 4,4′-(9H-xanthene-9,9-diyl)diphenol, the mixture was cooled to 30°C and 50% NaOH aqueous solution (3 equivalents) was slowly added. When the epichlorohydrin was completely consumed as analyzed by liquid chromatography, the mixture was extracted with dichloromethane, washed three times, dried the organic layer over magnesium sulfate, distilled off dichloromethane under reduced pressure, and recrystallized using a mixed solvent of dichloromethane and methanol (50:50, v/v).
이렇게 합성된 에폭시 화합물 1당량과 t-부틸암모늄 브로마이드 0.004당량, 2,6-디이소부틸페놀 0.001당량, 아크릴산 2.2당량을 혼합한 후 용매 프로필렌글리콜모노메틸에테르아세테이트 24.89g을 넣어 혼합하였다. 이 반응 용액에 공기를 25ml/min으로 불어넣으면서 온도를 90~100℃로 가열 용해하였다. 반응 용액이 백탁한 상태에서 온도를 120℃까지 가열하여 완전히 용해시켰다. 용액이 투명해지고 점도가 높아지면 산가를 측정하여 산가가 1.0mgKOH/g 미만이 될 때까지 교반하였다. 산가가 목표(0.8)에 이를 때까지 11시간이 필요했다. 반응 종결 후 반응기의 온도를 실온으로 내려 무색 투명한 하기 화학식 14의 화합물을 얻었다.After mixing 1 equivalent of the synthesized epoxy compound, 0.004 equivalent of t-butylammonium bromide, 0.001 equivalent of 2,6-diisobutylphenol, and 2.2 equivalents of acrylic acid, 24.89 g of the solvent propylene glycol monomethyl ether acetate was added and mixed. The reaction solution was heated to 90 to 100°C and dissolved while blowing air at 25 ml/min. While the reaction solution was cloudy, the temperature was heated to 120°C and completely dissolved. When the solution became transparent and the viscosity increased, the acid value was measured and stirred until the acid value was less than 1.0 mgKOH/g. It took 11 hours for the acid value to reach the target (0.8). After the reaction was completed, the temperature of the reactor was lowered to room temperature to obtain a colorless and transparent compound of the following chemical formula 14.
[화학식 14][Chemical Formula 14]
상기 화학식 14의 화합물 307.0g에 프로필렌글리콜모노메틸에테르아세테이트 600g을 첨가하여 용해한 후, 비페닐테트라카르복실산 2무수물 78g 및 브롬화테트라에틸암모늄 1g을 혼합하고 서서히 승온시켜 110∼115℃에서 4시간 동안 반응시켰다. 산 무수물기의 소실을 확인한 후, 1,2,3,6-테트라히드로무수프탈산 38.0g을 혼합하여 90℃에서 6시간 동안 반응시켜 수지를 얻었다. 무수물의 소실은 IR 스펙트럼에 의해 확인하였다.To 307.0 g of the compound of the above chemical formula 14, 600 g of propylene glycol monomethyl ether acetate was added and dissolved, and then 78 g of biphenyl tetracarboxylic dianhydride and 1 g of tetraethylammonium bromide were mixed and the temperature was gradually increased to react at 110-115°C for 4 hours. After confirming the disappearance of the acid anhydride group, 38.0 g of 1,2,3,6-tetrahydrophthalic anhydride was mixed and reacted at 90°C for 6 hours to obtain a resin. The disappearance of the anhydride was confirmed by IR spectrum.
합성예 5: 카도계 알칼리 가용성 수지(A-5)Synthesis Example 5: Cardo-based alkali-soluble resin (A-5)
1 단계Step 1
[반응식 1][Reaction Formula 1]
3구 플라스크에 환류 냉각기와 온도계를 설치한 후, 9,9-비스페놀플루오렌(9,9-Bisphenolfluorene) 42.5g를 넣고 2-(클로로메틸)옥시란(2-(chloromethyl)oxirane) 220mL를 정량한 후 주입하였다. 테트라부틸암모늄 브로마이드(Tetrabutylammonium bromide) 100mg을 넣은 후, 교반을 시작하면서 온도를 90℃로 승온하였다. 미반응물 함량이 0.3% 미만임을 확인 후 감압증류하였다.After installing a reflux condenser and a thermometer in a three-necked flask, 42.5 g of 9,9-bisphenolfluorene was added and 220 mL of 2-(chloromethyl)oxirane was measured and injected. After adding 100 mg of tetrabutylammonium bromide, stirring was started and the temperature was increased to 90°C. After confirming that the unreacted material content was less than 0.3%, distillation was performed under reduced pressure.
온도를 30℃로 낮춘 후, 디클로로메탄(dichloromethane)을 주입하고, NaOH를 서서히 투입하였다. 생성물이 96% 이상인 것을 고성능액체크로마토그래피(HPLC) 방법으로 확인한 후 5% HCl를 적하하여 반응을 종결하였다. 반응물은 추출하여 층분리한 후, 유기층을 물로 씻어주고 중성이 되도록 세척하였다. 유기층은 MgSO4로 건조한 후 회전증발기로 감압 증류하여 농축하였다. 농축된 생성물에 디클로로메테인(dichloromethane)을 넣고 40℃까지 온도를 올리면서 교반하면서 메탄올(methanol)를 투입한 후 용액온도를 낮추고 교반하였다. 생성된 고체를 여과한 후, 상온에서 진공 건조하여 흰색 고체 분말 52.7g(수율 94%)을 얻었다. 이에 대한 구조는 1H NMR로 확인하였다. After lowering the temperature to 30℃, dichloromethane was injected and NaOH was slowly added. After confirming that the product was 96% or higher by high-performance liquid chromatography (HPLC), 5% HCl was added dropwise to terminate the reaction. The reactant was extracted and separated into layers, and the organic layer was washed with water and washed until neutral. The organic layer was dried over MgSO 4 and concentrated by vacuum distillation using a rotary evaporator. Dichloromethane was added to the concentrated product, and methanol was added while raising the temperature to 40℃ and stirring, then the solution temperature was lowered and stirred. The generated solid was filtered and dried in vacuum at room temperature to obtain 52.7 g (yield 94%) of a white solid powder. Its structure was confirmed by 1 H NMR.
1H NMR in CDCl3: 7.75 (2H), 7.35-7.254(6H), 7.08 (4H), 6.74 (4H), 4.13 (2H), 3.89 (2H), 3.30 (2H), 2.87 (2H), 2.71 (2H). 1H NMR in CDCl 3 : 7.75 (2H), 7.35-7.254(6H), 7.08 (4H), 6.74 (4H), 4.13 (2H), 3.89 (2H), 3.30 (2H), 2.87 (2H), 2.71 (2H).
2 단계Step 2
[반응식 2][Reaction Formula 2]
3구 플라스크에 환류 냉각기와 온도계를 설치한 후 상기 1 단계 반응물 (1000g), 티오페놀(thiophenol) 524g, 에탄올 617g을 넣고 교반하였다. 반응 용액에 트리에틸아민(triethylamine) 328g을 천천히 적가하였다. 고성능액체크로마토그래피(HPLC) 방법으로 출발물질이 사라진 것을 확인한 후, 반응을 종료하였다. 반응 완료 후, 에탄올을 감압증류하여 제거하였다. 유기물을 디클로로메테인(dichloromethane)에 녹인 후 물로 세척한 후 디클로로메테인(dichloromethane)을 감압증류를 통해 제거하였다. 농축된 유기물은 에틸 아세테이트(ethyl acetate)에 녹인 후 에테르 용매를 적가하고 30분 동안 교반하였다. 화합물을 감압증류하여 옅은 노란색 오일(pale yellow oil) 945 g (수율 64%)을 얻었다. 이의 구조는 1H NMR로 확인하였다.After installing a reflux condenser and a thermometer in a three-necked flask, the reactant of step 1 (1000 g), 524 g of thiophenol, and 617 g of ethanol were added and stirred. 328 g of triethylamine was slowly added dropwise to the reaction solution. After confirming that the starting material had disappeared by high-performance liquid chromatography (HPLC), the reaction was terminated. After completion of the reaction, ethanol was removed by distillation under reduced pressure. The organic matter was dissolved in dichloromethane, washed with water, and then dichloromethane was removed by distillation under reduced pressure. The concentrated organic matter was dissolved in ethyl acetate, and ether solvent was added dropwise and stirred for 30 minutes. The compound was distilled under reduced pressure to obtain 945 g (yield 64%) of pale yellow oil. Its structure was confirmed by 1 H NMR.
1H NMR in CDCl3: 7.82 (2H), 7.38-6.72 (20H), 6.51 (4H), 4.00 (2H), 3.97 (2H), 3.89 (2H), 3.20 (2H), 3.01 (2H), 2.64 (2H). 1H NMR in CDCl 3 : 7.82 (2H), 7.38-6.72 (20H), 6.51 (4H), 4.00 (2H), 3.97 (2H), 3.89 (2H), 3.20 (2H), 3.01 (2H), 2.64 (2H).
3 단계Step 3
3구 플라스크에 환류 냉각기와 온도계를 설치한 후, 50% PGMEA 용매에 녹아있는 상기 2 단계에서 합성한 3,3'-(((9H-플루오렌-9,9-디일)비스(4,1-페닐렌))비스(옥시))비스(1-페닐티오)프로판-2-올)(3,3'-(((9H-fluorene-9,9-diyl)bis(4,1-phenylene))bis(oxy))bis(1-(phenylthio)propan-2-ol)) 모노머 200g을 넣고 115℃까지 승온시켰다. 115℃에서 3,3,'4,4'-비페닐테트라카복실릭 디안하이드리드(3,3',4,4'-Biphenyltetracarboxylic dianhydride) 31.1g을 적하한 후, 6시간 동안 115℃를 유지하면서 교반시켰다. 프탈릭 안하이드리드(Phthalic anhydride) 7.35g를 넣고 2시간 더 교반한 후, 반응을 종료하였다. 냉각 후 중량평균분자량이 3,500 g/mol인 수지를 얻었다.After installing a reflux condenser and a thermometer in a three-necked flask, 200 g of 3,3'-(((9H-fluorene-9,9-diyl)bis(4,1-phenylene))bis(oxy))bis(1-phenylthio)propan-2-ol) monomer synthesized in the above step 2 dissolved in 50% PGMEA solvent was added and the temperature was increased to 115°C. At 115°C, 31.1 g of 3,3',4,4'-biphenyltetracarboxylic dianhydride was added dropwise, and the mixture was stirred while maintaining 115°C for 6 hours. After adding 7.35 g of phthalic anhydride and stirring for 2 more hours, the reaction was terminated. After cooling, a resin having a weight-average molecular weight of 3,500 g/mol was obtained.
합성예 6: 카도계 알칼리 가용성 수지(A-6)Synthesis Example 6: Cardo-based alkali-soluble resin (A-6)
3구 플라스크에 환류 냉각기와 온도계를 설치한 후, 50% PGMEA 용매에 녹아있는 합성예 5의 2단계에서 합성한 3,3'-(((9H-플루오렌-9,9-디일)비스(4,1-페닐렌))비스(옥시))비스(1-(페닐티오)프로판-2-올)(3,3'-(((9H-fluorene-9,9-diyl)bis(4,1-phenylene))bis(oxy))bis(1-(phenylthio)propan-2-ol)) 모노머 200g을 넣고 115℃까지 승온시켰다. 115℃에서 피로멜리틱 디안하이드리드(Pyromellitic dianhydride) 21.1g를 적하한 후 6 시간동안 115℃를 유지하면서 교반시켰다. 프탈릭 안하이드리드(Phthalic anhydride) 7.35g를 넣고 2시간 더 교반한 후 반응을 종료하였다. 냉각 후 중량평균 분자량이 4,500 g/mol인 수지를 얻었다. After installing a reflux condenser and a thermometer in a three-necked flask, 200 g of 3,3'-(((9H-fluorene-9,9-diyl)bis(4,1-phenylene))bis(oxy))bis(1-(phenylthio)propan-2-ol)) monomer synthesized in step 2 of Synthesis Example 5 dissolved in 50% PGMEA solvent was added and the temperature was increased to 115°C. At 115°C, 21.1 g of pyromellitic dianhydride was added dropwise, and the mixture was stirred while maintaining 115°C for 6 hours. After adding 7.35 g of phthalic anhydride and stirring for 2 more hours, the reaction was terminated. After cooling, a resin having a weight-average molecular weight of 4,500 g/mol was obtained.
합성예 7: 아크릴계 알칼리 가용성 수지(A-7)Synthesis Example 7: Acrylic alkali-soluble resin (A-7)
환류 냉각기와 온도계 및 적하 로트 및 질소 도입관을 구비한 3구 플라스크에 프로필렌글리콜모노메틸에테르 아세테이트 100 중량부, 프로필렌글리콜모노메틸에테르 100 중량부, AIBN 5 중량부, 비닐 톨루엔 23.0 중량부, 4-메틸스티렌 1.6 중량부, 글리시딜메타크릴레이트 46.0 중량부, n-도데실머캅토 3 중량부를 투입하고 질소 치환하였다. 그 후 교반하며 반응액의 온도를 80℃로 상승시키고 4시간 반응하였다. 이어서, 반응액의 온도를 상온으로 내리고 플라스크 분위기를 질소에서 공기로 치환한 후 트리에틸아민 0.2 중량부, 4-메톡시 페놀 0.1 중량부, 아크릴산 23.3 중량부를 투입하고 100℃에서 6시간 반응하였다. 이후 반응액의 온도를 상온으로 내리고 숙신산 무수물 6.0 중량부를 투입하고 80℃에서 6시간 반응하였다.In a three-necked flask equipped with a reflux condenser, a thermometer, a dropping lot, and a nitrogen inlet tube, 100 parts by weight of propylene glycol monomethyl ether acetate, 100 parts by weight of propylene glycol monomethyl ether, 5 parts by weight of AIBN, 23.0 parts by weight of vinyl toluene, 1.6 parts by weight of 4-methylstyrene, 46.0 parts by weight of glycidyl methacrylate, and 3 parts by weight of n-dodecyl mercapto were charged and replaced with nitrogen. Thereafter, the temperature of the reaction solution was increased to 80°C with stirring and the reaction was performed for 4 hours. Subsequently, the temperature of the reaction solution was lowered to room temperature, and the flask atmosphere was replaced from nitrogen to air, after which 0.2 parts by weight of triethylamine, 0.1 parts by weight of 4-methoxy phenol, and 23.3 parts by weight of acrylic acid were charged and the reaction was performed at 100°C for 6 hours. Afterwards, the temperature of the reaction solution was lowered to room temperature, 6.0 parts by weight of succinic anhydride was added, and the reaction was performed at 80°C for 6 hours.
이렇게 합성된 알칼리 가용성 수지의 중량평균분자량이 3,350 g/mol이었다.The weight average molecular weight of the alkali-soluble resin synthesized in this way was 3,350 g/mol.
합성예 8: 아크릴계 알칼리 가용성 수지(A-8)Synthesis Example 8: Acrylic alkali-soluble resin (A-8)
환류 냉각기와 온도계 및 적하 로트 및 질소 도입관을 구비한 3구 플라스크에 프로필렌글리콜모노메틸에테르 아세테이트 120 중량부, 프로필렌글리콜모노메틸에테르 80 중량부, AIBN 2 중량부, 아크릴산 13.0 중량부, 벤질메타아크릴레이트 10 중량부, 4-메틸스티렌 57.0 중량부, 메틸메타아크릴레이트 20 중량부, n-도데실머캅토 3 중량부를 투입하고 질소 치환하였다. 그 후 교반하며 반응액의 온도를 80℃로 상승시키고 8시간 반응하였다. In a three-necked flask equipped with a reflux condenser, a thermometer, a dropping lot, and a nitrogen inlet tube, 120 parts by weight of propylene glycol monomethyl ether acetate, 80 parts by weight of propylene glycol monomethyl ether, 2 parts by weight of AIBN, 13.0 parts by weight of acrylic acid, 10 parts by weight of benzyl methacrylate, 57.0 parts by weight of 4-methylstyrene, 20 parts by weight of methyl methacrylate, and 3 parts by weight of n-dodecyl mercapto were charged and replaced with nitrogen. Thereafter, the temperature of the reaction solution was raised to 80°C with stirring and the reaction was performed for 8 hours.
이렇게 합성된 알칼리 가용성 수지의 중량평균분자량이 14,950 g/mol이었다.The weight average molecular weight of the alkali-soluble resin thus synthesized was 14,950 g/mol.
합성예 9: 아크릴계 알칼리 가용성 수지(A-9)Synthesis Example 9: Acrylic alkali-soluble resin (A-9)
환류 냉각기와 온도계 및 적하 로트 및 질소 도입관을 구비한 3구 플라스크 내에 질소를 0.02L/분으로 흐르게 하여 질소 분위기로 하고, 디에틸렌글리콜 메틸에틸에테르 150g을 넣고 교반하면서 70℃까지 가열하였다. 이어서, 하기 화학식 17로 표시되는 화합물 132.2g(0.60mol), 3-에틸-3-옥세타닐 메타크릴레이트 55.3g(0.30mol) 및 메타크릴산 8.6g(0.10mol)을 디에틸렌글리콜 메틸에틸에테르 150g에 용해하여 용액을 조제하였다. 제조된 용액을, 적하 깔대기를 사용하여 플라스크 내에 적하한 후, 중합 개시제 2,2'-아조비스(2,4-디메틸발레로니트릴) 27.9g(0.11mol)을 디에틸렌글리콜 메틸에틸에테르 200g에 용해한 용액을, 별도의 적하 깔대기를 사용하여 4 시간에 걸쳐 플라스크 내에 적하하였다. 중합 개시제의 용액의 적하가 종료된 후, 4 시간 동안 70℃로 유지하고, 그 후 실온까지 냉각시켰다. 이렇게 합성된 알칼리 가용성 수지의 중량평균분자량이 4,700g/mol이었다.A three-necked flask equipped with a reflux condenser, a thermometer, a dropping lot, and a nitrogen inlet tube was made into a nitrogen atmosphere by flowing nitrogen at a rate of 0.02 L/min, 150 g of diethylene glycol methyl ethyl ether was added, and heated to 70°C with stirring. Then, 132.2 g (0.60 mol) of a compound represented by the following chemical formula 17, 55.3 g (0.30 mol) of 3-ethyl-3-oxetanyl methacrylate, and 8.6 g (0.10 mol) of methacrylic acid were dissolved in 150 g of diethylene glycol methyl ethyl ether to prepare a solution. The prepared solution was dropped into a flask using a dropping funnel, and then a solution of 27.9 g (0.11 mol) of the polymerization initiator 2,2'-azobis(2,4-dimethylvaleronitrile) dissolved in 200 g of diethylene glycol methyl ethyl ether was dropped into the flask using a separate dropping funnel over 4 hours. After the dropping of the polymerization initiator solution was completed, the flask was maintained at 70°C for 4 hours and then cooled to room temperature. The weight average molecular weight of the alkali-soluble resin thus synthesized was 4,700 g/mol.
[화학식 17][Chemical Formula 17]
합성예 10: 아크릴계 알칼리 가용성 수지(A-10)Synthesis Example 10: Acrylic alkali-soluble resin (A-10)
중합 개시제의 용액의 적하가 종료된 후, 8시간 동안 70℃로 유지한 것을 제외하고는 상기 합성예 9와 동일하게 진행하였다. After the addition of the polymerization initiator solution was completed, the same procedure as in Synthesis Example 9 was followed, except that the temperature was maintained at 70°C for 8 hours.
이렇게 합성된 알칼리 가용성 수지는 중량 평균 분자량이 12,300 g/mol이었다.The alkali-soluble resin synthesized in this way had a weight-average molecular weight of 12,300 g/mol.
실시예 및 비교예: 감광성 수지 조성물의 제조Examples and Comparative Examples: Preparation of Photosensitive Resin Composition
하기 표 1 및 표 2의 조성으로 각각의 성분들을 혼합하여 감광성 수지 조성물을 제조하였다(중량%).A photosensitive resin composition was prepared by mixing each component according to the compositions in Table 1 and Table 2 below (weight %).
A-1: 합성예 1의 카도계 알칼리 가용성 수지A-1: Cardo-based alkali-soluble resin of Synthesis Example 1
A-2: 합성예 2의 카도계 알칼리 가용성 수지A-2: Cardo-based alkali-soluble resin of synthesis example 2
A-3: 합성예 3의 카도계 알칼리 가용성 수지A-3: Cardo-based alkali-soluble resin of synthetic example 3
A-4: 합성예 4의 카도계 알칼리 가용성 수지A-4: Cardo-based alkali-soluble resin of synthetic example 4
A-5: 합성예 5의 카도계 알칼리 가용성 수지A-5: Cardo-based alkali-soluble resin of Synthesis Example 5
A-6: 합성예 6의 카도계 알칼리 가용성 수지A-6: Cardo-based alkali-soluble resin of synthetic example 6
A-7: 합성예 7의 아크릴계 알칼리 가용성 수지A-7: Acrylic alkali-soluble resin of synthetic example 7
A-8: 합성예 8의 아크릴계 알칼리 가용성 수지A-8: Acrylic alkali-soluble resin of synthetic example 8
A-9: 합성예 9의 아크릴계 알칼리 가용성 수지A-9: Acrylic alkali-soluble resin of synthetic example 9
A-10: 합성예 10의 아크릴계 알칼리 가용성 수지A-10: Acrylic alkali-soluble resin of synthetic example 10
B-1: 화학식 10으로 표시되는 화합물B-1: Compound represented by chemical formula 10
B-2: 화학식 11으로 표시되는 화합물B-2: Compound represented by chemical formula 11
B-3: 화학식 12로 표시되는 화합물B-3: Compound represented by chemical formula 12
B-4: 화학식 13으로 표시되는 화합물B-4: Compound represented by chemical formula 13
B-5: 화학식 14로 표시되는 화합물B-5: Compound represented by chemical formula 14
C: 디펜타에리트리톨헥사아크릴레이트(일본화약 제조)C: Dipentaerythritol hexaacrylate (manufactured by Japan Gunpowder)
D: 2-벤질-2-디메틸아미노-1-(4-모르폴리노페닐)부탄-1-온(Irgacure 369), Ciba Specialty Chemical 제조D: 2-Benzyl-2-dimethylamino-1-(4-morpholinophenyl)butan-1-one (Irgacure 369), manufactured by Ciba Specialty Chemical
E: 프로필렌글리콜모노메틸에테르아세테이트E: Propylene glycol monomethyl ether acetate
F: 디펜타에리스리톨 헥사키스(3-머캅토프로피오네이트)(SC유기화학 제조)F: Dipentaerythritol hexakis(3-mercaptopropionate) (manufactured by SC Organic Chemical)
G: N-2-(아미노에틸)-8-아미노옥틸트리메톡시실란(KBM-6803, 신에츠 제조)G: N-2-(Aminoethyl)-8-aminooctyltrimethoxysilane (KBM-6803, Shin-Etsu)
실험예 1: 패턴의 물성 평가Experimental Example 1: Evaluation of Pattern Properties
상기 실시예 및 비교예에서 제조된 감광성 수지 조성물을 사용하여 아래와 같이 패턴을 제조하였다.Using the photosensitive resin compositions manufactured in the above examples and comparative examples, patterns were manufactured as follows.
상기 패턴에 대하여 하기와 같이 굴절률, 현상 속도, 잔사, 밀착성, 표면 경도, TMAH 및 DPHA에 대한 내화학성을 평가하고, 그 결과를 하기 표 3에 나타내었다.For the above pattern, the refractive index, development speed, residue, adhesion, surface hardness, and chemical resistance to TMAH and DPHA were evaluated as follows, and the results are shown in Table 3 below.
<패턴의 제조방법><How to make a pattern>
5×5 cm의 유리 기판(이글 2000; 코닝사 제조)을 중성 세제, 물 및 알코올로 순차 세정한 후 건조하였다. 상기 유리 기판 상에 상기 실시예 및 비교예에서 제조된 감광성 수지 조성물을 각각 스핀 코팅한 다음, 핫 플레이트(hot plate)를 이용하여 80 ℃에서 120 초간 프리-베이크하였다. 상기 프리-베이크한 기판을 상온으로 냉각 후 석영 유리제 포토마스크와의 간격을 50 ㎛로 하여 노광기 (MA6; Karl suss (주) 제조)를 사용하여 30 mJ/㎠의 노광량(365 ㎚ 기준)으로 광을 조사하였다.A 5×5 cm glass substrate (Eagle 2000; manufactured by Corning Inc.) was sequentially washed with a neutral detergent, water, and alcohol, and then dried. The photosensitive resin compositions manufactured in the examples and comparative examples were each spin-coated on the glass substrate, and then pre-baked at 80° C. for 120 seconds using a hot plate. After the pre-baked substrate was cooled to room temperature, light was irradiated at an exposure dose of 30 mJ/cm2 (based on 365 nm) using an exposure device (MA6; manufactured by Karl Suss Co., Ltd.) at a distance of 50 μm from a quartz glass photomask.
이때 포토마스크는 직경이 5, 10, 20, 30 ㎛인 원형의 개구부(도트(Dot) 패턴)를 가지며, 상호 간격이 30 ㎛인 패턴이 동일 평면 상에 형성된 포토마스크가 사용되었다. 광 조사 후 2.38% 수산화테트라메틸암모늄(TMAH) 수용액에서 60 초간 현상하고 초순수로 세척한 후, 질소 하에서 건조하여 상기 감광성 수지 조성물 막에 패턴을 형성하였다. 오븐 중에서, 85 ℃에서 2 시간 동안 포스트-베이크(post-bake)를 실시하였다.At this time, a photomask having circular openings (dot patterns) with diameters of 5, 10, 20, and 30 ㎛ and having patterns with a mutual interval of 30 ㎛ formed on the same plane was used. After light irradiation, development was performed in a 2.38% tetramethylammonium hydroxide (TMAH) aqueous solution for 60 seconds, washed with ultrapure water, and dried under nitrogen to form a pattern on the photosensitive resin composition film. Post-baking was performed at 85° C. for 2 hours in an oven.
(1) 굴절률 측정(1) Refractive index measurement
마스크를 사용하지 않는 것을 제외하고 상기 패턴의 제조방법과 같이 노광하여 형성된 경화막에 대하여 엘립소미터(ellipsometer)(J. A. Woollam Co., M-2000)를 이용하여, 25℃ 및 50%RH의 조건에서, 65, 70, 75°의 입사각을 적용하고 200㎚ 내지 1000 ㎚의 파장 범위에서 선편광을 측정하였다. 상기 측정된 선평광 측정 데이터(Ellipsometry data(Ψ, Δ))를 컴플리트 이즈 소프트웨어(Complete EASE software)를 이용하여 하기 수학식 1의 코쉬 모델 (Cauchy model)로 MSE가 70 이하가 되도록 최적화(fitting)하여, 550 nm 파장에서의 굴절율을 계산하였다.Except for not using a mask, a cured film formed by exposure was measured at incident angles of 65, 70, and 75° under the conditions of 25°C and 50%RH using an ellipsometer (J. A. Woollam Co., M-2000) in a wavelength range of 200 nm to 1000 nm for linear polarization. The measured linear polarization measurement data (Ellipsometry data(Ψ, Δ)) were optimized (fitted) to the Cauchy model of the following mathematical expression 1 using Complete EASE software so that MSE was 70 or less, and the refractive index at a wavelength of 550 nm was calculated.
[수학식 1][Mathematical Formula 1]
상기 수학식 1에서, n(λ)는 λ파장에서의 굴절율(refractive index)이고, λ는 200 ㎚ 내지 1000㎚의 범위이고, A, B 및 C는 코쉬 파라미터이다.In the above mathematical expression 1, n(λ) is the refractive index at wavelength λ, λ is in the range of 200 nm to 1000 nm, and A, B, and C are Cauchy parameters.
(2) 미노광부의 현상 속도(2) Development speed of the exposed area
상기 패턴의 제조방법과 같이 프리-베이크까지 진행된 기판을 2.38% 수산화테트라메틸암모늄 수용액에 침지시켜 감광성 수지 조성물이 완전히 용해되는 시간을 측정하여 하기 평가 기준에 따라 현상 속도를 평가하였다.The substrate, which had undergone pre-baking in the same manner as the method for manufacturing the above pattern, was immersed in a 2.38% tetramethylammonium hydroxide aqueous solution, and the time until the photosensitive resin composition was completely dissolved was measured to evaluate the development speed according to the following evaluation criteria.
<평가 기준><Evaluation criteria>
현상 속도: 시간을 10초 단위로 반올림하여 기재Phenomena Speed: Time is rounded to the nearest 10 seconds
120초 이내 미현상: ×로 기재No phenomenon within 120 seconds: Marked as ×
(3) 잔사(3) Residue
상기 패턴의 제조방법과 같이 얻어진 도트 패턴 주변의 잔사 여부를 광학 현미경으로 관찰하여 하기 평가 기준에 따라 평가하였다.The presence of residue around the dot pattern obtained in the above pattern manufacturing method was observed using an optical microscope and evaluated according to the following evaluation criteria.
<평가 기준><Evaluation criteria>
잔사 없음: ○No residue: ○
잔사 있음: ×Residue: ×
(4) 밀착성(4) Adhesion
상기 패턴의 제조방법과 같이 얻어진 도트 패턴이 하부 기재에 90% 이상 밀착되어 있는 최소 마스크 사이즈를 측정하여 하기 평가 기준에 따라 평가하였다.The minimum mask size in which the dot pattern obtained as in the above pattern manufacturing method adheres more than 90% to the lower substrate was measured and evaluated according to the evaluation criteria below.
<평가 기준><Evaluation criteria>
5 ㎛ 도트 패턴의 90% 이상 밀착: 5Adhesion of 90% or more of 5 ㎛ dot pattern: 5
10 ㎛ 도트 패턴의 90% 이상 밀착: 10Adhesion of 90% or more of 10 ㎛ dot pattern: 10
20 ㎛ 도트 패턴의 90% 이상 밀착: 20Adhesion of 90% or more of 20 ㎛ dot pattern: 20
30 ㎛ 도트 패턴의 90% 이상 밀착: 30Adhesion of 90% or more of 30 ㎛ dot pattern: 30
미현상 또는 패턴 소실: ×No phenomenon or pattern loss: ×
(5) 표면 경도(5) Surface hardness
마스크를 사용하지 않는 것을 제외하고 상기 패턴의 제조방법과 같이 노광하여 형성된 경화막의 경화도를 경도계(HM500, Fischer사)를 사용하여 측정하였다. 이때, 표면경도는 하기 평가 기준에 따라 평가하였다.The degree of hardening of the cured film formed by exposure in the same manner as the manufacturing method of the above pattern, except that a mask was not used, was measured using a hardness tester (HM500, Fischer). At this time, the surface hardness was evaluated according to the following evaluation criteria.
<평가 기준><Evaluation criteria>
◎: 표면경도 40 이상◎: Surface hardness 40 or higher
○: 표면경도 30 이상 40 미만○: Surface hardness 30 or more but less than 40
△: 표면경도 10 이상 30 미만△: Surface hardness 10 or more and less than 30
×: 표면경도 10 미만×: Surface hardness less than 10
(6) 2.38% TMAH 내화학성(6) 2.38% TMAH chemical resistance
마스크를 사용하지 않는 것을 제외하고 상기 패턴의 제조방법과 같이 형성된 경화막을 2.38% 테트라암모늄 수산화 수용액에 2분간 침지 시켜서 막두께 변화(단위: ㎛)를 측정하였다.The cured film formed in the same manner as in the manufacturing method of the above pattern, except that no mask was used, was immersed in a 2.38% tetraammonium hydroxide aqueous solution for 2 minutes, and the change in film thickness (unit: ㎛) was measured.
(7) DPHA 내화학성(7) DPHA chemical resistance
마스크를 사용하지 않는 것을 제외하고 상기 패턴의 제조방법과 같이 형성된 경화막에 디펜타에리트리톨헥사아크릴레이트(DPHA)를 적하하고 2분간 방치한 후, 초순수로 세척한 다음, 질소 하에서 건조하여 막두께 변화(단위: ㎛)를 측정하였다.Dipentaerythritol hexaacrylate (DPHA) was added dropwise to the cured film formed in the same manner as in the manufacturing method of the above pattern except that a mask was not used, and after leaving it for 2 minutes, it was washed with ultrapure water and dried under nitrogen, and the change in film thickness (unit: ㎛) was measured.
상기 표 3에 나타낸 바와 같이, 특정 구조의 반복단위를 포함하는 카도계 알칼리 가용성 수지, 카도계 광중합성 화합물 및 다관능 아크릴레이트 광중합성 화합물을 포함하는 실시예 1 내지 16의 감광성 수지 조성물은 무기 입자를 사용하지 않으면서도 이로부터 형성된 패턴의 550nm 파장에서의 굴절률이 1.60 이상으로 고굴절률을 나타내며, 100℃ 이하의 저온경화시에도 현상속도, 잔사, 밀착성, 표면 경도 특성 등의 패턴 특성이 우수하고, 현상액 및 모노머에 대한 내화학성이 뛰어난 것을 확인할 수 있다.As shown in Table 3 above, the photosensitive resin compositions of Examples 1 to 16, which include a cardo-based alkali-soluble resin having a repeating unit of a specific structure, a cardo-based photopolymerizable compound, and a multifunctional acrylate photopolymerizable compound, exhibit a high refractive index of 1.60 or more at a wavelength of 550 nm of a pattern formed therefrom without using inorganic particles, and it can be confirmed that the pattern properties such as development speed, residue, adhesion, and surface hardness characteristics are excellent even when cured at a low temperature of 100°C or lower, and the chemical resistance to a developer and monomer is excellent.
반면, 특정 구조의 반복단위를 포함하는 카도계 알칼리 가용성 수지, 카도계 광중합성 화합물 및 다관능 아크릴레이트 광중합성 화합물 중 어느 하나라도 포함하지 않는 비교예 1 내지 8 및 11의 감광성 수지 조성물은 550nm 파장에서 1.60 미만의 굴절률을 나타내며, 현상속도, 잔사, 밀착성 및 표면 경도 중 어느 하나 이상의 물성이 불량한 것으로 나타났다. 또한, 비교예 1 내지 8 및 11의 감광성 수지 조성물은 현상 과정에서 사용되는 현상액에 대한 내화학성, 및 또 다른 패턴을 형성하기 위하여 후공정에 사용되는 모노머에 대한 내화학성이 불량하여 막소실 및 막팽윤이 심한 것을 확인할 수 있었다.On the other hand, the photosensitive resin compositions of Comparative Examples 1 to 8 and 11, which do not contain any one of a cardo-based alkali-soluble resin having a repeating unit of a specific structure, a cardo-based photopolymerizable compound, and a polyfunctional acrylate photopolymerizable compound, exhibited a refractive index of less than 1.60 at a wavelength of 550 nm, and showed poor physical properties such as development speed, residue, adhesion, and surface hardness. In addition, it was confirmed that the photosensitive resin compositions of Comparative Examples 1 to 8 and 11 had poor chemical resistance to a developer used in the developing process and poor chemical resistance to a monomer used in a post-process to form another pattern, resulting in severe film loss and film swelling.
아울러, 카도계 광중합성 화합물 및 다관능 아크릴레이트 광중합성 화합물을 모두 포함하지 않는 비교예 9 및 10의 감광성 수지 조성물은 노출부가 2.38% 수산화테트라메틸암모늄(TMAH) 수용액에 용해가 되어 도막이 형성되지 않아서 특성 확인이 불가능한 것으로 나타났다.In addition, the photosensitive resin compositions of Comparative Examples 9 and 10, which do not contain either a cardo-type photopolymerizable compound or a multifunctional acrylate photopolymerizable compound, were found to be unable to confirm their characteristics because the exposed portion was dissolved in a 2.38% tetramethylammonium hydroxide (TMAH) aqueous solution and no coating film was formed.
이상으로 본 발명의 특정한 부분을 상세히 기술하였는 바, 본 발명이 속한 기술분야에서 통상의 지식을 가진 자에게 있어서 이러한 구체적인 기술은 단지 바람직한 구현예일 뿐이며, 이에 본 발명의 범위가 제한되는 것이 아님은 명백하다. 본 발명이 속한 기술분야에서 통상의 지식을 가진 자라면 상기 내용을 바탕으로 본 발명의 범주 내에서 다양한 응용 및 변형을 행하는 것이 가능할 것이다. As described above, specific parts of the present invention have been described in detail. It is obvious to those skilled in the art that these specific descriptions are merely preferred implementation examples and that the scope of the present invention is not limited thereto. Those skilled in the art will be able to make various applications and modifications within the scope of the present invention based on the above contents.
따라서, 본 발명의 실질적인 범위는 첨부된 특허청구범위와 그의 등가물에 의하여 정의된다고 할 것이다.Accordingly, the substantial scope of the present invention will be defined by the appended claims and their equivalents.
Claims (12)
상기 카도계 광중합성 화합물은 알칼리 가용성 수지 100 중량부에 대하여 30 내지 70 중량부의 양으로 포함되며,
상기 감광성 수지 조성물을 이용하여 형성되는 경화 도막이 550nm 파장에서 1.60 이상의 굴절률을 나타내는 감광성 수지 조성물:
[화학식 1]
[화학식 2]
[화학식 3]
[화학식 4]
[화학식 5]
[화학식 6]
상기 식에서,
X 및 X'는 각각 독립적으로 단일 결합, -CO-, -SO2-, -C(CF3)2-, -Si(CH3)2-, -CH2-, -C(CH3)2-, -O-, , , , , , , , , , , , 또는 이고,
Y는 산무수물 잔기이며,
Z는 산2무수물 잔기이고,
R'는 수소 원자, 에틸기, 페닐기, -C2H4Cl, -C2H4OH 또는 -CH2CH=CH2이며,
R1, R1', R2, R2', R3, R3', R4, R4', R5, R5', R6 및 R6'은 각각 독립적으로 수소 원자 또는 메틸기이고,
R7, R7', R8 및 R8'은 각각 독립적으로 C1-C6의 알킬렌기이며, 상기 알킬렌기는 에스테르 결합, C6-C14의 사이클로알킬렌기 및 아릴렌기 중 적어도 하나로 개재되거나 개재되지 않고,
R9, R9', R10, R10', R11, R11', R12 및 R12'는 각각 독립적으로 수소 원자, 할로겐 원자 또는 C1-C6의 알킬기이며,
m 및 n은 각각 독립적으로 1 내지 30의 정수이고,
t 및 u는 각각 독립적으로 0 내지 1의 정수이며,
P는 각각 독립적으로 , , , 또는 이고,
R13 및 R14는 각각 독립적으로 수소 원자, 히드록시기, 티올기, 아미노기, 니트로기 또는 할로겐 원자이며,
Ar1은 각각 독립적으로 아릴기이고,
Y'는 산무수물 잔기이며,
Z'는 산2무수물 잔기이고,
A는 O, S, NR', Si(R')2 또는 Se이며,
a 및 b는 각각 독립적으로 1 내지 6의 정수이고,
p 및 q은 각각 독립적으로 1 내지 30의 정수이다.A photosensitive resin composition comprising an alkali-soluble resin comprising at least one repeating unit of the following chemical formulas 1 to 6, a cardo-type photopolymerizable compound, a multifunctional acrylate photopolymerizable compound, a photopolymerization initiator, and a solvent,
The above-mentioned cardo-based photopolymerizable compound is included in an amount of 30 to 70 parts by weight per 100 parts by weight of the alkali-soluble resin.
A photosensitive resin composition having a cured film formed using the photosensitive resin composition and exhibiting a refractive index of 1.60 or more at a wavelength of 550 nm:
[Chemical Formula 1]
[Chemical formula 2]
[Chemical Formula 3]
[Chemical Formula 4]
[Chemical Formula 5]
[Chemical formula 6]
In the above formula,
X and X' are each independently a single bond, -CO-, -SO 2 -, -C(CF 3 ) 2 -, -Si(CH 3 ) 2 -, -CH 2 -, -C(CH 3 ) 2 -, -O-, , , , , , , , , , , , or And,
Y is an acid anhydride residue,
Z is an acid dianhydride residue,
R' is a hydrogen atom, an ethyl group, a phenyl group, -C 2 H 4 Cl, -C 2 H 4 OH or -CH 2 CH=CH 2 ,
R1, R1', R2, R2', R3, R3', R4, R4', R5, R5', R6 and R6' are each independently a hydrogen atom or a methyl group,
R7, R7', R8 and R8' are each independently a C 1 -C 6 alkylene group, wherein the alkylene group is or is not interrupted by at least one of an ester bond, a C 6 -C 14 cycloalkylene group and an arylene group,
R9, R9', R10, R10', R11, R11', R12 and R12' are each independently a hydrogen atom, a halogen atom or a C 1 -C 6 alkyl group,
m and n are each independently an integer from 1 to 30,
t and u are each independently integers from 0 to 1,
P is each independently , , , or And,
R13 and R14 are each independently a hydrogen atom, a hydroxyl group, a thiol group, an amino group, a nitro group or a halogen atom,
Ar1 is each independently an aryl group,
Y' is an acid anhydride residue,
Z' is an acid dianhydride residue,
A is O, S, NR', Si(R') 2 or Se,
a and b are each independently an integer from 1 to 6,
p and q are each independently an integer from 1 to 30.
[화학식 7]
[화학식 8]
[화학식 9]
상기 식에서,
R15 및 R16은 각각 독립적으로 수소 원자, 히드록시기, 티올기, 아미노기, 니트로기, 할로겐 원자, 또는 불포화 이중결합을 갖는 탄소수 2 내지 20의 중합성 작용기이고, R15 또는 R16 중 적어도 하나는 불포화 이중결합을 갖는 탄소수 2 내지 20의 중합성 작용기이다.In the first paragraph, the photopolymerizable compound of the cardo system is a photosensitive resin composition comprising a compound represented by any one of the following chemical formulas 7 to 9:
[Chemical formula 7]
[Chemical formula 8]
[Chemical formula 9]
In the above formula,
R15 and R16 are each independently a hydrogen atom, a hydroxyl group, a thiol group, an amino group, a nitro group, a halogen atom, or a polymerizable functional group having 2 to 20 carbon atoms and an unsaturated double bond, and at least one of R15 or R16 is a polymerizable functional group having 2 to 20 carbon atoms and an unsaturated double bond.
R17은 C1-C6의 알킬렌기이며, 상기 알킬렌기는 에스테르 결합, C6-C14의 사이클로알킬렌기 및 아릴렌기 중 적어도 하나로 개재되거나 개재되지 않고,
R18은 수소 원자 또는 메틸기인 감광성 수지 조성물.In the fifth paragraph, R15 and R16 are each independently a hydrogen atom, a hydroxyl group, a thiol group, an amino group, a nitro group, a halogen atom, or and at least one of R15 or R16 And,
R17 is a C 1 -C 6 alkylene group, wherein the alkylene group is or is not interrupted by at least one of an ester bond, a C 6 -C 14 cycloalkylene group, and an arylene group,
A photosensitive resin composition wherein R18 is a hydrogen atom or a methyl group.
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