KR102658389B1 - 내장된 경계링을 갖는 결합된 공진기 필터 - Google Patents

내장된 경계링을 갖는 결합된 공진기 필터 Download PDF

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Publication number
KR102658389B1
KR102658389B1 KR1020190035956A KR20190035956A KR102658389B1 KR 102658389 B1 KR102658389 B1 KR 102658389B1 KR 1020190035956 A KR1020190035956 A KR 1020190035956A KR 20190035956 A KR20190035956 A KR 20190035956A KR 102658389 B1 KR102658389 B1 KR 102658389B1
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South Korea
Prior art keywords
resonator
electrode
crf
piezoelectric layer
filter
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Korean (ko)
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KR20190113670A (ko
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수잔느 크로이저
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코르보 유에스, 인크.
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/582—Multiple crystal filters implemented with thin-film techniques
    • H03H9/583—Multiple crystal filters implemented with thin-film techniques comprising a plurality of piezoelectric layers acoustically coupled
    • H03H9/584—Coupled Resonator Filters [CFR]
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/0023—Networks for transforming balanced signals into unbalanced signals and vice versa, e.g. baluns, or networks having balanced input and output
    • H03H9/0095—Networks for transforming balanced signals into unbalanced signals and vice versa, e.g. baluns, or networks having balanced input and output using bulk acoustic wave devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H03H9/02118—Means for compensation or elimination of undesirable effects of lateral leakage between adjacent resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H03H9/02125—Means for compensation or elimination of undesirable effects of parasitic elements
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02637—Details concerning reflective or coupling arrays
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/582—Multiple crystal filters implemented with thin-film techniques
    • H03H9/583—Multiple crystal filters implemented with thin-film techniques comprising a plurality of piezoelectric layers acoustically coupled
    • H03H9/585—Stacked Crystal Filters [SCF]
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/582—Multiple crystal filters implemented with thin-film techniques
    • H03H9/586—Means for mounting to a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/587—Air-gaps
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
KR1020190035956A 2018-03-28 2019-03-28 내장된 경계링을 갖는 결합된 공진기 필터 Active KR102658389B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201862649339P 2018-03-28 2018-03-28
US62/649,339 2018-03-28
US16/287,277 2019-02-27
US16/287,277 US11095267B2 (en) 2018-03-28 2019-02-27 Coupled resonator filter with embedded border ring

Publications (2)

Publication Number Publication Date
KR20190113670A KR20190113670A (ko) 2019-10-08
KR102658389B1 true KR102658389B1 (ko) 2024-04-16

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KR1020190035956A Active KR102658389B1 (ko) 2018-03-28 2019-03-28 내장된 경계링을 갖는 결합된 공진기 필터

Country Status (4)

Country Link
US (1) US11095267B2 (https=)
JP (1) JP7405513B2 (https=)
KR (1) KR102658389B1 (https=)
CN (1) CN110324019A (https=)

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Publication number Priority date Publication date Assignee Title
US11509287B2 (en) 2018-12-14 2022-11-22 Qorvo Us, Inc. Bi-polar border region in piezoelectric device
CN114070224A (zh) * 2020-08-06 2022-02-18 诺思(天津)微系统有限责任公司 带声学解耦层的体声波谐振器组件及制造方法、滤波器及电子设备
CN116131798A (zh) * 2022-11-22 2023-05-16 河源市艾佛光通科技有限公司 一种固态体声波谐振器及其制作方法
US12316304B2 (en) * 2022-12-21 2025-05-27 Rf360 Singapore Pte. Ltd. Vertically coupled SAW resonators
CN121241512A (zh) * 2023-07-03 2025-12-30 株式会社村田制作所 压电器件
US20250219615A1 (en) * 2024-01-03 2025-07-03 Skyworks Global Pte Ltd. Bulk acoustic wave resonator with bragg grating embedded in electrode

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US20120218059A1 (en) 2011-02-28 2012-08-30 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Stacked bulk acoustic resonator comprising a bridge and an acoustic reflector along a perimeter of the resonator
US20120218056A1 (en) 2011-02-28 2012-08-30 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Coupled resonator filter comprising a bridge
US20120218058A1 (en) 2011-02-28 2012-08-30 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Coupled resonator filter comprising a bridge and frame elements
US20120248941A1 (en) 2011-03-29 2012-10-04 Avago Technologies Wireless Ip (Singapore) Pte. Lt Stacked bulk accoustic resonator and method of fabricating the same

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US8018303B2 (en) * 2007-10-12 2011-09-13 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Bulk acoustic wave device
JP5563739B2 (ja) * 2008-02-20 2014-07-30 太陽誘電株式会社 圧電薄膜共振器、フィルタ、デュープレクサ、通信モジュール、および通信装置
US7966722B2 (en) * 2008-07-11 2011-06-28 Triquint Semiconductor, Inc. Planarization method in the fabrication of a circuit
US8248185B2 (en) * 2009-06-24 2012-08-21 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic resonator structure comprising a bridge
US8456257B1 (en) 2009-11-12 2013-06-04 Triquint Semiconductor, Inc. Bulk acoustic wave devices and method for spurious mode suppression
KR101708893B1 (ko) 2010-09-01 2017-03-08 삼성전자주식회사 체적 음향 공진기 구조 및 제조 방법
US9048812B2 (en) * 2011-02-28 2015-06-02 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic wave resonator comprising bridge formed within piezoelectric layer
US9991871B2 (en) * 2011-02-28 2018-06-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic wave resonator comprising a ring
US9571064B2 (en) 2011-02-28 2017-02-14 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator device with at least one air-ring and frame
DE102012205033B4 (de) * 2011-03-29 2020-01-30 Avago Technologies International Sales Pte. Limited Gestapelter akustischer Resonator, welcher eine Brücke aufweist
US9246473B2 (en) * 2011-03-29 2016-01-26 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator comprising collar, frame and perimeter distributed bragg reflector
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Publication number Priority date Publication date Assignee Title
US20120218059A1 (en) 2011-02-28 2012-08-30 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Stacked bulk acoustic resonator comprising a bridge and an acoustic reflector along a perimeter of the resonator
US20120218056A1 (en) 2011-02-28 2012-08-30 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Coupled resonator filter comprising a bridge
US20120218058A1 (en) 2011-02-28 2012-08-30 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Coupled resonator filter comprising a bridge and frame elements
US20120248941A1 (en) 2011-03-29 2012-10-04 Avago Technologies Wireless Ip (Singapore) Pte. Lt Stacked bulk accoustic resonator and method of fabricating the same

Also Published As

Publication number Publication date
KR20190113670A (ko) 2019-10-08
US20190305755A1 (en) 2019-10-03
JP7405513B2 (ja) 2023-12-26
JP2019198066A (ja) 2019-11-14
US11095267B2 (en) 2021-08-17
CN110324019A (zh) 2019-10-11

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