KR102590964B1 - Electro-static chuck - Google Patents

Abstract

An electrostatic chuck according to an embodiment of the present invention includes a support part, a first insulating plate located on the support part and having a plurality of first through holes, disposed on the first insulating plate, and extending in a first direction and arranged parallel to each other. a first electrode and a second electrode, and a second insulating plate disposed on the first insulating plate, covering the first electrode and the second electrode, and having a plurality of second through holes overlapping the plurality of first through holes. wherein the plurality of first through holes are arranged in parallel with the plurality of first row through holes arranged along a first row parallel to the first direction and the first row through holes, and arranged in the first direction and parallel to the first row through holes. A plurality of second row through-holes are arranged along a parallel second row, wherein the first electrode includes a plurality of first electrode through-holes overlapping with the plurality of first row through-holes, and the second row The electrode may include a plurality of second electrode through-holes that overlap the plurality of second row through-holes.

Description

Electrostatic chuck {ELECTRO-STATIC CHUCK}

The present invention relates to an electrostatic chuck.

In addition to manufacturing various semiconductor chips such as processors and memories, flat panel displays such as liquid crystal displays, plasma displays, and organic light emitting diode displays have recently become widely available. The manufacturing of display devices or panels for panel displays is carried out in various process facilities or chambers.

To manufacture such semiconductor chips or display devices, photography, etching, diffusion, ion implantation, metal deposition, chemical vapor deposition, and bonding of upper and lower glass substrates are generally performed on the surface of a semiconductor wafer or glass substrate. The process is repeated, and each substrate is placed in a carrier and moved between each process facility. Substrates in process are transferred to the required work position during the process by a transfer robot installed in each process facility or by an operator's command.

In order to fix a substrate transferred to the working position of the relevant process equipment or attach a cover such as a window to a completed display panel, mechanical means using vacuum pressure, electrical means using electrical characteristics, etc. are used. Examples of electrical means There is an electro-static chuck.

Electro-Static Chucks can be broadly divided into two types: unipolar type and bipolar type. In particular, a bipolar electro-static chuck has two electrodes insulated from each other by an insulator, and chucking is performed by supplying a voltage with positive or negative polarity to each electrode.

However, before attaching a window to a display panel using a bipolar electrostatic chuck, the protective film attached to the display panel must be removed. At this time, the display panel is not firmly fixed to the electrostatic chuck, so the display panel is damaged during the peeling process of the protective film. Movement occurs.

Based on the technical background described above, the present invention seeks to provide an electrostatic chuck that can firmly fix an object fixed on the electrostatic chuck.

An electrostatic chuck according to an embodiment of the present invention includes a support part, a first insulating plate located on the support part and having a plurality of first through holes, disposed on the first insulating plate, and extending in a first direction and arranged parallel to each other. a first electrode and a second electrode, and a second insulating plate disposed on the first insulating plate, covering the first electrode and the second electrode, and having a plurality of second through holes overlapping the plurality of first through holes. wherein the plurality of first through holes are arranged in parallel with the plurality of first row through holes arranged along a first row parallel to the first direction and the first row through holes, and arranged in the first direction and parallel to the first row through holes. A plurality of second row through-holes are arranged along a parallel second row, wherein the first electrode includes a plurality of first electrode through-holes overlapping with the plurality of first row through-holes, and the second row The electrode may include a plurality of second electrode through-holes that overlap the plurality of second row through-holes.

The first electrode and the second electrode may be arranged in plural numbers along a second direction intersecting the first direction.

The first electrode and the second electrode may be arranged alternately along the second direction.

Among the plurality of first electrodes, a pair of adjacent first electrodes may be connected to each other, and a pair of adjacent second electrodes among the plurality of second electrodes may be connected to each other.

Each of the first electrode and the second electrode may have a shape that is bent at least twice.

The support part may include a body with a space formed therein, a plurality of third through holes disposed on an upper surface of the body and connected to the space, and overlapping the plurality of first through holes.

The plurality of first through holes, the plurality of second through holes, the plurality of third through holes, the plurality of first electrode through holes, and the plurality of second electrode through holes may communicate with each other.

The support part may be located on one side of the body and include a connector connected to the space.

It may further include a vacuum pump connected to the connector.

It further includes a connection plate positioned between the support portion and the first insulating plate and having a plurality of fourth through holes overlapping with the plurality of first through holes, wherein the plurality of fourth through holes comprises the plurality of first through holes. It may include a plurality of third row through holes overlapping with the first row through holes and a plurality of fourth row through holes overlapping with the plurality of second row through holes.

The support portion includes a first groove extending in the first direction and communicating with the plurality of third row through-holes, and a second groove parallel to the first groove and communicating with the plurality of fourth row through-holes. It can be included.

The first electrode and the second electrode may have different polarities.

The first insulating plate is adjacent to at least one corner of the first insulating plate and may include a through hole area in which only the first through hole is located.

A diameter of each of the plurality of first electrode through holes and the plurality of second electrode through holes may be larger than a diameter of each of the plurality of first through holes.

An electrostatic chuck according to an embodiment of the present invention includes a support part, a first insulating plate located on the support part and having a plurality of first through holes, and disposed on the first insulating plate, extending in a first direction and having both ends of the first insulating plate. A first electrode and a second electrode disposed adjacent to the edge of the first insulating plate, and a plurality of electrodes disposed on the first insulating plate to cover the first electrode and the second electrode and overlapping the plurality of first through holes. It includes a second insulating plate having two through holes, wherein the plurality of first through holes include a plurality of first row through holes arranged along a first row parallel to the first direction and parallel to the first row through holes. is disposed and includes a plurality of second row through-holes arranged along a second row parallel to the first direction, wherein the first electrode and the second electrode are formed through the first row through-hole and the second row through-hole. It can be arranged parallel to the hall.

The first electrode or the second electrode may be disposed between the first thermal through-hole and the second thermal through-hole.

The first electrode and the second electrode may be arranged alternately along a second direction intersecting the first direction.

The first electrode and the second electrode may be disposed between the first thermal through-hole and the second thermal through-hole.

The first electrode and the second electrode may be arranged in plural numbers along a second direction intersecting the first direction.

Among the plurality of first electrodes, a pair of adjacent first electrodes may be connected to each other, and a pair of adjacent second electrodes among the plurality of second electrodes may be connected to each other.

An electrostatic chuck according to an embodiment of the present invention includes a support part, a first insulating plate located on the support part and having a plurality of first through holes, and a first insulating plate disposed on the first insulating plate and extending in a first direction. It includes an electrode, a second electrode, a second insulating plate disposed on the first insulating plate, covering the first electrode and the second electrode, and having a plurality of second through holes overlapping the plurality of first through holes, The plurality of first through holes include a plurality of first row through holes arranged along a first row parallel to the first direction and a second row parallel to the first row through holes and parallel to the first direction. It includes a plurality of second row through-holes arranged along a row, and the first electrode can pass between a pair of adjacent first through-holes among the plurality of first through-holes.

The second electrode may be arranged parallel to the first electrode.

The first electrode and the second electrode may pass between the pair of second through holes.

The second electrode may pass between a pair of adjacent second through holes among the plurality of second through holes.

According to the electrostatic chuck as described above, the object fixed on the electrostatic chuck can be firmly fixed so that it does not move during work.

1 is a schematic exploded perspective view of an electrostatic chuck according to a first embodiment of the present invention.
Figure 2 is a plan view showing a first insulating plate, a first electrode, and a second electrode of an electrostatic chuck according to the first embodiment of the present invention.
Figure 3 is a cross-sectional view taken along line A-A' of Figure 2.
4 to 7 show modified examples of the first electrode and the second electrode of the first embodiment.
Figure 8 is a cross-sectional view showing a structure in which a third electrode is disposed on a second insulating plate.
Figure 9 is a diagram explaining the process of peeling the film from the device using the electrostatic chuck of this embodiment.
Figure 10 is a plan view schematically showing an electrostatic chuck according to a second embodiment of the present invention.
FIG. 11 is a cross-sectional view taken along line B-B' of FIG. 10.
FIG. 12 is a diagram showing a state in which a first electrode and a second electrode are disposed on the first insulating plate of FIG. 10.
13 to 24 show modified examples of the first electrode and the second electrode of the second embodiment.
Figure 25 is a schematic exploded perspective view of an electrostatic chuck according to a third embodiment of the present invention.
Figure 26 is a cross-sectional view of an electrostatic chuck according to a third embodiment of the present invention.
Figure 27 is a schematic perspective view of the support portion of the third embodiment.

Hereinafter, with reference to the attached drawings, embodiments of the present invention will be described in detail so that those skilled in the art can easily implement the present invention. The present invention may be implemented in many different forms and is not limited to the embodiments described herein. In order to clearly explain the present invention in the drawings, parts not related to the description are omitted, and identical or similar components are given the same reference numerals throughout the specification.

In addition, the size and thickness of each component shown in the drawings are arbitrarily shown for convenience of explanation, so the present invention is not necessarily limited to what is shown.

In the drawing, the thickness is enlarged to clearly express various layers and regions. And in the drawings, for convenience of explanation, the thicknesses of some layers and regions are exaggerated. When a part of a layer, membrane, region, plate, etc. is said to be "on" or "on" another part, this includes not only being "directly above" the other part, but also cases where there is another part in between.

In addition, throughout the specification, when a part is said to "include" a certain component, this means that it may further include other components rather than excluding other components, unless specifically stated to the contrary. In addition, throughout the specification, “on” means located above or below the object part, and does not necessarily mean located above the direction of gravity.

Hereinafter, an electrostatic chuck according to a first embodiment of the present invention will be described with reference to FIGS. 1 to 4.

Figure 1 is a schematic exploded perspective view of an electrostatic chuck according to a first embodiment of the present invention, and Figure 2 is a plan view showing a first insulating plate, a first electrode, and a second electrode of an electrostatic chuck according to a first embodiment of the present invention. Figure 3 is a cross-sectional view taken along line A-A' of Figure 2.

1 to 3, the electrostatic chuck 10 of this embodiment includes a support part 100, a first insulating plate 300, a second insulating plate 700, a first electrode 510, and a second electrode 530. ) may include. The electrostatic chuck of this embodiment is a bipolar electrostatic chuck that generates electrostatic force using two electrodes, and can generate vacuum suction force through a plurality of through holes located between the electrodes. The two electrodes and the plurality of through holes generate electrostatic force and vacuum suction force, allowing the substrate or display panel placed on the electrostatic chuck to be firmly attracted and fixed.

The support portion 100 is located at the bottom of the electrostatic chuck 10 in this embodiment and supports the first insulating plate 300, the second insulating plate 700, the first electrode 510, and the second electrode 530. can do. At this time, the support part 100 may include a body 130, a space 150, a plurality of third through holes 110, and a connector 170.

The body 130 is a structure made of an approximately hexahedron shape, and the first insulating plate 300, the second insulating plate 700, the first electrode 510, and the second electrode 530 located on the body 130 are rigid. To support it, it may be made of a relatively hard material. For example, the body 130 may be any one selected from the group consisting of stainless steel (SUS), Invar, nickel, cobalt, aluminum, titanium, alloys thereof, acrylic, and wood.

A space 150 may be formed inside the body 130. The space 150 may communicate with a plurality of third through holes 110 formed in the upper part of the body 130. Additionally, a connector 170 is formed on one side of the body 130, so that the connector 170, the space 150, and the plurality of third through holes 110 can communicate with each other. As a result, the vacuum suction force generated by the vacuum pump (not shown) coupled to the connector 170 may be transmitted in that order to the connector 170, the space 150, and the plurality of third through holes 110.

Meanwhile, a plurality of third through holes 110 may be formed in the upper part of the body 130. The plurality of third through holes 110 may be formed to penetrate the upper surface of the body 130.

Each of the plurality of third through holes 110 may have a circular cross-sectional shape. However, the cross-sectional shape of the plurality of third through-holes 110 is not limited to this, and may have various polygonal shapes such as triangles, squares, and pentagons.

At this time, the plurality of third through holes 110 may be arranged in a plurality of rows parallel to the first direction (Y-axis direction in the drawing). Each of the plurality of columns may be arranged to be spaced apart from each other in a second direction crossing the first direction (in the drawing, the X-axis direction). In the following drawings, the X-axis representing coordinates represents the second direction, the Y-axis represents the first direction, and the Z-axis represents the third direction.

In this embodiment, the plurality of third through holes 110 may be formed in a pattern corresponding to the plurality of first through holes 310 of the first insulating plate 300, which will be described later. Here, the pattern represents the shape or pattern in which the plurality of first through holes 310 and the plurality of third through holes 110 are arranged.

Each of the plurality of third through holes 110 and the plurality of first through holes 310 may be arranged to overlap each other in a direction parallel to the Z axis. As a result, each of the plurality of first through holes 310 of the first insulating plate 300 may communicate with each of the plurality of third through holes 110 of the body 130. Accordingly, the vacuum suction force generated by the vacuum pump (not shown) may be transmitted to the plurality of first through holes 310 through the plurality of third through holes 110.

A vacuum pump (not shown) is coupled to the connector 170 of the body 130 and can suck the gas inside the space 150. Accordingly, the vacuum pump (not shown) can increase the degree of vacuum inside the space 150 of the body 130.

In this embodiment, the first insulating plate 300 may be disposed on the support part 100. The first insulating plate 300 may electrically insulate the first electrode 510 and the second electrode 530 placed on the first insulating plate 300 and the support portion 100 from each other.

The first insulating plate 300 may be made of a square-shaped flat plate. The first insulating plate 300 may be made of an insulating material, for example, polyimide (PI), polyethersulphone (PES), polyacrylate (PAR), or polyether imide ( PEI, polyetherimide), polyethyelene napthalate (PEN), polyethyeleneterep thalate (PET), polyphenylene sulfide (PPS), polyallylate, polycarbonate (PC), cellulose It may include any one selected from the group consisting of triacetate (cellulose triacetate), cellulose acetate propionate (CAP), poly(arylene ether sulfone), and combinations thereof.

A plurality of first through holes 310 may be formed in the first insulating plate 300. As described above, the plurality of first through holes 310 may be formed in a pattern corresponding to the plurality of third through holes 110 of the support part 100.

The plurality of first through holes 310 may be arranged in a plurality of rows parallel to the Y axis. Each of the plurality of columns may be arranged to be spaced apart from each other along the X axis.

More specifically, as shown in FIGS. 2 and 3, the plurality of first through holes 310 includes a plurality of first row through holes 311 and a plurality of second row through holes 313. can do. The plurality of first row through holes 311 may be arranged along the first row A1 parallel to the Y axis. Additionally, the plurality of second row through-holes 313 may be arranged along the second row A2. Here, the second row A2 is parallel to the first row A1 and may be arranged to be spaced apart from the first row A1 along the X-axis.

The plurality of first row through-holes 311 may be arranged to be spaced apart from each other at regular intervals along the Y axis. That is, among the plurality of first row through holes 311, the distance between a pair of first row through holes 311 adjacent to each other in the Y-axis direction may be equal to each other. Like the plurality of first row through-holes 311, the plurality of second row through-holes 313 may also be arranged to be spaced apart from each other at regular intervals along the Y axis. Among the plurality of second row through holes 313, the spacing between a pair of adjacent second row through holes 313 in the Y-axis direction may be equal to each other.

The plurality of first row through-holes 311 and the plurality of second row through-holes 313 may be arranged to be spaced apart from each other by a predetermined distance along the X-axis. In this embodiment, along the (311), and may be arranged in the order of the second row through-holes (313).

Each of the plurality of first row through-holes 311 and the plurality of second row through-holes 313 may have a circular cross-sectional shape. However, it is not limited to this, and the cross-sectional shape of the plurality of first row through-holes 311 and the plurality of second row through-holes 313 may be various polygonal shapes such as triangle, square, or pentagon.

In this embodiment, the first electrode 510 and the second electrode 530 may be disposed on the first insulating plate 300. The first electrode 510 and the second electrode 530 may have different polarities. For example, the first electrode 510 has a (+) polarity, and the second electrode 530 has a (-) polarity. It can have polarity. Conversely, the first electrode 510 may have a (-) polarity, and the second electrode 530 may have a (+) polarity. The first electrode 510 and the second electrode 530 having different polarities can generate electrostatic power.

The first electrode 510 and the second electrode 530 may be disposed to extend along the Y axis. At this time, the first electrode 510 and the second electrode 530 may be arranged in a straight line. Also, a pair of first electrodes 510 and second electrodes 530 may be arranged side by side with each other.

A plurality of first electrodes 510 and second electrodes 530 may be disposed on the first insulating plate 300 . At this time, each of the plurality of first electrodes 510 may be arranged on the first insulating plate 300 to be spaced apart from each other along the X-axis. Additionally, each of the plurality of second electrodes 530 may be disposed on the first insulating plate 300 to be spaced apart from each other along the X-axis.

At this time, the plurality of first electrodes 510 arranged to be spaced apart from each other along the X-axis may be electrically connected to each other. Additionally, the plurality of second electrodes 530 may also be electrically connected to each other. However, the first electrode 510 and the second electrode 530 may be insulated from each other.

The first electrode 510 and the second electrode 530 are formed by attaching a straight metal thin film on the first insulating plate 300, or by depositing a metal material on the first insulating plate 300 and then patterning it in a straight line. It can be formed by mixing.

In this embodiment, a pair of first electrodes 510 and second electrodes 530 are arranged side by side, and the pair of first electrodes 510 and second electrodes 530 are arranged in plural pieces. It can be arranged to be spaced apart from each other along the X axis.

Meanwhile, the first electrode 510 and the second electrode 530 are not disposed in an area adjacent to at least one corner of the first insulating plate 300. As shown in FIG. 2, a through-hole region H1 in which only the first through-hole 310 is disposed may be formed in an area adjacent to one corner of the first insulating plate 300. Only a plurality of first through holes 310 are disposed within the through hole area H1, so that the density of the first through holes 310 within the through hole area H1 is higher than at other positions of the first insulating plate 300. high. Here, the density represents the number of first through-holes 310 arranged within a unit area.

And, corresponding to the through hole area H1 of the first insulating plate 300, a plurality of third through holes 110 and a plurality of second through holes 710 are formed in the support part 100 and the second insulating plate 700, respectively. ) may be formed.

In this way, only the plurality of first through holes 310, the plurality of second through holes 710, and the plurality of third through holes 110 are disposed in the through hole area H1, and the first electrode 510 and the second electrode 530 is not disposed. Therefore, when fixing the target object (P1, see FIG. 9) on the electrostatic chuck 10, the target object (P1, see FIG. 9) can be fixed only by vacuum suction force.

In the electrostatic chuck 10 of this embodiment, a plurality of first and second electrode through-holes 513 and 533 may be formed in the first electrode 510 and the second electrode 530. A plurality of first electrode penetration holes 513 penetrating the first electrode 510 are formed in the first electrode 510, and a plurality of second electrode penetration holes 513 penetrating the second electrode 530 are formed in the first electrode 510. An electrode through hole 533 may be formed.

At this time, each of the plurality of first electrode through-holes 513 and the plurality of first row through-holes 311 formed in the first electrode 510 may be arranged to overlap each other in a direction parallel to the Z axis. As a result, each of the plurality of first through holes 310 of the first insulating plate 300 may communicate with each of the plurality of first electrode through holes 513.

Meanwhile, the second electrode 530 is adjacent to the first electrode 510 and may extend along the Y axis parallel to the first electrode 510. At this time, each of the plurality of second electrode through-holes 533 and the plurality of second row through-holes 313 formed in the second electrode 530 may be arranged to overlap each other in a direction parallel to the Z axis. As a result, each of the plurality of second through holes 710 of the first insulating plate 300 may communicate with each of the plurality of second electrode through holes 533.

Therefore, the vacuum suction force generated by the vacuum pump (not shown) is applied to the connector 170, the space 150, the plurality of third through holes 110, the first through holes 310, and the first and second electrodes. It may be delivered in the through holes 513 and 533 in that order.

At this time, the diameter of the first and second electrode through-holes 513 and 533 may be formed to be larger than the diameter of the first through-hole 310.

According to this embodiment, the first and second electrode through-holes 513 and 533 and the first through-hole 310 can be arranged to overlap each other, so many through-holes can be arranged within a certain area. Additionally, many electrodes can be placed within a certain area. Accordingly, because the number of through holes and electrodes disposed within a certain area increases, electrostatic power and vacuum suction power may increase.

4 to 7 , various modifications of the first electrode 510, the second electrode 530, and the plurality of first through holes 310 are shown.

Referring to FIG. 4, a pair of first electrodes 510 and second electrodes 530 extending along the Y axis may be connected to another adjacent pair of first electrodes 510 and second electrodes 530. there is. That is, among the plurality of first electrodes 510, a pair of adjacent first electrodes 510 are connected to each other, and among the plurality of second electrodes 530, a pair of adjacent second electrodes 530 are connected to each other. You can.

Specifically, the pair of first electrodes 510 and second electrodes 530 may extend along the Y axis and then be bent to extend in opposite directions along the Y axis. A pair of first electrodes 510 and second electrodes 530 may be disposed on the first insulating plate 300 while repeating this shape. That is, the pair of first electrodes 510 and second electrodes 530 shown in FIG. 4 may be an extension of one first electrode 510 and a second electrode 530.

Referring to FIG. 5, each of the first electrode 510 and the second electrode 530 extends approximately at 9 o'clock, then approximately at 12 o'clock, then again at approximately 3 o'clock, and then again at 12 o'clock. It may have an extended shape. Referring to FIG. 6, the first electrode 510 and the second electrode 530 may have a shape that extends obliquely in the approximately 1 o'clock direction and then obliquely in the approximately 11 o'clock direction.

As shown in FIG. 7, the first electrode 510 and the second electrode 530 extend obliquely to approximately 1 o'clock, then to approximately 12 o'clock, and then again to approximately 11 o'clock. And, again, it can be formed in a shape extending approximately in the 12 o'clock direction.

In this modified example, a first electrode through hole 513 and a second electrode through hole 533 are formed in the first electrode 510 and the second electrode 530, respectively, and the first electrode through hole 513 and the second electrode through hole 513 are formed in the first electrode 510 and the second electrode 530, respectively. The two-electrode through-hole 533 may be arranged to overlap the plurality of first through-holes 310 .

Referring again to FIGS. 1 to 3 , the second insulating plate 700 may be positioned on the first insulating plate 300 . The second insulating plate 700 may cover the first electrode 510 and the second electrode 530 located on the first insulating plate 300.

In this embodiment, a target object (P1, see FIG. 9) to be fixed to the electrostatic chuck 10 may be placed on the second insulating plate 700. At this time, the second insulating plate 700 may insulate the target object (P1, see FIG. 9) and the first electrode 510 and the second electrode 530 from each other.

Like the first insulating plate 300, the second insulating plate 700 may be made of an insulating material. For example, polyimide (PI), polyethersulphone (PES), polyacrylate (PAR), polyetherimide (PEI), polyethyelene napthalate (PEN), Polyethylene terephthalate (PET), polyphenylene sulfide (PPS), polyallylate, polycarbonate (PC), cellulose triacetate, cellulose acetate It may include any one selected from the group consisting of propionate (CAP), poly(arylene ether sulfone), and combinations thereof.

At this time, the second insulating plate 700 may be made of a square-shaped flat plate so as to cover both the first electrode 510 and the second electrode 530 placed on the first insulating plate 300.

Meanwhile, a plurality of second through holes 710 may be formed in the second insulating plate 700. The plurality of second through holes 710 are formed through the second insulating plate 700 and may be formed in a pattern corresponding to the plurality of first through holes 310 of the first insulating plate 300.

Each of the plurality of second through holes 710, the plurality of first through holes 310, and the plurality of first and second electrode through holes 513 and 533 may be arranged to overlap each other in a direction parallel to the Z axis. . Therefore, the vacuum suction force generated by the vacuum pump (not shown) is generated by the connector 170, the space 150, the plurality of third through holes 110, the first through holes 310, and the plurality of first and It may be delivered in the order of the two electrode through-holes 513 and 533 and the second through-hole 710.

According to this embodiment, the target object (P1, see FIG. 9) fixed to the electrostatic chuck 10 not only exerts electrostatic power due to the first electrode 510 and the second electrode 530, but also the first to third electrostatic forces. It can also be fixed by vacuum suction force generated by the through-holes 310, 710, and 110 and the plurality of first and second electrode through-holes 513 and 533.

Therefore, according to the electrostatic chuck 10 of this embodiment, when peeling the protective film (P2, see FIG. 9) from the target object (P1, see FIG. 9) in a vacuum chamber (not shown), the target object (P1, 18) can be firmly fixed on the electrostatic chuck 10. Meanwhile, the electrostatic chuck 10 of this embodiment may also be used in the process of fixing a substrate (not shown) in a vacuum chamber and depositing a deposition material on the substrate.

In this embodiment, the first electrode 510 and the second electrode 530 that generate electrostatic power are located on the first insulating plate 300. That is, the first electrode 510 and the second electrode 530 having different polarities may be disposed on the same layer.

However, the present invention is not limited to this, and electrodes of different polarities may be disposed in different layers. For example, an insulating plate may be placed between electrodes of different polarities.

Referring to FIG. 8 , the third electrode 600 may be disposed on the second insulating plate 700 covering the first electrode 510 and the second electrode 530. Additionally, a third insulating plate 800 covering the third electrode 600 may be positioned on the second insulating plate 700 .

Unlike the above-described structure, the first electrode 510 and the second electrode 530 may have the same polarity. For example, the first electrode 510 and the second electrode 530 may have a (+) polarity, and the third electrode 600 may have a (-) polarity. Conversely, the third electrode 600 may have a (+) polarity, and the first electrode 510 and the second electrode 530 may have a (-) polarity.

In the following, referring to FIG. 9, the process of removing the protective film P2 from the target object P1 using the electrostatic chuck 10 of this embodiment and covering the protective cover P3 thereon will be described. .

The target object P1 placed on the electrostatic chuck 10 of this embodiment may be a light emitting display panel. At this time, the light emitting display panel may include components other than the protective cover P3 such as a window. Meanwhile, a protective film P2 may be attached to the top of the target object P1 to protect the target object P1.

Referring to FIG. 9(A), the target object P1 with the protective film P2 attached thereon is placed on the electrostatic chuck 10. At this time, electrostatic power can be generated by applying power to the first electrode 510 and the second electrode 530. Additionally, a vacuum pump (not shown) can be operated at the same time to generate vacuum suction force through the first to third through holes 310, 710, and 110. Accordingly, the target object P1 can be firmly fixed on the electrostatic chuck 10 by electrostatic force and vacuum suction force.

Then, as shown in FIG. 9(B), the protective film P2 attached on the target object P1 is peeled off. At this time, since the target object P1 is fixed to the electrostatic chuck 10 by electrostatic force and vacuum suction force, the target object P1 is separated from the electrostatic chuck 10 or its position changes on the electrostatic chuck 10. It can be prevented from happening.

When the protective film P2 is completely peeled off from the target object P1, the protective cover P3 can be attached on the target object P1, as shown in FIG. 9(C). While attaching the protective cover P3, the operation of the vacuum pump (not shown) can be stopped and the target object P1 can be fixed on the electrostatic chuck 10 only by electrostatic force. However, even while attaching the protective cover P3, the target object P1 can be fixed using electrostatic force and vacuum suction force by operating a vacuum pump (not shown).

In the following, an electrostatic chuck according to a second embodiment of the present invention will be described with reference to FIGS. 10 to 12. In describing the second embodiment, detailed description of the same configuration as the above-described first embodiment will be omitted.

Figure 10 is a plan view schematically showing an electrostatic chuck according to a second embodiment of the present invention, Figure 11 is a cross-sectional view taken along line B-B' of Figure 10, and Figure 12 is a first electrode on the first insulating plate of Figure 10. and a diagram showing the state in which the second electrode is disposed.

Unlike the first embodiment described above, the electrostatic chuck 10 of this embodiment has a plurality of first and second electrode through-holes 513 and 533 formed in the first electrode 510 and the second electrode 530. Instead, the first electrode 510 and the second electrode 530 may be arranged so as not to overlap the plurality of first through holes 310 .

Referring to FIGS. 10 to 12 , the first electrode 510 and the second electrode 530 may be arranged in parallel with the first row through-hole 311 and the second row through-hole 313. That is, the first electrode 510 and the second electrode 530 may be disposed to extend along the Y axis. At this time, the first electrode 510 and the second electrode 530 may be arranged in a straight line.

Also, the first electrode 510 and the second electrode 530 may be disposed between the first row through hole 311 and the second row through hole 313. More specifically, a pair of first electrodes 510 and second electrodes 530 may be disposed between the first thermal through-holes 311 and the second thermal through-holes 313. A pair of first electrodes 510 and second electrodes 530 may be arranged in parallel with each other and disposed between the first thermal through-holes 311 and the second thermal through-holes 313.

A plurality of first electrodes 510 and second electrodes 530 may be disposed on the first insulating plate 300 . At this time, each of the plurality of first electrodes 510 may be arranged on the first insulating plate 300 to be spaced apart from each other along the X-axis. Additionally, each of the plurality of second electrodes 530 may be disposed on the first insulating plate 300 to be spaced apart from each other along the X-axis. At this time, the first electrode 510 and the second electrode 530 form a pair and may be disposed between the first and second row through holes 311 and 313.

At this time, the plurality of first electrodes 510 arranged to be spaced apart from each other along the X-axis may be electrically connected to each other. Additionally, the plurality of second electrodes 530 may also be electrically connected to each other. However, the first electrode 510 and the second electrode 530 may be insulated from each other.

In this embodiment, a pair of first electrodes 510 and second electrodes 530 are arranged side by side, and the pair of first electrodes 510 and second electrodes 530 are arranged in plural pieces. It can be arranged to be spaced apart from each other along the X axis. In addition, between a pair of first electrodes 510 and second electrodes 530 and another pair of adjacent first electrodes 510 and second electrodes 530, a plurality of first through holes 310 are provided. can be placed. That is, between a pair of first electrodes 510 and second electrodes 530 and another pair of adjacent first electrodes 510 and second electrodes 530, a first thermal through hole 311 or a second electrode 530 is formed. Two rows of through holes 313 may be disposed.

However, the arrangement structure of the first electrode 510, the second electrode 530, and the plurality of first through holes 310 is not limited to the structure shown in FIG. 12 and may be arranged in various forms. In the following, various modifications of the first electrode 510, the second electrode 530, and the plurality of first through holes 310 will be described with reference to FIGS. 13 to 24. In describing various modifications, detailed descriptions of the same configuration described above will be omitted.

11 to 24 show modified examples of the first electrode and the second electrode of the second embodiment.

Referring to FIG. 13 , a pair of first electrodes 510 and second electrodes 530 may be disposed between the first row through-holes 311 and the second row through-holes 313. However, unlike the structure of FIG. 12, the pair of first electrodes 510 and second electrodes 530 extending along the Y axis are connected to another pair of adjacent first electrodes 510 and second electrodes 530. can be connected to each other. That is, among the plurality of first electrodes 510, a pair of adjacent first electrodes 510 are connected to each other, and among the plurality of second electrodes 530, a pair of adjacent second electrodes 530 are connected to each other. You can.

Specifically, the pair of first electrodes 510 and second electrodes 530 may extend along the Y axis and then be bent to extend in opposite directions along the Y axis. A pair of first electrodes 510 and second electrodes 530 may be disposed on the first insulating plate 300 while repeating this shape. That is, the pair of first electrodes 510 and second electrodes 530 shown in FIG. 13 may be an extension of one first electrode 510 and a second electrode 530.

Referring to FIG. 14, a first row through-hole 311 may be disposed between a pair of first electrodes 510 and second electrodes 530. At this time, a portion of the first electrode 510 and the second electrode 530 may partially extend along the X-axis and surround each of the first row through-holes 311.

The first electrode extension 511 may extend from the first electrode 510 along the X-axis, and the second electrode extension 531 may extend from the second electrode 530 along the X-axis. At this time, the first electrode extension 511 and the second electrode extension 531 may extend in different directions along the X-axis. The first electrode extension 511 and the second electrode extension 531 may be arranged to surround one first row through-hole 311.

Additionally, a second thermal through-hole 313 may be disposed between the pair of first electrodes 510 and second electrodes 530. At this time, a portion of the first electrode 510 and the second electrode 530 may partially extend along the X-axis to surround each of the second row through-holes 313.

Referring to Figures 15 to 17, a pair of first electrodes 510 and second electrodes 530 may continuously pass between a pair of adjacent first row through-holes 311. The pair of first electrodes 510 and the second electrodes 530 may extend along the Y axis and continuously pass between a pair of adjacent first row through-holes 311. Accordingly, the pair of first electrodes 510 and second electrodes 530 may be formed in a zigzag shape.

At this time, FIGS. 15 to 17 differ in the shape of the curved section of the first electrode 510 and the second electrode 530 passing between the pair of first row through-holes 311. For example, as shown in FIG. 15, a pair of first electrodes 510 and second electrodes 530 extend obliquely in the approximately 1 o'clock direction, and then extend obliquely in the approximately 11 o'clock direction. You can.

As shown in FIG. 16, the first electrode 510 and the second electrode 530 extend obliquely to approximately 1 o'clock, then to approximately 12 o'clock, and then again to approximately 11 o'clock. And, again, it can be formed in a shape extending approximately in the 12 o'clock direction.

As shown in FIG. 17, it may extend in the approximately 9 o'clock direction, then in the approximately 12 o'clock direction, then again in the approximately 3 o'clock direction, and then again in the 12 o'clock direction.

Meanwhile, the pair of first electrodes 510 and the second electrodes 530 can continuously pass between a pair of adjacent second row through-holes 313. Like the first row through-hole 311, the pair of first electrodes 510 and second electrodes 530 extend along the Y axis and continuously form between the adjacent pair of second row through-holes 313. You can pass by. Accordingly, the pair of first electrodes 510 and second electrodes 530 may be formed in a zigzag shape.

Referring to FIG. 18, a pair of first electrodes 510 and second electrodes 530 may simultaneously and continuously pass between the first row through-holes 311 and the second row through-holes 313. . 15 to 17, the pair of first electrodes 510 and second electrodes 530 pass between adjacent first row through-holes 311 or only between adjacent second row through-holes 313. It was arranged to pass by. However, in FIG. 18 , the pair of first electrodes 510 and second electrodes 530 may pass between the first row through-holes 311 and then between the second row through-holes 313.

Referring to FIG. 19, one of the first electrode 510 and the second electrode 530 may be disposed between the first row through hole 311 and the second row through hole 313. For example, the first electrode 510 is disposed between the first row through hole 311 and the second row through hole 313, or the first row through hole 311 and the second row through hole 313. A second electrode 530 may be disposed between them.

At this time, the first electrode 510 and the second electrode 530 may be arranged alternately along the X-axis. For example, along the It can be placed as .

The plurality of first electrodes 510 arranged to be spaced apart from each other along the X-axis may be electrically connected to each other. Additionally, the plurality of second electrodes 530 may also be electrically connected to each other. However, the first electrode 510 and the second electrode 530 may be insulated from each other.

Referring to FIGS. 20 to 22 , the first electrode 510 may continuously pass between a pair of adjacent first row through-holes 311 . The first electrode 510 may extend along the Y axis and continuously pass between a pair of adjacent first row through-holes 311. Accordingly, the first electrode 510 may be formed in a zigzag shape.

Additionally, the second electrode 530 may continuously pass between a pair of adjacent second row through-holes 313. The second electrode 530 may extend along the Y axis and continuously pass between a pair of adjacent second row through-holes 313. Accordingly, the first electrode 510 may be formed in a zigzag shape. At this time, the first electrode 510 and the second electrode 530 may be arranged to be symmetrical to each other about the Y axis.

At this time, Figures 20 to 22 show the first electrode 510 and the second electrode 530 passing between a pair of first row through holes 311 or between a pair of second row through holes 313. There is a difference in the shape of the curved section. For example, as shown in FIG. 20, the first electrode 510 may have a shape that extends obliquely in the approximately 1 o'clock direction and then obliquely in the approximately 11 o'clock direction.

As shown in FIG. 21, the first electrode 510 extends obliquely to approximately 1 o'clock, then to approximately 12 o'clock, and then again to approximately 11 o'clock. And, again, it can be formed in a shape extending approximately in the 12 o'clock direction.

As shown in FIG. 22, it may extend in the approximately 9 o'clock direction, then in the approximately 12 o'clock direction, then again in the approximately 3 o'clock direction, and then again in the 12 o'clock direction.

Referring to FIG. 23, the first electrode 510 continuously passes between the first row through-holes 311 and the second row through-holes 313, and the second electrode 530 also passes through the first row through-holes 313. It can pass between (311) and the second row through hole (313) simultaneously and continuously. However, unlike FIG. 18 , the first electrode 510 and the second electrode 530 do not simultaneously and continuously pass between the first row through-holes 311 and the second row through-holes 313. Only one of the first electrode 510 and the second electrode 530 can pass between the first thermal through-holes 311 and the second thermal through-holes 313 at the same time.

Referring to FIG. 24 , through-hole areas H1, H2, H3, and H4 in which a plurality of first through-holes 310 can be disposed may be formed at each corner of the first insulating plate 300. Only the plurality of first through holes 310 are disposed in the through hole areas H1, H2, H3, and H4, and the above-described first electrode 510 and second electrode 530 are not disposed.

The first electrode 510 and the second electrode 530 may be disposed only within the electrode areas (X1, X2, X3, X4, and X5). At this time, the plurality of first through holes 310 are not formed in the electrode areas (X1, X2, X3, X4, X5).

The electrode areas (X1, X2, A plurality of first through holes 310 may be disposed between the electrode areas (X1, X2, X3, X4, and X5).

In the following, an electrostatic chuck according to a third embodiment of the present invention will be described with reference to FIGS. 25 to 27. In describing the third embodiment, detailed description of the same configuration as the first and second embodiments described above will be omitted.

Figure 25 is a schematic exploded perspective view of an electrostatic chuck according to a third embodiment of the present invention, Figure 26 is a cross-sectional view of an electrostatic chuck according to a third embodiment of the present invention, and Figure 27 is a schematic perspective view of a support portion of the third embodiment of the present invention. .

Referring to FIGS. 25 to 27 , the electrostatic chuck 10 of this embodiment may include a connection plate 400 located between the support portion 100 and the first insulating plate 300. Additionally, a plurality of grooves 190 may be formed in the support part 100 instead of the plurality of third through holes 110 of the first embodiment.

The connection plate 400 may be made of a square-shaped flat plate. A plurality of fourth through holes 410 may be formed in the connection plate 400. The plurality of fourth through holes 410 may be formed in a pattern corresponding to the plurality of first through holes 310 described above.

Referring to FIG. 26 , the plurality of fourth through holes 410 may include a plurality of third row through holes 411 and fourth row through holes 413. The plurality of third row through-holes 411 may be formed in a pattern corresponding to the plurality of first row through-holes 311. That is, each of the plurality of third row through-holes 411 and the plurality of first row through-holes 311 may be arranged to overlap each other in a direction parallel to the Z axis. As a result, each of the plurality of third row through-holes 411 of the connection plate 400 may communicate with each of the first row of through-holes 311 of the first insulating plate 300.

Additionally, the plurality of fourth row through-holes 413 may be formed in a pattern corresponding to the plurality of second row through-holes 313. That is, each of the plurality of fourth row through-holes 413 and the plurality of second row through-holes 313 may be arranged to overlap each other in a direction parallel to the Z axis. As a result, each of the plurality of fourth row through-holes 413 of the connection plate 400 may communicate with each of the second row of through-holes 313 of the first insulating plate 300.

At this time, the diameter of each of the plurality of third row through-holes 411 and the plurality of fourth row through-holes 413 may be approximately 0.3 to 1.0 mm.

Referring to FIG. 27, in this embodiment, a plurality of grooves 190 may be formed on the upper surface of the support part 100. The plurality of grooves 190 may include a first groove 191 and a second groove 193.

The first groove 191 may have a groove shape extending along the Y axis. At this time, the first groove 191 can be formed through an etching process. For example, the upper surface of the support portion 100 made of nickel, cobalt, aluminum, titanium, etc. may be etched with an etchant to form a groove shape.

At this time, the first groove 191 may be formed to correspond to the plurality of third row through-holes 411 of the connection plate 400. Specifically, all of the plurality of third row through-holes 411 may overlap the first groove 191 in the Z-axis direction. As a result, one first groove 191 can communicate with all of the plurality of third row through-holes 411.

At this time, the width of the first groove 191 may be formed to be larger than the diameter of the plurality of third row through-holes 411. Here, the width of the first groove 191 represents the width measured parallel to the X axis.

Like the first groove 191, the second groove 193 may also have a groove shape extending along the Y axis. At this time, the second groove 193 may be formed to correspond to the plurality of fourth row through-holes 413 of the connection plate 400. Specifically, all of the plurality of fourth row through-holes 413 may overlap the second groove 193 in the Z-axis direction. As a result, one second groove 193 can communicate with all of the plurality of fourth row through-holes 413.

In this embodiment, one of the plurality of grooves 190 formed in the support part 100 is the plurality of third row through-holes 411 or the plurality of fourth row through-holes 413 of the connection plate 400. can communicate with each other.

Meanwhile, each of the first groove 191 and the second groove 193 of the support part 100 may be connected to a vacuum pump (not shown). A vacuum pump (not shown) may increase the degree of vacuum inside the first groove 191 or the second groove 193 by sucking gas inside the first groove 191 or the second groove 193.

In this embodiment, through holes corresponding to the plurality of first through holes 310 are not formed in the support part 100, but rather a groove somewhat larger in size than the through hole is formed, so that the support part 100 It can be easily manufactured.

As described above, the present invention has been described through limited examples and drawings, but the present invention is not limited thereto, and the technical idea of the present invention and the description below will be understood by those skilled in the art to which the present invention pertains. Various modifications and variations are possible within the scope of equivalence of the patent claims.

100 support
110 Third through hole
130 body
150 space
170 connector
190 Vengeance Home
191 1st home
193 2nd home
300 first insulating plate
310 first through hole
400 connection plate
410 4th through hole
510 first electrode
530 second electrode
600 third electrode

Claims (24)

support part;
a first insulating plate located on the support portion and having a plurality of first through holes;
a first electrode and a second electrode disposed on the first insulating plate, extending in a first direction and arranged side by side with each other; and
a second insulating plate disposed on the first insulating plate, covering the first electrode and the second electrode, and having a plurality of second through holes overlapping the plurality of first through holes;
The plurality of first through holes are,
a plurality of first row through-holes arranged along the first row parallel to the first direction, and
It is arranged in parallel with the first row of through holes and includes a plurality of second row through holes arranged along a second row parallel to the first direction,
The first electrode includes a plurality of first electrode through-holes that overlap the plurality of first row through-holes,
The second electrode includes a plurality of second electrode through-holes that overlap the plurality of second row through-holes. According to claim 1,
An electrostatic chuck, wherein the first electrode and the second electrode are arranged in plural numbers along a second direction intersecting the first direction. According to claim 2,
The first electrode and the second electrode are arranged alternately along the second direction. According to claim 2,
Among the plurality of first electrodes, a pair of adjacent first electrodes are connected to each other,
An electrostatic chuck, wherein a pair of adjacent second electrodes among the plurality of second electrodes are connected to each other. According to claim 1,
Each of the first electrode and the second electrode has a shape that is bent at least twice. According to claim 1,
The support part,
A body with a space formed inside and
An electrostatic chuck disposed on an upper surface of the body, connected to the space, and including a plurality of third through holes overlapping the plurality of first through holes. According to claim 6,
The electrostatic chuck, wherein the plurality of first through holes, the plurality of second through holes, the plurality of third through holes, the plurality of first electrode through holes, and the plurality of second electrode through holes communicate with each other. According to claim 6,
The support part is located on one side of the body and includes a connector connected to the space. According to claim 8,
An electrostatic chuck further comprising a vacuum pump connected to the connector. According to claim 1,
It is located between the support part and the first insulating plate, and further includes a connecting plate having a plurality of fourth through holes overlapping the plurality of first through holes,
The plurality of fourth through holes are,
A plurality of third row through-holes overlapping with the plurality of first row through-holes, and
An electrostatic chuck comprising a plurality of fourth row through-holes overlapping the plurality of second row through-holes. According to claim 10,
In the support part,
a first groove extending in the first direction and communicating with the plurality of third row through-holes; and
An electrostatic chuck including a second groove parallel to the first groove and communicating with the plurality of fourth row through-holes. According to claim 1,
The first electrode and the second electrode have different polarities. According to claim 1,
The first insulating plate is adjacent to at least one corner of the first insulating plate and includes a through-hole area in which only the first through hole is located. According to claim 1,
An electrostatic chuck, wherein a diameter of each of the plurality of first electrode through holes and the plurality of second electrode through holes is larger than a diameter of each of the plurality of first through holes. delete delete delete delete delete delete delete delete delete delete

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