KR102564312B1 - 진공 펌프 장치의 운전 제어장치, 및 운전 제어방법 - Google Patents

진공 펌프 장치의 운전 제어장치, 및 운전 제어방법 Download PDF

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Publication number
KR102564312B1
KR102564312B1 KR1020180042234A KR20180042234A KR102564312B1 KR 102564312 B1 KR102564312 B1 KR 102564312B1 KR 1020180042234 A KR1020180042234 A KR 1020180042234A KR 20180042234 A KR20180042234 A KR 20180042234A KR 102564312 B1 KR102564312 B1 KR 102564312B1
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KR
South Korea
Prior art keywords
pump
booster pump
booster
main
main pump
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Application number
KR1020180042234A
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English (en)
Korean (ko)
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KR20180115229A (ko
Inventor
지에 유안 린
고이치 이와사키
도루 오스가
유지 이시이
히로야스 가와시마
세이지 시마다
Original Assignee
가부시키가이샤 에바라 세이사꾸쇼
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Publication of KR20180115229A publication Critical patent/KR20180115229A/ko
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Publication of KR102564312B1 publication Critical patent/KR102564312B1/ko
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/02—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F04C2240/403—Electric motor with inverter for speed control
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/07—Electric current
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/86—Detection

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Forklifts And Lifting Vehicles (AREA)
  • Valves And Accessory Devices For Braking Systems (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
KR1020180042234A 2017-04-12 2018-04-11 진공 펌프 장치의 운전 제어장치, 및 운전 제어방법 Active KR102564312B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017078915A JP2018178846A (ja) 2017-04-12 2017-04-12 真空ポンプ装置の運転制御装置、及び運転制御方法
JPJP-P-2017-078915 2017-04-12

Publications (2)

Publication Number Publication Date
KR20180115229A KR20180115229A (ko) 2018-10-22
KR102564312B1 true KR102564312B1 (ko) 2023-08-07

Family

ID=62528208

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020180042234A Active KR102564312B1 (ko) 2017-04-12 2018-04-11 진공 펌프 장치의 운전 제어장치, 및 운전 제어방법

Country Status (5)

Country Link
EP (1) EP3388676B1 (enrdf_load_stackoverflow)
JP (1) JP2018178846A (enrdf_load_stackoverflow)
KR (1) KR102564312B1 (enrdf_load_stackoverflow)
CN (1) CN108691769B (enrdf_load_stackoverflow)
TW (1) TWI775832B (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12305650B2 (en) 2020-07-24 2025-05-20 Eaton Intelligent Power Limited Control system for a fluid management system
CN114812964B (zh) * 2021-09-30 2025-02-18 国家电网有限公司 一种内置式传感器密封性检测装置及方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004324644A (ja) * 2003-04-10 2004-11-18 Ebara Corp ドライ真空ポンプ及びその起動方法
JP2008175145A (ja) * 2007-01-18 2008-07-31 Ebara Corp 真空ポンプユニット
JP2014043800A (ja) * 2012-08-27 2014-03-13 Ebara Corp ポンプ制御装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2383335A1 (fr) * 1977-03-08 1978-10-06 Leybold Heraeus Sogev Pompe mecanique a joint d'huile
FR2621141B1 (fr) * 1987-09-25 1989-12-01 Cit Alcatel Procede de demarrage de pompes a vide couplees en serie, et dispositif permettant la mise en oeuvre de ce procede
JP4218756B2 (ja) 2003-10-17 2009-02-04 株式会社荏原製作所 真空排気装置
GB0424734D0 (en) * 2004-11-09 2004-12-08 Boc Group Plc Vacuum pumping system
GB0502149D0 (en) * 2005-02-02 2005-03-09 Boc Group Inc Method of operating a pumping system
WO2006109861A1 (en) * 2005-04-08 2006-10-19 Ebara Corporation Vacuum pump self-diagnosis method, vacuum pump self-diagnosis system, and vacuum pump central monitoring system
TWI467092B (zh) * 2008-09-10 2015-01-01 Ulvac Inc 真空排氣裝置
GB2502134B (en) * 2012-05-18 2015-09-09 Edwards Ltd Method and apparatus for adjusting operating parameters of a vacuum pump arrangement
JP6050081B2 (ja) * 2012-10-05 2016-12-21 株式会社荏原製作所 ドライ真空ポンプ装置
KR102190221B1 (ko) * 2014-03-24 2020-12-14 아뜰리에 부쉬 에스.아. 진공 펌프 시스템 및 진공 펌프 시스템에서의 펌핑 방법
CN104989621A (zh) * 2015-07-15 2015-10-21 陆铭 智能真空排气台
CN106014999B (zh) * 2016-06-09 2017-08-04 中国石油大学(华东) 一种水环真空泵机组高效运行控制方法和控制系统

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004324644A (ja) * 2003-04-10 2004-11-18 Ebara Corp ドライ真空ポンプ及びその起動方法
JP2008175145A (ja) * 2007-01-18 2008-07-31 Ebara Corp 真空ポンプユニット
JP2014043800A (ja) * 2012-08-27 2014-03-13 Ebara Corp ポンプ制御装置

Also Published As

Publication number Publication date
CN108691769B (zh) 2021-11-02
TW201842272A (zh) 2018-12-01
KR20180115229A (ko) 2018-10-22
TWI775832B (zh) 2022-09-01
CN108691769A (zh) 2018-10-23
EP3388676A1 (en) 2018-10-17
JP2018178846A (ja) 2018-11-15
EP3388676B1 (en) 2020-11-04

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