CN108691769B - 真空泵装置及用于真空泵装置的运转控制方法 - Google Patents

真空泵装置及用于真空泵装置的运转控制方法 Download PDF

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Publication number
CN108691769B
CN108691769B CN201810321818.1A CN201810321818A CN108691769B CN 108691769 B CN108691769 B CN 108691769B CN 201810321818 A CN201810321818 A CN 201810321818A CN 108691769 B CN108691769 B CN 108691769B
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China
Prior art keywords
pump
booster pump
main
main pump
booster
Prior art date
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Active
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CN201810321818.1A
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English (en)
Chinese (zh)
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CN108691769A (zh
Inventor
林介元
岩崎弘一
大须贺透
石井勇次
河嶌浩康
岛田圣二
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Ebara Corp
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Ebara Corp
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/02—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F04C2240/403—Electric motor with inverter for speed control
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/07—Electric current
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/86—Detection

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Forklifts And Lifting Vehicles (AREA)
  • Valves And Accessory Devices For Braking Systems (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
CN201810321818.1A 2017-04-12 2018-04-11 真空泵装置及用于真空泵装置的运转控制方法 Active CN108691769B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017078915A JP2018178846A (ja) 2017-04-12 2017-04-12 真空ポンプ装置の運転制御装置、及び運転制御方法
JP2017-078915 2017-04-12

Publications (2)

Publication Number Publication Date
CN108691769A CN108691769A (zh) 2018-10-23
CN108691769B true CN108691769B (zh) 2021-11-02

Family

ID=62528208

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201810321818.1A Active CN108691769B (zh) 2017-04-12 2018-04-11 真空泵装置及用于真空泵装置的运转控制方法

Country Status (5)

Country Link
EP (1) EP3388676B1 (enrdf_load_stackoverflow)
JP (1) JP2018178846A (enrdf_load_stackoverflow)
KR (1) KR102564312B1 (enrdf_load_stackoverflow)
CN (1) CN108691769B (enrdf_load_stackoverflow)
TW (1) TWI775832B (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12305650B2 (en) 2020-07-24 2025-05-20 Eaton Intelligent Power Limited Control system for a fluid management system
CN114812964B (zh) * 2021-09-30 2025-02-18 国家电网有限公司 一种内置式传感器密封性检测装置及方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2755328A1 (de) * 1977-03-08 1978-09-14 Leybold Heraeus Sogev Oelgedichtete vakuumpumpe
WO2006051260A1 (en) * 2004-11-09 2006-05-18 The Boc Group Plc Vacuum pumping system
WO2006082366A1 (en) * 2005-02-02 2006-08-10 Edwards Limited Method of operating a pumping system
WO2006109861A1 (en) * 2005-04-08 2006-10-19 Ebara Corporation Vacuum pump self-diagnosis method, vacuum pump self-diagnosis system, and vacuum pump central monitoring system
CN103711697A (zh) * 2012-10-05 2014-04-09 株式会社荏原制作所 干式真空泵装置和在该干式真空泵所使用的控制装置
CN106014999A (zh) * 2016-06-09 2016-10-12 中国石油大学(华东) 一种水环真空泵机组高效运行控制方法和控制系统
CN106232992A (zh) * 2014-03-24 2016-12-14 阿特利耶博世股份有限公司 真空泵系统中的泵送方法和真空泵系统

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2621141B1 (fr) * 1987-09-25 1989-12-01 Cit Alcatel Procede de demarrage de pompes a vide couplees en serie, et dispositif permettant la mise en oeuvre de ce procede
JP2004324644A (ja) * 2003-04-10 2004-11-18 Ebara Corp ドライ真空ポンプ及びその起動方法
JP4218756B2 (ja) 2003-10-17 2009-02-04 株式会社荏原製作所 真空排気装置
JP4820304B2 (ja) * 2007-01-18 2011-11-24 株式会社荏原製作所 真空ポンプユニット
TWI467092B (zh) * 2008-09-10 2015-01-01 Ulvac Inc 真空排氣裝置
GB2502134B (en) * 2012-05-18 2015-09-09 Edwards Ltd Method and apparatus for adjusting operating parameters of a vacuum pump arrangement
JP6030384B2 (ja) * 2012-08-27 2016-11-24 株式会社荏原製作所 ポンプ制御装置
CN104989621A (zh) * 2015-07-15 2015-10-21 陆铭 智能真空排气台

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2755328A1 (de) * 1977-03-08 1978-09-14 Leybold Heraeus Sogev Oelgedichtete vakuumpumpe
WO2006051260A1 (en) * 2004-11-09 2006-05-18 The Boc Group Plc Vacuum pumping system
WO2006082366A1 (en) * 2005-02-02 2006-08-10 Edwards Limited Method of operating a pumping system
WO2006109861A1 (en) * 2005-04-08 2006-10-19 Ebara Corporation Vacuum pump self-diagnosis method, vacuum pump self-diagnosis system, and vacuum pump central monitoring system
CN103711697A (zh) * 2012-10-05 2014-04-09 株式会社荏原制作所 干式真空泵装置和在该干式真空泵所使用的控制装置
CN106232992A (zh) * 2014-03-24 2016-12-14 阿特利耶博世股份有限公司 真空泵系统中的泵送方法和真空泵系统
CN106014999A (zh) * 2016-06-09 2016-10-12 中国石油大学(华东) 一种水环真空泵机组高效运行控制方法和控制系统

Also Published As

Publication number Publication date
TW201842272A (zh) 2018-12-01
KR20180115229A (ko) 2018-10-22
TWI775832B (zh) 2022-09-01
CN108691769A (zh) 2018-10-23
EP3388676A1 (en) 2018-10-17
KR102564312B1 (ko) 2023-08-07
JP2018178846A (ja) 2018-11-15
EP3388676B1 (en) 2020-11-04

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