KR102554425B1 - 앵커에 mims를 사용하는 dvc - Google Patents

앵커에 mims를 사용하는 dvc Download PDF

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Publication number
KR102554425B1
KR102554425B1 KR1020177024832A KR20177024832A KR102554425B1 KR 102554425 B1 KR102554425 B1 KR 102554425B1 KR 1020177024832 A KR1020177024832 A KR 1020177024832A KR 20177024832 A KR20177024832 A KR 20177024832A KR 102554425 B1 KR102554425 B1 KR 102554425B1
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South Korea
Prior art keywords
electrode
mems
layer
ohmic contact
disposed
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KR1020177024832A
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English (en)
Korean (ko)
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KR20170106489A (ko
Inventor
로버르튀스 페트뤼스 반 캄펀
로베르토 가디
리차드 엘. 크닙
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코르보 유에스, 인크.
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/005—Electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/01—Switches
    • B81B2201/012—Switches characterised by the shape
    • B81B2201/016—Switches characterised by the shape having a bridge fixed on two ends and connected to one or more dimples
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0052—Special contact materials used for MEMS
    • H01H2001/0057—Special contact materials used for MEMS the contact materials containing refractory materials, e.g. tungsten
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0084—Switches making use of microelectromechanical systems [MEMS] with perpendicular movement of the movable contact relative to the substrate

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Semiconductor Integrated Circuits (AREA)
KR1020177024832A 2015-02-05 2016-01-28 앵커에 mims를 사용하는 dvc Active KR102554425B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201562112217P 2015-02-05 2015-02-05
US62/112,217 2015-02-05
PCT/US2016/015360 WO2016126517A1 (en) 2015-02-05 2016-01-28 Dvc utilizing mims in the anchor

Publications (2)

Publication Number Publication Date
KR20170106489A KR20170106489A (ko) 2017-09-20
KR102554425B1 true KR102554425B1 (ko) 2023-07-11

Family

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Family Applications (1)

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KR1020177024832A Active KR102554425B1 (ko) 2015-02-05 2016-01-28 앵커에 mims를 사용하는 dvc

Country Status (6)

Country Link
US (1) US10163566B2 (enExample)
EP (1) EP3254294B1 (enExample)
JP (1) JP7021947B2 (enExample)
KR (1) KR102554425B1 (enExample)
CN (1) CN107430963B (enExample)
WO (1) WO2016126517A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018063814A1 (en) * 2016-09-29 2018-04-05 Cavendish Kinetics, Inc Mems rf-switch with near-zero impact landing
US11746002B2 (en) * 2019-06-22 2023-09-05 Qorvo Us, Inc. Stable landing above RF conductor in MEMS device
US11705298B2 (en) 2019-06-22 2023-07-18 Qorvo Us, Inc. Flexible MEMS device having hinged sections
US11667516B2 (en) * 2019-06-26 2023-06-06 Qorvo Us, Inc. MEMS device having uniform contacts

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005528751A (ja) * 2002-05-31 2005-09-22 ノースロップ グラマン コーポレーション 微小電気機械スイッチ
JP2010245276A (ja) * 2009-04-06 2010-10-28 Fujitsu Ltd 可変容量素子
WO2014165624A1 (en) * 2013-04-04 2014-10-09 Cavendish Kinetics, Inc Mems digital variable capacitor design with high linearity

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7265647B2 (en) 2004-03-12 2007-09-04 The Regents Of The University Of California High isolation tunable MEMS capacitive switch
JPWO2006011239A1 (ja) 2004-07-29 2008-05-01 株式会社日立メディアエレクトロニクス 容量型ｍｅｍｓ素子とその製造方法、及び高周波装置
CN100403476C (zh) 2004-09-27 2008-07-16 东南大学 射频微电子机械单刀双掷膜开关及其制造方法
US20070115082A1 (en) * 2005-10-03 2007-05-24 Analog Devices, Inc. MEMS Switch Contact System
WO2010054244A2 (en) * 2008-11-07 2010-05-14 Cavendish Kinetics, Inc. Method of using a plurality of smaller mems devices to replace a larger mems device
JP2010135614A (ja) * 2008-12-05 2010-06-17 Fujitsu Ltd 可変容量素子
JP5208867B2 (ja) * 2009-06-25 2013-06-12 株式会社東芝 Ｍｅｍｓデバイス及びその製造方法
US8709264B2 (en) 2010-06-25 2014-04-29 International Business Machines Corporation Planar cavity MEMS and related structures, methods of manufacture and design structures
US8797127B2 (en) * 2010-11-22 2014-08-05 Taiwan Semiconductor Manufacturing Company, Ltd. MEMS switch with reduced dielectric charging effect
EP2751818B1 (en) * 2011-09-02 2019-05-08 Cavendish Kinetics Inc. Rf mems isolation, series and shunt dvc, and small mems
WO2014038086A1 (ja) * 2012-09-10 2014-03-13 富士通株式会社 可変容量回路及びインピーダンス整合回路
JP2015001459A (ja) * 2013-06-17 2015-01-05 セイコーエプソン株式会社 機能素子、電子機器、および移動体
WO2015017743A1 (en) * 2013-08-01 2015-02-05 Cavendish Kinetics, Inc Dvc utilizing mems resistive switches and mim capacitors
CN104037027B (zh) 2014-06-26 2016-02-03 电子科技大学 一种mems电容开关

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005528751A (ja) * 2002-05-31 2005-09-22 ノースロップ グラマン コーポレーション 微小電気機械スイッチ
JP2010245276A (ja) * 2009-04-06 2010-10-28 Fujitsu Ltd 可変容量素子
WO2014165624A1 (en) * 2013-04-04 2014-10-09 Cavendish Kinetics, Inc Mems digital variable capacitor design with high linearity

Also Published As

Publication number Publication date
EP3254294B1 (en) 2023-05-24
WO2016126517A1 (en) 2016-08-11
JP2018509757A (ja) 2018-04-05
JP7021947B2 (ja) 2022-02-17
US10163566B2 (en) 2018-12-25
CN107430963B (zh) 2019-12-13
US20180033553A1 (en) 2018-02-01
KR20170106489A (ko) 2017-09-20
CN107430963A (zh) 2017-12-01
EP3254294A1 (en) 2017-12-13

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