KR102526465B1 - A heating system - Google Patents

Abstract

A heat treatment system according to an embodiment includes a cassette accommodating a plurality of workpieces, a chamber accommodating the cassettes, maintained in a vacuum state, and performing a heat treatment process on the workpieces, and a part disposed inside the chamber, the cassettes Is connected to, the other part includes a connecting box disposed outside the chamber, the inside of the connecting box can be maintained at atmospheric pressure.

Description

Heat treatment system {A HEATING SYSTEM}

The embodiments below relate to a heat treatment system.

The annealing device used in the manufacture of semiconductors, flat panel displays, and solar cells is an essential heat treatment for processes such as crystallization and phase change for predetermined films (organic and inorganic) deposited on substrates such as silicon wafers or glass. It is a device that performs

A typical annealing device includes a silicon crystallization device that crystallizes amorphous silicon deposited on a glass substrate into polysilicon when manufacturing a liquid crystal display or a thin film crystalline silicon solar cell.

In order to perform such a crystallization process (heat treatment process), a heat treatment device capable of heating a substrate on which a predetermined thin film (hereinafter referred to as “film”) is formed is required. For example, a temperature of at least 400 to 600° C. is required for crystallization of amorphous silicon.

In general, heat treatment apparatuses include a single wafer type heat treatment capable of performing heat treatment on one substrate and a batch type heat treatment capable of performing heat treatment on a plurality of substrates. The single-wafer type has the advantage of a simple device configuration, but has the disadvantage of low productivity, so the batch type has recently been in the limelight for mass production.

Korean Patent Publication No. 2008??0069329 discloses a technical concept related to a heat treatment device.

An object according to one embodiment is to provide a heat treatment system in which separation and coupling of chambers can be facilitated.

An object according to one embodiment is to provide a heat treatment system including a connecting box capable of accommodating cables under atmospheric pressure in a chamber maintained in vacuum.

A heat treatment system according to an embodiment includes a cassette accommodating a plurality of workpieces, a chamber accommodating the cassettes, maintained in a vacuum state, and performing a heat treatment process on the workpieces, and a part disposed inside the chamber, the cassettes Is connected to, the other part includes a connecting box disposed outside the chamber, the inside of the connecting box can be maintained at atmospheric pressure.

The chamber includes a lower chamber disposed on a lower side and an upper chamber disposed on an upper side of the lower chamber, an upper flange is formed on a lower surface of the upper chamber, and a lower flange is formed on an upper surface of the lower chamber. One end and the other end of the flange and the lower flange are formed in a horizontal direction, and a portion disposed between one end and the other end is formed to incline downward as it progresses from the one end to the other end, so that a part of the upper flange and the Portions of the lower flange may abut each other in an inclined shape.

At this time, a first sealing element may be disposed at a portion disposed between one end and the other end of each of the upper flange and the lower flange, and a second sealing element may be disposed at one end and the other end of each of the upper flange and the lower flange. may be additionally placed.

In addition, a plurality of stoppers spaced apart from each other at predetermined intervals may be formed at the other end of the lower chamber, and the stoppers may be formed in a roller shape. When the upper chamber is placed above the lower chamber, the stopper may prevent the upper chamber from moving outward from the lower chamber.

A plurality of guides spaced apart from each other at predetermined intervals may be formed on outer surfaces of the upper flange and the lower flange, and clamps for coupling the upper chamber and the lower chamber may be disposed on each guide.

In addition, the connecting box extends in a direction perpendicular to the ground and is disposed below the accommodating portion capable of accommodating a plurality of cables and communicates with the accommodating portion while supporting the accommodating portion so that the plurality of cables It includes a support part that can pass through, the accommodating part is disposed in the chamber maintained at a vacuum, the support part is disposed outside the chamber maintained at atmospheric pressure, and the inside of the accommodating part can be maintained at atmospheric pressure, The accommodating portion is connected to the cassette, and each of a plurality of cables accommodated inside the accommodating portion may be wired in the cassette.

The accommodating part is located in front of each of an atmospheric pressure box that accommodates the plurality of cables and can maintain an atmospheric pressure inside, a plurality of wiring ports formed at regular intervals on one side of the atmospheric pressure box, and a plurality of wiring ports. It includes a plurality of shielding blocks that can be disposed to airtightly shield the receiving part,

Each feed-through accommodated in the cassette may be connected to each cable accommodated in the accommodating portion through the wiring port, and each shield block may guide the feed-through into the accommodating portion.

The accommodating part further includes a plurality of cable guiders disposed spaced apart from each other at regular intervals along the longitudinal direction inside the accommodating part, each cable guider having a plurality of holes, and each of the cable guiders accommodated inside the accommodating part. The cable may pass through each hole of the cable guider and be guided to the wiring port.

In this case, the cable guider may include a plurality of plates formed with recessed elements at regular intervals on one surface, and a shaft passing through both ends of each plate to couple the plurality of plates.

In addition, a part of the support part of the connecting box may move up and down inside the chamber, and one or more corrugated pipes may be formed on a portion of an outer surface of the support part.

In addition, the accommodating part may further include a cooling element disposed inside the atmospheric pressure box, and the cooling element may cool the temperature inside the atmospheric pressure box to a preset temperature.
A heat treatment system according to an embodiment includes a cassette accommodating a plurality of workpieces, a chamber accommodating the cassettes, maintained in a vacuum state, and performing a heat treatment process on the workpieces, and a part disposed inside the chamber, the cassettes Is connected to, the other part includes a connecting box disposed outside the chamber, the inside of the connecting box can be maintained at atmospheric pressure. The chamber includes a lower chamber disposed on a lower side and an upper chamber disposed on an upper side of the lower chamber, an upper flange is formed on a lower surface of the upper chamber, and a lower flange is formed on an upper surface of the lower chamber. Each of the flange and the lower flange includes a first portion formed to be inclined at a predetermined inclination on the side of the chamber, and extending horizontally from one end of the chamber to an upper end of the first portion located on the side of the chamber. It may include a second part and a third part extending horizontally from the other end of the chamber to the lower end of the first part located on the side of the chamber.
A first sealing element may be disposed on each of the first portions of the upper flange and the lower flange.
A second sealing element may be additionally disposed on the second part or the third part of each of the upper flange and the lower flange.
A plurality of stoppers spaced apart from each other at predetermined intervals may be formed in the third portion of the lower chamber.

In the heat treatment system according to an embodiment, separation and coupling of chambers may be facilitated.

A heat treatment system according to an embodiment may include a connecting box capable of accommodating a cable under atmospheric pressure in a vacuum maintained chamber.

1 and 2 show a thermal treatment system according to one embodiment including a chamber, a cassette and a connecting box.
3 shows a state in which chambers of a heat treatment system according to an embodiment are separated into an upper chamber and a lower chamber.
4 and 5 detail a portion of a lower chamber of a thermal treatment system according to one embodiment.
6 shows guides formed on the upper and lower chambers of the thermal treatment system according to one embodiment.
7 shows a state in which an upper chamber and a lower chamber of a heat treatment system are coupled according to an embodiment.
8 illustrates in detail a process in which an upper chamber and a lower chamber of a heat treatment system are separated from each other according to an exemplary embodiment.
9 shows a cassette and a connecting box of a heat treatment system according to one embodiment.
10 shows a side view of a connecting box of a heat treatment system according to one embodiment.
11 shows in detail a portion of a connecting box of a heat treatment system according to one embodiment.
12 shows a cable guider of a connecting box of a heat treatment system according to an embodiment.
Figure 13 shows an exploded view of the atmospheric pressure box of the connecting box according to an embodiment.
14 shows a sequence of combining a cassette and a connecting box of a heat treatment system according to an embodiment.
15 shows a state in which a connecting box of a heat treatment system moves up and down in a chamber together with a cassette according to an embodiment.

Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. However, since various changes can be made to the embodiments, the scope of the patent application is not limited or limited by these embodiments. It should be understood that all changes, equivalents or substitutes to the embodiments are included within the scope of rights.

Terms used in the examples are used only for descriptive purposes and should not be construed as limiting. Singular expressions include plural expressions unless the context clearly dictates otherwise. In this specification, terms such as "include" or "have" are intended to designate that there is a feature, number, step, operation, component, part, or combination thereof described in the specification, but one or more other features It should be understood that the presence or addition of numbers, steps, operations, components, parts, or combinations thereof is not precluded.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by a person of ordinary skill in the art to which the embodiment belongs. Terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with the meaning in the context of the related art, and unless explicitly defined in the present application, they should not be interpreted in an ideal or excessively formal meaning. don't

In addition, in the description with reference to the accompanying drawings, the same reference numerals are given to the same components regardless of reference numerals, and overlapping descriptions thereof will be omitted. In describing the embodiment, if it is determined that a detailed description of a related known technology may unnecessarily obscure the gist of the embodiment, the detailed description will be omitted.

In addition, in describing the components of the embodiment, terms such as first, second, A, B, (a), and (b) may be used. These terms are only used to distinguish the component from other components, and the nature, order, or order of the corresponding component is not limited by the term. When an element is described as being “connected,” “coupled to,” or “connected” to another element, that element may be directly connected or connected to the other element, but there may be another element between the elements. It should be understood that may be "connected", "coupled" or "connected".

Components included in one embodiment and components having common functions will be described using the same names in other embodiments. Unless stated to the contrary, descriptions described in one embodiment may be applied to other embodiments, and detailed descriptions will be omitted to the extent of overlap.

1 and 2 show a thermal treatment system according to one embodiment including a chamber, a cassette and a connecting box. 3 shows a state in which chambers of the heat treatment system according to an embodiment are separated into an upper chamber and a lower chamber. 4 and 5 detail a portion of a lower chamber of a thermal treatment system according to one embodiment. 6 shows guides formed on the upper and lower chambers of the heat treatment system according to an embodiment, and FIG. 7 shows a state in which the upper chamber and the lower chamber of the heat treatment system are coupled according to an embodiment. FIG. 8 shows in detail a process in which an upper chamber and a lower chamber of a heat treatment system are separated from each other according to an embodiment, and FIG. 9 shows a cassette and a connecting box of the heat treatment system according to an embodiment. Fig. 10 shows a side view of a connecting box of a heat treatment system according to an embodiment, and Fig. 11 shows a part of the connecting box of a heat treatment system according to an embodiment in detail. Figure 12 shows a cable guider of a connecting box of a heat treatment system according to an embodiment, and Figure 13 shows an exploded view of an atmospheric pressure box of a connecting box according to an embodiment. 14 shows a sequence in which a cassette and a connecting box of a heat treatment system according to an embodiment are combined, and FIG. 15 shows a state in which a connecting box of a heat treatment system according to an embodiment moves up and down in a chamber together with a cassette.

1 and 2, the heat treatment system according to an embodiment includes a cassette 300 for accommodating a plurality of workpieces, a chamber 100 for receiving the cassettes and maintaining a vacuum state, and performing a heat treatment process on the workpieces. and a connecting box 200 in which one part is disposed inside the chamber and connected to the cassette 300 and the other part is disposed outside the chamber, and the inside of the connecting box 200 may be maintained at atmospheric pressure.

Specifically, the chamber 100 capable of accommodating the cassette includes a lower chamber 110 disposed on the lower side and an upper chamber 120 disposed on the upper side of the lower chamber, and a portion of the lower surface of the upper chamber and the lower chamber A portion of the upper surface may be formed in an inclined shape so as to come into contact with each other.

Also, the connecting box 200 may be disposed in the chamber 100 where a part of the connecting box 200 is maintained in a vacuum. Specifically, the connecting box 200 extends in a direction perpendicular to the ground and is disposed below the accommodating portion 210 capable of accommodating a plurality of cables and communicating with the accommodating portion while supporting the accommodating portion. It may include a support portion 220 through which cables may pass.

At this time, the accommodating part 210 is disposed in the chamber 100 maintained in a vacuum, the support part 220 is disposed outside the chamber 100 maintained at atmospheric pressure, and the inside of the accommodating part 210 is in an atmospheric pressure state. can be maintained as

Referring to FIG. 3 , an upper flange 121 may be formed on a lower surface of an upper chamber, and a lower flange 111 may be formed on an upper surface of the lower chamber. One end (A) and the other end (B) of the upper flange 121 and the lower flange 111 are formed in a horizontal direction, and a portion (C) disposed between one end and the other end is formed to be inclined at a predetermined inclination. can

At this time, the portion (C) disposed between one end and the other end of each of the upper flange and the lower flange may be formed to be inclined downward as it progresses from the one end (A) to the other end (B).

Accordingly, when the upper chamber 120 is placed on top of the lower chamber 110, the upper chamber 120 has a structure that can slide with respect to the lower chamber 110. Accordingly, as will be described later, when separating the upper chamber 120 from the lower chamber 110, there is no need to lift the upper chamber 120 upward, and by moving the upper chamber 120 in one direction, It is a structure capable of separating the upper chamber 120 from the lower chamber 110 .

At this time, the first sealing element 131 may be disposed in the portion (C) disposed between one end and the other end of each of the upper flange 121 or the lower flange 111 . Furthermore, the second sealing element 132 may be additionally disposed at one end (A) and the other end (B) of the upper flange or the lower flange, respectively.

Referring to FIG. 4 , a first sealing element 131 may be disposed in a portion C disposed between one end and the other end of the lower flange 111 of the lower chamber 110 . Correspondingly, the first sealing element may also be disposed in a portion disposed between one end and the other end of the upper flange of the upper chamber.

Furthermore, as shown in FIG. 5, the second sealing element 132 is disposed not only in the portion C disposed between one end and the other end of the lower flange 111 of the lower chamber 110 but also in the portion corresponding to the other end B. It can be.

Similarly, a second sealing element may also be disposed at a portion corresponding to one end (A) of the lower flange 111 of the lower chamber 110, and an additional second sealing element may be added to one or the other end of the upper flange of the upper chamber. It goes without saying that can be placed.

Through this structure, it is possible to adjust the difficulty of processing in a process for inserting the sealing element on the upper flange or the lower flange, and it is possible to reduce the manufacturing cost for deriving the structure.

In addition, holes of various shapes may be formed on each part of the upper flange or the lower flange to increase ease of processing and prevent distortion in the manufacturing process.

Referring to FIG. 6 , a plurality of stoppers 140 spaced apart from each other at predetermined intervals may be formed at the other end of the lower chamber 110 . In addition, a plurality of guides 150 spaced apart from each other at predetermined intervals may be formed on outer surfaces of the upper flange 121 and the lower flange 111, and the upper chamber and the lower chamber are coupled to each guide 150. Each clamp 160 for doing may be disposed.

That is, the guide 150 serves to guide the clamp so that the clamp 160 can be attached to a predetermined position.

In addition, the stopper 140 may be formed in a roller shape. Specifically, the stopper 140 consists of one or more rollers 141, a rotating shaft 142 disposed through the one or more rollers 141, and a frame 143 accommodating the rollers 141 and the rotating shaft 142 It can be. In addition, the stopper 140 may include a roller plate 144 disposed in front of the roller.

Referring to FIG. 7 , the stopper 140 having the above structure can stably guide the upper chamber 120 to a predetermined position on the lower chamber 110 .

In addition, when the upper chamber and the lower chamber are coupled, the stopper prevents direct damage to the upper chamber and only damages component elements such as roller plates, thereby improving the durability of the overall equipment and reducing maintenance costs. can

Furthermore, the stopper may prevent the upper chamber from being pushed outward of the lower chamber due to contraction and expansion of the chamber by a pumping action for maintaining a vacuum state in a state in which the upper chamber is placed above the lower chamber.

This action ultimately suppresses the occurrence of a leak point due to the pushing of the chamber and can lead to an effect of attenuating the eccentric load on the sealing element (eg, O ring).

In addition, clamps 160 may be mounted on each of the plurality of guides in order to firmly couple the upper chamber and the lower chamber.

Referring to FIG. 8, when the upper chamber 120 is to be separated from the lower chamber 110 by using a chamber having the above structure, the upper chamber 120 is separated from the lower chamber 110 by forcible upper chamber 120. No need to lift in any direction.

That is, as shown in (a) of FIG. 8, by moving the upper chamber 120 in the lateral direction of the lower chamber 110, as shown in (b) of FIG. 8, the upper chamber 120 and the lower chamber 110 are stably separated. can make it

The chamber 100 including the configurations described above can be easily separated and coupled, and when coupled, the upper chamber and the lower chamber can be effectively prevented from being pushed against each other by gravity and pumping. Furthermore, when the chamber is coupled, the upper chamber can be stably guided to the upper side of the lower chamber, and the upper chamber and the lower chamber can be firmly and closely coupled.

Referring to FIG. 9, a part of the driving device 20 for supporting a cassette 300 accommodating a plurality of workpieces and moving the cassette 300 up and down may be disposed inside the chamber, and at this time , The connecting box 200 according to one embodiment may be disposed on one side of the driving device as a component forming the driving device.

That is, when the cassette 300 is seated on the upper surface of the driving device 20 in the chamber, the cassette 300 may be connected to the connecting box 200 .

Specifically, referring to FIGS. 10 and 11 , the accommodating part 210 is connected to a cassette disposed in the chamber, and each of a plurality of cables C accommodated inside the accommodating part may be wired in the cassette.

In addition, the accommodating part 210 accommodates a plurality of cables C and has an atmospheric pressure box 211 in which the inner side can be maintained in an atmospheric pressure state and a plurality of wiring ports formed spaced apart at regular intervals on one side of the atmospheric pressure box. (212).

Each feed through (F) accommodated in the cassette may be connected to each cable (C) accommodated in the accommodating unit through a wiring port (212).

In addition, the accommodating unit 210 further includes a plurality of shielding blocks 213 disposed in front of each of the plurality of wiring ports to airtightly shield the accommodating unit, and each of the shielding blocks provides a feed through to the inside of the accommodating unit. can be guided.

In addition, between the accommodating portion 210 and each of the shielding blocks 213, a fifth sealing element 215 may be additionally disposed individually. The confidentiality of the receiving part 210 by the shielding block 213 can be improved by the fifth sealing element 215 as described above. At this time, as an example, the fifth sealing element may be formed as an O ring.

In addition, a cooling element 216 is disposed inside the atmospheric pressure box 211 of the accommodating part 210 to cool the high temperature in the atmospheric pressure box to a predetermined value. At this time, the cooling element 216 may form a cooling passage to flow appropriately cooled air or refrigerant.

In addition, the accommodating part 210 may further include a plurality of cable guiders 214 spaced apart from each other at regular intervals along the longitudinal direction inside the accommodating part. At this time, each cable guider has a plurality of holes, and each cable accommodated inside the accommodating part may pass through each hole of the cable guider and be guided to the wiring port.

By using the connecting box 200 having such a configuration, it is possible to effectively provide pipes and wires maintained at atmospheric pressure in a chamber maintained at a vacuum state. Accordingly, it is possible to reduce the use of expensive vacuum components that must be used in a vacuum, and by arranging components that could not be used in a vacuum in the past inside a connecting box maintained at atmospheric pressure, the components can be maintained even in a chamber maintained in a vacuum. can be used effectively This can lead to an effect of lowering the manufacturing cost of the overall equipment.

Referring to FIG. 12, the cable guider 214 may include a plurality of plates 2141 on one surface of which recessed elements are formed at regular intervals, and a shaft 2142 that penetrates both ends of each plate and couples the plurality of plates. can At this time, a separate recessed element may not be formed on the uppermost plate forming the cable guider 214 . That is, the uppermost plate forming the cable guider 214 may be formed as a flat plate.

Through this structure of the cable guider, it is possible to effectively prevent the occurrence of a short circuit due to damage to the coating of each cable in a high-temperature environment inside the connecting box. can be effectively controlled.

That is, power can be effectively supplied even when some cables are damaged due to a high-temperature environment, and an effect of minimizing an energization phenomenon can be derived through preceding isolation measures between cables.

Referring to FIG. 13, the atmospheric pressure box 211 includes a first shield element 2111 accommodating a plurality of cable guiders 214 and each cable guider 214 within the first shield element 2111 at regular intervals. A separation element 2112 for spaced apart, a first cover element 2113 for shielding one side of the first shield element 2111, a second shield element for accommodating the first shield element and the first cover element ( 2114), a second cover element 2115 for shielding one side of the second shield element 2114, a third sealing element 2116 disposed between one side of the second shield element and the second cover element, and the A third shield element 2117 disposed at the outermost part may be included to accommodate the previous configurations. Additionally, a fourth sealing element 2118 may be additionally disposed on the lower surface of the second shield element 2114 and the lower surface of the third shield element 2117 . Here, the third sealing element and the fourth sealing element may be formed of a metal O ring.

In this way, by implementing the configuration of the atmospheric pressure box 211 as a double shield structure, durability can be improved in a high-temperature environment inside the chamber, and the influence of heat on the cables existing inside the atmospheric pressure box can be minimized.

Based on the above description, a mechanism in which the cassette 300 is disposed on the driving device 20 and connected to the accommodating portion 210 of the connecting box will be described with reference to FIG. 14 . As shown in (a) of FIG. 14, the cassette 300 may descend to the upper surface of the driving device 20. As shown in (b) of FIG. 14, when the cassette is seated on the upper surface of the driving device 20, the cassette does not exist on the upper side of the supporting part 220 of the connecting box. Then, the accommodating part 210 of the connecting box is disposed on one side of the cassette 300, and the accommodating part 210 may be connected to the cassette 300 and the support part 220.

Also, referring to FIG. 15 , a part of the support part 220 of the connecting box 200 may move up and down inside the chamber.

In addition, one or more corrugated pipes 221 may be formed on a portion of the outer surface of the support part 220 . By additionally forming the shape of the corrugated pipe 221 on the outer surface of the support part, durability of the support part can be improved by offsetting the stress value due to thermal expansion in a high-temperature environment.

The connecting box according to an embodiment including the configurations described above can stably place various cables that can be operated at atmospheric pressure in a vacuum chamber by effectively maintaining atmospheric pressure in a vacuum heat treatment system.

Furthermore, the connecting box can stably guide a plurality of cables accommodated inside, and can effectively protect it from high temperatures. In addition, the connecting box may include a support having strong resistance to deformation by heat.

As described above, although the embodiments have been described with limited drawings, those skilled in the art can apply various technical modifications and variations based on the above. For example, the described techniques may be performed in an order different from the method described, and/or components of the described system, structure, device, circuit, etc. may be combined or combined in a different form than the method described, or other components may be used. Or even if it is replaced or substituted by equivalents, appropriate results can be achieved.

Therefore, other implementations, other embodiments, and equivalents of the claims are within the scope of the following claims.

100: chamber
110: lower chamber
120: upper chamber
131: first sealing element
132: second sealing element
140: stopper
150: Guide
160: clamp
200: connecting box
210: receiving part
220: support
300: cassette

Claims (11)

a cassette accommodating a plurality of workpieces;
a chamber accommodating the cassette, maintained in a vacuum state, and performing a heat treatment process on the workpiece; and
a connecting box, one part of which is disposed inside the chamber and connected to the cassette, and the other part is disposed outside the chamber;
including,
The inside of the connecting box is maintained at atmospheric pressure,
the chamber,
a lower chamber disposed on the lower side; and
an upper chamber placed above the lower chamber;
including,
An upper flange is formed on a lower surface of the upper chamber, and a lower flange is formed on an upper surface of the lower chamber,
Each of the upper flange and the lower flange,
a first portion formed to be inclined at a predetermined inclination on a side of the chamber;
a second part extending horizontally from one end of the chamber to an upper end of the first part located on a side of the chamber; and
a third portion extending horizontally from the other end of the chamber to a lower end of the first portion located on a side of the chamber;
Including, heat treatment system.
delete According to claim 1,
A first sealing element may be disposed on the first portion of each of the upper flange and the lower flange.
According to claim 3,
A second sealing element may be additionally disposed on the second portion or the third portion of each of the upper flange and the lower flange.
According to claim 4,
A plurality of stoppers spaced apart from each other at predetermined intervals may be formed in the third part of the lower chamber,
The stopper may be formed in a roller shape,
The stopper may guide the upper chamber to a predetermined position on the lower chamber,
The heat treatment system, wherein the stopper can prevent the upper chamber from moving to the outside of the lower chamber when the upper chamber is placed above the lower chamber.
According to claim 5,
A plurality of guides spaced apart from each other at predetermined intervals may be formed on outer surfaces of the upper flange and the lower flange,
On each guide, a respective clamp for coupling the upper chamber and the lower chamber may be disposed.
According to claim 1,
The connecting box,
An accommodating portion extending in a direction perpendicular to the ground and accommodating a plurality of cables; and
a support part disposed below the accommodating part to support the accommodating part and communicate with the accommodating part through which the plurality of cables can pass;
including,
The accommodating part is disposed in the chamber maintained at a vacuum, and the support is disposed outside the chamber maintained at atmospheric pressure,
The inside of the receiving portion may be maintained at atmospheric pressure,
The heat treatment system of claim 1 , wherein the accommodating portion is connected to the cassette, and each of a plurality of cables accommodated inside the accommodating portion can be wired in the cassette.
According to claim 7,
The receiving part,
an atmospheric pressure box accommodating the plurality of cables and maintaining an atmospheric pressure inside the box;
a plurality of wiring ports spaced apart from each other at regular intervals on one side of the atmospheric pressure box; and
a plurality of shielding blocks disposed in front of each of the plurality of wiring ports to airtightly shield the receiving portion;
including,
Each feed-through accommodated in the cassette may be connected to each cable accommodated in the receiving portion through the wiring port,
Each shielding block is capable of guiding a feedthrough into the receiving portion.
According to claim 8,
The receiving part,
a plurality of cable guiders spaced apart from each other at regular intervals along the longitudinal direction inside the receiving portion;
Including more,
Each cable guider has a plurality of holes,
Each cable accommodated inside the receiving portion passes through each hole of the cable guider and is guided to the wiring port,
The cable guider,
A plurality of plates formed with recessed elements at regular intervals on one surface; and
A shaft passing through both ends of each plate to couple the plurality of plates;
Including, heat treatment system.
According to claim 7,
A part of the support of the connecting box may be moved up and down inside the chamber,
One or more corrugated pipes may be formed on a portion of the outer surface of the support part.
According to claim 8,
The receiving part,
a cooling element disposed inside the atmospheric pressure box;
Including more,
The cooling element can cool the temperature in the atmospheric pressure box to a predetermined temperature, the heat treatment system.

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