KR102526455B1 - A chamber - Google Patents

Abstract

A chamber capable of accommodating a workpiece according to an embodiment includes a lower chamber disposed on a lower side and an upper chamber disposed on an upper side of the lower chamber, and a portion of a lower surface of the upper chamber and an upper surface of the lower chamber are formed. Some portions may be formed in an inclined shape and come into contact with each other.

Description

chamber {A CHAMBER}

The embodiments below relate to chambers.

The annealing device used in the manufacture of semiconductors, flat panel displays, and solar cells is an essential heat treatment for processes such as crystallization and phase change for predetermined films (organic and inorganic) deposited on substrates such as silicon wafers or glass. It is a device that performs

A typical annealing device includes a silicon crystallization device that crystallizes amorphous silicon deposited on a glass substrate into polysilicon when manufacturing a liquid crystal display or a thin film crystalline silicon solar cell.

In order to perform such a crystallization process (heat treatment process), a heat treatment device capable of heating a substrate on which a predetermined thin film (hereinafter referred to as “film”) is formed is required. For example, a temperature of at least 400 to 600° C. is required for crystallization of amorphous silicon.

In general, heat treatment apparatuses include a single wafer type heat treatment capable of performing heat treatment on one substrate and a batch type heat treatment capable of performing heat treatment on a plurality of substrates. The single-wafer type has the advantage of a simple device configuration, but has the disadvantage of low productivity, so the batch type has recently been in the limelight for mass production.

Korean Patent Publication No. 2008-0069329 discloses a technical concept related to a heat treatment device.

An object according to one embodiment is to provide a chamber that is easy to separate and combine.

An object according to one embodiment is to provide a chamber capable of preventing a phenomenon in which an upper chamber and a lower chamber are pushed against each other by gravity when coupled.

An object according to one embodiment is to provide a chamber capable of stably guiding an upper chamber to an upper side of a lower chamber when coupled.

An object according to an embodiment is to provide a chamber capable of tightly and closely coupling an upper chamber and a lower chamber.

A chamber capable of accommodating a workpiece according to an embodiment includes a lower chamber disposed on a lower side and an upper chamber disposed on an upper side of the lower chamber, and a portion of a lower surface of the upper chamber and an upper surface of the lower chamber are formed. Some portions may be formed in an inclined shape and come into contact with each other.

An upper flange is formed on the lower surface of the upper chamber, and a lower flange is formed on the upper surface of the lower chamber, and the upper flange and the lower flange have one end and the other end formed in a horizontal direction, respectively, and disposed between one end and the other end. The portion to be may be formed to be inclined at a predetermined inclination.

A portion disposed between one end and the other end of each of the upper flange and the lower flange may be formed to incline downward as it progresses from the one end to the other end.

A first sealing element may be disposed at a portion disposed between one end and the other end of each of the upper flange and the lower flange.

A second sealing element may be additionally disposed at one end and the other end of each of the upper flange and the lower flange.

A plurality of stoppers spaced apart from each other at predetermined intervals may be formed at the other end of the lower chamber.

The stopper may be formed in a roller shape, the stopper may guide the upper chamber to a predetermined position on the lower chamber, and the stopper may cause the upper chamber when the upper chamber is placed above the lower chamber. It is possible to prevent the movement to the outside of the lower chamber.

A plurality of guides spaced apart from each other at predetermined intervals may be formed on outer surfaces of the upper flange and the lower flange, and clamps for coupling the upper chamber and the lower chamber may be disposed on each guide.
A chamber capable of accommodating a workpiece according to an embodiment includes a lower chamber disposed on a lower side and an upper chamber disposed on an upper side of the lower chamber, an upper flange is formed on a lower surface of the upper chamber, and the lower chamber A lower flange is formed on the upper surface of the chamber, a part of the lower surface of the upper chamber and a part of the upper surface of the lower chamber are formed in an inclined shape and come into contact with each other, and each of the upper flange and the lower flange is formed on the side of the chamber. A first part formed to be inclined at a predetermined inclination on the top, a second part extending horizontally from one end of the chamber to an upper end of the first part located on the side of the chamber, and the chamber from the other end of the chamber. It may include a third portion extending horizontally to the lower end of the first portion located on the side of the.
Each of the first portion of the upper flange and the lower flange may be formed to be inclined downward as it progresses from the second portion to the third portion.
A first sealing element may be disposed on each of the first portions of the upper flange and the lower flange.
A second sealing element may be additionally disposed on the second part or the third part of each of the upper flange and the lower flange.
A plurality of stoppers spaced apart from each other at predetermined intervals may be formed in the third portion of the lower chamber.

A chamber according to an embodiment may be easily separated and coupled.

When the chamber according to an embodiment is coupled, a phenomenon in which the upper chamber and the lower chamber are pushed against each other by gravity may be prevented.

When coupled, the chamber according to an embodiment may stably guide the upper chamber to the upper side of the lower chamber.

In the chamber according to an embodiment, an upper chamber and a lower chamber may be firmly and closely coupled.

1 shows a chamber according to one embodiment.
Figure 2 shows a state in which the chamber is separated into an upper chamber and a lower chamber according to an embodiment.
3 and 4 show details of a portion of the lower chamber according to one embodiment.
5 shows guides formed on the upper and lower chambers according to one embodiment.
6 shows a state in which an upper chamber and a lower chamber are coupled according to an embodiment.
7 shows in detail a process in which an upper chamber and a lower chamber are separated from each other according to an embodiment.

Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. However, since various changes can be made to the embodiments, the scope of the patent application is not limited or limited by these embodiments. It should be understood that all changes, equivalents or substitutes to the embodiments are included within the scope of rights.

Terms used in the examples are used only for descriptive purposes and should not be construed as limiting. Singular expressions include plural expressions unless the context clearly dictates otherwise. In this specification, terms such as "include" or "have" are intended to designate that there is a feature, number, step, operation, component, part, or combination thereof described in the specification, but one or more other features It should be understood that the presence or addition of numbers, steps, operations, components, parts, or combinations thereof is not precluded.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by a person of ordinary skill in the art to which the embodiment belongs. Terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with the meaning in the context of the related art, and unless explicitly defined in the present application, they should not be interpreted in an ideal or excessively formal meaning. don't

In addition, in the description with reference to the accompanying drawings, the same reference numerals are given to the same components regardless of reference numerals, and overlapping descriptions thereof will be omitted. In describing the embodiment, if it is determined that a detailed description of a related known technology may unnecessarily obscure the gist of the embodiment, the detailed description will be omitted.

In addition, in describing the components of the embodiment, terms such as first, second, A, B, (a), and (b) may be used. These terms are only used to distinguish the component from other components, and the nature, order, or order of the corresponding component is not limited by the term. When an element is described as being “connected,” “coupled to,” or “connected” to another element, that element may be directly connected or connected to the other element, but there may be another element between the elements. It should be understood that may be "connected", "coupled" or "connected".

Components included in one embodiment and components having common functions will be described using the same names in other embodiments. Unless stated to the contrary, descriptions described in one embodiment may be applied to other embodiments, and detailed descriptions will be omitted to the extent of overlap.

Figure 1 shows a chamber according to an embodiment, Figure 2 shows a state in which the chamber according to an embodiment is separated into an upper chamber and a lower chamber. 3 and 4 show details of a portion of the lower chamber according to one embodiment. Figure 5 shows a guide formed on the upper chamber and the lower chamber according to an embodiment, Figure 6 shows a state in which the upper chamber and the lower chamber are coupled according to an embodiment. 7 shows in detail a process in which an upper chamber and a lower chamber are separated from each other according to an embodiment.

1 and 2, the chamber 100 capable of accommodating a workpiece according to an embodiment includes a lower chamber 110 disposed on the lower side and an upper chamber 120 disposed on the upper side of the lower chamber. Including, a part of the lower surface of the upper chamber and a part of the upper surface of the lower chamber are formed in an inclined shape and may come into contact with each other.

Specifically, the upper flange 121 may be formed on the lower surface of the upper chamber, and the lower flange 111 may be formed on the upper surface of the lower chamber. One end (A) and the other end (B) of the upper flange 121 and the lower flange 111 are formed in a horizontal direction, and a portion (C) disposed between one end and the other end is formed to be inclined at a predetermined inclination. can

At this time, the portion (C) disposed between one end and the other end of each of the upper flange and the lower flange may be formed to be inclined downward as it progresses from the one end (A) to the other end (B).

Accordingly, when the upper chamber 120 is placed on top of the lower chamber 110, the upper chamber 120 has a structure that can slide with respect to the lower chamber 110. Accordingly, as will be described later, when separating the upper chamber 120 from the lower chamber 110, there is no need to lift the upper chamber 120 upward, and by moving the upper chamber 120 in one direction, It is a structure capable of separating the upper chamber 120 from the lower chamber 110 .

At this time, the first sealing element 131 may be disposed in the portion (C) disposed between one end and the other end of each of the upper flange 121 or the lower flange 111 . Furthermore, the second sealing element 132 may be additionally disposed at one end (A) and the other end (B) of the upper flange or the lower flange, respectively.

As an example, referring to FIG. 3 , a first sealing element 131 may be disposed in a portion C disposed between one end and the other end of the lower flange 111 of the lower chamber 110 . Correspondingly, the first sealing element may also be disposed in a portion disposed between one end and the other end of the upper flange of the upper chamber.

Furthermore, as shown in FIG. 4, the second sealing element 132 is disposed not only in the portion C disposed between one end and the other end of the lower flange 111 of the lower chamber 110 but also in the portion corresponding to the other end B. It can be.

Similarly, a second sealing element may also be disposed at a portion corresponding to one end (A) of the lower flange 111 of the lower chamber 110, and an additional second sealing element may be added to one or the other end of the upper flange of the upper chamber. It goes without saying that can be placed.

Through this structure, it is possible to adjust the difficulty of processing in a process for inserting the sealing element on the upper flange or the lower flange, and it is possible to reduce the manufacturing cost for deriving the structure.

In addition, holes of various shapes may be formed on each part of the upper flange or the lower flange to increase ease of processing and prevent distortion in the manufacturing process.

Referring to FIG. 5 , a plurality of stoppers 140 spaced apart from each other at predetermined intervals may be formed at the other end of the lower chamber 110 . In addition, a plurality of guides 150 spaced apart from each other at predetermined intervals may be formed on outer surfaces of the lower flange 111 and the upper flange 121, and the upper chamber and the lower chamber are coupled to each guide 150. Each clamp 160 for doing may be disposed.

That is, the guide 150 serves to guide the clamp so that the clamp 160 can be attached to a predetermined position.

In addition, the stopper 140 may be formed in a roller shape. Specifically, the stopper 140 is composed of one or more rollers 141, a rotating shaft 142 disposed through the one or more rollers 141, and a frame 143 accommodating the rollers 141 and the rotating shaft 142 It can be. In addition, the stopper 140 may include a roller plate 144 disposed in front of the roller.

Referring to FIG. 6 , the stopper 140 having the above structure can stably guide the upper chamber 120 to a predetermined position on the lower chamber 110 .

In addition, when the upper chamber and the lower chamber are coupled, the stopper prevents direct damage to the upper chamber and only damages component elements such as roller plates, thereby improving the durability of the overall equipment and reducing maintenance costs. can

Furthermore, the stopper may prevent the upper chamber from being pushed outward of the lower chamber due to contraction and expansion of the chamber by a pumping action for maintaining a vacuum state in a state in which the upper chamber is placed above the lower chamber.

This action ultimately suppresses the occurrence of a leak point due to the pushing of the chamber and can lead to an effect of attenuating the eccentric load on the sealing element (eg, O-ring).

In addition, clamps 160 may be mounted on each of the plurality of guides in order to firmly couple the upper chamber and the lower chamber.

Referring to FIG. 7, when the upper chamber 120 is to be separated from the lower chamber 110 by using a chamber having the above structure, the upper chamber 120 is separated from the lower chamber 110 by forcible upper chamber 120. No need to lift in any direction.

That is, by moving the upper chamber 120 to the side of the lower chamber 110 as shown in (a) of FIG. 7, the upper chamber 120 and the lower chamber 110 are stably separated as shown in (b) of FIG. can make it

The chamber including the configurations described above can be easily separated and coupled, and when coupled, the upper chamber and the lower chamber can be effectively prevented from being pushed against each other by gravity and pumping. Furthermore, when the chamber is coupled, the upper chamber can be stably guided to the upper side of the lower chamber, and the upper chamber and the lower chamber can be firmly and closely coupled.

As described above, although the embodiments have been described with limited drawings, those skilled in the art can apply various technical modifications and variations based on the above. For example, the described techniques may be performed in an order different from the method described, and/or components of the described system, structure, device, circuit, etc. may be combined or combined in a different form than the method described, or other components may be used. Or even if it is replaced or substituted by equivalents, appropriate results can be achieved.

Therefore, other implementations, other embodiments, and equivalents of the claims are within the scope of the following claims.

100: chamber
110: lower chamber
120: upper chamber
131: first sealing element
132: second sealing element
140: stopper
150: Guide
160: clamp

Claims (8)

In the chamber that can accommodate the workpiece inside,
the chamber,
a lower chamber disposed on the lower side; and
an upper chamber placed above the lower chamber;
including,
An upper flange is formed on a lower surface of the upper chamber,
A lower flange is formed on the upper surface of the lower chamber,
Each of the upper flange and the lower flange,
a first portion formed to be inclined at a predetermined inclination on a side of the chamber;
a second part extending horizontally from one end of the chamber to an upper end of the first part located on a side of the chamber; and
a third portion extending horizontally from the other end of the chamber to a lower end of the first portion located on a side of the chamber;
Including, chamber.

According to claim 1,
A hole is formed on the upper flange or the lower flange.
According to claim 2,
The first portion of each of the upper flange and the lower flange is formed to be inclined downward as it progresses from the second portion to the third portion.
According to claim 3,
A first sealing element may be disposed on the first portion of each of the upper flange and the lower flange.
According to claim 4,
A second sealing element may be additionally disposed on the second portion or the third portion of each of the upper flange and the lower flange.
According to claim 3,
A plurality of stoppers spaced apart from each other at predetermined intervals may be formed in the third portion of the lower chamber.
According to claim 6,
The stopper may be formed in a roller shape,
The stopper may guide the upper chamber to a predetermined position on the lower chamber,
Wherein the stopper is capable of preventing the upper chamber from moving to the outside of the lower chamber when the upper chamber is placed above the lower chamber.
According to claim 3,
A plurality of guides spaced apart from each other at predetermined intervals may be formed on outer surfaces of the upper flange and the lower flange,
A chamber, wherein a respective clamp for coupling the upper chamber and the lower chamber may be disposed on each guide.

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