KR102525844B1 - Contactor assembly and method for manufacturing the same - Google Patents

Abstract

A contactor assembly electrically connecting a pad of a test subject and a pad of a test device to each other, comprising: an insulating film having a plurality of film holes; contactors containing conductive particles, formed to be elastically deformable, and inserted into each of the through holes to protrude in the thickness direction of the film; and a guide block disposed on the film and having a block hole formed to accommodate and support the contactor.

Description

Contactor assembly and manufacturing method thereof {CONTACTOR ASSEMBLY AND METHOD FOR MANUFACTURING THE SAME}

The present invention relates to a contactor assembly for electrically connecting a pad of a test subject and a pad of a test device to each other and a manufacturing method thereof.

A probe assembly equipped with a plurality of probe pins is used to test the performance of a semiconductor device. A plurality of probe pins mounted on the probe assembly send electricity while contacting the pads of the subject to be inspected, and select defective pads of the subject to be inspected according to the signals returned.

Pogo pins and the like are used as a plurality of probe pins, and test signals can be electrically transmitted while ensuring contact with terminals of the pads under test by elastic force. However, conventionally, a complicated process of individually manufacturing probe pins such as pogo pins and assembling the manufactured probe pins to a base member or the like to manufacture a single assembly is required.

Unlike this assembly structure, Korean Patent Registration No. 756120, which is a prior art, discloses a probe member made of one elastic body, and the above-described assembly process can be omitted. The probe member disclosed in the prior art is composed of one elastic body in which a plurality of conductive parts for connection containing conductive particles are aligned in one direction.

However, in the case of such an elastic body structure, force and displacement may be transferred between neighboring probe pins, and there is a possibility that electrical signal interference may occur. For example, in the process of contacting an object to be inspected and proceeding with an inspection, accuracy of inspection may be deteriorated due to mutual interference such as electricity or heat passing between neighboring probe pins.

Therefore, the probe member according to the prior art has problems in ensuring accurate contact and difficulty in accurately implementing individual overdrive for each pin. For example, when a flexible contactor comes into contact with a pad of an object to be inspected, each contactor may be bent due to compression. Furthermore, with one elastic body structure, there is a problem in that it is difficult to form a long portion corresponding to the pin and a narrow gap (pitch) between the pins.

Korean Registered Patent Publication No. 756120 (2007. 8. 30. Registration)

SUMMARY OF THE INVENTION The present invention is intended to solve the above-mentioned problems of the related art, and to provide a contactor assembly and a method of manufacturing the same, which can guarantee mutual insulation and individual operation while miniaturizing the pitch between contactors.

In addition, an object of the present invention is to provide a contactor assembly capable of miniaturizing a pitch between contactors and suppressing interference due to thermal expansion or position change between contactors and a manufacturing method thereof.

In addition, it is intended to provide a contactor assembly that guides and supports the elastic deformation of the contactor and can accurately and stably connect a pad or terminal of a subject to be inspected, and a manufacturing method thereof.

In addition, it is intended to provide a contactor assembly capable of achieving economic efficiency and light weight by minimizing components for supporting and assembling the contactor and a manufacturing method thereof.

In addition, it is intended to provide a contactor assembly and a method of manufacturing the same configured to make the pitch between the contactors fine while forming the length of the contactor long.

However, the technical problem to be achieved by the present embodiment is not limited to the technical problems described above, and other technical problems may exist.

As a means for achieving the above-described technical problem, an embodiment of the present invention is an insulating film having a plurality of film holes in a contactor assembly for electrically connecting a pad of a test subject and a pad of an inspection device to each other. ; contactors containing conductive particles, formed to be elastically deformable, and inserted into each of the through holes to protrude in the thickness direction of the film; and a guide block disposed on the film and having a block hole formed to receive and support the contactor.

Another embodiment of the present invention is a method for manufacturing a contactor assembly for electrically connecting a pad of a test object and a pad of a test device, comprising a film in which a film hole is formed and a receiving portion corresponding to the film hole. aligning the molds to each other; filling the accommodating part with a liquid contactor containing conductive particles; aligning a magnetic force concentrating member having a magnetic pad formed at a position corresponding to the accommodating part to the mold and hardening the contactor; separating the integrally formed film and the contactor from the mold; and assembling a guide block having a block hole accommodating the contactor to the integrally formed film and the contactor.

The above-described means for solving the problems is only illustrative and should not be construed as limiting the present invention. In addition to the exemplary embodiments described above, there may be additional embodiments described in the drawings and detailed description.

According to any one of the above-described problem solving means of the present invention, it is possible to provide a contactor assembly and a method of manufacturing the contactor assembly capable of ensuring insulation and individual operation between contactors while minimizing the pitch between contactors.

In addition, according to any one of the problem solving means of the present invention, it is possible to provide a contactor assembly and a method of manufacturing the contactor assembly capable of suppressing interference due to thermal expansion or position change between contactors while miniaturizing the pitch between contactors.

In addition, according to any one of the problem solving means of the present invention, a contactor assembly capable of guiding and supporting the elastic deformation of a contactor and accurately and stably connecting a pad or terminal of an object to be inspected and a method of manufacturing the same are provided. can do.

In addition, according to any one of the problem solving means of the present invention, it is possible to provide a contactor assembly capable of achieving economic efficiency and light weight by minimizing components for supporting and assembling the contactor and a manufacturing method thereof.

In addition, according to any one of the problem solving means of the present invention, it is possible to provide a contactor assembly and a manufacturing method configured to make the pitch between the contactors fine while forming the length of the contactor long.

1 is a diagram showing a contactor assembly according to the present invention.
2 is a view showing in detail the block hole of the guide block shown in FIG. 1;
3 is a view showing a manufacturing method of a contactor assembly according to the present invention.
4 to 9 are views showing each step of the method of manufacturing the contactor shown in FIG. 3 .

Hereinafter, embodiments of the present invention will be described in detail so that those skilled in the art can easily practice the present invention with reference to the accompanying drawings. However, the present invention may be embodied in many different forms and is not limited to the embodiments described herein. And in order to clearly explain the present invention in the drawings, parts irrelevant to the description are omitted, and similar reference numerals are attached to similar parts throughout the specification.

Throughout the specification, when a part is said to be "connected" to another part, this includes not only the case where it is "directly connected" but also the case where it is "electrically connected" with another element interposed therebetween. . In addition, when a part "includes" a certain component, this means that it may further include other components, not excluding other components, unless otherwise stated, and one or more other characteristics. However, it should be understood that it does not preclude the possibility of existence or addition of numbers, steps, operations, components, parts, or combinations thereof.

Hereinafter, an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a view showing a contactor assembly according to the present invention, and FIG. 2 is a view showing a block hole of the guide block shown in FIG. 1 in detail. Referring to FIG. 1 , the contactor assembly 100 may include an insulating film 110 , a contactor 120 and a guide block 130 .

The film 110 and the contactor 120 according to an embodiment of the present invention may be cured by a phase change and integrally formed with each other, and the guide block 130 is assembled to the integrated structure to form the film 110, The contactor assembly 100 in which the contactor 120 and the guide block 130 are integrated can be formed. For example, the liquid contactor 120 may undergo a phase change into a solid phase with the insulating film 110 interposed therebetween, and may be cured with increased viscosity. The contactor 120 bonded to the film 110 by the phase change may be assembled with the guide block 130 to form an integrated structure, that is, the contactor assembly 100 . Hereinafter, each configuration will be reviewed.

The film 110 according to an embodiment of the present invention is an insulating film 110 having a plurality of film holes 111 . For example, the film 110 may form a structure integrated with the contactors 120 by accommodating the plurality of contactors 120 in the plurality of film holes 111 , respectively.

The film 110 may be formed of a material having a smaller thermal expansion coefficient than that of the contactor 120 . For example, the film 110 may be made of a polyimide material. In the contactor assembly 100 according to an embodiment of the present invention, a plurality of contactors 120 may be arranged on a film 110 made of polyimide having a small thermal expansion coefficient. The film 110 made of polyimide has little positional deformation due to heat shrinkage or expansion, and misalignment can be prevented.

1 and 2, the contactor 120 according to an embodiment of the present invention contains conductive particles 121, is formed to be elastically deformable, and is inserted into each of the film holes 111 to form a film ( 110) may be disposed to protrude in the thickness direction.

The contactor 120 may be made of a material including silicon containing conductive particles. For example, the contactor 120 may include various types of polymer materials. The contactor 120 may be formed of diene rubber such as silicon, polybutadiene, polyisoprene, SBR, NBR, etc., and their hydrogen compounds, and also, styrene-butadiene block copolymer, styrene isoprene block copolymer, etc., and their hydrogen compounds. It may also be made of a block copolymer such as a compound. In addition, the contactor 120 may be made of a material such as chloroprene, urethane rubber, polyethylene rubber, epichlorohydrin rubber, ethylene-propylene copolymer, or ethylene-propylenediene copolymer.

The contactor 120 may include a first elastic part 122 and a second elastic part 123 . The first elastic part 122 may be disposed to pass through the film hole 111 , and the second elastic part 123 may be connected to the first elastic part 122 in a thickness direction.

The contactor 120 may be characterized in that the cross-sectional shapes of the first elastic part 122 and the second elastic part 123 viewed from the thickness direction are different. For example, the cross-sectional shape of the second elastic part 123 viewed from the thickness direction may be designed to be smaller than the cross-sectional shape of the first elastic part 122 viewed from the thickness direction. Since the second elastic part 123 disposed at both ends is in contact with the inspected object 10 (or the pad of the inspection device), it is formed to have a relatively small diameter, that is, a small cross-sectional shape, to form a fine pitch pad 11 or It can correspond to a terminal, etc., and when assembling with a counterpart, the contact area can be widened and the shape can be varied. In addition, the second elastic part 123 disposed at both ends is designed to have a smaller diameter than the first elastic part 122 disposed at the center, thereby avoiding interference with peripheral components and reducing leakage current between adjacent pins. can be minimized.

On the other hand, the first elastic part 122 disposed at the center to pass through the film hole 111 may have a relatively large diameter, that is, a large cross-sectional area, so as to secure electrical conductivity required during testing.

Referring back to FIG. 1 , the contactor 120 according to an embodiment of the present invention is fixed while passing through the film hole 111 so that the contactor 120 and the film 110 are integrally formed with each other. can For example, the contactor 120 may be fixed and coupled to the film 110 while penetrating the film hole 111 without a coupling medium including a separate adhesive material or fastening part. The contactor 120 may be cured by a phase change in a state of being inserted into the film hole 111 to form a structure integrally and directly bonded to the film 110 . Specifically, the liquid contactor 120 inserted into the film hole 111 may undergo a phase change into a solid phase, increase viscosity, and harden.

The guide block 130 according to an embodiment of the present invention may be disposed on the film 110 and may be formed to accommodate and support the contactor 120 . The guide block 130 may be formed of a material having a lower thermal expansion coefficient than that of the contactor 120 . For example, the guide block 130 may be made of other engineering plastic materials such as FR4, Ultem, Peek, and Torlon. The guide block 130 can support the contactor 120 from the side, so that the durability of the flexible contactor 120 made of soft silicon or the like can be improved.

Referring to FIG. 2 , the guide block 130 may have a block hole 131 and may accommodate the contactor 120 through the block hole 131 . The block hole 131 may include a first hole part 131a and a second hole part 131b. The first hole part 131a may be formed to accommodate the first elastic part 122 of the contactor 120, and the second hole part 131b may be formed to accommodate the second elastic part 123 of the contactor 120. It can be formed to accommodate. That is, the first elastic part 122 of the contactor 120 is inserted into the first hole part 131a, and the second elastic part 123 is inserted into the second hole part 131b so that the guide block 130 The contactor 120 may be accommodated in.

A chamfer portion 132 may be formed at one end of the block hole 131 . The chamfer portion 132 may be formed to have a concave surface connecting the surface of the guide block 130 and one end of the block hole 131 . For example, the chamfer portion 132 is an end of the second hole portion 131b accommodating the second elastic portion 123 of the contactor 120 directly contacting the pad 11 of the object 10 under test. It can be formed as a concave surface.

The chamfer portion 132 formed at one end of the block hole 131 may accommodate and support at least a portion of the inspected object 10 or the pad 11 of the inspected object 10 . For example, each of the plurality of contactors 120 elastically deformed by compression when in contact with the pad 11 of the object 10 under test may be supported by the chamfer portion 132 .

In this way, the contactor assembly 100 according to the present invention accommodates and supports the ball-shaped pad 11 of the inspected object 10 by the chamfer portion 132, thereby protruding from the chamfer portion 132. A stable connection with the contactor 120 can be implemented. In particular, it can accommodate and support the ball-shaped pad 11 of the inspected object 10 whose packaging is completed, so it can be effectively applied to a chip-level semiconductor inspection device.

3 is a view showing a manufacturing method of a contactor assembly according to the present invention. The manufacturing method S100 of the contactor assembly shown in FIG. 3 includes steps processed time-sequentially according to the embodiment shown in FIGS. 1 and 2 . Therefore, even if the contents are omitted below, they are also applied to the manufacturing method ( S100 ) of the contactor assembly according to the embodiment shown in FIGS. 1 and 2 .

In step S110, the method of manufacturing the contactor assembly may align the film in which the film hole is formed and the mold having the accommodating portion corresponding to the film hole with each other.

In the method of manufacturing the contactor assembly in step S120, a liquid contactor containing conductive particles may be filled in the accommodating part.

In step S130, the contactor assembly manufacturing method may align a magnetic force concentrating member having a magnetic material pad formed at a position corresponding to the accommodating part to a mold and harden the contactor.

In step S140, the contactor assembly manufacturing method may separate the integrally formed film and the contactor from the mold.

In the method of manufacturing the contactor assembly in step S150, a guide block having a block hole accommodating the contactor may be assembled to the integrally formed film and the contactor.

In the above description, steps S110 to S150 may be further divided into additional steps or combined into fewer steps, depending on an implementation example of the present invention. Also, some steps may be omitted as needed, and the order of steps may be switched.

Hereinafter, each step will be described in detail. 4 to 9 are views showing each step of the method of manufacturing the contactor shown in FIG. 3 . 4 and 5, in the method of manufacturing the contactor assembly (S100), in step S110, the film 110 having the film hole 111 formed therein and the accommodating part 211 corresponding to the film hole 111 are provided. It is possible to align the molds 210 to each other. For example, the film 110 and the mold 210 may be aligned by making the film hole 111 of the film 110 and the accommodating portion 211 of the mold 210 correspond to each other. Here, the mold 210 may be made of non-magnetic metal or resin. For example, it may include aluminum (Al) and torlon.

In step S110, the plurality of plates 212 may be stacked to form the accommodating portion 211. For example, the long shape of the contactor 120 can be easily manufactured by stacking each plate 212 having the accommodating portion 211 in several layers. By increasing the length of the contactor 120 by stacking the multi-layer plates 212, it is possible to effectively manufacture the long-shaped contactor 120 while maintaining a small cross-sectional area.

In step S120 , the accommodating portion 211 may be filled with the liquid contactor 120 containing the conductive particles 121 . For example, the liquid contactor 120 containing the conductive particles 121 may be filled in the accommodating portion 211 formed after sequentially stacking the plurality of plates 212 with the film 110 interposed therebetween. . For another example, whenever the plates 212 are stacked layer by layer with the film 110 interposed therebetween, after filling the accommodating portion 211 with the liquid contactor 120 containing the conductive particles 121, the next layer The plates 212 of can be stacked.

Referring to FIG. 6 , in the method of manufacturing the contactor assembly (S100), in step S130, the magnetic force concentrating member 220 having the magnetic pad 221 formed at a position corresponding to the accommodating portion 211 is aligned with the mold 210. can The magnetic force concentrating member 220 may include a plurality of magnetic pads 221 at regular intervals. Here, the magnetic pad 221 may be made of, for example, a magnetic metal such as nickel (Ni), nickel-cobalt alloy (NiCo), and iron (Fe). The magnetic force concentrating member 220 may induce magnetic force to be concentrated on the magnetic pad 221 by being formed of a weak magnetic material.

Referring to FIG. 7 , in the method of manufacturing the contactor assembly ( S100 ), the contactor 120 may be cured under preset pressure and temperature conditions in step S130 . The contactor 120 may be cured by a phase change while being inserted into the film hole 111 to form a structure integrally and directly bonded to the film 110 . For example, when the contactor 120 is filled in the accommodating part 211, at least a portion thereof may be in a liquid state, and the contactor 120 is fixed in shape while being in contact with the accommodating part 211 and the film 110 within the accommodating part 211. It can be. Then, the contactor 120 may undergo a phase change to a solid phase, increase in viscosity, and harden.

Depending on the embodiment, the contactor 120 may be cured into a shape integrally coupled to the film 110 by external pressure, and the contactor 120 may be integrally bonded to the film 110 by heat applied from the outside. can be combined with However, even if heat or pressure is not additionally applied, it may be cured while maintaining contact with the film 110 within a preset temperature and pressure range.

In step S130 , at least one of heat and pressure may be applied to the contactor 120 by the magnetic force concentrating member 220 . For example, the magnetic force concentrating member 220 may come into close contact with the mold 210 so that the accommodating portion 211 is closed by the magnetic pad 221 . The magnetic force concentrating member 220 may be brought into close contact with upper and lower ends of the mold 210 in which the liquid contactor 120 is filled in the accommodating portion 211 . At this time, as illustrated in FIG. 7 , the conductive particles may be rearranged and aligned along the longitudinal direction by magnetic force. The magnetic pad 221 is for concentrating the magnetic force of the contactor 120 .

Referring to FIG. 8 , in the method of manufacturing the contactor assembly ( S100 ), in step S140 , the integrally formed film 110 and the contactor 120 may be separated from the mold 210 . For example, after first separating the magnetic force concentrating member 220 in close contact with the mold 210 from the mold 210, the plurality of contactors 120 integrally formed with the film 110 are separated from the mold 210. can do.

In step S140, the plurality of plates 212 stacked can be removed layer by layer, so that the contactor 120, which has been integrally manufactured with the film 110, can be easily separated from the mold 210 and damaged. It can be separated without this.

Referring to FIG. 9 , in the method of manufacturing the contactor assembly (S100), in step S150, the guide block 130 having the block hole 131 accommodating the contactor 120 is integrally formed with the film 110 and the contact It can be assembled to the filter 120. For example, in step S150 , the plurality of contactors 120 , which are directly bonded to the film 110 and integrated into one structure, may be inserted into the block hole 131 of the guide block 130 and assembled. At this time, the guide block 130 may include a chamfer portion 132 having a concave surface at one end of the block hole 131 connected to the surface.

Therefore, the contactor assembly 100 according to the present invention including the guide block 130 guides and supports the elastic deformation of the flexible contactor 120 and can be accurately and stably connected to a pad or terminal of an object to be inspected. .

The above description of the present invention is for illustrative purposes, and those skilled in the art can understand that it can be easily modified into other specific forms without changing the technical spirit or essential features of the present invention. will be. Therefore, the embodiments described above should be understood as illustrative in all respects and not limiting. For example, each component described as a single type may be implemented in a distributed manner, and similarly, components described as distributed may be implemented in a combined form.

The scope of the present invention is indicated by the following claims rather than the detailed description above, and all changes or modifications derived from the meaning and scope of the claims and equivalent concepts should be construed as being included in the scope of the present invention. do.

100: contactor assembly
110: film
120: contactor
130: guide block

Claims (12)

In the contactor assembly for electrically connecting a pad of a test subject and a pad of a test device to each other,
an insulating film provided with a plurality of film holes;
a contactor containing conductive particles, formed to be elastically deformable, inserted into each of the film holes, and arranged to protrude in a thickness direction of the film; and
A guide block disposed on the film and having a block hole formed to receive and support the contactor;
The contactor is
a first elastic part disposed to protrude in both directions through the film hole; and
A second elastic part connected to both ends of the first elastic part in the thickness direction and having a cross-sectional shape viewed from the thickness direction different from that of the first elastic part,
The diameter of the second elastic part is smaller than the diameter of the first elastic part,
The block hole,
a first hole portion formed to accommodate the first elastic portion; and
A second hole portion formed to accommodate the second elastic portion,
A chamfer is formed at one end of the block hole,
The chamfer part,
It is formed at an end of the second hole portion and has a concave surface connecting the surface of the guide block and one end of the block hole,
At least a portion of the second elastic portion is disposed to protrude from surfaces of the chamfer portion and the guide block.
delete delete According to claim 1,
The contactor assembly, characterized in that the chamfer portion accommodates and supports at least a portion of the inspected object or a pad of the inspected object.
delete delete According to claim 1,
The contactor assembly is characterized in that the contactor is fixed while penetrating the film hole, so that the contactor and the film are integrally formed with each other.
According to claim 1,
The contactor assembly is characterized in that the contactor is formed integrally with the film by curing by a phase change in a state of being inserted into the film hole.
According to claim 1,
The contactor assembly, wherein the film and the guide block are formed of a material having a smaller coefficient of thermal expansion than that of the contactor.
A method of manufacturing a contactor assembly for electrically connecting a pad of a test subject and a pad of a test device to each other,
aligning a film in which a film hole is formed and a mold having an accommodating portion corresponding to the film hole;
filling the accommodating part with a liquid contactor containing conductive particles;
aligning a magnetic force concentrating member having a magnetic pad formed at a position corresponding to the accommodating part to the mold and curing the contactor;
separating the integrally formed film and the contactor from the mold; and
assembling a guide block having a block hole accommodating the contactor to the integrally formed film and the contactor;
The contactor is
a first elastic part disposed to protrude in both directions through the film hole; and
A second elastic part connected to both ends of the first elastic part in a thickness direction and having a cross-sectional shape viewed from the thickness direction different from that of the first elastic part,
The diameter of the second elastic part is formed smaller than the diameter of the first elastic part,
The block hole,
a first hole portion formed to accommodate the first elastic portion; and
A second hole portion formed to accommodate the second elastic portion,
A chamfer is formed at one end of the block hole,
The chamfer part,
It is formed at an end of the second hole portion and has a concave surface connecting the surface of the guide block and one end of the block hole,
At least a portion of the second elastic portion is disposed to protrude from surfaces of the chamfer portion and the guide block.
delete According to claim 10,
In the step of aligning the mold, a plurality of plates are stacked to form the accommodating portion.

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