KR102506370B1 - Lens assembly of light irradiation apparatus - Google Patents

Abstract

A lens assembly mounted on the light irradiation unit includes a lens, a lens housing, a window housing, and a window unit. The lens changes a traveling direction of light emitted from the light irradiation unit, and the lens housing accommodates the lens. The window housing faces the light irradiation unit with the lens interposed therebetween, and the window housing is coupled to the lens housing to protect the lens. The window unit is housed in the window housing and overlaps with the lens. In addition, the window housing includes a body frame and a door part. The body frame extends along the circumference of the window unit. The door part is disposed on one side of the body frame, and the door part opens and closes the inside of the window housing.

Description

Lens assembly of light irradiation device {LENS ASSEMBLY OF LIGHT IRRADIATION APPARATUS}

The present invention relates to a lens assembly including a lens installed in a light irradiation device and a protective window covering the lens to protect the lens from contaminants, and more particularly, a lens capable of facilitating replacement of the protective window. It's about assembly.

The light irradiation device may be used for various purposes. For example, in a method of manufacturing a display device, a light irradiation device emits a laser to cut a substrate used for manufacturing a display device, is used in a process of forming a groove in a substrate, or patterns a thin film formed on a substrate. used to

The light irradiation device may include a lens for adjusting the traveling direction of the generated light and a protective window covering the lens. The protective window protects the lens by blocking contaminants flowing into the lens. For example, when the light irradiation device is applied to a process of processing a substrate, a by-product of the substrate generated by irradiating light onto the substrate may bounce toward the lens, and the protective window is formed by the by-product of the substrate. protects the lens from

SUMMARY OF THE INVENTION An object of the present invention is to provide a lens assembly of a light irradiation device in which replacement of a protective window is easy.

In the lens assembly mounted on the light irradiation unit, the lens assembly for achieving the object of the present invention described above includes a lens, a lens housing, a window housing, and a window unit. The lens changes a traveling direction of light emitted from the light irradiation unit, and the lens housing accommodates the lens. The window housing faces the light irradiation unit with the lens interposed therebetween, and the window housing is coupled to the lens housing. The window unit is housed in the window housing and overlaps with the lens.

The window housing includes a body frame and a door part. The body frame extends along the circumference of the window unit. The door part is disposed on one side of the body frame, and the door part opens and closes the inside of the window housing.

In one embodiment of the present invention, the window unit includes a protective window covering the lens and a window frame coupled to the window housing by supporting an edge of the protective window.

In one embodiment of the present invention, the body frame includes a first frame, a second frame facing the first frame, and a side wall portion. The sidewall portion connects the first frame to the second frame, and the sidewall portion is disposed between the first frame and the second frame to be horizontal with the door portion.

In one embodiment of the present invention, each of the first frame and the second frame has an opening shape corresponding to the position of the protective window.

In one embodiment of the present invention, the window housing further includes a hinge coupling portion for hinge coupling the body frame to the door portion.

In one embodiment of the present invention, the door part rotates horizontally with each of the first frame and the second frame with the hinge coupling part as a rotation axis to open and close the inside of the window housing.

In one embodiment of the present invention, the window housing further includes an alignment portion protruding from the inner surface of the body frame. In addition, an alignment groove accommodating the alignment unit is defined on an outer surface of the window frame.

In one embodiment of the present invention, the body frame may further include a first magnet, and the window housing may further include a second magnet facing the first magnet.

In one embodiment of the present invention, the first magnet may be embedded inside the first frame, and the window housing may contact the second frame by a repulsive force generated between the first magnet and the second magnet. there is.

In one embodiment of the present invention, the first magnet may be embedded inside the second frame, and the window housing may come into contact with the second frame by a force generated between the first magnet and the second magnet. there is.

In one embodiment of the present invention, a gas supply unit for supplying gas to the inside of the window housing is further included. The gas providing unit is connected to a pipe connecting an outer surface of the window housing to an inner surface of the window housing.

According to an embodiment of the present invention, opening and closing of the slot can be facilitated by using the door of the window housing, and the window unit can be inserted into the slot of the window housing in a sliding manner parallel to the lateral direction of the window housing. Thus, the window unit can be easily attached to or detached from the window housing through the slot.

According to an embodiment of the present invention, the window unit can be easily aligned on a plane defined in the x-axis direction and the y-axis direction within the window housing by using the alignment portion of the window housing and the alignment groove of the window unit.

According to an embodiment of the present invention, the window unit can be easily aligned in the z-axis direction within the window housing by using the magnet of the window housing and the magnet of the window unit.

1 is an exploded perspective view of a light irradiation unit and a lens assembly according to an embodiment of the present invention.
FIG. 2 is an exploded perspective view of the lens assembly shown in FIG. 1 .
3 is a perspective view of the window housing shown in FIG. 2;
4A and 4B are diagrams illustrating a process in which the window housing and the window unit shown in FIG. 2 are coupled.
5A is a perspective view of a window unit included in a lens assembly according to another embodiment of the present invention.
FIG. 5B is a plan view illustrating a state in which the window unit shown in FIG. 5A is coupled to a window housing.
6 is a cross-sectional view showing a plane taken along line II′ shown in FIG. 5B.
7 is a cross-sectional view showing a state in which a window housing and a window unit of a lens assembly according to another embodiment of the present invention are coupled to each other.
8 is a cross-sectional view illustrating a state in which a window housing and a window unit of a lens assembly according to another embodiment of the present invention are coupled to each other.
9 is a view illustrating a process of coupling window units to a window housing of a lens assembly according to another embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. Objects, features and effects of the present invention described above will be easily understood through the examples related to the drawings. However, the present invention is not limited to the embodiments described herein, and may be applied and modified in various forms. Rather, the embodiments of the present invention to be described below are provided so that the technical spirit disclosed by the present invention can be more clearly understood, and furthermore, the technical spirit of the present invention can be sufficiently conveyed to those skilled in the art having average knowledge in the field to which the present invention belongs. Therefore, it should not be construed that the scope of the present invention is limited by the examples to be described later. On the other hand, the same reference numerals in the following embodiments and drawings indicate the same components.

In addition, in this specification, terms such as 'first' and 'second' are used for the purpose of distinguishing one component from other components without limiting meaning. In addition, when a part such as a film, region, component, etc. is said to be 'on' or 'on' another part, not only when it is directly above the other part, but also when another film, region, component, etc. is interposed therebetween. Including case

1 is an exploded perspective view of a light irradiation unit 10 and a lens assembly 300 according to an embodiment of the present invention.

Referring to FIG. 1 , the light irradiation unit 10 emits light. In this embodiment, the light irradiation unit 10 includes a laser generator (not shown) to irradiate the laser LR, and the light irradiation unit 10 may be used in various processes. For example, the light irradiation unit 10 may be used in a manufacturing process of a display device, and more specifically, the light irradiation unit 10 may be used to cut a substrate for the display device, or to make a hole in the substrate. Alternatively, it may be used to form grooves, or may be used to pattern the thin film by removing a part of the thin film formed on the substrate.

The lens assembly 300 is mounted on a portion of the light irradiation unit 10 from which the laser LR is emitted. In this embodiment, a fastening part (305 in FIG. 2 ) is defined on one side of the lens assembly 300, and the fastening part is fastened to the light irradiation unit 10 so that the lens assembly 300 irradiates the light. It can be combined with unit 10.

Hereinafter, the structure of the lens assembly 300 will be described with reference to FIGS. 2 and 3 .

2 is an exploded perspective view of the lens assembly 300 shown in FIG. 1, and FIG. 3 is a perspective view of the window housing 200 shown in FIG.

Referring to FIGS. 2 and 3 , the lens assembly 300 includes a lens housing 110 , a lens 150 , a window housing 200 and a window unit 280 .

The lens housing 110 accommodates the lens 150 . In this embodiment, the lens housing 110 may have a body tube shape, but the present invention is not limited to the shape of the lens housing 110 .

The lens 150 is accommodated inside the lens housing 110 to change the traveling direction of the laser (LR in FIG. 1 ) emitted from the light irradiation device ( 10 in FIG. 1 ). In this embodiment, the lens 150 may be an F-theta lens, but the present invention is not limited to the type of the lens 150 . For example, in another embodiment, the lens 150 may be a flat-field scanning lens or a telecentric F-theta lens.

When the lens assembly 300 is coupled to the light irradiation unit ( 10 in FIG. 1 ), the window housing 200 faces the light irradiation unit with the lens 150 interposed therebetween. The window housing 200 is coupled to the lens housing 110 , and the window housing 200 accommodates the window unit 280 . An opening LH corresponding to the position of the lens 150 is defined in the window housing 200 . Accordingly, the laser (LR in FIG. 1 ) emitted from the light irradiation device ( 10 in FIG. 1 ) passes through the window housing 200 through the opening LH.

In this embodiment, the window housing 200 includes a body frame BF, a hinge coupling part HP, and a door part DP.

The body frame BF has a shape extending along the circumference of the window unit 280 . In this embodiment, the body frame (BF) may have a ring shape on a plane defined by the X direction (X) and the Y direction (Y), and the opening at the center of the body frame (BF) ( LH) can be defined.

In this embodiment, the body frame (BF) includes a first frame (F1), a second frame (F2) and a side wall portion (SW).

The opening LH is defined in the first frame F1, and the first frame F1 is coupled to one side of the lens housing 110. The opening LH is defined in the second frame F2, and the second frame F2 faces the first frame F1.

The sidewall part SW connects the first frame F1 to the second frame F2 between the first and second frames F1 and F2. In addition, the side wall portion SW is horizontal to the door portion DP on a plane defined by the X direction X and the Y direction between the first and second frames F1 and F2. are placed so that A height direction of the sidewall portion SW may be parallel to the Z direction Z.

In this embodiment, the first frame (F1), the second frame (F2) and the side wall portion (SW) may be coupled to each other by components such as bolts and nuts. In another embodiment, at least two of the first frame F1, the second frame F2, and the side wall portion SW may have an integral shape.

The hinge coupling part HP hinge-couples the door part DP to the body frame BF. In this embodiment, the hinge coupling part HP may include a shaft penetrating the first frame F1, the second frame F2, and the door part DP, and the shaft may act as a hinge axis of the hinge coupling part HP.

The door part DP is arranged horizontally with the side wall part SW on a plane defined by the X direction (X) and the Y direction (Y) between the first and second frames F1 and F2. do. In addition, the door part DP is hinge-coupled with the body frame BF by the hinge coupling part HP, and as a result, the door part DP uses the hinge coupling part HP as a rotation axis to rotate the X It can rotate on a plane defined by the direction (X) and the Y direction (Y).

The window unit 280 includes a protective window WW and a window frame WF, and the window unit 280 is accommodated inside the window housing 200 .

The protective window WW overlaps the lens 150 to protect the lens 150 . In this embodiment, the composition material of the protection window WW may be glass or plastic having light transmittance, and the protection window WW may have a plate shape. The protective window WW transmits light emitted from the light irradiation device ( 10 in FIG. 1 ) and passing through the lens 150 , and the protective window WW transmits the light emitted from the outside of the lens assembly 300 . Foreign substances flowing into the lens 150 are blocked.

The window frame WF is combined with the edge of the protection window WW. In this embodiment, the protective window WW may have a circular shape, and in this case, the window frame WF has a circular ring shape and is combined with the edge of the protective window WW. In another embodiment, the protective window WW may have a shape other than a circular shape, for example, a rectangular shape. In this case, the window frame WF has a rectangular ring shape, and the protective window WW has a shape of a rectangular ring. ) may be combined with the border of.

When the window housing 200 has the above configuration, a process of inserting the window unit 280 into the window housing 200 will be described with reference to FIGS. 4A and 4B.

4A and 4B are views illustrating a process in which the window housing 200 and the window unit 280 shown in FIG. 2 are coupled.

Referring to FIG. 4A , the door part DP of the window housing 200 rotates in the first rotational direction RD1 using the hinge coupling part HP as a rotation axis. As a result, the inside of the body frame BF of the window housing 200 is opened so that the slot ST may be defined in the body frame BF.

After that, the window unit 280 moves horizontally on a plane defined by the X direction (X) and the Y direction (Y) and is inserted into the body frame BF through the slot ST.

Referring to FIG. 4B , the door part DP rotates in a second rotation direction RD2 opposite to the first rotation direction RD1 using the hinge coupling part HP as a rotation axis. As a result, the slot ST is closed by the door part DP.

As described above, the operator can easily open and close the slot ST by using the door part DP, and as a result, the window unit 280 is connected to the window housing 200 through the slot ST. ) can be easily attached or detached. In addition, since the slot ST is defined on the side of the window housing 200, the window unit 280 slides in parallel with the lateral direction of the window housing 200 to form the slot ST. can be inserted into Therefore, the operator can easily perform the replacement work of the window unit 280 on one side of the window housing 200 .

5A is a perspective view of a window unit 281 of a lens assembly according to another embodiment of the present invention, and FIG. 5B is a plan view showing a state in which the window unit 281 shown in FIG. 5A is coupled to the window housing 201, 6 is a cross-sectional view showing a plane taken along line II′ shown in FIG. 5B.

In the description of FIGS. 5A, 5B and 6 , reference numerals are added to the components described above, and redundant descriptions of the components are omitted. In addition, in order to clearly show the components of the window housing 201 and the window unit 281, the illustration of the first frame (F1 in FIG. 6) of the window housing 281 is omitted in FIG. 5B. do.

Comparing the embodiment described above with reference to FIGS. 2 and 3 and the embodiment shown in FIGS. 5A, 5B and 6 , the window housing 201 includes a plurality of alignment parts AP and a plurality of first magnets. s (M1) are further included. In addition, a plurality of alignment grooves AH are defined in the window frame WF-1 of the window unit 281, and the window frame WF-1 includes a plurality of second magnets M2.

In this embodiment, the plurality of aligning parts AP has a shape protruding from inner surfaces of the second frame F2-1 of the window housing 201 and the door part DP, and the plurality of aligning grooves AH may be defined around the outer circumference of the window frame WF-1. The plurality of alignment parts AP are accommodated in each of the plurality of alignment holes AH. Therefore, the window unit 281 is prevented from moving on a plane defined by the X direction (X) and the Y direction (Y) inside the window housing 201, and the window unit 281 can be aligned. there is.

In another embodiment, the window frame WF-1 may include a plurality of aligning parts, and in this case, a plurality of aligning grooves accommodating the plurality of aligning parts may be defined in the window housing 201. there is.

The first magnets M1 may be embedded in the window housing 201 . In this embodiment, the first magnets M1 may be embedded in the second frame F2 - 1 of the window housing 201 . In addition, the second magnets M2 may be embedded in the window frame WF-1, and the second magnets M2 may face the first magnets M1 in one-to-one correspondence. .

In this embodiment, the first magnets M1 and the second magnets M2 may have the same polarity. For example, if each of the first magnets M1 has an N pole, each of the second magnets M2 may have an N pole.

According to the structure of the first and second magnets M1 and M2 described above, a repulsive force is generated between the first magnets M1 and the second magnets M2. Therefore, the window frame WF-1 may come into contact with the first frame F1 by the repulsive force, and as a result, the protective window WW combined with the window frame WF-1 may be moved to the window housing ( 201) can be easily aligned in the z-axis direction (Z).

Meanwhile, a slot (ST in FIG. 4A) may be defined as an interval between the first frame F1 and the second frame F2-1. In this case, in order for the window frame WF-1 to be inserted into the slot, the first width W1 of the slot in the Z-axis direction Z must be ) is greater than the second width W2 of.

As described above, when the window frame WF-1 comes into contact with the second frame F2 due to the repulsive force generated between the first magnets M1 and the second magnets M2, A gap GP approximately corresponding to the difference between the first width W1 and the second width W2 is generated between the window frame WF-1 and the second frame W2, and the gap ( The spacing of GP) may be uniform throughout the window housing 201 . Accordingly, the inside of the window housing 201 can be easily aligned in the z-axis direction Z of the window frame WF-1.

7 is a cross-sectional view showing a state in which a window housing 202 and a window unit 282 of a lens assembly according to another embodiment of the present invention are coupled to each other. In the description of FIG. 7 , reference numerals are added to the components described above, and redundant descriptions of the components are omitted.

Referring to FIG. 7 , the window housing 202 includes a plurality of first magnets M1-1, and the window frame WF-2 includes a plurality of second magnets M2-1.

The first magnets M1 - 1 may be embedded in the window housing 202 . In this embodiment, the first magnets M1 - 1 may be embedded in the first frame F1 - 1 of the window housing 202 . Also, the second magnets M2-1 may be embedded in the window frame WF-2, and the second magnets M2-1 are one-to-one with the first magnets M1-1. You can face it in response.

In the embodiment described above with reference to FIG. 6, the first magnets (M1 in FIG. 6) and the second magnets (M2 in FIG. 6) have the same polarity, but in the embodiment shown in FIG. 7, the first magnets The magnets M1-1 and the second magnets M2-1 may have different polarities. For example, if each of the first magnets M1-1 has an N pole, each of the second magnets M2-1 may have an S pole.

According to the structure of the first and second magnets M1-1 and M2-1 described above, an attractive force is generated between the first magnets M1-1 and the second magnets M2-1. . Therefore, the window frame WF-2 may come into contact with the first frame F1-1 by the attractive force, and as a result, the protective window WW combined with the window frame WF-2 is formed in the window frame F1-1. It can be easily aligned in the z-axis direction (Z) from the inside of the housing 202 .

8 is a cross-sectional view showing a state in which a window housing 203 and a window unit 280 of a lens assembly according to another embodiment of the present invention are coupled to each other. In the description of FIG. 8 , reference numerals are added to the components described above, and redundant descriptions of the components are omitted.

Referring to FIG. 8 , in this embodiment, the lens assembly further includes a gas supply unit 400 supplying gas into the window housing 203 .

The gas providing unit 400 generates air AR like an air pump, and the gas providing unit 400 includes a first pipe 410 . The first pipe 410 is connected to the second pipe PP embedded in the window housing 203, and the second pipe PP connects the outer surface of the window housing to the inside of the window housing 203. connect to the side Accordingly, the air AR generated from the gas providing unit 400 may be supplied to the inside of the window housing 203 through the first pipe 410 and the second pipe PP.

As described above, when the air AR is supplied to the inside of the window housing 203, there is a gap GP between the window frame WF and the second frame F2 and the window housing ( 203) can generate positive pressure. Therefore, an air curtain may be formed between the protective window WW and the second frame F2 by the air AR, and thus the air flowing in from the outside of the window housing 203 Contamination of the protective window WW by foreign substances may be prevented.

9 is a view illustrating a process of coupling window units to the window housing 200 of the lens assembly 300 according to another embodiment of the present invention.

Referring to FIG. 9 , first to fifth window units 280 , 281 , 282 , 283 , and 284 are disposed on a rotating plate 620 and have the window housing 200 adjacent to the rotating plate 620 . A lens assembly 300 is disposed.

Since the window housing 200 shown in FIG. 9 has the same structure as the structure of the window housing (200 in FIG. 2) previously described with reference to FIG. 2, the description of the structure of the window housing 200 is omitted. do. In addition, since each of the first to fifth window units 280, 281, 282, 283, and 284 has the same structure as the window unit (280 in FIG. 2) previously described with reference to FIG. A description of the structure of the first to fifth window units 280 to 284 is omitted.

A linear driving unit 600 and a robot arm 610 coupled with the linear driving unit 600 are disposed on the rotating plate 620 . In addition, a rotation driving unit 650 is disposed under the rotation plate 620 , and the rotation driving unit 650 is connected to the rotation plate 620 by a connection unit 630 . The linear driving unit 600 and the robot arm 610 are spaced apart from the rotating plate 620, so that even when the rotating plate 620 rotates, the positions of the linear driving unit 600 and the robot arm 610 do not change. .

When power is supplied to the linear driver 600 from the outside, the linear driver 600 moves the robot arm 610 in a linear direction. Accordingly, in the robot arm 610, the first window unit 280 closest to the slot ST of the window housing 200 among the first to th window units 280 to 284 is the robot arm ( 610 is inserted into the window housing 200 through the slot ST.

On the other hand, if the first window unit 280 is contaminated during use of the lens assembly 300 and replacement of the first window unit 280 is required, the door part DP is opened, and thereafter the first window unit 280 is replaced. One window unit 280 is removed.

After that, the rotating plate 620 is rotated by the rotational force generated from the rotation driving unit 650, and the second window unit 281 among the second to fourth window units 281, 282, 283, and 284 is disposed closest to the slot ST. After that, by using the robot arm 610 that drives the linear drive unit 600 and moves linearly by the driving force of the linear drive unit 600, the second window unit 282 moves along the slot ST. It can be inserted into the window housing 200 through.

Although the above has been described with reference to preferred embodiments of the present invention, those skilled in the art or those having ordinary knowledge in the art do not deviate from the spirit and technical scope of the present invention described in the claims to be described later. It will be understood that the present invention can be variously modified and changed within the scope not specified. Therefore, the technical scope of the present invention is not limited to the contents described in the detailed description of the specification, but should be defined by the claims.

10: light irradiation unit 300: lens assembly
110: lens housing 150: lens
200: window housing 280: window unit
WW: protection window WF: window frame
BF: body frame F1: first frame
F2: 2nd frame DP: door part
HP: hinge joint M1: first magnet

Claims (15)

In the lens assembly mounted on the light irradiation unit,
a lens that changes a traveling direction of the light emitted from the light irradiation unit;
a lens housing accommodating the lens;
a window housing facing the light irradiation unit with the lens interposed therebetween and coupled to the lens housing to protect the lens; and
A window unit accommodated inside the window housing and overlapping the lens;
The window housing,
a body frame extending along the circumference of the window unit; and
A lens assembly of a light irradiation unit including a door part disposed on one side of the body frame and opening and closing the inside of the window housing. The method of claim 1, wherein the window unit,
a protective window covering the lens to protect the lens; and
The lens assembly of the light irradiation unit comprising a window frame coupled to the window housing by supporting an edge of the protective window. The method of claim 2, wherein the body frame,
a first frame;
a second frame facing the first frame; and
The lens assembly of the light irradiation unit, comprising: connecting the first frame to the second frame, and including a side wall portion disposed between the first frame and the second frame in a horizontal manner with the door portion. 4. The lens assembly of claim 3, wherein each of the first frame and the second frame has an opening corresponding to a position of the protective window. The method of claim 3, wherein the window housing,
The lens assembly of the light irradiation unit, characterized in that it further comprises a hinge coupling portion that hinge-couples the door portion to the body frame. 6 . The lens assembly of claim 5 , wherein the door portion opens and closes the inside of the window housing by rotating the hinge coupling part horizontally with each of the first frame and the second frame using a rotating shaft. The method of claim 3, wherein the window housing,
Further comprising an alignment unit having a shape protruding from the inner surface of the body frame,
The lens assembly of the light irradiation unit, characterized in that the alignment groove for accommodating the alignment portion is defined on the outer surface of the window frame. According to claim 3,
The body frame further includes a first magnet,
The lens assembly of the light irradiation unit, characterized in that the window frame further comprises a second magnet facing the first magnet. 9. The method of claim 8 , wherein the first magnet is embedded inside the first frame, and the window frame is in contact with the second frame by a repulsive force generated between the first magnet and the second magnet. The lens assembly of the light irradiation unit to be. 9. The method of claim 8 , wherein the first magnet is embedded in the second frame, and the window frame is in contact with the second frame by a force generated between the first magnet and the second magnet. The lens assembly of the light irradiation unit to be. According to claim 1,
Further comprising a gas supply unit supplying gas to the inside of the window housing,
The lens assembly of the light irradiation unit, characterized in that the gas supply unit is connected to a pipe connecting the outer surface of the window housing to the inner surface of the window housing. 12. The lens assembly of claim 11, wherein an air curtain is defined inside the body frame by the gas supplied from the gas supply unit to the inside of the window housing. 9 . The lens assembly of claim 8 , wherein a slot is defined in the window housing by moving the door part horizontally with the body frame. 14. The lens assembly of claim 13, wherein a width of the slot is greater than a thickness of the window frame. 15. The lens assembly of claim 14, wherein a gap is defined between the window frame and the body frame by a repulsive force generated between the first magnet and the second magnet.

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