WO2016104271A1 - Exposure device - Google Patents

Exposure device Download PDF

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Publication number
WO2016104271A1
WO2016104271A1 PCT/JP2015/085179 JP2015085179W WO2016104271A1 WO 2016104271 A1 WO2016104271 A1 WO 2016104271A1 JP 2015085179 W JP2015085179 W JP 2015085179W WO 2016104271 A1 WO2016104271 A1 WO 2016104271A1
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WO
WIPO (PCT)
Prior art keywords
light source
light irradiation
irradiation unit
unit
stage
Prior art date
Application number
PCT/JP2015/085179
Other languages
French (fr)
Japanese (ja)
Inventor
和重 橋本
敏成 新井
Original Assignee
株式会社ブイ・テクノロジー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社ブイ・テクノロジー filed Critical 株式会社ブイ・テクノロジー
Priority to CN201590001086.8U priority Critical patent/CN207164464U/en
Publication of WO2016104271A1 publication Critical patent/WO2016104271A1/en

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34

Definitions

  • the present invention relates to an exposure apparatus.
  • Patent Document 1 discloses a polarization exposure apparatus that includes a light source and a polarizing film extending along the light source, and irradiates a surface to be exposed with light emitted from the light source through the polarizing film.
  • the direction of the polarization axis is set according to the rotation direction of the analyzer, and the polarization irradiation unit is rotated so that the output of the received light amount detector that receives the light that has passed through the analyzer is maximized.
  • FIG. 13 is a diagram showing an outline of a conventional exposure apparatus 100 that performs exposure using polarized light.
  • the exposure apparatus 100 mainly includes a light source 101, a light source casing 102, a polarizing film 103, a stage 104, a camera 105, and an apparatus frame 106.
  • the light source 101 is provided inside the light source casing 102, and a polarizing film 103 is provided on the lower side ( ⁇ z side) of the light source 101.
  • An object to be exposed W having an exposed surface is placed on the stage 104.
  • the camera 105 is used for positioning the object to be exposed W.
  • the light emitted downward ( ⁇ z direction) from the light source 101 is applied to the exposed surface of the exposure target W through the polarizing film 103. Since the polarizing film 103 is provided on the lower side of the light source 101, when the light source 101 is replaced, it is necessary to pull out the light source 101 along the longitudinal direction (along the y direction).
  • FIG. 13 illustrates the case where the light source 101 is pulled out in the + y direction.
  • an exchange space A0 equivalent to the length L of the light source 101 is required outside the apparatus frame 106. For this reason, no other device or the like can be placed in the replacement space A0, and the space outside the device cannot be used effectively.
  • the present invention has been made in view of such circumstances, and an object thereof is to provide an exposure apparatus capable of effectively utilizing a space outside the apparatus.
  • an exposure apparatus includes, for example, a stage on which an exposure target is placed, and a light irradiation unit in which a rod-shaped light source is detachably provided, and above the stage.
  • the light irradiation unit is disposed so that the longitudinal direction of the light source is orthogonal to the scanning direction of the exposure object during exposure, and the light irradiation unit is disposed when replacing the light source.
  • a light source holding portion that rotates approximately 45 degrees or more from the exposure position.
  • a rod-shaped light source is detachably provided in the light irradiation unit, and the light irradiation unit is arranged so that the longitudinal direction is orthogonal to the scanning direction of the exposure object during exposure.
  • the light irradiator is rotated approximately 45 degrees or more from the position at the time of exposure.
  • the stage is movable from a first position to a second position along the scanning direction, and the exposure is performed when the stage is located at the first position or the second position.
  • a moving means for moving an object to or from the stage is provided, and the light irradiating unit can pull out the light source to the side where the moving means is not provided when replacing the light source.
  • the light source may be held. Thereby, even when it has a movement means, the space outside an apparatus can be used effectively.
  • the imaging unit provided above the stage, and a rail for moving the imaging unit, the position until the light irradiation unit and the imaging unit do not interfere when the light irradiation unit rotates A rail capable of moving the imaging unit.
  • an imaging part can be moved so that it may not interfere with a light irradiation part.
  • the degree of freedom in design related to the rotation of the light irradiation unit can be increased.
  • a rotation axis for rotating the light irradiation unit may be provided at a substantially center of the light irradiation unit.
  • region inside an apparatus frame can be enlarged among the replacement space for replacement
  • a rotation axis for rotating the light irradiation unit may be provided in the vicinity of the end in the longitudinal direction of the light irradiation unit.
  • the light source holding unit may include a rotation axis for rotating the light irradiation unit and a rotation axis moving unit for moving the rotation axis in a direction orthogonal to the scanning direction.
  • the space outside the apparatus can be used effectively.
  • FIG. 1 is a plan view showing an outline of an exposure apparatus 1. It is a perspective view which shows the detail of a polarized light irradiation part. It is a figure which shows an example at the time of rotating a polarized light irradiation part. It is a figure which shows the other example at the time of rotating a polarized light irradiation part. It is a figure which shows the other example at the time of rotating a polarized light irradiation part. 2 is a plan view showing an outline of an exposure apparatus 2. FIG. It is a figure which shows an example at the time of rotating a polarized light irradiation part.
  • FIG. 2 is a plan view showing an outline of an exposure apparatus 3.
  • FIG. 2 is a plan view showing an outline of an exposure apparatus 4.
  • FIG. It is a figure which shows the outline of the conventional exposure apparatus 100 which exposes using polarized light.
  • FIG. 1 is a front view showing an outline of an exposure apparatus 1 according to the first embodiment.
  • FIG. 2 is a plan view schematically showing the exposure apparatus 1.
  • the exposure apparatus 1 is, for example, for obtaining polarized light by passing light from a light source through a polarizing film, and irradiating the surface to be exposed such as a glass substrate to generate an alignment film or the like for a liquid crystal panel. .
  • the conveyance direction of the object to be exposed W is defined as the x direction
  • the direction orthogonal to the conveyance direction is defined as the y direction
  • the vertical direction is defined as the z direction.
  • FIG. 1 for the sake of explanation, the illustration of the device frame 60 and the front side (+ y side) of the portal holding portion 31 is omitted.
  • FIG. 2 the same applies to FIGS. 4 to 12 described in detail later
  • the top surface (surface on the + z side) of the device frame 60 is not shown for the sake of explanation.
  • the exposure apparatus 1 mainly includes a polarized light irradiation unit 10, a drive unit 20, a holding unit 30, an imaging unit 40, a robot 50, and an apparatus frame 60.
  • FIG. 3 is a perspective view illustrating details of the polarized light irradiation unit 10.
  • the polarized light irradiation unit 10 mainly includes a light source 11, an optical member 12, a mirror 13, and a housing 14.
  • the light source 11 is a rod-shaped member and emits unpolarized light (for example, ultraviolet light).
  • the light source 11 has a length of about 1 m to about 2 m and a diameter of about 10 mm.
  • the optical member 12 is a rectangular member having a long side slightly longer than the light emission length of the light source 11.
  • the optical member 12 is provided on the lower side ( ⁇ z side) of the light source 11 so that the longitudinal direction thereof substantially coincides with the longitudinal direction of the light source 11.
  • the optical member 12 is, for example, a polarizing film that polarizes non-polarized light emitted from the light source 11, but is not limited to the polarizing film.
  • the optical member 12 may be comprised with one member, and may be comprised using several small pieces of a parallelogram (a square and a rectangle are included). For example, parallelogram-shaped pieces may be arranged in a line to form a rectangular optical member 12 having a long side slightly longer than the light emission length of the light source 11.
  • the mirror 13 has an oval cross section and reflects the light emitted from the light source 11.
  • the mirror 13 is provided on the upper side (+ z side) of the light source 11 so that the longitudinal direction thereof coincides with the longitudinal direction of the light source 11.
  • the light emitted from the light source 11 passes through the optical member 12 and is irradiated downward ( ⁇ z direction) as thin linear light (see the two-dot chain line in FIG. 3).
  • the housing 14 is provided with a light source 11, an optical member 12, and a mirror 13.
  • a rotation drive unit 32 (detailed later) is provided on the upper surface (+ z side) of the housing 14.
  • the rotation drive unit 32 is provided at the housing 14, that is, at substantially the center of the polarized light irradiation unit 10.
  • the drive unit 20 mainly includes a stage 21 and a stage guide rail 22.
  • the stage 21 is provided so as to be movable along the stage guide rail 22 by driving means (not shown) (see thick arrows in FIGS. 1 and 2).
  • An object to be exposed W is placed on the upper surface of the stage 21.
  • the position of the stage 21 on the stage scan shaft 23 is detected by a position detector (not shown). Thereby, the position of the stage 21 in the x direction can be adjusted.
  • a position detector not shown
  • the holding unit 30 mainly includes a gate-type holding unit 31 and a rotation driving unit 32.
  • the gate-type holding portion 31 is a gate-shaped member having a top surface portion 31a and two columns 31b that support the top surface portion 31a.
  • the portal holder 31 is provided so as to cover the stage 21 and the stage guide rail 22 from above (+ z side).
  • a rotation drive unit 32 is provided on the lower side ( ⁇ z side) of the top surface portion 31a.
  • the rotation drive unit 32 includes a rotation shaft 33, a support unit (not shown) that rotatably supports the housing 14 so that the housing 14 can rotate about the rotation shaft 33, and a drive (not shown) that rotates the housing 14. Part. Thereby, the polarized light irradiation unit 10 is suspended from the portal holding unit 31 in a rotatable manner.
  • the rotation shaft 33 is substantially parallel to the z direction.
  • the drive unit includes a drive source such as an actuator and a control unit that controls the drive source. Since various well-known methods can be used for the mechanism of the support unit, the drive source, the control performed by the control unit, and the like, detailed description thereof is omitted.
  • the imaging unit 40 mainly includes an alignment camera 41 and a rail 42.
  • the alignment camera 41 is used for alignment of the object to be exposed W placed on the stage 21.
  • the alignment camera 41 is used during exposure and is not used when the light source 11 is replaced.
  • the rail 42 is used when the alignment camera 41 is moved in the x direction.
  • the robot 50 is a moving means for moving the object to be exposed W to the stage 21 and moving the object to be exposed W from the stage 21.
  • the robot 50 is illustrated as being provided adjacent to the end of the device frame 60 on the + x side.
  • the position of the robot 50 is not limited to the position shown in FIG.
  • the moving means for moving the object to be exposed W to the stage 21 or moving the object to be exposed W from the stage 21 is not limited to the robot 50.
  • the robot 50 rotates between a position where the object W to be exposed can be placed on the stage 21 (see the dotted line in FIG. 2) and a position where the object W to be exposed is taken out from the exposure apparatus 1 (see the solid line in FIG. 2). Is possible. Since the robot 50 is already known, a description thereof will be omitted.
  • the device frame 60 is a frame that covers the polarized light irradiation unit 10, the drive unit 20, the holding unit 30, and the imaging unit 40.
  • the device frame 60 is provided with a first opening (not shown), and an operator can go in and out of the device frame 60 and put in and out the light source 11 and the like through the first opening.
  • the apparatus frame 60 also includes a second mechanism 50 for the robot 50 to move (place) the object to be exposed W to the stage 21 and to move (take out) the object to be exposed W from the stage 21.
  • An opening (not shown) is provided.
  • the exposure apparatus 1 irradiates the surface to be exposed of the object to be exposed W with the light irradiated from the polarized light irradiation unit 10 while moving the object to be exposed W in the X direction which is the scanning direction. An alignment film or the like is generated. Since the operation of the exposure apparatus 1 is already known, detailed description thereof is omitted.
  • the polarized light irradiation unit 10 may be moved, the object to be exposed W (stage 21) may be moved, or both of them may be relatively moved.
  • the light source 11 is a consumable item, it is necessary to replace the light source 11 at regular intervals. Since the light source 11 is thin and long, it is easily broken when touched by hand. Therefore, the light source 11 is replaced by inserting a jig (not shown) having a length substantially the same as the length of the light source 11 under the light source 11, placing the light source 11 on the jig and then pulling out the jig. To do.
  • FIG. 4 is a diagram illustrating an example when the polarized light irradiation unit 10 is rotated.
  • FIG. 4 shows a state in which the polarized light irradiation unit 10 is rotated 45 degrees clockwise around the z axis from the position at the time of exposure.
  • An operator can enter the inside of the apparatus frame 60 as far as the stage guide rail 22 is disposed. Therefore, when replacing the light source 11 by pulling out the light source 11 to the side where the robot 50 is not provided (here, the ⁇ x side), a part of the area inside the device frame 60 is used for replacement maintenance of the light source 11.
  • the exchange space A1 It can be used as the exchange space A1, and the area outside the device frame 60 of the exchange space A1 can be reduced. Therefore, compared with the case where the light source 11 is not rotated when the light source 11 is replaced, the area where other devices outside the device frame 60 cannot be arranged can be narrowed. As a result, the space near the exposure apparatus 1 can be used effectively.
  • FIG. 5 is a diagram showing another example when the polarized light irradiation unit 10 is rotated.
  • FIG. 5 shows a state in which the polarized light irradiation unit 10 is rotated 45 degrees counterclockwise about the z axis from the position at the time of exposure.
  • the position of the polarized light irradiation unit 10 in FIG. 4 is indicated by a dotted line.
  • the polarized light irradiation unit 10 when the polarized light irradiation unit 10 is rotated 45 degrees counterclockwise, the housing 14 and the alignment camera 41 provided on the housing 14 side ( ⁇ x side) of the two alignment cameras 41 Will come into contact. Therefore, the alignment camera 41 that interferes with the housing 14 of the two alignment cameras 41 is moved along the rail 42. Thereby, the polarized light irradiation part 10 can be rotated without the housing
  • the rail 42 is provided along the scanning direction (x direction). However, as long as the alignment camera 41 can be moved to a position where the housing 14 and the alignment camera 41 do not interfere with each other. It is not necessary to provide the rail 42 along the x direction.
  • FIG. 6 is a diagram showing another example when the polarized light irradiation unit 10 is rotated.
  • FIG. 5 shows a state in which the polarized light irradiation unit 10 is rotated 90 degrees around the z axis from the position at the time of exposure.
  • the position of the polarized light irradiation unit 10 in FIGS. 4 and 5 is indicated by a dotted line.
  • the rotation angle of the polarized light irradiation unit 10 is not limited to the cases shown in FIGS. If the light source 11 can be pulled out to the side where the robot 50 is not provided and the area outside the device frame 60 in the replacement maintenance area of the light source 11 can be reduced, various rotation angles are adopted. can do. In the present embodiment, as shown in FIG. 6, the robot 50 is not provided if the rotation angle ⁇ 1 of the polarized light irradiation unit 10 is within a range of 45 degrees to 135 degrees (both clockwise and counterclockwise). The light source 11 can be pulled out to the side, and the area outside the device frame 60 in the replacement maintenance area of the light source 11 can be reduced.
  • the space outside the apparatus necessary for replacing the light source 11 can be reduced. Further, by moving the alignment camera 41, the degree of freedom in design regarding the rotation of the polarized light irradiation unit 10 can be increased.
  • the robot is provided adjacent to one end of the device frame in the x direction.
  • the position where the robot is provided is not limited thereto.
  • a robot is provided adjacent to one end of the device frame in the y direction.
  • the exposure apparatus 2 according to the second embodiment will be described below.
  • the same parts as those of the exposure apparatus 1 according to the first embodiment are denoted by the same reference numerals and description thereof is omitted.
  • FIG. 7 is a plan view showing an outline of the exposure apparatus 2.
  • the exposure apparatus 2 has two robots 50.
  • the robot 50 is provided adjacent to the + y side end of the device frame 60.
  • the robot 50 can move the object to be exposed W to the stage 21 when the stage 21 is positioned at the end in the + x direction, or can move the object W to be exposed to the stage 21, and the stage 21 can be moved in the ⁇ x direction.
  • the object to be exposed W is provided at two positions where the object to be exposed W can be moved to the stage 21 and the object to be exposed W can be moved from the stage 21 when it is located at the end of the stage.
  • the exposure apparatus 2 has two sets of imaging units 40.
  • the imaging unit 40 can align the object to be exposed W when the stage 21 is positioned at the end in the + x direction, and can position the object W to be aligned when the stage 21 is positioned at the end in the ⁇ x direction. Are provided at two locations.
  • FIG. 8 and 9 are diagrams illustrating an example of the case where the polarized light irradiation unit 10 is rotated.
  • FIG. 8 shows a state in which the polarized light irradiation unit 10 is rotated 45 degrees counterclockwise about the z axis from the position at the time of exposure.
  • FIG. 9 shows a state in which the polarized light irradiation unit 10 is rotated 45 degrees clockwise around the z axis from the position at the time of exposure.
  • the position of the polarized light irradiation unit 10 in FIG. 8 is indicated by a dotted line.
  • a part of the area inside the device frame 60 is replaced with a replacement space for replacement maintenance of the light source 11. It can be used as A4 and A5, and the space near the exposure apparatus 2 can be used effectively.
  • the polarized light irradiation unit 10 can be rotated by moving the alignment camera 41 that interferes with the housing 14 when the polarized light irradiation unit 10 rotates along the rails 42.
  • FIG. 10 is a diagram showing another example when the polarized light irradiation unit 10 is rotated.
  • FIG. 10 shows a state in which the polarized light irradiation unit 10 is rotated 90 degrees around the z axis from the position at the time of exposure.
  • the position of the polarized light irradiation unit 10 in FIGS. 8 and 9 is indicated by a dotted line.
  • the polarized light irradiation unit 10 and the robot 50 are parallel. That is, neither the ⁇ x direction is the side where the robot 50 is provided, and the light source 11 can be extracted from both the + x direction and the ⁇ x direction.
  • the replacement maintenance area when the light source 11 is pulled out in the -x direction is the replacement space A6, and the replacement maintenance area when the light source 11 is pulled out in the + x direction is the replacement space A7.
  • both replacement spaces A6 and A7 are indicated by solid lines, but either one of the replacement spaces A6 and A7 may be used.
  • a part of the area inside the apparatus frame 60 can be used as the exchange spaces A6 and A7, and the space near the exposure apparatus 2 can be effectively used.
  • the housing 14 and the alignment camera 41 come into contact with each other when the polarized light irradiation unit 10 is rotated 90 degrees. Therefore, the alignment camera 41 that interferes with the casing 14 is moved along the rail 42 so that the casing 14 can rotate without interfering with the alignment camera 41.
  • the rotation angle of the polarized light irradiation unit 10 is not limited to the case shown in FIGS. Similar to the first embodiment, the light source 11 can be pulled out to the side where the robot 50 is not provided, and the area outside the device frame 60 in the replacement maintenance area of the light source 11 can be reduced. If so, various rotation angles can be adopted. In the present embodiment, as shown in FIG. 10, the rotation angle ⁇ 2 of the polarized light irradiation unit 10 is in the range of 45 to 90 degrees counterclockwise, or the rotation angle ⁇ 3 of the polarized light irradiation unit 10 is 45 degrees clockwise. If the angle is within the range of ⁇ 90 degrees, the light source 11 can be pulled out to the side where the robot 50 is not provided, and the area outside the device frame 60 in the replacement maintenance area of the light source 11 is reduced. be able to.
  • the space outside the apparatus necessary for replacing the light source 11 can be reduced. Further, by moving the alignment camera 41, the degree of freedom in design regarding the rotation of the polarized light irradiation unit 10 can be increased.
  • the rotation shaft 33 of the polarized light irradiation unit 10 is provided at the approximate center of the top surface portion 31a of the gate-shaped holding unit 31, but the position of the rotation shaft 33 is It is not limited to this.
  • the rotary shaft 33 is provided in the vicinity of the end in the longitudinal direction of the top surface portion 31a.
  • the exposure apparatus 3 according to the third embodiment will be described below. Since the difference between the exposure apparatus 3 and the exposure apparatus 1 is only the position of the rotation axis, the same parts as those in the exposure apparatus 1 according to the first embodiment are denoted by the same reference numerals and description thereof is omitted. .
  • FIG. 11 is a plan view showing an outline of the exposure apparatus 3.
  • the rotation shaft 33 is provided in the vicinity of both ends in the longitudinal direction of the top surface portion 31a (ends in the ⁇ y direction and the + y direction in FIG. 11).
  • FIG. 11 shows a case where the polarized light irradiation unit 10 is rotated 90 degrees counterclockwise from the position at the time of exposure.
  • the rotating shaft 33 is provided near the end in the ⁇ y direction
  • the polarized light irradiation unit 10 is rotated 90 degrees clockwise
  • the rotating shaft 33 is provided near the end in the + y direction
  • the polarized light irradiation unit 10 is rotated 90 degrees counterclockwise.
  • the polarized light irradiation unit 10 can be rotated without the housing 14 and the alignment camera 41 coming into contact with each other.
  • the robot 50 is provided adjacent to the + x side end of the apparatus frame 60, the polarized light irradiation unit 10 is rotated 90 degrees, and then the light source 11 is pulled out in the ⁇ x direction. Also in this case, the space in the vicinity of the exposure apparatus 3 can be effectively used for a part of the area inside the apparatus frame 60.
  • the position of the rotation driving unit 32 (rotating shaft 33) is not limited to the approximate center of the polarized light irradiation unit 10, so that the degree of freedom in designing the rotation of the polarized light irradiation unit 10 can be increased.
  • the rotating shaft 33 is provided at two locations near the end in the ⁇ y direction of the top surface portion 31a and near the end in the + y direction, but the rotating shaft 33 is near the end in the ⁇ y direction and + y Either one near the end of the direction may be used.
  • the rail 42 is illustrated in FIG. 11, the rail 42 is not essential.
  • the rotation angle of the polarized light irradiation unit 10 is not limited to 90 degrees.
  • the light source 11 can be pulled out to the side where the robot 50 is not provided, and the area outside the device frame 60 in the replacement maintenance area of the light source 11 can be increased. If it can be narrowed, various rotation angles can be adopted. In the present embodiment, as long as the rotation angle of the polarized light irradiation unit 10 is in the range of 0 to 90 degrees, the light source 11 can be pulled out to the side where the robot 50 is not provided, and for replacement maintenance of the light source 11. In this area, the area outside the device frame 60 can be reduced.
  • the rotation shaft 33 of the polarized light irradiation unit 10 is provided at the approximate center of the top surface portion 31a of the gate-shaped holding unit 31, but the position of the rotation shaft 33 is It is not limited to this.
  • the rotary shaft 33 is movably provided.
  • the exposure apparatus 4 according to the fourth embodiment will be described below. Since the difference between the exposure apparatus 4 and the exposure apparatus 1 is only whether or not the rotation axis can be moved, the same parts as those in the exposure apparatus 1 according to the first embodiment are denoted by the same reference numerals, Description is omitted.
  • FIG. 12 is a plan view showing an outline of the exposure apparatus 4.
  • the holding unit 30B mainly has an axis moving unit that moves the rotation driving unit 32 along the longitudinal direction (y direction) of the top surface portion 31a in addition to the gate-type holding unit 31 and the rotation driving unit 32.
  • the shaft moving unit moves a rail 34 provided along the longitudinal direction (y direction) of the top surface portion 31a to the lower side ( ⁇ z side) of the top surface portion 31a, and the rotary drive unit 32 moves along the rail 34.
  • a drive unit that does not.
  • the drive unit includes a drive source such as an actuator and a control unit that controls the drive source.
  • a drive source such as an actuator
  • a control unit that controls the drive source.
  • FIG. 12 shows a case where the polarized light irradiation unit 10 is rotated 90 degrees from the position at the time of exposure, and the rotation driving unit 32 is moved along the rail 34 in the ⁇ y direction.
  • the order of the rotation of the polarized light irradiation unit 10 and the movement of the rotation driving unit 32 is arbitrary.
  • the rail 42 is not essential.
  • the rotation shaft 33 is positioned approximately at the center in the longitudinal direction of the casing 14, the polarization irradiation unit 10 is rotated with respect to the exposure apparatus 3 in which the rotation shaft 33 is positioned near the end of the casing 14. Then, the area inside the device frame 60 in the replacement space A10 for replacement maintenance of the light source 11 when the light source 11 is pulled out can be widened.
  • the rotation angle of the polarized light irradiation unit 10 is not limited to 90 degrees. Similar to the first to third embodiments, the light source 11 can be pulled out to the side where the robot 50 is not provided, and the area outside the device frame 60 in the replacement maintenance area of the light source 11 can be increased. If it can be narrowed, various rotation angles can be adopted. In the present embodiment, various angles within the range of 0 to 90 degrees can be set according to the position of the rotation drive unit 32.
  • the degree of freedom in designing the rotation of the polarized light irradiation unit 10 can be increased by making the rotation drive unit 32 (rotating shaft 33) movable.
  • substantially is a concept that includes not only a case where they are exactly the same but also errors and deformations that do not lose the identity.
  • the approximate center is not limited to the exact center.
  • the “neighborhood” is a concept indicating that when it is in the vicinity of A, for example, it is near A and may or may not include A.
  • Exposure apparatus 10 Polarized light irradiation unit 11: Light source 12: Optical member 13: Mirror 14: Housing 20: Drive unit 21: Stage 22: Stage guide rail 23: Stage scan axes 30, 30A 30B: Holding part 31: Gate-type holding part 31a: Top surface part 31b: Pillar 32: Rotation driving part 33: Rotating shaft 34: Rail 40: Imaging part 41: Alignment camera 42: Rail 50: Robot 60: Apparatus frame 100: Exposure Device 101: Light source 102: Light source casing 103: Polarizing film 104: Stage 105: Camera 106: Device frame W: Object to be exposed

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  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

An exposure device (1) photoirradiation unit (10) provided above a stage (21) on which an object (W) to be exposed is placed, and having a rod-shaped light source (11) detachably provided thereon, wherein during exposure, the photoirradiation unit (10) is positioned in a manner such that the lengthwise direction of the light source (11) is perpendicular to the scanning direction of the object (W) to be exposed, and when exchanging the light source (11), the photoirradiation unit (10) is rotated by substantially 45 degrees or more relative to the position thereof during exposure. As a result, it is possible to effectively use the space outside the exposure device (1).

Description

露光装置Exposure equipment
　本発明は、露光装置に関する。 The present invention relates to an exposure apparatus.
　特許文献１には、光源と、光源に沿って延設される偏光膜とを備え、偏光膜を通して光源から出射される光を被露光面に照射する偏光露光装置が開示されている。この偏光露光装置においては、検光子の回転方向によって偏光軸の方向を設定し、検光子を通過した光を受光する受光量検出器の出力が極大となるように偏光照射部を回転させる。 Patent Document 1 discloses a polarization exposure apparatus that includes a light source and a polarizing film extending along the light source, and irradiates a surface to be exposed with light emitted from the light source through the polarizing film. In this polarization exposure apparatus, the direction of the polarization axis is set according to the rotation direction of the analyzer, and the polarization irradiation unit is rotated so that the output of the received light amount detector that receives the light that has passed through the analyzer is maximized.
特開２０１３－１８２０８５号公報JP 2013-182085 A
　特許文献１に記載の発明のような偏光を用いて露光を行う露光装置においては、光源の被露光面側には偏光膜が配置されている。図１３は、偏光を用いて露光を行う従来の露光装置１００の概略を示す図である。 In an exposure apparatus that performs exposure using polarized light as in the invention described in Patent Document 1, a polarizing film is disposed on the exposed surface side of a light source. FIG. 13 is a diagram showing an outline of a conventional exposure apparatus 100 that performs exposure using polarized light.
　露光装置１００は、主として、光源１０１と、光源用筐体１０２と、偏光膜１０３と、ステージ１０４と、カメラ１０５と、装置枠１０６を有する。光源１０１は、光源用筐体１０２の内部に設けられており、光源１０１の下側（－ｚ側）には偏光膜１０３が設けられる。被露光面を有する被露光対象物Ｗは、ステージ１０４に載置されている。カメラ１０５は、被露光対象物Ｗの位置決めに用いられる。 The exposure apparatus 100 mainly includes a light source 101, a light source casing 102, a polarizing film 103, a stage 104, a camera 105, and an apparatus frame 106. The light source 101 is provided inside the light source casing 102, and a polarizing film 103 is provided on the lower side (−z side) of the light source 101. An object to be exposed W having an exposed surface is placed on the stage 104. The camera 105 is used for positioning the object to be exposed W.
　光源１０１から下方（－ｚ方向）へ出射される光は、偏光膜１０３を通して被露光対象物Ｗの被露光面に照射される。偏光膜１０３は光源１０１の下側に設けられているため、光源１０１を交換する際には、光源１０１を長手方向に沿って（ｙ方向に沿って）引き抜く必要がある。 The light emitted downward (−z direction) from the light source 101 is applied to the exposed surface of the exposure target W through the polarizing film 103. Since the polarizing film 103 is provided on the lower side of the light source 101, when the light source 101 is replaced, it is necessary to pull out the light source 101 along the longitudinal direction (along the y direction).
　図１３では、＋ｙ方向に光源１０１を引き抜く場合を例示している。＋ｙ方向に光源１０１を引き抜いて光源１０１を交換する場合には、装置枠１０６の外側に光源１０１の長さＬと同等の交換スペースＡ０が必要となる。そのため、交換スペースＡ０に他の装置等を配置することができず、装置外のスペースを有効活用することができない。 FIG. 13 illustrates the case where the light source 101 is pulled out in the + y direction. When the light source 101 is exchanged by pulling out the light source 101 in the + y direction, an exchange space A0 equivalent to the length L of the light source 101 is required outside the apparatus frame 106. For this reason, no other device or the like can be placed in the replacement space A0, and the space outside the device cannot be used effectively.
　本発明はこのような事情に鑑みてなされたもので、装置外のスペースを有効活用することができる露光装置を提供することを目的とする。 The present invention has been made in view of such circumstances, and an object thereof is to provide an exposure apparatus capable of effectively utilizing a space outside the apparatus.
　上記課題を解決するために、本発明に係る露光装置は、例えば、露光対象物が載置されるステージと、棒状の光源が着脱可能に設けられた光照射部であって、前記ステージの上方に設けられた光照射部と、露光時には、前記光源の長手方向が前記露光対象物の走査方向と直交するように前記光照射部を配置し、前記光源を交換するときには、前記光照射部を前記露光時の位置から略４５度以上回転させる光源保持部と、を備えたことを特徴とする。 In order to solve the above problems, an exposure apparatus according to the present invention includes, for example, a stage on which an exposure target is placed, and a light irradiation unit in which a rod-shaped light source is detachably provided, and above the stage. When the light irradiation unit is disposed, the light irradiation unit is disposed so that the longitudinal direction of the light source is orthogonal to the scanning direction of the exposure object during exposure, and the light irradiation unit is disposed when replacing the light source. And a light source holding portion that rotates approximately 45 degrees or more from the exposure position.
　本発明に係る露光装置によれば、光照射部には棒状の光源が着脱可能に設けられており、露光時には、長手方向が露光対象物の走査方向と直交するように光照射部を配置し、光源を交換するときには、光照射部を露光時の位置から略４５度以上回転させる。これにより、装置外のスペースを有効活用することができる。 According to the exposure apparatus of the present invention, a rod-shaped light source is detachably provided in the light irradiation unit, and the light irradiation unit is arranged so that the longitudinal direction is orthogonal to the scanning direction of the exposure object during exposure. When exchanging the light source, the light irradiator is rotated approximately 45 degrees or more from the position at the time of exposure. Thereby, the space outside the apparatus can be effectively used.
　ここで、前記ステージは、前記走査方向に沿って第１の位置から第２の位置へ移動可能であり、前記ステージが前記第１の位置又は前記第２の位置に位置する場合において、前記露光対象物を前記ステージへ又は前記ステージから移動させる移動手段を備え、前記光照射部は、前記光源を交換するときに、前記光源を前記移動手段が設けられていない側に引き抜くことができるように、前記光源を保持してもよい。これにより、移動手段を有する場合にも、装置外のスペースを有効活用することができる。 Here, the stage is movable from a first position to a second position along the scanning direction, and the exposure is performed when the stage is located at the first position or the second position. A moving means for moving an object to or from the stage is provided, and the light irradiating unit can pull out the light source to the side where the moving means is not provided when replacing the light source. The light source may be held. Thereby, even when it has a movement means, the space outside an apparatus can be used effectively.
　ここで、前記ステージの上方に設けられた撮像部と、前記撮像部を移動させるレールであって、前記光照射部が回転するときに前記光照射部と前記撮像部とが干渉しない位置まで前記撮像部を移動可能なレールと、を備えてもよい。これにより、撮像部を光照射部と干渉しないように移動させることができる。その結果、光照射部の回転に関する設計自由度を高くすることができる。 Here, the imaging unit provided above the stage, and a rail for moving the imaging unit, the position until the light irradiation unit and the imaging unit do not interfere when the light irradiation unit rotates A rail capable of moving the imaging unit. Thereby, an imaging part can be moved so that it may not interfere with a light irradiation part. As a result, the degree of freedom in design related to the rotation of the light irradiation unit can be increased.
　ここで、前記光源保持部は、前記光照射部を回転させるための回転軸が、前記光照射部の略中央に設けられてもよい。これにより、偏光照射部を回転させた後で光源を引き抜くときの光源の交換メンテナンス用の交換スペースのうちの装置枠内部の領域を広くすることができる。 Here, in the light source holding unit, a rotation axis for rotating the light irradiation unit may be provided at a substantially center of the light irradiation unit. Thereby, the area | region inside an apparatus frame can be enlarged among the replacement space for replacement | exchange maintenance of a light source when extracting a light source after rotating a polarized light irradiation part.
　ここで、前記光源保持部は、前記光照射部を回転させるための回転軸が、前記光照射部の長手方向の端部近傍に設けられてもよい。これにより、光照射部の回転に関する設計自由度を高くすることができる。また、撮像部を移動可能なレールを不要にできる。 Here, in the light source holding unit, a rotation axis for rotating the light irradiation unit may be provided in the vicinity of the end in the longitudinal direction of the light irradiation unit. Thereby, the design freedom regarding rotation of a light irradiation part can be made high. Moreover, the rail which can move an imaging part can be made unnecessary.
　ここで、前記光源保持部は、前記光照射部を回転させるための回転軸と、前記回転軸を前記走査方向と直交する方向へ移動させる回転軸移動部と、を有してもよい。これにより、光照射部の回転に関する設計自由度を高くすることができる。また、撮像部を移動可能なレールを不要にできる。 Here, the light source holding unit may include a rotation axis for rotating the light irradiation unit and a rotation axis moving unit for moving the rotation axis in a direction orthogonal to the scanning direction. Thereby, the design freedom regarding rotation of a light irradiation part can be made high. Moreover, the rail which can move an imaging part can be made unnecessary.
　本発明によれば、装置外のスペースを有効活用することができる。 According to the present invention, the space outside the apparatus can be used effectively.
第１の実施の形態に係る露光装置１の概略を示す正面図である。It is a front view which shows the outline of the exposure apparatus 1 which concerns on 1st Embodiment. 露光装置１の概略を示す平面図である。1 is a plan view showing an outline of an exposure apparatus 1. 偏光照射部の詳細を示す斜視図である。It is a perspective view which shows the detail of a polarized light irradiation part. 偏光照射部を回転させた場合の一例を示す図である。It is a figure which shows an example at the time of rotating a polarized light irradiation part. 偏光照射部を回転させた場合の他の例を示す図である。It is a figure which shows the other example at the time of rotating a polarized light irradiation part. 偏光照射部を回転させた場合の他の例を示す図である。It is a figure which shows the other example at the time of rotating a polarized light irradiation part. 露光装置２の概略を示す平面図である。2 is a plan view showing an outline of an exposure apparatus 2. FIG. 偏光照射部を回転させた場合の一例を示す図である。It is a figure which shows an example at the time of rotating a polarized light irradiation part. 偏光照射部を回転させた場合の一例を示す図である。It is a figure which shows an example at the time of rotating a polarized light irradiation part. 偏光照射部を回転させた場合の一例を示す図である。It is a figure which shows an example at the time of rotating a polarized light irradiation part. 露光装置３の概略を示す平面図である。2 is a plan view showing an outline of an exposure apparatus 3. FIG. 露光装置４の概略を示す平面図である。2 is a plan view showing an outline of an exposure apparatus 4. FIG. 偏光を用いて露光を行う従来の露光装置１００の概略を示す図である。It is a figure which shows the outline of the conventional exposure apparatus 100 which exposes using polarized light.
　以下、本発明の実施形態を、図面を参照して詳細に説明する。 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
　＜第１の実施の形態＞
図１は、第１の実施の形態に係る露光装置１の概略を示す正面図である。図２は、露光装置１の概略を示す平面図である。露光装置１は、例えば、光源からの光を偏光膜を通過させて偏光を得、この偏光をガラス基板等の被露光面に照射して、液晶パネル用の配向膜等を生成するものである。 <First Embodiment>
FIG. 1 is a front view showing an outline of an exposure apparatus 1 according to the first embodiment. FIG. 2 is a plan view schematically showing the exposure apparatus 1. The exposure apparatus 1 is, for example, for obtaining polarized light by passing light from a light source through a polarizing film, and irradiating the surface to be exposed such as a glass substrate to generate an alignment film or the like for a liquid crystal panel. .
　以下、被露光対象物Ｗの搬送方向をｘ方向とし、搬送方向に直交する方向をｙ方向とし、鉛直方向をｚ方向とする。なお、図１においては、説明のため、装置枠６０及び門型保持部３１の手前側（＋ｙ側）の部分については図示を省略している。また、図２（後に詳述する図４～１２についても同様）においては、説明のため、装置枠６０の天面（＋ｚ側の面）については図示を省略している。 Hereinafter, the conveyance direction of the object to be exposed W is defined as the x direction, the direction orthogonal to the conveyance direction is defined as the y direction, and the vertical direction is defined as the z direction. In FIG. 1, for the sake of explanation, the illustration of the device frame 60 and the front side (+ y side) of the portal holding portion 31 is omitted. In FIG. 2 (the same applies to FIGS. 4 to 12 described in detail later), the top surface (surface on the + z side) of the device frame 60 is not shown for the sake of explanation.
　露光装置１は、主として、偏光照射部１０と、駆動部２０と、保持部３０と、撮像部４０と、ロボット５０と、装置枠６０と、を備える。 The exposure apparatus 1 mainly includes a polarized light irradiation unit 10, a drive unit 20, a holding unit 30, an imaging unit 40, a robot 50, and an apparatus frame 60.
　偏光照射部１０は、被露光対象物Ｗに偏光を照射する。図３は、偏光照射部１０の詳細を示す斜視図である。偏光照射部１０は、主として、光源１１と、光学部材１２と、ミラー１３と、筐体１４と、を有する。 The polarized light irradiation unit 10 irradiates the object to be exposed W with polarized light. FIG. 3 is a perspective view illustrating details of the polarized light irradiation unit 10. The polarized light irradiation unit 10 mainly includes a light source 11, an optical member 12, a mirror 13, and a housing 14.
　光源１１は、棒状の部材であり、偏光していない光（例えば、紫外光）を出射する。光源１１は、長さが略１ｍ～略２ｍ程度であり、直径が略１０ｍｍ程度である。 The light source 11 is a rod-shaped member and emits unpolarized light (for example, ultraviolet light). The light source 11 has a length of about 1 m to about 2 m and a diameter of about 10 mm.
　光学部材１２は、光源１１の発光長よりやや長い長辺を持つ長方形の部材である。光学部材１２は、その長手方向が光源１１の長手方向に略一致するように、光源１１の下側（－ｚ側）に設けられる。光学部材１２は、例えば、光源１１から出射された無偏光の光を偏光する偏光膜であるが、偏光膜に限定されるものではない。また、光学部材１２は、一個の部材で構成してもよいし、平行四辺形（正方形、長方形を含む）の小片を複数用いて構成してもよい。例えば、平行四辺形の小片を列状に並べて、光源１１の発光長よりやや長い長辺を持つ長方形の光学部材１２としてもよい。 The optical member 12 is a rectangular member having a long side slightly longer than the light emission length of the light source 11. The optical member 12 is provided on the lower side (−z side) of the light source 11 so that the longitudinal direction thereof substantially coincides with the longitudinal direction of the light source 11. The optical member 12 is, for example, a polarizing film that polarizes non-polarized light emitted from the light source 11, but is not limited to the polarizing film. Moreover, the optical member 12 may be comprised with one member, and may be comprised using several small pieces of a parallelogram (a square and a rectangle are included). For example, parallelogram-shaped pieces may be arranged in a line to form a rectangular optical member 12 having a long side slightly longer than the light emission length of the light source 11.
　ミラー１３は、断面が楕円形であり、光源１１から出射された光を反射する。ミラー１３は、その長手方向が光源１１の長手方向と一致するように、光源１１の上側（＋ｚ側）に設けられる。これにより、光源１１から出射された光は、光学部材１２を通って、細い線状の光として下方（－ｚ方向）に向けて照射される（図３の２点鎖線参照）。 The mirror 13 has an oval cross section and reflects the light emitted from the light source 11. The mirror 13 is provided on the upper side (+ z side) of the light source 11 so that the longitudinal direction thereof coincides with the longitudinal direction of the light source 11. As a result, the light emitted from the light source 11 passes through the optical member 12 and is irradiated downward (−z direction) as thin linear light (see the two-dot chain line in FIG. 3).
　筐体１４には、光源１１、光学部材１２、及びミラー１３が設けられる。筐体１４の上側（＋ｚ側）の面には、回転駆動部３２（後に詳述）が設けられる。回転駆動部３２は、筐体１４、すなわち偏光照射部１０の略中央に設けられる。 The housing 14 is provided with a light source 11, an optical member 12, and a mirror 13. A rotation drive unit 32 (detailed later) is provided on the upper surface (+ z side) of the housing 14. The rotation drive unit 32 is provided at the housing 14, that is, at substantially the center of the polarized light irradiation unit 10.
　図１及び図２の説明に戻る。駆動部２０は、主として、ステージ２１と、ステージガイドレール２２と、を有する。 Returning to the description of FIG. 1 and FIG. The drive unit 20 mainly includes a stage 21 and a stage guide rail 22.
　ステージ２１は、図示しない駆動手段により、ステージガイドレール２２に沿って移動可能に設けられる（図１、２の太矢印参照）。ステージ２１の上面には、被露光対象物Ｗが載置される。 The stage 21 is provided so as to be movable along the stage guide rail 22 by driving means (not shown) (see thick arrows in FIGS. 1 and 2). An object to be exposed W is placed on the upper surface of the stage 21.
　ステージ２１がステージガイドレール２２に沿ってｘ方向に移動する際には、図示しない位置検出部によりステージスキャン軸２３におけるステージ２１の位置が検出される。これにより、ステージ２１のｘ方向の位置が調整できる。なお、ステージ２１の移動及び位置決めは、すでに公知の技術であるため、説明を省略する。 When the stage 21 moves in the x direction along the stage guide rail 22, the position of the stage 21 on the stage scan shaft 23 is detected by a position detector (not shown). Thereby, the position of the stage 21 in the x direction can be adjusted. In addition, since the movement and positioning of the stage 21 are already well-known techniques, description will be omitted.
　保持部３０は、主として、門型保持部３１と、回転駆動部３２と、を有する。門型保持部３１は、天面部３１ａと、天面部３１ａを支える２本の柱３１ｂとを有する門型の部材である。門型保持部３１は、ステージ２１及びステージガイドレール２２を上（＋ｚ側）から覆うように設けられる。 The holding unit 30 mainly includes a gate-type holding unit 31 and a rotation driving unit 32. The gate-type holding portion 31 is a gate-shaped member having a top surface portion 31a and two columns 31b that support the top surface portion 31a. The portal holder 31 is provided so as to cover the stage 21 and the stage guide rail 22 from above (+ z side).
　天面部３１ａの下側（－ｚ側）には、回転駆動部３２が設けられる。回転駆動部３２は、回転軸３３と、回転軸３３を中心として筐体１４が回転できるように筐体１４を回動自在に支持する図示しない支持部と、筐体１４を回転させる図示しない駆動部と、を有する。これにより、門型保持部３１に偏光照射部１０が回転可能に吊り下げられる。 A rotation drive unit 32 is provided on the lower side (−z side) of the top surface portion 31a. The rotation drive unit 32 includes a rotation shaft 33, a support unit (not shown) that rotatably supports the housing 14 so that the housing 14 can rotate about the rotation shaft 33, and a drive (not shown) that rotates the housing 14. Part. Thereby, the polarized light irradiation unit 10 is suspended from the portal holding unit 31 in a rotatable manner.
　回転軸３３は、ｚ方向と略平行である。駆動部は、アクチュエータ等の駆動源と、駆動源を制御する制御部と、を有する。支持部の機構、駆動源、制御部が行う制御等は、すでに公知の様々な方法を用いることができるため、詳細な説明を省略する。 The rotation shaft 33 is substantially parallel to the z direction. The drive unit includes a drive source such as an actuator and a control unit that controls the drive source. Since various well-known methods can be used for the mechanism of the support unit, the drive source, the control performed by the control unit, and the like, detailed description thereof is omitted.
　撮像部４０は、主として、アライメントカメラ４１と、レール４２と、を有する。アライメントカメラ４１は、ステージ２１上に載置された被露光対象物Ｗのアライメントに使用するものである。アライメントカメラ４１は、露光時に使用するものであり、光源１１を交換する際には使用しない。レール４２は、アライメントカメラ４１をｘ方向に移動させるときに用いられる。 The imaging unit 40 mainly includes an alignment camera 41 and a rail 42. The alignment camera 41 is used for alignment of the object to be exposed W placed on the stage 21. The alignment camera 41 is used during exposure and is not used when the light source 11 is replaced. The rail 42 is used when the alignment camera 41 is moved in the x direction.
　ロボット５０は、被露光対象物Ｗをステージ２１へ移動させたり、被露光対象物Ｗをステージ２１から移動させたりする移動手段である。本実施の形態では、ロボット５０は、装置枠６０の＋ｘ側の端に隣接して設けられる場合を例示している。ロボット５０の位置は、図２等に示す位置には限られない。また、被露光対象物Ｗをステージ２１へ移動させたり、被露光対象物Ｗをステージ２１から移動させたりする移動手段は、ロボット５０に限定されない。 The robot 50 is a moving means for moving the object to be exposed W to the stage 21 and moving the object to be exposed W from the stage 21. In the present embodiment, the robot 50 is illustrated as being provided adjacent to the end of the device frame 60 on the + x side. The position of the robot 50 is not limited to the position shown in FIG. The moving means for moving the object to be exposed W to the stage 21 or moving the object to be exposed W from the stage 21 is not limited to the robot 50.
　ロボット５０は、ステージ２１へ被露光対象物Ｗを載置可能な位置（図２点線参照）と、被露光対象物Ｗを露光装置１から取り出す位置（図２実線参照）との間で、回転可能である。ロボット５０は、すでに公知であるため、説明を省略する。 The robot 50 rotates between a position where the object W to be exposed can be placed on the stage 21 (see the dotted line in FIG. 2) and a position where the object W to be exposed is taken out from the exposure apparatus 1 (see the solid line in FIG. 2). Is possible. Since the robot 50 is already known, a description thereof will be omitted.
　装置枠６０は、偏光照射部１０と、駆動部２０と、保持部３０と、撮像部４０とを覆う枠である。装置枠６０には図示しない第１の開口部が設けられており、第１の開口部を介して作業者が装置枠６０の内部に出入りしたり、光源１１等を出し入れしたりすることができる。また、装置枠６０には、ロボット５０が被露光対象物Ｗをステージ２１へ移動（載置）させたり、被露光対象物Ｗをステージ２１から移動（取り出し）させたりするための、第２の開口部（図示せず）が設けられる。 The device frame 60 is a frame that covers the polarized light irradiation unit 10, the drive unit 20, the holding unit 30, and the imaging unit 40. The device frame 60 is provided with a first opening (not shown), and an operator can go in and out of the device frame 60 and put in and out the light source 11 and the like through the first opening. . The apparatus frame 60 also includes a second mechanism 50 for the robot 50 to move (place) the object to be exposed W to the stage 21 and to move (take out) the object to be exposed W from the stage 21. An opening (not shown) is provided.
　このように構成された露光装置１の作用について説明する。露光装置１は、被露光対象物Ｗを走査方向であるＸ方向に移動させながら、偏光照射部１０から照射された光を被露光対象物Ｗの被露光面に照射して、液晶パネル用の配向膜等を生成する。この露光装置１の作用は、すでに公知であるため、詳細な説明を省略する。なお、走査は、偏光照射部１０を移動させてもよいし、被露光対象物Ｗ（ステージ２１）を移動させてもよいし、それらの両方を相対的に移動させてもよい。 The operation of the exposure apparatus 1 configured in this way will be described. The exposure apparatus 1 irradiates the surface to be exposed of the object to be exposed W with the light irradiated from the polarized light irradiation unit 10 while moving the object to be exposed W in the X direction which is the scanning direction. An alignment film or the like is generated. Since the operation of the exposure apparatus 1 is already known, detailed description thereof is omitted. In the scanning, the polarized light irradiation unit 10 may be moved, the object to be exposed W (stage 21) may be moved, or both of them may be relatively moved.
　このような露光動作を行うと、光源１１は消耗品であるため、一定期間毎に光源１１を交換する必要がある。光源１１は細くて長いため、手で触ると割れ易い。したがって、光源１１の長さと略同一の長さの（図示しない）治具を光源１１の下に挿入し、治具の上に光源１１を載せてから治具を引き抜くことにより、光源１１を交換する。 When such an exposure operation is performed, since the light source 11 is a consumable item, it is necessary to replace the light source 11 at regular intervals. Since the light source 11 is thin and long, it is easily broken when touched by hand. Therefore, the light source 11 is replaced by inserting a jig (not shown) having a length substantially the same as the length of the light source 11 under the light source 11, placing the light source 11 on the jig and then pulling out the jig. To do.
　光源１１を交換する際には、回転駆動部３２により、回転軸３３を中心として筐体１４、すなわち偏光照射部１０を回転させる。図４は、偏光照射部１０を回転させた場合の一例を示す図である。図４では、偏光照射部１０を、露光時の位置から、ｚ軸を中心として時計回りに４５度回転させた状態を示す。装置枠６０の内部は、ステージガイドレール２２が配置されているところまで作業者が入ることができる。そのため、ロボット５０が設けられていない側（ここでは、－ｘ側）に光源１１を引き抜いて光源１１を交換する場合において、装置枠６０内部の領域の一部を、光源１１の交換メンテナンス用の交換スペースＡ１として使用し、交換スペースＡ１の装置枠６０外部の広さを狭くすることができる。したがって、光源１１の交換時に光源１１を回転させない場合と比べて、装置枠６０外部の他の装置等を配置することができない領域を狭くすることができる。その結果、露光装置１の近傍のスペースを有効活用することができる。 When the light source 11 is replaced, the casing 14, that is, the polarization irradiation unit 10 is rotated around the rotation shaft 33 by the rotation driving unit 32. FIG. 4 is a diagram illustrating an example when the polarized light irradiation unit 10 is rotated. FIG. 4 shows a state in which the polarized light irradiation unit 10 is rotated 45 degrees clockwise around the z axis from the position at the time of exposure. An operator can enter the inside of the apparatus frame 60 as far as the stage guide rail 22 is disposed. Therefore, when replacing the light source 11 by pulling out the light source 11 to the side where the robot 50 is not provided (here, the −x side), a part of the area inside the device frame 60 is used for replacement maintenance of the light source 11. It can be used as the exchange space A1, and the area outside the device frame 60 of the exchange space A1 can be reduced. Therefore, compared with the case where the light source 11 is not rotated when the light source 11 is replaced, the area where other devices outside the device frame 60 cannot be arranged can be narrowed. As a result, the space near the exposure apparatus 1 can be used effectively.
　図５は、偏光照射部１０を回転させた場合の他の例を示す図である。図５では、偏光照射部１０を、露光時の位置から、ｚ軸を中心として反時計回りに４５度回転させた状態を示す。図５においては、図４における偏光照射部１０の位置を点線で表示している。 FIG. 5 is a diagram showing another example when the polarized light irradiation unit 10 is rotated. FIG. 5 shows a state in which the polarized light irradiation unit 10 is rotated 45 degrees counterclockwise about the z axis from the position at the time of exposure. In FIG. 5, the position of the polarized light irradiation unit 10 in FIG. 4 is indicated by a dotted line.
　図４に示す場合と同様に、図５に示す場合においても、ロボット５０が設けられていない側に光源１１を引き抜いて光源１１を交換する場合において、装置枠６０内部の領域の一部を、光源１１の交換メンテナンス用の交換スペースＡ２として使用し、露光装置１の近傍のスペースを有効活用することができる。 As in the case shown in FIG. 4, even in the case shown in FIG. 5, when the light source 11 is pulled out to the side where the robot 50 is not provided and the light source 11 is replaced, a part of the area inside the device frame 60 is It can be used as a replacement space A2 for replacement maintenance of the light source 11, and the space near the exposure apparatus 1 can be effectively utilized.
　ただし、偏光照射部１０を反時計回りに４５度回転させた場合には、筐体１４と、２つのアライメントカメラ４１のうちの筐体１４側（－ｘ側）に設けられたアライメントカメラ４１とが当接してしまう。したがって、２つのアライメントカメラ４１のうちの筐体１４と干渉するアライメントカメラ４１を、レール４２に沿って移動させる。これにより、筐体１４とアライメントカメラ４１とが干渉せず、偏光照射部１０を回転させることができる。図１に示すように、レール４２の高さ（ｚ方向の位置）と、筐体１４の高さとは異なるため、レール４２と筐体１４とが干渉することはない。 However, when the polarized light irradiation unit 10 is rotated 45 degrees counterclockwise, the housing 14 and the alignment camera 41 provided on the housing 14 side (−x side) of the two alignment cameras 41 Will come into contact. Therefore, the alignment camera 41 that interferes with the housing 14 of the two alignment cameras 41 is moved along the rail 42. Thereby, the polarized light irradiation part 10 can be rotated without the housing | casing 14 and the alignment camera 41 interfering. As shown in FIG. 1, since the height (position in the z direction) of the rail 42 is different from the height of the housing 14, the rail 42 and the housing 14 do not interfere with each other.
　なお、本実施の形態では、レール４２を走査方向（ｘ方向）に沿って設けているが、筐体１４とアライメントカメラ４１とが干渉しない位置へアライメントカメラ４１を移動させることができるのであれば、レール４２をｘ方向に沿って設ける必要は無い。 In this embodiment, the rail 42 is provided along the scanning direction (x direction). However, as long as the alignment camera 41 can be moved to a position where the housing 14 and the alignment camera 41 do not interfere with each other. It is not necessary to provide the rail 42 along the x direction.
　図６は、偏光照射部１０を回転させた場合の他の例を示す図である。図５では、偏光照射部１０を、露光時の位置から、ｚ軸を中心と９０度回転させた状態を示す。図６においては、図４及び図５における偏光照射部１０の位置を点線で表示している。 FIG. 6 is a diagram showing another example when the polarized light irradiation unit 10 is rotated. FIG. 5 shows a state in which the polarized light irradiation unit 10 is rotated 90 degrees around the z axis from the position at the time of exposure. In FIG. 6, the position of the polarized light irradiation unit 10 in FIGS. 4 and 5 is indicated by a dotted line.
　図４、５に示す場合と同様に、図６に示す場合においても、装置枠６０内部の領域の一部を、光源１１の交換メンテナンス用の交換スペースＡ３として使用し、露光装置１の近傍のスペースを有効活用することができる。 Similar to the cases shown in FIGS. 4 and 5, also in the case shown in FIG. 6, a part of the area inside the apparatus frame 60 is used as the exchange space A <b> 3 for the replacement maintenance of the light source 11, and the vicinity of the exposure apparatus 1. Space can be used effectively.
　ただし、図５に示す場合と同様に、偏光照射部１０を９０度回転させた場合にも、筐体１４と、２つのアライメントカメラ４１のうちの筐体１４側に設けられたアライメントカメラ４１とが当接してしまう。したがって、２つのアライメントカメラ４１のうちの筐体１４と干渉するアライメントカメラ４１を、レール４２に沿って移動させる。 However, as in the case shown in FIG. 5, even when the polarized light irradiation unit 10 is rotated 90 degrees, the housing 14 and the alignment camera 41 provided on the housing 14 side of the two alignment cameras 41 Will come into contact. Therefore, the alignment camera 41 that interferes with the housing 14 of the two alignment cameras 41 is moved along the rail 42.
　なお、偏光照射部１０の回転角度は図４～６に示す場合に限定されない。ロボット５０が設けられていない側に光源１１を引く抜くことができ、かつ光源１１の交換メンテナンス用の領域のうちの装置枠６０外部の広さを狭くできるのであれば、様々な回転角度を採用することができる。本実施の形態では、図６に示すように、偏光照射部１０の回転角度θ１が４５度～１３５度（時計回り、反時計回り共に）の範囲内であれば、ロボット５０が設けられていない側に光源１１を引く抜くことができ、かつ光源１１の交換メンテナンス用の領域のうちの装置枠６０外部の広さを狭くすることができる。 It should be noted that the rotation angle of the polarized light irradiation unit 10 is not limited to the cases shown in FIGS. If the light source 11 can be pulled out to the side where the robot 50 is not provided and the area outside the device frame 60 in the replacement maintenance area of the light source 11 can be reduced, various rotation angles are adopted. can do. In the present embodiment, as shown in FIG. 6, the robot 50 is not provided if the rotation angle θ1 of the polarized light irradiation unit 10 is within a range of 45 degrees to 135 degrees (both clockwise and counterclockwise). The light source 11 can be pulled out to the side, and the area outside the device frame 60 in the replacement maintenance area of the light source 11 can be reduced.
　本実施の形態によれば、光源１１の交換時に偏光照射部１０を回転させることで、光源１１の交換に必要な装置外のスペースを狭くすることができる。また、アライメントカメラ４１を移動させることで、偏光照射部１０の回転に関する設計自由度を高くすることができる。 According to the present embodiment, by rotating the polarized light irradiation unit 10 when the light source 11 is replaced, the space outside the apparatus necessary for replacing the light source 11 can be reduced. Further, by moving the alignment camera 41, the degree of freedom in design regarding the rotation of the polarized light irradiation unit 10 can be increased.
　＜第２の実施の形態＞
　第１の実施の形態では、装置枠のｘ方向の一端に隣接してロボットが設けられていたが、ロボットが設けられる位置等はこれに限られない。 <Second Embodiment>
In the first embodiment, the robot is provided adjacent to one end of the device frame in the x direction. However, the position where the robot is provided is not limited thereto.
　第２の実施の形態は、装置枠のｙ方向の一端に隣接してロボットを設ける形態である。以下、第２の実施の形態に係る露光装置２について説明する。なお、第１の実施の形態に係る露光装置１と同一の部分については、同一の符号を付し、説明を省略する。 In the second embodiment, a robot is provided adjacent to one end of the device frame in the y direction. The exposure apparatus 2 according to the second embodiment will be described below. The same parts as those of the exposure apparatus 1 according to the first embodiment are denoted by the same reference numerals and description thereof is omitted.
　図７は、露光装置２の概略を示す平面図である。露光装置２は、２台のロボット５０を有する。ロボット５０は、装置枠６０の＋ｙ側の端に隣接して設けられる。ロボット５０は、ステージ２１が＋ｘ方向の端に位置する時に被露光対象物Ｗをステージ２１へ移動させたり、被露光対象物Ｗをステージ２１へ移動させたりできる位置、及びステージ２１が－ｘ方向の端に位置する時に被露光対象物Ｗをステージ２１へ移動させたり、被露光対象物Ｗをステージ２１から移動させたりできる位置の２箇所に設けられる。 FIG. 7 is a plan view showing an outline of the exposure apparatus 2. The exposure apparatus 2 has two robots 50. The robot 50 is provided adjacent to the + y side end of the device frame 60. The robot 50 can move the object to be exposed W to the stage 21 when the stage 21 is positioned at the end in the + x direction, or can move the object W to be exposed to the stage 21, and the stage 21 can be moved in the −x direction. The object to be exposed W is provided at two positions where the object to be exposed W can be moved to the stage 21 and the object to be exposed W can be moved from the stage 21 when it is located at the end of the stage.
　露光装置２は、２組の撮像部４０を有する。撮像部４０は、ステージ２１が＋ｘ方向の端に位置する時に被露光対象物Ｗをアライメント可能な位置、及びステージ２１が－ｘ方向の端に位置する時に被露光対象物Ｗをアライメント可能な位置の２箇所に設けられる。 The exposure apparatus 2 has two sets of imaging units 40. The imaging unit 40 can align the object to be exposed W when the stage 21 is positioned at the end in the + x direction, and can position the object W to be aligned when the stage 21 is positioned at the end in the −x direction. Are provided at two locations.
　図８、９は、偏光照射部１０を回転させた場合の一例を示す図である。図８では、偏光照射部１０を、露光時の位置から、ｚ軸を中心として反時計回りに４５度回転させた状態を示す。図９では、偏光照射部１０を、露光時の位置から、ｚ軸を中心として時計回りに４５度回転させた状態を示す。図９においては、図８における偏光照射部１０の位置を点線で表示している。 8 and 9 are diagrams illustrating an example of the case where the polarized light irradiation unit 10 is rotated. FIG. 8 shows a state in which the polarized light irradiation unit 10 is rotated 45 degrees counterclockwise about the z axis from the position at the time of exposure. FIG. 9 shows a state in which the polarized light irradiation unit 10 is rotated 45 degrees clockwise around the z axis from the position at the time of exposure. In FIG. 9, the position of the polarized light irradiation unit 10 in FIG. 8 is indicated by a dotted line.
　ロボット５０が設けられていない側（ここでは、－ｙ側）に光源１１を引き抜いて光源１１を交換する場合において、装置枠６０内部の領域の一部を、光源１１の交換メンテナンス用の交換スペースＡ４、Ａ５として使用し、露光装置２の近傍のスペースを有効活用することができる。 When replacing the light source 11 by pulling out the light source 11 to the side where the robot 50 is not provided (here, the -y side), a part of the area inside the device frame 60 is replaced with a replacement space for replacement maintenance of the light source 11. It can be used as A4 and A5, and the space near the exposure apparatus 2 can be used effectively.
　このとき、偏光照射部１０の回転時に筐体１４と干渉してしまうアライメントカメラ４１を、レール４２に沿って移動させることで、偏光照射部１０を回転させることができる。 At this time, the polarized light irradiation unit 10 can be rotated by moving the alignment camera 41 that interferes with the housing 14 when the polarized light irradiation unit 10 rotates along the rails 42.
　図１０は、偏光照射部１０を回転させた場合の他の例を示す図である。図１０では、偏光照射部１０を、露光時の位置から、ｚ軸を中心として９０度回転させた状態を示す。図１０においては、図８、９における偏光照射部１０の位置を点線で表示している。 FIG. 10 is a diagram showing another example when the polarized light irradiation unit 10 is rotated. FIG. 10 shows a state in which the polarized light irradiation unit 10 is rotated 90 degrees around the z axis from the position at the time of exposure. In FIG. 10, the position of the polarized light irradiation unit 10 in FIGS. 8 and 9 is indicated by a dotted line.
　偏光照射部１０を９０度回転させた場合には、偏光照射部１０とロボット５０とは平行である。すなわち、±ｘ方向のどちらもロボット５０が設けられていない側であり、光源１１は＋ｘ方向、－ｘ方向のどちらからも引き抜くことができる。光源１１を－ｘ方向に引き抜くときの交換メンテナンス用の領域は交換スペースＡ６とし、光源１１を＋ｘ方向に引き抜くときの交換メンテナンス用の領域は交換スペースＡ７とする。なお、図１０には交換スペースＡ６、Ａ７の両方が実線で示されているが、交換スペースＡ６、Ａ７はどちらか一方でよい。 When the polarized light irradiation unit 10 is rotated 90 degrees, the polarized light irradiation unit 10 and the robot 50 are parallel. That is, neither the ± x direction is the side where the robot 50 is provided, and the light source 11 can be extracted from both the + x direction and the −x direction. The replacement maintenance area when the light source 11 is pulled out in the -x direction is the replacement space A6, and the replacement maintenance area when the light source 11 is pulled out in the + x direction is the replacement space A7. In FIG. 10, both replacement spaces A6 and A7 are indicated by solid lines, but either one of the replacement spaces A6 and A7 may be used.
　この場合においても、装置枠６０内部の領域の一部を、交換スペースＡ６、Ａ７として使用し、露光装置２の近傍のスペースを有効活用することができる。 Also in this case, a part of the area inside the apparatus frame 60 can be used as the exchange spaces A6 and A7, and the space near the exposure apparatus 2 can be effectively used.
　ただし、図８、９に示す場合と同様に、偏光照射部１０を９０度回転させた場合にも、筐体１４と、アライメントカメラ４１とが当接してしまう。したがって、筐体１４と干渉するアライメントカメラ４１を、レール４２に沿って移動させて、筐体１４がアライメントカメラ４１と干渉せずに回転できるようにする。　 However, as in the case shown in FIGS. 8 and 9, the housing 14 and the alignment camera 41 come into contact with each other when the polarized light irradiation unit 10 is rotated 90 degrees. Therefore, the alignment camera 41 that interferes with the casing 14 is moved along the rail 42 so that the casing 14 can rotate without interfering with the alignment camera 41. *
　なお、偏光照射部１０の回転角度は図８～１０に示す場合に限定されない。第１の実施の形態と同様に、ロボット５０が設けられていない側に光源１１を引く抜くことができ、かつ光源１１の交換メンテナンス用の領域のうちの装置枠６０外部の広さを狭くできるのであれば、様々な回転角度を採用することができる。本実施の形態では、図１０に示すように、偏光照射部１０の回転角度θ２が反時計回りに４５度～９０度の範囲内、又は偏光照射部１０の回転角度θ３が時計回りに４５度～９０度の範囲内であれば、ロボット５０が設けられていない側に光源１１を引く抜くことができ、かつ光源１１の交換メンテナンス用の領域のうちの装置枠６０外部の広さを狭くすることができる。 It should be noted that the rotation angle of the polarized light irradiation unit 10 is not limited to the case shown in FIGS. Similar to the first embodiment, the light source 11 can be pulled out to the side where the robot 50 is not provided, and the area outside the device frame 60 in the replacement maintenance area of the light source 11 can be reduced. If so, various rotation angles can be adopted. In the present embodiment, as shown in FIG. 10, the rotation angle θ2 of the polarized light irradiation unit 10 is in the range of 45 to 90 degrees counterclockwise, or the rotation angle θ3 of the polarized light irradiation unit 10 is 45 degrees clockwise. If the angle is within the range of ˜90 degrees, the light source 11 can be pulled out to the side where the robot 50 is not provided, and the area outside the device frame 60 in the replacement maintenance area of the light source 11 is reduced. be able to.
　本実施の形態によれば、光源１１の交換時に偏光照射部１０を回転させることで、光源１１の交換に必要な装置外のスペースを狭くすることができる。また、アライメントカメラ４１を移動させることで、偏光照射部１０の回転に関する設計自由度を高くすることができる。 According to the present embodiment, by rotating the polarized light irradiation unit 10 when the light source 11 is replaced, the space outside the apparatus necessary for replacing the light source 11 can be reduced. Further, by moving the alignment camera 41, the degree of freedom in design regarding the rotation of the polarized light irradiation unit 10 can be increased.
　＜第３の実施の形態＞
　第１の実施の形態及び第２の実施の形態では、偏光照射部１０の回転軸３３は、門型保持部３１の天面部３１ａの略中央に設けられていたが、回転軸３３の位置はこれに限られない。 <Third Embodiment>
In the first embodiment and the second embodiment, the rotation shaft 33 of the polarized light irradiation unit 10 is provided at the approximate center of the top surface portion 31a of the gate-shaped holding unit 31, but the position of the rotation shaft 33 is It is not limited to this.
　第２の実施の形態は、回転軸３３を天面部３１ａの長手方向の端近傍に設ける形態である。以下、第３の実施の形態に係る露光装置３について説明する。露光装置３と露光装置１との差異は、回転軸の位置のみであるため、第１の実施の形態に係る露光装置１と同一の部分については、同一の符号を付し、説明を省略する。 In the second embodiment, the rotary shaft 33 is provided in the vicinity of the end in the longitudinal direction of the top surface portion 31a. The exposure apparatus 3 according to the third embodiment will be described below. Since the difference between the exposure apparatus 3 and the exposure apparatus 1 is only the position of the rotation axis, the same parts as those in the exposure apparatus 1 according to the first embodiment are denoted by the same reference numerals and description thereof is omitted. .
　図１１は、露光装置３の概略を示す平面図である。露光装置３の保持部３０Ａにおいては、回転軸３３は、天面部３１ａの長手方向の両端（図１１においては、－ｙ方向及び＋ｙ方向の端）近傍に設けられる。 FIG. 11 is a plan view showing an outline of the exposure apparatus 3. In the holding unit 30A of the exposure apparatus 3, the rotation shaft 33 is provided in the vicinity of both ends in the longitudinal direction of the top surface portion 31a (ends in the −y direction and the + y direction in FIG. 11).
　図１１は、偏光照射部１０を、露光時の位置から反時計回りに９０度回転させた場合を示す。回転軸３３が－ｙ方向の端近傍に設けられている場合には、偏光照射部１０を時計回りに９０度回転させ、回転軸３３が＋ｙ方向の端近傍に設けられている場合には、偏光照射部１０を反時計回りに９０度回転させる。これにより、筐体１４と、アライメントカメラ４１とが当接することなく、偏光照射部１０を回転させることができる。 FIG. 11 shows a case where the polarized light irradiation unit 10 is rotated 90 degrees counterclockwise from the position at the time of exposure. When the rotating shaft 33 is provided near the end in the −y direction, the polarized light irradiation unit 10 is rotated 90 degrees clockwise, and when the rotating shaft 33 is provided near the end in the + y direction, The polarized light irradiation unit 10 is rotated 90 degrees counterclockwise. Thereby, the polarized light irradiation unit 10 can be rotated without the housing 14 and the alignment camera 41 coming into contact with each other.
　露光装置３では、ロボット５０が装置枠６０の＋ｘ側の端に隣接して設けられているため、偏光照射部１０を９０度回転させてから、光源１１を－ｘ方向に引き抜く。この場合にも、装置枠６０内部の領域の一部を、露光装置３の近傍のスペースを有効活用することができる。 In the exposure apparatus 3, since the robot 50 is provided adjacent to the + x side end of the apparatus frame 60, the polarized light irradiation unit 10 is rotated 90 degrees, and then the light source 11 is pulled out in the −x direction. Also in this case, the space in the vicinity of the exposure apparatus 3 can be effectively used for a part of the area inside the apparatus frame 60.
　本実施の形態によれば、回転駆動部３２（回転軸３３）の位置を偏光照射部１０の略中央に限定しないことで、偏光照射部１０の回転に関する設計自由度を高くすることができる。 According to the present embodiment, the position of the rotation driving unit 32 (rotating shaft 33) is not limited to the approximate center of the polarized light irradiation unit 10, so that the degree of freedom in designing the rotation of the polarized light irradiation unit 10 can be increased.
　なお、図１１においては、回転軸３３が天面部３１ａの－ｙ方向の端近傍、及び＋ｙ方向の端近傍の２箇所に設けられたが、回転軸３３は－ｙ方向の端近傍、及び＋ｙ方向の端近傍のいずれか一方でよい。また、図１１には、レール４２が図示されているが、レール４２は必須ではない。 In FIG. 11, the rotating shaft 33 is provided at two locations near the end in the −y direction of the top surface portion 31a and near the end in the + y direction, but the rotating shaft 33 is near the end in the −y direction and + y Either one near the end of the direction may be used. Moreover, although the rail 42 is illustrated in FIG. 11, the rail 42 is not essential.
　また、偏光照射部１０の回転角度は９０度に限定されない。第１、２の実施の形態と同様に、ロボット５０が設けられていない側に光源１１を引く抜くことができ、かつ光源１１の交換メンテナンス用の領域のうちの装置枠６０外部の広さを狭くできるのであれば、様々な回転角度を採用することができる。本実施の形態では、偏光照射部１０の回転角度が０～９０度の範囲内であれば、ロボット５０が設けられていない側に光源１１を引く抜くことができ、かつ光源１１の交換メンテナンス用の領域のうちの装置枠６０外部の広さを狭くすることができる。 Further, the rotation angle of the polarized light irradiation unit 10 is not limited to 90 degrees. Similarly to the first and second embodiments, the light source 11 can be pulled out to the side where the robot 50 is not provided, and the area outside the device frame 60 in the replacement maintenance area of the light source 11 can be increased. If it can be narrowed, various rotation angles can be adopted. In the present embodiment, as long as the rotation angle of the polarized light irradiation unit 10 is in the range of 0 to 90 degrees, the light source 11 can be pulled out to the side where the robot 50 is not provided, and for replacement maintenance of the light source 11. In this area, the area outside the device frame 60 can be reduced.
　＜第４の実施の形態＞
　第１の実施の形態及び第２の実施の形態では、偏光照射部１０の回転軸３３は、門型保持部３１の天面部３１ａの略中央に設けられていたが、回転軸３３の位置はこれに限られない。 <Fourth embodiment>
In the first embodiment and the second embodiment, the rotation shaft 33 of the polarized light irradiation unit 10 is provided at the approximate center of the top surface portion 31a of the gate-shaped holding unit 31, but the position of the rotation shaft 33 is It is not limited to this.
　第２の実施の形態は、回転軸３３を移動可能に設ける形態である。以下、第４の実施の形態に係る露光装置４について説明する。露光装置４と露光装置１との差異は、回転軸が移動できるか否かのみであるため、第１の実施の形態に係る露光装置１と同一の部分については、同一の符号を付し、説明を省略する。 In the second embodiment, the rotary shaft 33 is movably provided. The exposure apparatus 4 according to the fourth embodiment will be described below. Since the difference between the exposure apparatus 4 and the exposure apparatus 1 is only whether or not the rotation axis can be moved, the same parts as those in the exposure apparatus 1 according to the first embodiment are denoted by the same reference numerals, Description is omitted.
　図１２は、露光装置４の概略を示す平面図である。保持部３０Ｂは、主として、門型保持部３１と、回転駆動部３２とに加えて、回転駆動部３２を天面部３１ａの長手方向（ｙ方向）に沿って移動させる軸移動部を有する。 FIG. 12 is a plan view showing an outline of the exposure apparatus 4. The holding unit 30B mainly has an axis moving unit that moves the rotation driving unit 32 along the longitudinal direction (y direction) of the top surface portion 31a in addition to the gate-type holding unit 31 and the rotation driving unit 32.
　軸移動部は、天面部３１ａの下側（－ｚ側）に天面部３１ａの長手方向（ｙ方向）に沿って設けられたレール３４と、レール３４に沿って回転駆動部３２を移動させる図示しない駆動部と、を有する。駆動部は、アクチュエータ等の駆動源と、駆動源を制御する制御部と、を有する。駆動部の制御等は、すでに公知の様々な方法を用いることができるため、詳細な説明を省略する。 The shaft moving unit moves a rail 34 provided along the longitudinal direction (y direction) of the top surface portion 31a to the lower side (−z side) of the top surface portion 31a, and the rotary drive unit 32 moves along the rail 34. And a drive unit that does not. The drive unit includes a drive source such as an actuator and a control unit that controls the drive source. For the control of the drive unit and the like, various known methods can be used, and detailed description thereof is omitted.
　図１２は、偏光照射部１０を露光時の位置から９０度回転させ、回転駆動部３２をレール３４に沿って－ｙ方向に移動させた場合を示す。偏光照射部１０の回転と、回転駆動部３２の移動との順序は任意である。また、レール４２は必須ではない。 FIG. 12 shows a case where the polarized light irradiation unit 10 is rotated 90 degrees from the position at the time of exposure, and the rotation driving unit 32 is moved along the rail 34 in the −y direction. The order of the rotation of the polarized light irradiation unit 10 and the movement of the rotation driving unit 32 is arbitrary. Moreover, the rail 42 is not essential.
　露光装置４においては、回転軸３３が筐体１４の長手方向略中央に位置するため、回転軸３３が筐体１４の端部近傍に位置する露光装置３に対して、偏光照射部１０を回転させた後で光源１１を引き抜くときの光源１１の交換メンテナンス用の交換スペースＡ１０のうちの装置枠６０内部の領域を広くすることができる。 In the exposure apparatus 4, since the rotation shaft 33 is positioned approximately at the center in the longitudinal direction of the casing 14, the polarization irradiation unit 10 is rotated with respect to the exposure apparatus 3 in which the rotation shaft 33 is positioned near the end of the casing 14. Then, the area inside the device frame 60 in the replacement space A10 for replacement maintenance of the light source 11 when the light source 11 is pulled out can be widened.
　なお、偏光照射部１０の回転角度は９０度に限定されない。第１～３の実施の形態と同様に、ロボット５０が設けられていない側に光源１１を引く抜くことができ、かつ光源１１の交換メンテナンス用の領域のうちの装置枠６０外部の広さを狭くできるのであれば、様々な回転角度を採用することができる。本実施の形態では、回転駆動部３２の位置に応じて、０～９０度の範囲内の様々な角度とすることができる。 In addition, the rotation angle of the polarized light irradiation unit 10 is not limited to 90 degrees. Similar to the first to third embodiments, the light source 11 can be pulled out to the side where the robot 50 is not provided, and the area outside the device frame 60 in the replacement maintenance area of the light source 11 can be increased. If it can be narrowed, various rotation angles can be adopted. In the present embodiment, various angles within the range of 0 to 90 degrees can be set according to the position of the rotation drive unit 32.
　本実施の形態によれば、回転駆動部３２（回転軸３３）を移動可能とすることで、偏光照射部１０の回転に関する設計自由度を高くすることができる。 According to the present embodiment, the degree of freedom in designing the rotation of the polarized light irradiation unit 10 can be increased by making the rotation drive unit 32 (rotating shaft 33) movable.
　以上、この発明の実施形態を、図面を参照して詳述してきたが、具体的な構成はこの実施形態に限られるものではなく、この発明の要旨を逸脱しない範囲の設計変更等も含まれる。 The embodiment of the present invention has been described in detail with reference to the drawings. However, the specific configuration is not limited to this embodiment, and design changes and the like within a scope not departing from the gist of the present invention are included. .
　また、本発明において、「略」とは、厳密に同一である場合のみでなく、同一性を失わない程度の誤差や変形を含む概念である。例えば、略中央とは、厳密に中央の場合には限られない。また、例えば、単に平行、直交等と表現する場合において、厳密に平行、直交等の場合のみでなく、略平行、略直交等の場合を含むものとする。また、本発明において「近傍」とは、例えばＡの近傍であるときに、Ａの近くであって、Ａを含んでもいても含んでいなくてもよいことを示す概念である。 Further, in the present invention, “substantially” is a concept that includes not only a case where they are exactly the same but also errors and deformations that do not lose the identity. For example, the approximate center is not limited to the exact center. Further, for example, when simply expressing as parallel, orthogonal, etc., not only strictly parallel, orthogonal, etc. but also cases of substantially parallel, substantially orthogonal, etc. are included. Further, in the present invention, the “neighborhood” is a concept indicating that when it is in the vicinity of A, for example, it is near A and may or may not include A.
１、２、３、４　　　：露光装置
１０　　　　　　　　：偏光照射部
１１　　　　　　　　：光源
１２　　　　　　　　：光学部材
１３　　　　　　　　：ミラー
１４　　　　　　　　：筐体
２０　　　　　　　　：駆動部
２１　　　　　　　　：ステージ
２２　　　　　　　　：ステージガイドレール
２３　　　　　　　　：ステージスキャン軸
３０、３０Ａ、３０Ｂ：保持部
３１　　　　　　　　：門型保持部
３１ａ　　　　　　　：天面部
３１ｂ　　　　　　　：柱
３２　　　　　　　　：回転駆動部
３３　　　　　　　　：回転軸
３４　　　　　　　　：レール
４０　　　　　　　　：撮像部
４１　　　　　　　　：アライメントカメラ
４２　　　　　　　　：レール
５０　　　　　　　　：ロボット
６０　　　　　　　　：装置枠
１００　　　　　　　：露光装置
１０１　　　　　　　：光源
１０２　　　　　　　：光源用筐体
１０３　　　　　　　：偏光膜
１０４　　　　　　　：ステージ
１０５　　　　　　　：カメラ
１０６　　　　　　　：装置枠
Ｗ　　　　　　　　　：被露光対象物 1, 2, 3, 4: Exposure apparatus 10: Polarized light irradiation unit 11: Light source 12: Optical member 13: Mirror 14: Housing 20: Drive unit 21: Stage 22: Stage guide rail 23: Stage scan axes 30, 30A 30B: Holding part 31: Gate-type holding part 31a: Top surface part 31b: Pillar 32: Rotation driving part 33: Rotating shaft 34: Rail 40: Imaging part 41: Alignment camera 42: Rail 50: Robot 60: Apparatus frame 100: Exposure Device 101: Light source 102: Light source casing 103: Polarizing film 104: Stage 105: Camera 106: Device frame W: Object to be exposed

Claims (6)

  1. 　露光対象物が載置されるステージと、
    　棒状の光源が着脱可能に設けられた光照射部であって、前記ステージの上方に設けられた光照射部と、
    　露光時には、前記光源の長手方向が前記露光対象物の走査方向と直交するように前記光照射部を配置し、前記光源を交換するときには、前記光照射部を前記露光時の位置から略４５度以上回転させる光源保持部と、
    　を備えたことを特徴とする露光装置。     A stage on which an object to be exposed is placed;
    A light irradiation unit provided with a detachable rod-shaped light source, the light irradiation unit provided above the stage;
    At the time of exposure, the light irradiation unit is arranged so that the longitudinal direction of the light source is orthogonal to the scanning direction of the exposure object, and when the light source is replaced, the light irradiation unit is approximately 45 degrees from the position at the time of exposure. A light source holding part that rotates above,
    An exposure apparatus comprising:
  2. 　前記ステージは、前記走査方向に沿って第１の位置から第２の位置へ移動可能であり、
    　前記ステージが前記第１の位置又は前記第２の位置に位置する場合において、前記露光対象物を前記ステージへ又は前記ステージから移動させる移動手段を備え、
    　前記光照射部は、前記光源を交換するときに、前記光源を前記移動手段が設けられていない側に引き抜くことができるように、前記光源を保持する
    　ことを特徴とする請求項１に記載の露光装置。     The stage is movable from a first position to a second position along the scanning direction;
    In the case where the stage is located at the first position or the second position, a moving means for moving the exposure object to or from the stage,
    The said light irradiation part hold | maintains the said light source so that when the said light source is replaced | exchanged, the said light source can be pulled out to the side in which the said movement means is not provided. Exposure device.
  3. 　前記ステージの上方に設けられた撮像部と、
    　前記撮像部を移動させるレールであって、前記光照射部が回転するときに前記光照射部と前記撮像部とが干渉しない位置まで前記撮像部を移動可能なレールと、
    　を備えたことを特徴とする請求項１又は２に記載の露光装置。     An imaging unit provided above the stage;
    A rail for moving the imaging unit, the rail capable of moving the imaging unit to a position where the light irradiation unit and the imaging unit do not interfere when the light irradiation unit rotates;
    The exposure apparatus according to claim 1, further comprising:
  4. 　前記光源保持部は、前記光照射部を回転させるための回転軸が、前記光照射部の略中央に設けられる
    　ことを特徴とする請求項１から３のいずれか１項に記載の露光装置。     4. The exposure apparatus according to claim 1, wherein the light source holding unit is provided with a rotation axis for rotating the light irradiation unit at a substantially center of the light irradiation unit. 5.
  5. 　前記光源保持部は、前記光照射部を回転させるための回転軸が、前記光照射部の長手方向の端部近傍に設けられる
    　ことを特徴とする請求項１から３のいずれか１項に記載の露光装置。     4. The light source holding unit according to claim 1, wherein a rotation axis for rotating the light irradiation unit is provided in the vicinity of an end in a longitudinal direction of the light irradiation unit. 5. Exposure equipment.
  6. 　前記光源保持部は、前記光照射部を回転させるための回転軸と、前記回転軸を前記走査方向と直交する方向へ移動させる回転軸移動部と、を有する
    　ことを特徴とする請求項１から３のいずれか１項に記載の露光装置。
          The said light source holding part has the rotating shaft for rotating the said light irradiation part, and the rotating shaft moving part which moves the said rotating shaft to the direction orthogonal to the said scanning direction from Claim 1 characterized by the above-mentioned. 4. The exposure apparatus according to any one of items 3.
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JP6870391B2 (en) * 2017-03-06 2021-05-12 ウシオ電機株式会社 Light irradiation device

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JP2006133498A (en) * 2004-11-05 2006-05-25 Ushio Inc Polarized light irradiation device for optical orientation
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JP2002367874A (en) * 2001-06-05 2002-12-20 Ushio Inc Ultraviolet irradiation apparatus, and irradiation unit for the ultraviolet irradiation apparatus
JP2006133498A (en) * 2004-11-05 2006-05-25 Ushio Inc Polarized light irradiation device for optical orientation
JP2013182085A (en) * 2012-02-29 2013-09-12 V Technology Co Ltd Polarization exposure device
JP2014013277A (en) * 2012-07-03 2014-01-23 V Technology Co Ltd Exposure equipment

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