KR102470120B1 - 가스 인클로저 시스템 및 보조 인클로저를 이용하는 방법 - Google Patents

가스 인클로저 시스템 및 보조 인클로저를 이용하는 방법 Download PDF

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Publication number
KR102470120B1
KR102470120B1 KR1020217018547A KR20217018547A KR102470120B1 KR 102470120 B1 KR102470120 B1 KR 102470120B1 KR 1020217018547 A KR1020217018547 A KR 1020217018547A KR 20217018547 A KR20217018547 A KR 20217018547A KR 102470120 B1 KR102470120 B1 KR 102470120B1
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South Korea
Prior art keywords
enclosure
assembly
gas
printhead
various embodiments
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
KR1020217018547A
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English (en)
Korean (ko)
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KR20210077007A (ko
Inventor
저스틴 마욱
알렉산더 소우-캉 코
에리야후 브론스키
샨돈 알더슨
Original Assignee
카티바, 인크.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Priority claimed from US13/802,304 external-priority patent/US9048344B2/en
Application filed by 카티바, 인크. filed Critical 카티바, 인크.
Priority to KR1020227040440A priority Critical patent/KR20220162809A/ko
Publication of KR20210077007A publication Critical patent/KR20210077007A/ko
Application granted granted Critical
Publication of KR102470120B1 publication Critical patent/KR102470120B1/ko
Assigned to 시노 신 지 리미티드 reassignment 시노 신 지 리미티드 질권설정등록 Assignors: 카티바, 인크.
Assigned to 에이치비솔루션㈜, 카티바 케이맨 홀딩, 인크. reassignment 에이치비솔루션㈜ 질권설정등록 Assignors: 카티바, 인크.
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H01L51/56—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0451—Apparatus for manufacturing or treating in a plurality of work-stations
    • H10P72/0462—Apparatus for manufacturing or treating in a plurality of work-stations characterised by the construction of the processing chambers, e.g. modular processing chambers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/17—Ink jet characterised by ink handling
    • B41J2/175—Ink supply systems ; Circuit parts therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J29/00—Details of, or accessories for, typewriters or selective printing mechanisms not otherwise provided for
    • B41J29/02—Framework
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J29/00—Details of, or accessories for, typewriters or selective printing mechanisms not otherwise provided for
    • B41J29/12—Guards, shields or dust excluders
    • B41J29/13—Cases or covers
    • H01L21/54—
    • H01L21/6719—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W76/00—Containers; Fillings or auxiliary members therefor; Seals
    • H10W76/01—Manufacture or treatment
    • H10W76/05—Providing fillings in containers, e.g. gas filling

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)
  • Coating Apparatus (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Facsimiles In General (AREA)
KR1020217018547A 2013-03-13 2014-03-11 가스 인클로저 시스템 및 보조 인클로저를 이용하는 방법 Active KR102470120B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020227040440A KR20220162809A (ko) 2013-03-13 2014-03-11 가스 인클로저 시스템 및 보조 인클로저를 이용하는 방법

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US13/802,304 2013-03-13
US13/802,304 US9048344B2 (en) 2008-06-13 2013-03-13 Gas enclosure assembly and system
KR1020207009581A KR102267858B1 (ko) 2013-03-13 2014-03-11 가스 인클로저 시스템 및 보조 인클로저를 이용하는 방법
PCT/US2014/023820 WO2014164932A2 (en) 2013-03-13 2014-03-11 Gas enclosure systems and methods utilizing an auxiliary enclosure

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020207009581A Division KR102267858B1 (ko) 2013-03-13 2014-03-11 가스 인클로저 시스템 및 보조 인클로저를 이용하는 방법

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020227040440A Division KR20220162809A (ko) 2013-03-13 2014-03-11 가스 인클로저 시스템 및 보조 인클로저를 이용하는 방법

Publications (2)

Publication Number Publication Date
KR20210077007A KR20210077007A (ko) 2021-06-24
KR102470120B1 true KR102470120B1 (ko) 2022-11-22

Family

ID=51659308

Family Applications (6)

Application Number Title Priority Date Filing Date
KR1020217018547A Active KR102470120B1 (ko) 2013-03-13 2014-03-11 가스 인클로저 시스템 및 보조 인클로저를 이용하는 방법
KR1020157027963A Active KR101903226B1 (ko) 2013-03-13 2014-03-11 가스 인클로저 시스템 및 보조 인클로저를 이용하는 방법
KR1020187027231A Active KR102098613B1 (ko) 2013-03-13 2014-03-11 가스 인클로저 시스템 및 보조 인클로저를 이용하는 방법
KR1020207009581A Active KR102267858B1 (ko) 2013-03-13 2014-03-11 가스 인클로저 시스템 및 보조 인클로저를 이용하는 방법
KR1020227040440A Ceased KR20220162809A (ko) 2013-03-13 2014-03-11 가스 인클로저 시스템 및 보조 인클로저를 이용하는 방법
KR1020247031651A Active KR102851236B1 (ko) 2013-03-13 2014-03-11 가스 인클로저 시스템 및 보조 인클로저를 이용하는 방법

Family Applications After (5)

Application Number Title Priority Date Filing Date
KR1020157027963A Active KR101903226B1 (ko) 2013-03-13 2014-03-11 가스 인클로저 시스템 및 보조 인클로저를 이용하는 방법
KR1020187027231A Active KR102098613B1 (ko) 2013-03-13 2014-03-11 가스 인클로저 시스템 및 보조 인클로저를 이용하는 방법
KR1020207009581A Active KR102267858B1 (ko) 2013-03-13 2014-03-11 가스 인클로저 시스템 및 보조 인클로저를 이용하는 방법
KR1020227040440A Ceased KR20220162809A (ko) 2013-03-13 2014-03-11 가스 인클로저 시스템 및 보조 인클로저를 이용하는 방법
KR1020247031651A Active KR102851236B1 (ko) 2013-03-13 2014-03-11 가스 인클로저 시스템 및 보조 인클로저를 이용하는 방법

Country Status (5)

Country Link
EP (2) EP2973676B1 (enExample)
JP (5) JP6349382B2 (enExample)
KR (6) KR102470120B1 (enExample)
CN (2) CN105190860B (enExample)
WO (1) WO2014164932A2 (enExample)

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US9048344B2 (en) 2008-06-13 2015-06-02 Kateeva, Inc. Gas enclosure assembly and system
US9604245B2 (en) 2008-06-13 2017-03-28 Kateeva, Inc. Gas enclosure systems and methods utilizing an auxiliary enclosure
US12018857B2 (en) 2008-06-13 2024-06-25 Kateeva, Inc. Gas enclosure assembly and system
US10434804B2 (en) 2008-06-13 2019-10-08 Kateeva, Inc. Low particle gas enclosure systems and methods
US10442226B2 (en) 2008-06-13 2019-10-15 Kateeva, Inc. Gas enclosure assembly and system
US11975546B2 (en) 2008-06-13 2024-05-07 Kateeva, Inc. Gas enclosure assembly and system
US8383202B2 (en) 2008-06-13 2013-02-26 Kateeva, Inc. Method and apparatus for load-locked printing
US12064979B2 (en) 2008-06-13 2024-08-20 Kateeva, Inc. Low-particle gas enclosure systems and methods
US8899171B2 (en) 2008-06-13 2014-12-02 Kateeva, Inc. Gas enclosure assembly and system
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JP7178937B2 (ja) * 2019-03-20 2022-11-28 ローランドディー．ジー．株式会社 プリンタ
CN111038108B (zh) * 2019-12-10 2021-11-23 Tcl华星光电技术有限公司 喷墨打印用墨盒的存储装置及其存储方法
JP7555022B2 (ja) * 2020-05-19 2024-09-24 パナソニックＩｐマネジメント株式会社 インクジェット印刷装置
CN112319045B (zh) * 2020-09-10 2022-05-31 季华实验室 一种玻璃基板的加工方法和喷墨打印设备
DE102020215072A1 (de) * 2020-11-30 2022-06-02 Ekra Automatisierungssysteme Gmbh Lagersystem und Drucksystem
KR102473786B1 (ko) 2021-01-07 2022-12-06 (주)유니젯 인클로저 시스템
CN115871332B (zh) * 2021-09-28 2025-10-31 广东聚华印刷显示技术有限公司 一种喷墨打印装置、喷墨打印方法及喷墨打印系统
CN114103454B (zh) * 2021-11-22 2023-01-10 Tcl华星光电技术有限公司 喷墨打印系统及喷头维护方法
CN118181360B (zh) * 2024-05-15 2024-07-16 成都德力斯实业有限公司 一种在役核手套箱及其改造方法

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Also Published As

Publication number Publication date
JP2019091702A (ja) 2019-06-13
CN105190860B (zh) 2018-09-21
EP2973676B1 (en) 2018-11-28
JP7454878B2 (ja) 2024-03-25
JP2018041744A (ja) 2018-03-15
KR102267858B1 (ko) 2021-06-22
KR102098613B1 (ko) 2020-04-08
EP3474317A1 (en) 2019-04-24
KR20180107319A (ko) 2018-10-01
JP2023010755A (ja) 2023-01-20
EP3474317B1 (en) 2022-06-22
JP6463827B2 (ja) 2019-02-06
KR20220162809A (ko) 2022-12-08
KR101903226B1 (ko) 2018-10-01
WO2014164932A3 (en) 2015-02-26
JP7177521B2 (ja) 2022-11-24
CN109130549A (zh) 2019-01-04
KR20200038326A (ko) 2020-04-10
JP6349382B2 (ja) 2018-06-27
EP2973676A2 (en) 2016-01-20
JP2016518675A (ja) 2016-06-23
KR20150131111A (ko) 2015-11-24
KR102851236B1 (ko) 2025-08-26
EP2973676A4 (en) 2017-07-19
WO2014164932A2 (en) 2014-10-09
JP6831046B2 (ja) 2021-02-17
KR20210077007A (ko) 2021-06-24
JP2021035678A (ja) 2021-03-04
CN105190860A (zh) 2015-12-23
CN109130549B (zh) 2021-02-26
KR20240146089A (ko) 2024-10-07

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