KR102415297B9 - 기판 코팅 장치 - Google Patents

기판 코팅 장치

Info

Publication number
KR102415297B9
KR102415297B9 KR1020170114919A KR20170114919A KR102415297B9 KR 102415297 B9 KR102415297 B9 KR 102415297B9 KR 1020170114919 A KR1020170114919 A KR 1020170114919A KR 20170114919 A KR20170114919 A KR 20170114919A KR 102415297 B9 KR102415297 B9 KR 102415297B9
Authority
KR
South Korea
Prior art keywords
coating apparatus
substrate coating
substrate
coating
Prior art date
Application number
KR1020170114919A
Other languages
English (en)
Other versions
KR20190028029A (ko
KR102415297B1 (ko
Inventor
조강일
Original Assignee
주식회사 케이씨텍
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 케이씨텍 filed Critical 주식회사 케이씨텍
Priority to KR1020170114919A priority Critical patent/KR102415297B1/ko
Publication of KR20190028029A publication Critical patent/KR20190028029A/ko
Application granted granted Critical
Publication of KR102415297B1 publication Critical patent/KR102415297B1/ko
Publication of KR102415297B9 publication Critical patent/KR102415297B9/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Coating Apparatus (AREA)
KR1020170114919A 2017-09-08 2017-09-08 기판 코팅 장치 KR102415297B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020170114919A KR102415297B1 (ko) 2017-09-08 2017-09-08 기판 코팅 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020170114919A KR102415297B1 (ko) 2017-09-08 2017-09-08 기판 코팅 장치

Publications (3)

Publication Number Publication Date
KR20190028029A KR20190028029A (ko) 2019-03-18
KR102415297B1 KR102415297B1 (ko) 2022-06-30
KR102415297B9 true KR102415297B9 (ko) 2023-09-07

Family

ID=65949174

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020170114919A KR102415297B1 (ko) 2017-09-08 2017-09-08 기판 코팅 장치

Country Status (1)

Country Link
KR (1) KR102415297B1 (ko)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101206933B1 (ko) * 2006-05-02 2012-11-30 주식회사 케이씨텍 노즐용 세정기재
JP4972504B2 (ja) * 2007-09-12 2012-07-11 大日本スクリーン製造株式会社 塗布装置
JP2010034309A (ja) * 2008-07-29 2010-02-12 Dainippon Screen Mfg Co Ltd 塗布装置および基板処理システム
KR101078310B1 (ko) * 2009-07-21 2011-10-31 주식회사 케이씨텍 부상식 기판 코터 장치
KR101097234B1 (ko) * 2009-08-21 2011-12-21 주식회사 케이씨텍 부상식 기판 코터 장치
KR101097236B1 (ko) * 2009-08-21 2011-12-21 주식회사 케이씨텍 부상식 기판 코터 장치
KR101975278B1 (ko) * 2013-10-15 2019-05-07 주식회사 케이씨텍 기판 처리 장치

Also Published As

Publication number Publication date
KR20190028029A (ko) 2019-03-18
KR102415297B1 (ko) 2022-06-30

Similar Documents

Publication Publication Date Title
IL255947A (en) Coating device
SG10201705081PA (en) Substrate processing apparatus
HUE056916T2 (hu) Bevonóberendezés alkatrészek bevonására
IL268325A (en) Coating
EP3409376A4 (en) COATING DEVICE
SG10201705501WA (en) Substrate processing apparatus
KR102039240B9 (ko) 기판 처리 장치
EP3606757C0 (en) DEVICE FOR SPRAY SEPARATION
PL3355385T3 (pl) Urządzenie do powlekania elektrod
PL2954958T3 (pl) Urządzenie do powlekania podłoża
PL3565030T3 (pl) Urządzenie powlekające
GB201802468D0 (en) Coated substrate
GB201716551D0 (en) Surface coating
SG10201700825QA (en) Substrate Treating Apparatus
GB201705163D0 (en) Coating
SG11201704981YA (en) Method and device for coating substrates
PT3476496T (pt) Aparelho de revestimento
PL3713678T3 (pl) Urządzenie do systemów nakładania powłok
GB201711233D0 (en) Coating method
GB201710057D0 (en) Coating
GB2560776B (en) Coating determination
SG10201702585YA (en) Substrate processing apparatus
PL3329033T3 (pl) Urządzenie do powlekania
GB2553813B (en) Coating
KR102415297B9 (ko) 기판 코팅 장치

Legal Events

Date Code Title Description
N231 Notification of change of applicant
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
G170 Re-publication after modification of scope of protection [patent]