KR102413538B1 - 정밀하게 주파수를 제어하기 위한 주파수 제어 방법 및 이를 이용하는 주파수 제어 장치 - Google Patents

정밀하게 주파수를 제어하기 위한 주파수 제어 방법 및 이를 이용하는 주파수 제어 장치 Download PDF

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Publication number
KR102413538B1
KR102413538B1 KR1020200055434A KR20200055434A KR102413538B1 KR 102413538 B1 KR102413538 B1 KR 102413538B1 KR 1020200055434 A KR1020200055434 A KR 1020200055434A KR 20200055434 A KR20200055434 A KR 20200055434A KR 102413538 B1 KR102413538 B1 KR 102413538B1
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KR
South Korea
Prior art keywords
frequency
load
inverter
voltage
power
Prior art date
Application number
KR1020200055434A
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English (en)
Korean (ko)
Other versions
KR20210136744A (ko
Inventor
손영훈
박세홍
허진
엄세훈
Original Assignee
인투코어테크놀로지 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 인투코어테크놀로지 주식회사 filed Critical 인투코어테크놀로지 주식회사
Priority to KR1020200055434A priority Critical patent/KR102413538B1/ko
Priority to TW110116601A priority patent/TW202213926A/zh
Priority to PCT/KR2021/005746 priority patent/WO2021225411A1/fr
Publication of KR20210136744A publication Critical patent/KR20210136744A/ko
Priority to KR1020220075824A priority patent/KR102716837B1/ko
Application granted granted Critical
Publication of KR102413538B1 publication Critical patent/KR102413538B1/ko

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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
    • H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
    • H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
    • H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M7/53—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M7/537—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
    • H02M7/539—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters with automatic control of output wave form or frequency
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
    • H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
    • H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
    • H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M7/53—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M7/537—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
    • H02M7/5387—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a bridge configuration
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
    • H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
    • H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
    • H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M7/53—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M7/537—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
    • H02M7/539—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters with automatic control of output wave form or frequency
    • H02M7/5395—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters with automatic control of output wave form or frequency by pulse-width modulation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Inverter Devices (AREA)
KR1020200055434A 2020-05-08 2020-05-08 정밀하게 주파수를 제어하기 위한 주파수 제어 방법 및 이를 이용하는 주파수 제어 장치 KR102413538B1 (ko)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1020200055434A KR102413538B1 (ko) 2020-05-08 2020-05-08 정밀하게 주파수를 제어하기 위한 주파수 제어 방법 및 이를 이용하는 주파수 제어 장치
TW110116601A TW202213926A (zh) 2020-05-08 2021-05-07 控制可變諧振頻率的裝置及方法
PCT/KR2021/005746 WO2021225411A1 (fr) 2020-05-08 2021-05-07 Procédé de commande de fréquence permettant de commander précisément une fréquence, et dispositif de commande de fréquence le mettant en oeuvre
KR1020220075824A KR102716837B1 (ko) 2020-05-08 2022-06-21 정밀하게 주파수를 제어하기 위한 주파수 제어 방법 및 이를 이용하는 주파수 제어 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020200055434A KR102413538B1 (ko) 2020-05-08 2020-05-08 정밀하게 주파수를 제어하기 위한 주파수 제어 방법 및 이를 이용하는 주파수 제어 장치

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020220075824A Division KR102716837B1 (ko) 2020-05-08 2022-06-21 정밀하게 주파수를 제어하기 위한 주파수 제어 방법 및 이를 이용하는 주파수 제어 장치

Publications (2)

Publication Number Publication Date
KR20210136744A KR20210136744A (ko) 2021-11-17
KR102413538B1 true KR102413538B1 (ko) 2022-06-27

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Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020200055434A KR102413538B1 (ko) 2020-05-08 2020-05-08 정밀하게 주파수를 제어하기 위한 주파수 제어 방법 및 이를 이용하는 주파수 제어 장치
KR1020220075824A KR102716837B1 (ko) 2020-05-08 2022-06-21 정밀하게 주파수를 제어하기 위한 주파수 제어 방법 및 이를 이용하는 주파수 제어 장치

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020220075824A KR102716837B1 (ko) 2020-05-08 2022-06-21 정밀하게 주파수를 제어하기 위한 주파수 제어 방법 및 이를 이용하는 주파수 제어 장치

Country Status (3)

Country Link
KR (2) KR102413538B1 (fr)
TW (1) TW202213926A (fr)
WO (1) WO2021225411A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102655690B1 (ko) * 2022-04-19 2024-04-08 한국표준과학연구원 광학적 플라즈마 주파수 측정 장치, 이를 구비하는 측정 시스템 및 측정 방법
CN115598420B (zh) * 2022-12-16 2023-03-10 杭州飞仕得科技股份有限公司 一种计算相位延迟时间的方法、装置、设备及存储介质

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2676790B2 (ja) 1988-06-17 1997-11-17 株式会社ダイヘン 高周波電源装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10225129A (ja) * 1997-02-13 1998-08-21 Ishikawajima Harima Heavy Ind Co Ltd 非接触給電設備
JP3216093B2 (ja) * 1999-07-16 2001-10-09 関西ティー・エル・オー株式会社 走査形プローブ顕微鏡
JP4178775B2 (ja) * 2001-08-31 2008-11-12 株式会社日立国際電気 プラズマリアクター
JP4176813B2 (ja) * 2007-05-25 2008-11-05 株式会社日立国際電気 プラズマ処理装置
JP2013125066A (ja) * 2011-12-13 2013-06-24 Samsung Electronics Co Ltd 誘導加熱定着装置および画像形成装置
KR20180116225A (ko) * 2016-01-22 2018-10-24 에스피피 테크놀로지스 컴퍼니 리미티드 플라즈마 제어 장치
KR102012743B1 (ko) * 2017-06-23 2019-08-21 인투코어테크놀로지 주식회사 전원 공급 장치 및 부하에 전원을 공급하는 방법

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2676790B2 (ja) 1988-06-17 1997-11-17 株式会社ダイヘン 高周波電源装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Chien-Ming Wang, IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS, VOL. 55, NO. 2, FEBRUARY 2008

Also Published As

Publication number Publication date
KR102716837B1 (ko) 2024-10-15
TW202213926A (zh) 2022-04-01
KR20210136744A (ko) 2021-11-17
WO2021225411A1 (fr) 2021-11-11
KR20220091454A (ko) 2022-06-30

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