WO2021225411A1 - Procédé de commande de fréquence permettant de commander précisément une fréquence, et dispositif de commande de fréquence le mettant en oeuvre - Google Patents

Procédé de commande de fréquence permettant de commander précisément une fréquence, et dispositif de commande de fréquence le mettant en oeuvre Download PDF

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Publication number
WO2021225411A1
WO2021225411A1 PCT/KR2021/005746 KR2021005746W WO2021225411A1 WO 2021225411 A1 WO2021225411 A1 WO 2021225411A1 KR 2021005746 W KR2021005746 W KR 2021005746W WO 2021225411 A1 WO2021225411 A1 WO 2021225411A1
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WIPO (PCT)
Prior art keywords
frequency
load
inverter
phase
voltage
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PCT/KR2021/005746
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English (en)
Korean (ko)
Inventor
엄세훈
허진
손영훈
박세홍
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인투코어테크놀로지 주식회사
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Publication of WO2021225411A1 publication Critical patent/WO2021225411A1/fr

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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
    • H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
    • H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
    • H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M7/53—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M7/537—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
    • H02M7/539—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters with automatic control of output wave form or frequency
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
    • H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
    • H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
    • H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M7/53—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M7/537—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
    • H02M7/5387—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a bridge configuration
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
    • H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
    • H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
    • H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
    • H02M7/53—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
    • H02M7/537—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
    • H02M7/539—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters with automatic control of output wave form or frequency
    • H02M7/5395—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters with automatic control of output wave form or frequency by pulse-width modulation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge

Definitions

  • the present invention relates to a frequency control method for precisely controlling a frequency and a frequency control device using the same, and more particularly, to a variable resonance of a load by sensing a phase difference between a current and a voltage of a load when applying an AC power to a load. It relates to a method and apparatus for controlling a driving frequency to correspond to the frequency.
  • the technology using plasma is being used in various industrial fields, such as not only semiconductor, display, and medical equipment technology, but also environmental technology such as air, water, and soil purification, and energy technology such as solar cells and hydrogen energy.
  • Methods for generating such plasma are very diverse, such as direct current discharge such as corona discharge, glow discharge, arc discharge, AC discharge such as capacitively coupled discharge and inductively coupled discharge, shock wave, high energy beam, etc.
  • direct current discharge such as corona discharge, glow discharge, arc discharge
  • AC discharge such as capacitively coupled discharge and inductively coupled discharge
  • shock wave high energy beam, etc.
  • the high inductive coupling method is in the spotlight.
  • a power source having an appropriate frequency for example, a resonant frequency of the load
  • the resonant frequency of the load may be continuously changed according to the generation of plasma.
  • One problem to be solved by the present invention is to provide a frequency control method for providing an AC power having a driving frequency changed in real time to an antenna structure and an apparatus using the same.
  • An object of the present invention is to provide a frequency control method for providing an AC power source having a driving frequency corresponding to a resonant frequency of a load based on a current and voltage phase difference of a load, and an apparatus using the same.
  • An object of the present invention is to provide a frequency control method for adjusting a driving frequency of an AC power applied to a load using a plurality of frequency control methods, and an apparatus using the same.
  • An object of the present invention is to provide a frequency control method for adjusting a driving frequency of an AC power applied to a load in consideration of the phase and magnitude of an electrical signal of the load, and an apparatus using the same.
  • One problem to be solved by the present invention is to provide a frequency control method for amplifying, transmitting, and attenuating a signal to be transmitted when transmitting a signal to a switch, and to provide an apparatus using the same.
  • the frequency control device for providing power to the load by controlling the frequency to correspond to the variable resonant frequency of the load, by converting DC power into first AC power having a first driving frequency, an inverter applied to the load; a sensor for acquiring first and second delay times indicating a phase difference between the voltage and current of the load at a first time point and a second time point; a PWM generator providing to the inverter a first switch signal corresponding to a second driving frequency different from the first driving frequency by a preset frequency to the load based on the first delay time; and based on the second delay time to the load, by providing to the inverter a second switch signal corresponding to a third AC power that is different from the second AC power having the second driving frequency by a preset phase to the inverter.
  • a frequency control device including a; a time delay unit for reducing the phase difference between the voltage and the current of the load compared to the case of applying the second AC power to the frequency control device can be provided.
  • the frequency control method for providing power to the load by controlling the frequency to correspond to the variable resonant frequency of the load, using an inverter the first driving frequency to the load 1 Apply AC power; acquiring, using the sensor, a first delay time indicating a phase difference between the voltage and current of the load at a first time point; applying a second AC power having a second driving frequency different from the first driving frequency by a preset frequency based on the first delay time to the load; acquiring a second delay time indicating a phase difference between the voltage and current of the load at a second time point using the sensor; The voltage and current of the load compared to the case of applying the second AC power to the load by applying a third AC power that is different from the second AC power by a preset phase based on the second delay time to the load A frequency control method for reducing the phase difference therebetween may be provided.
  • a frequency control device for providing power to the load by controlling a frequency to correspond to a variable resonant frequency of a load, comprising: an inverter converting DC power into AC power and applying it to the load; Delay time indicating a phase difference between the voltage and current of the load -
  • the delay time includes a first delay time at a first time point, a second delay time at a second time point, and a third delay time at a third time point a phase detector to detect ham-; a pulse width modulation (PWM) generator that provides a switch signal corresponding to a set driving frequency to the inverter based on the first delay time obtained from the phase detector;
  • PWM pulse width modulation
  • a frequency control method may be provided.
  • a frequency control device for providing power to the load by controlling a frequency to correspond to a variable resonant frequency of a load, comprising: an inverter converting DC power into AC power and applying it to the load; a phase detector for detecting a delay time indicating a phase difference between the voltage and current of the load, wherein the delay time includes a first delay time at a first time point and a second delay time at a second time point; a voltage detector sensing the voltage of the load at the first time point and the second time point to obtain voltage data including a first voltage related to the first delay time and a second voltage related to the second delay time; and a PWM (Pulse Width Modulation) generator that provides a switch signal corresponding to a set driving frequency to the inverter based on the delay time obtained from the phase detector.
  • PWM Pulse Width Modulation
  • a frequency of providing a switch signal corresponding to a first driving frequency set based on the first delay time to the inverter at the first time point and a third time point after the second time point when the magnitude of the second voltage is smaller than the level of the second voltage A control device may be provided.
  • the plasma formed from the load can be stably maintained by adjusting the driving frequency of the AC power applied to the load to correspond to the resonant frequency of the variable load.
  • the switch operates while satisfying the ZVS (Zero Voltage Switching) and ZCS (Zero Current Switching) or nearly ZCS conditions, thereby preventing switch damage.
  • ZVS Zero Voltage Switching
  • ZCS Zero Current Switching
  • an electrical signal is stably received from the switch, thereby preventing switch loss or damage.
  • FIG. 1 is a diagram of a plasma system according to an embodiment of the present specification.
  • FIG. 2 is a view of an RF generator according to an embodiment of the present specification.
  • FIG. 3 is a view of an antenna structure according to an embodiment of the present specification.
  • FIG. 4 is a diagram of a structure of an RF generator for digital frequency control according to an embodiment of the present specification.
  • FIG. 5 is a diagram illustrating a digital frequency control method according to an embodiment of the present specification.
  • FIG. 6 is a diagram of a driving frequency changed according to digital frequency control according to an embodiment of the present specification.
  • FIG. 7 is a diagram related to the structure of an RF generator for high-resolution frequency control according to an embodiment of the present specification.
  • FIG. 8 is a diagram of a high-resolution frequency control method according to an embodiment of the present specification.
  • FIG. 9 is a diagram illustrating a driving frequency adjusted according to high-resolution frequency control according to an embodiment of the present specification.
  • FIG. 10 is a diagram illustrating a change in a current and a voltage phase difference of a load according to high-resolution frequency control according to an embodiment of the present specification.
  • FIG. 11 is a diagram related to the structure of an RF generator for fine frequency control according to an embodiment of the present specification.
  • FIG. 12 is a diagram of a method for controlling a fine frequency according to an embodiment of the present specification.
  • FIG. 13 is a diagram illustrating a phase difference of a load voltage and current according to a fine frequency control according to an embodiment of the present specification.
  • FIG. 14 is a diagram illustrating a switch signal transmission/reception scheme using an amplifier and an attenuator according to an embodiment of the present specification.
  • 15 is a diagram illustrating a switch signal transmission/reception method using an optical converter according to an embodiment of the present specification.
  • the frequency control device for providing power to the load by controlling the frequency to correspond to the variable resonant frequency of the load, by converting DC power into first AC power having a first driving frequency, an inverter applied to the load; a sensor for acquiring first and second delay times indicating a phase difference between the voltage and current of the load at a first time point and a second time point; a PWM generator providing to the inverter a first switch signal corresponding to a second driving frequency different from the first driving frequency by a preset frequency to the load based on the first delay time; and based on the second delay time to the load, by providing to the inverter a second switch signal corresponding to a third AC power that is different from the second AC power having the second driving frequency by a preset phase to the inverter.
  • a frequency control device including a; a time delay unit for reducing the phase difference between the voltage and the current of the load compared to the case of applying the second AC power to the frequency control device can be provided.
  • the frequency control method for providing power to the load by controlling the frequency to correspond to the variable resonant frequency of the load, using an inverter the first driving frequency to the load 1 Apply AC power; acquiring, using the sensor, a first delay time indicating a phase difference between the voltage and current of the load at a first time point; applying a second AC power having a second driving frequency different from the first driving frequency by a preset frequency based on the first delay time to the load; acquiring a second delay time indicating a phase difference between the voltage and current of the load at a second time point using the sensor; The voltage and current of the load compared to the case of applying the second AC power to the load by applying a third AC power that is different from the second AC power by a preset phase based on the second delay time to the load A frequency control method for reducing the phase difference therebetween may be provided.
  • a frequency control device for providing power to the load by controlling a frequency to correspond to a variable resonant frequency of a load, comprising: an inverter converting DC power into AC power and applying it to the load; Delay time indicating a phase difference between the voltage and current of the load -
  • the delay time includes a first delay time at a first time point, a second delay time at a second time point, and a third delay time at a third time point a phase detector to detect ham-; a pulse width modulation (PWM) generator that provides a switch signal corresponding to a set driving frequency to the inverter based on the first delay time obtained from the phase detector;
  • PWM pulse width modulation
  • a frequency control method may be provided.
  • a frequency control device for providing power to the load by controlling a frequency to correspond to a variable resonant frequency of a load, comprising: an inverter converting DC power into AC power and applying it to the load; a phase detector for detecting a delay time indicating a phase difference between the voltage and current of the load, wherein the delay time includes a first delay time at a first time point and a second delay time at a second time point; a voltage detector sensing the voltage of the load at the first time point and the second time point to obtain voltage data including a first voltage related to the first delay time and a second voltage related to the second delay time; and a PWM (Pulse Width Modulation) generator that provides a switch signal corresponding to a set driving frequency to the inverter based on the delay time obtained from the phase detector.
  • PWM Pulse Width Modulation
  • a frequency of providing a switch signal corresponding to a first driving frequency set based on the first delay time to the inverter at the first time point and a third time point after the second time point when the magnitude of the second voltage is smaller than the level of the second voltage A control device may be provided.
  • the frequency control device for providing power to the load by controlling the frequency to correspond to the variable resonant frequency of the load, by converting DC power into first AC power having a first driving frequency, an inverter applied to the load; a sensor for acquiring first and second delay times indicating a phase difference between the voltage and current of the load at a first time point and a second time point; a PWM generator providing to the inverter a first switch signal corresponding to a second driving frequency different from the first driving frequency by a preset frequency to the load based on the first delay time; and based on the second delay time to the load, by providing to the inverter a second switch signal corresponding to a third AC power that is different from the second AC power having the second driving frequency by a preset phase to the inverter.
  • a frequency control device including a; a time delay unit for reducing the phase difference between the voltage and the current of the load compared to the case of applying the second AC power to the frequency control device can be provided.
  • the preset frequency may have a value greater than a difference between the second driving frequency and a third driving frequency corresponding to the third AC power.
  • the time delay unit may receive the phase signal of the load and output the second switch signal obtained by delaying it by the preset phase, and the phase signal of the load may indicate the phase of the current flowing in the load. have.
  • the preset phase may include a phase corresponding to the second delay time.
  • the frequency control device may include a switching circuit electrically connecting at least one of the PWM generator and the time delay unit to the inverter.
  • the switching circuit may change the PWM generator electrically connected to the inverter to the time delay unit.
  • the frequency control device includes a clock source having a preset clock frequency (clock frequency), the preset frequency is a value obtained by dividing the clock frequency by an integer, and the preset phase is the It may be an integer multiple of the reciprocal value of the clock frequency.
  • the frequency control device includes a phase sensing unit that periodically obtains the phase signal of the load and provides it to the time delay unit, wherein the sensor periodically obtains a delay time and provides it to the time delay unit, , the time delay unit may provide a switch signal delayed by the phase signal to the inverter based on the delay time.
  • the frequency control device is electrically connected to the switching circuit amplifier for amplifying a signal; and an attenuator electrically connected to the inverter to attenuate a signal, wherein a threshold voltage of the attenuator may be greater than a threshold voltage of the inverter to prevent noise generation.
  • the frequency control device includes: a first converter electrically connected to the switching circuit to convert an electrical signal into an optical signal; and a second converter electrically connected to the inverter to convert an optical signal into an electrical signal, wherein the switching circuit sends the first switch signal to the inverter through the first and second converters to prevent noise generation Alternatively, the second switch signal may be provided.
  • a frequency control method may be provided.
  • a PWM generator providing a first switch signal corresponding to the first driving frequency to the inverter; using the PWM generator to provide a second switch signal corresponding to the second driving frequency to the inverter;
  • the delayed phase signal of the load corresponding to the third AC power may be provided to the inverter by using the time delay unit.
  • the phase signal may be a current phase signal of the load prior to applying the AC power having the third driving frequency to the load.
  • a frequency control device for providing power to the load by controlling a frequency to correspond to a variable resonant frequency of a load, comprising: an inverter converting DC power into AC power and applying it to the load; Delay time indicating a phase difference between the voltage and current of the load -
  • the delay time includes a first delay time at a first time point, a second delay time at a second time point, and a third delay time at a third time point a phase detector to detect ham-; a pulse width modulation (PWM) generator that provides a switch signal corresponding to a set driving frequency to the inverter based on the first delay time obtained from the phase detector;
  • PWM pulse width modulation
  • the PWM generator provides the switch signal to the inverter so that the frequency of the AC power applied to the load is changed from a first driving frequency to a second driving frequency
  • the time delay unit is the AC applied to the load
  • the current phase signal is delayed and provided to the inverter so that the frequency of the power is changed from the third driving frequency to the fourth driving frequency, wherein the difference between the first driving frequency and the second driving frequency is the third driving frequency and the second driving frequency It may have a value greater than the difference between the fourth driving frequencies.
  • the PWM generator provides the switch signal to the inverter so that the frequency of the AC power applied to the load is changed from a first driving frequency to a second driving frequency, and the time delay unit is applied to the load.
  • the current phase signal is delayed and provided to the inverter so that the frequency of the AC power is changed from the second driving frequency to the third driving frequency, wherein the difference between the first driving frequency and the second driving frequency is the second driving frequency and a value greater than a difference between the third driving frequencies.
  • the preset condition may be set in at least a partial interval of -5ns to 20ns.
  • an AC power source having a specific driving frequency is supplied to the load using an inverter.
  • authorize obtaining, using the first sensor, a delay time indicating a phase difference between the voltage and the current of the load; obtain, using a second sensor, voltage data indicative of a voltage for at least a portion of the load; applying an AC power having a driving frequency set based on the delay time to the load in a first section using the inverter;
  • a frequency control method of applying an AC power having a driving frequency set based on the voltage data to the load in a second section using the inverter may be provided.
  • the frequency range is determined based on the first delay time and the second delay time obtained in the first section using the first sensor; select a final holding frequency based on the voltage data in the frequency range; An AC power having the final sustain frequency may be applied to the load using the inverter, and the first delay time and the second delay time may satisfy a preset condition.
  • the frequency range includes at least a first driving frequency and a second driving frequency
  • the voltage data is applied to the first voltage and the load obtained when the AC power having the first driving frequency is applied to the load.
  • a second voltage obtained when AC power having the second driving frequency is applied, and when the second voltage is less than the first voltage, the second driving frequency may be selected as the final sustain frequency .
  • a phase difference between the voltage and current of the load in the second section may satisfy a preset condition.
  • the preset condition may be set in at least a partial interval of -5ns to 20ns.
  • the load includes an antenna structure including a first antenna having a first radius of curvature and a second antenna having a second radius of curvature greater than the first radius of curvature, and the voltage data is transmitted to the second sensor. It can be obtained by measuring the voltage to the first antenna using
  • the load includes an antenna structure including a first antenna having a first radius of curvature and a second antenna having a second radius of curvature greater than the first radius of curvature, and the voltage data is transmitted to the second sensor. It may be obtained by measuring voltages for the first antenna and the second antenna using
  • a frequency control device for providing power to the load by controlling a frequency to correspond to a variable resonant frequency of a load, comprising: an inverter converting DC power into AC power and applying it to the load; a phase detector for detecting a delay time indicating a phase difference between the voltage and current of the load, wherein the delay time includes a first delay time at a first time point and a second delay time at a second time point; a voltage detector sensing the voltage of the load at the first time point and the second time point to obtain voltage data including a first voltage related to the first delay time and a second voltage related to the second delay time; and a PWM (Pulse Width Modulation) generator that provides a switch signal corresponding to a set driving frequency to the inverter based on the delay time obtained from the phase detector.
  • PWM Pulse Width Modulation
  • a frequency of providing a switch signal corresponding to a first driving frequency set based on the first delay time to the inverter at the first time point and a third time point after the second time point when the magnitude of the second voltage is smaller than the level of the second voltage A control device may be provided.
  • the frequency control device is electrically connected to the PWM generator to amplify a signal; and an attenuator electrically connected to the inverter to attenuate a signal, wherein a threshold voltage of the attenuator may be greater than a threshold voltage of the inverter to prevent noise generation.
  • the frequency control device is electrically connected to the PWM generator a first converter for converting an electrical signal into an optical signal; and a second converter electrically connected to the inverter to convert an optical signal into an electrical signal, wherein the PWM generator provides the switch signal to the inverter through the first and second converters to prevent noise generation can do.
  • the present specification relates to a frequency control method for precisely controlling a frequency and a frequency control apparatus using the same.
  • the driving frequency when applying power or power having a specific driving frequency to a load, the driving frequency may be changed periodically or in real time.
  • the driving frequency may mean a frequency of power or power applied to a load.
  • the load may refer to a power source or a configuration to which power is supplied.
  • a load may mean an electrical configuration expressed as a circuit including electrical elements such as a resistor, an inductor, and a capacitor.
  • the load may have a resonant frequency according to properties or characteristics of electrical elements constituting the load. In this case, the resonance frequency may be changed in real time according to the load.
  • a frequency control method and a frequency control apparatus using the same in a plasma system will be described for convenience of explanation, but the technical spirit of the present specification is not limited thereto, and it is necessary to apply AC power by adjusting the driving frequency in real time.
  • a frequency control method and an apparatus using the same may be used to control a driving frequency of an AC power source to correspond to a variable resonant frequency of a load in the field of wireless power transmission and induction heating, etc.
  • a frequency control method may be used to apply power to an antenna or an antenna structure in a plasma system for generating and maintaining plasma.
  • the plasma is a phase in which a material is applied with high energy and is separated into negatively charged electrons and positively charged ions, and may be induced or generated by various methods.
  • ICP Inductively Coupled Plasma
  • RF Radio Frequency
  • the antenna is an inductive element or load that forms an electric or magnetic field around it when a voltage or current is applied, and may mean a coil or an inductor, and further may mean an equivalent circuit implemented as an element other than the inductive element. have.
  • the antenna structure may mean a structure including at least one antenna.
  • the antenna structure may include at least one or more capacitive elements or loads, and may be implemented in a form in which at least one or more antennas or capacitive elements are connected or disposed in a specific way.
  • the plasma system according to an embodiment of the present specification can be widely used in various fields such as semiconductor, display processing, environment, and energy, and the plasma generating device described below is not limited to being used only in any specific field. , it is stated in advance that it can be commonly used in the field where plasma is utilized.
  • FIG. 1 a plasma system according to an embodiment of the present specification will be described with reference to FIG. 1 .
  • a plasma system 100 may include a radio frequency generator 1000 , an antenna structure 2000 , and a plasma generator 3000 .
  • the plasma system 100 may induce inductively coupled plasma generation in the plasma generator 3000 by supplying RF power to the antenna structure 2000 using the RF generator 1000 .
  • the RF generator 1000 may provide power or power to the antenna structure 2000 .
  • the RF generator 1000 may apply AC power having a specific driving frequency to the antenna structure 2000 .
  • the driving frequency of the AC power provided to the antenna structure 2000 may be changed as described below.
  • the antenna structure 2000 may include at least one antenna.
  • the antenna structure 2000 may include at least one antenna and at least one capacitor. Components and structures of the antenna structure 2000 will be described in detail later.
  • the antenna structure 2000 may be electrically connected to the RF generator 1000 .
  • the antenna structure 2000 may be connected in series or parallel with the RF generator 1000 through a conductive wire or may be connected in series or parallel through an electrical element.
  • the antenna structure 2000 may be physically or electrically connected to the plasma generator 3000 . Details of the connection relationship between the antenna structure 1000 and the plasma generator 2000 will be described later.
  • the antenna structure 2000 When the antenna structure 2000 receives RF power from the RF generator 1000 , a time-varying current flows, and based on this, an induced electric field is generated in the plasma generator 3000 to induce plasma.
  • the antenna structure 2000 may have a resonant frequency depending on its components.
  • the resonant frequency may mean a resonant frequency of the antenna structure 2000 itself.
  • the resonant frequency may mean a resonant frequency in which the effect of the antenna structure 2000 and the generated plasma is considered.
  • the driving frequency may be changed in real time, and in this case, it can be seen that the resonance frequency is changed by the plasma generated by the antenna structure 2000 and the plasma generator 300 .
  • the plasma generator 3000 may include a region or space in which plasma generation is induced.
  • the plasma generating unit 3000 may mean a space in which plasma is generated and maintained, such as a chamber or tube.
  • FIG 2 is a view of the RF generator 1000 according to an embodiment of the present specification.
  • the RF generator 1000 may include an AC power source 1100 , a rectifier 1200 , an inverter 1300 , a controller 1500 , and a sensor module 1400 .
  • the RF generator 1000 may convert the first AC power supplied from the AC power source 1100 into the second AC power and supply it to a load.
  • the RF generator 1000 may convert the first AC power used in a typical home or industry into a second AC power having a frequency of several hundred kHz to several tens of MHz and power of several kW or more and provide it to the load. .
  • the load may include the antenna structure 2000 and plasma generated by the antenna structure 2000 .
  • the load may have a time-varying resonant frequency according to plasma induction.
  • the rectifier 1200 may convert the output of the AC power source 1100 into DC power.
  • the rectifier 1200 may convert the first AC power supplied from the AC power 1100 into DC power and apply it to both ends of the inverter 1300 .
  • the inverter 1300 may receive the DC power from the rectifier 1200 and supply the second AC power to the load.
  • the inverter 1300 may receive the switch signal SW from the controller 1500 and provide the second AC power to the load using the received switch signal.
  • the inverter 1300 may include at least one switch element controlled by a switch signal, and the second AC power supplied from the inverter 1300 to the load is received by the inverter 1300 from the controller 1500 . It may have a driving frequency set based on the switch signal.
  • the inverter 1300 may be provided as a half-bridge type or a full-bridge type.
  • the inverter 1300 may be controlled by a time delay method, a pulse width modulation method (PWM), or a combination thereof according to a frequency control method of the controller 1500 .
  • PWM pulse width modulation method
  • a capacitive element may be disposed between the rectifier 1200 and the inverter 1300 .
  • the RF power source 200 includes a capacitor connected in parallel with the rectifier 1200 and the inverter 1300 , and the capacitor discharges an AC component of the power applied to the inverter 1300 to the ground node GND. can do.
  • the controller 1500 may generate a switch signal by receiving data sensed from a sensor module 1400 to be described later.
  • the controller 1500 may be implemented to generate a switch signal by acquiring data related to a resonance frequency, such as a current and voltage of a load, from the sensor module 1400 .
  • the controller 1500 obtains phase difference data or delay time using the phase data of the current applied to the load and the phase data of the voltage applied to the load obtained from the sensor module 1400, and based on this, the switch signal can create
  • the controller 1500 may be implemented using Field Programmable Gate Arrays (FPGA) technology. A detailed configuration and structure of the controller 1500 will be described later.
  • FPGA Field Programmable Gate Arrays
  • the sensor module 1400 may acquire data about the resonant frequency of the load or data about the power supplied to the load from the controller 1500 .
  • the sensor module 1400 may include a current transformer 1410 , a filter 1420 , and a comparator 1430 .
  • the sensor module 1400 receives a current or voltage signal flowing through the load through the current transformer 1410 and converts it into a current or voltage signal having a different magnitude, and filters the converted current or voltage signal using the filter 1420,
  • the phase data may be output to the controller 1500 through the comparator 1430 .
  • the current transformer 1410 may be inductively coupled to the wiring between the inverter 1300 and the load, and may convert a voltage or current signal applied to the load and provide it to the filter 1420 . Specifically, the current transformer 1410 may convert a current flowing through a wire connected to a load into a voltage signal.
  • the filter 1420 may remove the DC component from the input current or voltage signal and output it to the comparator 1430 . To this end, the filter 1420 may perform high-pass filtering or low-pass filtering.
  • the comparator 1430 may acquire phase data.
  • the comparator 1430 may obtain phase data by comparing a voltage signal obtained from the current transformer 1410 or the filter 1420 with a preset value.
  • the phase data may mean the phase data of the current applied to the load.
  • At least one of the components included in the above-described sensor module 1400 may be omitted.
  • the RF generator 1000 may include a memory.
  • the memory may store various data. Various data may be temporarily or semi-permanently stored in the memory. Examples of memory may include a hard disk (HDD), solid state drive (SSD), flash memory, read-only memory (ROM), and random access memory (RAM). have.
  • the memory may be provided in a form embedded in the RF generator 1000 or in a form detachable.
  • the RF generator 1000 may control the driving frequency of the second AC power provided to the load based on data regarding the resonant frequency of the load. In other words, the RF generator 1000 may output the driving frequency of the second AC power to correspond to the resonance frequency of the load by tracking the resonant frequency of the load that changes according to the generation of plasma. Accordingly, unnecessary power consumption can be prevented and durability of the plasma system can be improved.
  • At least one of the components of the RF generator 1000 described above may be omitted.
  • the RF generator 1000 may acquire electrical data about a load from an external sensor without including the sensor module 1400 .
  • the RF generator 1000 may receive DC power or rectified DC power from the outside without including the AC power source 1100 and the rectifier 1200 .
  • FIG. 3 is a view of an antenna structure 2000 according to an embodiment of the present specification.
  • the antenna structure 2000 may include a plurality of antennas disposed around the plasma generator 3000 .
  • the antenna structure 2000 may include first to third antennas 2100 , 2200 , and 2300 having different radii of curvature.
  • the first antenna 2100 may be disposed adjacent to the plasma generator 3000 compared to other antennas.
  • the first antenna 2100 may have a radius of curvature smaller than that of other antennas and may be disposed such that an inner diameter surface thereof is in contact with the plasma generator 3000 .
  • the second antenna 2200 may have a larger radius of curvature than the first antenna 2100 and may be disposed between the first antenna 2100 and the third antenna 2300 .
  • the third antenna 2300 may have a larger radius of curvature than the second antenna 2200 and may be disposed at the outermost side.
  • the first to third antennas 2100 , 2200 , and 2300 may be designed in various shapes.
  • the first to third antennas 2100 , 2200 , and 2300 may have a circular ring shape having a rectangular cross section or a quadrangular ring shape having a circular cross section.
  • the first to third antennas 2100 , 2200 , and 2300 may be electrically connected.
  • one end of the first antenna 2100 and one end of the second antenna 2200 may be electrically connected, and the other end of the second antenna 2200 and one end of the third antenna 2300 may be electrically connected.
  • the first antenna 2100 and the second antenna 2200 , the second antenna 2200 , and the third antenna 2300 may be electrically connected to each other through an electrical connection element such as a capacitor.
  • the first to third antennas 2100 , 2200 , and 2300 may induce plasma by generating an induced electric field inside the plasma generating unit 3000 when power is applied.
  • the driving frequency of the AC power applied to the antenna structure 2000 may be controlled by using the electrical characteristics of at least one of the first to third antennas 2100 , 2200 , and 2300 .
  • the antenna structure 2000 may have a shape or structure for inducing inductively coupled plasma in addition to the above-described shape or structure.
  • the number of antennas included in the antenna structure 2000 is not necessarily three, and the antenna structure 2000 may include three or less or more antennas.
  • the antenna structure 2000 may include antennas disposed on different planes.
  • the antenna structure 2000 includes at least one antenna surrounding the plasma generator 3000 and disposed on a first plane and at least one antenna disposed on a second plane different from the first plane and surrounding the plasma generator 3000 . It may include one antenna.
  • antennas of different layers may be electrically connected directly or through a separate electrical connection element such as a capacitor.
  • the antenna structure 2000 may include at least one antenna, and each antenna may include a plurality of antenna segments and a capacitor electrically connecting therebetween.
  • the antenna structure 2000 may be electrically connected to the RF generator 1000 .
  • one end of the RF generator 1000 is electrically connected to the end of the first antenna 2100
  • the other end of the RF generator 1000 is electrically connected to the end of the third antenna 2300 , so that the RF generator 1000 is the antenna.
  • Power may be supplied to the structure 2000 .
  • the RF generator 1000 may be connected to the antenna structure 2000 through a separate electrical device.
  • an end of the first antenna 2100 and an end of the third antenna 2300 may be respectively connected to a capacitor, and each capacitor may be connected to the RF generator 1000 .
  • the RF generator 1000 may adjust the frequency of the AC power applied to the antenna structure 2000 through a frequency control method. Specifically, the RF generator 1000 may change or set the driving frequency for plasma formation or maintenance in real time by detecting the resonance frequency or electrical properties such as current and voltage of the load including the antenna structure 2000 in real time. .
  • FIG 4 is a diagram of the structure of the RF generator 1000 for digital frequency control according to an embodiment of the present specification.
  • the RF generator 1000 is a controller 1500 including an inverter 1300, a sensor module 1400 and a phase detector 1510 and a PWM generator 1520. may include The RF generator 1000 obtains the current phase data using the sensor module 1400, obtains the delay time or phase difference data between the current and the voltage using the phase detector 1510, and uses the PWM generator 1520 A switch signal may be provided to the inverter 1300 .
  • the inverter 1300 may receive DC power, change it into AC power, and provide it to the load. To this end, the inverter 1300 may be provided as a half-bridge type or a full-bridge type. Hereinafter, it is described that the inverter 1300 is provided as a full-bridge type for convenience of description, but the technical spirit of the present specification is not limited thereto.
  • the inverter 1300 may include first to fourth switches S1 , S2 , S3 , and S4 .
  • the first to fourth switches S1 , S2 , S3 , and S4 may be turned on or off by receiving a switch signal from the PWM generator 1520 .
  • a switch signal from the PWM generator 1520 .
  • the inverter 1300 may apply AC power having a specific frequency by alternately applying positive and negative voltages to the load.
  • the sensor module 1400 may detect the phase of the current flowing through the load. As described in FIG. 2 , the sensor module 1400 is electrically coupled to the load to obtain a current signal corresponding to the current flowing in the load, and a current indicating the phase of the current flowing in the load based on the obtained current signal. Phase data can be acquired. In this case, the current phase data may be used in the same meaning as the current phase signal. Alternatively, the sensor module 1400 may obtain a voltage signal corresponding to a voltage applied to the load, and may obtain phase data of a current flowing through the load based on the obtained voltage signal.
  • the phase detector 1510 may acquire phase data of a current flowing through a load and a voltage applied thereto.
  • the phase detector 1510 may acquire current phase data from the sensor module 1400 .
  • the phase detector 1510 may acquire the switch signal provided to the inverter 1300 as voltage phase data.
  • the switch signal may indicate the phase of the voltage applied to the load, and the switch signal may include at least one of the switch signals provided to the first to fourth switches S1, S2, S3, and S4.
  • the phase detector 1510 may receive a switch signal from the PWM generator 1520 .
  • the phase detector 1510 may acquire delay time or phase difference data.
  • the phase detector 1510 may acquire current phase data and voltage phase data to acquire delay time or phase difference data indicating the difference.
  • the delay time or phase difference data may mean a phase difference between a current flowing through a load and an applied voltage.
  • the phase detector 1510 acquires the delay time for convenience of description, but it may be similarly applied to the case where the phase detector 1510 acquires the phase difference data.
  • the delay time may be expressed in phase or time.
  • the delay time may mean a phase difference or delay time between a voltage applied to the load and a current flowing through the load, or a phase difference or a delay time between a current flowing through the load and a voltage applied to the load.
  • the RF generator 1000 may adjust the driving frequency of the AC power applied to the load based on the acquired delay time.
  • the delay time may be stored in the memory.
  • the delay time may be measured in real time and stored in a memory in the form of phase or time and loaded as needed.
  • the phase detector 1510 acquires the delay time using the current phase data acquired from the sensor module 1400 and the switch signal acquired from the PWM generator 1520, but the technical spirit of the present specification is limited to this it's not going to be
  • the RF generator 1000 may generate a switch signal provided to the inverter 1300 by directly measuring a voltage applied to the load and a current flowing through the load, and obtaining respective phase data.
  • the PWM generator 1520 may generate a switch signal and provide it to the inverter 1300 .
  • the PWM generator 1520 may generate a switch signal to correspond to a driving frequency obtained by increasing or decreasing the frequency of the AC power applied to the load at a previous time point and may provide it to the inverter 1300 .
  • the PWM generator 1520 may generate a switch signal based on a preset first in-phase recognition condition. Specifically, when the preset first in-phase recognition condition is -5ns to 15ns, if the delay time is 15ns or more, a switch signal is generated based on a frequency lower than the driving frequency of the previous time, and if the delay time is -5ns or less, the previous The switch signal may be generated based on a frequency higher than the driving frequency of the time point.
  • the PWM generator 1520 may generate a switch signal to maintain the driving frequency of the previous time when the delay time satisfies the first in-phase recognition condition.
  • the first in-phase recognition condition may be set in consideration of a frequency band used in the frequency control method, safety of a frequency control device, power transfer efficiency, and the like.
  • the lower limit of the first in-phase recognition condition may be set to a value capable of ZVS (Zero Voltage Switching) of the switch in the inverter 1300 .
  • ZVS Zero Voltage Switching
  • the lower limit of the first in-phase recognition condition may be set to satisfy the condition that the switch in the inverter 1300 does not perform hard switching.
  • the upper limit of the first in-phase recognition condition may be set to a value capable of nearly ZCS (Zero Current Switching) of the switch in the inverter 1300 .
  • ZCS Zero Current Switching
  • the upper limit of the first in-phase recognition condition may be set as a value for maintaining ZCS and plasma of the inverter 1300 .
  • the lower limit and upper limit of the first in-phase recognition condition may be appropriately selected in consideration of ZVS, ZCS, and plasma maintenance, and further may be set differently according to a frequency band used.
  • the above-described -5ns to 15ns as the first in-phase recognition condition is a numerical value according to an example, and may be set differently as needed.
  • the first in-phase recognition condition may be set to -10ns to 20ns.
  • the first in-phase recognition condition may be set to -15ns to 40ns when the frequency band used is near 2MHz.
  • the PWM generator 1520 may set a driving frequency based on the delay time, generate a switch signal to correspond to the set driving frequency, and provide it to the inverter 1300 .
  • the PWM generator 1520 may generate a switch signal by setting a frequency corresponding to a delay time obtained using a lookup table as a driving frequency.
  • the PWM generator 1520 may generate a switch signal by setting a frequency corresponding to a delay time obtained using a preset function as a driving frequency.
  • the PWM generator 1520 may determine whether the current flowing through the load is lagging or leading with respect to the voltage applied to the load based on the delay time.
  • S1000 digital frequency control method
  • the digital frequency control method ( S1000 ) includes obtaining current and voltage phase data ( S1100 ), obtaining a delay time between current and voltage ( S1200 ), and using a first in-phase recognition condition to set the driving frequency (S1300) and providing a switch signal to the inverter 1300 based on the driving frequency (S1400).
  • the RF generator 1000 may acquire current and voltage phase data (S1100).
  • the RF generator 1000 may obtain phase data of a current flowing in a load from the sensor module 1400 .
  • the RF generator 1000 may acquire phase data of the voltage applied to the load from the PWM generator 1520 .
  • the RF generator 1000 may directly measure the current and voltage of the load to obtain phase data of the current and voltage.
  • the RF generator 1000 may obtain a delay time between the current and the voltage (S1200).
  • the RF generator 1000 may obtain a delay time of a current with respect to a voltage or a delay time of a voltage with respect to a current by using the phase detector 1510 .
  • the RF generator 1000 may set the driving frequency by using the first in-phase recognition condition (S1300).
  • the RF generator 1000 may set the driving frequency by comparing the delay time acquired in the delay time acquisition step S1200 and the first in-phase recognition condition. Specifically, when the delay time is greater than the first in-phase recognition condition, the driving frequency may be decreased, and if the delay time is smaller than the in-phase recognition condition, the driving frequency may be increased. Meanwhile, the RF generator 1000 may set a driving frequency corresponding to the delay time using a preset function or may set a driving frequency corresponding to the delay time using a lookup table.
  • the step of setting the driving frequency using the first in-phase recognition condition ( S1300 ) may be omitted.
  • the controller 1500 may generate a switch signal using the acquired delay time and provide it to the inverter 1300 .
  • the controller 1500 may provide a switch signal to the inverter 1300 based on the driving frequency (S1400). For example, the controller 1500 may generate a switch signal such that the inverter 1300 operates at a set driving frequency or a frequency that reduces the magnitude of the delay time.
  • the inverter 1300 may receive a switch signal from the controller 1500 to operate the switch.
  • the first and third switches S1 and S3 may receive the switch signal as it is, and the second and fourth switches S2 and S4 may receive the inverted switch signal, thereby the first and third switches (S1, S3) and the second and fourth switches (S2, S4) may be alternately turned on or turned off.
  • the controller 1500 controls the inverter 1300 based on the driving frequency set according to the digital frequency control, but detects that the resonant frequency of the load is changed by maintaining the plasma and performs the above-described digital frequency control method S1000 again Accordingly, the inverter 1300 may be operated at a different driving frequency than the existing one.
  • FIG. 6 is a diagram of a driving frequency changed according to digital frequency control according to an embodiment of the present specification.
  • the RF generator 1000 operates the inverter 1300 at the start frequency f_start at the start of plasma induction, and after a predetermined time elapses according to digital frequency control, the first driving frequency f1 or the second The inverter 1300 may be operated at the driving frequency f2.
  • the start frequency f_start may mean a driving frequency when the inverter 1300 is driven by the controller 1500 .
  • the start frequency f_start may be set based on the resonance frequency f0.
  • the resonant frequency f0 may mean a natural frequency or resonant frequency of the antenna structure 2000 itself or a natural frequency or resonant frequency of a load including the antenna structure 2000 .
  • the resonant frequency f0 may be changed according to plasma generation.
  • the start frequency f_start may be arbitrarily set regardless of the resonance frequency f0. Specifically, the start frequency f_start may be set based on the size of the antenna structure 2000 . Alternatively, the start frequency f_start may be set based on the size or scale of plasma to be induced in the plasma system 100 .
  • the start frequency f_start may be greater or less than the resonance frequency f0.
  • the driving frequency may be changed from the start frequency f_start toward the resonance frequency f0.
  • the driving frequency may be changed by a preset frequency interval f_interval according to the controller 1500 .
  • the controller 1500 uses a clock source having a clock frequency of 400 MHz to change the frequency
  • the frequency interval may be about 0.04 MHz.
  • the RF generator 1000 may have a frequency control resolution of about 1%.
  • the driving frequency may be set to the first driving frequency f1 or the second driving frequency f2 through digital frequency control.
  • the first driving frequency f1 and the second driving frequency f2 may be understood as frequencies closest to the resonance frequency f0 when the frequency interval is considered.
  • a resonance frequency f0 exists between the first driving frequency f1 and the second driving frequency f2
  • the first driving frequency f1 and the second driving frequency f2 may be spaced apart by a frequency interval. have.
  • the inverter 1300 when the inverter 1300 operates at the first driving frequency f1 or the second driving frequency f2, the voltage applied to the load and the current flowing to the load may satisfy the in-phase recognition condition.
  • Each of the driving frequencies may have a corresponding delay time.
  • the first delay time td1 may correspond to the first driving frequency f1
  • the second delay time td2 may correspond to the second driving frequency f2 .
  • the delay time may mean a delay time between a voltage applied to the load and a flowing current when an AC power having a corresponding driving frequency is applied to the load.
  • the delay time may be a value obtained by the phase detector 1510 .
  • the delay time may be calculated using the resonance frequency f0 or obtained using a lookup table.
  • the RF generator 1000 may adjust the driving frequency of the AC power applied to the load so that the phase difference between the current and the voltage of the load is reduced.
  • the digital frequency control method ( S1000 ) is used, power loss from the load can be reduced, thereby increasing plasma induction efficiency and reducing damage to the plasma generator 3000 .
  • Digital frequency control is convenient to use by quickly setting a specific frequency as the driving frequency and can be implemented with relatively few configurations.
  • efficiency may be lowered, and thus high-resolution frequency control may be required.
  • FIG. 7 is a diagram related to the structure of the RF generator 1000 for high-resolution frequency control according to an embodiment of the present specification.
  • the RF generator 1000 may include an inverter 1300 , a sensor module 1400 , and a controller 1500 .
  • the contents described in FIG. 4 may be applied as they are unless otherwise specified.
  • the controller 1500 may include a phase detector 1510 , a PWM generator 1520 , a switching circuit 1530 , and a time delay unit 1540 .
  • the phase detector 1510 and the PWM generator 1520 may be applied as described in FIG. 4 unless otherwise specified.
  • the phase detector 1510 may acquire current phase data and voltage phase data.
  • the phase detector 1510 may obtain current phase data from the sensor module 1400 and voltage phase data from the switch signal.
  • the phase detector 1510 may obtain a delay time by using the current phase data and the voltage phase data and provide it to at least one of the PWM generator 1520 and the time delay unit 1540 .
  • the phase detector 1510 may acquire delay times at a plurality of time points.
  • the PWM generator 1520 may generate a switch signal based on the delay time and provide it to the inverter 1300 .
  • the PWM generator 1520 may set a driving frequency based on the delay time, generate a switch signal so that the inverter 1300 operates at the set driving frequency, and provide it to the inverter 1300 .
  • the PWM generator 1520 may be electrically connected to the switching circuit 1530 .
  • the PWM generator 1520 may provide a switch signal to the inverter 1300 through the switching circuit 1530 .
  • the switching circuit 1530 may be electrically connected to the PWM generator 1520 or the time delay unit 1540 and electrically connected to the inverter 1300 and the phase detector 1510 .
  • the switching circuit 1530 may change the configuration electrically connected to the inverter 1300 from the PWM generator 1520 to the time delay unit 1540 or change the time delay unit 1540 to the PWM generator 1520 .
  • the time delay unit 1540 may delay and output the input signal.
  • the time delay unit 1540 may delay the signal obtained from the sensor module 1400 and provide it to the inverter 1300 .
  • the time delay unit 1540 obtains a signal corresponding to the current phase data from the sensor module 1400 , delays it by a preset time, and passes the first to fourth switches S1 and S2 through the switching circuit 1530 . , S3, S4) can be provided.
  • the preset time may indicate the degree to which the time delay unit 1540 delays the signal.
  • the preset time may mean an initial delay time set based on a delay time between voltage and current.
  • the preset time may mean a time obtained by adding or subtracting a time interval (t_interval) determined according to the characteristics of the RF generator 1000 to a time delayed from a previous time point.
  • the time interval may be set to 2.5 ns, which is the reciprocal of the clock frequency, when the signal is delayed using a clock source having a clock frequency of 400 MHz in the RF generator 1000 .
  • the initial delay time may indicate the degree to which a signal input from the time delay unit 1540 is delayed when the time delay unit 1540 is electrically connected to the inverter 1300 by the switching circuit 1530 .
  • the time delay unit 1540 may obtain an initial delay time from the phase detector 1510 . The initial delay time will be described in detail later.
  • FIG. 8 is a diagram related to a high-resolution frequency control method ( S2000 ) according to an embodiment of the present specification.
  • FIG. 9 is a diagram illustrating a driving frequency adjusted according to high-resolution frequency control according to an embodiment of the present specification.
  • the high-resolution frequency control method ( S2000 ) includes the steps of controlling the driving frequency using the digital frequency control method ( S2100 ), obtaining an initial delay time ( S2200 ), and switching to the analog frequency control method (S2300), applying the delayed signal to the inverter 1300 based on the initial delay time (S2400), obtaining the current and voltage phase data and the delay time (S2500) and the inverter 1300 based on the delay time It may include the step of applying the delayed signal (S2600).
  • the RF generator 1000 may control the driving frequency by using the digital frequency control method (S1000) (S2100).
  • the RF generator 1000 may apply AC power having a specific driving frequency to the load using the digital frequency control method S1000 described above.
  • the RF generator 1000 may increase or decrease the driving frequency based on the phase difference between the voltage applied to the load and the flowing current, and may provide AC power having the increased or decreased driving frequency to the load.
  • the driving frequency changed by the RF generator 1000 may be a first driving frequency f1 or a second driving frequency f2 close to the variable resonance frequency f0 of the load.
  • the RF generator 1000 may acquire an initial delay time ( S2200 ). For example, the RF generator 1000 may acquire a delay time corresponding to a driving frequency close to the resonant frequency f0 of the load as the initial delay time. Specifically, referring back to FIG. 9 , the RF generator 1000 applies an AC power having a first driving frequency f1 to a load according to digital frequency control and a first delay corresponding to the first driving frequency f1 Time td1 may be obtained as an initial delay time. Alternatively, the RF generator 1000 applies the AC power having the second driving frequency f2 to the load according to the digital frequency control and sets the second delay time td2 corresponding to the second driving frequency f2 to the initial delay time. can be obtained with
  • the initial delay time may be obtained from the phase detector 1510 and stored in a memory.
  • the initial delay time may be calculated based on the delay time obtained by the phase detector 1510 .
  • the RF generator 1000 may switch the frequency control method from digital frequency control to analog frequency control (S2300).
  • the RF generator 1000 may switch the frequency control method by changing the configuration electrically connected to the inverter 1300 using the switching circuit 1530 from the PWM generator 1520 to the time delay unit 1540 .
  • the analog frequency control may refer to a frequency control method using a time delay unit 1540 to be described later. Specifically, by using the analog frequency control, it is possible to reduce the phase difference between the voltage and the current by delaying or shortening at least one of the phases of the voltage applied to the load and the flowing current.
  • the RF generator 1000 may apply the delayed signal to the inverter 1300 based on the initial delay time (S2400).
  • the time delay unit 1540 may delay the input signal by an initial delay time and output it. Specifically, the time delay unit 1540 may obtain current phase data from the sensor module 1400 , and may provide a signal obtained by delaying the current phase data by an initial delay time to the inverter 1300 .
  • the RF generator 1000 When the RF generator 1000 applies the delayed signal to the inverter 1300 based on the initial delay time, more accurate frequency control can be performed and the plasma system 100 can be prevented from malfunctioning. Specifically, when the RF generator 1000 uses an arbitrary delay time other than the initial delay time, the RF generator 1000 may provide the load with AC power having a driving frequency significantly separated from the resonance frequency f0 to the load, Since sufficient power is not provided inside the plasma generator 3000 , it may be difficult to form or maintain plasma.
  • the RF generator 1000 uses the time delay unit 1540 in the region adjacent to the resonance frequency f0 using the Analog frequency control can be performed.
  • the RF generator 1000 may acquire current and voltage phase data and a delay time (S2500).
  • the phase detector 1510 obtains the current phase data from the sensor module 1400 , obtains the voltage phase data from the time delay unit 1540 , obtains a delay time between the voltage and the current, and transmits it to the time delay unit 1540 .
  • S2500 a delay time
  • the time delay unit 1540 may apply a delayed signal to the inverter 1300 based on the delay time (S2600). For example, when the acquired delay time does not satisfy the second in-phase recognition condition, the time delay unit 1540 may delay the current phase data by a time longer or shorter than the initial delay time and provide it to the inverter 1300 . . Specifically, when the acquired delay time is smaller than the second in-phase recognition condition, the time delay unit 1540 may delay the current phase data by a time shorter than the initial delay time and provide it to the inverter 1300 . Alternatively, when the acquired delay time is greater than the second in-phase recognition condition, the time delay unit 1540 may delay the current phase data by a time longer than the initial delay time and provide it to the inverter 1300 .
  • the current phase data may mean a current phase signal. Accordingly, when the time delay unit 1540 provides the delayed or reduced current phase signal to the inverter 1300 , the phase difference between the voltage applied to the load and the flowing current may be reduced compared to the previous time point.
  • the second in-phase recognition condition may be the same as or different from the first in-phase recognition condition used in digital frequency control.
  • the second in-phase recognition condition may be set in the same way as the method in which the above-described first in-phase recognition condition is set.
  • the time delay unit 1540 may delay the input signal by a preset time interval longer or shorter than the delay time at a previous point in time to provide it to the inverter 1300 . For example, if the time delay unit 1540 delays the current phase signal by the first time at the first time point, at the second time point after the first time point, the current phase signal is delayed for the second time by adding the time interval to the first time. The delay may be provided to the inverter 1300 . For another example, if the time delay unit 1540 delays the current phase signal by the first time at the first time point, at the second time point after the first time point, the current phase signal is the second time by subtracting the time interval from the first time. may be provided to the inverter 1300 by delay.
  • the resolution may be determined in frequency control according to a time interval set in the RF generator 1000 .
  • the resolution of the analog frequency control may be higher than that of the digital frequency control.
  • the high resolution frequency control method S2000 may omit the digital frequency control method S1000 , obtain an initial delay time using a lookup table stored in a memory, and perform analog frequency control using this.
  • the RF generator 1000 controls the inverter 1300 based on the driving frequency set according to the high-resolution frequency control, but detects that the resonant frequency of the load is changed by maintaining the plasma and repeats the above-described high-resolution frequency control method (S2000) again Thus, the inverter 1300 may be operated at a different driving frequency than the existing one.
  • the driving frequency of the AC power applied to the load may be precisely controlled close to the time-varying resonant frequency f0 of the load according to the high-resolution frequency control.
  • the RF generator 1000 may control the driving frequency to the first driving frequency f1 or the second driving frequency f2 close to the resonant frequency f0 by using the digital frequency control method S1000.
  • the RF generator 1000 may control the frequency in the resonance frequency f0 direction at the first driving frequency f1 or the second driving frequency f2 through analog frequency control.
  • the controlled driving frequency may be increased or decreased as much as corresponding to a specific time interval t_interval.
  • the delay time between the voltage applied to the load and the flowing current may be gradually reduced.
  • the delay time between the voltage and current of the load is changed from the first delay time td1 to the third delay time td3. It may be changed by the time interval (t_interval).
  • the third delay time td3 may include a value closer to 0 ns than the first delay time td1 or an integer multiple of a period that is an inverse number of the driving frequency. That is, the third delay time td3 may indicate that the delay time or phase difference between the voltage and the current of the load is relatively reduced.
  • FIG. 10 is a diagram illustrating a change in a current and a voltage phase difference of a load according to high-resolution frequency control according to an embodiment of the present specification.
  • the voltage V_RF applied to the load and the current I_RF flowing may not have the same phase.
  • the switch in the inverter 1300 may be damaged by operating in a state in which a voltage is applied or in a state in which current flows.
  • the RF generator 1000 may control the voltage applied to the load and the flowing current to have a phase difference of the first delay time td1 through high-resolution frequency control.
  • the AC power applied to the load may be controlled by the first driving frequency f1
  • the phase of the current flowing in the load is the voltage applied to the load. It may be ahead of the phase of by the first delay time td1.
  • the phases of the voltage and current of the load may be controlled to be substantially the same.
  • the RF generator 1000 delays the phase signal of the current flowing in the load by a preset time (eg, a time in which the first delay time td1 is increased or decreased by the time interval dt) to the inverter 1300 ) to reduce the current and voltage phase difference of the load.
  • the switch in the inverter 1300 operates as ZVS (Zero Voltage Switching) operating in a state in which no voltage is applied and nearly ZCS (Zero Current Switching) operating in a state in which almost no current flows, thereby preventing switch damage to plasma
  • ZVS Zero Voltage Switching
  • ZCS Zero Current Switching
  • FIG. 11 is a diagram related to the structure of the RF generator 1000 for fine frequency control according to an embodiment of the present specification.
  • the RF generator 1000 may include an inverter 1300 , a sensor module 1400 , a controller 1500 , and a voltage detector 1600 .
  • the configuration of the RF generator 1000 is disclosed in advance that the contents described in FIG. 4 may be equally applied.
  • the voltage detector 1600 may detect an electrical property of the load.
  • the voltage detector 1600 may measure the magnitude of the voltage of the load in real time or periodically. Specifically, the voltage detector 1600 may obtain voltage data by measuring a voltage of at least a portion of the antenna structure 2000 .
  • the voltage detector 1600 is electrically connected to at least one of the first to third antennas 2100, 2200, and 2300 to measure a voltage applied to both ends of the antenna or a voltage to a ground node.
  • the voltage detector 1600 may measure a voltage applied to both ends of the innermost first antenna 2100 with respect to the plasma generator 3000 or a voltage at a specific point with respect to the ground.
  • the voltage detector 1600 may measure all voltage values of each of the first to third antennas 2100 , 2200 , and 2300 .
  • the voltage data may include a voltage value detected from the time when the RF generator 1000 is operated or a voltage value detected in a specific time period.
  • the voltage data may include voltage values measured from a point in time when a phase difference between a voltage applied to a load and a current flowing through the load is within a range recognized as substantially the same phase.
  • the voltage detector 1600 may store the measured electrical properties of the load in a memory or provide it to the controller 1500 .
  • the voltage detector 1600 may provide voltage data measured by at least a part of the antenna structure 2000 to the PWM generator 1520 or store it in a memory.
  • the controller 1500 may obtain antenna voltage data from the voltage detector 1600 .
  • the PWM generator 1520 may obtain voltage data from the voltage detector 1600 .
  • the controller 1500 may perform fine frequency control using voltage data.
  • the PWM generator 1520 may generate a switch signal based on voltage data and provide it to the inverter 1300 as will be described later. Specifically, the PWM generator 1520 may generate a switch signal so that the frequency of the AC power applied to the load becomes the driving frequency corresponding to the lowest antenna voltage with reference to the voltage data and provide it to the inverter 1300 .
  • the RF generator 1000 uses the current size of the load or the amount of power consumed by the load.
  • fine frequency control can be performed.
  • the RF generator 1000 may use the current or voltage measured at the input or output terminal of the inverter 1300 to calculate the power consumed by the inverter 1300 or the load, and use it as a measure of fine frequency control.
  • FIG. 12 is a diagram related to a fine frequency control method ( S3000 ) according to an embodiment of the present specification.
  • the fine frequency control method includes the steps of obtaining a delay time between current and voltage (S3100), obtaining voltage data (S3200), and controlling the driving frequency using the delay time (S3100).
  • S3300 determining an in-phase region recognized as in-phase based on the delay time (S3400), selecting a final sustain frequency in the in-phase region based on voltage data (S3500), and based on the final sustain frequency It may include providing a switch signal to the inverter 1300 (S3600).
  • the RF generator 1000 may obtain a delay time between the current and the voltage (S3100).
  • the phase detector 1510 obtains the current phase data of the load from the sensor module 1400 as described elsewhere in this specification, and obtains the voltage phase data of the load from the PWM generator 1520 to obtain the current and voltage of the load. can be obtained with a delay time of
  • the RF generator 1000 may acquire voltage data (S3200).
  • the voltage detector 1600 may obtain voltage data by measuring a voltage value of at least a portion of the antenna structure 2000 .
  • the RF generator 1000 may store the acquired voltage data in the PWM generator 1520 or a memory.
  • the voltage data obtained here may be stored in association with at least one of a delay time between current and voltage and a corresponding driving frequency.
  • the RF generator 1000 may control the driving frequency using the delay time (S3300).
  • the PWM generator 1520 generates a switch signal to apply AC power having a frequency closer to the resonant frequency f0 of the load to the load based on the delay time as described in another part of this specification. It may be provided to the inverter 1300 .
  • the RF generator 1000 may determine an in-phase region recognized as in-phase based on the delay time ( S3400 ). For example, when the obtained delay time satisfies the first in-phase recognition condition, the RF generator 1000 may acquire a range of a corresponding driving frequency as an in-phase region. Specifically, the RF generator 1000 continuously decreases the driving frequency to detect the delay time, and the detected delay time is from the driving frequency that satisfies the first in-phase recognition condition to the driving frequency that does not satisfy the in-phase region. can decide
  • the in-phase region may mean a range of time to delay so that the phases of the voltage and current of the load are recognized as substantially in-phase.
  • the in-phase region is in advance in which the time delay unit 1540 delays the current phase signal. It can be understood as a range of a set time.
  • the RF generator 1000 may further include a switching circuit 1530 and a time delay unit 1540, and each preset time is stored in a memory or time delay unit 1540 together with a corresponding voltage value.
  • the fine frequency control method S3000 may be used in at least one of the digital frequency control method and the analog frequency control method. .
  • the above-described fine frequency control method S3000 may be used in consideration of the voltage of the load.
  • the fine frequency control method ( S3000 ) can be used only when it is not used in digital frequency control and is converted to analog frequency control by the switching circuit 1530 .
  • the fine frequency control method S3000 may be used in both digital frequency control and analog frequency control.
  • the RF generator 1000 may select a final sustain frequency in the in-phase region based on the voltage data ( S3500 ). For example, the controller 1500 may select a driving frequency associated with the lowest voltage value in the in-phase region as the final sustain frequency. Alternatively, the controller 1500 may select a driving frequency associated with the smallest delay time in the in-phase region as the final sustain frequency. At this time.
  • the controller 1500 may store data received from the voltage detector 1600 in all frequency sections and use it to select a final sustain frequency. Alternatively, the controller may receive only voltage data in the in-phase region from the voltage detector 1600 and use it for final sustaining frequency selection.
  • the controller 1500 may provide a switch signal to the inverter 1300 based on the final sustain frequency (S3600).
  • the PWM generator 1520 may generate a switch signal so that the frequency of the AC power applied to the load becomes the final maintenance frequency and provide it to the inverter 1300 .
  • the time delay unit 1540 delays the current phase signal by a corresponding preset time so that the frequency of the AC power applied to the load becomes the final maintenance frequency. It may be provided to the inverter 1300 .
  • the RF generator 1000 controls the driving frequency using the delay time in the first section, and uses the first in-phase recognition condition or the second in-phase recognition condition to A phase region may be determined, a final sustain frequency may be selected based on voltage data, and AC power having a final sustain frequency may be applied to the load in the second section.
  • the RF generator 1000 controls the inverter 1300 based on the final sustain frequency according to the fine frequency control, but detects that the resonance frequency of the load is changed according to the plasma maintenance and repeats the above-described fine frequency control method (S3000) again Thus, the inverter 1300 may be operated at a final sustain frequency different from the existing one.
  • FIG. 13 is a diagram illustrating a phase difference between a voltage and a current of a load according to a fine frequency control according to an embodiment of the present specification.
  • the RF generator 1000 operates the inverter 1300 at the start frequency f_start at the start of plasma induction, and operates the inverter 1300 at the final maintenance frequency after a certain time has elapsed according to the fine frequency control. can do it
  • the start frequency f_start may be set based on an existing database or set arbitrarily as described in another part of this specification.
  • the RF generator 1000 may perform fine frequency control to determine an in-phase region including the first to fourth driving frequencies f1, f2, f3, and f4.
  • the in-phase region may indicate a phase difference range in which plasma formation or maintenance is easy.
  • the in-phase region may include -5ns to 20ns or may be set to a partial interval within the interval of -5ns to 20ns.
  • the first to fourth driving frequencies f1, f2, f3, and f4 may satisfy the first in-phase recognition condition or the second in-phase recognition condition. For example, when AC power having the first to fourth driving frequencies f1, f2, f3, and f4 is applied to the load, the phase difference between the voltage and current of the load is the first in-phase recognition condition or the second in-phase recognition condition can be satisfied
  • the RF generator 1000 may acquire voltage data including voltage values corresponding to the first to fourth driving frequencies f1, f2, f3, and f4. To this end, the RF generator 1000 may store a delay time or voltage value measured when the inverter 1300 is driven at the first to fourth driving frequencies f1, f2, f3, and f4 in association with the corresponding driving frequency.
  • the RF generator 1000 may select a final sustain frequency from among the first to fourth driving frequencies f1, f2, f3, and f4. Referring back to FIG. 13 , since the voltage value associated with the second driving frequency f2 is the lowest, the RF generator 1000 selects the second driving frequency f2 as the final sustaining frequency, and uses the inverter as the final sustaining frequency. (1300) can be operated. Meanwhile, the RF generator 1000 may operate the inverter 1300 as the final sustain frequency by selecting the third driving frequency f3 having the smallest associated delay time as the final sustain frequency.
  • the plasma system 100 continuously tracks the resonant frequency f0 of the load for plasma induction and maintenance, and the RF generator 1000 may control the driving frequency of the inverter 1300. have.
  • the RF generator 1000 is required to quickly and stably control the inverter 1300 .
  • the switch signal may be exposed to switching noise. Accordingly, a signal transmission method insensitive to switching noise is required.
  • FIG. 14 is a diagram illustrating a switch signal transmission/reception scheme using an amplifier and an attenuator according to an embodiment of the present specification.
  • the PWM generator 1520 may provide a switch signal to the inverter 1300 through the voltage amplifier 1710 and the voltage attenuator 1720 .
  • the contents described in other parts of the present specification may be applied in the same manner, and thus overlapping contents will be omitted.
  • the PWM generator 1520 may send a switch signal to the voltage amplifier 1710 .
  • the switch signal may include a specific voltage value indicating turn-on/turn-off of a switch in the inverter 1300 .
  • the switch signal may include 5V indicating turn-on and 0V indicating turn-off.
  • the inverter 1300 receiving the switch signal may have a switch threshold voltage.
  • the switch threshold voltage may be used as a reference by which a switch in the inverter 1300 is turned on or turned off.
  • the switch in the inverter 1300 may have a threshold voltage between about 2V and 3V, and the switch is turned off when receiving a signal lower than the threshold voltage and is higher than the threshold voltage. It can be turned on when it receives a high signal.
  • the switching noise is applied to the switch signal to be higher or lower than the threshold voltage, there is a problem that the inverter 1300 may malfunction.
  • the voltage amplifier 1710 may be electrically connected to the PWM generator 1520 to obtain a switch signal from the PWM generator 1520 .
  • the voltage amplifier 1710 may amplify the acquired switch signal.
  • the voltage amplifier 1710 may amplify a switch signal of 5V to 12V.
  • the voltage amplifier 1710 may be electrically connected to the voltage attenuator 1720 . Specifically, the voltage amplifier 1710 may be electrically connected to the voltage attenuator 1720 through a conductive wire, and switching noise may occur depending on the length and arrangement position of the conductive wire.
  • the voltage attenuator 1720 may receive the switch signal amplified from the voltage amplifier 1710 .
  • the voltage attenuator 1720 may attenuate the received switch signal.
  • the voltage attenuator 1720 may attenuate the amplified switch signal of 12V to 5V.
  • the voltage attenuator 1720 may have an attenuator threshold voltage.
  • the attenuator threshold voltage may be a criterion for determining whether the voltage attenuator 1720 outputs the received switch signal as either a signal indicating turn-on or a signal indicating turn-off.
  • the attenuator threshold voltage may be set to exceed or not exceed the threshold voltage even when switching noise is applied to the switch signal. For example, when the voltage attenuator 1720 receives the switch signal amplified by 12V and the switching noise is applied to the switch signal, the magnitude of the noise superimposed on the switch signal increases or decreases by about 3V, the attenuator threshold voltage is 3V to 9V can be set between
  • the attenuator threshold voltage may be set higher than the switch threshold voltage. Accordingly, the voltage attenuator 1720 may receive the noise-applied switch signal, remove the noise, and provide it to the inverter 1300 .
  • 15 is a diagram illustrating a switch signal transmission/reception method using an optical converter according to an embodiment of the present specification.
  • the PWM generator 1520 may provide a switch signal to the inverter 1300 through the voltage-to-optical converter 1730 and the optical-to-voltage converter 1740 .
  • the contents described in FIG. 14 may be applied in the same manner, and thus overlapping contents will be omitted.
  • the voltage-to-optical converter 1730 may receive the switch signal from the PWM generator 1520 , convert it into an optical signal, and provide it to the optical-to-voltage converter 1740 .
  • the optical-to-voltage converter 1740 may receive an optical signal from the voltage-to-optical converter 1730 , convert the optical signal into a voltage signal corresponding to the switch signal, and provide it to the inverter 1300 .
  • the voltage-to-optical converter 1730 and the optical-to-voltage converter 1740 may be connected by an optical fiber to transmit/receive an optical signal through optical communication.
  • optical communication can fundamentally block switching noise.
  • a stable signal transmission/reception method has been mainly described in a method in which the RF generator 1000 controls the inverter 1300 through the PWM generator 1520, but the technical spirit of the present specification is not limited thereto.
  • the above-described signal transmission/reception method may be similarly applied to a frequency control method using the PWM generator 1520 and the time delay unit 1540 described in other parts of the present specification.
  • the voltage amplifier 1710 described in FIG. 14 and the voltage-optical converter 1730 described in FIG. 15 are at least one of the PWM generator 1520, the time delay unit 1540 and the switching circuit 1530. can be connected
  • the RF generator 1000 may control the inverter 1300 through the signal transmission/reception method described with reference to FIGS. 14 and 15 . Using this signal transmission/reception method, the RF generator 1000 can minimize the influence of switching noise, thereby preventing damage to the RF generator 1000 and enabling stable frequency control.
  • the method according to the embodiment may be implemented in the form of program instructions that can be executed through various computer means and recorded in a computer-readable medium.
  • the computer-readable medium may include program instructions, data files, data structures, etc. alone or in combination.
  • the program instructions recorded on the medium may be specially designed and configured for the embodiment, or may be known and available to those skilled in the art of computer software.
  • Examples of the computer-readable recording medium include magnetic media such as hard disks, floppy disks and magnetic tapes, optical media such as CD-ROMs and DVDs, and magnetic such as floppy disks.
  • - includes magneto-optical media, and hardware devices specially configured to store and carry out program instructions, such as ROM, RAM, flash memory, and the like.
  • Examples of program instructions include not only machine language codes such as those generated by a compiler, but also high-level language codes that can be executed by a computer using an interpreter or the like.
  • the hardware devices described above may be configured to operate as one or more software modules to perform the operations of the embodiments, and vice versa.

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Inverter Devices (AREA)

Abstract

L'invention concerne un dispositif de commande de fréquence destiné à fournir une puissance à une charge par commande d'une fréquence pour qu'elle corresponde à une fréquence de résonance variable de la charge. Le dispositif de commande de fréquence selon l'invention comprend : un onduleur destiné à convertir une puissance en courant continu en une puissance en courant alternatif dotée d'une fréquence de commande, et à appliquer la puissance convertie à une charge; un capteur destiné à obtenir un temps de retard indiquant une différence de phase entre une tension et un courant de la charge, à une pluralité de points temporels; un générateur PWM destiné à fournir à l'onduleur un signal de commutation correspondant à une deuxième fréquence de commande, différente d'une première fréquence de commande, la différence équivalant à une fréquence prédéfinie, en fonction d'un premier temps de retard au niveau de la charge; et une partie temporisation destinée à réduire la différence de phase entre la tension et le courant de la charge, plutôt que d'appliquer une deuxième puissance en courant alternatif à la charge par fourniture à l'onduleur d'un signal de commutation correspondant à une troisième puissance en courant alternatif qui est différente, selon une phase prédéfinie, de la deuxième puissance en courant alternatif dotée de la deuxième fréquence de commande, en fonction du deuxième temps de retard au niveau de la charge.
PCT/KR2021/005746 2020-05-08 2021-05-07 Procédé de commande de fréquence permettant de commander précisément une fréquence, et dispositif de commande de fréquence le mettant en oeuvre WO2021225411A1 (fr)

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CN115598420B (zh) * 2022-12-16 2023-03-10 杭州飞仕得科技股份有限公司 一种计算相位延迟时间的方法、装置、设备及存储介质

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JP2003077893A (ja) * 2001-08-31 2003-03-14 Kem Kk プラズマリアクター
JP2007305592A (ja) * 2007-05-25 2007-11-22 Hitachi Kokusai Electric Inc 周波数整合器
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