KR102409459B1 - A large X-RAY Generator - Google Patents

Abstract

The present invention relates to a large-area X-ray generator, comprising: a vacuum chamber including first and second openings on which a target and a window are seated; and an integrated electron beam emitting module that is drawn in and out through the second opening In the X-ray generator, the integrated electron beam emitting module has a receptacle connected to an external power source at one end and electrically connected to an electron beam emitting device at the other end, an electron beam generating device emitting an electron beam to the target, a cathode plate and a gate of the electron beam emitting device and a support for fixing the electron beam emitting device to the receptacle while electrically connecting the plates to the receptacle, and a coupling portion seated in the second opening. According to such a large-area X-ray generator, the electron beam generator is coupled to and from the vacuum chamber so that the electron beam generator can be withdrawn as needed. Because only the generator can be newly replaced, the performance degradation of the large-area X-ray generator can be prevented, and the area of the CNT emitter, target, and window are formed to be wide, so that X-rays are emitted from the X-ray generator in a large area, When the sample is inspected, the resolution is improved, and the target and window are detachably combined from the vacuum chamber. Therefore, when the life of the target and window expires or the performance deteriorates due to a problem in the target and window, a new target and window It can be replaced with an X-ray generator to prevent deterioration of the performance of a large-area X-ray generator, and various types of targets and windows, i.e., targets and windows for generating X-rays, fluorescent plates and windows for emitting light, and electrons are installed in the vacuum chamber. Various functions can be performed by attaching and detaching the thin film and the window for emitting.

Description

Large area X-ray generator {A large X-RAY Generator}

The present invention relates to a large-area X-ray generator, and more particularly, to a large-area X-ray generator comprising a vacuum chamber and an electron beam generator accommodated in the vacuum chamber, wherein the electron beam generator is easily detachable from the vacuum chamber It's about the device.

In general, an X-ray generator (tube) is widely used by being applied to various inspection devices or diagnostic devices, such as for medical diagnosis, non-destructive testing, or chemical analysis.

The X-ray tube is divided into a hot cathode method using a filament and a cold cathode method using a nanostructure such as CNT (Carbon Nano Tube).

In the hot cathode method, X-rays are generated when electrons emitted from the filament collide with a target formed on the anode electrode, and in the cold cathode method, electrons emitted from nanostructures such as CNTs collide with a target formed on the anode electrode. X-rays are generated.

In the conventional hot cathode and cold cathode X-ray tubes, a cathode electrode and an anode electrode in which nanostructures such as filaments or CNTs are formed to maintain an internal vacuum are combined in an insulating case by sealing a glass tube or ceramic brazing.

However, in the conventional X-ray tube, it is impossible to replace only the cathode electrode even if the performance of the nanostructure such as the filament or CNT that emits electrons is deteriorated or destroyed due to the deterioration of the vacuum state due to the gas generated inside the X-ray tube, etc., and the use for a long time. There is a growing problem with this.

In addition, the conventional X-ray tube has a problem in that it is impossible to replace a cathode electrode on which a nanostructure such as a filament or CNT emitting electrons is formed, so that an X-ray tube must be purchased according to the performance of the required X-ray tube.

In addition, since the area of an emitter emitting electrons is inevitably small in the conventional X-ray tube, X-rays in the form of a point light source are irradiated to make it impossible to generate large-area X-rays, or there is a problem in that a plurality of X-ray tubes must be disposed. However, disposing a plurality of X-ray tubes also has a problem in that it is impossible to avoid the non-uniformity of the X-ray dose in the area where the cone beam type X-rays overlap and the area that does not overlap. Due to this, a decrease in the resolution of the subject may appear.

Therefore, the present invention is made in consideration of such a problem, and it is possible to easily separate and combine the electron beam generator from the vacuum chamber, so that the efficiency of the X-ray generator can be maintained, and the area where X-rays are emitted from the X-ray tube is widened to avoid A large-area X-ray generator capable of improving the resolution of a specimen is provided.

A large-area X-ray generator according to one aspect of the present invention includes a vacuum chamber including a first opening and a second opening in which a target and a window are seated, and an integrated electron beam emitting module that is drawn in and out through the second opening. In the X-ray generator, the integrated electron beam emitting module has a receptacle connected to an external power source at one end and electrically connected to an electron beam emitting device at the other end, an electron beam generating device emitting an electron beam to the target, a cathode plate and a gate of the electron beam emitting device and a support for fixing the electron beam emitting device to the receptacle while electrically connecting the plates to the receptacle, respectively, and a coupling portion seated in the second opening.

The large-area X-ray generator may further include a turbo pump and a rotary pump for creating a vacuum inside the vacuum chamber.

The large-area X-ray generator may be coupled to the target and the window to be detachably attached.

The electron beam generator of a large-area X-ray generator according to another aspect of the present invention includes a cathode plate, a CNT printed electrode substrate coupled to the cathode plate on the cathode plate, a CNT emitter formed on the CNT printed electrode substrate, and the A cathode plate insulating connection part formed to surround the CNT printed electrode substrate and the CNT emitter, an insulating spacer formed on the cathode plate insulating connection part, a gate plate insulating connection part formed on the insulating spacer and coupled to the insulating spacer, the and a gate mesh coupled to the gate insulating connection part on the gate plate insulating connection part and formed on the gate plate and the gate plate.

The gate plate includes a first region extending in a horizontal direction from an upper portion of the gate plate insulating connection portion and a second region extending vertically from the first region in a direction to the cathode plate, wherein the second region is insulated from the gate plate The connection part, the insulating spacer, and the cathode plate insulating connection part are formed inside, and the second region includes the gate insulating connection part and the insulating spacer and extends to a length covering at least a part of the cathode plate insulating connection part, and the second region The region may be formed with an area larger than that of the CNT printed electrode substrate.

The cathode plate may be formed with a receiving groove capable of accommodating the CNT printed electrode substrate.

According to such a large-area X-ray generator, the electron beam generator is coupled to and from the vacuum chamber so that the electron beam generator can be withdrawn as needed. Since only the generator can be newly replaced, it is possible to prevent deterioration of the performance of the large-area X-ray generator.

In addition, since the area of the CNT emitter, the area of the target, and the window are formed to be large, and X-rays are emitted from the X-ray generator to a large area, the resolution is improved when the inspection of the subject is performed.

In addition, since the target and the window are detachably coupled from the vacuum chamber, the target and window can be replaced with a new target and window when the lifespan of the target and window expires or the performance is deteriorated due to a problem in the target and window, generating large-area X-rays Degradation of device performance can be prevented.

In addition, various functions can be performed by attaching and detaching various types of targets and windows to the vacuum chamber, that is, targets and windows for generating X-rays, fluorescent plates and windows for emitting light, and thin films and windows for emitting electrons. have.

1 is a cross-sectional view of a large-area X-ray generator according to an embodiment of the present invention.
2 is a block diagram of a vacuum chamber and a pump according to an embodiment of the present invention.
3 and 4 are views illustrating a connection structure of a receptacle, an electron beam emitting device, a support, and a coupling part as an integrated electron beam emitting module that is formed to be easily withdrawn from and into a vacuum chamber according to an embodiment of the present invention.
5 and 6 are cross-sectional views of an electron beam emitting device according to an embodiment of the present invention.

The features and effects of the present invention described above will become more apparent through the following detailed description in relation to the accompanying drawings, and accordingly, those of ordinary skill in the art to which the present invention pertains can easily implement the technical idea of the present invention. will be able Since the present invention can have various changes and can have various forms, specific embodiments are illustrated in the drawings and described in detail in the text. However, this is not intended to limit the present invention to the specific disclosed form, it should be understood to include all modifications, equivalents and substitutes included in the spirit and scope of the present invention. The terms used in the present application are only used to describe specific embodiments, and are not intended to limit the present invention. The singular expression includes the plural expression unless the context clearly dictates otherwise. In the present application, terms such as “comprise” or “have” are intended to designate that a feature, number, step, operation, component, part, or combination thereof described in the specification is present, and includes one or more other features or It should be understood that the existence or addition of numbers, steps, operations, components, parts, or combinations thereof does not preclude in advance the possibility of addition. Terms such as first, second, etc. may be used to describe various elements, but the elements should not be limited by the terms. The above terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, a first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component. In addition, in the present application, expressions including upper and lower, such as upper, lower, upper, and lower, indicate a relative position with respect to the internal space of the device, rather than a division according to an absolute height.

Hereinafter, with reference to the accompanying drawings, a preferred embodiment of the present invention will be described in more detail.

1 is a cross-sectional view of a large-area X-ray generator according to an embodiment of the present invention, FIG. 2 is a configuration diagram of a vacuum chamber and a pump according to an embodiment of the present invention, and FIGS. 3 and 4 are an embodiment of the present invention An integrated electron beam emitting module that is formed to be easily drawn in and out of a vacuum chamber according to an embodiment, a view showing a connection structure of a receptacle, an electron beam emitting device, a support, and a coupling part, FIGS. 5 and 6 are an embodiment of the present invention It is a cross-sectional view of an electron beam emitting device according to

Referring to FIG. 1 , a large-area X-ray generator 1000 according to an embodiment of the present invention includes a vacuum chamber 100 , a receptacle 200 that can be drawn in and out into the vacuum chamber 100 , and an electron beam generating electron beam. The device 300, the support 400 that electrically connects the electron beam generator 300 with the receptacle 200, and the support 400 that is fixed and supported to the receptacle 200 so that the electron beam generator 300 does not move, and the vacuum chamber 100 It includes a turbo pump 500 and a rotary pump 600 for maintaining the inside in a vacuum.

1 and 2 , the vacuum chamber 100 maintains an internal vacuum state by the turbo pump 500 and the rotary pump 600 . When the inside of the vacuum chamber 100 does not satisfy the vacuum condition, the turbo pump 500 and the rotary pump 600 are driven to maintain the vacuum inside the vacuum chamber 100 .

The vacuum chamber 100 includes a first opening 110 , a target and a window 120 , and a second opening 130 .

As shown in FIG. 1 , the first opening 110 is formed to be positioned above the electron beam generating device 300 in a state in which the electron beam generating device 300 is seated in the vacuum chamber 100 , and the first opening 110 . ), the target and the window 120 are combined.

The target and the window 120 may be coupled to the first opening 110 by brazing, or may be coupled to the first opening 120 by fitting or fastening members such as bolts, nuts, and screws to facilitate attachment and detachment to the first opening 120 . .

When the target and the window 120 are coupled to the first opening 110 by a fastening member such as a fitting, bolt, nut, or screw to facilitate attachment and detachment to the first opening 110 , the target and window 120 and the first opening 110 . A sealing member such as a gasket and an O-ring is formed in at least one to seal the inside of the vacuum chamber 100, and to prevent foreign substances such as air and moisture from entering the vacuum chamber 100 from the outside, and an electron beam generating device ( 300), it is preferable not to leak the electron beam to the outside. Since the target and the window 120 are detachably coupled to the first opening 110 , it is possible to replace the target and/or the window when the lifespan of the target expires and the X-ray generation efficiency decreases or the target and/or the window have defects. ), it is possible to reduce costs by not replacing the whole.

The target and the window 120 generate X-rays from the electron beam emitted from the electron beam generator 300 and emit the X-rays to the outside of the vacuum chamber 100 . In more detail, the target collides with the electron beam emitted from the electron beam generator 300 to generate X-rays, and the window serves to emit the X-rays generated by the collision with the target to the outside of the vacuum chamber 100 .

The area of the target and the window 120 is the same as the area of the electron beam emitting device 300 or is formed to be larger than the area of the electron beam emitting device 300 . Conventionally, the area of the target and the window is formed to be narrow, so that X-rays are emitted in a narrow area, and the emitted X-rays spread widely and reach the subject, resulting in poor resolution. Since the X-rays are emitted over a wide area from the source, the X-rays reach the subject before the X-rays are widely spread, so that resolution can be improved. In addition to the aspect of the X-ray image, it can be utilized in various X-ray application fields, such as static removal using X-rays can be applied to a large area.

The target and the window 120 have a transmissive structure in which a tungsten (W) target is directly coated on the lower surface of the beryllium (Be) window.

The target and window 120 are not limited to the transmissive structure described above, and may be formed in a reflective structure in which the target and the window are separately formed. For example, an anode electrode having a target formed therein may be coupled to the first opening 110 of the vacuum chamber 100 , and a window may be coupled to another portion of the vacuum chamber 100 . A target coupled to the first opening 110 collides with an electron beam emitted from the electron beam generating device 300 to generate X-rays, and a window coupled to another part of the vacuum chamber 100 is generated by collision with the target and , X-rays reflected by the target are emitted to the outside of the vacuum chamber 100 . A position where the window is coupled to the vacuum chamber 100 is formed in a path where the electron beam collides with the target and is reflected, so that X-rays can be emitted to the outside of the vacuum chamber 100 .

Although the target and window 120 coated with tungsten on the lower surface of the beryllium window to generate X-rays have been described above, various types of targets and windows 120 may be coupled to the vacuum chamber 100 . For example, a light emitting plate and a window coated with a phosphor on the lower surface of a transparent window such as glass are combined, and electrons emitted from the electron beam generator 300 collide with a phosphor target to emit light. The electrons that are coupled and emitted from the electron beam generating device 300 are directly emitted to the outside through the window, and may be used for surface treatment of samples such as semiconductors, or may be used for sterilizing food.

The second opening 130 is formed on one surface of the vacuum chamber 100, and through the second opening 130, an integrated electron beam emitting module including a receptacle, an electron beam emitting device, a support and a coupling part can be withdrawn as needed. formed to be

The coupling part is fitted to the vacuum chamber so that the integrated electron beam emitting module can be drawn in and out, and is coupled by fastening members such as bolts, nuts, and screws, and sealing members such as gaskets and O-rings are formed in the vacuum chamber 100 . It is desirable to keep the inside completely sealed, to prevent foreign substances such as air and moisture from entering the vacuum chamber 100 from the outside, and to prevent the electron beam emitted from the electron beam generating device 300 from leaking to the outside.

1 and 3 , the receptacle 200 is connected to the electron beam generator 300 through the support 400 , and the receptacle 200 connected to the electron beam generator 300 is vacuumed through the connection unit 220 . It is coupled to the chamber 100 .

The receptacle 200 is connected to an external terminal unit 210 connected to an external power source (not shown), a coupling unit 220 coupled to the vacuum chamber 100 , a support 400 , and internally connected to an external terminal unit 210 . and an internal terminal unit 230 capable of applying external power to the support 400 .

The external terminal unit 210 includes one or more external terminals (not shown), and the one or more external terminals are connected to an external power source through a power cable or the like to apply power to the large-area X-ray generator 1000 .

The coupling unit 220 seals the vacuum chamber 100 while introducing the integrated electron beam emitting module into the vacuum chamber 100 . The coupling part 220 may be sealed in various ways. For example, the receptacle 200 may be coupled to the vacuum chamber 100 by forming a thread in the coupling portion 220 and the second opening 130 , and the coupling portion 220 may be pressed against the second opening 130 . The receptacle 200 may be coupled to the vacuum chamber 100 by fitting in a fitting manner, and the coupling portion 220 and the second opening 130 may be coupled with a fastening member such as a screw or bolt. A method of coupling the coupling portion 220 and the second opening 130 is not limited to the method described above, and any method may be used as long as it is a method capable of coupling and fixing the receptacle 200 to the vacuum chamber 100 . .

When the coupling part 220 is coupled to the second opening 130 of the vacuum chamber 100, the vacuum inside the vacuum chamber 100 is maintained, and foreign substances such as air and moisture enter the vacuum chamber 100. In order to prevent the electron beam emitted from the electron beam emitting device 300 from being emitted to the outside of the vacuum chamber 100 , a sealing member such as a gasket and an O-ring is installed in at least one of the coupling part 220 and the second opening 130 . can be formed.

The internal terminal part 230 is connected to the external terminal part 210 inside the receptacle 200 to be connected to an external power source.

The internal terminal unit 230 includes a first internal terminal 232 and a second internal terminal 234 , and the first internal terminal 232 is coupled to the first support 410 through the first support 410 . External power is applied to the electron beam generator 300 , and the second internal terminal 234 is coupled to the second support 420 to apply external power to the electron beam generator 300 through the second support 420 . .

1, 3, 4 and 5, the support 400 electrically connects the receptacle 200 and the electron beam generator 300, and the receptacle 200 so that the electron beam generator 300 does not move. ) serves to fix and support the electron beam generating device 300 .

The support 400 includes a first support 410 and a second support 420 , and the first support 410 includes a first internal terminal 232 of the receptacle 200 and a cathode of the electron beam generator 300 . The plate 310 is electrically connected to apply external power to the cathode plate 310 , and the second support 420 includes the second internal terminal 234 of the receptacle 200 and the gate plate of the electron beam generator 300 . 370 is electrically connected to apply an external power to the gate plate 370 .

The first support 410 and the second support 420 not only electrically connect the receptacle 200 and the electron beam generator 300, but also fix and support the electron beam generator 300 to the receptacle 200 so that the electron beam generator 300 does not move. play a role The first support 410 and the second support 420 are formed of a high-strength material so that the electron beam generator 300 is connected to the receptacle 200 and does not move, that is, it does not bend. In the front, the material of the first support 410 and the second support 420 may apply external power to the electron beam generator 300 from the receptacle 200 connected to the external power source, and the electron beam generator 300 is bent. It may be formed of any material as long as it can be fixed and supported without any material. The electron beam generator 300 is fixed and supported by the support 400 , so that when the large-area X-ray tube 1000 is driven, the electron beam is accurately emitted to the target and the window 120 , thereby improving X-ray emission efficiency.

1, 3, 5 and 6 , the electron beam generator 300 receives external power through the receptacle 200 and the support 400 to generate an electron beam.

Electron beam generator 300 includes a cathode plate 310, a carbon nano tube (CNT) printed electrode substrate 320, a CNT emitter 330, a cathode plate insulating connection part 340, an insulating spacer 350, a gate plate insulating It includes a connection part 360 , a gate plate 370 , and a gate mesh 380 .

The cathode plate 310 is positioned above the first support 410 , and is connected to the first support 410 to apply external power. As the cathode plate 310 is coupled to the upper portion of the first support 410 , the electron beam emitting device 300 is firmly fixed and supported by the receptacle 200 . The method of coupling the cathode plate 310 and the first support 410 is not limited to the method described above and may be coupled in various ways. For example, the side of the cathode plate 310 and the side of the first support 410 may be coupled with a fastening member such as a screw or bolt.

The cathode plate 310 may have a receiving groove formed in the center so that the CNT printed electrode substrate 320 is inserted as shown in FIG. The receiving groove may not be formed according to the selection of the operator. When the receiving groove is not formed, the CNT printed electrode substrate 320 is coupled to the upper portion of the cathode plate 310 . The cathode plate 310 and the CNT printed electrode substrate 320 may be combined by various methods. For example, the cathode plate 310 and the CNT printed electrode substrate 320 may be coupled by an adhesive, or may be coupled by a bolt or a screw. The cathode plate 310 and the CNT printed electrode substrate 320 is coupled to the cathode plate 310 in addition to the method described above, any method can be used as long as it is a method capable of fixing the CNT printed electrode substrate 320 .

The CNT printed electrode substrate 320 is coupled to the upper portion of the cathode plate 310 , and the CNT emitter 330 is formed on the CNT printed electrode substrate 320 . The CNT emitter 330 formed on the CNT printed electrode substrate 320 may be formed in a pattern shape in a partial region of the CNT printed electrode substrate 320, and bulk ( It may be formed in a bulk) shape. Since the method of forming the CNT emitter 330 is the same as the method of forming the conventional CNT emitter, a detailed description thereof will be omitted.

The cathode insulating connection part 340 is formed on the cathode plate 310 and is formed to surround the CNT printed electrode substrate 320 and the CNT emitter 330 . The height of the cathode plate insulating connection part 340 is preferably formed higher than the end of the CNT emitter 330 in order to prevent electrons emitted from the CNT emitter 330 from leaking to the outside to improve electron emission efficiency.

The cathode plate insulating connection part 340 may be separately formed and coupled to the cathode plate 310 , or may be integrally formed through injection molding or the like. The cathode plate 310 and the cathode plate insulating connection part 340 may be coupled through various methods such as bonding, bolts, screws, or the like, or brazing.

The insulating spacer 350 is formed between the upper portion of the cathode insulating connection part 340 and the lower part of the gate plate insulating connection part 360 to insulate the cathode plate insulating connection part 340 and the gate plate insulating connection part 360 . Since the cathode plate insulating connection part 340 and the gate plate insulating connection part 360 are insulated through the insulating spacer 350 , the cathode plate 310 and the second support 420 to which external power is applied through the first support 410 . ) through which the gate plate 370 to which external power is applied is insulated.

The insulating spacer 350 is formed of an insulating material such as ceramic, and the insulating spacer 350 may be formed over the entire area of the cathode insulating connecting portion 340 , or may be formed only in a partial region of the cathode plate insulating connecting unit 340 . may be The insulating spacer 350 is used to insulate between the cathode plate insulating connection part 340 and the gate plate insulating connection part 360 , and is formed only in a partial region to insulate the cathode plate insulating connection part 340 and the gate plate insulating connection part 360 . It is preferable to reduce the cost and the like.

The insulating spacer 350 is coupled to the cathode plate insulating connection part 340 and the gate plate insulating connection part 360 . The interlocking spacer 350 may be coupled to the cathode plate insulating connection part 340 and the gate plate insulating connection part 360 through a fastening member such as a press fit, a bolt screw, or the like, or by a method such as brazing.

The gate plate insulating connection part 360 is formed on the insulating spacer 350 and is coupled to the insulating spacer 350 .

The gate plate 370 is formed on the gate plate insulating connection part 360 and is coupled to the gate plate insulating connection part 360 through a fastening member such as bonding, bolts, screws, or the like, or by brazing.

The gate plate 370 includes a first region extending horizontally and coupled to an upper portion of the gate plate insulating connection part 360 , and a second region extending in a vertical direction to the first region. That is, the gate plate 370 is formed in a 'L' shape. In this case, the second region is formed inside the gate plate insulating connection part 360 , the insulating spacer 350 , and the cathode plate insulating connection part 340 , and the second region is formed wider than the CNT emitter substrate 320 .

The second region of the gate plate 370 extends to a length that covers at least a portion of the gate plate insulating connection part 360 and the insulating spacer 350 as well as the cathode plate insulating connection part 340 , and is wider than the CNT printed electrode substrate 320 . It is possible to effectively prevent electrons emitted from the CNT emitter 330 from being emitted to the outside through the insulating spacers 350 formed only in a partial region of the upper portion of the cathode insulating connection part 340 .

The gate mesh 380 is formed at the end of the second region of the gate plate 370 . In the gate mesh 380, a plurality of gate holes (not shown) are formed, and the plurality of gate holes are formed at positions aligned with the pattern in which the CNT emitters 330 formed on the CNT printed electrode substrate 320 are formed. do. By aligning the plurality of gate holes formed in the gate mesh 380 and the CNT emitters 330 formed on the CNT printed electrode substrate 320, electrons emitted from the CNT emitters do not collide with other places and directly through the gate holes The amount of electrons passing through can be increased to improve the efficiency of the emitted electrons.

In the foregoing detailed description of the present invention, although it has been described with reference to preferred embodiments of the present invention, those skilled in the art or those having ordinary knowledge in the art will have the spirit of the present invention described in the claims to be described later. And it will be understood that various modifications and variations of the present invention can be made without departing from the technical scope.

1000: large area X-ray tube 100: vacuum chamber
110: first opening 120: target and window
130: second opening 200: receptacle
210: external terminal 220: coupling part
230: internal terminal 232: first internal terminal
234: second internal terminal 300: electron beam generating device
310: cathode plate 320: CNT printed electrode substrate
330: CNT emitter 340: cathode plate insulation connection
350: insulating spacer 360: gate plate insulating connection part
370: gate plate 380: gate mesh
400: support 410: first support
420: second support 500: turbo pump
600: rotary pump

Claims (6)

a vacuum chamber including first and second openings on which the target and the window are seated;
In the large-area X-ray generator including an integrated electron beam emitting module that is drawn in and out through the second opening,
The integrated electron beam emitting module is
a receptacle having one end connected to an external power source and the other end electrically connected to the electron beam emitting device;
an electron beam generator for emitting an electron beam to the target;
a support for electrically connecting a cathode plate and a gate plate of the electron beam emitting device to the receptacle while fixing the electron beam emitting device to the receptacle; and
and a coupling part seated in the second opening;
The large-area X-ray generator according to claim 1, wherein the target and the window are coupled to the first opening by a fastening member, and a sealing member is formed in at least one of the target, the window, and the first opening. The method of claim 1,
The large-area X-ray generator further comprising a turbo pump and a rotary pump for creating a vacuum inside the vacuum chamber. The method of claim 1,
The large-area X-ray generator, characterized in that the target and the window are detachably coupled. The method of claim 1,
The electron beam generator,
A cathode plate, a CNT printed electrode substrate coupled to the cathode plate on the cathode plate, a CNT emitter formed on the CNT printed electrode substrate, a cathode plate insulation formed to surround the CNT printed electrode substrate and the CNT emitter a connection part, an insulating spacer formed on the cathode insulating connection part, a gate plate insulating connection part formed on the insulating spacer and coupled to the insulating spacer, and the gate plate insulating connection part and the gate plate insulating connection part formed on the gate plate insulating connection part and coupled to the gate plate and a gate mesh formed on the gate plate. 5. The method of claim 4,
The gate plate includes a first region extending in a horizontal direction from an upper portion of the gate plate insulating connection portion and a second region extending vertically from the first region in a direction to the cathode plate,
The second region is formed inside the gate plate insulating connection part, the insulating spacer, and the cathode plate insulating connection part, and the second region includes the gate plate insulating connection part and the insulating spacer, and at least a part of the cathode plate insulating connection part. The large area X-ray generator according to claim 1, wherein the second region is formed to have a larger area than that of the CNT printed electrode substrate. 5. The method of claim 4,
The cathode plate is a large-area X-ray generator, characterized in that the receiving groove for accommodating the CNT printed electrode substrate is formed.

Images