JP2017054678A - X-ray tube device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an X-ray tube device that prevents deterioration of bellows and is capable of preventing insulation oil from leaking out to the analyzer side even when a crack has been generated on the bellows.SOLUTION: An X-ray tube device 1 comprises: a first container 16 that internally includes an anode target 13 and a cathode 14 for emitting electrons, includes a window unit 25 for transmitting an X-ray emitted from the anode target 13 impacted by the electrons to the outside, and is sealed in a vacuum airtight state; a second container 26 that contains the first container 16, includes bellows 36 for separating a first space 50 sealed in a liquid-tight state and filled with insulation oil from a second space 35 and the inside, and includes a hole 40 for making the second space 35 communicate with the outside; and an engagement member 42 that has a predetermined gap between the engagement member and the hole in a state in which the engagement member is engaged with the hole 40.SELECTED DRAWING: Figure 1

Description

  Embodiments relate to an X-ray tube apparatus.

  A conventional fixed anode type X-ray tube apparatus includes a vacuum vessel having an anode target for emitting X-rays and an X-ray radiation window for transmitting X-rays, and a tube vessel for housing the vacuum vessel. The tube container is filled with insulating oil, and includes a bellows that seals the insulating oil and absorbs expansion and contraction. The bellows is installed so as to isolate the air basin, which is a part of the space inside the tube container, from the insulating oil, and absorbs the expansion and contraction of the insulating oil by expanding and contracting. The tube container has a vent hole as a passage for air between the space isolated from the insulating oil and the outside. Since the fixed anode X-ray tube device is normally used in a state where the vent hole is not blocked regardless of the use environment, there is a possibility that corrosive gas or the like (for example, ozone) may enter the air basin. In addition, there is a possibility that cracks may occur due to natural degradation of the bellows, and cracks may occur due to defects (scratches, bubbles, etc.) on the surface and inside of the bellows. Therefore, there is a demand for a fixed anode X-ray tube apparatus having a structure for preventing deterioration of the bellows provided in the tube container and preventing leakage of insulating oil accompanying cracks in the bellows to the outside of the tube container.

JP-A-6-84490

  The fixed anode X-ray tube apparatus is classified into a top irradiation type and a bottom irradiation type as a method of mounting the fixed anode X-ray tube apparatus on the analyzer. In particular, in the case of the mainstream top-illuminated type in Japan, the X-ray radiation window of the fixed anode X-ray tube apparatus is directed downward toward the sample installed on the lower side. The position of the air basin with the bellows and the vent hole is also downward. Due to the influence of the usage environment, corrosive gas may enter the air basin through the vent hole, which may cause the bellows to deteriorate and cracks. In addition, there is a possibility that cracks may occur due to natural degradation of the bellows, and cracks may occur due to defects (scratches, bubbles, etc.) on the surface and inside of the bellows. As a result, the insulating oil in the tube container leaks through the vent hole and into the measurement sample and the analysis device, which may cause problems such as contamination of the measurement sample and the analysis device and system function stoppage.

  Therefore, the problem to be solved by the embodiments of the present invention is to prevent the bellows from deteriorating and to prevent the insulating oil from leaking to the analyzer side even if a crack occurs in the bellows. To provide a tube device.

  An X-ray tube apparatus according to an embodiment of the present invention includes an anode target and a filament that emits electrons therein, and includes a window that transmits X-rays emitted from the anode target to the outside when the electrons are impacted. A first container that is hermetically sealed in a vacuum-tight manner, and an elastic member that includes the first container and that separates the interior from the first space and the second space that are hermetically sealed and filled with insulating oil. And a second container having a hole communicating with the second space and the outside, and a fitting member having a predetermined gap between the second container and the hole in a state of being fitted in the hole.

FIG. 1 is an overall cross-sectional view showing an example of an X-ray tube apparatus according to the first embodiment. FIG. 2 is an enlarged partial sectional view of a part of the X-ray tube apparatus according to the first embodiment. 3A is a perspective view illustrating an example of the washer according to the first embodiment, and FIG. 3B is a top view illustrating an example of the washer according to the first embodiment. FIG. These are side views of an example of the washer of the first embodiment. FIG. 4A is a top view when the washer and the fitting member of the first embodiment are combined, and FIG. 4B is a combination of the washer and the fitting member of the first embodiment. FIG. FIG. 5A is a partial cross-sectional view showing an example of the installation of the hole, washer, and fitting member of the first embodiment, and FIG. 5B shows an example of the hole 40. It is a schematic diagram. 6A is a top view of the washer formed with one groove, FIG. 6B is a top view of the washer formed with three grooves, and FIG. It is a top view of a washer formed with two grooves. FIG. 7A (a) is a side view showing an example of the configuration of the washer, and FIG. 7A (a) is a side view showing an example of the configuration of the washer. FIG. 7B (a) is a top view of the washer of FIG. 7A formed with one groove, and FIG. 7B (b) is a top view of the washer of FIG. 7A formed with two grooves. FIG. 7C is a top view of the washer of FIG. 7A formed with three grooves, and FIG. 7B (d) is a top view of the washer of FIG. 7A formed with four grooves. FIG. 8 is a side view when the washer and the fitting member of Modification 1 are combined. FIG. 9 is a schematic view showing a fitting member of Modification 2. FIG. 10 is a schematic diagram showing a state in which the fitting member of Modification 2 is fitted in the hole. FIG. 11 is a top view illustrating an example of a hole portion of the X-ray tube apparatus according to the second embodiment. FIG. 12 is a schematic view showing a state in which the fitting member of the second embodiment is fitted in the hole. FIG. 13 is a schematic diagram illustrating an example of a hole portion of the X-ray tube apparatus according to the third modification. FIG. 14 is a schematic diagram illustrating an example of a fitting member of Modification 4.

Hereinafter, embodiments will be described with reference to the drawings.
(First embodiment)
FIG. 1 is an overall cross-sectional view showing an example of an X-ray tube apparatus 1 according to the present embodiment.

  In FIG. 1, the entire X-ray tube apparatus 1 is formed in a substantially cylindrical shape around a tube axis TA. FIG. 1 shows a partial cross section of the X-ray tube apparatus 1 with a tube axis TA as a center. The one aspect | mode of the usage condition of the X-ray tube apparatus 1 shown in FIG. 1 is shown.

Below, the principal part of the X-ray tube apparatus 1 which concerns on this embodiment is demonstrated.
The X-ray tube apparatus 1 includes an X-ray tube 11 and a tube container 17 including the X-ray tube 11. Furthermore, the X-ray tube apparatus 1 includes a high voltage receptacle 18 for inserting and connecting a high voltage cable, a water guide pipe 19, a cooling pipe 21, a joint 22 that connects the water guide pipe 19 and the cooling pipe 21, A conductor spring 23 that electrically connects the voltage receptacle 18 and the water conduit 19, a cylindrical insulating cylinder 29 provided outside the high voltage receptacle 18, and a bellows 36 that isolates the air basin 35 are provided. The X-ray tube apparatus 1 further includes a hole 40 formed in a part of the tube container 17, a washer 41, and a fitting member 42 fitted into the hole 40. Hereinafter, in the direction along the tube axis TA, the X-ray tube 11 side is referred to as a downward direction (lower side), and the opposite direction to the downward direction is referred to as an upward direction (upper side). A direction perpendicular to the tube axis TA is referred to as a radial direction.

  The high voltage receptacle 18 is formed in a cylindrical shape with an open top and a bottom so that the high voltage receptacle 18 is connected to a high voltage cable. The high voltage receptacle 18 is liquid-tightly provided on the upper side of a tube container 17 described later with the tube axis TA as a central axis. The high voltage receptacle 18 includes a connection terminal 30 that penetrates from the bottom to the bottom. Here, the connection terminal 30 includes a bushing of an external electric circuit inserted into the high voltage receptacle 18 and a connection terminal. The lower end of the connection terminal 30 is connected to the joint 22 via a conductor spring 23. The joint 22 connects the upper end portion of the water guide pipe 19 and the cooling pipe 21. The conductor spring 23 electrically connects the high voltage receptacle 18 and the water conduit 19, and supplies a high voltage to the anode target (anode) 13 described later via the water conduit 19.

  The cooling pipe 21 is a pipe for flowing a coolant, for example, cooling water through the water guide pipe 19. The cooling pipe 21 is spirally provided between the insulating cylinder 29. The cooling pipe 21 includes a water supply port 21a for supplying cooling water and a water discharge port 21b for discharging cooling water. By circulating the cooling water through the water cooling pipe 21, the insulating oil filled in a part of the inside of the tube container 17, the anode target 13 described later, and the like are cooled.

  The insulating cylinders 29 are each formed of a substantially cylindrical insulator. Each of the insulating cylinders 29 has a structure through which insulating oil can flow, although not shown. For example, the upper end of the insulating cylinder 29 is fixed to the inside of the tube container 17.

  Note that the cooling pipe 21 may have a structure that is held so as not to contact the outer peripheral wall of the high-voltage receptacle 18.

  The water guide pipe 19 is formed in a bottomed double cylindrical shape extending along the tube axis TA. The water guide pipe 19 includes an anode block 12 which will be described later. The water guide pipe 19 includes a tip nozzle portion 20 that discharges cooling water toward the bottom at the lower end of the inner cylinder. In the water guide pipe 19, a part of the cooling pipe 21 communicating with the water supply port 21a is connected to the upper part of the inner cylinder, and a part of the cooling pipe 21 connected to the drain port 21b is connected to the upper part of the outer cylinder. .

  The X-ray tube 11 includes an anode block 12, an anode target (anode) 13, a cathode 14 that emits electrons, a Wehnelt electrode 15, a first vacuum envelope 16, a second vacuum envelope 26, Is provided.

The anode block 12 is formed in a bottomed cylindrical shape with the tube axis as the central axis. A coolant is flowed through the anode block 12 to cool the anode target 13. The anode target 13 is bonded to the bottom of the anode block 12. The anode target 13 emits X-rays when electrons are bombarded.
The cathode 14 is formed of a ring-shaped filament, and is provided at a predetermined interval in the radial direction from the anode target 13 (or the anode block 12). Electrons emitted from the cathode 14 collide with the anode target 13 beyond the lower end of a Wehnelt electrode 15 described later.

  The Wehnelt electrode 15 is formed in a cylindrical shape, and is provided between the anode target 13 and the cathode 14. The Wehnelt electrode 15 focuses the electrons emitted from the cathode 14 onto the anode target 13.

  The first vacuum envelope 16 is formed of a member having a double cylindrical structure whose ends are joined at the upper end, for example, a glass material. The first vacuum envelope 16 has a lower end portion of an inner cylinder connected to the anode block 12 in a vacuum-tight manner, and a lower end portion of the outer cylinder is a wall portion of the X-ray tube 11 as a part of the wall surface of the X-ray tube 11. It is connected in a vacuum-tight manner.

  The second vacuum envelope 26 is formed in a substantially cylindrical shape with a bottom. The second vacuum envelope 26 has an upper end connected as a part of the wall surface of the X-ray tube 11 to the wall of the X-ray tube in a vacuum-tight manner. The second vacuum envelope 26 is electrically grounded together with a tube container 17 described later. In the first vacuum envelope 16, an X-ray radiation window (window) 25 is joined in a vacuum-tight manner to an opening that penetrates the vicinity of the center of the bottom. The X-ray emission window 25 transmits X-rays emitted from the anode target 13 when electrons collide, and emits X-rays to the X-ray tube device 1 to the outside. The X-ray emission window 25 is formed of a member that transmits X-rays, for example, a beryllium thin plate.

  In addition, the X-ray tube 11 includes a first convex portion 11a and a second convex portion 11b that protrude in the radial direction on a part of the outer wall. Hereinafter, a part of the X-ray tube 11 between the first convex portion 11a and the second convex portion 11b is referred to as a wall portion 11c.

  The wall portion 11c is formed in a substantially cylindrical shape with a bottom extending in the tube axis direction around the tube axis TA. The wall portion 11 c includes a plurality of convex portions extending perpendicularly to the inner wall of the tube container 17. In the present embodiment, the wall portion 11c includes an upper convex portion (first convex portion) 11a and a lower convex portion (second convex portion) 11b. Here, the 1st and 2nd convex parts 11a and 11b are installed facing parallel. The second convex portion 11 b may be included in the tube container 17.

  The first convex portion 11 a is formed with a length having a gap with the inner wall of the tube container 17. The second convex portion 11b is joined to the inner wall of the tube container 17 in a vacuum-tight manner. Therefore, the length that extends in the direction perpendicular to the inner wall of the tube container 17 is longer in the second convex portion 11b than in the first convex portion 11a. The second convex portion 11 b includes a hole portion 40 that communicates from the air basin 35 to the outside of the X-ray tube apparatus 1. Details of the hole 40 will be described later.

  The tube container 17 is a sealed container that houses each part of the X-ray tube apparatus 1 therein. The tube container 17 is formed in a substantially cylindrical shape having the tube axis TA as a central axis. The tube container 17 is formed of, for example, a metal member. The tube container 17 has a lead plate 27 attached to the inner wall thereof. The internal space (first space) 50 inside the tube container 17 (lead plate 27) is filled with insulating oil. Here, the internal space 50 is, for example, a space other than the inside of the tube container 17, the outside of the X-ray tube 11 and the high voltage receptacle 18, and an air basin 35 described later.

  The bellows 36 is provided on the lower side portion of the tube container 17 so as to isolate the internal space 50 and the air basin 35. The bellows 36 has one end fixed to the first convex portion 11a and the other end fixed to the second convex portion 11b. The bellows 36 is formed of a resinous elastic member, and absorbs expansion and contraction of the insulating oil by expanding and contracting the air tray 35. In the present embodiment, the bellows 36 is, for example, a rubber member.

FIG. 2 is an enlarged partial sectional view of a part of the X-ray tube apparatus 1 of the present embodiment.
The air basin (second space) 35 is a space isolated from the internal space 50 by the bellows 36 so that the insulating oil does not enter inside the X-ray tube apparatus 1. For example, the air basin 35 is a space that is sealed and surrounded by the first convex portion 11a, the second convex portion 11b, the wall portion 11c, and the bellows 36. The air basin 35 is a space having a predetermined gas atmosphere. For example, the air basin 35 is an air atmosphere space. Further, the air basin 35 communicates with the outside of the X-ray tube apparatus 1 through the hole 40 in order to cause the gas to flow according to the expansion and contraction of the bellows 36.

  The hole 40 is a vent for discharging air pushed out from the air tray 35 to the outside when the bellows 36 expands and contracts, and taking in an external gas, for example, air in the use environment into the air tray 35. For example, the hole 40 is a cylindrical hole.

  The washer 41 is an annular plate-shaped metal member. In the washer 41, for example, the hollow portion is formed in a size substantially equal to that of the hole 40. The washer 41 is installed so as to receive a part of the fitting member 42, for example, the head of the fitting member 42.

  The fitting member 42 is a member having a width that fits into the hole 40. The fitting member 42 is fitted (loosely fitted) into the hole 40. As shown in FIG. 2, for example, the fitting member 42 is fitted from below (outside) the hole 40 of the X-ray tube apparatus 1. For example, the fitting member 42 includes a head portion and a shaft portion extending from the head portion. The shaft portion of the fitting member 42 is formed with a diameter smaller than the diameter (diameter) of the head. The diameter of the hole portion 40 is substantially equal to the diameter of the shaft portion. The shaft portion of the fitting member 42 is inserted into the hole portion 40 through the washer 41. When the shaft portion of the fitting member 42 is inserted into the hole portion 40, the head portion of the fitting member 42 comes into contact with the washer 41 and stops insertion into the hole portion 40. When the shaft portion of the fitting member 42 is inserted into the hole portion 40, a predetermined gap is formed between the outer peripheral portion of the shaft portion of the fitting member and the inner peripheral portion of the hole portion 40.

Hereinafter, the structures of the washer 41 and the fitting member 42 will be described in detail with reference to the drawings.
FIG. 3A is a perspective view showing an example of the washer 41 of this embodiment, FIG. 3B is a top view of an example of the washer 41 of this embodiment, and FIG. It is a side view of an example of the washer 41 of this embodiment. 4A is a top view when the washer 41 and the fitting member 42 are combined, and FIG. 4B is a side view when the washer 41 and the fitting member 42 are combined.

Hereinafter, the washer 41 and the fitting member 42 of the present embodiment will be described in detail with reference to FIGS. 3A to 3C and FIGS. 4A and 4B.
The washer 41 includes a central hole 41a penetrating through the center. Further, the washer 41 has a groove 41b formed on the upper surface and / or the lower surface. For example, as shown in FIG. 3A to FIG. 3C, the washer 41 has a V-shaped groove 41b on the upper surface, which communicates from the inner periphery to the outer periphery.

  The fitting member 42 is, for example, a male screw. At this time, the fitting member 42 includes a head portion 42a and a shaft portion 42b. The fitting member 42 includes a head portion 42a formed in a disc shape, and a shaft portion 42b extending from one surface of the head portion 42a and formed in a cylindrical shape coaxial with the head portion 42a. The head portion 42a is formed to have a diameter larger than the diameter of the hole 40 (or the shaft portion 42b) into which the shaft portion 42b is inserted. The shaft portion 42b is formed with a screw groove on the outer peripheral portion.

  As shown in FIGS. 4A and 4B, when the washer 41 and the fitting member 42 are combined, the groove 41 b of the washer 41 communicates from the center hole 41 a to the outer peripheral portion of the washer 41. A passage that connects the center hole 41a and the outer periphery of the washer 41 is formed. In addition, it is good also considering the state which combined the washer 41 and the fitting member 42 as a fitting member per unit.

FIG. 5A is a partial cross-sectional view showing an example of the installation of the washer 41 and the fitting member 42 of the present embodiment, and FIG. 5B is a schematic diagram showing an example of the hole 40. is there.
As shown to Fig.5 (a), the groove part which fits the fitting member 42 in the inner peripheral part is formed in the inner peripheral part of the hole part 40, for example. That is, the hole portion 40 has a female screw structure on the inner peripheral portion that is screwed into the male screw structure of the shaft portion 42b.

  As shown in FIG. 5A and FIG. 5B, the hole portion 40 includes a receiving portion at the lower end portion for accommodating the head portion 42 a of the fitting member 42. When the receiving portion is provided, the hole portion 40 has a diameter larger than the diameter of the head portion 42a, a first hole portion 40a formed with a depth deeper than the height by combining the washer 41 and the head portion 42a, and the first hole portion 40a. A second hole 40b that is provided integrally with the hole 40a via the first annular plate 40ab and communicates with the air basin 35. The first hole 40a is formed coaxially with the second hole 40b. The second hole 40b has a female screw structure on the inner periphery. In addition, the internal thread structure does not need to be formed in the inner peripheral part of the 2nd hole part 40b.

The surface of the washer 41 is in contact with the first annular plate portion 40ab, and the central hole portion 41a of the washer 41 and the second hole portion 40b are provided coaxially.
When the fitting member 42 is screwed into the thread groove of the female screw of the hole 40, a predetermined gap is provided between the screw groove of the female screw of the hole 40 and the screw groove of the male screw of the fitting member 42. A gap is formed. As shown in FIG. 5, a gap G <b> 1 is formed between the thread groove of the female screw of the hole 40 and the thread groove of the male thread of the fitting member 42.

  A predetermined gap is formed between the inner peripheral portion of the central hole portion 41 a of the washer 41 and the outer peripheral portion of the shaft portion 42 b of the fitting member 42. As shown in FIG. 5, a predetermined gap G <b> 2 is formed between the inner peripheral portion of the central hole portion 41 a of the washer 41 and the outer peripheral portion of the shaft portion 42 b of the fitting member 42.

  The gap G1 and the gap G2 are each formed with a width that allows a predetermined amount of gas to pass through. For example, the gap G <b> 1 and the gap G <b> 2 are formed so that the air pushed out from the air tray 35 by the expansion and contraction of the bellows 36 is exhausted to the outside and the air is taken in from the outside.

  It is assumed that the X-ray tube apparatus 1 is used in an air atmosphere environment. The X-ray tube apparatus 1 is driven and emits X-rays to the outside from an X-ray emission window 25 installed at the lower end opening. A part of the X-rays radiated from the X-ray tube apparatus 1 reacts with a gas (for example, oxygen) in the environment in which the X-ray tube apparatus 1 is used, and generates a corrosive gas, for example, ozone (O3). Hereinafter, the corrosive gas will be described as ozone. The fitting member 42 suppresses the generated corrosive gas, for example, ozone, from entering the air basin 35 through the hole 40. The bellows 36 expands and contracts to absorb the expansion and contraction of the insulating oil filled in the internal space 50.

  For example, when the insulating oil expands, the bellows 36 extends, and the air in the air basin 35 is pushed out. As shown in FIG. 5, the extruded air A is discharged to the outside through the gap G <b> 1, the groove 41 b formed in the washer 41, and the gap 2. Further, when the insulating oil contracts, the bellows 36 contracts, so that air in the operating environment is taken into the air tray 35 through the gap G1, the groove 41b formed in the washer 41, and the gap 2.

  According to the present embodiment, by fitting the fitting member 42 into the hole 40, the corrosive gas generated around the lower portion of the X-ray tube apparatus 1 enters the air basin 35 through the hole 40. This can be suppressed. In addition, since a predetermined gap is formed between the fitting member 42 and the hole 40, the air pushed out by the expansion and contraction of the bellows 36 can be exhausted from the air basin 35 to the outside without stagnation, And air can be taken in from the outside. That is, the X-ray tube apparatus 1 can suppress the variation in conductance by the combination of the washer 41 and the fitting member 42, and can reliably secure a passage that is a passage for air.

  Further, if a crack occurs due to the invasion of corrosive gas into the air basin 35, the natural degradation of the bellows 36, or the surface and internal defects (scratches, bubbles, etc.) of the bellows 36, the air basin is temporarily assumed. Even if the insulating oil enters the 35 side, since the washer 41 and / or the fitting member 42 are installed in the hole 40, the insulating oil leaks from the X-ray tube device 1 to the outside, for example, the analyzer side. Suppress.

  Therefore, the X-ray tube apparatus 1 can prevent the bellows 36 from being deteriorated due to the use environment, and even if the bellows 36 are cracked, leakage to the outside of the X-ray tube apparatus 1 can be suppressed. As a result, the reliability of the X-ray tube apparatus 1 can be greatly improved.

  In addition, the groove part 41b may not be V-shaped, and may be formed in multiple numbers, as long as it communicates from the outer periphery to the center hole part 41a. Hereinafter, some examples of the shape of the groove 41b of the washer 41 will be described with reference to the drawings.

  FIGS. 6A, 6 </ b> B, and 6 </ b> C are top views showing an example of the configuration of the washer 41. FIG. 6A is a top view of the washer 41 formed with one groove 41b, and FIG. 6B is a top view of the washer 41 formed with three grooves 41b. ) Is a top view of the washer 41 formed with four groove portions 41b. For example, as shown in FIGS. 6A to 6C, the washer 41 may include one or a plurality of groove portions 41b.

  7A (a) and 7 (b) are side views showing an example of the configuration of the washer 41, and FIGS. 7B (a), (b), (c), and (d) are the washers 41 of FIG. 7A. FIG. 7B (a) is a top view of the washer 41 in FIG. 7A in which one groove 41b is formed, and FIG. 7B (b) is a top view of the washer 41 in FIG. 7A in which two grooves 41b are formed. 7B (c) is a top view of the washer 41 in FIG. 7A in which three grooves 41b are formed, and FIG. 7B (d) is an upper surface of the washer 41 in FIG. 7A in which four grooves 41b are formed. FIG. As shown in FIGS. 7A (a) and 7 (b), the washer 41 may include a circular or square groove 41b. At this time, as shown in FIGS. 7B (a) to 7 (d), the washer 41 includes one or a plurality of groove portions 41b.

  When the air is exhausted from the air basin 35 to the outside and the air is taken in from the outside, an appropriate washer 41 is installed in the hole 40 from the plurality of washers 41 having the various grooves 41b as described above. The amount of ventilation can be adjusted.

  Hereinafter, some modified examples of the present embodiment will be described with reference to the drawings. Since the X-ray tube apparatus 1 of the modified example has a configuration substantially equivalent to that of the X-ray tube apparatus 1 of the first embodiment, the same components as those of the X-ray tube apparatus 1 of the first embodiment are the same. Reference numerals are assigned and detailed descriptions thereof are omitted.

(Modification 1)
The X-ray tube apparatus 1 of the modification 1 differs in the structure of the fitting member 42 from the fitting member 42 of 1st Embodiment.

FIG. 8 is a side view when the washer 41 and the fitting member 42 of Modification 1 are combined.
The fitting member 42 of Modification 1 includes a head portion 42a, a shaft portion 42b, and a groove portion 42c.

In the fitting member 42, a groove 42c is formed on the surface of the head portion 42a from which the shaft portion 42b extends so as to communicate from the outer peripheral portion to the neck portion that is a boundary portion (connecting portion) with the head portion 42a. When the shaft part 42 b of the fitting member 42 is fitted into the hole part 40, the surface of the head part 42 a on which the groove part 42 c is formed comes into contact with the surface of the washer 41. Thus, when the fitting member 42 is fitted into the hole 40, the groove 42 c of the fitting member 42 forms a gas passage from the outer periphery of the head 42 a to the central hole 41 a of the washer 41.

  According to the first modification, the groove portion 42 c is formed in the fitting member 42, so that the X-ray tube apparatus 1 prevents the bellows 36 from being deteriorated due to the use environment, and temporarily supports the bellows 36. Even if a crack occurs, leakage to the outside of the X-ray tube apparatus 1 can be suppressed.

  In the first modification, the washer 41 may not be provided. In this case, the head portion 42a of the fitting member 42 is in direct contact with the surface around the lower end portion of the hole portion 40 (for example, the annular plate portion 40ab). At this time, the groove 42 c and the surface around the lower end of the hole 40 form a gas passage communicating to the hole 40.

(Modification 2)
The X-ray tube apparatus 1 of Modification 2 differs from the above-described embodiment in the configuration of the fitting member 42.
FIG. 9 is a schematic diagram showing the fitting member 42 of the second modification. FIG. 10 is a schematic diagram showing a state in which the fitting member 42 of Modification 2 is fitted in the hole 40.

As shown in FIG. 9, the fitting member 42 of the modification 2 is comprised only by the axial part. For example, the fitting member 42 is a female screw.
As in the first embodiment, the hole 40 of the X-ray tube apparatus 1 according to the second modification is a female screwed into a thread groove of a male screw formed in the outer peripheral portion of the fitting member 42 on the inner peripheral portion. A thread groove of the screw is formed. When the fitting member 42 is screwed into the hole, a predetermined gap is formed between the screw groove of the male screw of the fitting member 42 and the screw groove of the female screw of the hole 40. That is, even when the fitting member 42 is fitted into the hole 40, the empty tray 35 is between the male screw thread groove of the fitting member 42 and the female screw groove of the hole 40. It communicates with the outside through a predetermined gap.

  According to this embodiment, since the fitting member 42 is not provided, the X-ray tube apparatus 1 prevents the bellows 36 from being deteriorated due to the use environment without newly processing the groove portion. Even if a crack occurs, leakage to the outside of the X-ray tube apparatus 1 can be suppressed.

  Next, an X-ray tube apparatus according to another embodiment will be described. In other embodiments, the same parts as those in the first embodiment described above are denoted by the same reference numerals, and detailed description thereof is omitted.

(Second Embodiment)
In the X-ray tube apparatus 1 of the second embodiment, a groove is also formed as a passage for discharging the air from the air basin 35 to the outside and taking the external air into the air basin 35.
FIG. 11 is a top view illustrating an example of the hole 40 of the X-ray apparatus 1 according to the second embodiment.
The second convex portion 11 b of the second embodiment includes a hole 40. The hole portion 40 includes a first hole portion 40a, a second hole portion 40b provided integrally with the first hole portion 40a via a first annular plate portion 40ab, and a groove portion 40c. The first hole portion 40 a is a bottomed hole (or receiving portion) that receives the head portion 42 a of the fitting member 42. The second hole portion 40 b is a hole that fits with the shaft portion 42 b of the fitting member 42. The second hole portion 40b is formed with a female screw groove that fits into the male screw groove of the shaft portion 42b in the inner peripheral portion. The groove portion 40c communicates from the inner peripheral portion of the first hole portion 40a to the second hole portion 40b, and forms a passage connecting the inner peripheral portion of the first hole portion 40a to the central hole portion 41a.

FIG. 12 is a schematic view showing a state in which the fitting member 42 of the second embodiment is fitted in the hole 40.
As shown in FIG. 12, a gap G1 is formed between the thread groove of the male thread of the fitting member 42 and the thread groove of the female thread of the hole 40, as in the first embodiment. A predetermined gap is formed between the inner periphery of the first hole 40 a and the outer periphery of the washer 41. For example, as shown in FIG. 12, a predetermined gap G3 is formed between the inner periphery of the first hole 40a and the outer periphery of the washer 41. The gap G1 and the gap G3 are each formed with a width that allows a predetermined amount of gas to pass through. For example, the gap G1 and the gap G3 are each formed in a size so that the pushed-out air can be exhausted from the air basin 35 to the outside without being stagnated by the expansion and contraction of the bellows 36 and can be taken in from the outside. .

  When the X-ray tube apparatus 1 is driven, a part of the X-rays radiated from the X-ray tube apparatus 1 reacts with gas (for example, air (oxygen)) in the environment where the X-ray tube apparatus 1 is used and corrodes. Generates a reactive gas (for example, ozone). The fitting member 42 prevents the generated corrosive gas from entering the air basin 35 through the hole 40. The bellows 36 expands and contracts to absorb the expansion and contraction of the insulating oil filled in the internal space 50. For example, when the insulating oil expands, the bellows 36 extends, and the air in the air basin 35 is pushed out. As shown in FIG. 12, the pushed-out air A is discharged to the outside through the gap G1, the groove 40c formed in the first hole 40a, and the gap G3. Further, when the insulating oil contracts, the bellows 36 contracts so that the air in the operating environment passes through the gap G1, the groove 40c formed in the first hole 40a, and the gap 35 through the air gap 35. Is taken in.

  According to this embodiment, the X-ray tube apparatus 1 includes the groove portion 40c for communicating with the outside in the second convex portion 11b. As a result, the X-ray tube apparatus 1 prevents the bellows 36 from being deteriorated due to the use environment without applying new processing to the washer 41 and the fitting member 42, and even if a crack occurs in the bellows 36. Leakage to the outside of the tube apparatus 1 can be suppressed.

  In the present embodiment, the washer 41 may not be installed. In this case, the head portion 42a is formed with a diameter having a gap with the inner peripheral portion of the first hole portion 40a. As a result, the number of members can be suppressed in the X-ray tube apparatus 1.

  In the present embodiment, the hole 40 may not include the first hole 40a. In this case, the groove 40c of the hole 40 is formed longer than the width of the head 42a. As a result, in the X-ray tube apparatus 1, the number of steps for processing the first hole 40a can be reduced.

  Further, in the present embodiment, the hole 40 may include a passage communicating with the air tray 35 in the second convex portion 11b in the vicinity of the outer periphery of the second hole 40b. For example, as shown in FIG. 13, the hole 40 includes a passage 40 d that penetrates from the groove 40 c to the air basin 35 in a part of the female screw structure of the second hole 40 b. The passage 40d is formed with a hole diameter that can suppress leakage to the outside of the X-ray tube apparatus 1 even if the bellows 36 are cracked. Thus, the X-ray tube apparatus 1 can adjust the amount of gas flow due to expansion and contraction of the bellows 36 by providing the passage 40d for allowing the gas to pass therethrough. In addition, the X-ray tube apparatus 1 can prevent the bellows 36 from being deteriorated due to the use environment, and even if the bellows 36 are cracked, leakage to the outside of the X-ray tube apparatus 1 can be suppressed. The passage 40d may be formed to penetrate from the outside of the X-ray tube apparatus 1 to the air basin 35.

  According to the above-described embodiment, the X-ray tube apparatus 1 prevents the bellows 36 from being deteriorated due to the use environment, and suppresses leakage of the insulating oil through the hole 40 to the outside of the X-ray tube apparatus 1. Can do. As a result, the reliability of the X-ray tube apparatus 1 can be greatly improved.

  In the above-described embodiment, the hole 40 is formed in the second convex portion 11b of the wall portion 11c. However, if the hole 35 communicates with the outside, it is formed in another portion. Also good. For example, the hole 40 may be formed in a part of the tube container 17 so as to communicate the air basin 35 and the outside.

  In the above-described embodiment, when the fitting member 42 is fitted into the hole 40, a gap is formed between the inner periphery of the hole 40 and the outer periphery of the fitting member 42. The gap may not be formed. In this case, the fitting member 42 includes a hole for allowing a predetermined amount of gas to flow between the outside of the X-ray tube apparatus 1 and the air tray 35. For example, as shown in FIG. 14, the fitting member 42 includes a hole portion that penetrates from the apex portion of the head portion 42 a to the bottom portion of the shaft portion 42 b so that gas can flow. Further, the hole provided in the fitting member 42 is formed with a diameter that can suppress leakage to the outside of the X-ray tube apparatus 1 even if the bellows 36 is cracked. By fitting the fitting member 42 into the hole 40 as described above, the X-ray tube apparatus 1 can adjust the amount of gas flow caused by expansion and contraction of the bellows 36. In addition, the X-ray tube apparatus 1 can prevent the bellows 36 from being deteriorated due to the use environment, and even if the bellows 36 are cracked, leakage to the outside of the X-ray tube apparatus 1 can be suppressed.

  In the above-described embodiment, the bellows 36 may be ozone-resistant rubber. The bellows 36 is, for example, rubber having a saturated structure in the polymer main chain. In this case, the bellows 36 is fluorine rubber (FKM), silicone rubber (Q), ethylene propylene rubber (EPM), acrylic rubber (ACM), or the like. Further, the bellows 36 may be chloroprene rubber (CR), butyl rubber (IIR), epichlorohydrin rubber (ECO), or the like. When the bellows 36 is formed of rubber having strong ozone resistance, the X-ray tube apparatus 1 further improves the effect of preventing the bellows 36 from being deteriorated due to the use environment. Even if such a bellows 36 is cracked, the X-ray tube apparatus 1 can suppress leakage of insulating oil to the outside by the above-described embodiment.

  In addition, this invention is not limited to the said embodiment itself, In the stage of implementation, it can implement by modifying a component in the range which does not deviate from the summary. Further, various inventions can be formed by appropriately combining a plurality of constituent elements disclosed in the embodiment. For example, some components may be deleted from all the components shown in the embodiment. Furthermore, you may combine suitably the component covering different embodiment.

  DESCRIPTION OF SYMBOLS 1 ... X-ray tube apparatus, 11 ... X-ray tube, 11a ... 1st convex part, 11b ... 2nd convex part, 11c ... Wall part, 12 ... Anode block, 13 ... Anode target, 14 ... Cathode, 15 ... Wehnelt electrode, 16 ... first vacuum envelope, 17 ... tube container, 18 ... high voltage receptacle, 19 ... water pipe, 20 ... tip nozzle part, 21 ... cooling pipe, 21a ... water supply port, 21b ... drainage port, 22 DESCRIPTION OF SYMBOLS ... Joint, 23 ... Conductor spring, 25 ... X-ray radiation window, 26 ... 2nd vacuum envelope, 27 ... Lead plate, 29 ... Insulating cylinder, 30 ... Connection terminal, 35 ... Air tray, 36 ... Bellows, 40 ... Hole part, 41 ... Washer, 42 ... Fitting member, 50 ... Internal space.

Claims (7)

A first container that includes an anode target and a filament that emits electrons therein, a window that transmits X-rays emitted from the anode target to the outside when the electrons are bombarded, and is hermetically sealed in a vacuum-tight manner When,
A hole that includes the first container, includes an elastic member that is liquid-tightly sealed and filled with insulating oil, and that separates the interior from the second space, and communicates the second space and the outside. A second container comprising a portion;
An X-ray tube device comprising: a fitting member having a predetermined gap between the hole portion and the fitting portion in a state of being fitted into the hole portion.   The elastic member expands and contracts the insulating oil in the second space, thereby pushing the gas filled in the second space to the outside through the gap and taking in the external gas. The X-ray tube apparatus according to claim 1.   The X-ray tube apparatus according to claim 2, wherein the elastic member is a resinous elastic member. The fitting member includes a disk-shaped head and a shaft portion having a male screw extending from one surface of the head and having a diameter smaller than the diameter of the head fitted into the hole. With
The hole includes a female screw having a screw groove that is screwed into a screw groove of the shaft portion on an inner peripheral portion;
The X-ray tube apparatus according to claim 3, wherein when the fitting member is screwed into the hole, the gap is provided between a screw groove of the hole and a screw groove of the fitting member.   It has an annular plate shape so as to receive the head portion, and includes at least one groove portion communicating from the inner peripheral portion to the outer peripheral portion having a diameter larger than the diameter of the shaft portion in order to pass the shaft portion on the surface, The X-ray tube apparatus according to claim 4, further comprising a washer provided between the head and the surface of the second container having the hole.   The X-ray tube apparatus according to claim 4, wherein the head portion includes at least one groove portion that communicates from a connection portion with the shaft portion to an outer peripheral portion.   5. The X-ray tube according to claim 4, wherein the second container includes at least one groove portion communicating on an outer surface from an end portion of the hole portion to an outer side than a portion with which the head portion is in contact. apparatus.

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