JP2019009023A - X-ray tube device - Google Patents

Abstract

To provide an X-ray tube device in which occurrence of vibration and noise is suppressed.SOLUTION: The X-ray tube device includes: a cathode; an anode target; and a joint 6 including a first flow path 10a through which a coolant flows and a stepped portion 20 having a first abutting surface and a second abutting surface respectively extending in a direction intersecting a central axis of the first flow path; a first tubular pipe 7a extending along the tube axis direction, having one end portion connected to the joint and the other end portion to which the anode target is joined; a second tubular pipe 7b installed in the first tubular pipe and having a first end portion communicating with the first flow path and a second end portion for discharging a coolant flowing from the first end portion toward the anode target; and an elastic member 30 formed of an elastic material. The elastic member 30 is fitted to the outer periphery of the first end portion, engages with the stepped portion 20 of the joint, and is in contact with the first abutting surface and the second abutting surface.SELECTED DRAWING: Figure 2

Description

  Embodiments described herein relate generally to an X-ray tube apparatus.

  An X-ray tube apparatus used for fluorescent X-ray analysis inserts and connects an X-ray tube having a cathode and an anode target, a tube container that accommodates the X-ray tube, and a high-voltage cable arranged in the tube container A high voltage receptacle. The X-ray tube apparatus further includes a water guide pipe for guiding and cooling the cooling water in the vicinity of the anode target, and a cooling pipe for supplying and draining the cooling water to the water guide pipe. The water guide pipe has a double pipe structure including an inner pipe and an outer pipe, and is connected to the cooling pipe via a joint portion.

  In the X-ray tube apparatus, there are times when vibration and noise are generated as bubbles are generated and disappeared during subcooled boiling and cavitation. For example, when the fitting gap between the end portion of the water guide pipe and the joint portion is large, the vibration of the water guide pipe is increased, and noise may be further increased. It is conceivable to reduce vibration and noise by attaching a rubber member to the fitting portion between the water guide pipe end and the joint for the purpose of absorbing vibration.

JP-A-6-84490 JP 2010-44897 A JP2013-254652A

  However, the rubber member easily moves along the end of the water guide pipe due to the influence of water flow, and may not be fixed stably. Therefore, there is a possibility that the vibration and noise reduction effect may not be stably maintained.

  The subject of embodiment of this invention is providing the X-ray tube apparatus which can reduce a vibration and noise stably.

  According to the embodiment, the X-ray tube device includes a cathode that emits electrons, an anode target that generates X-rays when electrons emitted from the cathode collide, and a first channel through which a coolant flows. A joint member comprising: a step part having a first contact surface and a second contact surface each extending in a direction intersecting the central axis of the first flow path; and one end connected to the joint member A first tube that extends along the tube axis direction, and is installed in the first tube and communicates with the first flow path. A second cylindrical tube having one end and a second end that discharges the coolant flowing in from the first end toward the anode target, and an elastic member formed of an elastic material, Fitted to the outer periphery of the first end, engaged with the stepped portion of the joint member, It comprises an elastic member in contact with the contact surface and the second abutment surface.

FIG. 1 is a longitudinal sectional view of an X-ray tube apparatus showing an example of an X-ray tube apparatus according to the first embodiment. FIG. 2 is an enlarged partial sectional view showing a part of the X-ray tube apparatus. FIG. 3 is a top view illustrating an example of the elastic member. FIG. 4 is an enlarged partial sectional view showing a part of the X-ray tube apparatus according to the second embodiment. FIG. 5 is a perspective view showing an elastic member and a joint member in the second embodiment. FIG. 6 is a cross-sectional view showing a part of a joint member according to a modification. FIG. 7 is a cross-sectional view showing a part of a joint member according to another modification.

  Hereinafter, an X-ray tube apparatus according to an embodiment will be described with reference to the drawings.

  It should be noted that the disclosure is merely an example, and those skilled in the art can appropriately modify the gist of the invention and can be easily conceived, and are naturally included in the scope of the present invention. Further, in order to make the description clearer, the size, shape, and the like of each part may be schematically represented in comparison with actual aspects, but this is only an example and limits the interpretation of the present invention. It is not a thing. In addition, in the present specification and each drawing, elements similar to those described above with reference to the previous drawings are denoted by the same reference numerals, and detailed description may be omitted as appropriate.

(First embodiment)
FIG. 1 is a longitudinal sectional view showing the entire X-ray tube apparatus according to the first embodiment, and FIG. 2 is a partial sectional view showing an enlarged joint connection portion of a water guide pipe.

  As shown in FIG. 1, an X-ray tube apparatus 1 according to this embodiment includes an X-ray tube 2 and a tube container 3 including the X-ray tube 2. The X-ray tube apparatus 1 as a whole has a substantially cylindrical or columnar shape having a tube axis TA. In the following description, a direction along the tube axis TA is referred to as an axial direction. In the axial direction, the X-ray tube 2 side is referred to as a downward direction (lower side), and the opposite direction to the downward direction is referred to as an upward direction (upper side). A direction perpendicular to the tube axis TA is referred to as a radial direction. In the illustrated example, the tube axis TA is shown in the vertical direction (vertical direction). However, the present invention is not limited to this, and the X-ray tube apparatus 1 is configured so that the tube axis TA extends in the left-right direction (horizontal direction). May be arranged.

  The tube container 3 is formed in a substantially cylindrical shape and is arranged coaxially with the tube axis TA. The tube container 3 is made of, for example, a metal material. A lead plate 21 is attached to the inner wall of the tube container 3. The X-ray tube 2 is formed in a substantially cylindrical shape or a columnar shape, and is disposed in the tube container 3 coaxially with the tube axis TA.

  The X-ray tube apparatus 1 includes a high voltage receptacle 4 for inserting and connecting a high voltage cable, a cooling pipe 5, a joint member (hereinafter simply referred to as a joint) 6, a water guide pipe 7, and a high voltage receptacle 4. A conductor spring 8 that electrically connects the pipe 7 and the water conduit 7, a cylindrical insulating cylinder 9 provided outside the high-voltage receptacle 4, and a bellows 11 that isolates an air basin 10 and an internal space 22 described later. Are further provided.

  The high voltage receptacle 4 is formed in a bottomed cylindrical shape with an upper end opened to connect a high voltage cable. The high voltage receptacle 4 is disposed coaxially with the tube axis TA in the upper portion of the tube container 3 and is connected to the upper end portion of the tube container 3. The high-voltage receptacle 4 includes a plurality of connection terminals 12 that are provided so as to penetrate the bottom portion from the inside to the outside. The connection terminal 12 includes a bushing of an external electric circuit inserted into the high voltage receptacle 4 and a terminal. The connection terminal 12 is electrically connected to the joint 6 via the conductor spring 8. The conductor spring 8 electrically connects the high voltage receptacle 4 and the water conduit 7, and supplies a high voltage to an anode target (anode) 13 described later via the water conduit 7.

  Between the high voltage receptacle 4 and the tube container 3, a substantially cylindrical insulating cylinder 9 is provided. The insulating cylinder 9 is arranged coaxially with the tube axis TA and covers the outer peripheral side of the high voltage receptacle 4. The insulating cylinder 9 has an upper end fixed to the inside of the tube container 3, for example. The insulating cylinder 9 has a structure through which insulating oil can flow.

  The inner space 22 inside the tube container 3 (lead plate 21) is filled with insulating oil. Here, the internal space 22 is, for example, a space other than the inside of the tube container 3, the outside of the X-ray tube 2 and the high voltage receptacle 4, and the air basin 10 described later.

  The cooling pipe 5 is a conduit for flowing a coolant, for example, pure water. The cooling pipe 5 is provided spirally between the high voltage receptacle 4 and the insulating cylinder 9. The cooling pipe 5 includes a first cooling pipe 5b having a water supply port 5a to which a coolant is supplied and a second cooling pipe 5c having a discharge port 5d from which the coolant is discharged. The first cooling pipe 5 b has a water supply port 5 a connected to a circulating cooling device or the like (not shown) that is a coolant supply source, and an end opposite to the water supply port 5 a is connected to the joint 6. On the other hand, the second cooling pipe 5c has a discharge port 5d connected to a circulating cooling device or the like (not shown), and an end opposite to the discharge port 5d connected to the joint 6. Note that the cooling pipe 5 may not be provided in a spiral shape. The cooling pipe 5 may have a structure that is held so as not to contact the outer peripheral wall of the high-voltage receptacle 4.

  The joint 6 is provided on the central portion of the X-ray tube apparatus 1, for example, on the tube axis TA, and connects the cooling pipe 5 and the water guide pipe 7. That is, the joint 6 is connected to the lower end of the first cooling pipe 5b and the lower end of the second cooling pipe 5c. The water guide pipe 7 extends along the tube axis TA, and extends from the joint 6 to the anode block 14 of the X-ray tube 2 described later. An upper end portion of the water guide pipe 7 is connected to the joint 6, and is connected to the cooling pipe 5 through the joint 6. The configuration of the joint 6 and the pipe connection structure will be described in detail later.

  The water guide pipe (cylinder pipe) 7 includes an outer pipe (first cylinder pipe) 7a formed in a cylindrical shape, and a cylindrical inner pipe (second cylinder pipe) 7b provided coaxially inside the outer pipe 7a. And having a double tube structure. The water guide pipe 7 is provided extending in the axial direction, for example, along the tube axis TA, and is connected to the lower portion of the joint 6.

  The upper end of the outer pipe 7 a is liquid-tightly connected to the joint 6, and the lower end is liquid-tightly joined to the upper part of the anode block 14. The inner pipe 7b is formed with an outer diameter smaller than the inner diameter of the outer pipe 7a. The upper end portion of the inner pipe 7 b is connected or fitted to the joint 6, and the lower end portion extends to the vicinity of the anode target 13 to constitute the tip nozzle portion 24.

  The X-ray tube 2 includes an anode target (anode) 13, an anode block 14, a cathode 15 that emits electrons, a Wehnelt electrode 16, a first vacuum envelope 17, a second vacuum envelope 18, Is provided. When a high voltage cable is connected to the high voltage receptacle 4, a high voltage (tube voltage) is applied between the anode target 13 and the cathode 15.

  The anode block 14 is formed in a bottomed cylindrical shape with the tube axis TA as a central axis. On the opening side of the anode block 14, the lower end of the outer pipe 7a is fixed. Inside the anode block 14, the tip nozzle portion 24 of the inner pipe 7b is disposed. The tip nozzle portion 24 is adjacent to and faces the bottom plate of the anode block 14. Cooling water is discharged from the tip nozzle portion 24 toward the bottom of the anode block 14 (or the installation direction of the anode target 13).

  In the X-ray tube apparatus 1, the joint 6, the water guide pipe 7, and the anode block 14 described above constitute a flow path for flowing a coolant by being assembled. In addition, although the joint 6, the water guide pipe 7, and the anode block 14 were each described as a separate body, they may all be formed integrally or may be partially integrated as long as a flow path through which the coolant flows is configured. It may be formed. As the coolant circulates through the flow path constituted by the cooling pipe 5, the joint 6, the water guide pipe 7, and the anode block 14, the insulating oil, the anode target 13, and the like filled in the internal space 22 are cooled. .

  The anode target 13 is joined to the bottom portion outside the anode block 14. The anode target 13 generates X-rays when electrons are bombarded. At this time, the temperature of the anode target 13 rises due to the impact of electrons, but is cooled by the coolant flowing through the flow path inside the anode block 14. A relatively positive tube voltage is applied to the anode target 13.

  The cathode 15 is formed of a ring-shaped filament, and is provided at a predetermined interval from the anode target 13 (or the anode block 14) to the outside in the radial direction. The cathode 15 is electrically grounded. Electrons emitted from the cathode 15 collide with the anode target 13 beyond the lower end of the Wehnelt electrode 16.

  The Wehnelt electrode 16 is formed in a circular shape and is provided between the anode target 13 and the cathode 15. The Wehnelt electrode 16 focuses the electrons emitted from the cathode 15 onto the anode target 13.

  The first vacuum envelope 17 has an inner cylinder and an outer cylinder, and upper ends of the inner cylinder and the outer cylinder are joined to each other. The inner cylinder and the outer cylinder are made of, for example, a glass material or a ceramic material. The first vacuum envelope 17 has a lower end portion of the inner cylinder connected to the anode block 14 in a vacuum-tight manner, and a lower end portion of the outer cylinder is connected to a wall portion of the X-ray tube 2 in a vacuum-tight manner. It constitutes a part of the wall surface.

  The second vacuum envelope 18 is formed in a substantially cylindrical shape with a bottom. The second vacuum envelope 18 has an upper end connected to the wall of the X-ray tube in a vacuum-tight manner, and constitutes a part of the wall surface of the X-ray tube 2. The second vacuum envelope 18 is electrically grounded. The second vacuum envelope 18 has an opening that penetrates the vicinity of the center of the bottom, and an X-ray radiation window (window) 19 is joined to the opening in a vacuum-tight manner. The X-ray emission window 19 is formed of a member that transmits X-rays, for example, a beryllium thin plate. The X-ray emission window 19 transmits X-rays generated from the anode target 13 and emits X-rays to the X-ray tube device 1 to the outside. In addition, the X-ray tube 2 includes a first convex portion 20a and a second convex portion 20b that protrude outward in the radial direction on a part of the outer wall.

  The bellows 11 is disposed around the X-ray tube 2 in the tube container 3. The bellows 11 has one end fixed to the first convex portion 20a and the other end fixed to the second convex portion 20b. Thereby, the bellows 11 isolates the internal space 22 and the air basin 10. The bellows 11 is formed of a resinous elastic member or a rubber member. The bellows 11 absorbs expansion and contraction of the insulating oil in the air basin 10 by expanding and contracting according to the expansion and contraction of the insulating oil filled in the internal space 22.

  Next, the structure of the joint 6 and the pipe connection structure will be described in detail. FIG. 2 is an enlarged cross-sectional view showing the joint portion, and FIG. 3 is a perspective view showing the joint body and the elastic member.

  As shown in FIGS. 1 and 2, the joint 6 has a main body 6a formed in a bottomed cylindrical shape by a metal material, for example. The main body 6 a is disposed coaxially with the tube axis TA between the high voltage receptacle 4 and the water guide pipe 7. The upper end wall (ceiling wall) of the main body 6 a is electrically connected to the high voltage receptacle 4 by a conductor spring 8.

  The main body 6a has a first flow path 10a, a second flow path 10b, and a third flow path 10c formed therein. The first flow path 10a is formed coaxially with the tube axis TA, and extends from the lower end of the main body 6a to the vicinity of the upper end. The first flow path 10a opens at the lower end of the main body 6a. The first flow path 10a is a stepped flow path. That is, the first channel 10a includes a first large-diameter channel 10a1 having a large diameter, a first small-diameter channel 10a2 having a smaller diameter than the first large-diameter channel 10a1, and the gap between the large-diameter channel and the small-diameter channel. Has a step 10a3.

  The first large-diameter channel 10a1 is open at the lower end of the main body 6a and extends from the lower end of the main body 6a to an intermediate portion in the axial direction of the main body 6a. The first small-diameter channel 10a2 extends from the upper end of the first large-diameter channel 10a1 to the vicinity of the ceiling wall of the main body 6a. The step 10a3 has an annular shape and is located on a plane substantially orthogonal to the tube axis TA.

  The second channel 10b extends in the radial direction orthogonal to the tube axis TA, and has one end communicating with the first small-diameter channel 10a2 and the other end opened on the outer peripheral surface of the main body 6a. The third flow path 10c extends in the radial direction orthogonal to the tube axis TA, and has one end communicating with the first large diameter flow path 10a1 and the other end opened on the outer peripheral surface of the main body 6a.

  According to the present embodiment, as shown in FIGS. 2 and 3, the main body 6 a of the joint 6 has an annular engagement groove (stepped portion) 20. The engagement groove 20 is formed on the inner peripheral surface of the first small-diameter channel 10a2 in the vicinity of the step 10a3, and is provided substantially coaxially with the tube axis TA. The engagement groove 20 defines an annular first contact surface 21a and second contact surface 21b that are respectively located on a plane orthogonal to the tube axis TA (the central axis of the first flow path 10a). The first contact surface 21a and the second contact surface 21b face each other with a predetermined interval in the tube axis TA direction.

  As shown in FIGS. 1 and 2, one end portion of the first cooling pipe 5 b is liquid-tightly connected to the second flow path 10 b of the joint 6. One end of the second cooling pipe 5c is liquid-tightly connected to the third flow path 10c. Thus, the first cooling pipe 5b and the second cooling pipe 5b communicate with the first small diameter flow path 10a2 and the first large diameter flow path 10a1 of the first flow path 10a through the second flow path 10b and the third flow path 10c, respectively. doing.

  The outer pipe 7 a of the water guide pipe 7 has an inner diameter that is substantially the same as the inner diameter of the first large-diameter channel 10 a 1 of the joint 6. The upper end of the outer pipe 7a is liquid-tightly joined to the lower end of the main body 6a by welding or the like. As a result, the outer pipe 7 a communicates with the first large-diameter channel 10 a 1 of the joint 6. The inner pipe 7b is coaxially arranged in the outer pipe 7a. The upper end portion of the inner pipe 7b passes through the first large-diameter channel 10a1 and is coaxially fitted to the first small-diameter channel 10a2. The inner pipe 7b has an outer diameter substantially the same as the inner diameter (hole diameter) of the first small-diameter channel 10a2, and has a fitting clearance with a predetermined tolerance between the inner pipe 7b and the first small-diameter channel 10a2. Thus, the inner pipe 7b communicates with the first cooling pipe 5b via the first small diameter channel 10a2 and the second channel 10b.

  The elastic member 30 is attached or fitted to the outer periphery of the upper end portion of the inner pipe 7b. At the same time, the elastic member 30 is engaged with the engagement groove 20 of the main body 6a. The elastic member 30 fills the fitting gap between the outer peripheral surface of the inner pipe 7b and the first small-diameter channel 10a2, and elastically supports the inner pipe 7b with respect to the joint 6, thereby generating vibration and noise. It has a function to suppress.

  As shown in FIGS. 2 and 3, in this embodiment, the elastic member 30 is formed in a cylindrical shape or a pipe shape. The elastic member 30 is formed in, for example, a stepped cylindrical shape having an inner hole (through hole) 31 having an inner diameter substantially equal to the outer diameter of the inner pipe 7b. That is, the elastic member 30 integrally includes a first cylindrical portion 32a having a large diameter, a second cylindrical portion 32b having a smaller outer diameter than the first cylindrical portion 32a, and a step portion formed between the cylindrical portions. Have. The outer diameter and height (width) of the first cylindrical portion 32a are formed substantially equal to the inner diameter and width of the engaging groove 20 of the joint 6 described above. The outer diameter of the second cylindrical portion 32b is larger than the inner diameter of the first small-diameter channel 10a2, and is formed substantially equal to the diameter of the small-diameter portion of the engagement groove 20.

  The upper end surface of the first cylindrical portion 32a constitutes an annular first engaging surface 34a, and the lower surface of the first cylindrical portion 32a, that is, the stepped portion constitutes an annular second engaging surface 34b. The first engagement surface 34a and the second engagement surface 34b are planes that are substantially orthogonal to the tube axis TA (the center axis of the inner pipe 7b, the center axis of the first small-diameter channel 10a2), and are predetermined in the tube axis TA direction. Are spaced apart from each other.

  Such an elastic member 30 is made of an elastic material such as synthetic resin or rubber. For example, the elastic member 30 may be made of at least one of silicone rubber, fluorine rubber, ethylene / propylene rubber, and nitrile rubber.

  The elastic member 30 is mounted or fitted on the outer periphery of the upper end portion of the inner pipe 7b. At the same time, the elastic member 30 is engaged with the engagement groove 20 of the main body 6a. As for the 1st cylindrical part 32a of the elastic member 30, an outer peripheral surface elastically contact | abuts to the bottom face of the engaging groove 20, and the 1st engaging surface 34a and the 2nd engaging surface 34b are the 1st contact | abutting of the engaging groove 20, respectively. It is in elastic contact with the contact surface 21a and the second contact surface 21b. Further, the outer peripheral surface of the second cylindrical portion 32 b is elastically fitted to the small diameter portion of the engagement groove 20.

  The fitting gap between the outer peripheral surface of the inner pipe 7b and the first small diameter channel 10a2 is filled with the elastic member 30. Moreover, the upper end part of the inner side pipe 7b is elastically supported with respect to the joint 6 by the elastic member 30, and maintains a fixed fitting gap. Thereby, even when vibration is transmitted to the inner pipe 7b, the elastic member 30 absorbs the vibration of the inner pipe 7b, and the inner pipe 7b is prevented from hitting the joint 6 and generating noise. In the elastic member 30, the first engagement surface 34a and the second engagement surface 34b, which are planes orthogonal to the tube axis TA, are the first contact surface 21a and the second contact surface, which are also planes orthogonal to the tube axis TA. 2 Since the engagement groove 20 is mounted in contact with and engaged with the contact surface 21b, the engagement surface and the contact surface cause movement or displacement along the tube axis TA direction. It is regulated. Therefore, the elastic member 30 is reliably held at a predetermined fitting position, and the above-described vibration and noise reduction effect can be stably exhibited over a long period of time.

  In the X-ray tube device 1 configured as described above, the coolant is sent from the first cooling pipe 5 b and flows into the inner pipe 7 b from the upper end portion via the second flow path 10 b of the joint 6. The coolant flowing into the inner pipe 7b passes through the inner pipe 7b and is discharged from the tip nozzle portion 24 toward the bottom of the anode block 14 where the anode target 13 is installed. After cooling the anode target 13, the coolant passes through the flow path formed by the inner surface of the anode block 14 or the inner surface of the outer pipe 7 a and the outer periphery of the inner pipe 7 b, and the first of the joint 6. It flows into the flow path 10a1. Further, the coolant is sent to the second cooling pipe 5c via the third flow path 10c and discharged from the discharge port 5d of the second cooling pipe 5c.

  In the X-ray tube apparatus 1, when a high voltage cable is connected to the high voltage receptacle 4, a tube voltage is applied to the anode target 13. Electrons emitted from the cathode 15 strike the anode target 13 and X-rays are generated. At this time, the anode target 13 is cooled by the coolant flowing through the flow path formed inside the anode block 14. At this time, bubbles are generated due to subcool boiling or cavitation of the coolant. Then, when the bubbles are generated and disappear, the inner pipe 7b vibrates. Furthermore, since there is a fitting gap between the inner pipe 7b and the first flow path 10a at the upper end of the inner pipe 7b, the inner pipe 7b vibrates and contacts the wall surface of the first flow path 10a. obtain. Therefore, noise can occur in the inner pipe 7b. In this embodiment, since the elastic member 30 is installed between the upper end part of the inner pipe 7b and the wall surface of the first flow path 10a, the end part of the inner pipe 7b and the first flow path 10a are fitted. Even if the gap varies, the vibration of the inner pipe 7b is suppressed. Further, by providing a stepped portion on the elastic member 30 and the joint 6 and having a structure with a large contact area, the elastic member 30 can be moved and displaced in the axial direction of the first flow path 10a (the tube axis TA direction). The elastic member 30 can be held at a predetermined position for a long period of time. Thereby, it becomes possible to continuously exhibit the effect of reducing vibration and noise by the elastic member 30.

  From the above, according to the present embodiment, an X-ray tube apparatus capable of stably reducing vibration and noise can be obtained.

Next, an X-ray tube apparatus according to another embodiment will be described. In other embodiments described below, the same parts as those in the first embodiment described above are denoted by the same reference numerals, and detailed description thereof is omitted or simplified, and parts different from those in the first embodiment are described. The explanation is centered.
(Second Embodiment)
FIG. 4 is an enlarged cross-sectional view showing a joint portion of the X-ray tube apparatus according to the second embodiment, and FIG. 5 is a perspective view showing a main body and an elastic member of the joint portion.

  As shown in FIGS. 4 and 5, the main body 6a of the joint 6 has a stepped portion provided around the first small-diameter channel 10a2. In the present embodiment, the step portion is constituted by an annular engagement groove 20. The engagement groove 20 is formed on the inner peripheral surface of the first small-diameter channel 10a2 in the vicinity of the step 10a3, and is provided substantially coaxially with the tube axis TA. The engagement groove 20 defines an annular first contact surface 21a and second contact surface 21b that are respectively located on a plane orthogonal to the tube axis TA (the central axis of the first small-diameter channel). The first contact surface 21a and the second contact surface 21b face each other with a predetermined interval in the tube axis TA direction.

  According to the present embodiment, the elastic member 30 is formed in an O-ring shape or a pipe shape, not a structure having a stepped portion. The cross-sectional shape of the elastic member 30 may be circular, elliptical, or polygonal. The elastic member 30 is formed of a resin rubber member. For example, the elastic member 30 may be made of at least one of silicone rubber, fluorine rubber, ethylene / propylene rubber, and nitrile rubber. The inner diameter of the elastic member 30 is formed to be substantially equal to or slightly smaller than the outer diameter of the inner pipe 7b. The outer diameter of the elastic member 30 is formed larger than the inner diameter of the first small-diameter channel 10a2. Further, the cross-sectional width (height or diameter) of the elastic member 30 is equal to or greater than the width of the engagement groove 20.

  The elastic member 30 is mounted or fitted on the outer periphery of the upper end portion of the inner pipe 7b. At the same time, the elastic member 30 is engaged with the engagement groove 20 of the main body 6a. The outer surface of the elastic member 30 elastically contacts at least the first contact surface 21a and the second contact surface 21b and is sandwiched between these contact surfaces.

  Also in the present embodiment, the fitting gap between the outer peripheral surface of the inner pipe 7b and the first small-diameter channel 10a2 is filled with the elastic member 30. The upper end portion of the inner pipe 7b is elastically supported by the elastic member 30 with respect to the joint 6, and maintains a constant fitting gap. Thereby, even when vibration is transmitted to the inner pipe 7b, the elastic member 30 absorbs the vibration of the inner pipe 7b, and the inner pipe 7b is prevented from hitting the joint 6 and generating noise. The elastic member 30 is attached to the engagement groove (stepped portion) 20 while being in contact with and engaged with the first contact surface 21a and the second contact surface 21b, which are planes orthogonal to the tube axis TA. Therefore, movement or positional deviation along the direction of the tube axis TA is regulated by these contact surfaces. Therefore, the elastic member 30 is reliably held at a predetermined fitting position, and the above-described vibration and noise reduction effect can be stably exhibited over a long period of time.

  From the above, according to the present embodiment, an X-ray tube apparatus capable of stably reducing vibration and noise can be obtained.

  The present invention is not limited to the above-described embodiment or modification as it is, and can be embodied by modifying the components without departing from the scope of the invention in the implementation stage. In addition, various inventions can be formed by appropriately combining a plurality of components disclosed in the embodiment. For example, some components may be deleted from all the components shown in the embodiment. Furthermore, constituent elements over different embodiments may be appropriately combined.

  The material, shape, size, and the like of the elements constituting the X-ray tube apparatus are not limited to the above-described embodiments, and can be variously changed as necessary. The stepped portion of the joint 6 only needs to have first and second contact surfaces that restrict the movement of the elastic member 30 in the axial direction, and these contact surfaces are not limited to planes orthogonal to the tube axis. Any plane or curved surface extending in the direction intersecting the tube axis may be used. For example, as shown in FIG. 6, the engagement groove (stepped portion) 20 of the joint 6 has a triangular cross-sectional shape, and each of the first contact surfaces 21 a extending so as to intersect the tube axis, and You may have the 2nd contact surface 21b. Alternatively, as shown in FIG. 7, the engagement groove (stepped portion) 20 has a semicircular cross-sectional shape and is curved in a direction intersecting with the tube axis, the first contact surface 21 a and the second contact surface. You may have the surface 21b.

DESCRIPTION OF SYMBOLS 1 ... X-ray tube apparatus, 2 ... X-ray tube, 3 ... Tube container, 4 ... High voltage receptacle,
5 ... Cooling pipe, 6 ... Joint connection part, 6a ... Main body, 7 ... Water guide pipe,
7a ... outer pipe, 7b ... inner pipe, 8 ... conductor spring, 9 ... insulating cylinder,
10a ... 1st flow path, 10a1 ... 1st large diameter flow path, 10a2 ... 1st small diameter flow path,
11 ... Bellows, 12 ... Connection terminal, 13 ... Anode target, 14 ... Anode block,
15 ... cathode, 16 ... Wehnelt electrode, 17 ... first vacuum envelope, 18 ... second vacuum envelope,
20 ... engaging groove (step), 21a ... first contact surface, 21b ... second contact surface,
24 ... Nozzle section, 30 ... Elastic member

Claims (9)

A cathode that emits electrons;
An anode target that generates X-rays by collision of electrons emitted from the cathode;
A joint member comprising: a first flow path through which a coolant flows; and a step portion having a first contact surface and a second contact surface each extending in a direction intersecting the central axis of the first flow path. When,
A first tube having one end connected to the joint member and the other end to which the anode target is joined, and extending along the tube axis direction;
A first end portion disposed in the first tube and communicating with the first flow path; and a second end portion for discharging the coolant flowing in from the first end portion toward the anode target. Two tube tubes,
An elastic member formed of an elastic material, which is fitted to the outer periphery of the first end portion, engages with a step portion of the joint member, and contacts the first contact surface and the second contact surface. An elastic member,
An X-ray tube device comprising: The first flow path includes a first small diameter flow path, a first large diameter flow path having a larger diameter than the first small diameter flow path, and a step located between the first small diameter flow path and the first large diameter flow path. Have
The one end of the first tube is joined to the joint member and communicates with the first large-diameter channel, and the first end of the second tube is passed through the first large-diameter channel and the first The X-ray tube apparatus according to claim 1, wherein the X-ray tube apparatus is inserted into a small-diameter channel.   The first contact surface and the second contact surface of the stepped portion are each configured by a plane orthogonal to the central axis of the first flow path, and are spaced along the direction of the central axis of the first flow path. The X-ray tube apparatus according to claim 1, wherein the X-ray tube apparatuses face each other.   The first contact surface and the second contact surface of the stepped portion are each configured by a plane or a curved surface extending in a direction intersecting with the central axis of the first flow path, The X-ray tube apparatus according to claim 1, wherein the X-ray tube apparatuses are opposed to each other at intervals along the direction.   The X-ray tube apparatus according to claim 1, wherein the elastic member is made of synthetic resin or rubber.   The X-ray tube apparatus according to any one of claims 1 to 4, wherein the elastic member is formed of at least one of silicone rubber, fluorine rubber, ethylene / propylene rubber, and nitrile rubber.   The X-ray tube apparatus according to claim 1, wherein the elastic member is formed in an O-ring shape or a pipe shape.   The X-ray tube apparatus according to claim 7, wherein the elastic member has a circular cross section.   The elastic member has a stepped cylindrical shape having a large-diameter portion and a small-diameter portion smaller than the large-diameter portion, and the large-diameter portion is in a first engagement abutting against the first abutment surface. The X-ray tube apparatus according to claim 1, further comprising a surface and a second engagement surface that is in contact with the second contact surface.

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