KR102408403B1 - Susceptor and Vaccum chamber including the same - Google Patents

Abstract

The present invention relates to a susceptor in which a lower body and an upper body are detachably coupled to improve thermal uniformity of an upper body on which glass is placed, and a vacuum chamber including the same.

Description

Susceptor and vacuum chamber including the same { Susceptor and Vaccum chamber including the same }

The present invention relates to a susceptor in which a heating wire is embedded in a body and a glass is placed on an upper surface thereof, and a vacuum chamber including the same.

A liquid crystal display (LCD) refers to a non-light emitting device that obtains an image effect by injecting liquid crystal between an array substrate and a color filter substrate and using its characteristics. These array substrates and color filter substrates are each manufactured through deposition, patterning, and etching processes of a thin film on a transparent substrate made of a material such as glass, and the reaction and source material are introduced into the vacuum chamber and deposited in the gas phase. When a process is to be performed, a susceptor in which a heater is embedded is installed inside the vacuum chamber so that the substrate is seated and heated to an appropriate temperature for deposition.

As a conventional susceptor, there is one described in Korean Patent No. 0945441 (refer to FIG. 1).

The vacuum chamber in which the thin film deposition reaction proceeds is divided into an upper lid and a chamber body. A gas distribution unit composed of a backing plate and a shower head is formed inside the upper lid across the upper end of the vacuum chamber. After the source gas supplied from the external gas storage unit is introduced into the gas distribution unit via a gas line , is sprayed onto the upper surface of the substrate through a plurality of through-holes installed in the gas distribution unit. In particular, in the PECVD apparatus, the gas distribution unit is connected to an external RF power supply and functions as an upper electrode that activates the source gas injected onto the substrate into a plasma state.

Meanwhile, a susceptor body spaced apart from the gas distribution unit by a predetermined distance is installed inside the chamber body, and the substrate is seated on its upper surface. A susceptor shaft is coupled to a lower center of the susceptor body while passing through a lower end of the chamber to support the susceptor body. A heater is embedded in the inner surface of the susceptor body to heat the substrate placed on the upper surface of the susceptor to a predetermined temperature so that the source gas is deposited on the upper surface of the substrate. At this time, when the supplied source gas is excited by plasma treatment, the susceptor body is electrically grounded. That is, the susceptor body functions as a lower electrode corresponding to the gas distribution unit functioning as the upper electrode while supplying heat at an appropriate temperature to the substrate placed on the upper surface of the susceptor body.

The susceptor shaft moves up and down according to the loading/unloading of the substrate to the upper surface of the susceptor body to vertically interlock the susceptor body coupled to the upper end thereof. For this elevating movement, a driving unit is installed on the outer periphery of the susceptor body and is connected to a driving means such as a motor. In other words, the susceptor shaft serves as a shaft for transmitting the power transmitted from the outside through the driving unit in addition to the role of supporting the susceptor body so as to be raised and lowered while maintaining the horizontal.

The upper end of the susceptor shaft is sealed by welding after joining with the center of the lower surface of the susceptor body. In each of the region adjacent to the center and the region adjacent to the periphery of the bottom surface of the susceptor body, a buried groove is formed symmetrically to each other, and the heater is accommodated therein. When the heater is inserted into the buried groove, an aluminum cover is installed from the lower end of the buried groove to its bottom surface.

On the other hand, the upper portion of the susceptor body on which the substrate is mounted, a temperature deviation occurs depending on the distance from the embedded heater. Due to the temperature deviation of the upper portion of the susceptor body, the properties of the film quality are different for each portion of the substrate. In the case of small substrates, the difference in film quality according to the above temperature deviation did not significantly affect the quality of the finished product, but in recent large substrates, the need for high-quality film formation with reduced film quality characteristics change due to temperature deviation has emerged. However, there is a limit in improving the thermal uniformity of the upper portion of the susceptor body in the prior art.

Korean Patent No. 0945441

The present invention has been devised to solve the above problems, and an object of the present invention is to provide a susceptor having improved thermal uniformity of an upper body on which a glass is placed and a vacuum chamber including the same.

In order to achieve the above object, the susceptor of the present invention, the upper body; a lower body positioned below the upper body; a heating wire embedded in the lower body; a rod connected to a lower surface of the lower body; Including, wherein the upper body and the lower body is characterized in that it is detachably coupled.

In addition, the upper body is characterized in that it has a rectangular parallelepiped shape having a constant height.

In addition, it is characterized in that a stepped portion stepped downward with respect to the upper surface is formed around the side surface of the upper body.

In addition, it is characterized in that the first protrusion protruding outward along the circumference is formed on the side surface of the upper body.

In addition, the area of the glass surface of the upper body is characterized in that smaller than the area of the lower body.

In addition, a concave groove is formed on the upper surface of the lower body, and the upper body is inserted into the groove and coupled to the lower body.

In addition, a concave groove is formed in one of the lower surface of the upper body and the upper surface of the lower body, and a second protrusion is formed to protrude in the other, and the second protrusion is inserted into the groove so that the upper body is inserted into the lower body. It is characterized in that it is coupled to the body.

In addition, at least one of the groove and the second protrusion is characterized in that the guide inclined portion is formed.

In addition, the upper body and the lower body are characterized in that a plurality of grooves and protrusions are fitted to each other and coupled.

In addition, the upper body and the lower body is characterized in that the bolt is coupled.

In addition, the lower surface of the upper body or the upper surface of the lower body is characterized in that the sandblasted.

In addition, the contact portion of the two of the surfaces of the upper body and the lower body is characterized in that the metal-to-metal contact is made.

In addition, the metal-to-metal contact is characterized in that the non-anodizing treatment region.

In addition, the upper body is made of an aluminum material, and the surface thereof is anodized.

In addition, the upper body is characterized in that made of a ceramic material.

In addition, the upper body is characterized in that the surface of the ceramic material is divided.

In addition, it is characterized in that the upper body is divided into a size corresponding to the divided area of the glass.

In addition, the upper body is made of aluminum and is characterized in that the surface is coated with ceramic.

In addition, the upper body is characterized in that it comprises a first upper body made of a ceramic material, and a second upper body coupled to the upper portion of the first upper body, made of aluminum and having an anodized surface.

In addition, the upper body and the lower body are characterized in that the upper body is supported by the lower body through a surface contact.

In addition, the upper body and the lower body are characterized in that the upper body is supported by the lower body through a plurality of line contact.

In addition, the upper body and the lower body are characterized in that the upper body is supported by the lower body through a plurality of point contact.

The vacuum chamber of the present invention, the upper body; a lower body positioned below the upper body; a heating wire embedded in the lower body; a rod connected to a lower surface of the lower body; Including a susceptor, characterized in that the upper body and the lower body are detachably coupled.

According to the present invention, there are the following effects.

By improving the thermal uniformity of the upper body, the temperature deviation of the glass can be reduced, and a high-quality film can be formed.

1 is a cross-sectional view showing a conventional susceptor.
Figure 2 is a perspective view (upper body and lower body separation) of the susceptor according to the first preferred embodiment of the present invention.
Figure 3 is a bottom perspective view of Figure 2;
4 is a cross-sectional view of the susceptor according to the first embodiment (including upper body and lower body combination, lift pins, elevating member, and glass).
5 is a cross-sectional view showing a susceptor according to a second preferred embodiment of the present invention.
6 is a cross-sectional view showing a susceptor according to a third preferred embodiment of the present invention.
7 is a cross-sectional view showing a susceptor according to a fourth preferred embodiment of the present invention.
8 is a cross-sectional view showing a susceptor according to a fifth preferred embodiment of the present invention.
9 is a cross-sectional view showing a susceptor according to a sixth preferred embodiment of the present invention.
10 is a cross-sectional view showing a modified example of the material of the upper body.
11 is a cross-sectional view showing a modified example of the upper body made of a ceramic material.
12 to 15 are cross-sectional views showing modified examples of the coupling structure of the upper body and the lower body.
Figure 16 is a state diagram of the separation of the upper body and the lower body showing a modified example of the line contact in the coupling structure of Figure 15.
Figure 17 is a state diagram of the separation of the upper body and the lower body showing a modified example of the point contact in the coupling structure of Figure 15.
18 is a cross-sectional view showing a state in which the lower surface of the upper body and the upper surface of the lower body are sandblasted.
19 is a cross-sectional view showing a state in which the surface except for the contact portion of the upper body and the lower body is anodized.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Advantages and features of the present invention, and a method for achieving them will become apparent with reference to the detailed description below in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments described herein, and may be embodied in different forms. Rather, the embodiments introduced herein are provided so that the disclosed content may be thorough and complete, and the spirit of the present invention may be sufficiently conveyed to those skilled in the art, and the present invention is only defined by the scope of the claims. Like reference numerals refer to like elements throughout.

The terminology used herein is for the purpose of describing the embodiments and is not intended to limit the present invention. In this specification, the singular also includes the plural unless specifically stated otherwise in the phrase. As used herein, 'comprises' and/or 'comprising' means that a referenced component, step, operation and/or element is the presence of one or more other components, steps, operations and/or elements. or addition is not excluded. In addition, since it is according to a preferred embodiment, reference signs provided in the order of description are not necessarily limited to the order.

Embodiments described herein will be described with reference to cross-sectional and/or plan views, which are ideal illustrative views of the present invention. In the drawings, thicknesses of films and regions are exaggerated for effective description of technical content. Accordingly, the shape of the illustrative drawing may be modified due to manufacturing technology and/or tolerance. Accordingly, embodiments of the present invention are not limited to the specific form shown, but also include changes in the form generated according to the manufacturing process. Accordingly, the regions illustrated in the drawings have a schematic nature, and the shapes of the illustrated regions in the drawings are intended to illustrate specific shapes of regions of the device and not to limit the scope of the invention.

For reference, among the components of the present invention to be described below, the same components as those of the prior art are well known in the prior art, including the above-described prior art, and thus a separate detailed description thereof will be omitted.

The susceptor according to the first preferred embodiment of the present invention, as shown in FIGS. 2 to 4, an upper body 300; and a lower body 100 positioned under the upper body 300; and, A heating wire 114 embedded in the interior of the lower body 100; and a rod 400 connected to the lower surface of the lower body 100; including, but the upper body 300 and the lower body 100 are detachably characterized in that it is coupled.

The lower body 100 includes a heater unit 110 including a heating wire 114 embedded in the lower body 100 . As shown in FIG. 3 , the heater unit 110 is formed on the lower surface of the lower body 100 . In particular, as shown in FIG. 3 , a portion adjacent to the central portion and a portion adjacent to the edge of the lower body 100 may be formed.

As shown in FIG. 4 , the heater unit 110 includes a heating wire 114 inserted into a buried groove formed on the lower surface of the lower body 100 , and a support member 116 disposed below the heating wire 114 . and a cover 118 disposed under the support member 116 to cover the opening of the buried groove.

The heating wire 114 embedded in the lower body 100 is formed to extend through the inside of the rod 400 coupled to the center of the lower surface of the lower body 100, as shown in FIG. 4 . The lower body 100 is heated through the heating wire 114, and heat is transferred so that the upper body 300 is heated.

A support member 116 is disposed under the heating wire 114 . The support member 116 is positioned between the heating wire 114 and the cover 118 . The upper surface of the support member 116 forms a parabolic shape convex downward. A heating wire 114 is placed on the upper surface of the support member 116 to support the heating wire 114 .

A cover 118 is disposed under the support member 116 . The cover 118 may cover the opening of the buried groove and be coupled to the lower surface of the lower body 100 by welding (particularly, friction stir welding). The width of the cover 118 is greater than the support member 116 .

The lower body 100 according to the first embodiment is formed in a rectangular parallelepiped shape, and a concave groove 130 is formed in the center of the upper surface thereof. The groove 130 may be formed in a rectangular shape in a horizontal cross section, and the upper body 300 is inserted into the groove 130 and coupled to the lower body 100 .

The upper body 300 may be formed in a rectangular parallelepiped shape with a side surface having a constant height, as shown in FIG. 2 . The side circumference of the upper body 300 is formed smaller than the side circumference of the lower body 100 . The upper surface of the upper body 300 is a glass surface 301 on which the glass 600 is placed. The area of the glass surface 301 is smaller than the area of the lower body 100 . The circumference of the glass surface 301 is smaller than the circumference of the side surface of the lower body 100 .

The perimeter of the side of the upper body 300 is formed smaller than the perimeter of the inner side of the groove 130 formed in the lower body 100, and the upper body 300 is inserted into the groove 130, thereby lowering the body 100. is easily coupled to

As described above, the outer body size of the susceptor formed by combining the separated upper body 300 and the lower body 100 may be the same as the body outer size of the conventional integrally formed susceptor. In other words, the size of the area, height, shape, etc. of the body of the susceptor according to the present invention is the same as the area, height, shape, etc. of the body of the susceptor according to the prior art.

On the other hand, as shown in FIGS. 2 to 4 , a plurality of through holes 120 are formed in the lower body 100 and the upper body 300 . The through hole 120 is formed through the upper and lower surfaces of the lower body 100 and the upper body 300 as shown in FIG. 4 . A lift pin 500 is disposed inside the through hole 120 to move up and down to lift the glass 600 .

The glass 600 is placed on the glass surface 301 , which is the upper surface of the upper body 300 , and then undergoes film formation, patterning and etching processes, and is lifted by the lift pins 400 . When the glass 600 is lifted, a moving member (not shown) is inserted into the space between the glass surface 301 which is the upper surface of the upper body 300 and the glass 600 to move the glass 600 .

The lift pin 500 is formed in a bar shape, and an upper cross-section is formed in an inverted triangle shape. The lower end of the lift pin 500 is connected to the lifting member 505 . The lift pin 500 reciprocates inside the through hole 120 formed in the lower body 100 and the upper body 300 to lift or lower the glass 600 .

As shown in FIG. 4 , the lifting member 505 includes a cylindrical portion disposed adjacent to the outer periphery of the rod 400 and a flat portion connected to the upper end of the cylindrical portion. The lift pin 500 is connected to the upper surface of the flat part.

The lifting member 505 serves to lift or lower the glass 600 through the lift pin 500 while moving up and down, as shown in FIG. 4 .

Meanwhile, a cylindrical rod 400 is coupled to the center of the lower surface of the lower body 100 . The upper end of the rod 400 may be welded (in particular, friction stir welding) to the center of the lower surface of the lower body 100 . A heating wire 114 embedded in the lower body 100 is extended and disposed inside the rod 400 . The rod 400 supports the lower body 100 .

Hereinafter, various embodiments of the lower body 100 and the upper body 300 will be described with reference to FIGS. 5 to 9 . Hereinafter, descriptions of the same parts as those of the first embodiment will be omitted, and only differences will be described. Various embodiments of the lower body 100 and the upper body 300 according to the preferred embodiment of the present invention may be appropriately selected within the technical scope in consideration of the technical spirit of the present invention.

In the susceptor according to the second embodiment, as shown in FIG. 5, the lower body 100a is formed in a rectangular parallelepiped shape with a side surface having a constant height, and there is no groove 130 on the upper surface as in the first embodiment. formed flat. And the upper body (300a) is mounted on the upper surface of the lower body (100a) can be coupled. The upper body 300a has a rectangular parallelepiped shape with a constant side height. The upper body 300a is disposed inside the circumference of the lower body 100a, and the side circumference of the upper body 300a is smaller than the side circumference of the lower body 100a. A glass 600 is raised and supported on the upper surface of the upper body 300a.

In the susceptor according to the third embodiment, as shown in FIG. 6 , the lower body 100b is formed in a rectangular parallelepiped shape, and a groove b ( 130b ) is formed in the center of the upper surface. The central portion 302 of the upper body 300b is inserted into the groove b (130b) and coupled thereto. In addition, a first protrusion 303 protruding outward along the circumference is formed on the side surface of the upper body 300b.

The upper body 300b is formed in a rectangular parallelepiped shape and includes a central portion 302 having a lower portion inserted into the groove b (130b), and a first protruding portion 303 protruding outward along the periphery of the side surface of the central portion 302. . The first protrusion 303 is formed along the circumference of the side center of the central portion 302 . The side circumference of the first protrusion 303 may be the same as the side circumference of the lower body 100b. The first protrusion 303 is disposed outside the groove b (130b).

The upper body 300b is coupled to the lower portion of the central portion 302 by being inserted into the groove b (130b). The lower surface of the central portion 302 is in contact with the inner lower surface of the groove b (130b), the lower surface of the first protrusion 303 is in contact with the upper surface of the lower body (100b). The upper surface of the central portion 302 is the glass surface 301 on which the glass 600 is placed.

In the susceptor according to the fourth embodiment, as shown in FIG. 7 , the lower body 100c is formed in a rectangular parallelepiped shape. A rectangular parallelepiped-shaped upper body 300c is mounted on the upper surface of the lower body 100c and is coupled thereto. A stepped portion 310 stepped downward with respect to the upper surface is formed around the side surface of the upper body 300c.

The step portion 310 is formed along the upper circumference of the side surface of the upper body 300c. The glass 600 is disposed inside the step portion 310 and is supported by being placed on the upper surface of the central portion of the upper body 300c.

On the other hand, as shown in Fig. 8 or 9, the susceptor has a concave groove (130d, 130e) is formed in any one of the lower surface of the upper body (300d, 300e) and the upper surface of the lower body (100d, 100e), Second protrusions 305 and 307 are formed in the other one.

In the susceptor according to the fifth embodiment, as shown in FIG. 8, the lower body 100d is formed in a rectangular parallelepiped shape, and a groove d (130d) is formed in the center of the upper surface thereof. The inner side of the groove d (130d) is a guide inclined portion a (132d) inclined outward toward the upper side.

The upper body 300d according to the fifth embodiment is formed in a rectangular parallelepiped shape, and a second protrusion a 305 protruding downward is formed in the center of the lower surface thereof. The second protrusion a (305) is formed to protrude in a shape corresponding to the inner surface of the groove d (130d). So, the lower surface of the second protrusion a (305) is in contact with the inner lower surface of the groove d (130d), and the side surface of the second protrusion a (305) is the guide inclined portion a (132d), on the inner side of the groove d (130d). touch The side surface of the second protrusion a (305) is formed to be inclined toward the center of the upper body (300d) toward the lower side so as to correspond to the inner side surface of the groove d (130d).

By inserting the second protrusion a (305) into the groove d (130d), the upper body (300d) is coupled to the lower body (100d). Due to the guide inclined portion a (132d), the coupling of the upper body (300d) to the lower body (100d) is easy. In addition, a stepped portion 310 stepped downward with respect to the upper surface is formed around the upper side of the upper body 300d.

In the susceptor according to the sixth embodiment, as shown in FIG. 9 , the lower body 100e is formed in a rectangular parallelepiped shape, and a second protrusion b 307 protruding upward in the center of the upper surface is formed. The side surface of the second protrusion b 307 is a guide inclined portion b 132e that is inclined toward the center of the upper body 300e toward the upper side.

In addition, the upper body 300e according to the sixth embodiment is formed in a rectangular parallelepiped shape, and a concave groove e (130e) is formed in the center of the lower surface thereof. The inner side of the groove e (130e) is a guide inclined portion b (132e) inclined outward toward the lower side. The inner surface of the groove e (130e) has a shape corresponding to the outer surface of the second protrusion b (307). The upper surface of the second protrusion b 307 is in contact with the inner upper surface of the groove e 130e, and the side surface of the second protrusion b 307 is in contact with the guide inclined portion b 132e, which is the inner side surface of the groove e 130e. As the second protrusion b 307 is inserted into the groove e 130e, the upper body 300e is coupled to the lower body 100e. Due to the guide inclined portion b (132e), the coupling of the upper body (300e) to the lower body (100e) is easy. In addition, a stepped portion 310 stepped downward with respect to the upper surface is formed around the upper side of the upper body 300e.

Hereinafter, materials of the upper body 300g, 300h, 300i, 300j, and 300k will be described with reference to FIG. 10 . The material of the upper body (300g, 300h, 300i, 300j, 300k) according to the following preferred embodiments of the present invention may be appropriately selected within the technical scope in consideration of the technical spirit of the present invention.

As shown in Figure 10 (a), the upper body (300g) is made of an aluminum material, the surface may be anodized. The upper body (300g) may be covered with anodized aluminum as the entire surface is anodized.

In addition, as shown in FIG. 10(b), the upper body 300h is made of an aluminum material, and the surface other than the lower surface of the upper body 300h may be anodized. Therefore, the anodized aluminum may be covered on the remaining surface except for the lower surface of the upper body 300h. In this case, as the ground strip is installed on the lower surface of the lower body 100 of the susceptor, the upper body 300h and the lower body 100 of the susceptor are electrically energized, so that the lower surface of the upper body 300h When the lower body 100 in contact with the lower body 100 is electrically grounded, the upper body 300h may also be electrically grounded.

Also, as shown in FIG. 10(c), the upper body 300i may be made of a ceramic material. Also, the upper body 300i made of a ceramic material may be integrally formed as shown in FIG. 11( a ). In addition, as shown in FIGS. 11 ( b ) and 11 ( c ), the surface may be divided into a plurality of unit bodies 300i - 1 and 300i - 2 . In particular, the upper body 300i of FIG. 11(c) is divided into four unit bodies 300i-2, and has a size corresponding to the divided area of the glass 600 mounted on the upper surface of the upper body 300i. it will be divided

In addition, as shown in FIG. 10( d ), the upper body 300j is made of aluminum and may be coated with a ceramic on its surface. The entire surface of the upper body 300j may be covered with ceramic.

In addition, as shown in Figure 10 (e), the upper body (300k) is coupled to the upper portion of the first upper body (300k-1) and the first upper body (300k-1) made of a ceramic material, aluminum The material may include a second upper body 300k-2 whose surface is anodized. The first upper body 300k-1 and the second upper body 300k-2 are stacked vertically. The entire surface of the second upper body 300k-2 is covered with anodized aluminum.

Hereinafter, a coupling structure of the lower body 100, 100a, 100b, 100L and the upper body 300, 300a, 300b, 300L will be described with reference to FIGS. 12 to 17 . The coupling structure of the lower body (100, 100a, 100b, 100L) and the upper body (300, 300a, 300b, 300L) according to a preferred embodiment of the present invention below is appropriately selected within the technical scope in consideration of the technical spirit of the present invention can be

2 and 4, a concave groove is formed on the upper surface of the lower body 100, and the upper body 300 may be inserted into the groove and coupled thereto. 12 is an enlarged view of a portion of the upper body 300 inserted into the groove of the lower body 100 . In this case, the upper body 300 may be coupled to the lower body 100 without a separate coupling means.

Also, as shown in FIG. 13 , the upper body 300a may be coupled to the lower body 100a by a bolt 330 . The bolt 330 may be inserted from the lower surface of the lower body 100a to penetrate the lower body 100a in the vertical direction, and then be coupled to the upper body 300a.

Also, as shown in FIG. 14 , the upper body 300a and the lower body 100a may be coupled with a plurality of grooves 340 and protrusions 342 fitted to each other. 14, on the upper surface of the lower body 100a, a plurality of protrusions 342 are spaced apart from each other and protrude upward, and on the lower surface of the upper body 300a, a plurality of concave grooves 340 into which the protrusions 342 are inserted. this is formed By inserting the protrusion 342 into the groove 340, the upper body 300a is coupled to and supported by the lower body 100a. The upper circumference of the protrusion 342 is formed smaller than the circumference of the inner circumferential surface of the groove 340 , so that a space 341 may be formed between the groove 340 and the protrusion 342 . Due to the space 341, heat can be uniformly transferred to the upper body 300a, so that the thermal uniformity of the upper body 300a can be improved. In the second embodiment shown in FIG. 5, the coupling structure of FIG. 13 or 14 may be preferable.

In the coupling structure shown in FIGS. 12 to 14 , the upper body 300 and 300a is supported on the lower body 100 and 100a through surface contact between the lower surfaces of the upper bodies 300 and 300a and the upper surfaces of the lower bodies 100 and 100a. do. It has the advantage of saving heating power because heat conducts well when it comes into contact with the surface.

On the other hand, as shown in FIG. 15 , the lower body 100L includes a plurality of support parts 344 spaced apart from each other by protruding upward from the upper surface, and a protrusion 342 protruding upward from the upper surface of the support part 344 . The upper portion of the protrusion 342 is formed in a semicircular cross-section, and the upper surface of the support part 344 is formed to be stepped upward with respect to the upper surface of the lower body 100L. The side circumference of the support 344 is larger than the side circumference of the protrusion 342 , and the projection 342 is located inside the side circumference of the support 344 .

And a groove 340 having a shape corresponding to the outer surface of the protrusion 342 is formed on the lower surface of the upper body 300L, and the protrusion 342 is inserted. When the upper body 300L is coupled to the lower body 100L, the protrusion 342 is inserted into the groove 340 , and the lower surface of the upper body 300L is supported in contact with the upper surface of the support part 344 . Therefore, a spaced space 345 is formed between the lower surface of the upper body 300L and the upper surface of the lower body 100L.

The coupling structure of FIG. 15 may be a line contact type in which the uppermost end of the protrusion 342a is in contact with the upper body 300L along a plurality of lines as shown in FIG. 16, and as shown in FIG. 17, the uppermost end of the protrusion 342b is uppermost It may be in the form of point contact with the body (300L).

In the present invention, when the uppermost end of the protrusion 342 is in line contact with the upper body 300L, it is referred to as line contact, and when in point contact, it is referred to as point contact.

As shown in FIG. 16 , the support part 344a and the protrusion 342a may extend in the front-rear direction of the lower body 100L to be formed in a bar shape. In addition, a linear groove 340 extending in the front-rear direction of the upper body 300L is formed on the lower surface of the upper body 300L to correspond to the linear projections 342a.

As shown in Fig. 16, the upper body (300L) and the lower body (100L) are connected to the upper body (300L) through a plurality of line contacts through the support part (344a) and the protrusion (342a) and the groove (340) extending in the front-rear direction as shown in FIG. may be supported by being coupled to the lower body 100L.

Also, as shown in FIG. 17 , the support 344b may have a disk shape, and the protrusion 342b may have a cylindrical shape and a hemispherical upper portion thereof. A plurality of support portions 344b and protrusions 342b having the above-described shapes may be formed spaced apart from the upper surface of the lower body 100L. And a plurality of concave grooves 340 are formed on the lower surface of the upper body 300L in correspondence to the support portion 344b and the protrusion 342b formed on the upper surface of the lower body 100L, and the protrusion 342b is the groove 340. is inserted into 17 through the support portion 344b and the protrusion 342b, the groove 340, the upper body 300L and the lower body 100L through a plurality of point contacts, the upper body 300L and the lower body 100L ) can be coupled to and supported.

The lower body 100L heated through the heating wire 114 is, as shown in FIGS. 16 and 17, from the lower body 100L to the upper body 300L, when heat is conducted through a plurality of line contact or point contact, the upper body (300L) can improve the thermal uniformity. In other words, the thermal uniformity of the glass surface, which is the upper surface of the upper body 300L, is improved, so that the temperature deviation of the glass 600 can be reduced, and a high-quality film can be formed.

In addition, as shown in FIG. 18 , the lower surface of the upper body 300b or the upper surface of the lower body 100b in contact with each other may be sandblasted. In Figure 18, both the lower surface of the upper body (300b) and the upper surface of the lower body (100b) are formed of the sandblasting surface (350). The sandblasting surface 350 is formed as a concave-convex surface.

In addition, as shown in FIG. 19 , metal-to-metal contact may be made between the two contact portions of the surfaces of the upper body 300L and the lower body 100L. The upper body 300L and the lower body 100L of FIG. 19 have a support 344 and a protrusion 342 formed on the upper surface of the upper body 300L as in FIG. 15, and on the lower surface of the lower body 100L A groove 340 into which the protrusion 342 is inserted is formed.

The upper body 300L and the lower body 100L of FIG. 19 have an anodized surface (thick line), and the upper surface of the support part 344 in which the upper body 300L and the lower body 100L are in contact with the upper surface and the upper body Among the lower surfaces of 300L, a portion corresponding to and in contact with the upper surface of the support portion 344, the outer surface of the protrusion 342, and the inner surface of the groove 340 are non-anodizing regions (thin lines). Since metal-to-metal contact is made in the non-anodizing treatment region described above, when the lower body 100L is electrically grounded, the upper body 300L may also be electrically grounded. All surfaces except for the contact portion of the upper body (300L) and the lower body (100L) are anodized.

The vacuum chamber (not shown) of the present invention has an upper body 300 as described above, a lower body 100 positioned under the upper body 300, and a heating wire embedded in the lower body 100 ( 114) and a rod 400 connected to the lower surface of the lower body 100, and the upper body 300 and the lower body 100 include a susceptor, characterized in that it is detachably coupled. Since many of the vacuum chambers are known in the prior art, including the above-described prior art, a separate detailed description thereof will be omitted.

As described above, although described with reference to preferred embodiments of the present invention, those skilled in the art can variously modify or modify the present invention without departing from the spirit and scope of the present invention as set forth in the claims below. can be carried out.

100,100a,100b,100c,100d,100e: lower body
110: heater unit 114: heating wire
116: support member 118: cover
120: through hole 130: groove
130b: home b 130d: home d
130e: groove e 132d: guide slope a
132e: guide inclined portion b
300,300a,300b,300c,300d,300e,300g,300h,300i,300j,300k: upper body
300i-1,300i-2: unit body
300k-1: first upper body 300k-2: second upper body
301: glass surface 302: center
303: first protrusion 305: second protrusion a
307: second protrusion b 310: step part
330: bolt 340: groove
341: space
342: projection 342a: projection a
342b: projection b 344: support
344a: support part a 344b: support part b
345: separation space 350: sandblasting surface
400: rod 500: lift pin
505: elevating member 600: glass

Claims (23)

upper body;
a lower body positioned below the upper body;
a heating wire embedded in the lower body;
a rod connected to a lower surface of the lower body; including,
The upper body and the lower body are detachably coupled,
A concave groove is formed in any one of the lower surface of the upper body and the upper surface of the lower body, and in the other, a second protrusion is formed that is inserted into the groove so that the upper body is coupled to the lower body,
The second protrusion is formed to protrude in a shape corresponding to the inner surface of the groove,
The inner side of the groove is formed to be inclined outwardly from the bottom of the groove to the inlet,
A side surface of the second protrusion is inclined to correspond to the slope of the inner side surface of the groove and is in contact with the inner side surface of the groove.
The method according to claim 1,
The upper body is a susceptor, characterized in that the rectangular parallelepiped shape having a constant height.
The method according to claim 1,
A susceptor, characterized in that a step portion stepped downward with respect to the upper surface is formed around the side surface of the upper body.
The method according to claim 1,
A susceptor, characterized in that the first protrusion protruding outward along the circumference is formed on the side surface of the upper body.
5. The method according to any one of claims 2 to 4,
The susceptor, characterized in that the area of the glass surface of the upper body is smaller than the area of the lower body.
delete delete delete The method according to claim 1,
The upper body and the lower body are susceptor, characterized in that the plurality of grooves and protrusions are fitted to each other and coupled.
The method according to claim 1,
The susceptor, characterized in that the upper body and the lower body is bolted.
The method according to claim 1,
A susceptor, characterized in that the lower surface of the upper body or the upper surface of the lower body is sandblasted.
The method according to claim 1,
The susceptor, characterized in that the metal-to-metal contact is made between the two contact portions of the surfaces of the upper body and the lower body.
13. The method of claim 12,
The susceptor, characterized in that the metal-to-metal contact is a non-anodizing treatment area.
The method according to claim 1,
The upper body is made of aluminum and its surface is anodized.
The method according to claim 1,
The upper body is a susceptor, characterized in that made of a ceramic material.
16. The method of claim 15,
The upper body is a susceptor, characterized in that the ceramic material is divided.
17. The method of claim 16,
The susceptor, characterized in that the upper body is divided into a size corresponding to the divided area of the glass.
The method according to claim 1,
The upper body is a susceptor, characterized in that the aluminum material and ceramic coating on the surface.
The method according to claim 1,
The upper body includes a first upper body made of a ceramic material;
A susceptor coupled to the upper portion of the first upper body, and comprising a second upper body made of aluminum and having an anodized surface.
The method according to claim 1,
The upper body and the lower body are susceptor, characterized in that the upper body is supported by the lower body through a surface contact.
The method according to claim 1,
The upper body and the lower body are susceptor, characterized in that the upper body is supported by the lower body through a plurality of line contact.
The method according to claim 1,
The upper body and the lower body are susceptor, characterized in that the upper body is supported by the lower body through a plurality of point contact.
upper body; a lower body positioned below the upper body; a heating wire embedded in the lower body; a rod connected to a lower surface of the lower body; Including, wherein the upper body and the lower body are detachably coupled, a concave groove is formed on one of the lower surface of the upper body and the upper surface of the lower body, and the other is inserted into the groove and the A second protrusion is formed so that the upper body is coupled to the lower body, the second protrusion is formed to protrude in a shape corresponding to the inner surface of the groove, and the inner side surface of the groove is from the bottom of the groove to the inlet. A vacuum chamber including a susceptor, which is formed to be inclined outwardly, and a side surface of the second protrusion is formed to be inclined to correspond to the inclination of the inner side surface of the groove and is in contact with the inner side surface of the groove.

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