KR102403580B1 - 쉬운 조립을 위한 초소형 또는 초박형 개별 컴포넌트의 구성 - Google Patents
쉬운 조립을 위한 초소형 또는 초박형 개별 컴포넌트의 구성 Download PDFInfo
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- KR102403580B1 KR102403580B1 KR1020217008078A KR20217008078A KR102403580B1 KR 102403580 B1 KR102403580 B1 KR 102403580B1 KR 1020217008078 A KR1020217008078 A KR 1020217008078A KR 20217008078 A KR20217008078 A KR 20217008078A KR 102403580 B1 KR102403580 B1 KR 102403580B1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
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- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
- B32B37/26—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with at least one layer which influences the bonding during the lamination process, e.g. release layers or pressure equalising layers
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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- H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/02—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by a sequence of laminating steps, e.g. by adding new layers at consecutive laminating stations
- B32B37/025—Transfer laminating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/12—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by using adhesives
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B38/00—Ancillary operations in connection with laminating processes
- B32B38/0004—Cutting, tearing or severing, e.g. bursting; Cutter details
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B38/00—Ancillary operations in connection with laminating processes
- B32B38/10—Removing layers, or parts of layers, mechanically or chemically
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B32B38/00—Ancillary operations in connection with laminating processes
- B32B38/18—Handling of layers or the laminate
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- H05K1/00—Printed circuits
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
- B32B37/26—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with at least one layer which influences the bonding during the lamination process, e.g. release layers or pressure equalising layers
- B32B2037/268—Release layers
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B38/00—Ancillary operations in connection with laminating processes
- B32B38/0012—Mechanical treatment, e.g. roughening, deforming, stretching
- B32B2038/0016—Abrading
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B32B38/00—Ancillary operations in connection with laminating processes
- B32B38/04—Punching, slitting or perforating
- B32B2038/045—Slitting
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/40—Properties of the layers or laminate having particular optical properties
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2310/00—Treatment by energy or chemical effects
- B32B2310/08—Treatment by energy or chemical effects by wave energy or particle radiation
- B32B2310/0806—Treatment by energy or chemical effects by wave energy or particle radiation using electromagnetic radiation
- B32B2310/0831—Treatment by energy or chemical effects by wave energy or particle radiation using electromagnetic radiation using UV radiation
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2457/00—Electrical equipment
- B32B2457/14—Semiconductor wafers
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- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
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- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
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- H01L2221/68381—Details of chemical or physical process used for separating the auxiliary support from a device or wafer
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
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- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Dicing (AREA)
- Die Bonding (AREA)
- Adhesive Tapes (AREA)
- Adhesives Or Adhesive Processes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020227017274A KR102866272B1 (ko) | 2014-08-05 | 2015-08-04 | 쉬운 조립을 위한 초소형 또는 초박형 개별 컴포넌트의 구성 |
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201462033595P | 2014-08-05 | 2014-08-05 | |
| US62/033,595 | 2014-08-05 | ||
| US201462060928P | 2014-10-07 | 2014-10-07 | |
| US62/060,928 | 2014-10-07 | ||
| KR1020177006045A KR102240810B1 (ko) | 2014-08-05 | 2015-08-04 | 쉬운 조립을 위한 초소형 또는 초박형 개별 컴포넌트의 구성 |
| PCT/US2015/043550 WO2016022528A1 (en) | 2014-08-05 | 2015-08-04 | Setting up ultra-small or ultra-thin discrete components for easy assembly |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020177006045A Division KR102240810B1 (ko) | 2014-08-05 | 2015-08-04 | 쉬운 조립을 위한 초소형 또는 초박형 개별 컴포넌트의 구성 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020227017274A Division KR102866272B1 (ko) | 2014-08-05 | 2015-08-04 | 쉬운 조립을 위한 초소형 또는 초박형 개별 컴포넌트의 구성 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20210033071A KR20210033071A (ko) | 2021-03-25 |
| KR102403580B1 true KR102403580B1 (ko) | 2022-05-30 |
Family
ID=55264414
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020217008078A Active KR102403580B1 (ko) | 2014-08-05 | 2015-08-04 | 쉬운 조립을 위한 초소형 또는 초박형 개별 컴포넌트의 구성 |
| KR1020227017274A Active KR102866272B1 (ko) | 2014-08-05 | 2015-08-04 | 쉬운 조립을 위한 초소형 또는 초박형 개별 컴포넌트의 구성 |
| KR1020177006045A Active KR102240810B1 (ko) | 2014-08-05 | 2015-08-04 | 쉬운 조립을 위한 초소형 또는 초박형 개별 컴포넌트의 구성 |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020227017274A Active KR102866272B1 (ko) | 2014-08-05 | 2015-08-04 | 쉬운 조립을 위한 초소형 또는 초박형 개별 컴포넌트의 구성 |
| KR1020177006045A Active KR102240810B1 (ko) | 2014-08-05 | 2015-08-04 | 쉬운 조립을 위한 초소형 또는 초박형 개별 컴포넌트의 구성 |
Country Status (6)
| Country | Link |
|---|---|
| US (4) | US10529614B2 (enExample) |
| EP (1) | EP3177463A4 (enExample) |
| JP (1) | JP6480583B2 (enExample) |
| KR (3) | KR102403580B1 (enExample) |
| CN (2) | CN113715458A (enExample) |
| WO (1) | WO2016022528A1 (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3177463A4 (en) | 2014-08-05 | 2018-06-27 | Uniqarta, Inc. | Setting up ultra-small or ultra-thin discrete components for easy assembly |
| EP3207563A4 (en) * | 2014-10-17 | 2018-05-30 | Intel Corporation | Micro pick and bond assembly |
| TWI889995B (zh) * | 2016-01-15 | 2025-07-11 | 荷蘭商庫力克及索發荷蘭公司 | 放置超小或超薄之離散組件 |
| CN109478516B (zh) | 2016-04-29 | 2023-06-13 | 库利克和索夫工业公司 | 将电子组件连接至基板 |
| KR20240130146A (ko) | 2017-06-12 | 2024-08-28 | 쿨리케 & 소파 네덜란드 비.브이. | 개별 부품들의 기판 상으로의 병렬적 조립 |
| DE102018009472A1 (de) * | 2018-12-03 | 2020-06-04 | Giesecke+Devrient Currency Technology Gmbh | Aufbringung und Befestigung einer bestimmten Anzahl von Einzelelementen auf einer Substratbahn |
| EP3924999A4 (en) | 2019-02-15 | 2022-11-02 | Kulicke & Soffa Netherlands B.V. | DYNAMIC SEPARATOR TAPES FOR MOUNTING DISCRETE COMPONENTS |
| TWI877175B (zh) | 2019-06-11 | 2025-03-21 | 荷蘭商庫力克及索發荷蘭公司 | 在離散組件組裝中藉由光學系統特性之調整的位置誤差補償 |
| CN115443525A (zh) | 2019-12-17 | 2022-12-06 | 库力索法荷兰有限公司 | 用于接收分立部件的胶带 |
| EP3933902B1 (en) | 2020-06-29 | 2023-05-03 | IMEC vzw | A method for positioning components on a substrate |
| TW202501581A (zh) * | 2021-11-30 | 2025-01-01 | 群創光電股份有限公司 | 電子裝置的製造方法 |
| GB2633617A (en) * | 2023-09-15 | 2025-03-19 | Pragmatic Semiconductor Ltd | Methods and apparatus for facilitating manufacture of an integrated circuit |
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| JP3006866B2 (ja) * | 1990-10-18 | 2000-02-07 | 大日本印刷株式会社 | 転写箔 |
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| FR2823012B1 (fr) * | 2001-04-03 | 2004-05-21 | Commissariat Energie Atomique | Procede de transfert selectif d'au moins un element d'un support initial sur un support final |
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| US8865489B2 (en) * | 2009-05-12 | 2014-10-21 | The Board Of Trustees Of The University Of Illinois | Printed assemblies of ultrathin, microscale inorganic light emitting diodes for deformable and semitransparent displays |
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| US9064686B2 (en) * | 2010-04-15 | 2015-06-23 | Suss Microtec Lithography, Gmbh | Method and apparatus for temporary bonding of ultra thin wafers |
| EP2434528A1 (en) * | 2010-09-28 | 2012-03-28 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | An active carrier for carrying a wafer and method for release |
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| US9496165B1 (en) * | 2015-07-09 | 2016-11-15 | International Business Machines Corporation | Method of forming a flexible semiconductor layer and devices on a flexible carrier |
-
2015
- 2015-08-04 EP EP15830376.8A patent/EP3177463A4/en not_active Withdrawn
- 2015-08-04 KR KR1020217008078A patent/KR102403580B1/ko active Active
- 2015-08-04 CN CN202110824519.1A patent/CN113715458A/zh active Pending
- 2015-08-04 KR KR1020227017274A patent/KR102866272B1/ko active Active
- 2015-08-04 KR KR1020177006045A patent/KR102240810B1/ko active Active
- 2015-08-04 CN CN201580053887.3A patent/CN107107600B/zh active Active
- 2015-08-04 US US15/501,330 patent/US10529614B2/en active Active
- 2015-08-04 JP JP2017527190A patent/JP6480583B2/ja active Active
- 2015-08-04 WO PCT/US2015/043550 patent/WO2016022528A1/en not_active Ceased
-
2019
- 2019-12-24 US US16/726,474 patent/US10937680B2/en active Active
-
2021
- 2021-02-01 US US17/164,269 patent/US11728201B2/en active Active
-
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- 2023-07-31 US US18/228,233 patent/US12412772B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| EP3177463A4 (en) | 2018-06-27 |
| WO2016022528A1 (en) | 2016-02-11 |
| KR20170039281A (ko) | 2017-04-10 |
| US10529614B2 (en) | 2020-01-07 |
| CN113715458A (zh) | 2021-11-30 |
| JP2017528006A (ja) | 2017-09-21 |
| EP3177463A1 (en) | 2017-06-14 |
| KR102866272B1 (ko) | 2025-10-02 |
| KR20210033071A (ko) | 2021-03-25 |
| US20200135534A1 (en) | 2020-04-30 |
| US10937680B2 (en) | 2021-03-02 |
| US20210265191A1 (en) | 2021-08-26 |
| JP6480583B2 (ja) | 2019-03-13 |
| US20170365499A1 (en) | 2017-12-21 |
| CN107107600B (zh) | 2021-07-27 |
| CN107107600A (zh) | 2017-08-29 |
| US20230377936A1 (en) | 2023-11-23 |
| US12412772B2 (en) | 2025-09-09 |
| US11728201B2 (en) | 2023-08-15 |
| KR102240810B1 (ko) | 2021-04-15 |
| KR20220075241A (ko) | 2022-06-07 |
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