KR102403498B1 - 광원 장치 및 검사 장치 - Google Patents

광원 장치 및 검사 장치 Download PDF

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Publication number
KR102403498B1
KR102403498B1 KR1020177034513A KR20177034513A KR102403498B1 KR 102403498 B1 KR102403498 B1 KR 102403498B1 KR 1020177034513 A KR1020177034513 A KR 1020177034513A KR 20177034513 A KR20177034513 A KR 20177034513A KR 102403498 B1 KR102403498 B1 KR 102403498B1
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South Korea
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light
wavelength
optical
light source
input
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Korean (ko)
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KR20180013937A (ko
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도모노리 나카무라
미츠노리 니시자와
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하마마츠 포토닉스 가부시키가이샤
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/50—Amplifier structures not provided for in groups H01S5/02 - H01S5/30
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/265—Contactless testing
    • G01R31/2656—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/50—Amplifier structures not provided for in groups H01S5/02 - H01S5/30
    • H01S5/5045—Amplifier structures not provided for in groups H01S5/02 - H01S5/30 the arrangement having a frequency filtering function
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2601—Apparatus or methods therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G01R31/311—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of integrated circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/50—Amplifier structures not provided for in groups H01S5/02 - H01S5/30
    • H01S5/5027—Concatenated amplifiers, i.e. amplifiers in series or cascaded
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S2301/00—Functional characteristics
    • H01S2301/02—ASE (amplified spontaneous emission), noise; Reduction thereof

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Optics & Photonics (AREA)
  • General Engineering & Computer Science (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Semiconductor Lasers (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Lasers (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Light Receiving Elements (AREA)
KR1020177034513A 2015-05-29 2016-05-10 광원 장치 및 검사 장치 Active KR102403498B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2015110187 2015-05-29
JPJP-P-2015-110187 2015-05-29
PCT/JP2016/063864 WO2016194556A1 (ja) 2015-05-29 2016-05-10 光源装置及び検査装置

Publications (2)

Publication Number Publication Date
KR20180013937A KR20180013937A (ko) 2018-02-07
KR102403498B1 true KR102403498B1 (ko) 2022-05-31

Family

ID=57440607

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020177034513A Active KR102403498B1 (ko) 2015-05-29 2016-05-10 광원 장치 및 검사 장치

Country Status (6)

Country Link
US (1) US10408874B2 (https=)
EP (1) EP3306761B1 (https=)
JP (2) JP6059411B1 (https=)
KR (1) KR102403498B1 (https=)
CN (1) CN107615603B (https=)
WO (1) WO2016194556A1 (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6605651B2 (ja) * 2018-03-27 2019-11-13 株式会社フジクラ レーザモジュール及びレーザ装置
JP7219096B2 (ja) 2019-01-21 2023-02-07 浜松ホトニクス株式会社 分光測定装置および分光測定方法
US11874213B2 (en) * 2020-03-17 2024-01-16 Becton, Dickinson And Company Gain matched amplifiers for light detection
KR102286322B1 (ko) * 2020-05-29 2021-08-06 한국광기술원 마이크로 led 검사 시스템 및 방법
CN111596158A (zh) * 2020-05-29 2020-08-28 苏州市运泰利自动化设备有限公司 基于产品老化测试状态的感光放大系统及方法
CN116057465A (zh) * 2020-09-09 2023-05-02 古河电气工业株式会社 光源、光源装置、光源的驱动方法、拉曼放大器以及拉曼放大系统
EP4213189B1 (en) 2020-09-23 2026-03-04 Hamamatsu Photonics K.K. Inspection device
JP2023084807A (ja) * 2021-12-08 2023-06-20 古河電気工業株式会社 光源、光源装置、光源の駆動方法、ラマン増幅器、およびラマン増幅システム
US20240142512A1 (en) * 2022-10-31 2024-05-02 Texas Instruments Incorporated Semiconductor device testing

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050012988A1 (en) * 2003-07-18 2005-01-20 Seung-Woo Kim Semiconductor optical amplifier and optical amplifier module
US20060045542A1 (en) * 2002-09-19 2006-03-02 Chang-Hee Lee Apparatuses and methods for automatic wavelength locking of an optical transmitter to the wavelength of an injected incoherent light signal
US20130286468A1 (en) * 1998-07-23 2013-10-31 Furukawa Electric Co., Ltd. Raman amplifier, optical repeater, and raman amplification method

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3854673B2 (ja) * 1996-11-25 2006-12-06 株式会社日立コミュニケーションテクノロジー 光増幅媒体制御方法及び光増幅装置並びにそれを利用したシステム
JP3452768B2 (ja) * 1997-08-11 2003-09-29 富士通株式会社 光増幅のための方法及び装置並びに該装置を有するシステム
KR100539928B1 (ko) 2003-08-29 2005-12-28 삼성전자주식회사 다파장 광원 및 그를 이용한 파장 분할 다중 시스템
JP2009049123A (ja) * 2007-08-17 2009-03-05 Fujifilm Corp 光半導体素子、該光半導体素子を用いた波長可変光源および光断層画像取得装置
JP5894745B2 (ja) * 2011-05-31 2016-03-30 浜松ホトニクス株式会社 集積回路検査装置
JP5398804B2 (ja) * 2011-09-16 2014-01-29 株式会社東芝 ファイバレーザ装置
WO2014028013A1 (en) * 2012-08-16 2014-02-20 Massachusetts Institute Of Technology Optical source for interferometric fiber optic gyroscopes
CN104300360B (zh) * 2014-10-16 2018-04-20 浙江大学 一种改善超辐射发光二极管光源波长稳定性的装置和方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130286468A1 (en) * 1998-07-23 2013-10-31 Furukawa Electric Co., Ltd. Raman amplifier, optical repeater, and raman amplification method
US20060045542A1 (en) * 2002-09-19 2006-03-02 Chang-Hee Lee Apparatuses and methods for automatic wavelength locking of an optical transmitter to the wavelength of an injected incoherent light signal
US20050012988A1 (en) * 2003-07-18 2005-01-20 Seung-Woo Kim Semiconductor optical amplifier and optical amplifier module

Also Published As

Publication number Publication date
EP3306761A4 (en) 2019-01-23
KR20180013937A (ko) 2018-02-07
CN107615603B (zh) 2024-06-04
EP3306761A1 (en) 2018-04-11
JP2017092480A (ja) 2017-05-25
JP6714500B2 (ja) 2020-06-24
US20180156860A1 (en) 2018-06-07
US10408874B2 (en) 2019-09-10
JP6059411B1 (ja) 2017-01-11
EP3306761B1 (en) 2022-06-22
JPWO2016194556A1 (ja) 2017-06-22
CN107615603A (zh) 2018-01-19
WO2016194556A1 (ja) 2016-12-08

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