KR102392499B1 - Pick-up device - Google Patents

Abstract

The present invention relates to a pickup device in which the assembly structure of a pickup head is improved.
An object of the present invention is to provide a pickup device with an improved assembly structure of a pickup head capable of quickly, robustly and precisely assembling the pickup head of the element pickup unit.
An embodiment of the present invention for achieving the above object, the configuration of the pickup head is a head connection unit, and a fastening nut for fixedly connecting the head connection unit to the suction hollow shaft. It can be implemented by a pickup device having an improved pickup head assembly structure including a suction unit coupled to the lower surface of the head connection unit in an insertion and locking structure.

Description

Pickup device with improved assembly structure of pickup head {PICK-UP DEVICE}

The present invention relates to a pickup device, and more particularly, to a pickup device used in the manufacturing and assembling process of a semiconductor device, a pickup capable of assembling and using a pickup head applied to the pickup device more quickly, firmly and precisely It relates to a pickup device having an improved head assembly structure.

In general, in order to perform a manufacturing and assembling process of a device such as a semiconductor chip (hereinafter, referred to as “device”), a pick-and-place (Pick and place) in which a supplied device is picked up and moved to a desired location. ) process is essential.

In order to perform the pick-and-place process, a pickup device including a pickup head for gripping and picking up an element and a driving unit for reciprocally driving the pickup head in the vertical direction is used.

In general, a pickup device is a device that is installed in a pick-and-place device that picks up an element and then transports it and places it in a predetermined seating position to adsorb the element. It is divided into a vacuum adsorption method that picks up the device and a gripper method that picks up both sides of the device by gripping both sides of the device by a pair of grippers. For this purpose, the vacuum adsorption method by vacuum pressure is mainly used.

In addition, the driving unit for reciprocally driving the pickup head of the vacuum adsorption method or the gripper method up and down includes a pneumatic cylinder that drives the pickup shaft on which the pickup head is installed by vacuum pressure flowing in different paths, and pick-up by electricity It is classified into an electric actuator that drives the shaft.

In recent years, there is an urgent need for the development of a pickup device with high precision and strong durability for high integration and productivity improvement of semiconductor devices.

Republic of Korea Patent Registration No. 10-0976505 (Registered on August 11, 2010)

The present invention provides a pickup device with an improved assembly structure of a pickup head capable of quickly, robustly and precisely assembling and using the pickup head of the element pickup unit.

In addition, the present invention provides a pickup device having an improved assembly structure of a pickup head capable of vertical movement while rotating the element pickup unit.

In addition, the present invention provides a pickup device with an improved assembly structure of a pickup head capable of securing reliability for rotation and vertical movement of the element pickup portion.

In addition, the present invention provides a pickup device having an improved assembly structure of a pickup head capable of efficiently dissipating internal heat while having a closed structure.

The present invention for solving the above problems, a casing having a container-type body and a cover, a suction hollow shaft disposed outside of the container-type body, and an element pickup unit by assembling and connecting a pickup head to the end of the suction hollow shaft; , a moving module disposed inside the container-type body for rotation, raising or lowering of the suction hollow shaft and the pickup head, and the interior of the container-type body to provide a lifting or lowering force to the moving module A picker reciprocating drive unit disposed in connection with the moving module, and a suction block installed on the upper part of the casing to provide pneumatic pressure (here, pneumatic pressure includes positive or negative gas pressure) to the suction hollow shaft, and the moving module It may include an encoder supported as a base and connected to the suction hollow shaft to sense the rotation of the suction hollow shaft.

According to an embodiment of the present invention, a front stepped hole is formed in the cover toward the front of the linear motor, and the container-shaped body has a rear stepped hole is formed toward the rear of the linear motor, and the front stepped hole and a shielding plate for preventing electromagnetic coupling between a plurality of pickup modules by shielding a magnetic field generated from the linear motor may be installed in the rear stepped hole, respectively.

According to an embodiment of the present invention, the moving module includes a board connection part formed on one side of the moving module and coupled to the board of the picker reciprocating driving unit, and an extension frame formed on the other side of the moving module to serve as a base for installing the encoder. and a plurality of linear guides installed between the rear surface of the movable module and the container-type body based on a position between the extension frame and the substrate connection part, wherein the linear guides follow the movement direction of the suction hollow shaft They may be respectively disposed and may be spaced apart from each other so as to remain parallel to each other.

According to an embodiment of the present invention, the linear guides are respectively installed on the inner surface of the container-type body, and guide rails having different lengths are slidably coupled along each of the guide rails, and the moving module It may include a bogie block connected to each, and a linear scale sensor installed on the container-type body based on the upper portion of the guide rail having a shorter length among the guide rails.

According to an embodiment of the present invention, the moving module includes a bearing block for rotatably supporting the suction hollow shaft, a spring contact formed on the bottom surface of the moving module based on a peripheral position of the bearing block, and the spring contacting portion. It may include a spring in contact with the spring, and a spring guide installed at the bottom of the container-shaped body to guide the compression or extension of the spring.

According to an embodiment of the present invention, the pickup head includes a head connection unit, a fastening nut for fixedly connecting the head connection unit to a suction hollow shaft, and a suction unit coupled to the lower surface of the head connection unit in an insertion and engaging structure. may include

According to an embodiment of the present invention, the head connection unit includes an elastic compression piece on an upper surface, a pressure fastening tube on a lower surface of the elastic compression piece, and a locking fixture having an assembly position confirmation groove on the lower surface of the pressure tightening tube and , It may include a fastening guide pipe having an elastic engaging fastening groove and a sealing ring fastening groove formed on the lower surface of the engaging fixture.

According to an embodiment of the present invention, the locking fixture may include a pair of fastening state checking parts having a locking hole and a locking hole on the left and right outer diameter surfaces around the assembly position check groove.

According to an embodiment of the present invention, the adsorption unit has a fastening pipe insertion hole passing through the inner central part. A pair of elastic engaging pieces formed on the left and right sides of the inner diameter of the fastening tube insertion hole. A pair of locking piece installation grooves formed in a symmetrical division structure on the left and right sides of the outer diameter of the adsorption unit, and the pair of locking piece installation grooves, based on the pair of locking piece installation grooves, as a position to divide the left and right equally It may include an assembly position indicating groove formed in the center of the lower outer diameter of the adsorption unit, and an element adsorption tube that vertically protrudes below the adsorption unit and is connected through the fastening tube insertion hole.

According to an embodiment of the present invention, the adsorption unit may include a fastening confirmation protrusion that protrudes and extends in a spherical shape on both sides of the left and right sides of the top surface.

According to the above-described problem solving means of the present invention, the configuration of the pickup head is combined with a head connection unit, a fastening nut for fixedly connecting the head connection unit to a suction hollow shaft, and a lower surface of the head connection unit and an insertion engaging structure. By forming the adsorption unit, the connection and assembly operation of the pickup head can be performed more quickly, firmly and precisely.

1 is a perspective view of a pickup device according to an embodiment of the present invention;
Fig. 2 is a cross-sectional view taken along line AA shown in Fig. 1;
Fig. 3 is an exploded perspective view of the pickup device shown in Fig. 1;
Figure 4 is an exploded perspective view for explaining the coupling relationship of the encoder shown in Figure 3;
Fig. 5 is a cross-sectional view taken along line BB shown in Fig. 4;
Fig. 6 is an internal front view for explaining the operation relationship of the pickup device shown in Fig. 1;
7 is an exploded perspective view of a pickup head applied to the present invention;
8 is an exploded cross-sectional view of a pickup head applied to the present invention;
9 is a coupling state diagram showing the assembly relationship of the pickup head applied to the present invention;

Advantages and features of the present invention and methods of achieving them will become apparent with reference to the embodiments described below in detail in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but will be implemented in a variety of different forms, and only these embodiments allow the disclosure of the present invention to be complete, and common knowledge in the technical field to which the present invention belongs It is provided to fully inform the possessor of the scope of the invention, and the present invention is defined by the description of the claims.

On the other hand, the terms used herein are for the purpose of describing the embodiments and are not intended to limit the present invention. Also, an embodiment may include applications. In addition, in this specification, the singular also includes the plural unless otherwise specified in the phrase. As used herein, “comprises” and/or “comprising” refers to the presence of one or more other components, steps, operations and/or elements in a referenced element, step, operation and/or element. or addition is not excluded. Hereinafter, embodiments or applications of the present invention will be described in detail with reference to the accompanying drawings.

Hereinafter, a pickup device in which the assembly structure of the pickup head is improved will be described with reference to the accompanying drawings.

1 is a perspective view of a pickup device according to an embodiment of the present invention, Figure 2 is a cross-sectional view taken along the line A-A shown in Figure 1, Figure 3 is an exploded perspective view of the pickup device shown in Figure 1, Fig. 4 is an exploded perspective view for explaining the coupling relationship of the encoder shown in FIG. 3, FIG. 5 is a cross-sectional view taken along the line B-B shown in FIG. 4, and FIG. 6 is the operation relationship of the pickup device shown in FIG. It is an internal front view for explanation, FIG. 7 is an exploded perspective view of a pickup head applied to the present invention, FIG. 8 is an exploded cross-sectional view of a pickup head applied to the present invention, and FIG. 9 is an assembly relationship of a pickup head applied to the present invention It is a diagram showing the bonding state.

As shown in FIGS. 1 and 5 , the pickup device in which the assembly structure of the pickup head according to the embodiment of the present invention is improved is largely a sealed casing 100 , a picker reciprocating driving unit 200 , a moving module 300 , and an element. It may be composed of a pickup unit 400 , a suction block 500 , and a circuit unit 600 .

Specifically, the pickup device having an improved assembly structure of the pickup head in the embodiment of the present invention includes a sealed casing 100 having a container-type body 110 and a cover 120, disposed on the outside of the container-type body 100, That is, the suction hollow shaft 410 protruding to the outside and the pickup head 420 to pick up the device (semiconductor device) at the end of the suction hollow shaft 410 are assembled and connected to the device pickup unit 400, the suction hollow shaft ( 410) and the pick-up head 420 for rotation, lifting or lowering of the container-shaped body 110 to provide a lifting or lowering force to the moving module 300 and the moving module 300 disposed inside the container-shaped body 110. To provide pneumatic pressure (here, pneumatic pressure includes positive or negative pressure of gas) to the picker reciprocating drive unit 200 and the suction hollow shaft 410 disposed in connection with the moving module 300 based on the inside of 110 An encoder 430 that is supported based on the suction block 500 and the movement module 300 installed on the upper part of the sealed casing 100 and is connected to the suction hollow shaft 410 to sense the rotation of the suction hollow shaft 410, etc. may include

In addition, the pickup device may include a connector 610 coupled to the upper portion of the sealed casing 100 to connect the circuit unit 600 mounted inside the container-type body 110 and an external device (not shown).

In the embodiment of the present invention, the sealed casing 100 of the pickup device has a thin rectangular parallelepiped shape as a whole and may be made of an aluminum material with high thermal conductivity, and the container-type body 110 and the cover 120 are combined and the suction hollow shaft ( It may have a closed structure by the vibration-proof members 10 and 20 installed on the container-shaped body 110 so as to be adjacent to both ends of the 410 . Here, a pair of anti-vibration members 10 and 20 may be installed in the coupling grooves 12 and 22 of the container body 110 formed at positions corresponding to both ends of the suction hollow shaft 410, and the suction hollow shaft It may be inserted and coupled to the 410 .

A portion of the container-shaped body 110 and the cover 120, that is, a region corresponding to the space in which the picker reciprocating driving unit 200 is mounted, may be provided with open front and rear stepped holes 121 and 125. The front and rear shielding plates 130 and 140 may be inserted and coupled to these front and rear stepped holes 121 and 125 . Here, in the embodiment of the present invention, the depth of the stepped hole 121 may correspond to the thickness of the front and rear shielding plates 130 and 140 .

The front shielding plate 130 may be disposed in the front stepped hole 121 of the cover 120 facing the front of the picker reciprocating driving unit 200 .

The rear shielding plate 140 may be disposed in the rear stepped hole 125 of the body 110 facing the rear of the picker reciprocating driving unit 200 .

In an embodiment of the present invention, the front shielding plate 130 and the rear shielding plate 140 may shield the magnetic field generated from the picker reciprocating driving unit 200 to prevent electromagnetic coupling between the plurality of pickup devices.

Meanwhile, in the embodiment of the present invention, the rear shielding plate 140 and the front shielding plate 130 may include a plurality of grooves 131 and 141 .

These grooves 131 and 141 increase the surface area of the front shielding plate 130 and the rear shielding plate 140 to increase cooling efficiency, and relatively reduce the weight of the front shielding plate 130 and the rear shielding plate 140 . has the effect of making

The picker reciprocating driving unit 200 may include a mover 230 such as an electromagnet coil disposed between a pair of stators 210 and 220 made of a plurality of magnet plates. Here, one stator 210 of the pair of stators 210 and 220 is installed in the edge portion 118 of the step hole 125 on the rear surface of the container-shaped body 110, and the other stator 220 is of the container-type body 110 . It may be installed on the mounting end 119 of the body 110 .

In the embodiment of the present invention, the picker reciprocating driving unit 200 generates a thrust in a straight direction by a pair of stators 210 and 220 and a mover 230 according to a signal applied from the circuit unit 600. Magnetic levitation linear It may be a motor.

In addition, the mover 230 may be mounted on the substrate 231 , and may be coupled to the substrate connection part 301 formed on one side of the movement module 300 .

On the other hand, the picker reciprocating driving unit 200 is connected to the circuit unit 600 and generates a moving force according to a signal applied from the circuit unit 610 to move the moving module 300 connected to the mover 230 in the vertical direction (Z-axis direction). can be raised or lowered. Accordingly, the driving motor 350, the motor bracket 340, the driving gear 360, the driven gear 370, the bearing 371 and the element pickup unit 400 connected to the moving module 300 are raised or lowered. can

In order to raise or lower the moving module 300 and the element pickup unit 400 according to the driving of the picker reciprocating driving unit 200, the moving module 300 according to an embodiment of the present invention is a picker reciprocating driving unit 200 on one side thereof. ) is formed with a substrate connection portion 301 connected to the substrate 231, and an extension frame 304 is formed on the other side.

In addition, the moving module 300 may include a plurality of linear guides 310 and 320 installed on the body 110 based on a position between the substrate connection part 301 and the extension frame 304 .

The linear guides 310 and 320 may be respectively disposed along a vertical direction and spaced apart from each other to maintain parallel to each other.

Each of the linear guides (310, 320) is a guide rail (311, 321) installed on the inner surface of the container-type body (110), and sliding along each of the guide rails (311, 321) (moving in the vertical direction) is possible As a coupled state, it may include the bogie blocks 312 and 322 respectively connected to the moving module 300 .

The linear guides 310 and 320 as described above not only move in the vertical direction of the moving module 300 , but also various parts to be mounted based on the load of the moving module 300 and the moving module 300 , such as a mover, a substrate, and a drive By distributing and supporting the load of the motor, encoder, bearing, element pickup unit, etc., the movement of the element pickup unit 400 according to the lifting or lowering can be reliably guided.

Meanwhile, the moving module 300 may include a bracket installation unit 306 and a motor space unit 307 .

Through the structure of the moving module 300 , the driving motor 350 and the driving gear 360 axially coupled to the rotation shaft of the driving motor 350 are disposed in the motor space 307 , and the motor of the driving motor 350 . The housing may be coupled to one side of the motor bracket 340 .

The other side of the motor bracket 340 may be coupled to the bracket installation part 306 of the moving module 300 .

As described above, the driving motor 350 and the driving gear 360 are disposed in the motor space 307 of the moving module 300 , and the bracket installation unit 306 and the motor bracket 340 of the moving module 300 . By coupling the other side of the picker reciprocating driving unit 200, the driving motor 350 and the driving gear 360 may be raised or lowered together with the moving module 300 that is raised or lowered by the reciprocating driving unit 200.

The rotation shaft of the driving motor 350 may be axially coupled to the driving gear 360 , and the driving gear 360 may be meshed with the driven gear 370 .

In addition, the driven gear 370 operating according to the driving gear 360 may be axially coupled to the suction hollow shaft 410 of the element pickup unit 400 .

A plurality of bearings 371 may be installed in the section hollow shaft 410 based on a lower position of the driven gear 370 .

The outer ring of the plurality of bearings 371 is coupled to the bearing block 302 of the moving module 300 , and the inner ring of each bearing 371 is coupled to the outer circumferential surface of the suction hollow shaft 410 of the suction hollow shaft 410 . rotation can be supported.

Therefore, since the suction hollow shaft 410 and the driven gear 370 are mounted on the moving module 300 in a rotatable state by the bearing 371 of the bearing block 302 of the moving module 300, the suction hollow shaft 410 , the pickup head 420 , the element pickup unit 400 including the encoder 430 , and the driven gear 370 may also be raised or lowered together with the moving module 300 .

In the embodiment of the present invention as described above, the suction hollow shaft 410 may have a cylindrical shape formed to be elongated as a whole, and may be disposed to be reciprocally movable inside the container-type body 110 . In addition, one end of the suction hollow shaft 410 is exposed from the container-shaped body 110 so as to pick up the device, and the pickup head 420 for picking up the device by directly contacting the device at one end exposed to the outside is disposed. can

Here, in particular, the pickup head 420 includes, as shown in FIG. 7 , a head connection unit 1 and a fastening nut N for fixing and connecting the head connection unit to the suction hollow shaft 410, and the It can be formed as an adsorption unit (2) coupled to the lower surface of the head connection unit (1) and an insertion and locking structure.

In addition, in the pickup head 420, the head connection unit 1, as shown in FIG. 7, the elastic compression piece 11 cut and divided in a circular taper structure on the upper surface, and the elastic compression piece 11 ) A pressure fastener 12 having a male screw structure on the lower surface, an octagonal structure on the lower surface of the pressure fastener 12, and an assembly position confirmation groove 131 is formed in the center of the outer surface taking the octagonal structure A locking fixture 13, and extending vertically to the center of the lower surface of the locking fixture 13, an elastic locking fastening groove 141 is formed on the upper side of the extended outer diameter surface, and a sealing ring fastening groove ( The fastening guide pipe 14 formed with 142 may be included in an integrated structure.

Here, the locking fixture 13 taking the octagonal structure has a fastening confirmation hole (H) on the left and right outer diameter surfaces with the assembly position confirmation groove (131) as a center, and a circle on the inner lower surface of the fastening confirmation hole (H). It is possible to further form a pair of fastening state checking unit 132 provided with a through-structure engaging hole (P).

In addition, in the pickup head 420, the adsorption unit 2, as shown in FIG. 7, a fastening pipe insertion hole 21 penetrating through a vertical multi-stage structure with different inner diameters in the inner central part, and the fastening pipe A pair of elastic locking pieces 22 formed in a symmetrical division structure on the upper left and right sides of the inner diameter part of the insertion hole 21, and the elastic locking pieces 22 on the left and right sides of the outer diameter of the suction unit 2 are assembled For installation, a pair of locking piece installation grooves 23 formed in a symmetrical division structure and a pair of locking piece installation grooves 23 formed in the left and right divisions are used as a reference, and the pair of locking piece installation grooves 23 are left , An assembly position indication groove 24 formed in the center of the upper outer diameter of the adsorption unit 2 as a position to evenly divide the right, and the adsorption unit 2 vertically protrude to the lower center and penetrate the fastening pipe insertion hole 21 The connected element adsorption tube 25 may be included in an integrated structure.

Here, the adsorption unit 2, as shown in FIG. 7, may further form a fastening confirmation locking protrusion 26 protruding and extending in a spherical shape on both sides of the upper left and right sides.

In the embodiment of the present invention as described above, the pickup head 402, as shown in FIG. 9 or FIG. 10, inserts the elastic compression piece 11 into the outer diameter of the end of the suction hollow shaft 410, and a fastening nut (N) can be connected to the pressure fastening tube 12 by fastening the head connection unit 1 to the suction hollow shaft 410 .

As described above, the head connection unit 1 connected to the end of the suction hollow shaft 410 is coupled with the suction unit 2 by an assembly method in which the coupling guide pipe 14 is inserted into the coupling pipe insertion hole 21. can

The fastening guide pipe 14 inserted into the fastening pipe insertion hole 21 may be provided with a firm coupling and fixing force by a structure in which the elastic latching piece 22 is pressed into the elastic latching fastening groove 141 .

When the head connection unit 1 and the adsorption unit 2 are coupled by the insertion and fastening structure of the coupling guide pipe 14 and the coupling pipe insertion hole 21, the assembly position confirmation groove formed by the head connection unit 1 (1) 131) and the assembly position indicating groove 24 formed of the adsorption unit 2 are positioned on the same line, so that the head connection unit 1 and the adsorption unit 2 can be easily coupled.

In addition, in the embodiment of the present invention as described above, the fastening confirmation locking protrusion 26 formed of the adsorption unit 2 is, as shown in FIG. 10, a locking fixture 13 provided as the head connection unit 1 . In this, it passes through the locking hole P of the fastening state checking unit 132 and may be coupled to a structure in which it protrudes and locks into the fastening check hole (H).

The linear scale sensor 800 is installed in the container-type body 110 of the sealed casing 100 so as to measure the amount of movement according to the ascending or descending of the movement module 300 .

For example, the linear scale sensor 800 is installed in the container body 110 based on the upper part of the guide rail 322 having a shorter length among the guide rails 311 and 321 to measure the moving distance of the moving module 300 and , the measured movement distance value may be provided to the circuit unit 600 .

The moving module 300 includes a spring contact portion 303 formed on the lower surface of the moving module 300 based on the position on the left side of the bearing block 302 , that is, the peripheral position of the bearing block 302 , and the bearing block 302 . It includes an extension frame 304 of a free end structure that protrudes along the longitudinal direction of the moving module 300 based on the position on the right side.

The spring 700 may be in contact with the spring contact portion 303 of the moving module 300 .

The spring 700 may be inserted into the spring guide 710 connected to the bottom of the container body 110 of the sealed casing 100 , and elastically support the moving module 300 through the spring contact part 303 .

In addition, the spring 700 is connected to the bottom of the container-shaped body 110 through the spring guide 710 to prevent static electricity generated by the suction hollow shaft 410 during vertical vertical movement of the suction hollow shaft 410 . It can be delivered to the container-type body 110 and released to the outside.

In an embodiment of the present invention, the spring guide 710 may be installed at the bottom of the body 110 to guide the compression or tension of the spring 700 .

The encoder 430 is an encoder mount 433 connected based on the extension frame 304 of the moving module 300, an encoder sensor 436 installed based on the encoder mount 433, and an encoder sensor 436 It includes an encoder wheel 437 coupled to the suction hollow shaft 410 based on a position that can be sensed by the .

A connecting end portion 433 is formed on one side of the encoder mount 432 , a vertical gap maintaining portion 435 is formed on the other side, and a bearing hole 434 is formed on the bottom surface.

Here, the encoder bearing 431 is coupled to the bearing hole 434 of the encoder mount 432 so as to rotatably support the suction hollow shaft 410 .

Therefore, the encoder sensor 436 of the encoder mount 432 precisely senses the encoder wheel 437, as a result, the rotation angle of the suction hollow shaft 410 and the pickup head 420 can be accurately measured.

A process in which the pickup device having the above-described configuration operates will be described with reference to FIG. 6 .

As shown in FIG. 6 , when a signal generated from the circuit unit 600 according to a signal applied from an external device is applied to the picker reciprocating driving unit 200 , the moving module 300 connected to the picker reciprocating driving unit 200 is a bogie It may rise or fall along the guide rails 312 and 322 coupled to the blocks 311 and 321 .

When the moving module 300 moves upward or downward, the driving motor 350 connected to the moving module 300, the driving gear 360, the driven gear 370, and the extension frame 304 of the moving module 300 are on The encoder 430 connected to may move up or down together.

In addition, the driving gear 360 may be rotated by the driving motor 350 driven according to a signal applied from the circuit unit 600 , and the driven gear 370 meshed with the driving gear 360 may rotate. In this case, the peer gear 370 may rotate the suction hollow shaft 410 of the element pickup unit 400 .

As described above, the driving motor 350, the driving gear 360 and the driven gear 370 are provided along with the upward and downward movement of the moving module 300 by the linear driving force generated by the picker reciprocating driving unit 200. The suction hollow shaft 410 of the device pickup unit 400 may be rotationally driven around the axis according to the rotational driving force used.

The moving distance of the moving module 300 may be measured by the linear scale sensor 800 and applied to the circuit unit 600 , and the rotation value of the suction hollow shaft 410 is sensed by the encoder 430 and the circuit unit 600 ) can be approved.

In addition, the circuit unit 600 provides a movement distance and rotation value to an external device (not shown) connected through the connector 610 to receive a predetermined control signal from the external device to receive the suction hollow shaft of the element pickup unit 400 . It is possible to precisely control the vertical movement of the 410 and the rotation of the suction hollow shaft 410 .

The above description of the present application is for illustration, and those of ordinary skill in the art to which the present application pertains will understand that it can be easily modified into other specific forms without changing the technical spirit or essential features of the present application. Therefore, it should be understood that the embodiments described above are illustrative in all respects and not restrictive. For example, each component described as a single type may be implemented in a dispersed form, and likewise components described as distributed may be implemented in a combined form.

The scope of the present invention is indicated by the following claims rather than the above detailed description, and all changes or modifications derived from the meaning and scope of the claims and their equivalent concepts should be construed as being included in the scope of the present application. .

100: casing 200: picker reciprocating driving unit
300: mobile module 400: element pickup unit
500: suction block 600: circuit part
402: pickup head 1: head connection unit
2: adsorption unit 11: elastic compression piece
12: pressure fastener 13: locking fixture
14: fastening guide pipe 21: fastening pipe insertion hole
22: elastic locking piece 23: locking piece installation groove
24: assembly position indication groove 25: element adsorption tube
26: Tightening confirmation stumbling block

Claims (5)

A sealed casing 100 having a container-shaped body 110 and a cover 120;
an element pickup unit 400 formed of a suction hollow shaft 410 protruding to the outside of the container body 110 and a pickup head 420 assembled to an end of the suction hollow shaft 410;
a moving module 300 disposed inside the container-shaped body 110;
a picker reciprocating driving unit 200 disposed and connected to the moving module 300;
In the pickup device comprising a suction block (500) installed on the upper portion of the sealed casing (100),
The pickup head 420 includes a head connection unit (1);
a fastening nut (N) for fixing and connecting the head connection unit (1) to the suction hollow shaft;
It is formed of an adsorption unit (2) coupled to the lower surface of the head connection unit (1) in an insertion and locking structure,
The head connection unit (1) includes an elastic compression piece (11) cut and divided in a circular tapered structure on the upper surface;
a compression fastening pipe 12 having a male screw structure on the lower surface of the elastic compression piece 11;
a locking fixture 13 having an octagonal structure on the lower surface of the pressure coupling tube 12 and forming an assembly position confirmation groove 131 in the center of the outer surface taking the octagonal structure;
The fastening guide pipe extending vertically to the center of the lower surface of the engaging fixture 13, forming an elastic engaging fastening groove 141 on the upper side of the extended outer diameter surface, and forming a sealing ring fastening groove 142 on the lower side of the outer diameter surface (14) A pickup device with an improved assembly structure of the pickup head, characterized in that it is formed. delete The method of claim 1 ;
The locking fixture 13 taking the octagonal structure has a fastening confirmation hole (H) on the left and right outer diameter surfaces with the assembly position confirmation groove 131 as the center, and a circular through structure on the inner lower surface of the fastening confirmation hole (H). A pickup device with an improved assembly structure of the pickup head, characterized in that it further comprises a pair of fastening state checking units 132 provided with a locking hole (P) of the pickup head. The method of claim 1 ;
The adsorption unit 2 includes a fastening pipe insertion hole 21 having a different inner diameter and penetrating through the vertical multi-stage structure in the inner central portion;
a pair of elastic locking pieces 22 formed in a symmetrical division structure on the upper left and right sides of the inner diameter portion of the fastening pipe insertion hole 21;
A pair of locking piece installation grooves 23 formed in a symmetrical division structure for assembling and installing the elastic locking piece 22 on the left and right sides of the outer diameter of the adsorption unit (2);
Formed in the center of the upper outer diameter of the adsorption unit 2 as a position to divide the pair of locking piece installation grooves 23 equally to the left and right based on the left and right paired locking piece installation grooves 23 Assembly position display groove 24 and;
A pickup device with an improved assembly structure of the pickup head, characterized in that it is formed of an element adsorption tube (25) that vertically protrudes toward the lower center of the adsorption unit (2) and is connected through the fastening tube insertion hole (21). 5. The method of claim 4;
The adsorption unit (2) forms a fastening confirmation locking protrusion 26 protruding and extending in a spherical shape on both sides of the upper left and right sides;
The fastening confirmation locking protrusion 26 of the adsorption unit 2, in the locking fixture 13 provided as the head connection unit 1, passes through the locking hole P of the fastening state checking part 132 and is fastened. A pickup device with an improved assembly structure of the pickup head, characterized in that it is coupled in a structure that is protruded and caught by the confirmation hole (H).

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