KR20220156517A - elevating device - Google Patents

Abstract

The lifting device 1 includes a first base portion 10, a second base portion 40, first rails 21A and 21B, first sliders 61A and 61B, and a first stator module ( 31), a plurality of first magnets 51, a table 70, second rails 22A and 22B, second sliders 62A and 62B, a second stator module 32, and a plurality of It includes a second magnet 52 of.

Description

elevating device

The present disclosure relates to a lift device. This application claims priority based on Japanese Patent Application No. 2020-062407 filed on March 31, 2020, and incorporates all contents described in the Japanese Patent Application.

A first base part, a second base part having an inclined surface, a first drive mechanism installed between the first base part and the second base part and moving the second base part in the horizontal direction, a table, and a table and a second base part. BACKGROUND ART There is known a lifting device provided between two base parts and having a second drive mechanism for moving a table along an inclined surface (for example, refer to Patent Literature 1). In Patent Literature 1, the first drive mechanism and the second drive mechanism are ball screws including a screw shaft and a nut movable in conjunction with rotation of the screw shaft.

Patent Document 1: Japanese Unexamined Publication No. 6-53042

In the lifting device of Patent Document 1, since the first driving mechanism and the second driving mechanism are ball screws, the cross-sectional height of the lifting device (the lifting device in the direction perpendicular to the installation surface on which the lifting device is installed) height) may increase. In the lifting device, it is preferable that the cross-sectional height of the lifting device is reduced, that is, one capable of achieving compactness. Then, one of the objects is to provide an elevating device capable of achieving compactness.

An elevating device according to the present disclosure includes a first base portion having a planar first surface, a planar second surface facing the first surface, and a first base portion in a direction perpendicular to the first surface. A second base portion disposed opposite to the second surface in the direction and including a planar third surface inclined with respect to the first surface, fixed to the first surface or the second surface, and extending in a straight line. A first rail, a first slider fixed to a surface on which the first rail is not fixed, and a first slider capable of traveling on the first rail, and fixed to the first or second surface, A first stator module having a plurality of first coils arranged side by side along a first rail, fixed to a surface on which the first stator module is not fixed, of the first surface and the second surface, and facing the plurality of first coils In addition, a table including a plurality of first magnets arranged side by side so that the direction of the magnetic field is alternately reversed, and a fourth surface of a planar shape opposite to the third surface; Or a second fixed to the fourth surface, extending in a straight line so as to be inclined with respect to the first surface, and extending parallel to the first rail in a projected image projected on a virtual plane perpendicular to the first direction. A second slider fixed to a surface on which the second rail is not fixed, among the third and fourth surfaces, and a second slider capable of traveling on the second rail, and fixed to the third or fourth surface, the second rail A second stator module having a plurality of second coils disposed side by side along the , and among the third and fourth surfaces, the second stator module is fixed to a non-fixed surface, and faces the plurality of second coils. , and a plurality of second magnets arranged side by side so that the direction of the magnetic field is alternately reversed.

According to the above lifting device, compactness can be achieved.

[Fig. 1] Fig. 1 is a schematic perspective view showing the structure of an elevating device.
[Fig. 2] Fig. 2 is a schematic front view showing the structure of an elevating device.
[Fig. 3] Fig. 3 is a schematic side view showing the structure of an elevating device.
[Fig. 4] Fig. 4 is a schematic perspective view showing the structure of the lifting device in a state where the second support part, the third support part, the second rail, the second slider, the second stator module, the second magnet, and the table are removed. .
[Fig. 5] Fig. 5 is a schematic perspective view showing the structure of the lifting device in a state in which the first magnet, the second base part, the second rail, the second slider, the second stator module, the second magnet and the table are removed. to be.
[Fig. 6] Fig. 6 is a schematic perspective view showing the structure of the lifting device in a state where the second slider, the second magnet, and the table are removed.
[Fig. 7] Fig. 7 is a schematic perspective view showing the structure of the elevating device in a state where the first base part, the first rail, the first slider, the first stator module, and the first magnet are removed.
[Fig. 8] Fig. 8 is a schematic perspective view showing the structure of the lifting device in a state in which the first base part, the first rail, the first slider, the first stator module, and the first magnet are removed.
[Fig. 9] Fig. 9 is a schematic perspective view showing the structure of the lifting device in a state where the first base part, the first rail, the first slider, the first stator module, the first magnet, and the second part are removed.
[Fig. 10] Fig. 10 is a schematic perspective view showing the structure of the lifting device in a state where the first base part, the first rail, the first slider, the first stator module, the first magnet, the second magnet and the table are removed. to be.
[Fig. 11] Fig. 11 is a block diagram showing an electrical connection state of the lifting device.
[Fig. 12] Fig. 12 is a schematic front view showing a state in which the lifting device is moving up and down.
[Fig. 13] Fig. 13 is a schematic front view showing a state in which the lifting device is moving up and down.

[Overview of Embodiments]

Embodiments of the present disclosure are first listed and described. An elevating device of the present disclosure includes a first base portion having a planar first surface, a planar second surface opposite to the first surface, and a second base unit in a first direction perpendicular to the first surface. A second base portion disposed on the opposite side of the surface and including a third flat surface inclined with respect to the first surface, a first rail fixed to the first surface or the second surface and extending in a straight line; , among the first and second surfaces, a first slider fixed to a surface on which the first rail is not fixed and capable of traveling on the first rail, and a first slider fixed to the first or second surface and along the first rail A first stator module having a plurality of first coils arranged side by side, fixed to a surface on which the first stator module is not fixed, of the first surface and the second surface, and facing the plurality of first coils With, a plurality of first magnets arranged side by side so that the direction of the magnetic field is alternately reversed, and a table including a fourth surface of a planar shape opposite to the third surface, and fixed to the third or fourth surface, , Of the second rail extending in a straight line so as to be inclined with respect to the first surface and extending parallel to the first rail in a projected image projected on a virtual plane perpendicular to the first direction, and the third and fourth surfaces , a second slider fixed to a surface on which the second rail is not fixed and capable of traveling on the second rail, and a plurality of second coils fixed to the third or fourth surface and arranged side by side along the second rail The branches are fixed to the second stator module and the surface to which the second stator module is not fixed, of the third and fourth surfaces, facing the plurality of second coils and side by side so that the directions of the magnetic fields are alternately reversed. A plurality of second magnets are disposed.

In the lifting device of the present disclosure, by changing the direction of the current flowing through the first coil, the magnetic flux density between the first base and the first magnet is changed, and the second base extends in the direction in which the first rail extends. (e.g. horizontal direction). Further, by changing the direction of the current flowing through the second coil, the magnetic flux density between the second base portion and the second magnet is changed, and the table can move along the direction (inclination direction) in which the second rail extends.

Here, for example, if the lifting device is provided so that the first rail is parallel to the horizontal plane, the second rail is inclined with respect to the horizontal plane. When the inclination angle of the second rail with respect to the horizontal plane is θ (rad), when the table moves by the distance d with respect to the second base, the table moves by d × sin (θ) in the vertical direction and horizontally It moves by d×cos(θ) in the direction. At this time, the table is moved in the vertical direction without changing the position in the horizontal direction by moving the second base part by d × cos (θ) in a direction opposite to the horizontal movement direction of the table with respect to the first base part ( can be lifted).

By adopting such a configuration, the table can be raised and lowered without providing a linear guide device that moves the table along the vertical direction. Further, since the lifting device of the present disclosure does not use a ball screw as a driving source for driving the first slider or the second slider, the lifting device can be made compact. In this way, according to the lifting device of the present disclosure, it is possible to provide a lifting device capable of achieving compactness of the lifting device.

The elevating device has a shape extending along the second rail and includes a first end fixed to the second base and a second end fixed to the table, with respect to the second base, the table An elastic member capable of regulating relative movement so as to approach the first base portion may be further provided. By employing such a structure, it is possible to suppress the table from slipping down so as to approach the first base portion when power supply to the elevating device is stopped. Further, the tension of the elastic member applied to the table makes it easy to move the table away from the first base portion.

In the lifting device, the elastic member may be a spiral spring. The central axis of the spiral spring may be arranged so as to follow the direction in which the second rail extends. A spiral spring is suitable as an elastic member of an elevating device.

In the elevating device, the first connecting portion has a first through hole extending along the second rail and holds the first end of the elastic member, and the table while penetrating the first through hole. It is screwed together and may further include a screw for fixing the first connector to the table. By adopting such a structure, the position where the 1st connector is fixed with respect to the table can be adjusted along the direction in which the 2nd rail extends, and the tension of the elastic member applied to the table can be adjusted.

[Specific examples of embodiments]

Next, an example of a specific embodiment of the lifting device of the present disclosure will be described with reference to the drawings. In the following drawings, the same reference numerals are attached to the same or equivalent parts, and the description thereof will not be repeated.

1 is a schematic perspective view showing the structure of a lift device in one embodiment of the present disclosure. 1, the Y-axis direction is along the long side of the first surface, the X-axis direction is along the short side of the first surface, and the Z-axis direction is the direction perpendicular to the first surface (X-Y plane). to be. Fig. 2 is a schematic front view showing the structure of the lifting device. Fig. 3 is a schematic side view showing the structure of the lifting device. Fig. 4 shows the structure of the lifting device in a state where the second support part, the third support part, the second rail, the second slider, the second stator module, the second magnet, and the table are removed from the lifting device shown in Fig. 1. It is a schematic perspective view. In Fig. 4, a state in which some parts are partially cut is shown from the viewpoint of showing the internal structure. In Fig. 4, hatched regions correspond to cross sections. FIG. 5 shows the structure of the lifting device shown in FIG. 1 in a state in which the first magnet, the second base portion, the second rail, the second slider, the second stator module, the second magnet, and the table are removed. It is a schematic perspective view showing. FIG. 6 is a schematic perspective view showing the structure of the lifting device shown in FIG. 1 in a state where the second slider, the second magnet, and the table are removed. FIG. 7 is a schematic perspective view showing the structure of the lifting device shown in FIG. 1 in a state in which the first base portion, the first rail, the first slider, the first stator module, and the first magnet are removed. Fig. 8 is a perspective view corresponding to a state in which the first base part, the first rail, the first slider, the first stator module, and the first magnet are removed from the lifting device shown in Fig. 1, and viewed from a different viewpoint from Fig. 7; . 9 is a schematic diagram showing the structure of the lifting device shown in FIG. 1 in a state in which the first base portion, the first rail, the first slider, the first stator module, the first magnet, and the second part are removed. It is a perspective view. In Fig. 9, a state in which some parts are partially cut is shown from the viewpoint of showing the internal structure. In Fig. 9, hatched regions correspond to cross sections. FIG. 10 shows the structure of the lifting device shown in FIG. 1 in a state in which the first base portion, the first rail, the first slider, the first stator module, the first magnet, the second magnet, and the table are removed. It is a schematic perspective view showing.

1 to 4, the lifting device 1 in the present embodiment includes a first base portion 10, a second base portion 40, first rails 21A, 21B, First sliders 61A and 61B, a first stator module 31 and a plurality of first magnets 51 are provided. The lifting device 1 uses, as a drive source, a so-called linear motor using a coil and a magnet, which will be described later.

The first base portion 10 has a flat plate shape. The first base portion 10 includes a first surface 10A which is a rectangular flat surface. A plurality of screw holes 13 are formed on the outer edge of the first surface 10A at intervals along the Y-axis direction. On the first surface 10A, first rails 21A and 21B are fixed. The positions where the screw holes 212 of the first rails 21A and 21B are formed coincide with the positions where the screw holes (not shown) of the first base part 10 are formed, and the screws 211 are screwed together. , the first rails 21A and 21B are fixed to the first base portion 10. 1st rail 21A, 21B has a shape extending linearly. 1st rail 21A, 21B is arrange|positioned along the Y-axis direction. The 1st rail 21A and the 1st rail 21B are arrange|positioned at intervals in the X-axis direction.

Referring to Fig. 4, the first stator module 31 is fixed on the first surface 10A. The first stator module 31 includes a flat board 316 , a plurality of first coils 311 , a mold part 312 , a cord 313 , and a protective sheet 314 . The substrate 316 is disposed on the first surface 10A. The board 316 is arranged so that the position where the screw hole (not shown) of the board 316 is formed coincides with the position where the screw hole (not shown) of the first base part 10 is formed, and the screw 315 is The substrate 316 is fixed to the first base portion 10 by being screwed together. When viewed planarly from the Z-axis direction, the substrate 316 has a rectangular shape. A plurality of first coils 311 are disposed on the surface of the substrate 316 . The first coil 311 is an electromagnet. The plurality of first coils 311 are arranged side by side along the Y-axis direction. The first coil 311 has a flat annular shape. The central axis of the first coil 311 intersects the X-Y plane (perpendicular to the present embodiment). The plurality of first coils 311 are electrically connected to each other. The plurality of first coils 311 are arranged side by side so that when a current is applied to the plurality of first coils 311, the direction of the magnetic field of the first coils 311 is alternately reversed. The plurality of first coils 311 are electrically connected to the cord 313 via a connection portion. Cord 313 is electrically connected to an external power supply.

A mold portion 312 made of resin is disposed so as to cover the substrate 316 and the plurality of first coils 311 . The plurality of first coils 311 are fixed on the substrate 316 by the mold unit 312 . The material constituting the mold portion 312 is, for example, epoxy resin. A protective sheet 314 is disposed to cover the surface of the mold unit 312 . The protective sheet 314 is fixed to the mold part 312 by, for example, an adhesive. Along the short side of the first surface 10A, end plates 14 and 15 are disposed on the first surface 10A. By arranging the end plates 14 and 15, it is possible to suppress the protrusion of the second base portion 40 described later from the first base portion 10. The end plates 14 and 15 are arranged so that the positions where the screw holes (not shown) of the end plates 14 and 15 are formed coincide with the positions where the screw holes (not shown) of the first base part 10 are formed. , By screwing the screws 141 and 151, the end plates 14 and 15 are fixed to the first base portion 10. Referring to FIG. 2 , the end plates 14 and 15 have pads 14A and 15A. Referring to FIGS. 1 and 2 , a sensor 11 is provided at the center of the first base portion 10 in the Y-axis direction. The cord 11a of the sensor 11 is held by the support band 12 fixed to the 1st base part 10.

Referring to FIGS. 1 and 2 , the second base portion 40 includes a first support portion 41 , a second support portion 42 , and a third support portion 43 . The first support portion 41 has a flat plate shape. The first support portion 41 includes one surface 41A in the Z-axis direction and a surface 41B as a second surface disposed on the opposite side to the surface 41A. The surfaces 41A and 41B each have a rectangular shape. The surface 41B opposes the first surface 10A. The surface 41B is disposed parallel to the first surface 10A. The second support portion 42 is fixed to the first support portion 41 so as to contact the surface 41A of the first support portion 41 . The second support portion 42 has a square columnar shape. The second support portion 42 includes a side surface 42B contacting the surface 41A of the first support portion 41, a side surface 42A opposite to the side surface 42B in the Z-axis direction, and a side surface 42A. ) and side surfaces 42C and 42D connecting the side surface 42B. The side surface 42A is inclined with respect to the X-Y plane. 42 A of side surfaces have a planar shape. Referring to FIG. 3 , a concave portion 421 is formed on the side surface 42C of the second support portion 42 . Referring to FIGS. 1 and 2 , the third support portion 43 is fixed to the second support portion 42 so as to come into contact with the side surface 42A of the second support portion 42 . The third support portion 43 has a flat plate shape. The 3rd support part 43 includes the surface 43A as a 3rd surface arrange|positioned on the opposite side to the 2nd support part 42 in the thickness direction. The surface 43A has a rectangular shape. The surface 43A is arranged so as to be inclined with respect to the X-Y plane. The surface 43A is disposed on the side opposite to the surface 41B of the first support portion 41 when viewed from the second support portion 42 in the Z-axis direction. Referring to FIG. 6 , a plurality of screw holes 433 are formed on the outer edge of the surface 43A at intervals in the Y-axis direction. The third support part 43 is arranged so that the position where the screw hole 433 of the third support part 43 is formed coincides with the position where the screw hole (not shown) of the second support part 42 is formed, and the screw 422 ) is screwed into the screw hole 433.

Referring to FIG. 4 , a plurality of first magnets 51 are fixed to a surface 41B of the first support portion 41 so as to face the plurality of first coils 311 . The first magnet 51 is a permanent magnet. The first magnet 51 has a rectangular parallelepiped shape. The plurality of first magnets 51 are arranged side by side along the Y-axis direction so that the direction of the magnetic field is alternately reversed. More specifically, along the Y-axis direction, the surface of the side facing the first coil 311 is the N-pole magnetic pole of the first magnet 51, and the side facing the first coil 311 The first magnets 51, the surface of which is the magnetic pole of the south pole, are alternately arranged side by side. 4 and 5, a pair of first sliders 61A, 61B are fixed to the surface 41B of the first support portion 41 in two sets at intervals in the Y-axis direction. have. The first sliders 61A, 61B are arranged so that the positions where the screw holes 612 of the first sliders 61A, 61B are formed coincide with the positions where the screw holes 613 of the first support part 41 are formed, and the screws ( 611 is screwed together, so that the first sliders 61A and 61B are fixed to the first support part 41 . The first slider 61A and the first slider 61B are disposed with a plurality of first magnets 51 interposed therebetween. The first slider 61A can travel on the first rail 21A. The first slider 61B can run on the first rail 21B. In this embodiment, the two first sliders 61A and the two first sliders 61B are attached to the first support portion 41 . A linear scale 411 is fixed to the surface 41B of the first support portion 41 so as to face the sensor 11 .

6 to 9, the elevating device 1 includes second rails 22A and 22B, second sliders 62A and 62B, a second stator module 32, and a plurality of second magnets. (52) and a table (70) are further provided. The second rails 22A and 22B are disposed on the surface 43A of the third support portion 43 . The second rails 22A, 22B are arranged so that the positions where the screw holes 212 of the second rails 22A, 22B are formed coincide with the positions where the screw holes (not shown) of the third support portion 43 are formed. , 2nd rails 22A, 22B are fixed with respect to the 3rd support part 43 by screwing the screw 212 together. 2nd rail 22A, 22B has a shape extended in a straight line shape. The second rails 22A and 22B incline with the first surface 10A. In a projected image obtained by projecting the first rails 21A, 21B and the second rails 22A, 22B on the X-Y plane perpendicular to the Z-axis direction, the first rails 21A, 21B and the second rail (22A, 22B) are arranged in parallel. The 2nd rail 22A and the 2nd rail 22B are arrange|positioned at intervals in the X-axis direction. In this embodiment, the space|interval of the 2nd rail 22A and the 2nd rail 22B in the X-axis direction is the same as the space|interval of the 1st rail 21A and the 1st rail 21B. In Fig. 6, an arrow W is a direction along the direction in which the second rails 22A and 22B extend.

Referring to FIG. 9 , the second stator module 32 is fixed on the surface 43A of the third support 43 . The second stator module 32 includes a flat substrate 326, a plurality of second coils 321, a mold part 322, a cord 323, and a protective sheet 324. The substrate 326 is disposed on the surface 43A of the third support portion 43 . The board 326 is arranged so that the position where the screw hole (not shown) of the board 326 is formed coincides with the position where the screw hole (not shown) of the third support part 43 is formed, and the screw 325 is screwed. By being coupled, the substrate 326 is fixed with respect to the third support part 43 . A plurality of second coils 321 are disposed on the substrate 326 . The second coil 321 is an electromagnet. The plurality of second coils 321 are arranged side by side along the direction of the arrow W. The second coil 321 has a flat annular shape. The central axis of the second coil 321 intersects the surface 43A (orthogonal in this embodiment). The plurality of second coils 321 are electrically connected. The plurality of second coils 321 are arranged so that when a current is applied to the plurality of second coils 321, the direction of the magnetic field of the second coils 321 is alternately reversed. The plurality of second coils 321 are electrically connected to the cord 323 through a connection portion. Cord 323 is electrically connected to an external power supply.

A mold portion 322 made of resin is disposed so as to cover the substrate 326 and the plurality of second coils 321 . The plurality of second coils 321 are fixed on the substrate 326 by the mold unit 322 . The material constituting the mold portion 322 is, for example, epoxy resin. A protective sheet 324 is disposed to cover the surface of the mold part 322 . The protective sheet 324 is fixed to the mold part 322 by, for example, an adhesive. Along the short side of the face 43A of the third support 43, end plates 434 and 436 are disposed on the face 43A. By arranging the end plates 434 and 436, it is possible to suppress the table 70, which will be described later, from protruding from the third supporting portion 43. The end plates 434 and 436 are arranged so that the positions where the screw holes (not shown) of the end plates 434 and 436 are formed coincide with the positions where the screw holes (not shown) of the third support part 43 are formed, When the screws 435 and 437 are screwed together, the end plates 434 and 436 are fixed to the third support portion 43 . The end plates 434 and 436 each have pads 434A and 436A. A sensor 431 is provided in the center of the long side of the surface 43A of the third support portion 43 . The cord 431a of the sensor 431 is held by a support band 432 fixed to the third support portion 43 .

Referring to FIGS. 7 to 9 , the table 70 includes a first part 71 and a second part 72 . The first part 71 has a flat plate shape. The first part 71 includes one surface 71A in the thickness direction and a surface 71B as a fourth surface disposed on the opposite side to the surface 71A. The surfaces 71A and 71B have a rectangular shape. The surface 71B opposes the surface 43A of the third support portion 43 . The surface 71B is disposed parallel to the surface 43A. The second part 72 is fixed to the first part 71 so as to come into contact with the surface 71A of the first part 71 . The second part 72 is disposed so that the position where the screw hole 722 of the second part 72 is formed coincides with the position where the screw hole (not shown) of the first part 71 is formed, and the screw 721 By being screwed together, the second part 72 is fixed to the first part 71 . The second part 72 has a square columnar shape. The second portion 72 includes a side surface 72A opposite to the first portion 71 of the second portion 72 in the Z-axis direction. 72 A of side surfaces have a planar shape. 72 A of side surfaces are parallel to the X-Y plane.

Referring to FIG. 9 , a plurality of second magnets 52 are fixed to a surface 71B of the first portion 71 so as to face the plurality of second coils 321 . The second magnet 52 is a permanent magnet. The second magnet 52 has a rectangular parallelepiped shape. The plurality of second magnets 52 are arranged side by side along the direction of the arrow W so that the direction of the magnetic field is alternately reversed. More specifically, a second magnet 52 having an N-pole magnetic pole on the surface facing the second coil 321 and a S-pole magnetic pole on the surface facing the second coil 321 (52) are alternately arranged side by side. 9 and 10, a pair of second sliders 62A, 62B are fixed to the surface 71B of the first part 71. The positions where the screw holes (not shown) of the second sliders 62A and 62B are formed coincide with the positions where the screw holes 622 of the first part 71 are formed, and the screws 621 are screwed together. The second sliders 62A and 62B are fixed relative to the first part 71 . The second slider 62A and the second slider 62B are arranged with a plurality of second magnets 52 interposed therebetween. The second slider 62A can travel on the second rail 22A. The second slider 62B can travel on the second rail 22B. In this embodiment, the two second sliders 62A and the two second sliders 62B are attached to the first part 71 . A linear scale 711 is fixed to the surface 71B of the first part 71 so as to face the sensor 431 .

Referring to FIGS. 7 and 8 , the elevating device 1 further includes a screw spring 81 as an elastic member, a first connecting portion 82 , and a second connecting portion 83 . The 1st connection part 82 has a structure in which the steel plate was bent. The first connecting portion 82 includes a flat head 821, a flat connecting portion 822, and a flat bent portion 823. The connecting portion 822 is disposed along the Y-Z plane from the outer edge of the head 821 . The bent portion 823 is bent along the X-axis direction from the end of the connecting portion 822 on the opposite side to the head 821 . A through hole 82B penetrating in the thickness direction is formed in the bent portion 823 . The head 821 is formed with a first through hole 82A extending in the direction of an arrow W. The first connection portion 82 is arranged so that the position where the first through hole 82A of the first connection part 82 is formed coincides with the position where the screw hole (not shown) of the second part 72 is formed. By screwing the screw 84, the first connecting portion 82 is fixed with respect to the second part 72. The second connecting portion 83 has a structure in which a steel plate is bent. The second connecting portion 83 includes a flat plate-shaped portion 831 and a flat-shaped bent portion 832 disposed from the outer edge of the plate-shaped portion 831 along the Y-Z plane. A through hole 83A penetrating in the thickness direction is formed in the bent portion 832 . The second connecting portion 83 is disposed so that the position where the screw hole (not shown) of the plate-shaped portion 831 is formed coincides with the position where the screw hole (not shown) of the second support part 42 is formed, and the screw ( 85) is screwed together, so that the second connection portion 83 is fixed to the second support portion 42. At one end of the spiral spring 81, a first engaging portion 811 is formed. At the other end of the spiral spring 81, a second engaging portion 812 is formed. The first engagement portion 811 is inserted through the through hole 82B of the first connection portion 82 . The second engagement portion 812 is inserted into the through hole 83A of the second connection portion 83 . In this way, the helical spring 81 connects the first connecting portion 82 and the second connecting portion 83. The spiral spring 81 can restrict the relative movement of the table 70 in a direction opposite to the direction of the arrow W with respect to the second base portion 40 .

Referring to FIG. 11 , the lift device 1 further includes a control unit 80 . The controller 80 is electrically connected to the first coil 311 of the first stator module 31, the second coil 321 of the second stator module 32, and the sensors 11 and 431. . Referring to FIG. 2 , the control unit 80 controls the current flowing through the first coil 311 and the second coil 321 based on the output signals (position information) of the sensors 11 and 431, thereby The position in the Y-axis direction (position in the horizontal direction) of the two-base part 40 and the position in the direction of the arrow W of the table 70 (position in the inclined direction) are controlled. In Fig. 11, description of the sensors 11 and 431 is omitted for easy understanding of the contents shown.

Next, operation when the table 70 moves up and down will be described. For example, the elevating apparatus 1 is installed so that 1st rail 21A, 21B may become parallel to a horizontal surface. When the inclination angle of the second rails 22A and 22B with respect to the horizontal plane is θ (rad), when the table 70 moves by the distance d with respect to the second base portion 40, the table moves in the vertical direction d × sin ( It moves by θ) and moves by d×cos(θ) in the horizontal direction. At this time, the table 70 is moved horizontally by moving the second base part 40 in a direction opposite to the horizontal movement direction of the table 70 by d×cos(θ) with respect to the first base part 10. It can be moved (raised and lowered) in the vertical direction without changing the directional position.

Referring to FIG. 12, while moving the 2nd base part 40 in the direction of the arrow L ₁ , the lifting device 1 is controlled so as to move the table 70 in the direction of the arrow R ₁ . By doing in this way, the position of the table 70 in the Z-axis direction can be lowered. Referring to FIG. 13, while moving the _2nd base part 40 in the direction of arrow L2, the elevator apparatus 1 is controlled so that the table 70 may be moved in the direction of arrow _R2 . By doing in this way, the position in the Z-axis direction of the table 70 can be raised.

According to the lifting apparatus 1 in this embodiment, the table 70 can be raised and lowered, even if it does not install the linear motion guide apparatus which moves the table 70 along the vertical direction. In addition, since the lifting device of the present disclosure does not use a ball screw as a driving source for driving the first sliders 61A and 61B and the second sliders 62A and 62B, the lifting device 1 can be made compact. can do. Thus, according to the lifting device 1 in this embodiment, the lifting device 1 capable of achieving compactness is provided.

The lifting device 1 in this embodiment is applicable to a machine tool, various assembling devices, testing devices, semiconductor manufacturing devices, and the like. The lifting device 1 in this embodiment is applicable to a lifting device that lifts a table 70 on which a target object to be processed is placed in order to perform processing such as processing, assembling, or inspection. At this time, the side surface 72A of the second portion 72 of the table 70 serves as a mounting surface of the object to be processed.

In the above embodiment, the elevating device 1 includes a screw spring 81 . One end of the spiral spring 81 is held by the first connecting portion 82, and the other end is held by the second connecting portion 83. The central axis of the spiral spring 81 is arranged so as to follow the direction of the arrow W. By employing such a configuration, when the power supply to the lifting device 1 is stopped, the table 70 can be suppressed from sliding down so as to approach the first base portion 10 . Further, the tension of the helical spring 81 applied to the table 70 makes it easy to move the table 70 away from the first base portion 10 . In the above embodiment, the case where the helical spring 81 is employed as the elastic member has been described, but it is not limited to this, and rubber having a shape extending along the direction of the arrow W may be employed as the elastic member.

In the above embodiment, the elevating device 1 penetrates the first connecting portion 82 having the first through hole 82A extending along the direction of the arrow W and the first through hole 82A. It is screwed to the second part 72 and has a screw 84 for fixing the first connection part 82 to the second part 72 . By adopting such a configuration, the position at which the first connection portion 82 is fixed to the second portion 72 is adjusted along the direction of the arrow W, and the helical spring 81 applied to the second portion 72 Tension can be adjusted.

Further, in the above embodiment, the first rails 21A, 21B and the first stator module 31 are fixed on the first surface 10A of the first base portion 10, and the first sliders 61A, 61B And the case where the plurality of first magnets 51 are fixed on the surface 41B of the first support part 41 has been described, but it is not limited to this, and the first rails 21A and 21B and the first stator module 31 ) is fixed on the surface 41B of the first support part 41, and the first sliders 61A, 61B and the plurality of first magnets 51 are on the first surface 10A of the first base part 10. may be fixed. Further, in the above embodiment, the second rails 22A, 22B and the second stator module 32 are fixed on the surface 43A of the third support portion 43, and the second sliders 62A, 62B and a plurality of Although the case where the second magnet 52 is fixed on the surface 71B of the first part 71 of the table 70 has been described, it is not limited to this, and the second rails 22A, 22B and the second stator module 32 is fixed on the surface 71B of the first part 71, and the second sliders 62A, 62B and a plurality of second magnets 52 are fixed on the surface 43A of the third support part 43 It can be. In addition, the material constituting the mold parts 312 and 322 is not limited to epoxy resin, and a bulk molding compound (hereinafter referred to as BMC) can be employed. BMC is a material obtained by injection molding after mixing a reinforcing material, a filler and a curing agent with an unsaturated polyester resin.

In the above embodiment, the case where the table 70 is moved in the vertical direction without changing the position in the horizontal direction has been described, but it is not limited to this, and the second base portion ( By moving only 40, the table 70 can be moved along the Y-axis direction. In addition, a second table different from the table 70 is disposed at intervals in the Z-axis direction, a third rail disposed along the X-axis direction, a third slider capable of traveling on the third rail, and a third rail By attaching a third stator module having a plurality of third coils disposed along the , and a plurality of third magnets opposing the plurality of third coils, the lifting device 1 can be moved in the X-axis direction as well. .

It should be understood that the embodiments disclosed this time are examples in all respects and not restrictive in any way. The scope of the present invention is defined not by the above description, but by the claims, and it is intended that all changes within the meaning and scope equivalent to the scope of the claims are included.

1: elevating device, 10: first base portion, 10A: first surface, 11, 431: sensor, 11a, 313, 323, 431a: cord, 12, 432: support band, 13, 212, 433, 612, 613 , 622, 722: screw holes, 14, 15, 434, 436: end plate, 14A, 15A, 434A, 436A: pad, 21A, 21B: first rail, 22A, 22B: second rail, 31: first stator Module, 32: second stator module, 40: second base portion, 41: first support portion, 41A, 41B, 43A, 71A, 71B: surface, 42: second support portion, 42A, 42B, 42C, 42D, 72A: Side, 43: third support, 51: first magnet, 52: second magnet, 61A, 61B: first slider, 62A, 62B: second slider, 70: table, 71: first part, 72: second part, 80: control part, 81: screw spring, 82: first connection part, 82A: first through hole, 82B, 83A: through hole, 83: second connection part, 84, 85, 141, 151, 211, 212, 315 , 325, 422, 435, 437, 611, 621, 721: screw, 311: first coil, 312, 322: mold part, 314, 324: protection sheet, 316, 326: substrate, 321: second coil, 411 , 711: linear scale, 421: concave portion, 811: first engagement portion, 812: second engagement portion, 821: head, 822: connection portion, 823, 832: bent portion, 831: plate-shaped portion, L1, L2, R1 , R2, W: arrows, d: distance.

Claims (4)

A first base portion having a flat first surface;
A planar second surface facing the first surface and disposed on the opposite side to the second surface in a first direction perpendicular to the first surface, with respect to the first surface A second base portion including an inclined planar third surface;
a first rail fixed to the first surface or the second surface and extending in a straight line;
a first slider fixed to a surface to which the first rail is not fixed, among the first surface and the second surface, and capable of traveling on the first rail;
a first stator module fixed to the first surface or the second surface and having a plurality of first coils arranged side by side along the first rail;
Among the first surface and the second surface, the first stator module is fixed to a non-fixed surface, faces the plurality of first coils, and the direction of the magnetic field is alternately opposite. A plurality of first magnets arranged side by side so that
A table including a fourth surface of a planar shape opposite to the third surface;
In a projected image fixed to the third surface or the fourth surface, extending in a straight line so as to be inclined with respect to the first surface and projected on a virtual plane perpendicular to the first direction, the first a second rail extending parallel to the rail;
a second slider fixed to a surface to which the second rail is not fixed, among the third and fourth surfaces, and capable of traveling on the second rail;
a second stator module fixed to the third surface or the fourth surface and having a plurality of second coils arranged side by side along the second rail;
Among the third surface and the fourth surface, the second stator module is fixed to a surface where the second stator module is not fixed, and a plurality of pluralities arranged side by side so as to face the plurality of second coils and to have magnetic field directions alternately reversed. A lifting device comprising a second magnet of The method of claim 1,
It has a shape extending along the second rail, and includes a first end fixed to the second base and a second end fixed to the table, the table with respect to the second base An elevating device further comprising an elastic member capable of regulating relative movement so as to approach the first base portion. The method of claim 2,
The elastic member is a spiral spring,
The elevator apparatus of claim 1 , wherein a central axis of the spiral spring is arranged along a direction in which the second rail extends. According to claim 2 or claim 3,
a first connector having a first through hole extending along the second rail and holding the first end portion of the elastic member;
The lifting device further includes a screw that penetrates the first through hole and is screwed to the table and fixes the first connector to the table.

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